CN102509709B - Point measurement device for LED (light-emitting diode) crystalline grain point measurement equipment - Google Patents

Point measurement device for LED (light-emitting diode) crystalline grain point measurement equipment Download PDF

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Publication number
CN102509709B
CN102509709B CN2011102577645A CN201110257764A CN102509709B CN 102509709 B CN102509709 B CN 102509709B CN 2011102577645 A CN2011102577645 A CN 2011102577645A CN 201110257764 A CN201110257764 A CN 201110257764A CN 102509709 B CN102509709 B CN 102509709B
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China
Prior art keywords
led
probe
crystal grain
measurement device
energy converter
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CN2011102577645A
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Chinese (zh)
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CN102509709A (en
Inventor
林晋生
白智亮
李聪明
温俊熙
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致茂电子(苏州)有限公司
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Publication of CN102509709A publication Critical patent/CN102509709A/en
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Abstract

The invention relates to a point measurement device for LED (light-emitting diode) crystalline grain point measurement equipment, which is used for detecting a plurality of LED crystallines on an LED wafer in a contacting way, and at least comprises two test probe groups. Each test probe group comprises a probe, an energy converter connected with one end of the probe, and a drive unit, wherein each drive unit is electrically connected with each energy converter and is used for providing an input electric energy signal to each energy converter; and each energy converter is used for converting the received electric energy into mechanical kinetic energy to control a fluctuation route of each probe on the LED wafer, so that each probe can be in contact with the LED crystallines on the LED wafer at the controlled fluctuation speed. Therefore, a user can utilize a control unit connected with each drive unit to control speed output and power output of each drive unit so as to control the contact state of each probe and the LED crystallines.

Description

Spot measurement device for LED crystal grain point measurement equipment

Technical field

The present invention system is about a kind of spot measurement device for LED crystal grain point measurement equipment, especially a kind of apply control this spot measurement device with energy converter rise and fall stroke on LED crystal grain to be measured.

Background technology

In recent years, along with scientific and technological progress, the processing procedure of LED wafer also constantly progresses greatly, simultaneously in order effectively to promote the QC yield of product wafer, the dealer tends in back-end process, with spot measurement device, electric current is sent to the LED crystal grain on wafer exactly, and by the characteristic of detecting the LED crystal grain emitted light on this wafer, to judge the quality of each crystal grain on wafer.

At present traditional spot measurement device as shown in Figure 1, this traditional type spot measurement device 1 is to detect (edge sensor) switch 11 by an edge, one swing arm 12 and a probe 13 form, therefore when the driving mechanism 2 of bottom moves up this bogey with LED wafer 43 via adjustment, can make this LED wafer 4 near this spot measurement device 1, the end face of this LED wafer 4 can compress the probe 13 of this spot measurement device 1, this probe 13 can be contacted with the LED crystal grain 41 of this LED wafer 4, simultaneously, this rim detection (edge sensor) switch 11 can be by received foreign current, be sent to the LED crystal grain 41 on this LED wafer 4 by this probe 13, make LED crystal grain 41 receive electric current and luminous, so, the dealer can be by the characteristic of LED crystal grain 41 emitted lights on this LED wafer 4 of detecting, to judge the quality of each crystal grain on this LED wafer 4.

But above-mentioned traditional spot measurement device, a disappearance wherein is when this spot measurement device 1 carries out surveying, after touching LED crystal grain 41, probe 13 becomes on-state, now must under the joint action at rim detection (edge sensor) switch 11 places, send a measuring current to probe 13, allow by this LED crystal grain 41 to be measured survey the device conducting by two fulcrums and light; But, traditional rim detection (edge sensor) switch 11 is the mechanical type action, in a survey process, accumulate repeatedly under the On/Off action, be easy to cause contact not good, make measuring current can't be sent to effectively and accurately the LED crystal grain 41 on this LED wafer 4, cause the data information confidence level after a survey to be left a question open.

Therefore, if can maintain the reliability of spot measurement device, improve after conducting in the past the test signal problem of dtmf distortion DTMF of the mechanical type contact that send the test signal, and control and improve speed output and the force production that this probe contacts this LED wafer, should be a best solution.

Summary of the invention

The object of the present invention is to provide a kind of spot measurement device for LED crystal grain point measurement equipment, it is simple in structure, easy to operate.

For achieving the above object, the invention discloses a kind of spot measurement device for LED crystal grain point measurement equipment, in order to a plurality of LED crystal grain on contact detection LED wafer, this spot measurement device at least has two test probe groups, it is characterized in that each test probe group comprises:

One probe, in order to contact with those LED crystal grain on this LED wafer;

One energy converter, be connected with this probe one end, in order to received electric energy is converted to mechanical kinetic energy, to control the rise and fall stroke of this probe on this LED wafer, makes this probe contact those LED crystal grain with the in check speed of rising and falling; And

One driver element, be electrically connected with this energy converter, in order to the input electric energy signal of this energy converter to be provided.

Wherein, this LED crystal grain point measurement equipment has more a bogey and a driving mechanism, and this bogey is in order to put at least a slice LED wafer, and this driving mechanism can drive this bogey to be moved.

Wherein, this bogey can be done X, Y-axis displacement by this driving mechanism.

Wherein, this bogey can be made X, Y, Z axis to displacement by this driving mechanism.

Wherein, this energy converter is voice coil motor.

Wherein, this LED crystal grain point measurement equipment has more the control unit that is connected with this driver, and this control unit can transmit signal and enter in this driver, and sees through speed output and force production that this driver element is controlled this energy converter.

By the present invention, can realize following technique effect:

1. the present invention system can be controlled strength, position, acceleration and speed that under probe, press contacts LED wafer is exported by energy converter, and carry out at any time the conversion of strength position and speed in operation, so that this probe can be with the LED crystal grain on the in check speed contact LED wafer that rises and falls.

2. the present invention can make probe slowly and contact accurately the LED crystal grain on the LED wafer, in order to improve detecting sensitivity and accurate positioning.

The accompanying drawing explanation

Fig. 1: be the Organization Chart of known traditional type spot measurement device;

Fig. 2: be the Organization Chart of the present invention for the spot measurement device of LED crystal grain point measurement equipment;

Fig. 3: be the operation curve figure of the present invention for the energy converter of the spot measurement device of LED crystal grain point measurement equipment;

Fig. 4 A: for the present invention implements illustration for the rising of spot measurement device of LED crystal grain point measurement equipment; And

Fig. 4 B: be the enforcement illustration of the present invention for the spot measurement device of LED crystal grain point measurement equipment.

Embodiment

Relevant for aforementioned and other technology contents, characteristics and effect of the present invention, in the following detailed description coordinated with reference to graphic preferred embodiment, can clearly present.

Refer to Fig. 2, Organization Chart for a kind of spot measurement device for LED crystal grain point measurement equipment of the present invention, this spot measurement device 5 is in order to a plurality of LED crystal grain 41 on contact detection LED wafer 4, and this spot measurement device 5 at least has two test probe groups 51, as shown in Figure 2, this test probe group all comprises a probe 511 in order to contact with those LED crystal grain 41 on this LED wafer 4, one energy converter 512 and the driver element 513 be connected with these probe 511 1 ends, wherein this driver element 513 is electrically connected with this energy converter 512, in order to the input electric energy signal of this energy converter 512 to be provided, and this energy converter 512 is in order to be converted to received electric energy mechanical kinetic energy, to control the rise and fall stroke of this probe 511 on this LED wafer 4, this probe 511 is contacted with those LED crystal grain 41 on this LED wafer 4 with the in check speed of rising and falling.

In addition, this LED crystal grain point measurement equipment has more a bogey 3 and a driving mechanism 2, and this bogey 3 is in order to put at least a slice LED wafer 4, and this driving mechanism 2 can drive this bogey 3 to be moved; This bogey 3 can carry out X, Y-axis displacement or X, Y, Z axis to displacement by driving mechanism 2 in addition.

The energy converter 512 used in the present invention can be a voice coil motor.Because the actuator of voice coil motor all can stylize fully on strength, acceleration, speed, therefore can operate three kinds of different modes simultaneously, as shown in Figure 3, first kind of way is the strength mode, the strength mode is open loop, and use encoder not feed back, and the still monitored but not impact in output of actual position; The second way is the speed mode, the axle that the speed mode allows actuator is mobile the execution under speed, acceleration, strength and the orientation set, and use in principle the soft landing circulation (soft landing refer to the axle of actuator or jaw can be at a high speed but the low strength of programmed approach piece surface); The third mode is the position mode, and the position mode allows size, acceleration and the Velocity-force etc. of the axle of actuator according to stroke, moves a plurality of positions, therefore can make definitely, relative to and the position of being learnt move.

And the function of this soft landing is frangible for precision or the assembling of the part of high unit price is quite helpful, therefore can go to approach object and whether lasting monitoring position makes a mistake with in check low power collocation speed, and Once you begin the error of contact position will produce, so, when the data that actuator can be set by the time reach the set point of formula, axle can keep same position to be moved on the surface of element.

Therefore the present invention can have by this energy converter 512 of soft landing function, stylize and set a position data by a control unit 6 be connected with this driver element 513, and the transmission signal enters in this driver element 513, as shown in Figure 4 A, when this bogey 3 carries out X via this driving mechanism 2, Y-axis displacement or X, Y, after the Z-axis direction displacement, can make this storing have the bogey 3 of LED wafer 4 can be fixed on certain position, simultaneously, can start this spot measurement device 5 compresses downwards, wherein under the first state in the speed mode of energy converter 512 meeting of this test probe group 51, therefore this probe 511 can be via the control of this energy converter 512, to maintain certain acceleration, to the LED crystal grain 41 on this LED wafer 4, move.

And when arriving the position data that this control unit 6 sets, as shown in Figure 4 B, this energy converter 512 can change the state of strength mode into, therefore can slow down the speed compressed downwards, control the strength compressed downwards simultaneously, so that this probe 511 can be slowly and is contacted accurately the LED crystal grain 41 on LED wafer 4, simultaneously when this probe 511 has touched the LED crystal grain 41 on this LED wafer 4, this probe 511 can be sent to the LED crystal grain 41 on this LED wafer 4 by foreign current, make LED crystal grain 41 receive electric current and luminous, in order to see through the characteristic that optical pickup apparatus is received LED crystal grain 41 emitted lights on this LED wafer 4, quality with the LED crystal grain 41 of this LED wafer 4 of discriminatory analysis.

A kind of spot measurement device for LED crystal grain point measurement equipment provided by the present invention, while mutually comparing with other located by prior art, has more and gets the row advantage ready:

1. the present invention can be controlled strength, position, acceleration and speed that under probe, press contacts LED wafer is exported by energy converter, and carry out at any time the conversion of strength position and speed in operation, so that this probe can be with the LED crystal grain on the in check speed contact LED wafer that rises and falls.

2. the present invention can make probe slowly and contact accurately the LED crystal grain on the LED wafer, in order to improve detecting sensitivity and accurate positioning.

By the above detailed description of preferred embodiments, hope can be known description feature of the present invention and spirit more, and not with above-mentioned disclosed preferred embodiment, category of the present invention is limited.On the contrary, its objective is that hope can contain in the category of the scope of the claims of being arranged in of various changes and tool equality institute of the present invention wish application.

Claims (4)

1. the spot measurement device for LED crystal grain point measurement equipment, in order to a plurality of LED crystal grain on contact detection LED wafer, this spot measurement device at least has two test probe groups, it is characterized in that each test probe group comprises:
One probe, in order to contact with those LED crystal grain on this LED wafer;
One energy converter, be connected with this probe one end, in order to received electric energy is converted to mechanical kinetic energy, to control the rise and fall stroke of this probe on this LED wafer, makes this probe contact those LED crystal grain with the in check speed of rising and falling; And
One driver element, be electrically connected with this energy converter, in order to the input electric energy signal of this energy converter to be provided;
Wherein, this energy converter is voice coil motor;
This LED crystal grain point measurement equipment has more the control unit that is connected with this driver, and this control unit can transmit signal and enter in this driver, and sees through speed output and force production that this driver element is controlled this voice coil motor.
2. spot measurement device as claimed in claim 1, is characterized in that, this LED crystal grain point measurement equipment has more a bogey and a driving mechanism, and this bogey is in order to put at least a slice LED wafer, and this driving mechanism can drive this bogey to be moved.
3. spot measurement device as claimed in claim 2, is characterized in that, this bogey can be done X, Y-axis displacement by this driving mechanism.
4. spot measurement device as claimed in claim 2, is characterized in that, this bogey can be made X, Y, Z axis to displacement by this driving mechanism.
CN2011102577645A 2011-09-02 2011-09-02 Point measurement device for LED (light-emitting diode) crystalline grain point measurement equipment CN102509709B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011102577645A CN102509709B (en) 2011-09-02 2011-09-02 Point measurement device for LED (light-emitting diode) crystalline grain point measurement equipment

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Application Number Priority Date Filing Date Title
CN2011102577645A CN102509709B (en) 2011-09-02 2011-09-02 Point measurement device for LED (light-emitting diode) crystalline grain point measurement equipment

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CN102509709B true CN102509709B (en) 2013-12-04

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CN103149524A (en) * 2013-02-25 2013-06-12 东莞市福地电子材料有限公司 Reversed LED (Light Emitting Diode) chip tester and test method
CN104101744B (en) * 2013-04-10 2017-05-24 佛山市国星半导体技术有限公司 Probe clamp, and LED rapid lightening testing apparatus and method
CN103245901A (en) * 2013-04-26 2013-08-14 东莞市福地电子材料有限公司 LED flip-chip testing machine and testing method
CN104049197B (en) * 2014-06-24 2017-12-15 上海集成电路研发中心有限公司 Wafer permits Acceptance Tests system and Acceptable testing process
CN105572556A (en) * 2014-10-17 2016-05-11 致茂电子(苏州)有限公司 Spot testing apparatus used for testing electronic component
JP6238869B2 (en) * 2014-10-28 2017-11-29 アズビル株式会社 Touch control device
CN104678273B (en) * 2015-03-13 2017-09-29 秦皇岛视听机械研究所 A kind of diode bare silicon wafer high speed crosspointer test device
CN107526014B (en) * 2016-06-22 2019-10-08 致茂电子(苏州)有限公司 Test device and test method
CN110567986A (en) * 2019-10-22 2019-12-13 苏州精濑光电有限公司 Silicon-based OLED panel lighting inspection equipment

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CN101738573A (en) * 2008-11-17 2010-06-16 京元电子股份有限公司 Wafer tester and testing method thereof
US20100244876A1 (en) * 2009-03-31 2010-09-30 Tokyo Electron Limited Method for setting contact parameter and recording medium having program for setting contact parameter recorded thereon
CN101261306B (en) * 2008-04-14 2010-12-08 无锡市易控系统工程有限公司 Full-automatic wafer test method and equipment accomplishing the method

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CN101261306B (en) * 2008-04-14 2010-12-08 无锡市易控系统工程有限公司 Full-automatic wafer test method and equipment accomplishing the method
CN101738573A (en) * 2008-11-17 2010-06-16 京元电子股份有限公司 Wafer tester and testing method thereof
US20100244876A1 (en) * 2009-03-31 2010-09-30 Tokyo Electron Limited Method for setting contact parameter and recording medium having program for setting contact parameter recorded thereon

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