CN102653859A - Lifting and delivering device for automatic wafer loading and unloading of graphite boat - Google Patents

Lifting and delivering device for automatic wafer loading and unloading of graphite boat Download PDF

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Publication number
CN102653859A
CN102653859A CN2012101432126A CN201210143212A CN102653859A CN 102653859 A CN102653859 A CN 102653859A CN 2012101432126 A CN2012101432126 A CN 2012101432126A CN 201210143212 A CN201210143212 A CN 201210143212A CN 102653859 A CN102653859 A CN 102653859A
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CN
China
Prior art keywords
film magazine
silicon chip
transfer
rotation
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012101432126A
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Chinese (zh)
Inventor
王慧勇
魏唯
吕文利
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CETC 48 Research Institute
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CETC 48 Research Institute
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Publication date
Application filed by CETC 48 Research Institute filed Critical CETC 48 Research Institute
Priority to CN2012101432126A priority Critical patent/CN102653859A/en
Publication of CN102653859A publication Critical patent/CN102653859A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a lifting and delivering device for automatic wafer loading and unloading of a PECVD (Plasma Enhanced Chemical Vapor Deposition) graphite boat. The lifting and delivering device comprises a frame which is vertically placed and a transshipment wafer box used for temporarily storing silicon wafers, wherein the front surface of the frame is provided with a wafer box lifting mechanism used for driving the wafer box to slide up and down; one side of the frame is provided with a silicon wafer transshipment mechanism used for driving the transshipment wafer box to slide up and down, and one side of the silicon wafer transshipment mechanism is provided with a silicon wafer delivering mechanism for horizontally delivering the wafer box between the wafer box lifting mechanism and the silicon wafer transshipment mechanism; and the wafer box lifting mechanism, the silicon wafer transshipment mechanism and the silicon wafer transshipment mechanism form a first group of lifting and delivering devices, and the back of the frame is provided with a second group of lifting and delivering devices which are symmetrical to the first group of lifting and delivering devices. According to the invention, the whole lifting and delivering device can rapidly and accurately load the silicon wafers in the wafer box and unload the silicon wafers from the wafer box, the graphite boat does not need manual wafer loading and unloading after a PECVD process, the labour intensity and labour cost are reduced, and the automaticity and the production efficiency of a solar battery production line are improved.

Description

A kind of graphite boat automatic loading and unloading sheet up-down transfer device
Technical field
The present invention relates to solar cell and make the field, relate in particular to a kind of up-down transfer device of the PECVD of being used for graphite boat automatic loading and unloading sheet.
Background technology
In the crystal silicon solar energy battery production process, all need to prepare one deck antireflective coating at silicon chip surface, technology commonly used now is at silicon chip surface growth one deck silicon nitride film with PECVD.The PECVD operation need be taken out silicon chip after accomplishing from graphite boat, carry out silk screen printing process in the silk-screen film magazine of packing into subsequently; After all silicon chips taking-ups, need to insert again the non reflecting film silicon chip of accomplishing preceding road matting in the graphite boat, Here it is, and sheet is loaded and unloaded in the graphite boat manual work.Because of graphite boat is heavy, the load crack is narrow, so artificial loading and unloading sheet labour intensity is big, cost of labor is high, and fragmentation rate is higher simultaneously, and production efficiency is not carried.
Summary of the invention
The objective of the invention is to,, a kind of graphite boat automatic loading and unloading sheet up-down transfer device is provided, realize graphite boat automatic loading and unloading sheet, improved manufacture of solar cells line automation degree and production efficiency to the difference of prior art.
Technical scheme of the present invention does; A kind of graphite boat automatic loading and unloading sheet up-down transfer device; The framework and the transfer film magazine that is used for temporary silicon chip that comprise vertical placement; The positive installation of said framework can drive the film magazine hoisting appliance that film magazine slides up and down, and a side of said framework is provided with and can drives rotation mechanism in the silicon chip that the transfer film magazine slides up and down, and in silicon chip a side of rotation mechanism be provided with can be in film magazine hoisting appliance and silicon chip the silicon chip transmission mechanism of level transmission film magazine in the rotation mechanism; Rotation mechanism and silicon chip transmission mechanism constitute first group of up-down transfer device in said film magazine hoisting appliance, the silicon chip, and install and first group of symmetric second group of up-down transfer device of up-down transfer device at the back side of framework; The said silicon chip centre bit of rotation mechanism and silicon chip transmission mechanism of respectively organizing in film magazine hoisting appliance in the up-down transfer device, the silicon chip is consistent.
Said film magazine hoisting appliance comprise by motor-driven transfer roller, detect the film magazine position the A optoelectronic switch, support base plate, lift cylinder and be used for fixing the positioning cylinder of film magazine; Said A optoelectronic switch is installed on the following retaining frame of film magazine; Support base plate and be positioned at the film magazine bottom and under the effect of lift cylinder, promote film magazine, lift cylinder and positioning cylinder place the bottom and the top of film magazine respectively.
Rotation mechanism comprises by the motor-driven travelling belt of transmission, transfer film magazine and detect the B optoelectronic switch that silicon chip puts in place back and forth up and down in the said silicon chip; Said travelling belt directly links to each other through castellated plates with the transfer film magazine; The transfer film magazine moves around up and down under the driving of motor, and the B optoelectronic switch is installed in transfer film magazine upper plate or following panel edges.
Said silicon chip transmission mechanism comprises electronic slide unit, support and several suckers; Said electronic slide unit is fixed through support; On the electronic slide unit get the sheet plate can be in the film magazine of film magazine hoisting appliance and silicon chip between the transfer film magazine of rotation mechanism level slidably reciprocate fast; Said sucker becomes the triangle layout to be installed on to get the side of sheet plate near film magazine, is used for silicon chip and grasps.
The operation that graphite boat automatic loading and unloading sheet need be accomplished is should the silicon chip that plate antireflective coating in the graphite boat be taken out finally to put into silk-screen with empty film magazine; To unsnatch the empty graphite boat of sheet again fills; Therefore rotation mechanism, each two cover of silicon chip transmission mechanism in film magazine hoisting appliance, the silicon chip in a whole set of up-down transmission mechanism are installed on the positive and negative two sides of framework respectively.
The rotation mechanism installation of existing side by side is in the opposite direction during both VTOLs in film magazine hoisting appliance and the silicon chip; The silicon chip transmission mechanism is fixed on the chassis base, in film magazine hoisting appliance and silicon chip, shuttles the horizontal transmission silicon chip between the rotation mechanism; Lifting action is by electric motor driving completion separately, and slide unit then is responsible for silicon wafer horizontal and is transmitted.The silicon chip central position that installs and fixes the back three is consistent.Be the automatic loading and unloading sheet of corresponding graphite boat, in the up-down transmission mechanism in film magazine hoisting appliance, the silicon chip rotation mechanism and silicon chip transmission mechanism all be two covers, lay respectively at the positive and negative two sides of framework, installation site, fixed form are the same.
Introduce the said concrete technical process that is used for the up-down transmission mechanism of graphite boat automatic loading and unloading sheet below.
The film magazine that matting sends after accomplishing is carried by transfer roller relay in the film magazine hoisting appliance, and after optoelectronic switch detected and puts in place, lift cylinder was with film magazine jack-up, and positioning cylinder moves simultaneously up and down film magazine is fixed, and carries out film magazine and unloads the sheet preparation.The film magazine hoisting appliance progressively descends by the film magazine spacing when unloading sheet; Rotation mechanism then progressively rises by the spacing of transfer film magazine in the silicon chip of existing side by side; Meanwhile silicon chip transmission mechanism between level transmits back and forth, and from film magazine, getting sheet one by one, to put into the transfer film magazine temporary, accomplishes film magazine and unload sheet.The mechanical manipulator of graphite boat automatic loading and unloading sheet equipment then only needs therefrom to get sheet in the rotor box and carries out the graphite boat load.The film magazine that more than is the up-down transmission mechanism unloads sheet; Each parts action is the same during box-packed of framework back sheet; Sequencing is opposite, and promptly mechanical manipulator is got sheet and put into the transfer film magazine from graphite boat, and rotation mechanism descends in the silicon chip subsequently; The film magazine hoisting appliance rises, and silicon chip transmission mechanism then level transmits completion film magazine load back and forth.The both sides action can be carried out simultaneously, improves production efficiency of equipment.
Know by above; Use a whole set of up-down transfer device of the present invention can realize fast, accurately that silicon chip draws off and the film magazine of packing into from film magazine; Graphite boat need not artificial loading and unloading sheet after the PECVD operation; Reduce labour intensity and cost of labor, improved manufacture of solar cells line automation degree and production efficiency.
Description of drawings
Fig. 1 is the up-down transfer device structural representation of the said graphite boat automatic loading and unloading sheet of invention;
Fig. 2 is the used film magazine structure iron of film magazine hoisting appliance;
Fig. 3 is a rotation mechanism transfer film magazine structure iron in the silicon chip;
Each sequence number is represented respectively in above-mentioned accompanying drawing:
The 1-framework, 2-film magazine hoisting appliance, the 3-transfer roller, the 4-lift cylinder,
The 5-film magazine, the 6-positioning cylinder, rotation mechanism in the 7-silicon chip,
8-silicon chip transmission mechanism, 9-slide unit, 10-transfer film magazine, rotation mechanism motor in the 11-silicon chip, 12-film magazine hoisting appliance motor.
Embodiment
Like Fig. 1-shown in Figure 3; A kind of graphite boat automatic loading and unloading sheet up-down transfer device; The framework 1 and the transfer film magazine 10 that is used for temporary silicon chip that comprise vertical placement; Said framework 1 positive installation can drive the film magazine hoisting appliance 2 that film magazine 5 slides up and down, and a side of said framework 1 is provided with and can drives rotation mechanism 7 in the silicon chip that transfer film magazine 10 slides up and down, and in silicon chip a side of rotation mechanism 7 be provided with can be in rotation mechanism 7 in film magazine hoisting appliance 2 and the silicon chip level transmit the silicon chip transmission mechanism 8 of film magazine; Rotation mechanism 7 and silicon chip transmission mechanism 8 constitute first group of up-down transfer device in said film magazine hoisting appliance 2, the silicon chip, and install and first group of symmetric second group of up-down transfer device of up-down transfer device at the back side of framework 1; The said silicon chip centre bit of rotation mechanism 7 and silicon chip transmission mechanism 8 of respectively organizing in film magazine hoisting appliance 2 in the up-down transfer device, the silicon chip is consistent.
The film magazine hoisting appliance comprises the transfer roller 3 that is driven by motor 12, the A optoelectronic switch that detects film magazine 5 positions, support base plate, lift cylinder 4 and is used for fixing the positioning cylinder 6 of film magazine 5; Said A optoelectronic switch is installed on the following retaining frame of film magazine 5; The support base plate is positioned at film magazine 5 bottoms and under the effect of lift cylinder 4, promotes film magazine 5, and lift cylinder 4 and positioning cylinder 6 place the bottom and the top of film magazine 5 respectively.
Rotation mechanism comprises the travelling belt of transmission, the transfer film magazine 10 and detect the B optoelectronic switch that silicon chip puts in place back and forth up and down that is driven by motor 11 in the said silicon chip; Said travelling belt and transfer film magazine 10 directly link to each other through castellated plates; Transfer film magazine 10 moves around up and down under the driving of motor 11, and the B optoelectronic switch is installed in transfer film magazine 10 upper plates or following panel edges.
Said silicon chip transmission mechanism comprises electronic slide unit 9, support and several suckers; Said electronic slide unit 9 is fixed through support; On the electronic slide unit 9 get the sheet plate can be in the film magazine 5 of film magazine hoisting appliance 2 and silicon chip between the transfer film magazine 10 of rotation mechanism 7 level slidably reciprocate fast; Said sucker becomes the triangle layout to be installed on to get the side of sheet plate near film magazine, is used for silicon chip and grasps.

Claims (4)

1. graphite boat automatic loading and unloading sheet up-down transfer device; Comprise the framework (1) of vertical placement and be used for the transfer film magazine (10) of temporary silicon chip; It is characterized in that; The positive installation of said framework (1) can drive the film magazine hoisting appliance (2) that film magazine (5) slides up and down; One side of said framework (1) is provided with and can drives rotation mechanism (7) in the silicon chip that transfer film magazine (10) slides up and down, and in silicon chip a side of rotation mechanism (7) be provided with can be in film magazine hoisting appliance (2) and silicon chip in the rotation mechanism (7) level transmit the silicon chip transmission mechanism (8) of film magazine; Rotation mechanism (7) and silicon chip transmission mechanism (8) constitute first group of up-down transfer device in said film magazine hoisting appliance (2), the silicon chip, and install and first group of symmetric second group of up-down transfer device of up-down transfer device at the back side of framework (1); The said rotation mechanism (7) of respectively organizing in film magazine hoisting appliance (2) in the up-down transfer device, the silicon chip is consistent with the silicon chip centre bit of silicon chip transmission mechanism (8).
2. according to the said graphite boat automatic loading and unloading of claim 1 sheet up-down transfer device; It is characterized in that; Said film magazine hoisting appliance comprises the transfer roller (3) that is driven by motor (12), the A optoelectronic switch that detects film magazine (5) position, support base plate, lift cylinder (4) and is used for fixing the positioning cylinder (6) of film magazine (5); Said A optoelectronic switch is installed on the following retaining frame of film magazine (5); Support base plate and be positioned at film magazine (5) bottom and under the effect of lift cylinder (4), promote film magazine (5), lift cylinder (4) and positioning cylinder (6) place the bottom and the top of film magazine (5) respectively.
3. according to the said graphite boat automatic loading and unloading of claim 1 sheet up-down transfer device; It is characterized in that; Rotation mechanism comprises the B optoelectronic switch that puts in place of the travelling belt of transmission, transfer film magazine (10) and detection silicon chip back and forth up and down that is driven by motor (11) in the said silicon chip; Said travelling belt directly links to each other through castellated plates with transfer film magazine (10), and transfer film magazine (10) moves around up and down under the driving of motor (11), and the B optoelectronic switch is installed in transfer film magazine (10) upper plate or following panel edges.
4. according to the said graphite boat automatic loading and unloading of claim 1 sheet up-down transfer device; It is characterized in that; Said silicon chip transmission mechanism comprises electronic slide unit (9), support and several suckers; Said electronic slide unit (9) is fixed through support, on the electronic slide unit (9) get the sheet plate can be in the film magazine (5) of film magazine hoisting appliance (2) and silicon chip between the transfer film magazine (10) of rotation mechanism (7) level slidably reciprocate, said sucker becomes the triangle layout to be installed on to get the side of sheet plate near film magazine.
CN2012101432126A 2012-05-10 2012-05-10 Lifting and delivering device for automatic wafer loading and unloading of graphite boat Pending CN102653859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012101432126A CN102653859A (en) 2012-05-10 2012-05-10 Lifting and delivering device for automatic wafer loading and unloading of graphite boat

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Application Number Priority Date Filing Date Title
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102931120A (en) * 2012-10-25 2013-02-13 上海集成电路研发中心有限公司 Workpiece transmission system
CN103681420A (en) * 2013-11-22 2014-03-26 中国电子科技集团公司第四十八研究所 Automatic mounting and detaching system for silicon wafers of graphite boat for tube plasma enhanced chemical vapor deposition (PECVD)
CN107365980A (en) * 2017-07-10 2017-11-21 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
WO2018036488A1 (en) * 2016-08-25 2018-03-01 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat transport mechanism used in pecvd apparatus
WO2018103678A1 (en) * 2016-12-07 2018-06-14 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat side discharging mechanism provided with inverted wafer detection device
CN110783430A (en) * 2019-11-06 2020-02-11 上海焕巍智能科技有限公司 Solar silicon wafer guiding and exchanging method and device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970065766A (en) * 1996-03-18 1997-10-13 장진 Inductive plasma chemical vapor deposition method and amorphous silicon thin film transistor produced using the same
US20010029892A1 (en) * 1997-08-11 2001-10-18 Robert C. Cook Vertical plasma enhanced process apparatus & method
CN201655771U (en) * 2009-12-24 2010-11-24 徐竹林 Fully-automatic silicon slice loading and unloading machine
CN102244141A (en) * 2011-06-21 2011-11-16 中国电子科技集团公司第二研究所 On-line full-automatic silicon wafer loading and unloading machine
CN102437251A (en) * 2011-12-31 2012-05-02 无锡市奥曼特科技有限公司 Silicon wafer automatic material charging and discharging system for plate-type PECVD (plasma enhanced chemical vapor device)

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970065766A (en) * 1996-03-18 1997-10-13 장진 Inductive plasma chemical vapor deposition method and amorphous silicon thin film transistor produced using the same
US20010029892A1 (en) * 1997-08-11 2001-10-18 Robert C. Cook Vertical plasma enhanced process apparatus & method
CN201655771U (en) * 2009-12-24 2010-11-24 徐竹林 Fully-automatic silicon slice loading and unloading machine
CN102244141A (en) * 2011-06-21 2011-11-16 中国电子科技集团公司第二研究所 On-line full-automatic silicon wafer loading and unloading machine
CN102437251A (en) * 2011-12-31 2012-05-02 无锡市奥曼特科技有限公司 Silicon wafer automatic material charging and discharging system for plate-type PECVD (plasma enhanced chemical vapor device)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102931120A (en) * 2012-10-25 2013-02-13 上海集成电路研发中心有限公司 Workpiece transmission system
CN103681420A (en) * 2013-11-22 2014-03-26 中国电子科技集团公司第四十八研究所 Automatic mounting and detaching system for silicon wafers of graphite boat for tube plasma enhanced chemical vapor deposition (PECVD)
CN103681420B (en) * 2013-11-22 2016-06-29 中国电子科技集团公司第四十八研究所 A kind of graphite boat automatic loading and unloading sheet system for tubular type PECVD
WO2018036488A1 (en) * 2016-08-25 2018-03-01 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat transport mechanism used in pecvd apparatus
WO2018103678A1 (en) * 2016-12-07 2018-06-14 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat side discharging mechanism provided with inverted wafer detection device
CN107365980A (en) * 2017-07-10 2017-11-21 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
CN107365980B (en) * 2017-07-10 2019-01-11 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
CN110783430A (en) * 2019-11-06 2020-02-11 上海焕巍智能科技有限公司 Solar silicon wafer guiding and exchanging method and device

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Application publication date: 20120905