CN102538664B - Three-dimensional position tracking and measuring device and measuring method thereof - Google Patents

Three-dimensional position tracking and measuring device and measuring method thereof Download PDF

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CN102538664B
CN102538664B CN2010105867630A CN201010586763A CN102538664B CN 102538664 B CN102538664 B CN 102538664B CN 2010105867630 A CN2010105867630 A CN 2010105867630A CN 201010586763 A CN201010586763 A CN 201010586763A CN 102538664 B CN102538664 B CN 102538664B
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steering
dimensional
interferometer
element
member
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CN102538664A (en
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朱思俊
邹媛媛
郭大忠
柳连柱
赵明扬
许石哲
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中国科学院沈阳自动化研究所
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Abstract

本发明属于测量领域,具体地说是一种三维位置跟踪测量装置及其测量方法,装置包括干涉仪本体、干涉计镜组、偏差检测系统、二维随动系统、目标反射镜及第一、二转向元件,方法为干涉仪本体发射的激光光路依次通过干涉计镜组、分光元件,经第一、二转向元件转向后照射到目标反射镜上,目标反射镜反射的光经两个转向元件后照射到偏差检测系统上,通过分光元件分为两路,一路反射回干涉仪本体,另一路照射在光斑位置传感器上;再将检测出的偏移量转换成位移信号后传递给二维随动系统中的各伺服电机,带动第一、二转向元件移动,使第一、二转向元件准确跟踪目标反射镜。 The present invention belongs to the field of measurement, particularly apparatus and method for measuring a three-dimensional position of the tracking measuring device comprises a body interferometer, interferometer mirror group, a deviation detecting system, a two-dimensional servo system, a mirror and a first target, two steering elements, the method for the laser interferometer path sequentially transmitted through the body interferometer mirror group, the spectral element, the element is irradiated onto a target steering mirror through the first and second steering, two target light is reflected by the mirror turning device after irradiation on the deviation detection system, divided into two by a beam splitter element, the interferometer is reflected back along the body, the other path is irradiated on the spot position sensor; subsequently transmitted to the two-dimensional offset then converted into a displacement signal detected moving each of the servo motor system, driven by the first and second steering element moves the first and second steering mirror element accurately track targets. 本发明测量精度高,结构简单,便携性好;测量方法简单,可靠性强。 High accuracy of the present invention, a simple structure, good portability; measurement method is simple, high reliability.

Description

一种三维位置跟踪测量装置及其测量方法 A three-dimensional position of the tracking measuring device and measuring method

技术领域 FIELD

[0001] 本发明属于测量领域,具体地说是一种三维位置跟踪测量装置及其测量方法。 [0001] The present invention belongs to the field of measurement, in particular a three-dimensional position of the tracking device and a measurement method.

背景技术 Background technique

[0002] 精密位置及姿态测量系统应用广泛,如工件加工、组件装配、刀具运动、工装定位等。 [0002] The precise position and orientation measurement systems are widely used, such as a workpiece, assembling the components, tool movement, positioning tooling. 而在一些工作站级的生产领域中,产品质量主要取决于设备或工件的位置精度。 In some production fields workstation-class, quality or accuracy of the device depends on the position of the workpiece. 如基于关节机器人的点焊操作通常仅需要确保机器人执行末端在相应负载下的位置精度。 The spot welding operation is typically based on an articulated robot need only be performed to ensure the positional accuracy of the robot at the respective end of the load. 针对这类工作站级测量需求,测量装备需要具有以下特征:1.测量设备便携性好;2.测量设备本体及测试方法对被测量设备精度无影响;3.测量距离<2m;4.静态精度< 15μπι;5.动态检测精度< 20〜25μπι。 Such demand for the workstation measurement, the measurement equipment is required to have the following characteristics: a good portability measuring device; measuring apparatus body 2 and a test method for measuring the accuracy of the device no effect; 3 measured distance <2m; 4 static accuracy.... <15μπι;. 5 dynamic detection accuracy <20~25μπι.

[0003] 在现有相关产品中,龙门式三坐标测量机的测量精度高,但体积庞大不宜移动;关节臂式测量仪便携性好,但精度在Im处> 30 μ m,且一般需要人员辅助,不宜自主跟踪测量;激光跟踪仪便携性好,精度在距离Im处约为15 μ m,其测量精度受码盘精度影响,随测量距离增加而变大。 [0003] In the prior related products, high accuracy coordinate measuring machine gantry, but not bulky movement; articulated arm measuring instrument good portability, but the accuracy of Im> 30 μ m, and generally require the art auxiliary, not independent tracking measurement; laser tracker good portability, accuracy of about 15 μ m at a distance of Im, the measurement accuracy is affected by the accuracy of code wheel, measured with increasing distance increases. 因此,现有设备尚无法满足上述工作站级的位置测量要求。 Thus, existing equipment can not yet satisfy the above requirements workstation stage position measurement.

[0004] 激光干涉仪是基于光干涉原理的通用长度测量工具。 [0004] The laser interferometer length measuring instrument is based on the general principle of optical interference. 结合不同的光学组件,激光干涉仪可以实现线位移、角位移、直线度、垂直度、平面度等多项指标的测量;由于激光干涉仪以激光波长作为已知标准长度,因而其测量精度高。 The combination of different optical components, a laser interferometer measuring a number of indicators of linear displacement, angular displacement, straightness, squareness, flatness and the like may be implemented; due to laser wavelength laser interferometer is known as a standard length, and thus a high measurement accuracy . 不仅如此,干涉仪本体与运动部件不发生物理接触(仅将反射镜安装在运动部件上),因而避免了传统接触式测量方式对测试结果的影响。 Moreover, the interferometer moving member body and the physical contact (only a mirror is mounted on the moving member), thus avoiding the traditional contact measurement influence the test results. 基于上述诸多优点,本发明以激光干涉仪为核心部件,实现三维的位置测量。 Based on the above advantages, the present invention is a laser interferometer as the core member, three-dimensional position measurements.

发明内容 SUMMARY

[0005] 本发明的目的在于提供一种满足上述工作站级操作位置精度的三维位置跟踪测量装置及其测量方法。 [0005] The object of the present invention is to provide a three-dimensional position of the workstation operating position tracking accuracy measuring apparatus and measuring method to meet.

[0006] 本发明的目的是通过以下技术方案来实现的: [0006] The object of the present invention is achieved by the following technical solution:

[0007] 本发明包括干涉仪本体、干涉计镜组、偏差检测系统、二维随动系统、第一转向元件、目标反射镜及第二转向元件,其中干涉仪本体、偏差检测系统及二维随动系统分别安装在支撑件上,目标反射镜安装在被测机器人的末端执行器上,干涉仪本体的激光输出端设有干涉计镜组,所述第一转向元件及第二转向元件分别安装在二维随动系统上,第一转向元件具有平行于激光光路的一个移动自由度,第二转向元件具有平行于激光光路及垂直于激光光路的两个移动自由度;所述偏差检测系统包括分光元件及光斑位置传感器,干涉仪本体发射的激光光路依次通过干涉计镜组、分光元件,经第一转向元件、第二转向元件转向后照射到目标反射镜上,目标反射镜反射的光经第二转向元件及第一转向元件后照射到偏差检测系统上,通过分光元件分为两路,一路 [0007] The present invention comprises a body interferometer, interferometer mirror group, a deviation detecting system, a two-dimensional servo system, a first steering member, and a second target steering mirror element, wherein the interferometer main body, and a two-dimensional system deviation detection servo system are mounted on the support member, the target mirror mounted on the end effector of the robot is measured, the output of a laser interferometer main body is provided with an interferometer lens group, the first steering member and the second steering member, respectively mounted on a two-dimensional servo system, a first steering member having a freedom of movement parallel to the path of the laser beam, a second steering member having two degrees of freedom in movement of the laser light path parallel to and perpendicular to the laser beam path; said deviation detection system and a spectroscopic element comprising a light spot position sensor, the optical path of the laser interferometer passes through the body of an interferometer emitting lens group, the spectral element, the first steering member, a second steering member after the steering mirror is irradiated onto the target, the target light reflected by the mirror after a first and a second steering member to the steering member is irradiated deviation detecting system, it is divided into two parts, one by the spectroscopic element 反射回干涉仪本体,另一路照射在光斑位置传感器上。 Reflected back to the interferometer main body, another way is irradiated on the spot position sensor.

[0008] 其中:所述干涉计镜组、分光元件、光斑位置传感器、第一转向元件、目标反射镜及第二转向元件由激光照射部分的轴线位于发射激光光路及反射激光光路之间的中间位置;所述偏差检测系统中的分光元件及光斑位置传感器分别设置在安装架上,光斑位置传感器位于分光元件的下方;在支撑件上设有三维位置调整台,所述安装架固定在三维位置调整台上;所述二维随动系统包括两个互相平行、安装在支撑件上的直线单元以及两个分别连接于直线单元上的一维随动系统,每个一维随动系统均可沿直线单元往复移动;所述第一转向元件及第二转向元件分别安装在两个一维随动系统上;直线单元为伺服电机带动丝杠转动、通过丝杠与丝母的螺纹连接使丝母移动的结构;一维随动系统包括支座、丝杆转轴、滑块、导轨、调整底座及二维旋转平台,其中 [0008] wherein: said interferometer mirror group, the spectral element, the spot position sensor, a first steering member, a second target steering mirror and an intermediate element between the laser and the optical path of the reflected laser beam from the optical path of the laser irradiated portion is located in the axis of emission position; spectroscopic sensor element and the spot position deviation detection system are provided to the mounting plate, the lower element is located in the spot position of the spectroscopic sensor; three-dimensional position adjustment table is provided on the support member, the mounting bracket is fixed to the three-dimensional position adjusting stage; the servo system comprises a two-dimensional parallel to each other, and two linear units mounted on the support member are connected to a one-dimensional linear servo system unit, a dimension of each servo system can reciprocally moving along the linear unit; the first steering member and the second deflection element are mounted on a two-dimensional servo system; linear servo motor driven lead screw means is rotated, by screwing the nut of the screw and the yarn moving the parent structure; servo system comprises a one-dimensional bearing, screw shaft, slide, rails, and two-dimensional adjustment of the rotating platform base, wherein 座分别与两个直线单元中的丝母相连,丝杆转轴可转动地安装在支座上,丝杆转轴的一端连接有伺服电机及编码器;所述导轨固定在支座上、位于丝杆转轴的上方,导轨上连接有滑块,该滑块固接有与丝杆转轴螺纹连接的丝母;在滑块上安装有调整底座,调整底座上设有二维旋转平台,转向元件安装在二维旋转平台上;滑块及其上安装的部件通过丝母与丝杆转轴的转动,沿导轨与激光光路平行的方向往复移动;支座的一侧固接控制开关,调整底座上设有与控制开关相对应的挡块。 And the nut seat are two linear units is connected to the screw shaft rotatably mounted on the support, one end of the screw shaft is connected to a servo motor and encoder; the rail to the support, located screw the upper shaft is connected to the upper rail slider which is fixed with a screw nut connected to the threaded shaft; mounted on the slider to adjust the base, the base is provided with a two-dimensional adjustment of the rotating platform, mounted on a steering member a two-dimensional rotating platform; and a slider member mounted on the nut by rotating the screw shaft to reciprocate in a direction parallel to the guide rail of the laser light path; control switch fixed side bearing, provided on the base adjustment and the control switch corresponding to the stopper.

[0009] 本发明的测量方法为:干涉仪本体发出的激光依次穿过干涉计镜组、偏差检测系统中的分光元件,经第一转向元件、第二转向元件转向后照射到被测机器人末端执行器上的目标反射镜,由目标反射镜反射的反射光路经第一转向元件、第二转向元件转向后照射到分光元件、被分成两路,其中一路经干涉计镜组反射回干涉仪本体,另一路照射到光斑位置传感器上,由光斑位置传感器检测目标反射镜随被测机器人移动产生的偏移,再将检测出的偏移量转换成位移信号后传递给二维随动系统中的各伺服电机,由各伺服电机带动第一转向元件及第二转向元件移动,使第一转向元件及第二转向元件准确跟踪目标反射镜。 [0009] The measuring method of the present invention are: the emitted laser interferometer passes through the body interferometer mirror group, the spectroscopic system deviation detection elements, the first steering member, a second steering member after the irradiation to the measured steering robot end mirror objective on the actuator, reflected light from the target path first steering mirror element, the second splitting element steering a steering member irradiated, is divided into two, wherein all the way through the interferometer is reflected back to the interferometer mirror groups body after another way is irradiated onto the spot position sensor, a mirror objective with the measured displacement of the robot movement generated by the light spot position detecting sensor, then converted into a shift amount detected by the displacement signal to the servo system of the two-dimensional each servo motors, each first servo motor drives the steering movement of the steering member and the second member, the first member and the second steering member accurately track the target steering mirror.

[0010] 其中:所述偏移量为由于目标反射镜随被测机器人运动,照射到光斑位置传感器上的光班中心发生偏移。 [0010] wherein: said offset is Since the target robot with the measured reflection mirror, the light is irradiated on the center spot shift position sensor is offset.

[0011 ] 本发明的优点与积极效果为: [0011] The advantages and positive effects of the present invention are:

[0012] 本发明测量精度高,结构简单,便携性好;测量方法简单,可靠性强。 [0012] The present invention high measurement precision, simple structure and good portability; measurement method is simple, high reliability.

附图说明 BRIEF DESCRIPTION

[0013] 图1为本发明三维位置跟踪测量装置的立体结构示意图; [0013] FIG. 1 is a schematic structural diagram of a stereoscopic three-dimensional position tracking device measuring the invention;

[0014] 图2为图1的主视图; [0014] FIG. 2 is a front view of Figure 1;

[0015] 图3为图1的俯视图; [0015] FIG. 3 is a plan view of Figure 1;

[0016] 图4为图1中偏差检测系统的立体结构示意图; [0016] FIG. 4 is a schematic perspective view of a configuration of the deviation detection system of FIG;

[0017] 图5为图1中二维随动系统的立体结构示意图; [0017] FIG. 5 is a schematic view in perspective of the two-dimensional servo system of FIG 1;

[0018] 图6为图5中一维随动系统的立体结构示意图;其中: [0018] FIG. 6 is a perspective schematic structural diagram of a 5-dimensional servo system of Figure 1; wherein:

[0019] I为干涉仪本体;2为干涉计镜组, [0019] I is the interferometer body; mirror interferometer 2 is set,

[0020] 3为偏差检测系统,301为分光元件,302为光斑位置传感器;303为安装架,304为 [0020] 3 is a deviation detection system, the spectroscopic element 301, 302 is a spot position sensor; mount 303, 304

三维位置调整台; The three-dimensional position adjustment table;

[0021] 4为二维随动系统,401为直线单元,402为一维随动系统,403为支座,404为丝杆转轴,405为滑块,406为导轨,407为调整底座,408为二维旋转平台,409为挡块,410为调整杆,411为控制开关; [0021] a two-dimensional servo system 4, a linear unit 401, 402 is a one-dimensional servo system, is holder 403, lead screw shaft 404, the slider 405, the guide rail 406, 407 to adjust a base 408 a two-dimensional rotating platform, the stopper 409, the lever 410 is adjusted, the control switch 411;

[0022] 5为第一转向元件,6为目标反射镜,7为支撑件,8为被测机器人,9为第二转向元件。 [0022] 5 to a first steering member, for the target reflector 6, 7 for the support member, the robot 8 is measured, a second steering member 9. 具体实施方式 Detailed ways

[0023] 下面结合附图对本发明作进一步详述。 [0023] The following drawings in conjunction with the present invention will be further described in detail.

[0024] 如图1〜5所示,本发明三维位置跟踪测量装置包括干涉仪本体1、干涉计镜组2、偏差检测系统3、二维随动系统4、第一转向元件5、目标反射镜6及第二转向元件9,其中干涉仪本体1、偏差检测系统3及二维随动系统4分别安装在支撑件7上,目标反射镜6安装在被测机器人I的末端执行器上,干涉仪本体I的激光输出端固接有干涉计镜组2。 [0024] As shown in FIG. 1 ~ 5, the present invention is a three-dimensional position of the tracking measuring device 1 comprises a body interferometer, interferometer mirror assembly 2, the deviation detection system 3, a two-dimensional servo system 4, a first steering member 5, the object reflector steering member 6 and the second mirror 9, wherein the interferometer main body 1, and a 3-dimensional system deviation detection servo system 4 are mounted on the support member 7, the target mirror 6 mounted on the end effector of the robot measured I, laser interferometer output end of the body I with a fixed interferometer mirror assembly 2.

[0025] 偏差检测系统3包括分光元件301、光斑位置传感器302、安装架303及三维位置调整台304,其中三维位置调整台304固定在支撑件7上,安装架303安装在三维位置调整台304上,分光元件301及光斑位置传感器302分别设置在安装架303上,光斑位置传感器302位于分光元件301的下方。 [0025] deviation detecting system 3 comprises a spectroscopic element 301, the light spot position sensor 302, mounting bracket 303 and the three-dimensional position adjustment units 304, wherein the three-dimensional position adjustment stage 304 fixed to the support member 7, the mounting bracket 303 is mounted adjustment stage in the three-dimensional position 304 the spectroscopic element 301 and the spot position sensor 302 are provided on the mounting bracket 303, spot position sensor 302 is located below the spectral element 301. 分光元件301及光斑位置传感器302通过三维位置调整台304可以进行位置调整,三维位置调整台304的三维是指与激光光路平行的方向、在水平面上垂直于激光光路的方向以及垂直于水平面的铅垂方向。 Spectroscopic element 301 and the spot position sensor 302 is adjusted by the three-dimensional position of the stage 304 may be the position adjustment, the three-dimensional position adjustment of the three-dimensional stage 304 refers to a direction parallel to the laser optical path, the direction in a horizontal plane perpendicular to the laser light path and lead perpendicular to the horizontal plane the vertical direction.

[0026] 二维随动系统4包括两个互相平行、安装在支撑件7上的直线单元401以及两个分别连接于直线单元401上的一维随动系统402,两个直线单元401垂直于激光光路设置,两个一维随动系统402与激光光路平行地连接在两上直线单元401之间;其中一个一维随动系统402上设有第一转向元件5,另一个一维随动系统402上设有第二转向元件9,第一转向元件5具有平行于激光光路的一个移动自由度,第二转向元件具有平行于激光光路及垂直于激光光路的两个移动自由度;直线单元401为伺服电机带动丝杠转动、通过丝杠与丝母的螺纹连接使丝母移动的结构,每个一维随动系统的两端分别连接与直线单元401上的丝母,使每个一维随动系统402均可沿直线单元401往复移动。 [0026] The two-dimensional servo system 4 comprises two mutually parallel, linear units mounted on the support member 7 and 401 are respectively connected to the two straight one-dimensional unit 401 servo system 402, 401 is perpendicular to the two linear units laser optical path setting, a two-dimensional servo system 402 is connected to the laser path parallel to the straight line between the two units 401; wherein a one-dimensional steering servo system is provided with a first member 5 402, another one-dimensional follower system 402 is provided with a second steering member 9, the first turning member 5 has a freedom of movement parallel to the path of the laser beam, a second steering member having two degrees of freedom in movement of the laser light path parallel to and perpendicular to the laser beam path; linear units servo motor driven lead screw 401 is rotated, by screwing the nut screw and the nut causes movement of the structure, are connected to the nut 401 on the ends of each one-dimensional linear units servo system, so that each one dimensional servo system 402 can reciprocate in a straight line unit 401.

[0027] 一维随动系统402包括支座403、丝杆转轴404、滑块405、导轨406、调整底座407、二维旋转平台408、挡块409及控制开关411,其中支座403分别与两个直线单元中的丝母相连,丝杆转轴404的两端通过轴承可转动地安装在支座403上,丝杆转轴404的一端由支座403穿出、连接有伺服电机及编码器;导轨406固定在支座403的顶部、位于丝杆转轴404的上方,导轨406上连接有滑块405,该滑块405固接有与丝杆转轴404螺纹连接的丝母;在滑块405上安装有调整底座407,调整底座407上设有二维旋转平台408,第一转向元件5通过调整杆410安装在一个一维随动系统的二维旋转平台408上,第二转向元件9直接安装在另一个一维随动系统的二维旋转平台408上;滑块405及其上安装的部件通过丝母与丝杆转轴404的转动,沿导轨与激光光路平行的方向往复移动。 [0027] The one-dimensional servo system 402 comprises a support 403, a screw shaft 404, the slider 405, the guide rails 406, 407 to adjust the base, the two-dimensional rotating platform 408, the stopper 409 and control switches 411, 403, respectively, and wherein the support nut unit connected to the two straight, both ends of the screw shaft 404 is rotatably mounted via bearings 403 on the support, one end of the screw shaft 404 piercing the support 403, and is connected with a servo motor encoder; top guide rails 406 fixed to the carrier 403, located above the screw shaft 404, a slider 405 connected to the upper rail 406, the slider 405 is fixed to the screw with a nut connected to the threaded shaft 404; the slider 405 adjusting mount 407 is mounted, is provided with a two-dimensional adjustment of the rotary table 408 on the base 407, a first steering member 5 by adjusting the lever 410 is mounted on a rotating platform a two-dimensional one-dimensional servo system 408, a second steering member 9 is mounted directly in another two-dimensional one-dimensional rotating platform 408 of the servo system; rotating slide member 405 and mounted on the screw shaft by the nut 404, the guide rail and reciprocates in a direction parallel to the laser path. 支座403的一侧固接三个控制开关411,其中两个为限位开关,中间的一个为零位开关,在调整底座407上设有与控制开关411相对应的挡块409。 Side bearing 403 is fixed to the three control switches 411, of which two limit switches, a zero intermediate switch, the control switch 411 is provided with a stopper 409 corresponding to the adjustment on the base 407. 第一转向元件5的位置可通过二维旋转平台408进行初调,然后再由调整杆410进行微调。 A first steering member 5 may be two-dimensional position of the rotatable platform 408 initial adjustment, then fine-tune the adjustment lever 410.

[0028] 干涉仪本体I发射的激光光路依次通过干涉计镜组2、分光元件301,经第一转向元件5、第二转向元件9转向后照射到目标反射镜6上,目标反射镜6反射的光经第二转向元件9及第一转向元件5后照射到偏差检测系统3上,通过分光元件301分为两路,一路反射回干涉仪本体1,另一路照射在光斑位置传感器302上。 [0028] The light path of laser interferometer passes through the body I emitted interferometer mirror assembly 2, the spectroscopic element 301, the first steering member 5, the second steering member 9 is irradiated onto a target steering mirror 6, the object reflector mirror 6 a second element 9 and the light is turned to a first turning member 5 after irradiation deviation detection system 3, through the beam splitter 301 is divided into two elements, all the way to the main body 1 is reflected back to interferometer, another way is irradiated on the spot position sensor 302. 干涉计镜组2、分光元件301、光斑位置传感器302、第一转向元件5、目标反射镜6及第二转向元件9由激光照射部分的轴线位于发射激光光路及反射激光光路之间的中间位置。 Interferometer mirror assembly 2, the spectroscopic element 301, the light spot position sensor 302, a first steering member 5, the target mirror 6 and the second intermediate position between the laser and the optical path of the reflected laser beam from the light path turning member 9 is located in the axis of emission of the laser-irradiated . [0029] 本发明的测量方法为: [0029] The measuring method of the present invention are:

[0030] 干涉仪本体I发出的激光依次穿过干涉计镜组2、偏差检测系统3中的分光元件301,经第一转向元件5、第二转向元件9转向后照射到被测机器人8末端执行器上的目标反射镜6,由目标反射镜6反射的反射光路经第一转向元件5、第二转向元件9转向后照射到分光元件301、被分成两路,其中一路经干涉计镜组2反射回干涉仪本体1,另一路照射到光斑位置传感器302上,由于目标反射镜6随被测机器人8运动,照射到光斑位置传感器302上的光班中心发生偏移,再将检测出的偏移量转换成位移信号后传递给二维随动系统4中的伺服电机,各伺服电机工作,带动丝杠或丝杆转轴转动,通过与丝杠或丝杆转轴螺纹连接的丝母使转动副变为移动副,进而使第一转向元件5及第二转向元件9对目标反射镜进行准确跟踪,同时编码器的位置反馈会及时调整各伺服电机的跟踪速度。 [0030] I emitted laser interferometer passes through the body interferometer mirror assembly 2, the spectroscopic element 301 in the deviation detection system 3 via the first steering member 5, the second steering member 9 is irradiated to the steering end 8 of the robot measured mirror objective on the actuator 6, reflected by the object reflector mirror 6 of the first light path turning member 5, the second steering member 9 is irradiated to the steering spectroscopic element 301, is divided into two, wherein all the way through the interferometer mirror group 2 is reflected back to the interferometer main body 1, another way is irradiated onto the spot position sensor 302, since the target mirror 6 with the measured motion robot 8, the light is irradiated on the center of the spot position shift sensor 302 is offset, and then detected transmitting converted into a displacement signal offset two-dimensional servo motor 4 of the servo system, each servo motor operation, drive screw or lead screw shaft rotated by a screw or nut is connected to the rotating screw threaded shaft into a mobile sub-sub, thereby enabling the first diverting element 5 and the second steering mirror element 9 target track accurately, while the position encoder feedback is timely adjustment of the tracking speed of each servomotor.

Claims (8)

1.一种三维位置跟踪测量装置,其特征在于:包括干涉仪本体(I)、干涉计镜组(2)、偏差检测系统(3)、二维随动系统(4)、第一转向元件(5)、目标反射镜(6)及第二转向元件(9),其中干涉仪本体(I)、偏差检测系统(3)及二维随动系统(4)分别安装在支撑件(7)上,目标反射镜(6 )安装在被测机器人(8 )的末端执行器上,干涉仪本体(I)的激光输出端设有干涉计镜组(2),所述第一转向元件(5)及第二转向元件(9)分别安装在二维随动系统(4)上,第一转向元件(5)具有平行于激光光路的一个移动自由度,第二转向元件(9)具有平行于激光光路及垂直于激光光路的两个移动自由度;所述偏差检测系统(3)包括分光兀件(301)及光斑位置传感器(302 ),干涉仪本体(I)发射的激光光路依次通过干涉计镜组(2 )、分光元件(301),经第一转向元件(5)、第二转向元件(9)转向后照射到目标反射镜(6)上,目标 1. A three-dimensional position of the tracking measuring device, characterized by: an interferometer comprising a body (the I), interferometer mirror assembly (2), the deviation detection system (3), a two-dimensional servo system (4), a first steering member (5), a mirror objective (6) and a second steering element (9), wherein the interferometer body (the I), the deviation detection system (3) and the two-dimensional servo system (4) are mounted on a support member (7) on the target reflector (6) is mounted on a test robot (8) of the end effector, the laser interferometer output of the body (I) is provided with interferometer mirror assembly (2), the first steering member (5 ) and a second steering element (9) are mounted on the two-dimensional servo system (4), a first steering member (5) has a freedom of movement parallel to the path of the laser beam, a second steering element (9) parallel to two freedom of movement of the laser light path and perpendicular to the laser light path; said deviation detection system (3) comprises a beam splitter Wu member (301) and the spot position sensor (302), the laser light path interferometer body (I) transmitted sequentially through interference Total lens group (2), the spectral element (301) via a first steering member (5), a second steering element (9) is irradiated onto a target reflector (6) after turning, the target 反射镜(6)反射的光经第二转向元件(9)及第一转向元件(5)后照射到偏差检测系统(3)上,通过分光元件(301)分为两路,一路反射回干涉仪本体(1),另一路照射在光斑位置传感器(302)上;所述二维随动系统(4)包括两个互相平行、安装在支撑件(7)上的直线单元(401)以及两个分别连接于直线单元(401)上的一维随动系统(402),每个一维随动系统(402)均可沿直线单元(401)往复移动;所述第一转向元件(5)及第二转向元件(9)分别安装在两个一维随动系统上。 (5) a mirror (6) turning the light reflected by the second element (9) and the first steering member irradiated deviation detection system (3), is divided into two by a beam splitter element (301), all the way back to the interferometer reflected instrument body (1), the other path is irradiated on a spot position sensor (302); said two dimensional servo system (4) comprises two mutually parallel, mounted on a linear unit (7) a support member (401) and two are connected to a two-dimensional servo system (402) on the straight line unit (401), a dimension of each servo system (402) can reciprocate along a linear unit (401); the first steering member (5) and a second steering element (9) are mounted on a two-dimensional servo system.
2.按权利要求1所述的三维位置跟踪测量装置,其特征在于:所述干涉计镜组(2)、分光兀件(301)、光斑位置传感器(302)、第一转向兀件(5)、目标反射镜(6)及第二转向兀件(9)由激光照射部分的轴线位于发射激光光路及反射激光光路之间的中间位置。 2. The three-dimensional position tracking according to claim 1 of the measuring apparatus, characterized in that: said interferometer mirror assembly (2), the spectral Wu member (301), the spot position sensor (302), a first steering member Wu (5 ), the target mirror (6) and the second steering Wu member (9) located in the axis of the laser irradiated portion of the intermediate position between the emission path of laser light and reflected laser light path.
3.按权利要求1所述的三维位置跟踪测量装置,其特征在于:所述偏差检测系统(3)中的分光元件(301)及光斑位置传感器(302)分别设置在安装架(303)上,光斑位置传感器(302)位于分光元件(301)的下方;在支撑件(7)上设有三维位置调整台(304),所述安装架(303)固定在三维位置调整台(304)上。 3. The three-dimensional position tracking according to claim 1 of the measuring apparatus, wherein: said deviation detecting system spectral element (3) in (301) and the spot position sensor (302) are provided on the mounting bracket (303) spot position sensor (302) located below the spectral element (301); provided on the support member (7) three-dimensional position adjustment table (304), said mounting bracket (303) fixed to the three-dimensional position adjustment table (304) .
4.按权利要求1所述的三维位置跟踪测量装置,其特征在于:所述直线单元(401)为伺服电机带动丝杠转动、通过丝杠与丝母的螺纹连接使丝母移动的结构。 4. The three-dimensional position tracking according to claim 1 of the measuring apparatus, wherein: said linear unit (401) drives the screw rotation servo motor, by a threaded screw and nut so that the nut is connected to the mobile structure.
5.按权利要求1所述的三维位置跟踪测量装置,其特征在于:所述一维随动系统(402)包括支座(403)、丝杆转轴(404)、滑块(405)、导轨(406)、调整底座(407)及二维旋转平台(408),其中支座(403)分别与两个直线单元中的丝母相连,丝杆转轴(404)可转动地安装在支座(403)上,丝杆转轴(404)的一端连接有伺服电机及编码器;所述导轨(406)固定在支座(403)上、位于丝杆转轴(404)的上方,导轨(406)上连接有滑块(405),该滑块(405)固接有与丝杆转轴(404)螺纹连接的丝母;在滑块(405)上安装有调整底座(407),调整底座(407 )上设有二维旋转平台(408 ),转向元件安装在二维旋转平台(408 )上;滑块(405 )及其上安装的部件通过丝母与丝杆转轴(404)的转动,沿导轨与激光光路平行的方向往复移动。 5. The three-dimensional position tracking according to claim 1 of the measuring apparatus, wherein: the one-dimensional servo system (402) comprises a support (403), screw shaft (404), a slider (405), the guide rail (406), adjustment of the base (407) and a two-dimensional rotating platform (408), which is connected to the support (403), respectively, and two linear units in the nut, the screw shaft (404) rotatably mounted in the seat ( 403), one end of the screw shaft (404) is connected to a servo motor and encoder; said guide rail (406) fixed to the carrier (403), on the screw shaft is located (404) above the guide rail (406) is connected to the slider (405), the slide (405) fixed to the screw shaft has a nut (404) threaded connection; the slider (405) is attached to the adjustment base (407), adjustment of the base (407) 2D rotation is provided on the platform (408), a steering member mounted on the two-dimensional rotating platform (408); a slider (405) mounted on and rotated by the nut member and screw shaft (404) along the guide rail the laser light path parallel to the direction of reciprocating movement.
6.按权利要求5所述的三维位置跟踪测量装置,其特征在于:所述支座(403)的一侧固接控制开关(411),调整底座(407)上设有与控制开关(411)相对应的挡块(409)。 6. The three-dimensional position tracking according to claim 5 of the measuring apparatus, characterized in that: said side support (403) fixed to the control switch (411), the adjustment of the base (407) is provided with a control switch (411 ) corresponding to the stopper (409).
7.一种按权利要求1至6中任一权利要求所述三维位置跟踪测量装置的测量方法,其特征在于:干涉仪本体(I)发出的激光依次穿过干涉计镜组(2)、偏差检测系统(3)中的分光元件(301),经第一转向元件(5)、第二转向元件(9)转向后照射到被测机器人(8)末端执行器上的目标反射镜(6),由目标反射镜(6)反射的反射光路经第一转向元件(5)、第二转向元件(9)转向后照射到分光元件(301)、被分成两路,其中一路经干涉计镜组(2)反射回干涉仪本体(1),另一路照射到光斑位置传感器(302)上,由光斑位置传感器(302)检测目标反射镜(6)随被测机器人(8)移动产生的偏移,再将检测出的偏移量转换成位移信号后传递给二维随动系统中的各伺服电机,由各伺服电机带动第一转向元件(5)及第二转向元件(9 )移动,使第一转向元件(5 )及第二转向元件(9 )准确跟踪目标反射镜(6 )。 7. A method according to claim 1 to 6, the three-dimensional position of any one of claims tracking measurement method of measuring apparatus, wherein: the body Laser interferometer (I) emitted by the interferometer passes through lens group (2), deviation detecting system spectral element (301) (3), the first steering member (5), a second steering element (9) is irradiated to the measured rear steering robot (8) the target mirror (on the end effector 6 ), reflected by a target mirror (6) of the first reflected light path turning member (5), a second steering element (9) is irradiated to the rear steering spectral element (301), is divided into two, wherein all the way through the interferometer mirror group (2) reflected back to the interferometer main body (1), another way is irradiated onto the spot position sensor (302), the spot position sensor (302) detecting a target mirror (6) with the measured bias by movement of the robot (8) transmission after the shift, then converted into a shift amount detected by the displacement signals to each of the two-dimensional servo motor servo system, the servo motor driven by the first steering member (5) and a second steering element (9) moves, the first steering member (5) and a second steering element (9) to accurately track the target reflector (6).
8.按权利要求7所述的测量方法,其特征在于:所述偏移量为由于目标反射镜(6)随被测机器人(8)运动,照射到光斑位置传感器(302)上的光班中心发生偏移。 8. The method of measurement according to claim 7, wherein: said offset is Since the target reflector (6) with the measured robot (8) movement, light is irradiated to the spot shift on the position sensor (302) center shifted.
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