CN102759695B - A kind of method and device judging silico briquette quality - Google Patents
A kind of method and device judging silico briquette quality Download PDFInfo
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- CN102759695B CN102759695B CN201210237553.XA CN201210237553A CN102759695B CN 102759695 B CN102759695 B CN 102759695B CN 201210237553 A CN201210237553 A CN 201210237553A CN 102759695 B CN102759695 B CN 102759695B
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- 239000004484 Briquette Substances 0.000 title claims abstract description 241
- 238000000034 method Methods 0.000 title claims abstract description 69
- 238000009826 distribution Methods 0.000 claims abstract description 52
- 238000004458 analytical method Methods 0.000 claims description 14
- 238000006388 chemical passivation reaction Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005266 casting Methods 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000000126 in silico method Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013100 final test Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The embodiment of the invention discloses a kind of method judging silico briquette quality, comprising: scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette; Analyze the ratio that described full minority carrier life time distribution plan obtains the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody; The ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of described silico briquette.The embodiment of the invention also discloses a kind of device judging silico briquette quality.Adopt the present invention, the total quality of silico briquette can be judged more accurately, effectively reduce the output of poor efficiency silicon chip.
Description
Technical field
The present invention relates to area of solar cell, particularly relate to a kind of method and the device that judge silico briquette quality.
Background technology
In the detection of current casting polycrystalline silicon ingot, it is very important link that the minority carrier life time of silico briquette detects, and the size of minority carrier life time characterizes the electric property of silico briquette usually, after the silico briquette that minority carrier life time is low cuts into silicon chip, the conversion efficiency of solar cell manufactured is lower, is difficult to the user demand meeting user.
Detection mode in current production procedure judges the quality of silico briquette mainly through detecting minority carrier life time mean value, and judges the silico briquette required length removed end to end by the minority carrier life time mean value interval of setting.And to silico briquette remove head and afterbody be not suitable for break area after, good method is to can the quality of break area characterize.And, adopt in prior art and utilize the average minority carrier lifetime of silico briquette to be inaccurate to the quality characterizing silico briquette, still likely cause some second-rate silico briquettes to flow to the flow process of section.
Summary of the invention
Embodiment of the present invention technical matters to be solved is, provides a kind of method and the device that judge silico briquette quality.The total quality of silico briquette can be judged more accurately, effectively reduce the output of poor efficiency silicon chip.
In order to solve the problems of the technologies described above, embodiments provide a kind of method judging silico briquette quality, comprising: scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette;
Analyze the ratio that described full minority carrier life time distribution plan obtains the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody;
The ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of described silico briquette.
Wherein, obtain the step of full minority carrier life time distribution plan of described silico briquette at described scanning silico briquette before, also comprise:
Chemical passivation process is carried out to described silico briquette surface.
Wherein, the described full minority carrier life time distribution plan of described analysis obtain ratio in described silico briquette shared by low minority carrier life time and each from described silico briquette head to afterbody interval in the step of ratio of low minority carrier life time comprise:
Adjusting described full minority carrier life time distribution plan is gray-scale map, wherein, and the gray-scale value of shown gray-scale map zones of different and the life value one_to_one corresponding of few son;
Calculate the ratio of the ratio in described gray-scale map shared by different gray-scale value pattern and each the interval interior different gray-scale value pattern from described silico briquette head to afterbody, obtain the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
Wherein, the described full minority carrier life time distribution plan of described analysis obtain ratio in described silico briquette shared by low minority carrier life time and each from described silico briquette head to afterbody interval in the step of ratio of low minority carrier life time comprise:
The 2-D data of full minority carrier life time distribution is read from described full minority carrier life time distribution plan;
The ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody is calculated according to described 2-D data.
Wherein, the ratio of described ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges that the step of the quality of described silico briquette comprises:
Judge in each interval from described silico briquette head to afterbody, whether the ratio shared by described low minority carrier life time is less than proportion threshold value K;
If so, this interval then in described silico briquette, as well between quality area, retains described good quality interval and waits slice;
If not, then this in described silico briquette is interval between difference quality area, removes between described poor quality area.
Correspondingly, the embodiment of the present invention additionally provides a kind of device judging silico briquette quality, comprising:
Scan module, obtains the full minority carrier life time distribution plan of described silico briquette for scanning silico briquette;
Analysis module, obtains the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody for analyzing described full minority carrier life time distribution plan;
Judge module, judges the quality of described silico briquette for the ratio of low minority carrier life time in the ratio shared by minority carrier life time low in described silico briquette and each interval from described silico briquette head to afterbody.
Wherein, high precision is adopted to line by line scan when described scan module scans described silico briquette.
Wherein, it is gray-scale map that described scan module is further used for the described full minority carrier life time distribution plan of adjustment, wherein, the gray-scale value of shown gray-scale map zones of different and the life value one_to_one corresponding of few son, described analysis module is further used for calculating the ratio of the ratio in described gray-scale map shared by different gray-scale value pattern and each the interval interior different gray-scale value pattern from described silico briquette head to afterbody, obtains the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
Wherein, described analysis module, also for reading the 2-D data of full minority carrier life time distribution from described full minority carrier life time distribution plan, calculates the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody according to described 2-D data.
Wherein, described judge module is further used for judging in each interval from described silico briquette head to afterbody, whether the ratio shared by described low minority carrier life time is less than proportion threshold value K;
If so, this interval then in described silico briquette, as well between quality area, retains described good quality interval and waits slice;
If not, then this in described silico briquette is interval between difference quality area, removes between described poor quality area.
Implement the embodiment of the present invention, there is following beneficial effect:
The ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of silico briquette, replace the method judged according to average minority carrier lifetime in the past, judged result is more accurate, and filled up can the blank of break area quality characterization, effectively reduce the output of poor efficiency silicon chip; Ratio in silico briquette shared by low minority carrier life time and residing region is obtained by carrying out analytical calculation to the gray-scale map of full minority carrier life time distribution plan or 2-D data, for the accurate judgement of silico briquette quality provides foundation, and specify slice position accurately for follow-up section flow process; Detected by the silico briquette produced different process or process, the quality results according to the different silico briquettes finally obtained contrasts, and the process optimization produced for silico briquette provides direction, is conducive in subsequent production flow process, improves the total quality of silico briquette.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the first embodiment schematic flow sheet that the present invention judges the method for silico briquette quality;
Fig. 2 is the second embodiment schematic flow sheet that the present invention judges the method for silico briquette quality;
Fig. 3 is the 3rd embodiment schematic flow sheet that the present invention judges the method for silico briquette quality;
Fig. 4 is the 4th embodiment schematic flow sheet that the present invention judges the method for silico briquette quality;
Fig. 5 is the composition schematic diagram that the embodiment of the present invention judges the device of silico briquette quality;
Fig. 6 adopts the full minority carrier life time distribution plan that described in third embodiment of the invention, method scanning silico briquette a obtains;
Fig. 7 adopts the full minority carrier life time distribution plan that described in third embodiment of the invention, method scanning silico briquette b obtains;
Fig. 8 is the gray-scale map of the silico briquette a obtained after full minority carrier life time distribution plan process shown in Fig. 6;
Fig. 9 is the gray-scale map of the silico briquette b obtained after full minority carrier life time distribution plan process shown in Fig. 7;
Figure 10 is the scaling trend figure of each the interval interior low minority carrier life time of silico briquette a from head to afterbody obtained after the process of gray-scale map shown in Fig. 8;
Figure 11 is the scaling trend figure of each the interval interior low minority carrier life time of silico briquette b from head to afterbody obtained after the process of gray-scale map shown in Fig. 9.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Please refer to Fig. 1, for the present invention judges the first embodiment schematic flow sheet of the method for silico briquette quality.The method of described judgement silico briquette quality comprises the following steps:
S101, scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette.
Wherein, described silico briquette is polysilicon block or class monocrystalline silico briquette.
S102, analyzes the ratio that described full minority carrier life time distribution plan obtains the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
S103, the ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of described silico briquette.
Method described in the present embodiment is adopted to judge the quality of silico briquette, the ratio of the ratio namely shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges, replace the method judged according to average minority carrier lifetime in the past, judged result is more accurate, and filled up can the blank of break area quality characterization, effectively reduce the output of poor efficiency silicon chip.
Please refer to Fig. 2, for the present invention judges the second embodiment schematic flow sheet of the method for silico briquette quality.The method of described judgement silico briquette quality comprises the following steps:
S201, carries out chemical passivation process to described silico briquette surface.
Avoid described silico briquette in follow-up testing process oxidized corrosion to affect final testing result.
S202, scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette.
S203, analyzes the ratio that described full minority carrier life time distribution plan obtains the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
S204, the ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of described silico briquette.
Please refer to Fig. 3, for the present invention judges the 3rd embodiment schematic flow sheet of the method for silico briquette quality.The method of described judgement silico briquette quality comprises the following steps:
S301, carries out chemical passivation process to described silico briquette surface.
S302, scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette.
S303, adjusting described full minority carrier life time distribution plan is gray-scale map.
Wherein, the gray-scale value of shown gray-scale map zones of different and the life value one_to_one corresponding of few son.
S304, calculate the ratio of the ratio in described gray-scale map shared by different gray-scale value pattern and each the interval interior different gray-scale value pattern from described silico briquette head to afterbody, obtain the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
S305, judges in each interval from described silico briquette head to afterbody, whether the ratio shared by described low minority carrier life time is less than proportion threshold value K.If so, then perform step S306, otherwise perform step S307.
Wherein, described proportion threshold value K concrete numerical value because of enterprise or product difference and change to some extent.As described in the finally shaping product of silico briquette be used for military or other require stricter occasion time, the concrete numerical value of described proportion threshold value K can be set as 80% or higher, as as described in the finally shaping product of silico briquette be used for civilian or commercial time, the concrete numerical value of described proportion threshold value K is then set as a certain numerical value between 40%-60%.
S306, this interval in described silico briquette, as well between quality area, retains described good quality interval and waits slice.
S307, this in described silico briquette is interval between difference quality area, removes between described poor quality area.
In the present embodiment, by calculating the ratio of the ratio shared by different gray-scale value pattern and each the interval interior different gray-scale value pattern from described silico briquette head to afterbody, obtain the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody, and then determine the ratio shared by low minority carrier life time and residing region, for the accurate judgement of silico briquette quality provides foundation, and specify slice position accurately for follow-up section flow process.
Please refer to Fig. 4, for the present invention judges the 4th embodiment schematic flow sheet of the method for silico briquette quality.The method of described judgement silico briquette quality comprises the following steps:
S401, carries out chemical passivation process to described silico briquette surface.
S402, scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette.
S403, reads the 2-D data of full minority carrier life time distribution from described full minority carrier life time distribution plan.
S404, calculates the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody according to described 2-D data.
S405, judges in each interval from described silico briquette head to afterbody, whether the ratio shared by described low minority carrier life time is less than proportion threshold value K.If so, then perform step S406, otherwise perform step S407.
S406, this interval in described silico briquette, as well between quality area, retains described good quality interval and waits slice.
S407, this in described silico briquette is interval between difference quality area, removes between described poor quality area.
In the present embodiment, by reading the 2-D data of full minority carrier life time distribution from described full minority carrier life time distribution plan, calculate the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody, and then determine the ratio shared by low minority carrier life time and residing region, compared with the 3rd embodiment, this implements described method by obtaining the result identical with the 3rd embodiment to the analysis of concrete 2-D data, method is different, object with come to the same thing, the accurate judgement being similarly silico briquette quality provides foundation, and specify slice position accurately for follow-up section flow process.
Please refer to Fig. 5, for the embodiment of the present invention judges the composition schematic diagram of the device of silico briquette quality.The device of described judgement silico briquette quality comprises: scan module 100, analysis module 200 and judge module 300.
Described scan module 100 obtains the full minority carrier life time distribution plan of described silico briquette for scanning silico briquette; Described analysis module obtains the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody for analyzing described full minority carrier life time distribution plan; Described judge module judges the quality of described silico briquette for the ratio of low minority carrier life time in the ratio shared by minority carrier life time low in described silico briquette and each interval from described silico briquette head to afterbody.
Please with reference to Fig. 6, Fig. 7, Fig. 8 and Fig. 9, Fig. 6 is for adopting the full minority carrier life time distribution plan that described in third embodiment of the invention, method scanning silico briquette a obtains, Fig. 7 is for adopting the full minority carrier life time distribution plan that described in third embodiment of the invention, method scanning silico briquette b obtains, Fig. 8 is the gray-scale map of the silico briquette a obtained after full minority carrier life time distribution plan process shown in Fig. 6, and Fig. 9 is the gray-scale map of the silico briquette b obtained after full minority carrier life time distribution plan process shown in Fig. 7.
Wherein, described silico briquette a and described silico briquette b from the same position of silicon ingot, but adopts different casting ingot process process.Utilize described scan module 100 to scan described silico briquette a and silico briquette b and obtain the full minority carrier life time distribution plan shown in Fig. 6 and Fig. 7 respectively.It is 4.631 microseconds that method conventionally can detect the average minority carrier lifetime obtaining described silico briquette a, the average son less of described silico briquette b is 4.188 microseconds, can find out that the low minority carrier life time region of described silico briquette a is obviously less than described silico briquette b intuitively from Fig. 6 and Fig. 7, but can not determine described silico briquette a and silico briquette b can break area exact mass and can good quality region in break area.Determine remove height end to end and obtain the gray-scale map shown in Fig. 8 and Fig. 9 respectively after adjusting the gray scale of image shown in Fig. 6 and Fig. 7 by existing red sector standard, wherein, the gray-scale value of zones of different and the life value one_to_one corresponding of few son.By Fig. 8 and Fig. 9 can find out described silico briquette a and silico briquette b can slice length roughly the same.By the ratio in described analysis module 200 respectively gray-scale map shown in calculating chart 8 and Fig. 9 shared by different gray-scale value pattern and each from described silico briquette a or silico briquette b head to afterbody interval in the ratio of different gray-scale value pattern, obtain ratio in described silico briquette a or silico briquette b shared by low minority carrier life time and each from described silico briquette a or silico briquette b head to afterbody interval in the ratio of low minority carrier life time.
Please with reference to Figure 10 and Figure 11, Figure 10 for each from head to afterbody of the silico briquette a that obtains after the process of gray-scale map shown in Fig. 8 interval in the scaling trend figure of low minority carrier life time, Figure 11 for each from head to afterbody of the silico briquette b that obtains after the process of gray-scale map shown in Fig. 9 interval in the scaling trend figure of low minority carrier life time.
Wherein, the horizontal ordinate of Figure 10 and Figure 11 is the data point of silico briquette from head to afterbody, described data point and silico briquette each interval one_to_one corresponding from head to afterbody, the ratio value of ordinate shared by the low minority carrier life time of described silico briquette corresponding data point.
Herein, the concrete numerical value setting described proportion threshold value K is 50%, when the ratio shared by described low minority carrier life time is less than 50%, the battery efficiency manufactured after the silico briquette section in this interval is higher, can meet consumers' demand, when the ratio shared by described low minority carrier life time is not less than 50%, the battery efficiency manufactured after the silico briquette section in this interval is lower, cannot meet consumers' demand.Boundary value according to 50%, in conjunction with Figure 10 and Figure 11, can obtain following form:
Silico briquette | Difference quality region | Difference quality length | Good quality region | Good quality length |
Silico briquette a | 0-10mm,210-223mm | 23mm | 10-210mm | 200mm |
Silico briquette b | 0-10mm,122-217mm | 105mm | 10-122mm | 112mm |
What obtain described silico briquette a and silico briquette b thus can good quality region in break area, finally removes the poor quality region in silico briquette, retains quality region and cut into slices, can greatly reduce the output of poor efficiency silicon chip, improve the effect and quality of final battery product.And by contrasting the final detection result of described silico briquette a and silico briquette b, can improve the casting ingot process of the larger silico briquette b of regional percentage shared by low minority carrier life time, to promote the quality of described silico briquette b, like this, direction is provided to the process optimization that silico briquette is produced, be conducive in subsequent production flow process, improve the total quality of silico briquette.
By the description of above-described embodiment, the present invention has the following advantages:
The ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of silico briquette, replace the method judged according to average minority carrier lifetime in the past, judged result is more accurate, and filled up can the blank of break area quality characterization, effectively reduce the output of poor efficiency silicon chip; Ratio in silico briquette shared by low minority carrier life time and residing region is obtained by carrying out analytical calculation to the gray-scale map of full minority carrier life time distribution plan or 2-D data, for the accurate judgement of silico briquette quality provides foundation, and specify slice position accurately for follow-up section flow process; Detected by the silico briquette produced different process or process, the quality results according to the different silico briquettes finally obtained contrasts, and the process optimization produced for silico briquette provides direction, is conducive in subsequent production flow process, improves the total quality of silico briquette.
One of ordinary skill in the art will appreciate that all or part of flow process realized in above-described embodiment method, that the hardware that can carry out instruction relevant by computer program has come, described program can be stored in a computer read/write memory medium, this program, when performing, can comprise the flow process of the embodiment as above-mentioned each side method.Wherein, described storage medium can be magnetic disc, CD, read-only store-memory body (Read-Only Memory, ROM) or random store-memory body (Random Access Memory, RAM) etc.
Above disclosedly be only present pre-ferred embodiments, certainly can not limit the interest field of the present invention with this, therefore according to the equivalent variations that the claims in the present invention are done, still belong to the scope that the present invention is contained.
Claims (10)
1. judge a method for silico briquette quality, it is characterized in that, comprising:
Scanning silico briquette obtains the full minority carrier life time distribution plan of described silico briquette;
Analyze the ratio that described full minority carrier life time distribution plan obtains the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody;
The ratio of the ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges the quality of described silico briquette.
2. the method for claim 1, is characterized in that, before obtaining the step of full minority carrier life time distribution plan of described silico briquette, also comprises at described scanning silico briquette:
Chemical passivation process is carried out to described silico briquette surface.
3. the method for claim 1, is characterized in that, the step that the described full minority carrier life time distribution plan of described analysis obtains the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody comprises:
Adjusting described full minority carrier life time distribution plan is gray-scale map, wherein, and the gray-scale value of described gray-scale map zones of different and the life value one_to_one corresponding of few son;
Calculate the ratio of the ratio in described gray-scale map shared by different gray-scale value pattern and each the interval interior different gray-scale value pattern from described silico briquette head to afterbody, obtain the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
4. the method for claim 1, is characterized in that, the step that the described full minority carrier life time distribution plan of described analysis obtains the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody comprises:
The 2-D data of full minority carrier life time distribution is read from described full minority carrier life time distribution plan;
The ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody is calculated according to described 2-D data.
5. the method for claim 1, is characterized in that, the ratio of described ratio shared by minority carrier life time low in described silico briquette and each the interval interior low minority carrier life time from described silico briquette head to afterbody judges that the step of the quality of described silico briquette comprises:
Judge in each interval from described silico briquette head to afterbody, whether the ratio shared by described low minority carrier life time is less than proportion threshold value K;
If so, this interval then in described silico briquette, as well between quality area, retains described good quality interval and waits slice;
If not, then this in described silico briquette is interval between difference quality area, removes between described poor quality area.
6. judge a device for silico briquette quality, it is characterized in that, comprising:
Scan module, obtains the full minority carrier life time distribution plan of described silico briquette for scanning silico briquette;
Analysis module, obtains the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody for analyzing described full minority carrier life time distribution plan;
Judge module, judges the quality of described silico briquette for the ratio of low minority carrier life time in the ratio shared by minority carrier life time low in described silico briquette and each interval from described silico briquette head to afterbody.
7. device as claimed in claim 6, is characterized in that, adopts high precision to line by line scan when described scan module scans described silico briquette.
8. device as claimed in claim 6, it is characterized in that, it is gray-scale map that described scan module is further used for the described full minority carrier life time distribution plan of adjustment, wherein, the gray-scale value of described gray-scale map zones of different and the life value one_to_one corresponding of few son, described analysis module is further used for calculating the ratio of the ratio in described gray-scale map shared by different gray-scale value pattern and each the interval interior different gray-scale value pattern from described silico briquette head to afterbody, obtain the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody.
9. device as claimed in claim 6, it is characterized in that, described analysis module, also for reading the 2-D data of full minority carrier life time distribution from described full minority carrier life time distribution plan, calculates the ratio of the ratio in described silico briquette shared by low minority carrier life time and each the interval interior low minority carrier life time from described silico briquette head to afterbody according to described 2-D data.
10. device as claimed in claim 6, it is characterized in that, described judge module is further used for judging in each interval from described silico briquette head to afterbody, whether the ratio shared by described low minority carrier life time is less than proportion threshold value K;
If so, this interval then in described silico briquette, as well between quality area, retains described good quality interval and waits slice;
If not, then this in described silico briquette is interval between difference quality area, removes between described poor quality area.
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---|---|---|---|---|
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CN109585275A (en) * | 2018-12-03 | 2019-04-05 | 包头美科硅能源有限公司 | A method of guaranteeing polysilicon chip or class monocrystalline silicon piece quality stability |
CN109760219A (en) * | 2019-03-12 | 2019-05-17 | 赛维Ldk太阳能高科技(新余)有限公司 | A kind of silico briquette head-tail minimizing technology and removal device |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW448526B (en) * | 1998-07-09 | 2001-08-01 | Nippon Electric Co | Wafer for heavy metal monitoring and method for manufacturing same |
US6836134B2 (en) * | 2002-06-11 | 2004-12-28 | Delphi Technologies, Inc. | Apparatus and method for determining leakage current between a first semiconductor region and a second semiconductor region to be formed therein |
TW200816342A (en) * | 2006-08-01 | 2008-04-01 | Newsouth Innovations Pty Ltd | Determining diffusion length of minority carriers |
CN201233371Y (en) * | 2008-03-17 | 2009-05-06 | 荣凡 | Glimmer image detecting instrument for crystalline silicon solar energy cell |
CN101592469A (en) * | 2009-07-08 | 2009-12-02 | 中电电气(南京)光伏有限公司 | Silicon chip of solar cell damage layer thickness and minority carrier life time measuring method and device |
CN102393503A (en) * | 2011-11-14 | 2012-03-28 | 北京航空航天大学 | GaAs solar energy cell performance degeneration prediction method in space environment |
CN102483378A (en) * | 2009-07-20 | 2012-05-30 | Bt成像股份有限公司 | Separation Of Doping Density And Minority Carrier Lifetime In Photoluminescence Measurements On Semiconductor Materials |
TW201224227A (en) * | 2010-12-07 | 2012-06-16 | Eversol Corp | Process for increasing quality of silicon brick doped by recycled silicon material |
CN102522436A (en) * | 2011-12-30 | 2012-06-27 | 常州天合光能有限公司 | Silicon chip for testing bulk service life, silicon chip manufacturing method, and bulk service life test method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4940737B2 (en) * | 2006-04-11 | 2012-05-30 | 株式会社Sumco | Minority carrier diffusion length measuring method and silicon wafer manufacturing method |
US20110169520A1 (en) * | 2010-01-14 | 2011-07-14 | Mks Instruments, Inc. | Apparatus for measuring minority carrier lifetime and method for using the same |
-
2012
- 2012-07-10 CN CN201210237553.XA patent/CN102759695B/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW448526B (en) * | 1998-07-09 | 2001-08-01 | Nippon Electric Co | Wafer for heavy metal monitoring and method for manufacturing same |
US6836134B2 (en) * | 2002-06-11 | 2004-12-28 | Delphi Technologies, Inc. | Apparatus and method for determining leakage current between a first semiconductor region and a second semiconductor region to be formed therein |
TW200816342A (en) * | 2006-08-01 | 2008-04-01 | Newsouth Innovations Pty Ltd | Determining diffusion length of minority carriers |
CN201233371Y (en) * | 2008-03-17 | 2009-05-06 | 荣凡 | Glimmer image detecting instrument for crystalline silicon solar energy cell |
CN101592469A (en) * | 2009-07-08 | 2009-12-02 | 中电电气(南京)光伏有限公司 | Silicon chip of solar cell damage layer thickness and minority carrier life time measuring method and device |
CN102483378A (en) * | 2009-07-20 | 2012-05-30 | Bt成像股份有限公司 | Separation Of Doping Density And Minority Carrier Lifetime In Photoluminescence Measurements On Semiconductor Materials |
TW201224227A (en) * | 2010-12-07 | 2012-06-16 | Eversol Corp | Process for increasing quality of silicon brick doped by recycled silicon material |
CN102393503A (en) * | 2011-11-14 | 2012-03-28 | 北京航空航天大学 | GaAs solar energy cell performance degeneration prediction method in space environment |
CN102522436A (en) * | 2011-12-30 | 2012-06-27 | 常州天合光能有限公司 | Silicon chip for testing bulk service life, silicon chip manufacturing method, and bulk service life test method |
Non-Patent Citations (1)
Title |
---|
多晶硅晶锭质量的研究和改善;贺洁 等;《创新与技术》;20110615(第03期);第65-68页 * |
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