CN102403247A - 试料检查装置以及试料检查方法 - Google Patents
试料检查装置以及试料检查方法 Download PDFInfo
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- CN102403247A CN102403247A CN2011102127287A CN201110212728A CN102403247A CN 102403247 A CN102403247 A CN 102403247A CN 2011102127287 A CN2011102127287 A CN 2011102127287A CN 201110212728 A CN201110212728 A CN 201110212728A CN 102403247 A CN102403247 A CN 102403247A
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- 238000007689 inspection Methods 0.000 title claims abstract description 20
- 238000004458 analytical method Methods 0.000 claims abstract description 112
- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 47
- 230000003287 optical Effects 0.000 claims abstract description 41
- 238000004364 calculation method Methods 0.000 claims description 6
- 230000003760 hair shine Effects 0.000 claims description 3
- 238000000572 ellipsometry Methods 0.000 abstract description 23
- 230000000875 corresponding Effects 0.000 abstract description 12
- 238000002441 X-ray diffraction Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 111
- 210000004276 Hyalin Anatomy 0.000 description 38
- 238000004876 x-ray fluorescence Methods 0.000 description 20
- 239000002184 metal Substances 0.000 description 19
- 229910052751 metal Inorganic materials 0.000 description 19
- 238000001228 spectrum Methods 0.000 description 18
- 238000002425 crystallisation Methods 0.000 description 8
- 230000005712 crystallization Effects 0.000 description 8
- 238000010276 construction Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000000051 modifying Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound 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- 238000004088 simulation Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
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- G01B11/02—Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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Abstract
本发明提供一种试料检查装置以及试料检查方法，通过将多种计测方法加以组合，从而使得可检查的试料不受限制。试料检查装置具备入射部(11)、反射光受光部(12)以及分析部(13)(椭率计部)、X射线源(21)、荧光X射线检测部(22)以及分析部(23)(X射线测定部)、激光光源(31)、分束器(34)、拉曼散射光检测部(32)以及分析部(33)(拉曼散射光测定部)。能够使用与试料(6)相应的适当的方法来计测试料的厚度。而且，通过将椭圆偏光法以及荧光X射线分析加以组合，从而能够独立地计测试料(6)的厚度与折射率等的光学特性。而且，当试料(6)为多层试料时，能够利用适当的方法来检查各层。
Description
试料检查装置以及试料检查方法
技术领域
[0001] 本发明涉及一种对包括试料厚度在内的特性进行计测的试料检查装置以及试料检查方法。
背景技术
[0002] 在太阳能电池元件等的半导体元件中，有具备将组成互不相同的多个层来层叠而成的多层结构的元件。在此类元件的制造工序中或制造后，需要对各层的厚度以及其他特性进行计测。作为通过对试料的厚度以及其他特性进行计测而检测试料的装置，有椭率计 (ellipsometer)。椭率计实现椭圆偏光法（ellipsometry)，即，对试料照射直线偏光，对照向试料的入射光与反射光之间的偏光状态的变化进行测定，根据偏光状态的变化来计测试料的厚度以及折射率等。在专利文献1中，揭示了一种利用椭率计来计测试料的厚度的技术。而且，作为其他的试料检查装置，有一种荧光X射线分析装置，其向试料照射X射线，并对从试料产生的荧光X射线进行分析。当试料的组成为已知时，能够由荧光X射线的强度来计测试料的厚度。
[0003][现有技术文献]
[0004][专利文献]
[0005][专利文献1]日本专利特开2005-233928号公报
[0006] 当具备多层结构的试料含有门极（gate)绝缘层等的透明层时，能够利用椭率计来计测透明层的厚度。但是，如果试料含有配线层等的金属层，则光将无法侵入金属层的内部，因此无法利用椭率计来计测金属层的厚度。对此，荧光X射线分析装置能够计测金属层的厚度。但是，根据试料组成的不同，存在包含荧光X射线分析装置难以测定厚度的层的试料。例如，在硅（silicon)基板上形成着以二氧化硅为成分的门极绝缘层即透明层的试料中，难以区别来自硅基板的硅的荧光X射线与来自透明层的硅的荧光X射线，因此，无法个别地计测各层的厚度。如此，根据试料的不同，适当的试料检查装置也不同，从而存在必须根据试料来区分使用试料检查装置的问题。尤其，为了对多层试料的特性进行计测，必须使用多个试料检查装置，从而存在耗费工夫的问题。
发明内容
[0007] 本发明是有鉴于此种情况而完成，其目的在于提供一种试料检查装置以及试料检查方法，通过将多种计测方法加以组合，从而使得可检查的试料不受限制。
[0008] 本发明的试料检查装置的特征在于包括：椭率计部，向试料入射直线偏光，接收来自试料的反射光，对入射光与反射光之间的偏光的变化进行测定；X射线测定部，向试料照射X射线，对来自试料的X射线进行测定；以及分析部，根据所述椭率计部或所述X射线测定部的测定结果，进行用于求出试料的厚度的分析。
[0009] 本发明的试料检查装置的特征在于，所述分析部包括：厚度计算部，根据所述X射线测定部的测定结果，计算试料的厚度；以及光学特性计算部，根据所述椭率计部的测定结果以及试料厚度的计算结果，计算试料的光学特性。
[0010] 本发明的试料检查装置的特征在于还包括入射位置调整部，当试料为多层试料时，调整所述椭率计部使直线偏光入射的位置，以使直线偏光入射至多层试料中的任一层， 所述分析部还包括：第1计算部，根据所述椭率计部的测定结果，计算所述椭率计部使直线偏光入射的所述任一层的厚度；以及第2计算部，根据所述X射线测定部的测定结果，计算所述多层试料中的其他层的厚度。
[0011] 本发明的试料检查装置的特征在于还包括拉曼散射光测定部，向试料入射单色光，对从试料产生的拉曼（Raman)散射光进行测定，所述分析部还包括结构特性计算部，根据所述拉曼散射光测定部的测定结果，计算试料的结构特性。
[0012] 本发明的试料检查方法的特征在于，使用具备椭率计部及X射线测定部的试料检查装置，根据所述X射线测定部的测定结果，计算试料的厚度，并根据所述椭率计部的测定结果以及试料厚度的计算结果，计算试料的光学特性，所述椭率计部向平板状的试料入射直线偏光，接收来自试料的反射光，对入射光与反射光之间的偏光的变化进行测定，所述X 射线测定部向试料照射X射线，并测定来自试料的X射线。
[0013] 本发明的试料检查方法的特征在于，当试料为多层试料时，利用所述椭率计部来对多层试料中的任意的一层测定入射光与反射光之间的偏光的变化，利用所述X射线测定部来测定来自所述多层试料的X射线，根据所述椭率计部的测定结果，计算所述一层的厚度，根据所述X射线测定部的测定结果，计算所述多层试料中的其他层的厚度。
[0014] 在本发明中，试料检查装置具备椭率计部和X射线测定部，根据椭率计部或X射线测定部的测定结果，计测试料的厚度。因而，对于能够利用荧光X射线分析等使用X射线的分析的试料，可使用X射线来计测试料的厚度，对于难以利用使用X射线的分析的试料，可通过椭圆偏光法来计测试料的厚度。
[0015] 而且，在本发明中，试料检查装置通过使用X射线的分析来计测试料的厚度，并根据椭率计部的测定结果以及计测所得的试料的厚度，来对试料的折射率等的光学特性进行计测。因而，与单独的椭率计不同，可分别独立地计测试料的光学特性以及厚度。
[0016] 而且，在本发明中，试料检查装置对于多层试料中的任一层，可通过椭圆偏光法来计测厚度，对于另一层，可通过使用X射线的分析来计测厚度。也能够同时进行各层的厚度的计测。
[0017] 而且，在本发明中，试料检查装置更具备拉曼散射光测定部，与使用椭圆偏光法以及X射线的分析不同地，可通过拉曼散射光分析来计测试料的结晶化度等的结构特性。
[0018](发明的效果）
[0019] 在本发明中，可使用与试料相应的适当的方法来计测试料的厚度。由于无须根据试料的不同来区分使用试料检查装置，因此本发明可起到优异的效果，例如检查试料时的工夫变得简便。
附图说明
[0020] 图1是表示实施方式1的试料检查装置的结构的示意图。
[0021] 图2是表示试料的例子的示意剖面图。
[0022] 图3是表示实施方式2的试料检查装置的结构的示意图。[0023] 符号的说明 [0024] 4 ： 分析部[0025] 6 ： 试料[0026] 11 ：入射部[0027] 12 ：反射光受光部[0028] 13 ：分析部[0029] 21 =X射线源[0030] 22 ：荧光X射线检测部[0031] 23 ：分析部[0032] 31 ：激光光源[0033] 32 ：拉曼散射光检测部[0034] 33 ：分析部[0035] 34 ：分束器[0036] 51 ：试料台[0037] 52 ：驱动部[0038] 61 ：透明层[0039] 62 :η型层[0040] 63 Φ型层[0041] 64 ：金属层[0042] 71 =X射线源[0043] 72 ：反射X射线检测部[0044] 73 ：分析部
具体实施方式
[0045] 以下，根据表示实施方式的图式来具体说明本发明。
[0046](实施方式1)
[0047] 图1是表示实施方式1的试料检查装置的结构的示意图。试料检查装置具备：载置试料6的试料台51 ；向试料台51上的试料6入射直线偏光的入射部11 ；以及接收入射光被试料6反射后的反射光的反射光受光部12。在图1中，以虚线箭头来表示入射光以及反射光。入射部11是包含氙气灯（xenon-lamp)等的白色光源、狭缝（slit)及将白色光转换为直线偏光的偏光元件而构成的光学系统。反射光受光部12是包含对反射光的相位进行调制的相位调制器、检偏器、对通过检偏器后的光进行分光的分光器及对分光后的光进行检测的检光器而构成的光学系统。在反射光受光部12上，连接着对反射光受光部12的反射光的受光结果进行分析的分析部13。
[0048] 反射光受光部12按照分光后的不同波长，将与相位的调制相应的光的检测强度输出至分析部13。分析部13根据与相位的调制相应的光的检测强度，针对每个波长来对垂直于试料6的入射面的偏光成分即s偏光与平行于所述入射面的偏光成分即ρ偏光的相位差Δ、以及s偏光与ρ偏光的反射振幅比角Ψ进行计测。Δ以及Ψ是椭圆偏光法的测定值。如此，分析部13获取试料6的Δ以及Ψ的波长变化。入射部11、反射光受光部12以及分析部13对应于本发明中的椭率计部，利用椭圆偏光法来进行试料6的检查。
[0049] 试料检查装置更具备：X射线源21 ；使X射线源21产生的X射线照射至试料6的未图示的光学系统；以及对因X射线的照射而由试料6所产生的荧光X射线进行检测的荧光X射线检测部22。至少X射线源21、试料台51以及荧光X射线检测部22被收纳在用来屏蔽X射线的未图示的框体内。在图1中，以实线箭头来表示照射至试料6的X射线以及荧光X射线。X射线源21是通过使加速电子撞击金属制靶材（target)来产生X射线的X 射线管。荧光X射线检测部22配置在能够对从试料6产生的荧光X射线进行检测的位置处。荧光X射线检测部22具备比例计数管或半导体检测器等的检测元件。在荧光X射线检测部22上，连接着对荧光X射线的检测结果进行分析的分析部23。
[0050] 荧光X射线检测部22将与入射至检测元件的荧光X射线的能量（energy)成正比的电信号输出至分析部23。分析部23根据信号强度来甄选来自荧光X射线检测部22的电信号，对各信号强度的电信号进行计数（count)，由此获取荧光X射线的波长与计数值的关系，即，荧光X射线的频谱（spectrum)。X射线源21、荧光X射线检测部22以及分析部23 对应于本发明中的X射线测定部，通过用荧光X射线分析来进行试料6的检查。另外，图1 中，表示了椭圆偏光法中所用的光的光路与荧光X射线分析中所用的X射线的光路位于同一平面上的形态，但试料检查装置也可采用两个光路位于彼此交叉的平面上的形态。
[0051] 试料检查装置更具备：激光（laser)光源31 ；将来自激光光源31的激光大致垂直地照射至试料6的未图示的光学系统；对因激光的照射而从试料6产生的拉曼散射光进行分离的分束器（beam-splitter) 34 ；以及拉曼散射光检测部32。通过激光对试料6的照射， 从试料6产生受到激光激发的拉曼散射光。拉曼散射光由分束器34从激光中分离出来，并入射至拉曼散射光检测部32。图1中，以两点链线的箭头来表示照射至试料6的激光以及拉曼散射光。拉曼散射光检测部32是包含滤光器、对拉曼散射光进行分光的分光器以及对分光后的光进行检测的检光器而构成的光学系统。在拉曼散射光检测部32上，连接着对拉曼散射光的检测结果进行分析的分析部33。
[0052] 拉曼散射光检测部32按照分光后的不同波长，将拉曼散射光的检测强度输出至分析部33。分析部33获取拉曼散射光的波长与检测强度的关系，即，拉曼散射光的频谱。 激光光源31、分束器34、拉曼散射光检测部32以及分析部33对应于本发明中的拉曼散射光测定部，通过拉曼散射光分析来进行试料6的检查。
[0053] 在试料台51上，连结着使用马达（motor)等来使试料台51上下移动的驱动部52。 通过驱动部52使试料台51上下移动，而使试料6上下移动，从而能够对入射部11所入射的直线偏光在试料6内的焦点位置与激光光源31所照射的激光在试料6内的焦点位置进行调整。当试料6为多层结构时，驱动部52能够调整焦点位置，以使直线偏光或激光入射至试料6中的作为测定对象的层。而且，驱动部52通过使试料6内的焦点位置发生移动， 从而能够对作为椭圆偏光法以及拉曼散射光分析的测定对象的层进行变更。
[0054] 分析部13、23及33与驱动部52连接于分析部4。分析部4是包含进行数据（data) 的输出入的接口（interface)、输入来自使用者的指示的输入部、执行各种运算的运算部、 存储运算所需的信息及程序（program)的存储器（memory)、以及输出分析结果的打印机 (printer)等的输出部而构成。分析部13将试料6的Δ以及Ψ的波长变化输出至分析部4，分析部23将荧光X射线的频谱输出至分析部4，分析部33将拉曼散射光的频谱输出至分析部4。而且，分析部4具有对驱动部52的动作进行控制的功能。
[0055] 图2是表示试料6的例子的示意剖面图。图2所示的试料6是多层结构的太阳能电池元件。试料6层叠有金属制的金属层64、由ρ型半导体构成的ρ型层63、由η型半导体构成的η型层62以及透明层61。金属层64是由Cu或Mo等的金属构成的背面电极。透明层61是由ZnO或ITO等构成的透明电极。ρ型层63以及η型层62是由多晶硅、非晶硅 (amorphous silicon)或化合物半导体等的半导体构成，是太阳能电池元件的光吸收层。图 2中进行了简化，实际的太阳能电池元件包含更多的层。另外，在本发明中，也能够进行单层结构的试料的检查。
[0056] 考虑对图2所示的试料6中的透明层61的厚度进行计测的情况。当透明层61的组成不同于η型层62、ρ型层63以及金属层64时，能够利用荧光X射线分析来计测厚度。 此时，X射线源21将X射线照射至试料6，荧光X射线检测部22对来自试料6的荧光X射线进行检测，分析部23获取荧光X射线的频谱。分析部4进行以下处理，即，从荧光X射线的频谱中提取透明层61中所含的元素中的在其他层中不含的元素的荧光X射线强度，并根据提取的荧光X射线强度以及预先判明的该元素在透明层61中的浓度，来计算透明层61 的厚度。
[0057] 而且，当透明层61中的元素在η型层62、ρ型层63以及金属层64中的任一层中均含有时，虽难以利用荧光X射线分析来计测厚度，但可利用椭圆偏光法来计测厚度。驱动部52使试料台51上下移动，从而使入射部11所入射的直线偏光的焦点位于透明层61上。 入射部11使直线偏光入射至试料6的透明层61，由反射光受光部12来接收透明层61的反射光，分析部13获取透明层61的Δ以及Ψ的波长变化。分析部4进行以下处理，S卩，对由假定的透明层61的折射率等的光学特性以及厚度所导出的△以及Ψ的波长变化、与实际获取的△以及Ψ的波长变化进行比较，一方面使光学特性以及厚度发生变化一方面反复进行比较，从而求出透明层61的光学特性以及厚度。
[0058] 如上所述，实施方式1的试料检查装置在能够利用荧光X射线分析的情况下，可通过荧光X射线分析来计测试料6中的一个层的厚度，在难以利用荧光X射线分析的情况下， 可通过椭圆偏光法来计测层的厚度。如此，无论是怎样的试料6，实施方式1的试料检查装置都能使用与试料6相应的适当的方法来计测各层的厚度。由于无须根据试料6的不同来区分使用试料检查装置，因此检查试料6时的工夫变得简便。另外，如果是组成不明的试料 6，则也可通过荧光X射线分析来进行组成分析。
[0059] 其次，考虑对透明层61的光学特性进行计测的情况。当透明层61的组成不同于 η型层62、ρ型层63以及金属层64时，可利用荧光X射线分析以及椭圆偏光法这两者。首先，X射线源21将X射线照射至试料6，分析部4对荧光X射线的频谱进行分析，由此计算出透明层61的厚度，并将计算出的透明层61的厚度加以存储。入射部11继而使直线偏光入射至试料6的透明层61。分析部4进行以下处理，即，将透明层61的厚度的值固定为通过荧光X射线分析而计测的值，一方面使透明层61的光学特性发生变化，一方面反复对由透明层61的光学特性以及厚度导出的Δ以及Ψ的波长变化与实际获取的Δ以及Ψ的波长变化进行比较，从而求出透明层61的光学特性。
[0060] 如上所述，本发明中，可通过荧光X射线分析来对试料6中的一层的厚度进行计测，并通过椭圆偏光法来对同一层的折射率等的光学特性进行计测。单个的椭率计无法分别独立地计测层的光学特性以及厚度。对此，本发明中，能够分别独立地计测层的光学特性以及厚度。因而，根据本发明，能够更高精度地对试料6中所含的各层的折射率等的光学特性和厚度进行计测。
[0061] 而且，实施方式1的试料检查装置中，分析部4可控制入射部11以及X射线源21 的动作，使入射部11与X射线源21同时动作。入射部11向试料6入射的可见光与X射线源21向试料6照射的X射线的波长区域不同，因此不会相互干扰。而且，反射光受光部12 接收的反射光与荧光X射线检测部22所检测的荧光X射线的波长区域不同，因此不会相互干扰而可同时进行检测。即，实施方式1的试料检查装置能够同时获取试料6的Δ以及Ψ 的波长变化和试料6的荧光X射线频谱。分析部4进行以下处理，S卩，根据同时获取的试料 6的△以及Ψ的波长变化与荧光X射线频谱，分别独立地求出试料6的光学特性以及厚度。因而，实施方式1的试料检查装置能够以短时间来对试料6中所含的各层的折射率等的光学特性和厚度进行计测。
[0062] 其次，考虑对试料6中的透明层61以及金属层64的厚度进行计测的情况。由于椭圆偏光法难以计测金属层64的厚度，因此通过荧光X射线分析来计测金属层64的厚度， 并通过椭圆偏光法来计测透明层61的厚度。驱动部52使入射部11所入射的直线偏光的焦点位于透明层61上，入射部11使直线偏光入射至试料6的透明层61，反射光受光部12 接收透明层61的反射光，分析部13获取透明层61的Δ以及Ψ的波长变化。分析部4进行以下处理，即，根据Δ以及Ψ的波长变化，求出透明层61的厚度。而且，X射线源21使 X射线入射至试料6，荧光X射线检测部22对来自试料6的荧光X射线进行检测，分析部23 获取荧光X射线的频谱。分析部4进行以下处理，即，从荧光X射线的频谱中提取金属层64 中所含的元素中的在其他层中不含的元素的荧光X射线强度，并根据提取的荧光X射线强度来计算金属层64的厚度。
[0063] 如上所述，实施方式1的试料检查装置对于试料6中所含的多个层中的可利用荧光χ射线分析的层，可通过荧光χ射线分析来计测层的厚度，对于可利用椭圆偏光法的层， 可通过椭圆偏光法来计测层的厚度。如此，实施方式1的试料检查装置对于多层结构的试料6中所含的多个层，可分别使用与层相应的适当的方法来计测厚度。无须根据作为测定对象的层来区分使用试料检查装置，能够利用同一试料检查装置来计测多个层的厚度，因此，检查试料时的工夫变得简便。
[0064] 而且，实施方式1的试料检查装置可使入射部11与X射线源21同时动作，从而同时获取透明层61的Δ以及Ψ的波长变化和金属层64的荧光X射线频谱。分析部4进行以下处理，即，根据同时获取的透明层61的Δ以及Ψ的波长变化与金属层64的荧光X射线频谱，独立地求出透明层61的厚度与金属层64的厚度。因而，实施方式1的试料检查装置能够以短时间来对多层结构的试料6中所含的多个层各自的厚度进行计测。
[0065] 进而，实施方式1的试料检查装置可进行试料6的拉曼散射光分析。将成为拉曼散射光分析测定对象的层设为η型层62。驱动部52使试料台51上下移动，从而使来自激光光源3 1的激光的焦点位于η型层62上。激光光源31使激光照射至η型层62，拉曼散射光检测部32对来自η型层62的拉曼散射光进行检测，分析部33获取来自η型层62的拉曼散射光的频谱。分析部4进行以下处理，S卩，根据拉曼散射光的频谱，计算η型层62的结晶化度等的结构特性。由此，例如可对η型层62中所含的多晶硅或非晶硅的结晶化度进行计测。另外，通过拉曼散射光分析，除了结晶化度以外，还可对η型层62内的应力等其他结构特性进行计测。而且，对于η型层62以外的其他层，也能进行拉曼散射光分析。
[0066] 如上所述，实施方式1的试料检查装置除了椭圆偏光法以及荧光X射线分析以外， 还能通过拉曼散射光分析来对试料6中的各层计测结晶化度等的结构特性。由于无须使用其他试料检查装置来进行拉曼散射光分析，因此，检查试料时的工夫变得简便。而且，由于为了进行拉曼散射光分析而激光光源3 1对试料6照射的激光以及拉曼散射光的波长区域与X射线不同，因此能够同时进行拉曼散射光分析与荧光X射线分析。例如，试料检查装置能够同时获取η型层62的拉曼散射光频谱与荧光X射线频谱，分析部4可进行求出η型层 62的结构特性和厚度的处理。因而，实施方式1的试料检查装置能够以短时间来对试料6 的结晶化度等的结构特性和厚度进行计测。
[0067](实施方式2)
[0068] 图3是表示实施方式2的试料检查装置的结构的示意图。取代X射线源21、荧光 X射线检测部22以及分析部23，试料检查装置具备X射线源71、对来自X射线源71的X射线被试料6反射后的反射X射线进行检测的反射X射线检测部72、以及对反射X射线的检测结果进行分析的分析部73。进而，试料检查装置具备未图示的光学系统，该光学系统使来自X射线源71的X射线照射至试料6，且在X射线的照射过程中使X射线相对于试料6的入射角度发生变化。X射线源71为X射线管，反射X射线检测部72配置在能够对来自试料 6的反射X射线进行检测的位置。反射X射线检测部72具备对X射线强度进行计数的检测元件，并将表示检测出的反射X射线的强度的电信号输出至分析部73。X射线源71、反射X 射线检测部72以及分析部73对应于本发明中的X射线测定部。
[0069] 分析部73按照X射线的入射角度的不同而对来自反射X射线检测部72的电信号进行分类，获取X射线相对于试料6的入射角度与反射X射线的强度的关系，即，相对于X 射线的入射角度的反射X射线的强度变化。分析部73连接于分析部4，将相对于X射线的入射角度的反射X射线的强度变化输出至分析部4。分析部4进行以下处理，即，执行相对于X射线的入射角度的反射X射线的强度变化的模拟（simulation)，并对从分析部73输入的反射X射线的强度变化的测定结果与模拟结果进行比较，以对模拟参数（parameter)进行最佳化。分析部4通过对模拟参数进行最佳化，从而计算试料6的各层的膜厚、密度以及粗糙度（roughness)。如此，X射线源71、反射X射线检测部72、分析部73以及分析部4通过XRR(X射线反射率法）来进行试料6的分析。试料检查装置的其他的结构与实施方式1 同样，对于对应的部分标注相同符号并省略其说明。
[0070] 实施方式2的试料检查装置在可利用XRR的情况下，可通过XRR来对试料6中的一层的厚度进行计测，在难以利用XRR的情况下，可通过椭圆偏光法来计测层的厚度。如此， 实施方式2的试料检查装置可使用与试料6相应的适当的方法来计测各层的厚度，无须根据试料6的不同来区分使用试料检查装置。而且，与实施方式1同样地，实施方式2的试料检查装置对于多层结构的试料6中所含的多个层，可分别使用与层相应的适当的方法来计测厚度，无须根据成为测定对象的层来区分使用试料检查装置。因而，检查试料6时的工夫变得简便。而且，实施方式2的试料检查装置可通过XRR来对试料6中所含的各层的密度以及粗糙度进行计测。
[0071] 而且，实施方式2的试料检查装置可通过XRR来对试料6中的一层的厚度进行计测，并通过椭圆偏光法来对同一层的折射率等的光学特性进行计测。因而，在实施方式2 中，也能够更高精度地对试料6中所含的各层的折射率等的光学特性和厚度进行计测。而且，实施方式2的试料检查装置通过平行地进行XRR的处理和椭圆偏光法的处理，能够与实施方式1同样地，以短时间来对多层结构的试料6中所含的多个层各自的厚度进行计测。
[0072] 进而，实施方式2的试料检查装置除了 XRR以及椭圆偏光法以外，还能通过拉曼散射光分析来对试料6中的各层计测结晶化度等的结构特性。拉曼散射光分析与XRR可平行地进行，实施方式2的试料检查装置能够与实施方式1同样地，以短时间来对试料6的结晶化度等的结构特性和厚度进行计测。
[0073] 另外，在实施方式2中，表示了不进行荧光X射线分析而进行XRR的形态，但本发明的试料检查装置也可为除了 XRR以外也能进行荧光X射线分析的形态。即，试料检查装置也可为除了图3所示的结构以外，更具备X射线源21、荧光X射线检测部22以及分析部 23的形态。而且，试料检查装置也可为使为了进行XRR而照射至试料6的X射线的X射线源与为了进行荧光X射线分析而照射至试料6的X射线的X射线源共用化的形态。
Claims (7)
1. 一种试料检查装置，其特征在于包括：椭率计部，向试料入射直线偏光，接收来自试料的反射光，对入射光与反射光之间的偏光的变化进行测定；X射线测定部，向试料照射X射线，对来自试料的X射线进行测定；以及分析部，根据所述椭率计部或所述X射线测定部的测定结果，进行用于求出试料的厚度的分析。
2.根据权利要求1所述的试料检查装置，其特征在于， 所述分析部包括：厚度计算部，根据所述X射线测定部的测定结果，计算试料的厚度；以及光学特性计算部，根据所述椭率计部的测定结果以及试料厚度的计算结果，计算试料的光学特性。
3.根据权利要求1所述的试料检查装置，其特征在于还包括入射位置调整部，当试料为多层试料时，调整所述椭率计部使直线偏光入射的位置，以使直线偏光入射至多层试料中的任一层，所述分析部还包括：第1计算部，根据所述椭率计部的测定结果，计算所述椭率计部使直线偏光入射的所述任一层的厚度；以及第2计算部，根据所述X射线测定部的测定结果，计算所述多层试料中的其他层的厚度。
4.根据权利要求2所述的试料检查装置，其特征在于还包括入射位置调整部，当试料为多层试料时，调整所述椭率计部使直线偏光入射的位置，以使直线偏光入射至多层试料中的任一层，所述分析部还包括：第1计算部，根据所述椭率计部的测定结果，计算所述椭率计部使直线偏光入射的所述任一层的厚度；以及第2计算部，根据所述X射线测定部的测定结果，计算所述多层试料中的其他层的厚度。
5.根据权利要求1至4中任一项所述的试料检查装置，其特征在于还包括拉曼散射光测定部，向试料入射单色光，对从试料产生的拉曼散射光进行测定，所述分析部还包括结构特性计算部，根据所述拉曼散射光测定部的测定结果，计算试料的结构特性。
6. 一种试料检查方法，其特征在于，使用具备椭率计部及X射线测定部的试料检查装置， 根据所述X射线测定部的测定结果，计算试料的厚度，并根据所述椭率计部的测定结果以及试料厚度的计算结果，计算试料的光学特性， 所述椭率计部向平板状的试料入射直线偏光，接收来自试料的反射光，对入射光与反射光之间的偏光的变化进行测定，所述X射线测定部向试料照射X射线，并测定来自试料的X射线。
7.根据权利要求6所述的试料检查方法，其特征在于，当试料为多层试料时，利用所述椭率计部来对多层试料中的任意的一层测定入射光与反射光之间的偏光的变化，利用所述X射线测定部来测定来自所述多层试料的X射线，根据所述椭率计部的测定结果，计算所述一层的厚度，根据所述X射线测定部的测定结果，计算所述多层试料中的其他层的厚度。
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104048915A (zh) * | 2014-06-27 | 2014-09-17 | 无锡利弗莫尔仪器有限公司 | 一种光学材料与激光相互作用过程的实时监测装置及方法 |
| CN110160452A (zh) * | 2019-06-19 | 2019-08-23 | 哈尔滨工业大学（威海） | 基于激光拉曼及激光荧光的水面油膜厚度的测量方法 |
| CN111504977A (zh) * | 2020-05-12 | 2020-08-07 | 湖南航天天麓新材料检测有限责任公司 | 测量微丸各组分层厚度的方法及系统 |
| CN112204387A (zh) * | 2018-09-28 | 2021-01-08 | 株式会社理学 | 测量装置、程序及测量装置的控制方法 |
| CN113791098A (zh) * | 2021-11-16 | 2021-12-14 | 四川大学 | 一种大面积多特征射线表面分析装置 |
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| US9689912B2 (en) * | 2012-12-07 | 2017-06-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Rapid analysis of buffer layer thickness for thin film solar cells |
| TWI588446B (zh) * | 2013-03-14 | 2017-06-21 | Tokyo Electron Ltd | X-ray non-destructive inspection device |
| WO2017198764A1 (de) * | 2016-05-20 | 2017-11-23 | Sentech Instruments Gmbh | Vorrichtung und verfahren zur messung von schichtdicken und brechzahlen von schichten auf rauen und glatten oberflächen |
| WO2022061347A1 (en) * | 2020-09-17 | 2022-03-24 | Sigray, Inc. | System and method using x-rays for depth-resolving metrology and analysis |
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| JP2005233928A (ja) * | 2004-01-23 | 2005-09-02 | Horiba Ltd | 基板検査装置 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104048915A (zh) * | 2014-06-27 | 2014-09-17 | 无锡利弗莫尔仪器有限公司 | 一种光学材料与激光相互作用过程的实时监测装置及方法 |
| CN112204387A (zh) * | 2018-09-28 | 2021-01-08 | 株式会社理学 | 测量装置、程序及测量装置的控制方法 |
| US11125704B2 (en) | 2018-09-28 | 2021-09-21 | Rigaku Corporation | Measurement system, program, and measurement system control method |
| CN112204387B (zh) * | 2018-09-28 | 2022-03-15 | 株式会社理学 | 测量装置、计算机可读存储介质及测量装置的控制方法 |
| CN110160452A (zh) * | 2019-06-19 | 2019-08-23 | 哈尔滨工业大学（威海） | 基于激光拉曼及激光荧光的水面油膜厚度的测量方法 |
| CN110160452B (zh) * | 2019-06-19 | 2020-09-01 | 哈尔滨工业大学（威海） | 基于激光拉曼及激光荧光的水面油膜厚度的测量方法 |
| CN111504977A (zh) * | 2020-05-12 | 2020-08-07 | 湖南航天天麓新材料检测有限责任公司 | 测量微丸各组分层厚度的方法及系统 |
| CN113791098A (zh) * | 2021-11-16 | 2021-12-14 | 四川大学 | 一种大面积多特征射线表面分析装置 |
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