CN102653706A - Nonmetallic element cleaner - Google Patents
Nonmetallic element cleaner Download PDFInfo
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- CN102653706A CN102653706A CN2011100513530A CN201110051353A CN102653706A CN 102653706 A CN102653706 A CN 102653706A CN 2011100513530 A CN2011100513530 A CN 2011100513530A CN 201110051353 A CN201110051353 A CN 201110051353A CN 102653706 A CN102653706 A CN 102653706A
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Abstract
The invention discloses a nonmetallic element cleaner which is applied to the cleaning of nonmetallic materials or components of electronic element parts. The nonmetallic element cleaner is characterized in that: the cleaner comprises the following compositions in percentage by weight: 6-8% of a surfactant, 1-3% of an auxiliary solvent, 0.3-0.5% of a preservative and a rust inhibitor, and the balance of deionized water, wherein the surfactant is a ionic-nonionic surfactant; and the auxiliary solvent is a polyol solvent. The cleaner disclosed by the invention can carry out effective cleaning on metal ions, organic and inorganic impurities and solid particles on the surfaces of electronic materials, and the cleaning force is strong; after the cleaning is completed, liquid can be directly drained without causing pollution to the environment; and materials subjected to cleaning are not corroded and rusted. The nonmetallic element cleaner disclosed by the invention is particularly beneficial to the cleaning of nonmetal parts such as semiconductor wafers, electronic glass substrates or LCD (liquid crystal displays), and the like.
Description
Technical field
The present invention particularly partly carries out decontamination to non-metal component in the electronic component about a kind of electronic component scavenging solution.
Background technology
Process for processing at electronic product prepares in the process; Be prepared as example with semiconductor element; Usually need use physics and chemical treatment technologies such as washing technology, mechanochemistry abrasion process; Thereby will form physics and chemical residual on its surface, like metallic impurity, organic and inorganic impurity and solids.These residuals are the outward appearance of impression product not only, more likely can form deleterious harm to follow-up art breading, influences the precision and the life-span of product.Along with the improper raising to accuracy requirement of semiconductor element, removing impurity and stained thing will be its inevitable requirement.Certainly other need the element of optics, electricity effect to be suitable for too to electronic glass and LCD etc. in these requirements.
Simultaneously, this field also requires to need to be suitable for safety and environmental protection to guarantee operator's health of human body to decontamination liquid, forbids the generation of inflammable and explosive harm; Be convenient to preparation, cost is low; After the decontamination hold-time long, and electronic component do not caused the corrosion on the performance; And the follow-up discharging of the decontamination material after using and processing also should be satisfied growing environmental requirement.
Summary of the invention
For solving the problems of the technologies described above; The present invention provides a kind of non-metal component sanitising agent; It is applied to the non-metallic material of electronic component part or the decontamination on the parts, and it is characterized in that: its formation component according to weight percent is following: tensio-active agent 6-8%, secondary solvent 1-3%; Anticorrosion, rust-preventive agent 0.3-0.5%, all the other are deionized water; Said tensio-active agent is ion-nonionogenic tenside; Said secondary solvent is the polyalcohols solvent.
Stain remover among the present invention can be to the lip-deep metals ion of electronic material, and organic and inorganic impurity and solids effectively clean, and cleaning force is strong, direct discharge opeing environmentally safe after the cleaning, the not corrosion of material after the cleaning.Particularly help decontamination to non-metallic components such as semiconductor wafer, electronic glass substrate or LCD.
Embodiment
The present invention provides a kind of non-metal component sanitising agent; It is applied to the non-metallic material of electronic component part or the decontamination on the parts; It is characterized in that: its formation component according to weight percent is following: tensio-active agent 6-8%; Secondary solvent 1-3%, anticorrosion, rust-preventive agent 0.3-0.5%, all the other are deionized water; Said tensio-active agent is ion-nonionogenic tenside; Said secondary solvent is the polyalcohols solvent.
As further improvement of the present invention, said anticorrosion, rust-preventive agent is triethanolamine oleate and benzotriazole.Said polyalcohols solvent is that any one or a few mixture of ethanol, terepthaloyl moietie, Ucar 35, USP Kosher, Virahol constitutes.
As further improvement of the present invention, said ion-ionic surfactant pack is drawn together: the mixture of the mixture of anionic surfactant, anionic surfactant and non-ionic surfactant or cats product and nonionogenic tenside.Said AS is a SAS, and nonionogenic tenside is fatty acid methyl ester ethoxylate and/or alkyl polyglycoside.
As improvement and embodiment further of the present invention; A kind of non-metal component sanitising agent is provided, it is characterized in that said clean-out system is made up of following components in weight percent: AS SAS 2-5%, nonionogenic tenside fatty acid methyl ester ethoxylate 1-2% and/or alkyl polyglycoside 2-4%; Anticorrosion, rust-preventive agent triethanolamine oleate 0.1-0.2%, benzotriazole 0.1-0.2%; Any one or a few 1-3% in secondary solvent ethanol, terepthaloyl moietie, Ucar 35, USP Kosher, the Virahol; All the other are mended to 100% for deionized water.
Non-metal component sanitising agent provided by the present invention particularly can be widely used in the non-metallic material of electronic component part or the decontamination on the parts.Said non-metallic component comprises: semiconductor wafer, electronic glass substrate or LCD etc. require the planeness and the residual demanding field of electrical components of element after high, the decontamination to clean effect.
Decontamination liquid production technique among the present invention is also corresponding simple, and its process for preparation is following; Add raw material according to the proportioning in the foregoing description, after stirring 45 minutes under 50 ℃ of temperature, leave standstill 60 minutes, be the decontamination liquid of product of the present invention to room temperature.
Simultaneously in process of production, for the ease of transportation, can it be mixed with liquid concentrator, promptly deionized water does not join in process of production, deionized water is added by proportioning in use again and uses.
The present invention uses the said ratio scheme, is solution with water base, is major ingredient with the surface activity liquid; Be added into polyalcohols and make assisted solution, make the more environmental protection of scavenging solution of producing, reduced environmental pollution; Do not endanger operator's health, and cleaning efficiency is high, scavenging period is short; Seepage force is high, not phosphorous hydrochlorate and nitrite in component, and biodegradability is good; Can be to semiconductor wafer, lip-deep metals ion, organic and inorganic impurity and solids such as electronic glass LCD screen clean, and can play antiseptic and rustproof effect to the electronic material after cleaning.
Non-metal component sanitising agent of the present invention uses ion-non-ionic surface active liquid, and ion surface active liquid uses yin, yang ion surface active liquid all can; Is good through experimental study to select the active liquid of cloudy sub-surface for use.As select for use SAS-to stretch alkyl sodium sulfonate; The active liquid of nonionic table can be selected polyoxyethylene-type non-ionic surface active liquid for use, polyvalent alcohol type non-ionic surface active liquid, and the active liquid of other type list face; Select FMEE-fatty acid methyl ester ethoxylate and APG-alkyl polyglycoside for use through experimental study; Assisted solution is selected polyalcohols for use; Add anticorrosionly, rust protection liquid makes the material rust corrosion not after the cleaning; Solution is used deionized water.
As improvement further, non-metal component sanitising agent of the present invention also has sequestrant and/or reductive agent.Preferably, said sequestrant is the compsn of the salt of amido poly carboxylic acid, hydroxycarboxylic acid, phosphonic acids, condensed phosphoric acid and condensed phosphoric acid.Preferably, said reductive agent is that carbon number is that 1~12 aldehydes, carbon number are that 6~9 reductones, carbon number are that 1~30 fatty amine, mercaptan are one or more reductive agents in the group that formed of the oxygen acid class of oxygen acid class and the phosphorus of reductive agent, sulphur.
Non-metal component sanitising agent of the present invention can reach the cleaning rate more than 99%; It is thus clear that do not have residual, the water-insoluble after the decontamination is less than 0.03%, and its PH is neutral simultaneously; Metal is not had corrosion phenomenon, and the stable long-time no layering down of physical and chemical state, phenomenon such as separate out.Be convenient to the use of extensive safety, compliance with environmental protection requirements.
Claims (10)
1. non-metal component sanitising agent; It is applied to the non-metallic material of electronic component part or the decontamination on the parts; It is characterized in that: its formation component according to weight percent is following: tensio-active agent 6-8%; Secondary solvent 1-3%, anticorrosion, rust-preventive agent 0.3-0.5%, all the other are deionized water;
Said tensio-active agent is ion-nonionogenic tenside;
Said secondary solvent is the polyalcohols solvent.
2. according to the described non-metal component sanitising agent of claim 1, it is characterized in that: said anticorrosion, rust-preventive agent is triethanolamine oleate and benzotriazole.
3. according to the described non-metal component sanitising agent of claim 1, it is characterized in that: said polyalcohols solvent is that any one or a few mixture of ethanol, terepthaloyl moietie, Ucar 35, USP Kosher, Virahol constitutes.
4. according to the described non-metal component sanitising agent of claim 1, it is characterized in that: said ion-ionic surfactant pack is drawn together: the mixture of the mixture of anionic surfactant, anionic surfactant and non-ionic surfactant or cats product and nonionogenic tenside.
5. according to the described non-metal component sanitising agent of claim 4, it is characterized in that: said AS is a SAS, and nonionogenic tenside is fatty acid methyl ester ethoxylate and/or alkyl polyglycoside.
6. according to the described non-metal component sanitising agent of claim 1, it is characterized in that: said clean-out system is made up of following components in weight percent: AS SAS 3-5%, nonionogenic tenside fatty acid methyl ester ethoxylate 1-3% and/or alkyl polyglycoside 2-3%; Anticorrosion, rust-preventive agent triethanolamine oleate 0.2-0.3%, benzotriazole 0.1-0.2%; Any one or a few 1-3% in secondary solvent ethanol, terepthaloyl moietie, Ucar 35, USP Kosher, the Virahol; All the other are deionized water.
7. according to the described non-metal component sanitising agent of claim 1, it is characterized in that: also have sequestrant and/or reductive agent.
8. according to the described non-metal component sanitising agent of claim 7, it is characterized in that: said sequestrant is the compsn of the salt of amido poly carboxylic acid, hydroxycarboxylic acid, phosphonic acids, condensed phosphoric acid and condensed phosphoric acid.
9. according to the described non-metal component sanitising agent of claim 7, it is characterized in that: said reductive agent is that carbon number is that 1~12 aldehydes, carbon number are that 6~9 reductones, carbon number are that 1~30 fatty amine, mercaptan are one or more reductive agents in the group that formed of the oxygen acid class of oxygen acid class and the phosphorus of reductive agent, sulphur.
10. according to the described non-metal component sanitising agent of claim 1, it is characterized in that: said non-metallic component comprises: in semiconductor wafer, electronic glass substrate or LCD.
Priority Applications (1)
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CN2011100513530A CN102653706A (en) | 2011-03-03 | 2011-03-03 | Nonmetallic element cleaner |
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CN2011100513530A CN102653706A (en) | 2011-03-03 | 2011-03-03 | Nonmetallic element cleaner |
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CN2011100513530A Pending CN102653706A (en) | 2011-03-03 | 2011-03-03 | Nonmetallic element cleaner |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103074169A (en) * | 2013-01-21 | 2013-05-01 | 上海艳紫化工科技有限公司 | Special cleaning agent for liquid crystal display screen |
CN104911042A (en) * | 2015-07-03 | 2015-09-16 | 陈泽林 | Washing liquid for display screen for electronic device |
CN105142606A (en) * | 2013-04-18 | 2015-12-09 | 株式会社资生堂 | Cleansing composition for pump foamer |
CN105219545A (en) * | 2015-10-19 | 2016-01-06 | 南京润屹电子科技有限公司 | A kind of clean-out system for electronic material and preparation method thereof |
CN105385508A (en) * | 2015-11-19 | 2016-03-09 | 深圳市天得一环境科技有限公司 | LCD water-based cleaning agent composition and use method thereof |
CN106148029A (en) * | 2016-06-28 | 2016-11-23 | 华蓥市高科德电子科技有限公司 | A kind of Light-Emitting Diode cleaning material |
CN106398877A (en) * | 2016-08-30 | 2017-02-15 | 成都市翻鑫家科技有限公司 | Environment-friendly electronic product cleaning agent |
CN106753844A (en) * | 2016-12-29 | 2017-05-31 | 芜湖乐普汽车科技有限公司 | The preparation method of glass substrate cleaning agent |
CN106867694A (en) * | 2016-12-29 | 2017-06-20 | 芜湖乐普汽车科技有限公司 | The cleaning method of glass substrate |
CN107881037A (en) * | 2016-09-30 | 2018-04-06 | 中国石油化工股份有限公司 | A kind of three-element catalytic complexing cleaning liquid |
US10669172B2 (en) | 2017-08-23 | 2020-06-02 | Ecolab Usa Inc. | Elemental sulfur dispersant to control fouling in water systems |
Citations (2)
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CN101818103A (en) * | 2010-05-17 | 2010-09-01 | 江西瑞思博化工有限公司 | Washing agent for electronic materials |
CN101848987A (en) * | 2007-09-14 | 2010-09-29 | 三洋化成工业株式会社 | Cleaning agent for electronic material |
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2011
- 2011-03-03 CN CN2011100513530A patent/CN102653706A/en active Pending
Patent Citations (2)
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CN101848987A (en) * | 2007-09-14 | 2010-09-29 | 三洋化成工业株式会社 | Cleaning agent for electronic material |
CN101818103A (en) * | 2010-05-17 | 2010-09-01 | 江西瑞思博化工有限公司 | Washing agent for electronic materials |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103074169A (en) * | 2013-01-21 | 2013-05-01 | 上海艳紫化工科技有限公司 | Special cleaning agent for liquid crystal display screen |
CN105142606A (en) * | 2013-04-18 | 2015-12-09 | 株式会社资生堂 | Cleansing composition for pump foamer |
CN105142606B (en) * | 2013-04-18 | 2017-05-03 | 株式会社资生堂 | Cleansing composition for pump foamer |
CN104911042A (en) * | 2015-07-03 | 2015-09-16 | 陈泽林 | Washing liquid for display screen for electronic device |
CN105219545A (en) * | 2015-10-19 | 2016-01-06 | 南京润屹电子科技有限公司 | A kind of clean-out system for electronic material and preparation method thereof |
CN105385508B (en) * | 2015-11-19 | 2018-12-21 | 深圳市天得一环境科技有限公司 | LCD water-base cleaning agent composition and its application method |
CN105385508A (en) * | 2015-11-19 | 2016-03-09 | 深圳市天得一环境科技有限公司 | LCD water-based cleaning agent composition and use method thereof |
CN106148029A (en) * | 2016-06-28 | 2016-11-23 | 华蓥市高科德电子科技有限公司 | A kind of Light-Emitting Diode cleaning material |
CN106398877A (en) * | 2016-08-30 | 2017-02-15 | 成都市翻鑫家科技有限公司 | Environment-friendly electronic product cleaning agent |
CN107881037A (en) * | 2016-09-30 | 2018-04-06 | 中国石油化工股份有限公司 | A kind of three-element catalytic complexing cleaning liquid |
CN107881037B (en) * | 2016-09-30 | 2020-08-25 | 中国石油化工股份有限公司 | Ternary catalytic complexing cleaning fluid |
CN106867694A (en) * | 2016-12-29 | 2017-06-20 | 芜湖乐普汽车科技有限公司 | The cleaning method of glass substrate |
CN106753844A (en) * | 2016-12-29 | 2017-05-31 | 芜湖乐普汽车科技有限公司 | The preparation method of glass substrate cleaning agent |
US10669172B2 (en) | 2017-08-23 | 2020-06-02 | Ecolab Usa Inc. | Elemental sulfur dispersant to control fouling in water systems |
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Application publication date: 20120905 |