CN102435185B

CN102435185B - Internal and external truss type three-frame micro-mechanical gyro structure

Info

Publication number: CN102435185B
Application number: CN201110266837.7A
Authority: CN
Inventors: 余才佳; 王刚; 熊恒
Original assignee: No 618 Research Institute of China Aviation Industry
Current assignee: No 618 Research Institute of China Aviation Industry
Priority date: 2011-09-01
Filing date: 2011-09-01
Publication date: 2014-03-19
Anticipated expiration: 2031-09-01
Also published as: CN102435185A

Abstract

The invention belongs to a micro-mechanical gyro structure technology field, and relates to an internal and external truss type three-frame micro-mechanical gyro structure. The structure comprises an external frame, an internal frame and a medium frame, wherein the external frame comprises two separation blocks and two groups of trussed girders. Each group of trussed girder comprises two folding beams and a truss, and the external side of each separation block has a comb electrode. Two ends of each trussed girder are connected with one folding beam respectively, the two groups of trussed girders are connected by the separation blocks, and then the external frame is formed. The external frame is fixed on the anchor points at the outer end of the structure by four folding beams, and the left and the right parts of the external frame are connected to form a complete frame by the truss. The two ends of the medium frame are separate type double-folding beams, and the external frame and the medium frame are connected by the separate type double-folding beams. The medium frame and the internal frame are connected by the truss type double-folding beams, a comb electrode is arranged in the internal frame, and the internal frame is connected to the internal anchor points of the gyro structure by four separate type double-folding beams. The structure of the invention reduces the quantity of useless mass blocks, and raises gyro susceptibility. The special hexagon pore structure minimizes the structural strength loss, and the shape of the step type comb electrode enhances the gyro stability.

Description

A kind of inside and outside truss-like three frame micro-mechanical gyro structures

Technical field

The invention belongs to micro-mechanical gyro structure technical field, relate to a kind of inside and outside truss-like three frame micro-mechanical gyro structures.

Technical background

Middle High Accuracy Microcomputer tool gyro in the world, inertial navigation and guidance field widespread use.Wherein, guidance requires to have the features such as wide range, high impact properties with micromechanical gyro.This class micromechanical gyro comprises broach line oscillatory type, broach vibration ring type etc., and wherein, broach line capacitance-type vibration formula is becoming a kind of main flow structure.

Broach line capacitance-type vibration formula gyroscope structure core is the mass of a plane internal vibration, central principle is all by static driving force, make planar directions X vibration of mass, when experiencing the angular velocity of Z-direction input, under the effect of Coriolis effect, mass is subject to Y-direction coriolis force, thereby promote mass, in Y-direction, vibrates.By detecting the vibration amplitude of Y-direction, carry out corresponding calculating input angular velocity.

According to driving, detection side, to the direct or indirect mode that applies power, can be divided into various structures.Driving direction has the direct design of driving comb direct drive mode on mass; By driving peripheral two discrete masses, this periphery mass drives the indirect type of drive of Ge Shi mass again; And peripheral two masses are integrated into the integral frame type of drive of a framework.Detection side is to being divided into too similar three kinds of forms.The shortcoming of the mode directly driving comprises that mass vibrates at both direction, driving direction be easily coupled to detection side to; Due to the vibration of mass both direction, make elastic beam be subject to the power between non-parallel displacement field, increase elastic beam internal stress, thereby cause elastic instability etc.

In three restrained gyroscope structures, because driving frame and inside casing, housing drive frame to be useless mass, and the quality of inside casing and housing is larger, and the performance of gyro is just lower.Therefore, need the interior housing quality of balance with the ratio of middle boxes quality.

Even if used the full decoupling structure of three frameworks, due to the asymmetry of processing technology, still may cause quadrature coupling error mask coriolis force to detect the situation of input signal.Therefore, also need to design the structure that reduces quadrature coupling error, such as step electrode, symmetric difference moving electrode structure etc.

Summary of the invention

The object of this invention is to provide a kind of inside and outside truss-like three frame micro-mechanical gyro structures that a kind of coupling error is little, highly sensitive, stability is high.

Technical solution of the present invention is: structure comprises housing, inside casing and middle boxes, housing comprises two explants and two groups of girder trusses, wherein every group of girder truss comprises two elastic beams and a girder truss, the outside of each explant is provided with comb electrodes, the two ends of every girder truss connect respectively an elastic beam, two groups of girder trusses connect by explant, form housing, housing is fixed on the anchor point of structure outer end by four elastic beams, and housing left and right two parts connect into complete frame by girder truss; The two ends of middle boxes are the two elastic beams of separate type, between housing and middle boxes, with separate type pair elastic beams, are connected; Inside casing is connected with middle boxes by elastic beam, and the inside of inside casing is provided with comb electrodes, and inside casing is connected on the anchor point of gyroscope structure inside by the two elastic beams of four separate types.

On described housing, inside casing and girder truss, evenly have fabrication hole.

On described housing, inside casing and girder truss, evenly have fabrication hole, fabrication hole adopts hexagon, and is honeycomb arrangement.

The inside of described inside casing is provided with step comb electrodes, and its step comb electrodes adopts trapezium structure.

Advantage of the present invention is: adopt the structure of three frameworks, form full decoupling pattern, can minimize the coupling error of driven-mode to detection signal; Adopt truss-frame structure that two of outsides disintegrate-quality piece is connected to a general frame, can minimize housing quality, improve gyro susceptibility; Adopt hexagon fabrication hole to be honeycomb arrangement, reduce the quality of housing, inside casing and truss, and make its structural strength minimization of loss; Sensitive electrode shape adopts trapezoidal, and designs ledge structure to reduce coupling error.The present invention can vacuum bonding, and is convenient to micro-gyroscope structure that dry plasma deep etching (ICP) technique etc. realizes.

Accompanying drawing explanation

Fig. 1 is one-piece construction schematic diagram of the present invention;

Fig. 2 is movable structure schematic diagram of the present invention;

Fig. 3 is hexagon fabrication hole of the present invention and the schematic diagram of arranging, and wherein, a is single fabrication hole on interior truss, and b is double fabrication hole on outer truss, and c is the many rows fabrication hole on the driver element of housing both sides;

Fig. 4 is detecting electrode ledge structure schematic diagram of the present invention.

Embodiment:

As Fig. 1, shown in 2, the present invention includes: the drive part that housing is this gyroscope structure, housing is by dividing the driver element 1 that stands in structure both sides to be connected to a complete integral body by housing girder truss 9.On housing, driving force is that the variable area comb electrodes being formed by 5a and 5b electrode and corresponding broach on driver element 1 thereof applies.Electrode 5a, 5b and corresponding broach are drive electrode.Electrode 6a, 6b, 6c, 6d are drive feedback electrode, and wherein 6a, 6b are in parallel, and 6c, 6d parallel connection have increased feedback capacity value, and left and right two teams electrode forms differential capacitor.Housing is connected on fixed anchor point by

elastic beam

8a, 8b, 8c, 8d, and fixed anchor point is 7a, 7b, 7c and 7d.

Middle boxes 2 is Ge Shi quality frame, and middle boxes 2 connects with housing by

elastic beam

10a, 10b, 10c, 10d, thereby housing can drive middle boxes at directions X, to do the vibration of same amplitude in the driving force of directions X.Middle boxes 2 links together with inside casing 3 by

elastic beam

11a, 11b, 11c, 11d.Wherein 10a, 10b, 10c, 10d level (directions X) design, vertically (Y-direction) direction design of 11a, 11b, 11c, 11d.

Inside casing 3 is sensitive-mass frame, and inside casing is connected with middle boxes 2 by

elastic beam

11a, 11b, 11c, 11d, and between 11a, 11d, uses truss to connect, and uses truss to connect between 11b, 11c.Inside casing 3 is fixed on

anchor point

13a, 13b, 13c, 13d by

elastic beam

14a, 14b, 14c, 14d.Wherein

elastic beam

14a, 14b, 14c, 14d become level (directions X) setting.

Detecting electrode is shown in 16a, 16b, is arranged on the both sides up and down of structure intermediate transverse girder.15a, 15b be detection side to feedback electrode, by 15a, 15b, to structure, apply force feedback, with reach detection side to closed loop.

As shown in Figure 3,20 is fabrication hole to fabrication hole structure, and shown in figure a, structure is to adopt structure on inside casing truss 19, and figure b is depicted as on housing truss 9 and adopts structure, and figure c is depicted as on inside casing explant 1a, 1b and inside casing 3 and adopts structure.

As shown in Figure 4, wherein, 21,22 is quiet tooth to step comb electrodes, and 23,24 is moving tooth.21 is the support beam structure on fixed electorde 15,16, and 22 is fixed fingers battery lead plate, and 23 is movable structure, the structural brace summer being connected with inside

casing

3, and 24 is movable comb electrodes plate.Wherein, movable comb electrodes plate 24 has adopted step design.

Principle of work of the present invention: by amplitude is identical, the sinusoidal signal of phase phasic difference 180 degree to applying on 5a, two electrodes of 5b, form differential capacitor with the DC offset voltage being applied on middle movable structure, the electrostatic force that produces thus directions X drives housing 1 to vibrate at directions X.The frequency of AC signal is set and the directions X vibration resonance frequency of total equates, makes the resonant condition of arrangement works, to produce maximum amplitude.Housing 1 by elastic beam 8 drive middle boxes 2 at directions X with equal amplitude and phase oscillation.When structure is subject to the angular velocity of Z direction input, the vibration that middle boxes 2 produces Y-direction due to coriolis force principle.Middle boxes 2 is vibrated in Y-direction at the vibratory drive inside casing 3 of Y-direction, is subject to the effect of elastic beam 14 due to inside casing 3 simultaneously, has limited directions X motion, therefore only produces the forced vibration of Y-direction, thereby plays the effect of full decoupling.Inside casing 3 is affected by input angular velocity and the Y-direction that produces is vibrated, and

electrode

16a, 16b is changed with the gap between corresponding broach on inside casing, thereby make capacitance variation.By detecting the capacitance variation on 16a, 16b, just can Equivalent Calculation go out the suffered Z-direction turning rate input of structure.

Claims

1. truss-like three frame micro-mechanical gyro structures inside and outside a kind, it is characterized in that, structure comprises housing (1), inside casing (3) and middle boxes (2), housing (1) comprises two explant (1a, 1b) He two groups of girder trusses (9), wherein every group of girder truss comprises two elastic beams (8) and a girder truss (9), each explant (1a, outside 1b) is provided with comb electrodes, the two ends of every girder truss connect respectively an elastic beam (8), two groups of girder trusses (9) are by explant (1a, 1b) connect, form housing (1), housing (1) is fixed on structure outer end anchor point (7) by four elastic beams, the two ends of middle boxes (2) are elastic beam (10), between housing (1) and middle boxes (2), with elastic beam (10), are connected, inside casing is connected by elastic beam (11a, 11b, 11c, 11d) same middle boxes (2), and the inside of inside casing (3) is provided with comb electrodes, and inside casing (3) is connected on the anchor point (13) of gyroscope structure inside by four elastic beams (14).

2. a kind of inside and outside truss-like three frame micro-mechanical gyro structures according to claim 1, is characterized in that, evenly have fabrication hole on described housing, inside casing and girder truss.

3. a kind of inside and outside truss-like three frame micro-mechanical gyro structures according to claim 2, is characterized in that, on described housing, inside casing and girder truss, evenly have fabrication hole, fabrication hole adopts hexagon, and is honeycomb arrangement.

4. a kind of inside and outside truss-like three frame micro-mechanical gyro structures according to claim 1, is characterized in that, the inside of described inside casing (3) is provided with step comb electrodes, and its step comb electrodes adopts trapezium structure.