CN102672695B - A kind of precision stage - Google Patents
A kind of precision stage Download PDFInfo
- Publication number
- CN102672695B CN102672695B CN201110438625.2A CN201110438625A CN102672695B CN 102672695 B CN102672695 B CN 102672695B CN 201110438625 A CN201110438625 A CN 201110438625A CN 102672695 B CN102672695 B CN 102672695B
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- air bearing
- bearing block
- air
- guide rail
- floating platform
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Abstract
The present invention relates to a kind of precision stages, including at least one layer of rack, every layer of rack include and it is corresponding determine guide rail guiding cooperation air floating platform, air floating platform is with one of flowering structure: the first, air floating platform is made of an air bearing block, second, air floating platform is connected back-to-back by two air bearing blocks and is constituted, and is equipped with the venthole for acting on and determining guide rail mating surface on two air bearing blocks and each face for determining guide rail guiding cooperation；The third, air floating platform is connected by three air bearing block superpositions and is constituted, and is equipped with the venthole for acting on and determining guide rail mating surface on each air bearing block and each face for determining guide rail guiding cooperation.Air bearing block platform of the present invention can be made of one, two or three air bearing block, and air bearing number of blocks required for air floating platform greatly reduces, and assembling structure is very simple, substantially reduce rigging error, simple due to assembling structure, so that air floating platform intensity increases, bearing capacity is improved.
Description
Technical field
The present invention relates to a kind of precision stages.
Background technique
Currently, air-flotation workbench includes that the air floating platform that by single side there is the air bearing block of venthole to form and rectangular strip form
Determine guide rail, guide rail opposite face is equipped with guide groove, the air floating platform and guide rail and passes through guide groove guiding cooperation, such device
There are following defects:
One, the air bearing number of blocks for needing to process is more, when doing motion in one dimension, needs at least four air bearing blocks, does two dimensional motion
When then need on the basis of motion in one dimension again plus a motion in one dimension, the quantity of air bearing block double, keep its air bearing number of blocks numerous
More, assembly is complicated；Two, since air bearing number of blocks is more, there is a certain error for the assembly between air bearing block, and numerous air bearings are packaged to match
So that rigging error further increases, the precision of high-accuracy measurement is thereby reduced；Three, the quantity of air bearing block is more, each air bearing block
Between assemble after intensity become smaller, bearing capacity is small.
Summary of the invention
The purpose of the present invention is to provide a kind of precision stages, are led surely in the workbench to solve the prior art due to dynamic
Rail as multiple single side air floating platforms at and caused by assembly is complicated, error is big, bearing capacity is small problem.
To solve the above-mentioned problems, a kind of precision stage of the invention, including at least one layer of rack, every layer of rack are equal
Including with it is corresponding determine guide rail guiding cooperation air floating platform, the air floating platform be with one of flowering structure: the first, it is described
Air floating platform is made of an air bearing block, is equipped with face on the air bearing block and each face for determining guide rail guiding cooperation and is led surely
The venthole in rail corresponding matching face, each venthole are interconnected inside air bearing block；Second, the air floating platform is by two gas
Floating block is connected constitutes back-to-back, is equipped with face on the two air bearing blocks and each face for determining guide rail guiding cooperation and determines guide rail cooperation
The venthole in face, each venthole of the two air bearing blocks are interconnected inside respective air bearing block；The third, the air floating platform
Be connected and constituted by the superposition of three air bearing blocks, each air bearing block with determine guide rail and be oriented on each face cooperated to be equipped with face and determine guide rail to match
The venthole in conjunction face, each venthole for forming the air bearing block of the air floating platform are interconnected inside respective air bearing block.
It is formed in three kinds of structures and is equipped with nozzle in the external port of the venthole of each air bearing block of the air floating platform.
Each layer rack includes bottom plate, described to determine guide rail and be installed on corresponding bottom plate.
The precision stage includes two layers of rack, and the described of rack described in upper layer determines guide rail and rack described in lower layer
It is described that determine guide rail orthogonal.
The bottom plate of rack described in upper layer is the air floating platform of rack described in lower layer.
Air floating platform structure on two rack is the first described structure.
The air bearing block that air floating platform is constituted in the present invention is not only equipped with venthole, therefore air bearing block platform on one face
It can be made of one, two or three air bearing block, air bearing number of blocks required for air floating platform greatly reduces, such as with four faces
When air bearing block equipped with venthole is as air floating platform, it is only necessary to which an air bearing block, assembling structure is very simple, subtracts significantly
Small rigging error, simple due to assembling structure, so that air floating platform intensity increases, bearing capacity is improved.
Detailed description of the invention
Fig. 1 is the schematic perspective view of the embodiment of the present invention 1；
Fig. 2 is the main view of the embodiment of the present invention 1；
Fig. 3 is the left view of the embodiment of the present invention 1；
Fig. 4 is the top view of the embodiment of the present invention 1；
Fig. 5 is the structural schematic diagram of air floating platform in the embodiment of the present invention 2；
Fig. 6 is the structural schematic diagram of air floating platform in the embodiment of the present invention 3；
Fig. 7 is another structural schematic diagram of air floating platform in the embodiment of the present invention 3；
Fig. 8 is the structural schematic diagram of air floating platform in the embodiment of the present invention 4；
Fig. 9 is the structural schematic diagram of air floating platform in the embodiment of the present invention 5；
Figure 10 is the structural schematic diagram of air floating platform in the embodiment of the present invention 6.
Specific embodiment
The embodiment of the present invention is described in detail with reference to the accompanying drawing:
A kind of precision stage embodiment,
Embodiment 1
The precision stage is two-dimentional work bench, as shown in Fig. 1 ~ 4, including two layers of rack, respectively upper layer rack and
Substructure, substructure include bottom plate 1, in parallel be installed on bottom plate two determine guide rail 2,2 ', with determine guide rail 2,2 ' and be oriented to
The air floating platform of cooperation and be installed on bottom plate 1 for push air floating platform along determine guide rail 2,2 ' move back and forth screw-nut
Structure 3 is determined guide rail 2, is all had along the guide groove for determining the extension of guide rail extending direction on 2 ' opposite faces, and substructure guide groove is by cross
Section be " ┏ " shape determine guide rail and the guide rail of determining of " ┓ " shape is surrounded with 1 upper surface of bottom plate, air floating platform and opposite guiding
Slot guiding cooperation, two air floating platforms are made of an air bearing block 5, between 5 two opposite faces of the air bearing block and two opposite face
Any pair of opposite face on be equipped with venthole 9, the venthole 9 on four opposite faces of the air bearing block respectively with two institutes
The upper and lower groove face and side face of guide groove are stated, is all provided in the external port of the venthole 9 of each air bearing block in air bearing block 5
Have nozzle, each venthole 9 in air bearing block 5 it is interconnected by the gas passage inside air bearing block 5 and with the same air inlet
11 connections；Upper layer rack include bottom plate, in parallel be installed on bottom plate two determine guide rail 7,7 ', with determine guide rail 7,7 ' and be oriented to cooperation
Air floating platform and the fixed bottom plate on for push air floating platform along determine guide rail 7,7 ' move back and forth screw-nut knot
Structure 4, the bottom plate 1 of substructure are the air floating platform of upper layer rack, and to determine guide rail extending direction mutual for two layers rack upper
It is perpendicular, determine guide rail 7, all have along the guide groove for determining guide rail 7,7 ' extending directions extend, upper layer rack guiding on 7 ' opposite faces
Slot be by cross section " " shape determine guide rail and " " guide rail of determining of shape constitutes, air floating platform is oriented to opposite guide groove matches
It closes, two air floating platforms are made of an air bearing block 6, any one between 6 two opposite faces of the air bearing block and two opposite face
To being equipped with venthole 10 on opposite face, the venthole 10 on four opposite faces of the air bearing block 6 respectively with led described in two
To the upper and lower groove face and side face of slot, in order to which air floating platform keeps stable in use, outlet of the air bearing block on each face
Hole can according to need and be uniformly arranged one or more along determining guide rail extending direction, and each air bearing block goes out in air bearing block 6
Nozzle is equipped in the external port of stomata 10, the venthole 10 in air bearing block 6 is mutually interconnected by the gas passage inside air bearing block
Lead to and be connected to the same air inlet 12, part 8 to be measured is fixed on the air bearing block 6 of upper layer rack.
In use, the venthole of the upper and lower surfaces of air bearing block acts on guide groove lower surface and upper surface, air bearing block two respectively
The venthole of side is respectively acting on the side of guide groove, adjusting control valve, so that air bearing block stable suspersion determines leading for guide rail two
To between slot, under the promotion of screw-nut, along determining guide rail without frictional movement.
Air bearing block offers venthole on four faces, constitutes air floating platform with the air bearing block of this structure, it is only necessary to one
Air bearing block, assembling structure is very simple, substantially reduces rigging error, since air floating platform is an entirety, makes to bring about the desired sensation
Floating platform intensity increases, and bearing capacity improves.
Embodiment 2
Unlike the first embodiment, the knot of the air floating platform in the air floating platform or substructure in the upper layer rack
Structure can also be replaced to flowering structure, as shown in figure 5, air floating platform by two air bearing blocks in the horizontal direction back-to-back be connected structure
At the face of two guide groove side of face is equipped with venthole, the face two in the upper and lower surface of two air bearing blocks in two air bearing blocks
The part of the upper and lower groove face of guide groove is equipped with venthole, is equipped in the external port of the venthole of each air bearing block in air bearing block
Nozzle (not shown), the venthole in air bearing block be interconnected by the gas passage inside air bearing block and with the same air inlet
Connection.
Embodiment 3
Unlike the first embodiment, the structure of the air floating platform in the air floating platform or substructure in the rack of upper layer is also
It can be replaced to flowering structure, as shown in Figure 6,7, air floating platform is superimposed to be connected above and below and be constituted by two air bearing blocks, top
Two sides of guide groove described in the part of the two guide groove upper groove surface of upper surface face of air bearing block and the air bearing block face
It is equipped with venthole on face, only the part of groove face is equipped with venthole or following table to the air bearing block of lower section under lower surface face guide groove
The face of the part of groove face and the face two guide groove sides is equipped with venthole under the face guide groove of face, each in air bearing block
Nozzle (not shown) is equipped in the external port of the venthole of air bearing block, the venthole in air bearing block by the air bearing block inside
Gas passage be interconnected and be connected to the same air inlet.
Embodiment 4
Unlike the first embodiment, the knot of the air floating platform in the air floating platform or substructure in the upper layer rack
Structure can also be replaced to flowering structure, be constituted as shown in figure 8, air floating platform is superimposed to be connected up and down by three air bearing blocks, wherein
The face of the guiding groove sidewall of face two of intermediate air bearing block is equipped with venthole, upper and lower two air bearing block and two guide grooves
The face of upper and lower groove face face is equipped with venthole, is equipped with nozzle in the external port of the venthole of each air bearing block in air bearing block
(not shown), the venthole in air bearing block are interconnected by the gas passage inside air bearing block and are connected with the same air inlet
It is logical.
Embodiment 5
Unlike the first embodiment, the knot of the air floating platform in the air floating platform or substructure in the upper layer rack
Structure can also be replaced to flowering structure, be constituted as shown in figure 9, air floating platform is connected by three air bearing block horizontal direction superpositions,
Wherein, the part of the upper and lower groove face of guide groove of intermediate air bearing block upper and lower surfaces face two is equipped with venthole, left and right
The face of two guiding groove sidewalls described in two air bearing block faces is equipped with venthole, the outer end of the venthole of each air bearing block in air bearing block
It is equipped with nozzle (not shown) on mouthful, the venthole in air bearing block is interconnected simultaneously by the gas passage inside the air bearing block
It is connected to the same air inlet.
Embodiment 6
Unlike the first embodiment, the knot of the air floating platform in the air floating platform or substructure in the upper layer rack
Structure can also be replaced to flowering structure, and as shown in Figure 10, air floating platform is by two levels on an air bearing block and the air bearing block
The air bearing block of setting, which is connected, to be constituted, and two air bearing block faces correspondence of top is oriented on the face of groove sidewall and table on two air bearing blocks
Face and the part of the upper groove surface face of corresponding guide groove are equipped with venthole, the lower surface of the air bearing block of lower section and corresponding guide groove
The part of lower groove face face is equipped with venthole, is equipped with nozzle in the external port of the venthole of each air bearing block in air bearing block
(not shown), the venthole in the air bearing block be interconnected by the gas passage inside the air bearing block and with it is same into
Stomata connection.
Embodiment 7
The precision stage is one-dimensional workbench, only includes one layer of rack, and the structure of this layer of rack can be above-mentioned each
One of substructure structure described in embodiment.
It is above the preferred embodiment of the present invention, in equivalent variations or collocation based on the embodiment of the present invention, such as:
In embodiment 6 by the air bearing block of lower section change into three faces have venthole air bearing block etc., protection scope of the present invention it
It is interior.
Claims (2)
1. a kind of precision stage, including two layers of rack, every layer of rack includes the air bearing for determining guide rail guiding cooperation with two sides
Platform, it is characterised in that: the air floating platform is superimposed to be connected up and down and be constituted by three air bearing blocks, and each air bearing block is oriented to guide rail is determined
It is equipped with the venthole that face determines guide rail mating surface on each face of cooperation, forms respectively going out for the air bearing block of the air floating platform
Stomata is interconnected inside respective air bearing block；Each layer rack includes bottom plate, described to determine guide rail and be installed on corresponding bottom plate；
The described of rack described in upper layer determines guide rail and rack described in lower layer described to determine guide rail orthogonal；The bottom plate of rack described in upper layer
The as air floating platform of rack described in lower layer, the length for determining guide rail of upper layer rack be less than substructure two determine between guide rail
Distance；Part to be measured is fixed on the air floating platform of upper layer rack when use, the venthole on each air bearing block and it is same into
Stomata connection, air inlet are located at air bearing block on the end face of the direction of motion；Determine guide rail and bottom plate surround cross section be " " shape leads
To slot；The venthole of venthole upward, on the air bearing block of bottom in three air bearing blocks on the air bearing block of the top downward, in
Between venthole on air bearing block towards the left and right sides.
2. a kind of precision stage according to claim 1, it is characterized in that: the outlet of each air bearing block of the air floating platform
Nozzle is equipped in the external port in hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110438625.2A CN102672695B (en) | 2011-12-25 | 2011-12-25 | A kind of precision stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110438625.2A CN102672695B (en) | 2011-12-25 | 2011-12-25 | A kind of precision stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102672695A CN102672695A (en) | 2012-09-19 |
| CN102672695B true CN102672695B (en) | 2018-12-25 |
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ID=46805588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110438625.2A Active CN102672695B (en) | 2011-12-25 | 2011-12-25 | A kind of precision stage |
Country Status (1)
| Country | Link |
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| CN (1) | CN102672695B (en) |
Citations (1)
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| CN1151518A (en) * | 1995-11-24 | 1997-06-11 | 三星电管株式会社 | Device for measuring flatness of electrode of electron gun for cathode-ray tube |
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| JPS6085841A (en) * | 1983-10-13 | 1985-05-15 | Shinkawa Ltd | Supporting device of movable table |
| JPH0685841A (en) * | 1992-09-02 | 1994-03-25 | Toshiba Corp | Communication controller |
| DE69926753T2 (en) * | 1998-06-17 | 2006-01-19 | Nikon Corp. | STATIC PRESSURE BEARING, THIS USING DEVICE AND OPTICAL DEVICE ENSURE WITH SUCH A DEVICE |
| CN1326670C (en) * | 2005-07-22 | 2007-07-18 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| JP4318714B2 (en) * | 2006-11-28 | 2009-08-26 | 東京エレクトロン株式会社 | Coating device |
| CN201072479Y (en) * | 2007-06-12 | 2008-06-11 | 东捷科技股份有限公司 | Aluminium extruded air-floating platform |
| CN201107050Y (en) * | 2007-11-16 | 2008-08-27 | 西安东风仪表厂 | Closed type air-float guide rails |
| CN100535765C (en) * | 2007-12-28 | 2009-09-02 | 上海微电子装备有限公司 | 6-freedom micro-motion platform capable of isolating exterior vibration |
| TWI466225B (en) * | 2009-05-13 | 2014-12-21 | Utechzone Co Ltd | Suspended air float working platform |
| CN102189413B (en) * | 2011-04-12 | 2013-01-02 | 华中科技大学 | Ultra-precise workbench |
| CN102255472B (en) * | 2011-07-29 | 2012-12-19 | 哈尔滨工业大学 | Permanent magnet linear synchronous motor with aerostatic slideways |
| CN202462376U (en) * | 2011-12-25 | 2012-10-03 | 河南科技大学 | Precision workbench |
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- 2011-12-25 CN CN201110438625.2A patent/CN102672695B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1151518A (en) * | 1995-11-24 | 1997-06-11 | 三星电管株式会社 | Device for measuring flatness of electrode of electron gun for cathode-ray tube |
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| CN102672695A (en) | 2012-09-19 |
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