CN102653859A - Lifting and delivering device for automatic wafer loading and unloading of graphite boat - Google Patents

Abstract

The invention relates to a lifting transmission device for automatic loading and unloading of PECVD graphite boats, including a vertically placed frame and a transfer box for temporarily storing silicon chips, and a box that can drive the box to slide up and down is installed on the front of the frame A lifting mechanism, one side of the frame is provided with a silicon wafer transfer mechanism that can drive the transfer film box to slide up and down, and a silicon wafer transfer mechanism is provided on one side of the silicon wafer transfer mechanism that can horizontally transfer the film in the film box lifting mechanism and the silicon wafer transfer mechanism. Silicon wafer transmission mechanism of the box; the cassette lifting mechanism, silicon wafer transfer mechanism and silicon wafer transmission mechanism constitute the first group of lifting transmission devices, and a second group of lifting transmission devices symmetrical to the first group of lifting transmission devices is installed on the back of the frame. transfer device. Using the whole set of lifting transfer device of the present invention can quickly and accurately realize the unloading and loading of silicon wafers from the cassette, and the graphite boat does not need to be manually loaded and unloaded after the PECVD process, which reduces labor intensity and labor costs, and improves the automation of the solar cell production line level and production efficiency.

Description

A lifting transfer device for automatic loading and unloading of graphite boat

technical field

The invention relates to the field of solar cell manufacturing, in particular to a lifting transfer device for automatic loading and unloading sheets of PECVD graphite boats.

Background technique

In the production process of crystalline silicon solar cells, it is necessary to prepare a layer of anti-reflection film on the surface of the silicon wafer. Now the commonly used process is to grow a layer of silicon nitride film on the surface of the silicon wafer by PECVD. After the PECVD process is completed, the silicon wafers need to be taken out from the graphite boat, and then put into the silk screen printing box for the silk screen printing process; after all the silicon wafers in the graphite boat are taken out, the non-reflective film silicon wafers that have completed the previous cleaning process need to be reinserted, which is Graphite boat manually loads and unloads sheets. Due to the weight of the graphite boat and the narrow gap between the sheets, manual loading and unloading of the sheets is labor-intensive and labor-intensive. At the same time, the debris rate is high and the production efficiency cannot be improved.

Contents of the invention

The object of the present invention is to provide a graphite boat automatic loading and unloading sheet lifting transfer device for the differences in the prior art, so as to realize the graphite boat automatic loading and unloading sheet, and improve the automation degree and production efficiency of the solar cell production line.

The technical solution of the present invention is, a graphite boat automatic loading and unloading sheet lifting transmission device, including a vertically placed frame and a transfer cassette for temporarily storing silicon wafers, and a cassette that can drive the cassette to slide up and down is installed on the front of the frame A lifting mechanism, one side of the frame is provided with a silicon wafer transfer mechanism that can drive the transfer film box to slide up and down, and a silicon wafer transfer mechanism is provided on one side of the silicon wafer transfer mechanism that can horizontally transfer the film in the film box lifting mechanism and the silicon wafer transfer mechanism. Silicon wafer transmission mechanism of the box; the cassette lifting mechanism, silicon wafer transfer mechanism and silicon wafer transmission mechanism constitute the first group of lifting transmission devices, and a second group of lifting transmission devices symmetrical to the first group of lifting transmission devices is installed on the back of the frame. Transfer device; the center positions of the silicon wafers of the cassette lifting mechanism, the silicon wafer transfer mechanism and the silicon wafer transfer mechanism in each group of lifting and transferring devices are consistent.

The film box lifting mechanism includes a conveyor driven by a motor, a photoelectric switch A for detecting the position of the film box, a support base, a lifting cylinder and a positioning cylinder for fixing the film box. The A photoelectric switch is installed on the lower stop of the film box On the frame, the support base plate is located at the bottom of the film box and pushes the film box up and down under the action of the lifting cylinder, and the lifting cylinder and the positioning cylinder are respectively placed on the bottom and top of the film box.

The silicon wafer transfer mechanism includes a conveyor belt driven by a motor that drives up and down, a transfer cassette and a B photoelectric switch that detects the silicon wafer in place. The conveyor belt is directly connected to the transfer cassette through a toothed plate, driven by the motor. The transfer box moves up and down, and the B photoelectric switch is installed on the upper or lower edge of the transfer box.

The silicon wafer transfer mechanism includes an electric slide table, a bracket and several suction cups, the electric slide table is fixed by the support, and the sheet taking plate on the electric slide table can be transferred between the sheet cassette of the cassette lifting mechanism and the silicon wafer transfer mechanism. The cassettes slide quickly back and forth horizontally, and the suction cups are installed in a triangular layout on the side of the taking plate close to the cassettes for grabbing silicon wafers.

The process that needs to be completed for the automatic loading and unloading of graphite boats is to take out the silicon wafers coated with anti-reflection coatings in the graphite boats and finally put them into the empty film box for silk screen printing, and to fill the empty graphite boats after unloading, so the whole set In the lifting transmission mechanism, there are two sets of cassette lifting mechanism, silicon wafer transfer mechanism, and silicon wafer transmission mechanism, which are respectively installed on the front and back sides of the frame.

Cassette lifting mechanism and silicon wafer transfer mechanism are installed side by side, and the direction of the two is opposite when they are vertically lifted; silicon wafer transfer mechanism is fixed on the frame bottom plate, shuttles back and forth between the cassette lifting mechanism and silicon wafer transfer mechanism, and transfers silicon wafers horizontally; The lifting action is driven by their own motors, and the sliding table is responsible for the horizontal transfer of silicon wafers. After installation and fixing, the center positions of the silicon wafers of the three are consistent. In order to correspond to the automatic loading and unloading of graphite boats, there are two sets of cassette lifting mechanism, silicon wafer transfer mechanism and silicon wafer transfer mechanism in the lifting and transferring mechanism, which are respectively located on the front and back sides of the frame, and the installation position and fixing method are the same.

The specific process flow of the lifting transmission mechanism for automatic loading and unloading of graphite boats will be introduced below.

After the cleaning process is completed, the cassettes delivered are relayed by the conveyor in the cassette lifting mechanism. After the photoelectric switch detects the position, the lifting cylinder lifts the cassette, and the positioning cylinder moves up and down at the same time to fix the cassette and unload the cassette. Prepare. When unloading the film, the cassette lifting mechanism gradually descends according to the distance between the cassettes, and the parallel silicon wafer transfer mechanism gradually rises according to the distance between the transfer cassettes. Take the pieces one by one and put them into the transfer box for temporary storage, and complete the unloading of the box. The manipulator of the graphite boat automatic loading and unloading equipment only needs to take the sheets from the transfer box to load the graphite boat. The above is the unloading of the film cassette of the lifting transfer mechanism. When the film cassette is loaded on the back of the frame, the actions of all parts are the same, and the order is reversed, that is, the manipulator takes the film from the graphite boat and puts it into the transfer cassette, and then the silicon wafer transfer mechanism descends, and the cassette The lifting mechanism rises, and the silicon wafer transfer mechanism horizontally transfers back and forth to complete the cassette loading. The actions on both sides can be carried out at the same time, which improves the production efficiency of the equipment.

From the above, it can be known that using the whole set of lifting transfer device of the present invention can quickly and accurately realize the unloading and loading of silicon wafers from the cassette, and the graphite boat does not need to be manually loaded and unloaded after the PECVD process, which reduces labor intensity and labor costs, and improves The degree of automation and production efficiency of solar cell production lines.

Description of drawings

Fig. 1 is the structural schematic diagram of the lifting transmission device of the automatic loading and unloading sheet of the graphite boat described in the invention;

Fig. 2 is a structural diagram of the used film cassette of the film cassette lifting mechanism;

Fig. 3 is a structural diagram of the transfer cassette of the silicon wafer transfer mechanism;

Each serial number in the above-mentioned accompanying drawings represents respectively:

1-frame, 2-cassette lifting mechanism, 3-conveyor, 4-lifting cylinder,

5-piece box, 6-positioning cylinder, 7-silicon wafer transfer mechanism,

8-wafer transfer mechanism, 9-sliding table, 10-transfer cassette, 11-silicon wafer transfer mechanism motor, 12-cassette lifting mechanism motor.

Detailed ways

As shown in Figures 1-3, a graphite boat automatic loading and unloading sheet lifting transfer device includes a vertically placed frame 1 and a transfer cassette 10 for temporarily storing silicon wafers, and the front of the frame 1 is installed to drive the cassette 5. A film box lifting mechanism 2 that slides up and down. One side of the frame 1 is provided with a silicon wafer transfer mechanism 7 that can drive the transfer film box 10 to slide up and down. The wafer transfer mechanism 8 of the horizontal transmission sheet box in the lifting mechanism 2 and the silicon wafer transfer mechanism 7; The back side of frame 1 is installed with the second group of lifting transfer device symmetrical with the first group of lifting transfer device; Center bit consistent.

The film box lifting mechanism includes a conveyor 3 driven by a motor 12, a photoelectric switch A for detecting the position of the film box 5, a supporting base plate, a lifting cylinder 4 and a positioning cylinder 6 for fixing the film box 5, and the A photoelectric switch is installed on the film box. On the lower frame of the box 5, the support base plate is positioned at the bottom of the film box 5 and promotes the film box 5 to lift under the action of the lifting cylinder 4, and the lifting cylinder 4 and the positioning cylinder 6 are respectively placed on the bottom and the top of the film box 5.

The silicon wafer transfer mechanism includes a conveyor belt driven up and down by a motor 11, a transfer cassette 10, and a B photoelectric switch for detecting that the silicon wafer is in place. The conveyor belt is directly connected to the transfer cassette 10 through a toothed plate. Under the drive of 11, the transfer film box 10 moves up and down, and the B photoelectric switch is installed on the transfer film box 10 upper plate or the edge of the lower plate.

Described silicon chip transmission mechanism comprises electric slide table 9, support and some suction cups, and described electric slide table 9 is fixed by support, and the slice plate that gets on the electric slide table 9 can be on the sheet box 5 of film box elevating mechanism 2 and silicon The transfer cassettes 10 of the wafer transfer mechanism 7 slide quickly back and forth horizontally, and the suction cups are installed in a triangular layout on the side of the sheet picking plate close to the cassettes for grabbing silicon wafers.

Claims (4)

1. A graphite boat automatic loading and unloading sheet lifting transfer device, including a vertically placed frame (1) and a transfer box (10) for temporarily storing silicon chips, characterized in that the front of the frame (1) can be installed A film box lifting mechanism (2) that drives the film box (5) to slide up and down. One side of the frame (1) is provided with a silicon wafer transfer mechanism (7) that can drive the film box (10) to slide up and down. One side of the film transfer mechanism (7) is provided with a silicon wafer transfer mechanism (8) that can horizontally transfer the film cassette in the cassette lifting mechanism (2) and the silicon wafer transfer mechanism (7); the cassette lifting mechanism (2 ), the silicon wafer transfer mechanism (7) and the silicon wafer transfer mechanism (8) constitute the first group of lifting transmission devices, and a second group of lifting transmission devices symmetrical to the first group of lifting transmission devices is installed on the back of the frame (1); The silicon wafer centers of the cassette lifting mechanism (2), the silicon wafer transfer mechanism (7) and the silicon wafer transferring mechanism (8) in each group of lifting and transferring devices are consistent. 2. The graphite boat automatic loading and unloading sheet lifting transfer device according to claim 1, characterized in that, the sheet box lifting mechanism includes a conveyor (3) driven by a motor (12), A for detecting the position of the sheet box (5) A photoelectric switch, a supporting base plate, a lifting cylinder (4) and a positioning cylinder (6) for fixing the cassette (5), the photoelectric switch A is installed on the lower frame of the cassette (5), and the supporting base plate is located on the cassette (5) the bottom and push the film box (5) up and down under the action of the lifting cylinder (4), and the lifting cylinder (4) and positioning cylinder (6) are respectively placed on the bottom and top of the film box (5). 3. The graphite boat automatic loading and unloading sheet lifting transfer device according to claim 1, characterized in that, the silicon wafer transfer mechanism includes a conveyor belt driven by a motor (11) for up and down transmission, a transfer cassette (10) and a detection The B photoelectric switch with the silicon wafer in place, the conveyor belt is directly connected to the transfer film box (10) through the toothed plate, and the transfer film box (10) moves up and down under the drive of the motor (11), and the B photoelectric switch is installed on the transfer box Sheet box (10) upper plate or lower plate edge. 4. The graphite boat automatic loading and unloading sheet lifting transfer device according to claim 1, characterized in that, the silicon chip transfer mechanism includes an electric slide table (9), a bracket and several suction cups, and the electric slide table (9) passes through The bracket is fixed, and the take-up plate on the electric sliding table (9) can slide back and forth horizontally between the cassette (5) of the cassette lifting mechanism (2) and the transfer cassette (10) of the silicon wafer transfer mechanism (7). The suction cups are installed in a triangular layout on the side of the sheet-taking plate close to the sheet box.

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