CN102399053A - Retaining device and substrate breaking device - Google Patents
Retaining device and substrate breaking device Download PDFInfo
- Publication number
- CN102399053A CN102399053A CN201110215554XA CN201110215554A CN102399053A CN 102399053 A CN102399053 A CN 102399053A CN 201110215554X A CN201110215554X A CN 201110215554XA CN 201110215554 A CN201110215554 A CN 201110215554A CN 102399053 A CN102399053 A CN 102399053A
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- Prior art keywords
- workpiece
- holding unit
- unit
- rod
- noncontact
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention provides a retaining device for keepinging flat-shaped workpieces vertical and a substrate breaking device having the retaining device. The substrate breaking device (1) mainly comprises a conveying unit (50), a non-contact retaining unit (80) and a breaking unit (85). A fixing mechanism (60) of the conveying unit (50) contacts and retains the outer edge part of each workpiece. The non-contact retaining unit (80) retains the main face of each workpiece in a non-contact way. Therefore, even if the contact and retaining on the main face of each workpiece fails, the workpiece can be well retained. The workpiece can be further cut along the marks on a flexible material substrate.
Description
Technical field
The present invention relates to the substrate disconnecting device that a kind of maintenance is the holding device of the flat work that erects posture and has this holding device.
Background technology
In the past, known have a following substrate disconnecting device: the motherboard that will form score (scribe line) with horizontality was fixed, and utilized the switching units up and down that is configured in motherboard, made motherboard break off (for example, patent documentation 1) along score.
[look-ahead technique document]
[patent documentation]
Patent documentation 1: Japanese Patent Laid is opened the 2006-289625 communique
Summary of the invention
[inventing problem to be solved]
As stated, only put down in writing in the patent documentation 1 with horizontality flat work fixed technology, and not to erect posture with any relevant record of this workpiece fixed.As a result, if only adopt the technique for fixing of the workpiece of record in the patent documentation 1, then can produce can't be well with the workpiece fixed problem that erects posture.
Therefore, the objective of the invention is to, a kind of substrate disconnecting device that can keep being the holding device of the flat work that erects posture well and have this holding device is provided.
[technique means of dealing with problems]
In order to address the above problem, technical scheme 1 described invention is a kind of to being the holding device that the flat work that erects posture keeps, and it is characterized in that comprise: holding unit contacts maintenance for the outer edge that is the said workpiece that erects posture; And, the noncontact holding unit, be arranged to said holding unit in opposite directions, carry out the noncontact maintenance for the interarea of said workpiece that contact maintenance by said holding unit; And said noncontact holding unit comprises: erecting bed, be arranged to vertical guide and said holding unit in opposite directions; And a plurality of attraction portion, be arranged on separately on the said vertical guide of said erecting bed, through the said workpiece that erects posture that is that furthers in opposite directions, and keep said workpiece with contactless state.
In addition; Technical scheme 2 described inventions are a kind of substrate disconnecting devices that the brittle substrate that forming score is broken off along said score; It is characterized in that; Comprise: holding unit, contact maintenance through outer edge to the workpiece that comprises said brittle substrate, and with the said workpiece of the state fixed flat planar shape that erects posture; The noncontact holding unit, be arranged to said holding unit in opposite directions, and the interarea that is contacted the said workpiece that keeps by said holding unit carried out noncontact keep; And switching units along said score, breaks off the said brittle substrate that is the state that is kept by said holding unit and said noncontact holding unit; And said noncontact holding unit comprises: erecting bed, be arranged to vertical guide and said holding unit in opposite directions; A plurality of the 1st attraction portions with the state of the length direction both sides of formed slotted hole on said erecting bed, are located on the vertical guide of said erecting bed separately, and keep said workpiece through the said workpiece that furthers in opposite directions with contactless state; And a plurality of the 2nd attraction portions are arranged on the vertical guide of said erecting bed with the state that clips a plurality of the 1st attraction portions from both sides separately, come to keep workpiece with contactless state through the said workpiece that furthers in opposite directions; And; Said a plurality of the 1st attraction portion disposes more intensively than said the 2nd attraction portion; Said switching units comprises: the 1st breaks off rod (break bar), extends in a direction along the said slotted hole of said erecting bed, and advances and retreat with the mode that arrives said holding unit side through said slotted hole; Reach the 2nd and break off rod, clip the said brittle substrate that is kept on the said holding unit, be arranged on the said the 1st and break off the opposition side of rod, and extending with the parallel direction of said the 1st disconnection rod; Break off under the state of excellent bearing of trend and said score almost parallel the said the 1st and the 2nd; The the said the 1st and the 2nd breaks off rod approaches said brittle substrate; Said brittle substrate breaks off rod by the said the 1st and the 2nd and clips; Like this, make and be the said brittle substrate that erects posture and break off along said score.
In addition; According to technical scheme 2 described substrate disconnecting devices, technical scheme 3 described inventions are characterised in that: the 1st interval between the two of the adjacency in said a plurality of the 1st attraction portions is less than the 2nd interval between the two of the adjacency in said a plurality of the 2nd attraction portions.
In addition, according to technical scheme 2 or technical scheme 3 described substrate disconnecting devices, technical scheme 4 described inventions are characterised in that: the said the 1st and the 2nd attraction portion is Bernoulli chuck (Bernoulli Chuck).
[effect of invention]
According to the 4 described inventions of technical scheme 1 to technical scheme, not only can contact maintenance, and noncontact holding unit capable of using comes the interarea of workpiece is carried out the noncontact maintenance to the outer edge of workpiece.Therefore, even if, also can keep workpiece well through using holding unit and noncontact holding unit contacting the position (for example, the interarea of workpiece) beyond the outer edge of workpiece according to the characteristic of workpiece when keeping.
And, according to the 4 described inventions of technical scheme 2 to technical scheme, be arranged near a plurality of the 1st attraction portions of the 1st disconnection rod and dispose more intensively than a plurality of the 2nd attraction portions.Therefore, can break off near the workpiece of rod to the 1st more effectively and carry out the noncontact maintenance.Therefore, can carry out the disconnection of brittle substrate well.
Description of drawings
Fig. 1 is the front view of an example of the formation of the substrate disconnecting device of expression in the embodiment of the present invention.
Fig. 2 is the rear view of an example of the formation of the substrate disconnecting device of expression in the embodiment of the present invention.
Fig. 3 be the expression workpiece formation one the example front view.
Fig. 4 is the side-view of an example of the unitary formation of expression posture changing.
Fig. 5 is the vertical view of an example of the unitary formation of expression posture changing.
Fig. 6 is the front view of an example of the unitary formation of expression conveyance.
Fig. 7 is the rear view of an example of the unitary formation of expression conveyance.
Fig. 8 is the front view of an example of the formation of the movable clamp of expression portion.
Fig. 9 is near the sectional view the observed guiding pawl of the V-V line of Fig. 8.
Figure 10 is near the sectional view the observed guiding pawl of the W-W line of Fig. 7.
Figure 11 is the rear view that is used for explaining that fixed mechanism removes step to the fixing step and the static solution of workpiece.
Figure 12 is the rear view that is used for explaining that fixed mechanism removes step to the fixing step and the static solution of workpiece.
Figure 13 is the rear view that is used for explaining that fixed mechanism removes step to the fixing step and the static solution of workpiece.
Figure 14 is the front view of an example of the formation of expression noncontact holding unit.
Figure 15 be the expression switching units formation one the example vertical view.
[explanation of symbol]
1 substrate disconnecting device
3 workpiece
4 cut ring
The 4b opening
5 cutting blades
7 brittle substrates
8 score
9 electronic components
10 posture changing unit
20 junctions
21 lifting tables
23 (23a～23d) controls pawl
25 (the adsorption sections of 25a～25d)
Cylinder is used in 27 handing-over
30 swing parts
Cylinder is used in 33 swings
35 press sections
37 (37a～37d) pushes and uses cylinder
39 (the rollers of 39a～39d)
40 main unit
42 (the rocking bars of 42a～42c)
43,44 guiding elements
50 conveyance unit
51 stationary platens
The 51a communicating pores
52 universal stages
60 fixed mechanisms
60a, 68a breach
60b jump face
The 60d forward surface
61 clamp portions
The movable clamp of 61a～61c portion
66,73 (the force application component of 73a～73d)
67 (the movable guide of 67a～67c)
68 fixed guide
69 (the guiding of 69a～69d) pawls
71 press sections
72 press press box
75 (the gaps of 75a～75d)
80 noncontact holding units
81 erecting beds
The 81a patchhole
83 the 1st attraction portions
84 the 2nd attraction portions
85 switching units
86 the 1st break off rod
86a the 1st advance and retreat driving part
87 the 2nd break off rod
87a the 2nd advance and retreat driving part
90 control units
D1, D2 be (the 1st and the 2nd at interval) at interval
The P10 delivery position
P11 removes the position
The P12 fixed position
The P20 open position
Embodiment
Below, with reference to graphic embodiment of the present invention is elaborated.
< 1. all constituting >
Fig. 1 and Fig. 2 are respectively the front view and the rear views of an example of the formation of the substrate disconnecting device 1 of expression in the embodiment of the present invention.Fig. 3 be the expression workpiece 3 formation one the example front view.Substrate disconnecting device 1 is to make the brittle substrate 7 (with reference to Fig. 3) that is forming score 8 break off the device of (cut-out) along score 8.
Like Fig. 1 and shown in Figure 2, substrate disconnecting device 1 mainly comprises posture changing unit 10, main unit 40, conveyance unit 50, noncontact holding unit 80, switching units 85, reaches control unit 90.
In addition, among Fig. 1 and each figure afterwards thereof,, suitably mark as required Z-direction as vertical, with the XYZ orthogonal system of coordinates of XY plane as horizontal plane for clear and definite each unitary direction relations.
The posture that posture changing unit 10 makes flat work 3 is in flat-hand position and erect between the posture and change, and will be workpiece 3 handing-over that erect posture and give conveyance unit 50.And posture changing unit 10 is fixed with respect to main unit 40.
, be fixed on the conveyance unit 50 and to break off the workpiece 3 of processing by switching units 85 as shown in Figure 3 here, mainly comprise cut ring 4, cutting blade 5, and brittle substrate 7.
Cut ring 4 (ring body) is the flat board that is formed by metals such as stainless steels.Like Fig. 1 and shown in Figure 2, the outer edge 4a of cut ring 4 mechanism 60 that is fixed clips, and like this, workpiece 3 is fixed on the fixed mechanism 60.
In addition, as shown in Figure 3, near the central authorities of cut ring 4, forming opening 4b.And 4a is being provided with breach 4c in the outer edge of cut ring 4.Through detecting the position of this breach 4c, detect the angle of rotation of workpiece 3.
Cutting blade 5 (lamellar body) is installed on the cut ring 4 with the mode of the opening 4b of covering cut ring 4.And brittle substrate 7 is attached on the cutting blade 5 with the mode that is positioned on the opening 4b.Therefore, erect posture even if workpiece 3 is, also can be effectively fixing brittle substrate 7.In this embodiment,, can use for example resinous adhesion sheet here, as cutting blade 5.
In addition, in this embodiment, for the interarea 3a of workpiece 3 (and cut ring 4, cutting blade 5, and brittle substrate 7), 3b, the face that does not form score 8 is called the 1st interarea 3a, the face that is forming score 8 is called the 2nd interarea 3b.
Like Fig. 1 and shown in Figure 2, main unit 40 as for posture changing unit 10, noncontact holding unit 80, and unit such as switching units 85, and a plurality of rotary actuators (rotary actuator) 41 (41a～41c) carries out the fixed fixed part.
Here, each rotary actuator 41 (41a～41c) make the rotation of axle (shaft) (turning axle: omit graphic) according to compressed-air actuated supply condition.Thus, be installed in rocking bar (lever) 42 on the axle (42a～42c) swing, and compress the clamp portion 61 (pressure section 63 (with reference to Fig. 8) of 61a～61c) of correspondence.In addition, (hardware (hardware) of 61a～61c) constitutes, and is described below about clamp portion 61.
Like this, conveyance unit 50 not only carries out conveyance (conveyance function) to workpiece 3, and the outer edge 4a of the workpiece 3 that comprises brittle substrate 7 is also contacted maintenance, thus, and can be to erect the state fixed flat planar shape workpiece 3 (maintenance function) of posture.That is to say that conveyance unit 50 also can be used as " holding unit ".
In addition, in this embodiment, when conveyance workpiece 3, conveyance unit 50 moves, but posture changing unit 10 and main unit 40 are immobilized.Therefore, in this embodiment, also posture changing unit 10 and main unit 40 are referred to as " fixation side unit ".
As shown in Figure 2, noncontact holding unit 80 be arranged to the conveyance unit 50 that is positioned at open position P20 in opposite directions, and keep the workpiece 3 of outer edge 4a to carry out noncontact for fixed mechanism 60 contacts keeping by conveyance unit 50.
Like this, carry out the noncontact holding unit 80 formation holding devices of " noncontact maintenance " by the conveyance unit 50 (holding unit) that the outer edge 4a that is the flat work 3 that erects posture is carried out " contact keeps " with to the 1st interarea 3a of workpiece 3.
ROM (Read Only Memory, ROS) the 91st, so-called non-volatile memory portion for example stores program 91a.In addition, as ROM91, also can use the non-volatility memorizer that can freely read and write is flash memory (Flash Memory).RAM (Random Access Memory, RAS) the 92nd, volatility memory portion for example stores the data of using in the calculation of CPU93.
CPU (Central Processing Unit; Central processing unit) 93 controls according to the program 91a of ROM91 at the time point (timing) of regulation that (for example, (41a～41c) and a plurality of pushes with cylinder 37 (drive controlling of 37a～37d) etc.) a plurality of rotary actuators 41.
In addition, about posture changing unit 10, conveyance unit 50, noncontact holding unit 80, and the detailed hardware of switching units 85 constitute, be described below.
< the 2. unitary formation of posture changing >
Fig. 4 and Fig. 5 are respectively the side-view and the vertical views of an example of the formation of expression posture changing unit 10.Here, action, and the action of giving conveyance unit 50 with workpiece 3 handing-over of the posture of change workpiece 3 are carried out as stated in posture changing unit 10.
Like Fig. 4 and shown in Figure 5, posture changing unit 10 mainly comprises a plurality of support portions 11 (11a～11d), a plurality of location hand 13 (13a～13d), junction 20, swing part 30 and press section 35.
(11a～11d) supports the workpiece 3 by 10 handing-over of posture changing unit in a plurality of (in this embodiment being 4) support portion 11.Like Fig. 4 and shown in Figure 5, (11a～11d) is fixed on the position and the position for the lifting table 21 that can not interfere with junction 20 of outer edge 4a of cut ring 4 that can supporting workpiece 3 in each support portion 11.
And, like Fig. 4 and shown in Figure 5, each support portion 11 (top of 11a～11d) have be arranged to can free rolling ball 12 (12a～12d).Thus, each ball 12 (but point type ground supporting workpiece 3 of 12a～12d) and rotating.Therefore, (position of the workpiece 3 of 11a～11d) supported can be easily and change neatly in each support portion 11.
Here, (workpiece 3 of 11a～11d) supported can for example never illustrated conveyance robot (robot) handing-over be given posture changing unit 10 in a plurality of support portions 11.And, the operating personnel of substrate disconnecting device 1 (below, also abbreviate " operating personnel " as) also can workpiece be put on a plurality of support portions 11 in 3 years.
Like Fig. 4 and shown in Figure 5, (13a～13d) is adjacent to the corresponding pawl 23 (23a～23d) be provided with that controls to the location hand 13 of a plurality of (in this embodiment being 4).Each locate hand 13 (13a～13d) be by means of be arranged on the base portion 20a travel mechanism's (omitting graphic) and along the support arm (arm) 26 of correspondence (the length direction advance and retreat of 26a～26d).Thus, each is located hand 13 ((position of the workpiece 3 of 11a～11d) supported is in the mode in the desired extent, with outer edge 4a 21a pushing towards the center of lifting table 21 of workpiece 3 (more specifically being cutting blade 5) with each support portion 11 for 13a～13d).
Workpiece confirms transmitter 15 detects on a plurality of support portions 11 whether supporting workpiece 3.As shown in Figure 5, workpiece confirms that transmitter 15 is fixed on the position of the lifting table 21 that is adjacent to support portion 11b and can interfere with junction 20.Confirm transmitter 15 as workpiece, also can use and for example detect the proximity sense that has or not workpiece 3 non-contactly.
Junction 20 is flat-hand position, keeps the workpiece 3 that is supported by a plurality of support portions 11.And junction 20 is between itself and conveyance unit 50, to be the workpiece 3 that erects posture for the effect that receives swing part 30 to join.Like Fig. 4 and shown in Figure 5, junction 20 mainly comprises lifting table 21, a plurality ofly controls pawl 23 ((25a～25d) and handing-over are with cylinder 28 for 23a～23d), a plurality of adsorption section 25.
As shown in Figure 5, lifting table 21 have from center 21a to foreign side with a plurality of (this embodiment being 4) support arm 26 of radial extension (26a～26d).Lifting table 21 can prevent by controlling workpiece 3 distortion that pawl 23 and adsorption section 25 are kept.
A plurality of (in this embodiment being 4) are controlled pawl 23, and (23a～23d) (a plurality of handle part) is being held in flat-hand position and erecting the outer edge 4a of the workpiece 3 (more specifically being cut ring 4) that carries out posture changing between the posture.Like Fig. 4 and shown in Figure 5, (23a～23d) is arranged on corresponding support arm 26, and (top 27 of 26a～26d) is (near the 27a～27d) respectively to control pawl 23.
Here, as shown in Figure 4, each is located hand 13 and (is divided near (in graphic, being merely the upper end of location hand 13b) two portions near the upper end of 13a～13d).Therefore, (13a～13d) advances and retreat in order to make workpiece 3 location, and each locatees hand 13, and (13a～13d) yet can not control pawl 23 ((25a～25d) forms and disturbs for 23a～23d) and adsorption section 25 with corresponding even if respectively locate hand 13.
In addition, respectively locate hand 13 (13a～13d) is so that the position of workpiece 3 is in mode in the desired extent when positioning, and workpiece 3 is respectively controlled pawl 23 (23a～23d) center on when utilizing.
A plurality of (in this embodiment being 4) adsorption section 25 (25a～25d) corresponding to respectively controlling pawl 23 (23a～23d) be provided with, and the outer edge 4a of absorption workpiece 3 (more specifically being cut ring 4).
Therefore, (after 13a～13d) positioned, (the absorption workpiece 3 of 25a～25d), thus, (workpiece 3 of 11a～11d) supported was handed off to junction 20 to a plurality of location hand 13 by a plurality of support portions 11 by a plurality of adsorption sections 25.
((25a～25d) controls and adsorbs cut ring 4 for 23a～23d) and each adsorption section 25 like this, respectively to control pawl 23.That is to say that brittle substrate 7 also can't help respectively to control pawl 23 (23a～23d) and each adsorption section 25 (25a～25d) control and adsorbing.Therefore, junction 20 and swing part 30 can keep and posture changing workpiece 3, and can not have influence on formed score 8 (with reference to Fig. 3) on the brittle substrate 7.
When being the workpiece 3 that erects posture and between junction 20 and conveyance unit 50, joining, handing-over makes workpiece 3 mobile between junction 20 and conveyance unit 50 with cylinder 28.As shown in Figure 4, handing-over has main part 28a and barred body (rod) 29 with cylinder 28.
Barred body 29 can be advanced and retreat with respect to main part 28a.As shown in Figure 4, the top of barred body 29 is fixed on the bottom surface of lifting table 21.Therefore, be fixed on being on the lifting table 21 erect the workpiece 3 of posture can advancing or backward movement and mobile between junction 20 and conveyance unit 50 according to barred body 29.
Swing part 30 is that the center makes junction 20 swing with swing axle 31, and thus, the posture that makes the workpiece 3 that junction 20 kept is in flat-hand position and erect between the posture and change.Like Fig. 4 and shown in Figure 5, swing part 30 mainly has swing axle 31, swing frame 32, reaches swing with cylinder 33.
Swing axle 31 is as the hub that junction 20 is swung with respect to base portion 20a.As shown in Figure 5, rotatably support (pivot and support) by bearing 30a, 30b.And bearing 30a, 30b are fixed on each self-corresponding carriage (bracket) 30c, 30d is last.
Swing frame 32 is the frameworks that formed by a plurality of (being 3) plate body 32a～32c in this embodiment.As shown in Figure 5, between plate body 32a, 32c, fixing swing axle 31.On the other hand, the handing-over of fixing junction 20 on the plate body 32b is with cylinder 28.
Swing is the driving parts that make junction 20 swings with cylinder 33.As shown in Figure 4, swing mainly has main part 33a and barred body 34 with cylinder 33.
Barred body 34 can be advanced and retreat with respect to main part 33a.Like Fig. 4 and shown in Figure 5, main part 33a is fixed on the base portion 20a of junction 20, and the top 34a of barred body 34 is fixed on the plate body 32a of swing frame 32.
Therefore, when barred body 34 when main part 33a advances, change to from flat-hand position by the posture of controlling the workpiece 3 that pawl 23 and adsorption section 25 kept and to erect posture.On the other hand, when barred body 34 when main part 33a retreats, be flat-hand position by the posture of controlling the workpiece 3 that pawl 23 and adsorption section 25 kept from erecting posture changing.
Press section 35 is adjusted for the load that 60 pairs of workpiece 3 of fixed mechanism of conveyance unit 50 apply.Thus, carry out following action by fixed mechanism 60: will be from the junction 20 be handed off to conveyance unit 50 the action of workpiece 3 fixed, and remove the action of the stationary state of workpiece 3.
Like Fig. 4 and shown in Figure 5, press section 35 mainly comprises installing frame 35a, a plurality of carriage 36 (36a～36d), and a plurality of pushing with cylinder 37 (37a～37d).
(36a～36d) is used for pushing with a plurality of that (37a～37d) is fixed on posture changing unit 10 with cylinder 37 for installing frame 35a and a plurality of carriage 36.Like Fig. 2 and shown in Figure 4, installing frame 35a is frame shaped, and is fixed on base portion 20a.And as shown in Figure 2, (36a～36d) is the mounting plate that the stringer board from installing frame 35a extends along the conveyance direction (arrow A R1 direction) of conveyance unit 50 to a plurality of (in this embodiment being 4) carriage 36.
A plurality ofly push that (37a～37d) compresses for the force application component 73 (73a～73dl is with reference to Fig. 7) of correspondence separately with cylinder 37.Like Fig. 4 and shown in Figure 5, push respectively that (37a～37d) mainly comprises a plurality of barred bodies 38 (38a～38d) and a plurality of roller 39 (39a～39d) with cylinder 37.
A plurality of (in this embodiment being 4) barred body 38 (38a～38d) can advance and retreat along arrow A R2 direction separately.And (top of 38a～38d) is installed with corresponding roller 39 (39a～39d) at each barred body 38.
Therefore, (38a～when 38d) advancing, each force application component 73 (73a～73d is with reference to Fig. 7) compress the roller 39 (39a～39d) of correspondence when each barred body 38.Thus, each force application component 73 (73a～73d) be compressed.
On the other hand, as each barred body 38 (38a～when 38d) retreating, each force application component 73 (73a～73d is with reference to Fig. 7) and corresponding roller 39 (39a～39d) separate.Thus, (compressed state of 73a～73d) is disengaged each force application component 73.
(39a～39d) is arranged on corresponding barred body 38 (the vertical rotator of 38a～38d) to a plurality of (in this embodiment being 4) roller 39 separately.As shown in Figure 5, each roller 39 (39a～39d) can with along vertical (with the direction of Z axle almost parallel: with the direction of arrow A R1 direction approximate vertical) turning axle that extends is that the center rotates.
Therefore, each roller 39 (39a～39d) compress correspondence force application component 73 (under the state of 73a～73d), when conveyance unit 50 when conveyance direction (arrow A R1 direction) moves, (39a～39d) carries out following action to each roller 39.Said action does, each roller 39 for the force application component 73 of correspondence (73a～73d) compress, and along the conveyance direction (73a～73d) goes up rotation at the force application component 73 of correspondence.Therefore, each roller 39 (compressed state due to the 39a～39d) and move along the conveyance direction can be kept in conveyance unit 50.As a result, even if when moving with respect to posture changing unit 10 and main unit 40 (fixation side unit), also can make workpiece 3 keep fixedly disarm state in conveyance unit 50.
< the 3. unitary formation of conveyance >
Fig. 6 and Fig. 7 are the front view and the rear views of an example of the formation of expression conveyance unit 50.Fig. 8 is the movable clamp of the expression portion 61 (front view of an example of the formation of 61a～61c).Fig. 9 is near the sectional view the viewed guiding pawl 69 of the V-V line of Fig. 8 (69a).Figure 10 is near the sectional view the viewed guiding pawl 69 of the W-W line of Fig. 7 (69d).
Here, conveyance unit 50 contact keeps the outer edge 4a of workpiece 3, and the delivery position P10 that gives and accepts that carries out workpiece 3, with the open position P20 that makes brittle substrate 7 disconnections by switching units 85 between conveyance be the workpiece 3 that erects posture.
Thus, can suppress to comprise the conveyance path and area (that is to say the moving area size of conveyance unit 50) is set in interior conveyance unit 50.Therefore, can reduce the size of substrate disconnecting device 1.
Like Fig. 6 and shown in Figure 7, conveyance unit 50 mainly comprises stationary platen 51 and universal stage 52.Here, the conveyance unit 50 in this embodiment is arranged to, for example can be by not shown linear motor (Linear Motor) and with respect to posture changing unit 10, main unit 40, and noncontact holding unit 80 etc. move.
As shown in Figure 6, a plurality of (in this embodiment being 6) guide block 55 is arranged on the positive 51b of stationary platen 51.And, in the inside of each guide block 55, be provided with rotatable a plurality of ball (omitting graphic).And when each guide block 55 is installed in corresponding 43,44 last times of guiding element, the balls (omitting graphic) in each guide block 55 contact with corresponding guiding element 43,44 with rotatable state.
Thus, if each guide block 55 is mobile along the guiding element 43,44 (that is to say, along conveyance direction (arrow A R1 direction)) of correspondence, then the balls (omitting graphic) in each guide block 55 rotate on the guiding element 43,44 of correspondence.Therefore, stationary platen 51 can successfully be advanced along guiding element 43,44.
Tension adjustment is adjusted with 59 pairs of tension force that are applied on the belt 57 of pulley.In this embodiment, tension adjustment is to be adjusted by not shown orientation mechanism with the position (for example, the position on the Z-direction) of pulley 59.Thus, eliminate the lax of belt 57 easily, and adjust the tension force of belt 57 easily.Therefore, can make universal stage 52 keep good slew rope.
< formation of 3.1. fixed mechanism >
Fixed mechanism 60 is fixed on flat work 3 and erects posture.Like Fig. 6 and shown in Figure 7, fixed mechanism 60 mainly comprises (the 61a～61c), 62 and a plurality of press section 71 of a plurality of clamp portion 61.
(61a～61c), 62 clips the outer edge 4a that is configured in the workpiece 3 between these clamp portions and the press section 71 in a plurality of clamp portion 61.As shown in Figure 7, (61a～61c), 62 is separately along establishing by press box 72 in a plurality of clamp portion 61.
In addition, in the following explanation, (the clamp portion of 61a～61c) is called " movable clamp portion ", the clamp portion that has marked symbol 62 is called " fixedly clamp portion " will to have marked symbol 61.
That is to say that a plurality of clamp portion comprises a plurality of movable clamp portion 61 (61a～61c) and fixing clamp portion 62.In other words, the part in a plurality of clamp portion is the (61a～61c), and remaining part is fixing clamp portion 62 of a plurality of movable clamp portion 61.
A plurality of (in this embodiment being 3) movable clamp portion 61 (61a～61c) separately to press press box 72 near or isolating direction advance and retreat.Like Fig. 7 and shown in Figure 8, (61a～61c) mainly comprises pressure section 63, rolling plate 64, force application component 66, movable guide 67 (67a～67c), and guiding pawl 69 (69a～69c) in each movable clamp portion 61.
Here, the movable 61a～61c of clamp portion has identical hardware formation.Therefore, below, only the hardware formation to the movable clamp 61a of portion describes.
Connecting rod 65 is the narrower plate bodys of width that link rolling plate 64 and movable guide 67 (67a).One end of connecting rod 65 links with rolling plate 64 interlocks by axis of rolling 65a, and the other end of connecting rod 65 links with movable guide 67 (67a) interlock by axis of rolling 65b.
Force application component 66 is to be formed by elastic components such as springs.As shown in Figure 8, an end 66a of force application component 66 is fixed on the rolling plate 64 of movable side, and the other end 66b of force application component 66 is fixed on the stiffening plate 64b of fixation side.Thus, if rolling plate 64 rolls to arrow R1 direction, then 66 pairs of rolling plates 64 of force application component are to the direction application of force in the opposite direction with arrow R1.
Movable guide 67 (67a) is flat movable link.Movable guide 67 is adjusted the stationary state of workpiece 3 thus to advancing and retreat near perhaps isolating direction with pressing press box 72.
That is to say, utilize rotary actuator 41 (41a) to make rocking bar 42 (42a) swing, if rolling plate 64 rolls to arrow R1 direction, then movable guide 67 (67a) to move by press box 72 isolating directions.Thus, movable guide 67 (67a) becomes the clamp disarm state.
On the other hand; Utilize rotary actuator 41 (41a) to make the position before rocking bar 42 (42a) turns back to swing; If utilize the application of force of force application component 66 to make rolling plate 64 to rolling with arrow R1 direction in the opposite direction, then movable guide 67 (67a) to by press box 72 near direction move.Thus, movable guide 67 (67a) becomes it and by can be with the state of workpiece 3 clamps between the press box 72.
Like this; Be located at a plurality of rotary actuators 41 in the main unit 40 (41a～41c) as driving part (the 1st driving part), make a plurality of clamp portion 61 (part among the 61a～61c), 62 (and a plurality of movable clamp 61a of portion～61c) to press press box 72 near or isolating direction advance and retreat.
As shown in Figure 8, breach 60a is formed in the depression by press box 72 sides of movable guide 67.Here, when workpiece 3 joins between the junction 20 of posture changing unit 10 and conveyance unit 50, control pawl 23 (23a) configurable in the formed space of breach 60a (for example, gap 75 (75a)) (with reference to Fig. 8, and Figure 11 to Figure 13).Therefore, when handing-over workpiece 3, can effectively prevent to control pawl 23 (23a) and produce interference with movable guide 67 (67a).
A plurality of (in this embodiment being 2) guiding pawl 69 (69a) is with movable guide 67 (67a) and unite by press box 72 and to clamp workpiece 3.As shown in Figure 8, guiding pawl 69 (69a) with along in opposite directions by the direction of the skeletal lines of press box 72 on isolating mode be installed on the movable guide 67 (67a).And, as shown in Figure 9, with the more mode of below that the jump face 60b of guiding pawl 69 (69a) is positioned at the lower surface 60c of movable guide 67 (67a), will guide pawl 69 (69a) and be installed on the movable guide 67 (67a).
Therefore, as shown in Figure 9, the jump face 60b of the lower surface 60c through making movable guide 67 (67a), guiding pawl 69 (69a), and the forward surface 60d that presses press box 72 contact with workpiece 3, workpiece 3 is clamped in movable clamp 61 (61a) of portion capable of using and press section 71.
As shown in Figure 7, fixedly clamp portion 62 is fixed on by near the press box 72.As shown in Figure 7, fixedly clamp portion 62 mainly comprises fixed guide 68 and guiding pawl 69 (69d).
Fixed guide 68 is flat stationary members.That is to say, with movable guide 67 (67a～67c) different, fixed guide 68 not with by press box 72 near or isolating direction on advance and retreat but be fixed on the universal stage 52.
Thus, can be benchmark with the fixing position of clamp portion 62, workpiece 3 is located with respect to fixed mechanism 60.Therefore, (61a～61c), and fixing clamp portion 62 can carry out the clamp and the clamp releasing of workpiece 3 well through using a plurality of movable clamp portion 61.
As shown in Figure 7, breach 68a is formed in the depression by press box 72 sides of fixed guide 68.Here, when workpiece 3 joins between the junction 20 of posture changing unit 10 and conveyance unit 50, control pawl 23 (23d) configurable in the formed space of breach 68a (for example, gap 75 (75d)) (with reference to Fig. 7, and Figure 11 to Figure 13).Therefore, when handing-over workpiece 3, can effectively prevent to control pawl 23 (23d) and produce interference with fixed guide 68.
A plurality of (in this embodiment being 2) guiding pawl 69 (69d) is united with fixed guide 68 and by press box 72 and is clamped workpiece 3.As shown in Figure 7, guiding pawl 69 (69d) with along in opposite directions by the direction of the skeletal lines of press box 72 on isolating mode be installed on the fixed guide 68.And, shown in figure 10, with the jump face 60b of guiding pawl 69 (69d) than the side end face 68b of fixed guide 68 more near the mode of pressing press box 72 sides, will guide pawl 69 (69d) and be installed on the fixed guide 68.
Therefore, as shown in Figure 9, the jump face 60b of the side end face 68b through making fixed guide 68, guiding pawl 69 (69d), and the forward surface 60d that presses press box 72 contact with workpiece 3, workpiece 3 is clamped in fixedly clamp portion 62 capable of using and press section 71.
(61a～61c) and fixedly clip workpiece 3 between the clamp portion 62 pushes the outer edge 4a of workpiece 3 thus for press section 71 and movable clamp portion 61.As shown in Figure 7, press section 71 mainly comprises by press box 72, and a plurality of force application components 73 (73a～73d).
Like Fig. 6 and shown in Figure 7,, and be installed near the central authorities of universal stage 52 by press box 72 (more specifically being rectangular ring) in the form of a ring.Like Fig. 9 and shown in Figure 10, push the outer edge 4a of workpiece 3 from the 2nd interarea 3b side of workpiece 3 by press box 72.
A plurality of (in this embodiment being 4) force application component 73 (73a～73d) form by elastic components such as springs.As shown in Figure 7, (the corresponding turning binding in 73a～73d) and 4 bights of press press box 72 of each force application component 73.
Here; If each force application component 73 (73a～73d) receive self-corresponding push with cylinder 37 (37a～37d), (that is to say from the direction of surface towards the back side of the paper of Fig. 7; The contrary direction of arrow A R2 direction と) power (with reference to Fig. 4 and Fig. 5) on, then each force application component 73 (73a～73d) be compressed.That is to say, press section 35 push that (37a～37d) is as (73a～73d) applies the driving part (the 2nd driving part) of force of compression to the force application component 73 of correspondence with cylinder 37.
On the other hand, (38a～38d) retreat makes roller 39 (39a～39d) and force application component 73 accordingly (73a～73d) separate, then each force application component 73 (73a～73d) to the application of force that applies by press box 72 on the arrow A R2 direction (application of force direction) if barred body 38.
Thus, workpiece 3 because of receive from each force application component 73 (application of force of 73a～73d), and by movable clamp portion 61 (61a～61c), fixedly clamp portion 62, reach and clamp by press box 72.As a result, workpiece 3 is fixed on the fixed mechanism 60.
What like this, the stationary state of the workpiece 3 on the fixed mechanism 60 can be by posture changing unit 10 pushes that ((41a～41c) (the 1st driving part) adjusts the rotary actuator 41 of 37a～37d) (the 2nd driving part) and main unit 40 with cylinder 37.
That is to say, can pushing as the workpiece 3 of conveyance object by the fixed mechanism 60 of conveyance unit 50, posture changing unit 10 with cylinder 37 (37a～37d), and the rotary actuator 41 (41a～41c) fix of main unit 40.
Therefore, in this embodiment, also can with posture changing unit 10, main unit 40, and conveyance unit 50 be referred to as " conveyer ".
< fixing means of 3.2. workpiece >
Figure 11 to Figure 13 is used for explaining the fixing step of 60 pairs of workpiece 3 of fixed mechanism and the rear view that static solution removes step.Here, describe for being the step that the workpiece 3 that erects posture is fixed on the fixed mechanism 60.
In addition, this fixing step is controlled by means of the action of each contained in 90 pairs of posture changing unit 10 of control unit, main unit 40, the conveyance unit 50 key element and is realized.
In addition, before formal fixing step began, conveyance unit 50 moved to the releasing position P11 (with reference to Fig. 2) of delivery position P10, and workpiece 3 is by each adsorption section 25 (25a～25d) absorption and maintenance.
In formal fixing step, at first, utilize swing part 30 to make junction 20 move (swing).Thus, the workpiece 3 that kept of junction 20 is and erects posture and move near the fixed mechanism 60 of conveyance unit 50.
Then, make a plurality of rotary actuators 41 set in the main unit 40 (41a～41c) (with reference to Fig. 2) running, and make each rocking bar 42 (42a～42c) swing.Thus, make each movable clamp portion 61 (movable guide 67 of 61a～61c) (and 67a～67c) to move by press box 72 isolating directions.
Then, make and a plurality ofly push that (running of 37a～37d) makes each barred body 38 (38a～38d) advance from cylinder main body with cylinder 37.Thus, each force application component 73 (73a～73d) by corresponding roller 39 (39a～39d) compression, by press box 72 to (the opposite direction of application of force direction (arrow A R2 direction) of 73a～73d) moves with each force application component 73.
Then, make conveyance unit 50 move to fixed position P12 (with reference to Fig. 1 and Fig. 2) from the releasing position P11 of delivery position P10.Thus, respectively push with cylinder 37 (the vertical roller 39 of 37a～37d) (and 39a～39d) to corresponding force application component 73 (73a～73d) compress, and at force application component 73 (73a～73d) goes up rotation.Therefore, conveyance unit 50 moves along the conveyance direction under making by press box 72 and workpiece 3 isolating states.And, pressing under press box 72 and the isolating state of workpiece 3, the outer edge 4a of workpiece 3 compresses the side end face 68b (Figure 10) of fixed guide 68.
Then, compress at the outer edge of workpiece 3 4a under the state of side end face 68b (Figure 10) of fixed guide 68, (41a～41c) running, (42a～42c) turns back to the position before the swing to make corresponding rocking bar 42 to make rotary actuator 41.
Thus, each movable clamp portion 61 (movable guide 67 of 61a～61c) (and 67a～67c) to by press box 72 near direction move.Therefore, the outer edge 4a of workpiece 3 compresses each movable guide 67 (67a～67c).
Then, each movable clamp portion 61 (61a～61c) and fixedly clamp portion 62 compress under the state of outer edge 4a of workpiece 3, push respectively that (37a～37d) turn round makes each barred body 38 (38a～38d) retreat with cylinder 37.
Thus, do not receive and push respectively that (37a～37d) imposes on corresponding force application component 73, and (force of compression of 73a～73d) moves by the application of force direction of press box 72 to each force application component 73 with cylinder 37.And like Fig. 9 and shown in Figure 10, (67a～67c) and the jump face 60b of fixed guide 68 are shorter with the distance of the forward surface 60d that presses press box 72 for movable guide 67.
Therefore, workpiece 3 be clipped in movable clamp portion 61 (61a～61c) and fixedly clamp portion 62, and press section 71 between, be the workpiece 3 that erects posture and fix by fixed mechanism 60.That is to say,, can be fixed on well on the fixed mechanism 60 being the workpiece 3 that erects posture according to formal fixing step.
Then, workpiece 3 by fixed mechanism 60 fixed states under, (25a～25d) removes adsorbed state in each adsorption section 25.Thus, the maintaining condition of the 20 pairs of workpiece 3 in junction is disengaged, and the fixing step of workpiece 3 finishes.
< the static solution eliminating method of 3.3. workpiece >
Here, with reference to Figure 11 to Figure 13,, describe for the step of the stationary state of removing this workpiece 3 to the workpiece 3 that utilizes fixed mechanism 60 to be fixed as to erect posture.
In addition, it is identical with the fixing step of workpiece 3 that this removes step, controls by means of the action of each contained in 90 pairs of posture changing unit 10 of control unit, main unit 40, the conveyance unit 50 key element and realize.
And before the formal releasing step of beginning, conveyance unit 50 moves to the fixed position P12 (with reference to Fig. 2) of delivery position P10, and workpiece 3 is fixing by fixed mechanism 60.
In the formal releasing step, at first, by fixed mechanism 60 fixed workpiece 3 by the (absorption of 25a～25d) of each adsorption section 25.Thus, workpiece 3 is kept by junction 20 under the state that is fixed on the fixed mechanism 60.
Then, a plurality of movable clamp portion 61 (61a～61c) and fixedly clamp portion 62 compress under the state of outer edge 4a of workpiece 3, a plurality ofly push that (37a～37d) (the 2nd driving part) turns round each barred body 38 (38a～38d) advance from cylinder main body with cylinder 37.
Thus, each force application component 73 (73a～73d) by corresponding roller 39 (39a～39d) compression, by press box 72 to (the opposite direction of application of force direction (arrow A R2 direction) of 73a～73d) moves with each force application component 73.And like Fig. 9 and shown in Figure 10, (67a～67c) and the jump face 60b of fixed guide 68 are bigger with the distance of the forward surface 60d that presses press box 72 for movable guide 67.Therefore, 60 pairs of fixed mechanisms are fixedly being disengaged of the workpiece 3 that erects posture, and workpiece 3 is by each adsorption section 25 of junction 20 (absorption of 25a～25d) and keeping.
Like this, press section 35 pushes respectively that (37a～37d) (73a～73d) compress thus, can remove the stationary state of workpiece 3 to corresponding force application component 73 with cylinder 37.
Then, a plurality of movable clamp portion 61 (61a～61c) and fixedly clamp portion 62 compress under the state of outer edge 4a of workpiece 3, (41a～41c) (the 1st driving part) running makes each rocking bar 42 (42a～42c) swing to make a plurality of rotary actuators 41.Thus, each movable clamp portion 61 (movable guide 67 of 61a～61c) (and 67a～67c) to move by press box 72 isolating directions.
Then, conveyance unit 50 moves to releasing position P11 (with reference to Fig. 1 and Fig. 2) from the fixed position P12 of delivery position P10.Thus, respectively push with cylinder 37 (the vertical roller 39 of 37a～37d) (and 39a～39d) to corresponding force application component 73 (73a～73d) compress, and at force application component 73 (73a～73d) goes up rotation.Therefore, conveyance unit 50 moves along the conveyance direction under making by press box 72 and workpiece 3 isolating states.And, pressing under press box 72 and the isolating state of workpiece 3, the outer edge 4a of workpiece 3 separates with the side end face 68b (Figure 10) of fixed guide 68.Like this, according to formal releasing step, can remove the stationary state of the workpiece 3 that is fixed on the fixed mechanism 60 well.
Then, utilize swing part 30 to make junction 20 move (swing), like this, the workpiece 3 that junction 20 is kept separates with the fixed mechanism 60 of conveyance unit 50.And, when workpiece 3 and fixed mechanism 60 after separatings, make and a plurality ofly push that ((38a～38d) retreat thus, press press box 72 and moves to application of force direction (arrow A R2 direction) barred body 38 of 37a～37d), and the static solution of workpiece 3 is except that the step end with cylinder 37.
< the 4. formation of noncontact holding unit >
Figure 14 is the front view of an example of the formation of expression noncontact holding unit 80.Here, noncontact holding unit 80 carries out the noncontact maintenance for the 1st interarea 3a that contacts the workpiece 3 that keeps by conveyance unit 50 in this way complementaryly.Shown in figure 14, noncontact holding unit 80 mainly comprises erecting bed 81, a plurality of the 1st attraction portion 83, and a plurality of the 2nd attraction portions 84.
In this embodiment, also can " the 2nd attraction portion 84 " shown in " the 1st attraction portion " and the symbol 84 shown in the symbol 83 be referred to as " attraction portion " here.That is to say that a plurality of attraction portion comprises a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portions 84.
Erecting bed 81 be arranged to and advance to till the open position P20 conveyance unit 50 in opposite directions.As shown in Figure 2, erecting bed 81 is fixed on the main unit 40.And like Fig. 1 and shown in Figure 14, the vertical guide 81a of erecting bed 81 is as the mounting face that a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portions 84 are installed.
Like Fig. 1 and shown in Figure 14, a plurality of attraction portions (a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portion 84) are arranged on the vertical guide 81a of erecting bed 81.The 1st interarea 3a that is the workpiece 3 that erects posture in opposite directions that furthers of a plurality of attraction portion, thus, workpiece 3 is held with contactless state.In this embodiment,, also can use Bernoulli chuck here, as a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portion 84.
Shown in figure 14, the 1st attraction portion 83 of a plurality of (in this embodiment being 12) is arranged on the vertical guide 81a of erecting bed 81 with the state of the length direction both sides of formed patchhole 81b on erecting bed 81.Each the 1st attraction portion 83 is made up of for example Bernoulli chuck.Thus, each the 1st attraction portion 83 workpiece 3 in opposite directions that furthers thus, can keep workpiece 3 with contactless state.
Shown in figure 14, the 2nd attraction portion 84 of a plurality of (in this embodiment being 12) is arranged on the vertical guide 81a of erecting bed 81 with the state that clips a plurality of the 1st attraction portions 83 from both sides.Identical with the 1st attraction portion 83, each the 2nd attraction portion 84 is made up of for example Bernoulli chuck.Thus, identical with the 1st attraction portion 83, each the 2nd attraction portion 84 workpiece 3 in opposite directions that furthers thus, can keep workpiece 3 with contactless state.
Here, shown in figure 14, the diameter of each the 1st attraction portion 83 is less than the diameter of each the 2nd attraction portion 84.And shown in figure 14, the interval D between the two 1 of the adjacency in a plurality of the 1st attraction portions 83 (the 1st at interval) is less than the interval D between the two 2 (the 2nd at interval) of the adjacency in a plurality of the 2nd attraction portions 84.
Like this, a plurality of the 1st attraction portion 83 disposes more intensively than a plurality of the 2nd attraction portions 84.Thus, can carry out noncontact near the workpiece the patchhole 81b 3 (near the workpiece 3 the 1st disconnection rod 86 in other words) more effectively keeps.Therefore, brittle substrate 7 is broken off.
< the 5. formation of switching units >
Figure 15 be the expression switching units 85 formation one the example vertical view.Here, switching units 85 makes and is by conveyance unit 50 and noncontact holding unit 80 and the brittle substrate 7 of the state that keeps breaks off along score 8.Shown in figure 15, switching units 85 mainly comprises the 1st and breaks off rod 86 and a plurality of the 2nd disconnection rods 87.
The 1st breaks off rod 86 advances and retreat with the mode that arrives conveyance unit 50 sides through patchhole 81b.Like Figure 14 and shown in Figure 15, the 1st breaks off rod 86 along the patchhole 81b of erecting bed 81 and (length direction of patchhole 81b: Z-direction) (below, also abbreviate " bearing of trend " as) extends in a direction.
The 2nd disconnection rod 87 of a plurality of (in this embodiment being 2) clips the workpiece 3 that is kept by conveyance unit 50, is arranged on the 1st and breaks off excellent 86 opposition side.Each the 2nd disconnection rod 87 is along extending with the 1st disconnection rod 86 parallel directions (Z-direction).
Here, shown in figure 15, a plurality of the 2nd on the conveyance direction (arrow A R1 direction) broken off rod 87 and only disposed across desired distance D3.And shown in figure 15, the 2nd disconnection rod the 87, the 1st breaks off rod 86, reaches the 2nd disconnection rod 87 along disposing in regular turn towards the direction (Y axle negative direction) of open position P20 from delivery position P10.
And the 1st breaks off the 1st interarea 3a side (at this moment, 1st break off rod 86 compresses cutting blade 5) of rod 86 from the opposition side of the 2nd interarea 3b that forming score 8, applies load along score 8.
That is to say that load is that the 1st interarea 3a from the opposition side of the 2nd interarea 3b that is forming score 8 imposes on score 8.Therefore, can be well and brittle substrate 7 is broken off along score 8.
The 1st advance and retreat driving part 86a breaks off rod 86 to the 1st and applies motivating force, thus, makes the 1st to break off rod 86 in advance and retreat directions (arrow A R6 direction: with reference to Figure 15) advance and retreat.For example, the 1st break off rod 86 the state of bearing of trend and score 8 almost parallels under, the 1st advance and retreat driving part 86a makes the 1st to break off rod 86 and move to X axle negative direction, thus, make the 1st break off excellent 86 approach brittle substrate 7 the 1st interarea 3a.
The 2nd advance and retreat driving part 87a breaks off rod 87 to a plurality of the 2nd and applies motivating force, thus, makes a plurality of the 2nd to break off rod 87 in advance and retreat directions (arrow A R6 direction: with reference to Figure 15) advance and retreat.For example; Break off under the state of bearing of trend and score 8 almost parallels of rod 87 a plurality of the 2nd; The 2nd advance and retreat driving part 87a makes a plurality of the 2nd to break off rod 87 and move to X axle positive dirction, thus, makes a plurality of the 2nd to break off the 2nd interarea 3b that rod 87 approaches brittle substrate 7.
As stated, as if utilizing the 1st and the 2nd advance and retreat driving part 86a, 87a to make the 1st and the 2nd to break off rod 86,87 advance and retreat, then brittle substrate 7 is clamped by these the 1st and the 2nd disconnection rods 86,87.As a result, make and be the brittle substrate 7 that erects posture and break off along score 8.
That is to say, in the disconnection that utilizes substrate disconnecting device 1 to carry out is handled, the 1st and the 2nd break off direction (advance and retreat direction (arrow A R6 direction)) that rod 86,87 approaches brittle substrate 7 all with gravity direction (Z axle negative direction) approximate vertical.
Thus, gravity is identical for the influence of the 1st and the 2nd disconnection rod 86,87.Therefore, brittle substrate 7 is broken off, and need not to seek to be used to reduce the method for the influence of gravity on the 1st and the 2nd disconnection rod 86,87.
< the 6. advantage of the substrate disconnecting device of this embodiment >
As stated, in the substrate disconnecting device 1 of this embodiment, when keeping brittle substrate 7 on conveyance unit 50 (holding unit), the 1st and the 2nd breaks off rod 86,87 is configured in two interarea 3a, the 3b side that remains the brittle substrate 7 that erects posture.
Here, to different with this embodiment, the 1st and the 2nd break off rod be configured in brittle substrate about, and the 1st and the 2nd break off rod respectively from the upside of brittle substrate and downside and approaching situation is discussed.At this moment, excellent direction and the gravity direction angulation that approaches brittle substrate of the 1st and the 2nd disconnection is respectively about 0 ° (deg), 180 ° (deg).That is to say that the 1st and the 2nd breaks off the suffered influence of gravity difference of rod.As a result, when not doing any adjustment, can produce from the 1st and the 2nd and break off the load different problems that rod imposes on brittle substrate for influence of gravity.
Below, to described like this embodiment, the 1st and the 2nd breaks off rod 86,87 respectively from the two interarea 3a that remain the brittle substrate 7 that erects posture, 3b side and approaching situation is discussed.At this moment, the 1st and the 2nd breaks off direction and the gravity direction angulation that rod 86,87 approaches brittle substrate 7 and is about 90 ° (deg).
Thus, gravity is identical for the influence of the 1st and the 2nd disconnection rod 86,87.Therefore, brittle substrate 7 is broken off, and need not to seek to be used to reduce the method for the influence of gravity on the 1st and the 2nd disconnection rod 86,87.
And according to the substrate disconnecting device 1 and the fixed mechanism 60 thereof of this embodiment, the outer edge 4a of workpiece 3 can be by (the 61a～61c) and fixedly clamp well clamp portion 62, press section 71 of movable clamp portion 61.Therefore, can fixedly be the workpiece 3 that erects posture well.
And in the substrate disconnecting device 1 and posture changing unit 10 thereof of this embodiment, the fixed mechanism 60 of conveyance unit 50 is carried out workpiece 3 by means of the load that press section 35 applied of posture changing unit 10 static solution fixing, that reach workpiece 3 removes.That is to say; Conveyance unit 50 need not to be used to carry out fixing, and the key element removed of the static solution of workpiece 3 of workpiece 3; And pipe arrangement that need not this key element is correlated with and distribution are arranged between mobile side (conveyance unit 50) and the fixation side (for example, posture changing unit 10 etc.).Therefore, through using posture changing unit 10, can improve the security of conveyance unit 50 when advancing and operating personnel's operating efficiency when safeguarding.
And; In the conveyer of being realized by the substrate disconnecting device 1 of this embodiment; Utilize a plurality of rotary actuators 41 set in main unit 40 and the posture changing unit 10 (fixation side unit) (41a～41c) (the 1st driving part) and a plurality of push with cylinder 37 (motivating force of (the 2nd driving part) of 37a～37d), carry out workpiece 3 fixing, and the static solution of workpiece 3 remove.
That is to say; Conveyance unit 50 need not to be used to carry out fixing, and the driving part (the 1st and the 2nd driving part) that removes of the static solution of workpiece 3 of workpiece 3, and the pipe arrangement and the distribution that need not this key element is correlated with are arranged between mobile side (conveyance unit 50) and the fixation side (posture changing unit 10 and main unit 40).Therefore, can improve the security of conveyance unit 50 when advancing and operating personnel's operating efficiency when safeguarding.
In addition; The substrate disconnecting device 1 of this embodiment, and the holding device realized by this substrate disconnecting device 1; Can not only utilize the fixed mechanism 60 of conveyance unit 50 to contact the outer edge 4a that keeps workpiece 3, and can utilize the interarea (more specifically being the 1st interarea 3a) of 80 pairs of workpiece 3 of noncontact holding unit to carry out the noncontact maintenance.Therefore; Even if can't contact according to the characteristic of workpiece 3 beyond the outer edge 4a that keeps workpiece 3 the position (for example; The interarea 3a of workpiece, 3b) situation under, also can come to keep well workpiece 3 through using conveyance unit 50 (holding units) and noncontact holding unit 80.
7. variation
More than, be illustrated for embodiment of the present invention, but the present invention is not limited to said embodiment, can carry out various deformation.
(1) in this embodiment, for movable guide 67 (67a～67c) and guiding pawl 69 (69a～69c) be illustrated, but be not limited to this like Fig. 8 and situation about constituting separately each other shown in Figure 9.For example, movable guide 67 (67a) and guiding pawl 69 (69a) can be integrally formed.
(2) and, in this embodiment, be illustrated with respect to the situation that posture changing unit 10 and main unit 40 move for conveyance unit 50, but be not limited to this.For example, posture changing unit 10 and main unit 40 can not move with respect to conveyance unit 50 yet.
As stated, if each unit 10,40, and 50 mobile form conveyance unit 50 is moved with respect to posture changing unit 10 and main unit 40 (fixation side unit), then enough.
(3) and, in this embodiment, the workpiece of posture changing unit 10 confirms that transmitter 15 (with reference to Fig. 4 and Fig. 5) only is provided with 1 near lifting table 21, but workpiece is confirmed the number of transmitter 15 and is not limited to this.A plurality of (more than 2) workpiece can be set near lifting table 21 confirm transmitter 15.
Claims (4)
1. a holding device keeps being the flat work that erects posture, it is characterized in that, comprises:
(a) holding unit contacts maintenance for the outer edge that is the said workpiece that erects posture; And
(b) noncontact holding unit, be arranged to said holding unit in opposite directions, carry out noncontact for the interarea that contacts the said workpiece that keeps by said holding unit and keep; And
Said noncontact holding unit comprises:
(b-1) erecting bed is arranged to vertical guide and said holding unit in opposite directions; And
(b-2) a plurality of attraction portion is arranged on the said vertical guide of said erecting bed separately, through the said workpiece that erects posture that is that furthers in opposite directions, and keeps said workpiece with contactless state.
2. a substrate disconnecting device makes the brittle substrate that is forming score break off along said score, it is characterized in that, comprises:
(a) holding unit contacts maintenance through the outer edge to the workpiece that comprises said brittle substrate, and with the said workpiece of the state fixed flat planar shape that erects posture;
(b) noncontact holding unit, be arranged to said holding unit in opposite directions, and the interarea that is contacted the said workpiece that keeps by said holding unit carried out noncontact keep; And
(c) switching units along said score, breaks off the said brittle substrate that is the state that is kept by said holding unit and said noncontact holding unit; And
Said noncontact holding unit comprises:
(b-1) erecting bed is arranged to vertical guide and said holding unit in opposite directions;
(b-2) a plurality of the 1st attraction portions with the state of the length direction both sides of formed slotted hole on said erecting bed, are located on the vertical guide of said erecting bed separately, and keep said workpiece through the said workpiece that furthers in opposite directions with contactless state; And
(b-3) a plurality of the 2nd attraction portions are arranged on the vertical guide of said erecting bed with the state that clips a plurality of the 1st attraction portions from both sides separately, and come to keep workpiece with contactless state through the said workpiece that furthers in opposite directions; And said a plurality of the 1st attraction portion disposes more intensively than said the 2nd attraction portion,
Said switching units comprises:
(c-1) the 1st breaks off rod, extends in a direction along the said slotted hole of said erecting bed, and advances and retreat with the mode that arrives said holding unit side through said slotted hole; And
(c-2) the 2nd breaks off rod, the said brittle substrate that clips on the said holding unit to be kept and be arranged on the said the 1st break off rod opposition side, and break off the parallel direction of rod and extending with the said the 1st;
Break off under the state of excellent bearing of trend and said score almost parallel the said the 1st and the 2nd; The the said the 1st and the 2nd breaks off rod approaches said brittle substrate; Said brittle substrate is broken off rod by the said the 1st and the 2nd and clips; Like this, make and be the said brittle substrate that erects posture and break off along said score.
3. substrate disconnecting device according to claim 2 is characterized in that:
The 1st interval between the two of the adjacency in said a plurality of the 1st attraction portion is less than the 2nd interval between the two of the adjacency in said a plurality of the 2nd attraction portions.
4. according to claim 2 or the described substrate disconnecting device of claim 3, it is characterized in that:
The the said the 1st and the 2nd attraction portion is a Bernoulli chuck.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010193392A JP5182339B2 (en) | 2010-08-31 | 2010-08-31 | Substrate break device |
| JP2010-193392 | 2010-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102399053A true CN102399053A (en) | 2012-04-04 |
| CN102399053B CN102399053B (en) | 2014-07-02 |
Family
ID=45881764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110215554.XA Expired - Fee Related CN102399053B (en) | 2010-08-31 | 2011-07-25 | Retaining device and substrate breaking device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5182339B2 (en) |
| KR (1) | KR101278055B1 (en) |
| CN (1) | CN102399053B (en) |
| TW (1) | TWI466229B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104969330A (en) * | 2012-11-30 | 2015-10-07 | 株式会社尼康 | Suction apparatus, carry-in method, conveyance system, light exposure device, and device production method |
| CN105382944A (en) * | 2014-08-21 | 2016-03-09 | 三星钻石工业股份有限公司 | Breaking apparatus for substrate |
| CN105382936A (en) * | 2014-08-21 | 2016-03-09 | 三星钻石工业股份有限公司 | Breaking apparatus for substrate |
| CN106217664A (en) * | 2015-06-02 | 2016-12-14 | 三星钻石工业股份有限公司 | Disconnect device, disconnect system and switching units |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016043503A (en) * | 2014-08-20 | 2016-04-04 | 三星ダイヤモンド工業株式会社 | Dividing method of brittle material substrate, substrate holding member for dividing brittle material substrate and frame body for stretching adhesive film used upon division of brittle material substrate |
| JP6446912B2 (en) * | 2014-08-26 | 2019-01-09 | 三星ダイヤモンド工業株式会社 | Break device |
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| JP2010001160A (en) * | 2006-10-16 | 2010-01-07 | Panasonic Corp | Glass cutting method and its apparatus |
| JP2010010265A (en) * | 2008-06-25 | 2010-01-14 | Yaskawa Electric Corp | Alignment apparatus, transport system having the same, and semiconductor manufacturing apparatus |
| JP4742649B2 (en) * | 2005-04-05 | 2011-08-10 | ソニー株式会社 | Substrate break device for bonded substrates and substrate break method |
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| JP3933524B2 (en) * | 2002-05-30 | 2007-06-20 | 東京エレクトロン株式会社 | Substrate processing equipment |
| WO2006073098A1 (en) * | 2005-01-05 | 2006-07-13 | Thk Co., Ltd. | Method and device for breaking work, method for scribing and breaking work, and scribing device with breaking function |
| TWI383936B (en) * | 2006-02-01 | 2013-02-01 | Olympus Corp | Substrate exchange apparatus and substrate processing apparatus, and substrate inspection apparatus |
| JP4660586B2 (en) * | 2008-12-02 | 2011-03-30 | オリンパス株式会社 | Substrate transport apparatus and substrate transport method |
-
2010
- 2010-08-31 JP JP2010193392A patent/JP5182339B2/en not_active Expired - Fee Related
-
2011
- 2011-05-25 TW TW100118358A patent/TWI466229B/en not_active IP Right Cessation
- 2011-07-08 KR KR1020110067599A patent/KR101278055B1/en not_active IP Right Cessation
- 2011-07-25 CN CN201110215554.XA patent/CN102399053B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4742649B2 (en) * | 2005-04-05 | 2011-08-10 | ソニー株式会社 | Substrate break device for bonded substrates and substrate break method |
| JP2010001160A (en) * | 2006-10-16 | 2010-01-07 | Panasonic Corp | Glass cutting method and its apparatus |
| JP2010010265A (en) * | 2008-06-25 | 2010-01-14 | Yaskawa Electric Corp | Alignment apparatus, transport system having the same, and semiconductor manufacturing apparatus |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104969330A (en) * | 2012-11-30 | 2015-10-07 | 株式会社尼康 | Suction apparatus, carry-in method, conveyance system, light exposure device, and device production method |
| CN104969330B (en) * | 2012-11-30 | 2018-04-03 | 株式会社尼康 | Suction device, move into method, conveyer and exposure device and device making method |
| CN105382944A (en) * | 2014-08-21 | 2016-03-09 | 三星钻石工业股份有限公司 | Breaking apparatus for substrate |
| CN105382936A (en) * | 2014-08-21 | 2016-03-09 | 三星钻石工业股份有限公司 | Breaking apparatus for substrate |
| CN105382944B (en) * | 2014-08-21 | 2019-08-09 | 三星钻石工业股份有限公司 | Substrate brisement device |
| CN106217664A (en) * | 2015-06-02 | 2016-12-14 | 三星钻石工业股份有限公司 | Disconnect device, disconnect system and switching units |
| CN106217664B (en) * | 2015-06-02 | 2020-01-17 | 三星钻石工业股份有限公司 | Disconnecting device, disconnecting system and disconnecting unit |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120022054A (en) | 2012-03-09 |
| JP5182339B2 (en) | 2013-04-17 |
| CN102399053B (en) | 2014-07-02 |
| TWI466229B (en) | 2014-12-21 |
| KR101278055B1 (en) | 2013-06-24 |
| JP2012051120A (en) | 2012-03-15 |
| TW201214617A (en) | 2012-04-01 |
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