CN102407668A - Manufacturing method for ink jet unit - Google Patents

Manufacturing method for ink jet unit Download PDF

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Publication number
CN102407668A
CN102407668A CN2010102934690A CN201010293469A CN102407668A CN 102407668 A CN102407668 A CN 102407668A CN 2010102934690 A CN2010102934690 A CN 2010102934690A CN 201010293469 A CN201010293469 A CN 201010293469A CN 102407668 A CN102407668 A CN 102407668A
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CN
China
Prior art keywords
layer
ink jet
plate
jet unit
approach
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Application number
CN2010102934690A
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Chinese (zh)
Inventor
罗文迪
戴贤忠
奚国元
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研能科技股份有限公司
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Priority to CN2010102934690A priority Critical patent/CN102407668A/en
Priority claimed from US13/219,386 external-priority patent/US8621751B2/en
Publication of CN102407668A publication Critical patent/CN102407668A/en

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Abstract

The invention discloses a manufacturing method for an ink jet unit, which is suitable for an ink jet head multilayer structure. The method comprises the following steps of: (a) providing a jet hole layer which is provided with a nozzle hole; (b) forming a middle flow channel layer and a communicating layer on the jet hole layer in sequence to form a liquid inflow channel, a liquid storage room and a liquid discharge flow channel; (c) forming a pressure cavity layer on the communicating layer to form a pressure cavity; (d) forming an actuating layer on the pressure cavity layer; (e) forming at least one dry film layer between adjacent layers of the jet hole layer, the middle flow channel layer, the communicating layer, the pressure cavity layer and the actuating layer; and (f) performing a hot-pressing procedure on the jet hole layer, the middle flow channel layer, the communicating layer, the pressure cavity layer, the actuating layer and the dry film layer to form the ink jet unit.

Description

The manufacturing approach of ink jet unit

Technical field

The present invention refers to a kind of manufacturing approach of ink jet unit especially about a kind of manufacturing approach.

Background technology

Progress along with ink-jet technology; Ink-jet technology no longer just is applied on the traditional prints market, more is applied in the process technique of flat-panel screens and semiconductor industry in recent years, yet; In order to reduce cost and to save the processing procedure time; Seeking new ink-jet technology one after another, by what widely use, is exactly the piezoelectric ink jet technology in this.

See also Figure 1A; It is the floor map of known ink gun sandwich construction before cutting; As shown in the figure; Known ink gun sandwich construction 1 is mainly formed with metal welding joining technique storehouse by multilayer stainless steel plate; And then the micro-structural of formation ink gun sandwich construction 1, wherein ink gun sandwich construction 1 has a plurality of ink jet units 100, sees also Figure 1B; Each ink jet unit 100 correspondence has the micro-structurals such as nozzle bore 105 of going into flow road 101, the fluid reservoir 102 that supplies to store black liquid, pressure cavity 103, fluid runner 104 and the ejection of ink supply liquid that the ink supply flow is gone into; And ink jet unit 100 go into micro-structurals such as flow road 101, fluid reservoir 102, pressure cavity 103, fluid runner 104 and nozzle bore 105 above an oscillating plate 106 is set, and above oscillating plate 106, and a braking plate 107 is set corresponding to the position of pressure cavity 103.

Please consult Figure 1B again,, adopt this kind mode when making the stainless steel plate, need possess good dimensional accuracy because known ink jet unit 100 is formed by multilayer stainless steel plate institute storehouse; When assembling, also need within the specific limits assembly error control; So just do not cause with nozzle bore 105 corresponding fluid runners 104 and produce situation about stopping up, add generally when manufacturing nozzle bore 105 with etch process below thickness 200um and the nozzle plate enterprising row of tolerance about about 10um, so the frame size of nozzle plate changes because of parameter influences such as etching chemical concentration and times easily; Add the error of assembling between multilayer stainless steel plate; After combination was accomplished, the situations of dislocation took place in nozzle bore 105 easily, and promptly nozzle bore 105 is provided with offset; Structure like Figure 1B; So will cause fluid runner 104 to dwindle and non-for vertical type, will make ink be difficult for ejection, and not of uniform size the causing of drop of ejection and influence the ink-jet quality.

Moreover; Ink jet unit shown in Figure 1B mainly is to use metal welding connection process to assemble; Its way is earlier gold-plated on each stainless steel plate surface; According to the direction order each plate superposition is got up again, then carry out hot pressing so that the welding action is finally reached in the gold atom diffusion between per two plates.Though this assembling mode has the splendid advantage of bond strength, need under the environment of anaerobic, carry out with 500 to 1000 ℃ high temperature; So equipment is set up difficulty and expensive, the tool of auxiliary hot pressing also must carefully select simultaneously, otherwise easy deformation, rotten; Even burst apart, and these high temperature process anchor clamps burst apart or be stained with sticking serious, so consume speed is exceedingly fast; Except tool replacement expense accounts for the cost height, quality is also extremely unstable under a large amount of production.Moreover price of gold is day by day expensive, the welding processing procedure is difficult for batch changing and an improper easy welding effect and the yield etc. of influencing of surface treatment, these all bed hedgehopping known use Metal Melting deliver a child and produce the manufacturing cost of ink jet unit.

Therefore, how to develop a kind of manufacturing approach of improving the ink jet unit of above-mentioned known technology disappearance, real in pressing for the problem of solution at present.

Summary of the invention

Main purpose of the present invention is to provide a kind of manufacturing approach of ink jet unit; Use metal welding connection process to assemble in order to do the ink jet unit that solves known ink gun sandwich construction; Need under the environment of anaerobic and high temperature, carry out; Tool replacement expense cost is high, and a large amount of quality of production instabilities and price of gold be problem such as costliness day by day.

For reaching above-mentioned purpose, of the present invention one to implement aspect than broad sense be the manufacturing approach that a kind of ink jet unit is provided, and is applicable to an ink gun sandwich construction, and comprise the following step: an ejection layer (a) is provided, and it has a nozzle bore; (b) an intermediate flow channel layer and a connectivity layer are arranged on this ejection layer in regular turn, go into flow road, a fluid reservoir and a fluid runner to form one; (c) a pressure chamber layer is arranged on this connectivity layer, to form a pressure cavity; (d) activating layer with one is arranged on this pressure chamber layer; (e) between the adjacent layer of this ejection layer, this intermediate flow channel layer, this connectivity layer, this pressure chamber layer and this actuating layer, at least one photopolymer layer is set; (f) this ejection layer, this intermediate flow channel layer, this connectivity layer, this pressure chamber layer, this actuating layer and this photopolymer layer are carried out a hot pressing processing procedure, to form an ink jet unit.

Description of drawings

Figure 1A: it is the floor map of known ink gun sandwich construction before cutting.

Figure 1B: it is the A-A profile of the ink jet unit shown in Figure 1A.

Fig. 2 A: it is the structural representation of the ink gun sandwich construction of preferred embodiment of the present invention.

Fig. 2 B: it is the B-B cross-sectional view of the ink jet unit of first preferred embodiment shown in Fig. 2 A.

Fig. 3: it is the structural representation of the ink jet unit of the present invention's the 3rd preferred embodiment.

Fig. 4: it is the structural representation of the ink jet unit of the present invention's the 3rd preferred embodiment.

Fig. 5: it is the structural representation of the ink jet unit of the present invention's the 4th preferred embodiment.

Fig. 6: it is the structural representation of the ink jet unit of the present invention's the 5th preferred embodiment.

[primary clustering symbol description]

The specific embodiment

Some exemplary embodiments that embody characteristic of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and be shown in the usefulness of being used as explanation in essence, but not in order to restriction the present invention.

See also Fig. 2 A and Fig. 2 B; Wherein Fig. 2 A is the structural representation of the ink gun sandwich construction of preferred embodiment of the present invention; Fig. 2 B is the B-B cross-sectional view of the ink jet unit of first preferred embodiment shown in Fig. 2 A, and shown in Fig. 2 A, ink gun sandwich construction 2 of the present invention is a sandwich construction; Mainly form, so that ink gun sandwich construction 2 has a plurality of ink jet units 200 by multilayer plate and multilayer photopolymer layer (shown in Fig. 2 B) storehouse setting.

Please consult Fig. 2 B again; Ink jet unit 200 of the present invention can be formed by ejection layer 201, intermediate flow channel layer 202, connectivity layer 203, pressure chamber layer 204, actuating layer 205 and 206 storehouse settings of a plurality of photopolymer layer; In present embodiment; The ejection layer 201 of each ink jet unit 200 can constitute a nozzle piece, comprises a nozzle bore 211, and intermediate flow channel layer 202 can be formed by 206 storehouses of clamping one photopolymer layer between first plate 20201, second plate 20202, the 3rd plate 20203, the 4th plate 20204, the 5th plate 20205, the 6th plate 20206 and each plate; But the quantity of plate is not as limit; 203 of connectivity layers can be formed by entrance channel layer 2031, intercommunicating pore layer 2032 and 206 storehouse settings of clamping photopolymer layer between the two, and wherein, entrance channel layer 2031 and intercommunicating pore layer 2032 can be made up of a plate respectively; As for; Pressure chamber layer 204 also can be made up of a plate, activates that layer 205 can be oscillating plate and braking plate (not shown) is formed, braking plate can by but do not limit by lead zirconate titanate (Lead Zirconate Titanate; PZT) piezoelectric forms, and first plate, 20201 to the 6th plates 20206, entrance channel layer 2031 and intercommunicating pore layer 2032 can be respectively a stainless steel plate.Photopolymer layer 206 employed materials of the present invention generally have the serial dry film of acryl (Acrylic) that stops aqueous solvent except using, and then can use epoxy resin (Epoxy) row material glued membrane to solvent-borne type and sclerosis ink, but not as limit.

Please consult Fig. 2 B again; Ink jet unit 200 by ejection layer 201, intermediate flow channel layer 202, connectivity layer 203, pressure chamber layer 204 and activate layer 205 in regular turn up storehouse be provided with form; And after storehouse is accomplished, the entrance channel layer 2031 of connectivity layer 203 with storehouse form have that the ink supply flow goes into go into flow road 207, intermediate flow channel layer 202 and entrance channel layer 2031 form storehouse the fluid reservoir 208 that supplies to store black liquid; Pressure chamber layer 204 forms pressure cavity 209 with storehouse; Connectivity layer 203 and intermediate flow channel layer 202 form fluid runner 210 with storehouse, and the nozzle bore 211 of ejection layer 201 formation ink supply liquid ejections, wherein; Go into flow road 207 and be connected with fluid reservoir 208 and pressure cavity 209, the two ends of fluid runner 210 are connected with pressure cavity 209 and nozzle bore 211 respectively.

Please consult Fig. 2 B again; Fluid runner 210 is for to correspond to the tapering type flow passage structure that nozzle bore 211 is constituted by entrance channel layer 2031, intercommunicating pore layer 2032 and 20201 of the 6th plate 20206 to first plates; The sectional area of the fluid runner 210 of entrance channel layer 2031, intercommunicating pore layer 2032 and the 6th plate 20206 to first plates 20201 by pressure cavity 209 towards nozzle bore 211 direction convergents; And every adjacent layer plate constitutes the fluid runner according to the principle of convergent direction; That is the long-pending fluid cross section of fluid channel greater than following 1 convergent direction adjacent layer plate of the fluid cross section of fluid channel of an adjacent layer plate is long-pending; That is to say; Entrance channel layer 2031, intercommunicating pore layer 2032 and the 6th plate 20206 to first plates 20201 are compared in order to the sectional area that forms fluid runner 210, sectional area by big to little order be entrance channel layer 2031, intercommunicating pore layer 2032, the 6th plate 20206, the 5th plate 20205, the 4th plate 20204, the 3rd plate 20203, second plate 20202, first plate 20201 in regular turn, promptly constitute the sectional area that the plate of entrance channel layer 2031 has maximum; The sectional area of first plate 20201 is then minimum; Thus, by the technical characterictic of pressure cavity 209 towards nozzle bore 211 direction convergents, promptly fluid runner 210 is the design of a tapering type flow passage structure by means of the sectional area of fluid runner 210; Can guide the flow direction of black liquid and accelerate the flow velocity of black liquid, the drop size by nozzle bore 211 ejections and ejection is consistent fast to make black liquid.

Please consult Fig. 2 A again; Entrance channel layer 2031 and intercommunicating pore layer 2032, the pressure chamber layer 204 of first plate 20201 of the ejection layer 201 that ink jet unit 200 of the present invention is comprised, intermediate flow channel layer 202, second plate 20202, the 3rd plate 20203, the 4th plate 20204, the 5th plate 20205, the 6th plate 20206, connectivity layer 203, activate layer 205 and all distinctly have a contraposition inspection opening 2011,20207,20208,20209,20210,20211,20212,2033,2034,2041,2051; And the aperture of each contraposition inspection opening is different; And the center of circle of these a plurality of contraposition inspection openings 2011,20207,20208,20209,20210,20211,20212,2033,2034,2041,2051 belongs to the concentric circles setting; Wherein the aperture of contraposition inspection opening be ejection layer 201, first plate 20201, second plate 20202, the 3rd plate 20203, the 4th plate 20204, the 5th plate 20205, the 6th plate 20206, entrance channel layer 2031, intercommunicating pore layer 2032, pressure chamber layer 204 in regular turn, activates layers 205 to big order by little; Promptly activate the aperture maximum of the contraposition inspection opening 2051 of layer 205; And the aperture of the contraposition inspection opening 2011 of ejection layer 201 is minimum; Therefore entrance channel layer 2031 and intercommunicating pore layer 2032, the pressure chamber layer 204 of first plate 20201 of the ejection layer 201 that comprised of ink jet unit 200 of the present invention, intermediate flow channel layer 202, second plate 20202, the 3rd plate 20203, the 4th plate 20204, the 5th plate 20205, the 6th plate 20206, connectivity layer 203, the assembling contraposition mode between the layer 205 of activating can belong to concentrically ringed characteristic and carry out the contraposition between this multilayer plate by means of the contraposition inspection opening by means of each plate; Make assembling accomplish entrance channel layer 2031, intercommunicating pore layer 2032, the pressure chamber layer 204 of first plate 20201 of back ejection layer 201, intermediate flow channel layer 202, second plate 20202, the 3rd plate 20203, the 4th plate 20204, the 5th plate 20205, the 6th plate 20206, connectivity layer 203, activate the situation that can not squint between layers 205, make ink jet unit 200 can keep normal ink-jet function.

Please consult Fig. 2 B again, the manufacturing approach of ink jet unit 200 of the present invention is: at first, ejection layer 201 is provided; It has a nozzle bore 211, and in ejection layer 201 tops one deck photopolymer layer 206 is set, wherein; Photopolymer layer 206 is a kind of sensing optical activity photoresist, except when engage outside the glue-line, also can the gold-tinted program defining go out suitable perforate; To cooperate its relevant runner or hole figure of being connected up and down, to replace the fluid channel layer of known portions.

Then; First plate 20201 that in regular turn intermediate flow channel layer 202 is comprised with the mode of clamping one photopolymer layer 206 between the two adjacent plates, second plate 20202, the 3rd plate 20203, the 4th plate 20204, the 5th plate 20205, the 6th plate 20206 are arranged on the photopolymer layer 206 of ejection layer 201 tops; And one photopolymer layer 206 is set in the 6th plate 20206 tops; Follow-up; Mode with clamping one photopolymer layer 206 between two adjacent plates is arranged at entrance channel layer 2031 and the intercommunicating pore layer 2032 that connectivity layer 203 is comprised on the photopolymer layer 206 of the 6th plate 20206 tops in regular turn equally; And one photopolymer layer 206 is set in intercommunicating pore layer 2032 top, to be formed into flow road 207, fluid reservoir 208 and fluid runner 210.

Then, pressure chamber layer 204 is arranged on the photopolymer layer 206 of intercommunicating pore layer 2032 top of connectivity layer 203, to form pressure cavity 209; Then, one photopolymer layer 206 is set, and will activates layer and 205 be arranged on the photopolymer layer 206 of pressure chamber layer 204 top in pressure chamber layer 204 top; At last; The ejection layer 201 of assembling the contraposition completion, intermediate flow channel layer 202, connectivity layer 203, pressure chamber layer 204, actuating layer 205 and photopolymer layer 206 are fixed on the heating tool, carry out a hot pressing processing procedure with the mode of heating simultaneously up and down then, its serviceability temperature is approximately between 150 to 200 ℃; Pressure is then between 3 to 6kg/cm2; Time needs 1 hour approximately, and just takes out when under the state of exerting pressure, being cooled near room temperature, with formation ink jet unit 200.

The spray nozzle sheet that ejection layer 201 is constituted then can little electroforming mode be made; Because its size is a metal material quite greatly and again; So be easy to produce fold or distortion; Even can't be returned to original situation, so in some embodiments of the present invention, also can use more on-deformable pi (PI) material as spray nozzle sheet.Use the nozzle bore 211 of the spray nozzle sheet of pi (PI) material can use excimer laser to produce, thickness is main with 25um or 50um then.And no matter be electroforming or PI spray nozzle sheet, the present invention also can so not only can reduce the chance of buckling deformation with the dimension shrinks of ejection layer 201, more because area is when significantly dwindling and also can save production cost.

Though the ink jet unit 200 shown in Fig. 2 B can reach a batch change production with the mode of a hot pressing; But if the number of plies of assembly is too much; Engage the effect except the heat conduction can influence than instability, each interlayer also has bit errors more easily simultaneously, and then has influence on hydrojet stability.Moreover; It is also comparatively loaded down with trivial details that the plate of hot pressing Cheng Qian is made, goes up on photopolymer layer and all plates step such as tool; Need more material of cost and time cost, therefore, in some embodiment; As shown in Figure 3; The mode of multilayer photopolymer layer 306 can be set by means of the photopolymer layer of selecting specific thicknesses for use 306 and on the part plate, make total plate number of forming ink jet unit 300 reduce, but the gross thickness of ink jet unit 300 structures still can be near the structure of ink jet unit 200; For example; If the present embodiment used thickness is the photopolymer layer 306 of 30um, second plate 20202 of the intermediate flow channel layer 202 that then minuses compared to Fig. 2 B, the 4th plate 20204 partly can be more easily compensated by the photopolymer layer 306 of each interlayer, and two-layer photopolymer layer 306 on 3024 of first plate 3021 of the intermediate flow channel layer 302 in Fig. 3, second plate 3022, the 3rd plate 3023, the 4th plates; More can change last three layers of photopolymer layer 306 in addition and directly replace the entrance channel layer 2031 shown in Fig. 2 B, make that it forms plate and can reduce to 8 layers by 11 layers ink jet unit shown in Figure 3 300 under the constant situation of gross thickness.

See also Fig. 4; It is the structural representation of the ink jet unit of the present invention's the 3rd preferred embodiment; As shown in the figure; The another kind of way that reduces the number of plies of the present invention is first plate 20201, second plate 20202, the 3rd plate 20203 of intermediate flow channel layer 202 that required precision among former Fig. 2 B is lower, and the 4th plate 20204, the 5th plate 20205, the 6th plate 20206 are merged into first plate 4021 and second plate 4022 of the intermediate flow channel layer 402 among Fig. 4 respectively; The entrance channel layer 2031 of the ejection layer 201 shown in Fig. 2 B, connectivity layer 203, intercommunicating pore layer 2032, pressure chamber layer 204 and to cause vibration level 205 then higher relatively because of required precision; So still keep independence separately, result according to this, total composition plate of ink jet unit 400 can reduce to 7 layers by 11 layers.

See also Fig. 5, it is for the structural representation of the ink jet unit of the present invention's the 4th preferred embodiment, compared to Fig. 4; If replace the entrance channel layer 2031 among Fig. 4 with multilayer photopolymer layer 306, then the composition plate of the ink jet unit 500 of this embodiment can reduce to 6 layers again, generally speaking; For the ink jet unit gross thickness after avoiding engaging and the ink jet unit shown in Fig. 2 B 200 produce differences, the photopolymer layer 206 among Fig. 4 and Fig. 5 can be hoped Bao Yuehao more usually, but in this case; If still come superposition to replace the entrance channel layer 2031 among Fig. 4 among Fig. 5 with so thin photopolymer layer 206; Very the photopolymer layer 206 of multilayer will expend the time that photopolymer layer is set too much, therefore; In embodiment shown in Figure 5, can use three layers of thicker photopolymer layer 306; For example: the photopolymer layer 306 of thickness 30um, or for example use thickness 50um add 30um altogether two-layer photopolymer layer reach, certainly; In other embodiment, can also different-thickness and the photopolymer layer of the different numbers of plies make up.

See also Fig. 6; It is the structural representation of the ink jet unit of the present invention's the 5th preferred embodiment; Compared to Fig. 5, if pressure chamber layer 204 among Fig. 5 and actuating layer 205 are merged into like actuating among Fig. 6 and shell of compression 610, then the composition plate of the ink jet unit 600 of this embodiment can reduce to 5 layers again.

In sum, the manufacturing approach of ink jet unit of the present invention replaces known metal welding processing procedure by means of the mode that engages with photopolymer layer, because photopolymer layer is arranged as glue-line; So it is gold-plated that each layer metal plate just do not need again; Can save a lot of costs, simultaneously, it can be assembled with simple hot-press equipment and method; Can batch change processing, make production process more efficient.

The present invention must be by knowing that this technological personage Ren Shi craftsman thinks and be to modify as all, right neither take off such as attach claim desire Protector.

Claims (9)

1. the manufacturing approach of an ink jet unit is applicable to an ink gun sandwich construction, comprises the following step at least:
(a) ejection layer is provided, it has a nozzle bore;
(b) an intermediate flow channel layer and a connectivity layer are arranged on this ejection layer in regular turn, go into flow road, a fluid reservoir and a fluid runner to form one;
(c) a pressure chamber layer is arranged on this connectivity layer, to form a pressure cavity;
(d) activating layer with one is arranged on this pressure chamber layer;
(e) between the adjacent layer of this ejection layer, this intermediate flow channel layer, this connectivity layer, this pressure chamber layer and this actuating layer, at least one photopolymer layer is set;
(f) this ejection layer, this intermediate flow channel layer, this connectivity layer, this pressure chamber layer, this actuating layer and this photopolymer layer are carried out a hot pressing processing procedure, to form an ink jet unit.
2. the manufacturing approach of ink jet unit as claimed in claim 1, wherein this is gone into the flow road and is connected with this fluid reservoir and this pressure cavity.
3. the manufacturing approach of ink jet unit as claimed in claim 1, wherein this fluid runner is connected with this pressure cavity and this nozzle bore respectively.
4. the manufacturing approach of ink jet unit as claimed in claim 1, wherein this intermediate flow channel layer is formed by multilayer plate storehouse, and this connectivity layer is formed by at least one plate storehouse.
5. the manufacturing approach of ink jet unit as claimed in claim 4, wherein this fluid runner is formed by multilayer plate storehouse, and the sectional area of this fluid runner by this pressure cavity towards this nozzle bore direction convergent.
6. the manufacturing approach of ink jet unit as claimed in claim 5; Wherein this fluid runner is made up of the principle of every adjacent layer plate according to the convergent direction, that is the long-pending fluid cross section of fluid channel greater than following 1 convergent direction adjacent layer plate of the fluid cross section of fluid channel of an adjacent layer plate is long-pending.
7. the manufacturing approach of ink jet unit as claimed in claim 1, wherein this ejection layer is made with little electroforming mode.
8. the manufacturing approach of ink jet unit as claimed in claim 1, wherein the material of this ejection layer is a pi, and this nozzle bore is made with the excimer laser mode.
9. the manufacturing approach of ink jet unit as claimed in claim 1, wherein this photopolymer layer is acryl or epoxy resin material.
CN2010102934690A 2010-09-20 2010-09-20 Manufacturing method for ink jet unit CN102407668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN2010102934690A CN102407668A (en) 2010-09-20 2010-09-20 Manufacturing method for ink jet unit
US13/219,386 US8621751B2 (en) 2010-09-08 2011-08-26 Inkjet head manufacturing method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103963466A (en) * 2013-02-01 2014-08-06 精工爱普生株式会社 Liquid ejecting head, liquid ejecting apparatus and method for manufacturing liquid ejecting head

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CN101274521A (en) * 2007-03-29 2008-10-01 兄弟工业株式会社 Liquid ejection head and method of manufacturing the same
CN101549583A (en) * 2008-03-31 2009-10-07 兄弟工业株式会社 Liquid discharging head and method for manufacturing the same

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Publication number Priority date Publication date Assignee Title
US5872583A (en) * 1994-12-21 1999-02-16 Seiko Epson Corporation Using fusible films having windows supplied with adhesive and gap material
US6467137B1 (en) * 1998-09-17 2002-10-22 Nec Corporation Method of manufacturing an ink jet recording head
CN1280061A (en) * 1999-07-07 2001-01-17 日本电气株式会社 Ink jet recording head and its producing method
CN1923518A (en) * 2000-01-31 2007-03-07 皮科杰特公司 Method for making jet-ink printed head
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Publication number Priority date Publication date Assignee Title
CN103963466A (en) * 2013-02-01 2014-08-06 精工爱普生株式会社 Liquid ejecting head, liquid ejecting apparatus and method for manufacturing liquid ejecting head
CN103963466B (en) * 2013-02-01 2017-04-12 精工爱普生株式会社 Liquid ejecting head, liquid ejecting apparatus and method for manufacturing liquid ejecting head

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Application publication date: 20120411