CN102706898A - Texture observer and application method thereof - Google Patents
Texture observer and application method thereof Download PDFInfo
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- CN102706898A CN102706898A CN2012101727866A CN201210172786A CN102706898A CN 102706898 A CN102706898 A CN 102706898A CN 2012101727866 A CN2012101727866 A CN 2012101727866A CN 201210172786 A CN201210172786 A CN 201210172786A CN 102706898 A CN102706898 A CN 102706898A
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- collimation lens
- video camera
- light source
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- observation platform
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Abstract
The invention relates to a texture observer which comprises a support, an observation platform and a strut, wherein the observation platform is arranged above the support, the strut is arranged on one side of the observation platform, a chute is formed on one side of the strut, and a camera, a first collimating lens, a second collimating lens and a light source are sequentially arranged in the chute from top to bottom by fixing blocks; the camera is connected with a display by a cable conductor, and a zoom lens is additionally arranged below the camera; and the central points of the camera, the zoom lens, the first collimating lens, the second collimating lens and the light source are on the same vertical line. According to the texture observer, by adjusting the distance between the light source and the second collimating lens and the distance between the first collimating lens and the second collimating lens as well as the light ray imaging principle, the texture or surface grain trend figure of a detected sample is obtained on the display; and the texture observer is compact in structural design and convenient for rapid detection of a processing wafer, so that the quality assurance of the wafer is improved.
Description
Technical field
The present invention relates to a kind of arteries and veins reason viewer and method of application thereof that detects transparent wafers, transparent glass sheet surface pattern through optical imaging concept.
Background technology
In electron trade, in the manufacturing process for transparent wafers or transparent glass sheet, need through surface-treated operations such as grinding, polishings; But real buffing machine or muller are in concrete operating process; Can cause certain cut to the surface of transparent wafers, transparent glass sheet, these cuts are thinner, when we detect by an unaided eye, can't see; The cut that produces can affect to its result of use and serviceable life in concrete actual the use; So transparent wafers after production and processing or transparent glass sheet need detect it, the product surface after guaranteeing to detect does not have cut.
In our operation in the past; The workshop all is through buying the microscope that comes transparent wafers or transparent glass sheet to be detected, but in the workshop, needs the sample size of detection more, and not only cost is high through this microscope of buying; Increased input cost; And in practical operation, process is slower, has influenced the production man-hour in workshop to a great extent.
Summary of the invention
The technical matters that the present invention solves provides a kind of fast detecting, increases work efficiency and directly obtains the image lines through optical imaging concept, makes a kind of more intuitively arteries and veins reason viewer of product to be detected and method of application thereof.
The present invention solves the technical scheme that its technical matters takes: a kind of arteries and veins reason viewer; Comprise support, observation platform and pillar; This observation platform is arranged on the top of support; Said pillar is arranged on a side of observation platform, offers chute in a side of said pillar, on this chute, is disposed with video camera, first collimation lens, second collimation lens and light source through fixed block from the top down; This video camera connects display through cable, and the below of said video camera is equipped with a zoom lens; The central point of said video camera, zoom lens, first collimation lens, second collimation lens and light source is on a vertical curve, and said video camera, first collimation lens, second collimation lens and light source can move up and down along the track in the chute through fixed block; The elevation of water at said observation platform place is higher than the elevation of water at second collimation lens place, and the elevation of water at said observation platform place is lower than the elevation of water at first collimation lens place.
Further, in order to prevent that wafer to be detected from being polluted, be provided with housing in the periphery of said support; And in this housing is coated on observation platform and pillar; Wafer to be detected is inserted in the housing, guarantee that the dust in the air outside can be infected with on its surface, also improved accuracy in detection.
Further; Said light source is a kind of in high brightness White LED or the 200W Halogen lamp LED source; On said light source, be attached with diffuser plate, offer pin hole on this diffuser plate, the light of launching via the light source place upwards penetrates via the pin hole on the diffuser plate; The light that obtains is even, can help artificial the detection for a long time and observe.
Further, said video camera is a colourful CCD video camera, and the zoom lens that this video camera head adds is the X10C model.
Further, for the ease of the observation of the wide scope of operator, the wafer specification of said first collimation lens and second collimation lens is ￠ 100Xf200mm, and promptly diameter is 100mm, and focal length is 200mm.
A kind of method of application based on arteries and veins reason viewer; On the chute of pillar; The distance of regulating between second collimation lens and light source through fixed block is 312mm; Regulate the height of first collimation lens simultaneously, guarantee that the distance between first collimation lens and second collimation lens is 200mm, light emitted light that goes out and the sample light transmission rate that is placed on the observation platform are matched; Sample is placed on the observation platform, and light emitted goes out light, after the second collimation lens focussed collimated; The even transmission sample of light, light is again via after the first collimation lens focussed collimated, through regulating the focal length of zoom lens afterwards; Thereby make light be transmitted to video camera clearly; Behind video camera imaging, the image data that obtains again by cable transmission to display, thereby draw the arteries and veins reason of sample to be detected or the lines trend on surface through the shaping image on the display.
The invention has the beneficial effects as follows: this arteries and veins reason viewer is through distance between the adjusting light source and second collimation lens and the distance between first collimation lens and second collimation lens; Through the image formation by rays principle; Thereby the arteries and veins reason or the surface pattern that on display, obtain sample to be detected move towards figure, and this structural design is compact, is convenient to the fast detecting of processed wafer; Thereby improve the quality assurance of wafer; And this viewer is easy to operate, has improved detection efficiency to a great extent, has also reduced the workshop and has detected cost.
Description of drawings:
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the light source synoptic diagram in light source among the present invention;
Fig. 3 is the synoptic diagram of the another kind of embodiment of the present invention.
Among the figure: 1, support 2, observation platform 3, pillar 4, video camera 5, zoom lens 6, first collimation lens 7, second collimation lens 8, light source 8-1, diffuser plate 8-2, pin hole 9, display 10, housing.
Embodiment
A kind of arteries and veins reason viewer shown in Figure 1; Comprise support 1, observation platform 2 and pillar 3; This observation platform 2 is arranged on the top of support 1; Said pillar 3 is arranged on a side of observation platform 2, offers chute in a side of said pillar 3, on this chute, is disposed with video camera 4, first collimation lens 6, second collimation lens 7 and light source 8 through fixed block from the top down; This video camera 4 connects display 9 through cable, and the image-forming information that obtains via video camera comes out through the phenomenon of display 9 clear static state, the observation of being convenient to operate, and the below of said video camera 4 is equipped with a zoom lens 5; The central point of said video camera 4, zoom lens 5, first collimation lens 6, second collimation lens 7 and light source 8 is on a vertical curve; Guarantee the trend of light; Be convenient to imaging, and said video camera 4, first collimation lens 6, second collimation lens 7 and light source 8 can move up and down through fixed block along the track in the chute; The elevation of water at said observation platform 2 places is higher than the elevation of water at second collimation lens, 7 places, and the elevation of water at said observation platform 2 places is lower than the elevation of water at first collimation lens, 6 places.
Further; As shown in Figure 3, in order to prevent that wafer to be detected from being polluted, be provided with housing 10 in the periphery of said support 1; And in this housing 10 is coated on observation platform 2 and pillar 3; Wafer to be detected is inserted on the observation platform 2 in the housing, guarantee that the dust in the air outside can be infected with on its surface, also improved accuracy in detection.
Further; As shown in Figure 2, said light source 8 is a kind of in high brightness White LED or the 200W Halogen lamp LED source, on said light source 8, is attached with diffuser plate 8-1; Offer pin hole 8-2 on this diffuser plate 8-1; The light of launching via light source 8 places upwards penetrates via the pin hole 8-2 on the diffuser plate, and the light that obtains is even, can help artificial the detection for a long time and observe.
Further, said video camera 4 is a colourful CCD video camera, and the zoom lens that these video camera 4 heads add is the X10C model, can obtain the imaging pattern of different sharpness through the adjustment of focal length.
Further, for the ease of the observation of the wide scope of operator, the wafer specification of said first collimation lens 6 and second collimation lens 7 is ￠ 100Xf200mm, and promptly diameter is 100mm, and focal length is 200mm.
A kind of method of application based on arteries and veins reason viewer; On the chute of pillar 3; The distance of regulating 8 of second collimation lens 7 and light sources through fixed block is 312mm; Regulate the height of first collimation lens 6 simultaneously, guarantee that the distance between first collimation lens 6 and second collimation lens 7 is 200mm, light source 8 light of launching and the sample light transmission rate that is placed on the observation platform 2 are matched; Sample is placed on the observation platform 2; Light source 8 is launched light, after second collimation lens, 7 focussed collimated, and the even transmission sample of light; Light is again via after first collimation lens, 6 focussed collimated afterwards; Through the focal length of adjusting zoom lens 5, thereby make light be transmitted to video camera 4 clearly, after video camera 4 imagings; The image data that obtains again by cable transmission to display 9, thereby draw the arteries and veins reason of sample to be detected or the lines trend on surface through the shaping image on the display 9.
The distance that distance and first collimation lens 6 and second collimation lens of this arteries and veins reason viewer through regulating light source 8 and 7 of second collimation lenses is 7, through the image formation by rays principle, thereby the arteries and veins that on display 9, obtains sample to be detected is managed or surface pattern moves towards figure; This structural design is compact; Be convenient to the fast detecting of processed wafer, thereby improve the quality assurance of wafer, and this viewer is easy to operate; Improved detection efficiency to a great extent, also reduced the workshop and detected cost.
It is emphasized that; More than be preferable enforcement row of the present invention; Be not that any type of restriction is done in this invention in appearance; Every foundation technical spirit of the present invention all still belongs in the scope of technical scheme of the present invention any simple modification, equivalent variations and modification that above embodiment did.
Claims (6)
1. an arteries and veins is managed viewer; It is characterized in that: comprise support (1), observation platform (2) and pillar (3); This observation platform (2) is arranged on the top of support (1); Said pillar (3) is arranged on a side of observation platform (2), offers chute in a side of said pillar (3), on this chute, is disposed with video camera (4), first collimation lens (6), second collimation lens (7) and light source (8) through fixed block from the top down; This video camera (4) connects display (9) through cable, and the below of said video camera (4) is equipped with a zoom lens (5); The central point of said video camera, zoom lens, first collimation lens, second collimation lens and light source is on a vertical curve, and said video camera, first collimation lens, second collimation lens and light source can move up and down along the track in the chute through fixed block; The elevation of water at said observation platform (2) place is higher than the elevation of water at second collimation lens (7) place, and the elevation of water at said observation platform (2) place is lower than the elevation of water at first collimation lens (6) place.
2. arteries and veins according to claim 1 reason viewer, it is characterized in that: the periphery at said support (1) is provided with housing (10), and in this housing (10) is coated on observation platform (2) and pillar (3).
3. arteries and veins reason viewer according to claim 1; It is characterized in that: a kind of in high brightness White LED or the 200W Halogen lamp LED source of said light source (8); On said light source (8), be attached with diffuser plate (8-1); Offer pin hole (8-2) on this diffuser plate (8-1), the light of locating to launch via light source (8) upwards penetrates via the pin hole on the diffuser plate.
4. arteries and veins reason viewer according to claim 1, it is characterized in that: said video camera (4) is a colourful CCD video camera, and the zoom lens that this video camera head adds is the X10C model.
5. arteries and veins reason viewer according to claim 1, it is characterized in that: the wafer specification of said first collimation lens (6) and second collimation lens (7) is ￠ 100Xf200mm, and promptly diameter is 100mm, and focal length is 200mm.
6. method of application based on arteries and veins reason viewer; It is characterized in that: on the chute of pillar; The distance of regulating between second collimation lens (7) and light source (8) through fixed block is 312mm; Regulate the height of first collimation lens (6) simultaneously, guarantee that the distance between first collimation lens (6) and second collimation lens (7) is 200mm, light source (8) light of launching and the sample light transmission rate that is placed on the observation platform (2) are matched; Sample is placed on the observation platform, and light emitted goes out light, after the second collimation lens focussed collimated; The even transmission sample of light, light is again via after the first collimation lens focussed collimated, through regulating the focal length of zoom lens afterwards; Thereby make light be transmitted to video camera clearly; Behind video camera imaging, the image data that obtains again by cable transmission to display, thereby draw the arteries and veins reason of sample to be detected or the lines trend on surface through the shaping image on the display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101727866A CN102706898A (en) | 2012-05-30 | 2012-05-30 | Texture observer and application method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101727866A CN102706898A (en) | 2012-05-30 | 2012-05-30 | Texture observer and application method thereof |
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| CN102706898A true CN102706898A (en) | 2012-10-03 |
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| CN2012101727866A Pending CN102706898A (en) | 2012-05-30 | 2012-05-30 | Texture observer and application method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928442A (en) * | 2012-10-18 | 2013-02-13 | 苏州米凯尼克智能科技有限公司 | Optical detection device of transparent glass |
| CN111579553A (en) * | 2020-05-26 | 2020-08-25 | 苏州京浜光电科技股份有限公司 | Simple pulse-based inspection tester |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1761870A (en) * | 2003-03-29 | 2006-04-19 | 皮尔金顿公共有限公司 | Glazing inspection |
| JP2007285896A (en) * | 2006-04-17 | 2007-11-01 | Hoya Corp | Inspection device of transparent body |
| CN101226158A (en) * | 2007-01-16 | 2008-07-23 | 富士胶片株式会社 | Device and method for detecting defect of transparent material |
| CN101295036A (en) * | 2007-04-27 | 2008-10-29 | 鸿富锦精密工业（深圳）有限公司 | Back light module and optical plate |
| CN201233375Y (en) * | 2008-05-29 | 2009-05-06 | 铨州光电股份有限公司 | Glass detecting instrument |
-
2012
- 2012-05-30 CN CN2012101727866A patent/CN102706898A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1761870A (en) * | 2003-03-29 | 2006-04-19 | 皮尔金顿公共有限公司 | Glazing inspection |
| JP2007285896A (en) * | 2006-04-17 | 2007-11-01 | Hoya Corp | Inspection device of transparent body |
| CN101226158A (en) * | 2007-01-16 | 2008-07-23 | 富士胶片株式会社 | Device and method for detecting defect of transparent material |
| CN101295036A (en) * | 2007-04-27 | 2008-10-29 | 鸿富锦精密工业（深圳）有限公司 | Back light module and optical plate |
| CN201233375Y (en) * | 2008-05-29 | 2009-05-06 | 铨州光电股份有限公司 | Glass detecting instrument |
Non-Patent Citations (1)
| Title |
|---|
| 解秀梅: ""玻璃缺陷检测系统实验研究"", 《中国海洋大学研究生学位论文》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928442A (en) * | 2012-10-18 | 2013-02-13 | 苏州米凯尼克智能科技有限公司 | Optical detection device of transparent glass |
| CN111579553A (en) * | 2020-05-26 | 2020-08-25 | 苏州京浜光电科技股份有限公司 | Simple pulse-based inspection tester |
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Application publication date: 20121003 |