CN102448237A - Ion bar - Google Patents

Ion bar Download PDF

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Publication number
CN102448237A
CN102448237A CN2011102352533A CN201110235253A CN102448237A CN 102448237 A CN102448237 A CN 102448237A CN 2011102352533 A CN2011102352533 A CN 2011102352533A CN 201110235253 A CN201110235253 A CN 201110235253A CN 102448237 A CN102448237 A CN 102448237A
Authority
CN
China
Prior art keywords
ion bar
ion
bar
rear end
controllable universal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011102352533A
Other languages
Chinese (zh)
Inventor
毛智彪
王剑
戴韫青
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huali Microelectronics Corp
Original Assignee
Shanghai Huali Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Huali Microelectronics Corp filed Critical Shanghai Huali Microelectronics Corp
Priority to CN2011102352533A priority Critical patent/CN102448237A/en
Publication of CN102448237A publication Critical patent/CN102448237A/en
Pending legal-status Critical Current

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Abstract

The invention provides an ion bar comprising at least two parts: an ion bar front end and an ion bar rear end, wherein the front end and the rear end of the ion bar are connected by a controllable universal connector; and the tail of the rear end is a threaded structure. The ion bar can be fixed above a work table top by means of the screw threads of the tail of the rear end; the adjustable angle range of the controllable universal connector within the vertical plane is from 0 degree to +/-180 degrees, while the adjustable angle range thereof within the horizontal plane is from 0 degree to +/-360 degrees. The ion bar is characterized in that: as the controllable universal interface can be adjusted, the direction and the angle of the front end of the ion bar can be adjusted; therefore, the problem that a fixed ion bar affects the moving and maintenance of equipment and the problem of bad ion removal effect of a concave working plane in production are solved. Furthermore, the utilization convenience and the static ion removal effect of the ion bar can be effectively improved; and the ion bar is highly practical.

Description

A kind of ion bar
Technical field
The present invention relates to a kind of removal electrostatic equipment, particularly relate to a kind of ion bar.
Background technology
In the manufacturing process of semiconductor chip and optical mask plate, can on silicon chip and mask plate, produce static inevitably.When static charge accumulation arrives certain degree, can on silicon chip and mask plate electrostatic discharge (ESD) take place, cause the damage of device or domain figure, cause product rejection.In order to prevent electrostatic damage, in the clean room that produces semiconductor chip and optical mask plate, need a large amount of deionization rod of equipment usually.Fixed deionization rod is fixed on the ceiling of clean room.The head of deionization rod can produce the air-flow of band positive and negative charge, and the object institute static electrification lotus in the conical area is neutralized, and reaches the effect of removing static.
Along with the degree of becoming more meticulous of semiconductor product improves constantly, produce semi-conductive equipment and also constantly develop to the maximization direction.In order to reach good deionization effect, the deionization rod has certain restriction apart from the height on ground.The device height of modern main equipment usually surpasses the height of deionization rod.In limited clean room, space, such difference in height can bring inconvenience to the carrying and the maintenance of equipment.
The effective range of fixed deionization rod is a conical area vertically downward.There is the work top of some concave surfaces in regular meeting in the clean room.These table tops can not be covered by the effective range of deionization rod effectively.The static removal effect of silicon chip on such work top and optical mask plate is poor.
The present invention provides a kind of ion bar, and ion bar provided by the invention has the controllable universal interface, influences the problem that the ion weak effect is removed in equipment carrying and the problem of safeguarding and concave surface working face thereby solved fixed aborning ion bar.Preferred embodiment provided by the present invention and that as just example but invention is constituted restriction embodies in embodiment to some extent.
Summary of the invention
In view of the above problems, the object of the present invention is to provide the ion bar that has the controllable universal interface.The invention solves fixed aborning ion bar and influence the problem that the ion weak effect is removed in equipment carrying and the problem of safeguarding and concave surface working face.Can improve the ease of use and the effect of removing electrostatic ionic of ion bar effectively, be very suitable for practicality.
The object of the invention and solve its technical problem and adopt following technical scheme to realize.
A kind of ion bar that the present invention proposes, it comprises two parts in ion bar front-end and back-end at least, and the front-end and back-end of ion bar are connected by the controllable universal interface, and the rear end tip is a helicitic texture.
The object of the invention and solve its technical problem and also can adopt following technical measures further to realize.
Aforesaid ion bar, its controllable universal interface adjustable-angle scope in vertical plane are that 0 degree is to just/negative 180 spending.
Aforesaid ion bar, its controllable universal interface adjustable-angle scope in horizontal plane are that 0 degree is to just/negative 360 spending.
In addition, the present invention also provides the method for using this ion bar, and it is applicable to the carrying of needs equipment and safeguard that the face condition of horizontal operation face and concave surface goes down to destatic ion.
Above-mentioned explanation only is the general introduction of technical scheme of the present invention; Understand technological means of the present invention in order can more to know; And can implement according to the content of specification, and for let of the present invention above-mentioned with other purposes, feature and advantage can be more obviously understandable, below special act preferred embodiment; And conjunction with figs., specify as follows.
Description of drawings
With reference to appended accompanying drawing, to describe embodiments of the invention more fully.Yet appended accompanying drawing only is used for explanation and sets forth, and does not constitute limitation of the scope of the invention.
Fig. 1 illustrates the ion bar structure chart that has the controllable universal interface.
Fig. 2 illustrates the structure chart that under the concave surface face condition, uses the deionization rod that has the controllable universal interface.
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention,,, specify as follows ion bar and the method for using thereof that proposes according to the present invention below in conjunction with accompanying drawing and preferred embodiment.
Different embodiments of the invention will details are as follows, with the different techniques characteristic of embodiment of the present invention, will be understood that, the unit of the specific embodiment of the following stated and configuration are in order to simplify the present invention, and it is merely example and does not limit the scope of the invention.
Present embodiment discloses a kind of ion bar.Fig. 1 illustrates the ion bar structure chart that has the controllable universal interface.Ion bar comprises (3) two parts of ion bar front end (2) and rear end at least, and the front end of ion bar (2) is connected by controllable universal interface (1) with rear end (3), and rear end (3) tip is a helicitic texture.Ion bar can be fixed on work top top by the screw thread of rear end (3) tip, controllable universal interface adjustable-angle scope in vertical plane be 0 degree to just/negative 180 degree, in horizontal plane the adjustable-angle scope be 0 degree to just/negative 360 degree.
When the work top that is suitable for is a horizontal operation table top; Adjustment controllable universal interface makes the ion bar front-end and back-end keep vertical; Thereby make the circular cone effective range vertically downward of ion bar face the horizontal operation table top, reach the effect of the static of silicon chip and optical mask plate on the better removal work top.
When the work top that is suitable for is a concave surface work top; Adjustment controllable universal interface makes the ion bar front-end and back-end form certain angle; Thereby make ion bar front end circular cone effective range vertically downward face the concave surface work top, reach the effect of the static of silicon chip and optical mask plate on the better removal work top.
When needs equipment is carried and safeguarded, can adjust the controllable universal interface and make the ion bar rear end be higher than horizontal plane, thereby the more equipment carrying is provided and safeguard the space.
Through explanation and accompanying drawing, provided the exemplary embodiments of the ad hoc structure of embodiment.Although foregoing invention has proposed existing preferred embodiment, yet these contents are not as limitation.For a person skilled in the art, read above-mentioned explanation after, various variations and revise undoubtedly will be obvious.Therefore, appending claims should be regarded whole variations and the correction of containing true intention of the present invention and scope as.Any and all scope of equal value and contents all should be thought still to belong in the intent of the present invention and the scope in claims scope.

Claims (3)

1. an ion bar of removing electrostatic ionic is characterized in that, it comprises two parts in ion bar front-end and back-end at least, and the front-end and back-end of ion bar are connected by the controllable universal interface, and the rear end tip is a helicitic texture.
2. ion bar as claimed in claim 1 is characterized in that controllable universal interface adjustable-angle scope in vertical plane is that 0 degree is to just/negative 180 spending.
3. ion bar as claimed in claim 1 is characterized in that controllable universal interface adjustable-angle scope in horizontal plane is that 0 degree is to just/negative 360 spending.
CN2011102352533A 2011-08-17 2011-08-17 Ion bar Pending CN102448237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011102352533A CN102448237A (en) 2011-08-17 2011-08-17 Ion bar

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011102352533A CN102448237A (en) 2011-08-17 2011-08-17 Ion bar

Publications (1)

Publication Number Publication Date
CN102448237A true CN102448237A (en) 2012-05-09

Family

ID=46010164

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011102352533A Pending CN102448237A (en) 2011-08-17 2011-08-17 Ion bar

Country Status (1)

Country Link
CN (1) CN102448237A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106255302A (en) * 2016-09-22 2016-12-21 江苏科瑞恩自动化科技有限公司 A kind of for except the equipment of OPP film electrostatic

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957396A (en) * 1995-06-01 1999-09-28 Nordson Corporation Mounting assembly for spray gun with anti-back-ionization probe
CN1458548A (en) * 2002-03-20 2003-11-26 Lg.菲利浦Lcd株式会社 Adhesive device for producing liquid crystal display device
CN2782666Y (en) * 2005-03-23 2006-05-24 魏炜 Static electricity water ttreatment device
WO2007058416A1 (en) * 2005-11-16 2007-05-24 Sento Solution Co., Ltd Apparatus for removing particle for an exposure system
KR20090032425A (en) * 2007-09-28 2009-04-01 (주)선재하이테크 Self rotation type ionizer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957396A (en) * 1995-06-01 1999-09-28 Nordson Corporation Mounting assembly for spray gun with anti-back-ionization probe
CN1458548A (en) * 2002-03-20 2003-11-26 Lg.菲利浦Lcd株式会社 Adhesive device for producing liquid crystal display device
CN2782666Y (en) * 2005-03-23 2006-05-24 魏炜 Static electricity water ttreatment device
WO2007058416A1 (en) * 2005-11-16 2007-05-24 Sento Solution Co., Ltd Apparatus for removing particle for an exposure system
KR20090032425A (en) * 2007-09-28 2009-04-01 (주)선재하이테크 Self rotation type ionizer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106255302A (en) * 2016-09-22 2016-12-21 江苏科瑞恩自动化科技有限公司 A kind of for except the equipment of OPP film electrostatic

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Application publication date: 20120509