CN102359968B - Tertiary optical detection machine for IC (integrated circuit) strips and operating method thereof - Google Patents
Tertiary optical detection machine for IC (integrated circuit) strips and operating method thereof Download PDFInfo
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- CN102359968B CN102359968B CN 201110207361 CN201110207361A CN102359968B CN 102359968 B CN102359968 B CN 102359968B CN 201110207361 CN201110207361 CN 201110207361 CN 201110207361 A CN201110207361 A CN 201110207361A CN 102359968 B CN102359968 B CN 102359968B
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Abstract
The invention discloses a tertiary optical detection machine for IC (integrated circuit) strips and an operating method thereof. The tertiary optical detection machine comprises a strip conveying system and an optical detection system. The strip conveying system comprises a strip conveying guide rail, guide rail grooves which are opposite to each other are respectively arranged on a front section and a rear section of the strip conveying guide rail, and strips can be inserted into the guide rail grooves from two sides in the length direction. The optical detection system comprises an illumination device and a track moving device, wherein the track moving device is used for driving the illumination device to move in both length and width directions of the strips, and the illumination device comprises a camera and a coaxial light generator below the camera. Besides, the position relation of the coaxial light generator and the camera includes that light emitted from the coaxial light generator and coaxial with a lens of the camera is reflected by the strips and then is emitted to the lens directly through the coaxial light generator. Information of chip wires can be shot through the camera by the aid of the coaxial light generator mounted below the camera, and high-definition pictures can be shot when the track moving device drives the illumination device to move in a high speed.
Description
Technical field
The present invention relates to a kind of equipment for detection of the gold thread of chip on the IC material strip and light detecting method thereof, more precisely, relate to the chip gold thread situation on the material strip of the envelope of mould is not yet captured three Optical Inspection Machines of a kind of IC material strip that detect and record detection information one by one.
Background technology
Be detection for the third time in the chip production process to the detection of gold thread on chip, and detect for the third time relevant machinery and equipment and be called as Optical Inspection Machine three times.Relate generally to detections of gold thread disappearance, gold thread curved detection, detections of unnecessary gold thread, gold thread short-circuit detecting, gold thread six contents such as detection and gold thread impurity detection on every side that open circuit to what the gold thread of chip on the material strip of the envelope of mould not yet detected.At present, mainly rely on eye-observation to detect these Detection of contents of completing gold thread with the detection of manually being combined with microscope.Existing detection method, not only labour intensity is large, inefficiency, the quality of detection also varies with each individual, and is difficult to guarantee the detection quality of product.
Also there is the people once to attempt to obtain with camera the automatic detection that method that the standard gold line template information of chip gold thread live state information and calculator memory storage compares realizes gold thread, do not find a kind of illumination system and tracking that camera is clear, obtain exactly the various defectives of gold thread that can allow but suffer from, the efficient of detection and quality and manual detection do not have obvious advantage.
Summary of the invention
Purpose of the present invention provides a kind of three Optical Inspection Machines that camera is clear, obtain exactly the various defectives of gold thread that make for the problems referred to above.
The technical solution used in the present invention is: three Optical Inspection Machines of a kind of IC material strip comprise:
One material strip induction system, described material strip induction system comprises the material strip conveying, the front side rail of material strip conveying and rear side rail are provided with the guide-track groove for embedding for material strip dual-side in the longitudinal direction respect to one another; And,
One smooth check system, described smooth check system comprise illumination apparatus and drive the tracking shifter that illumination apparatus moves on material strip length direction and Widths; Described illumination apparatus comprises camera and is positioned at the axis light generator of camera below, and the position relationship of axis light generator and camera is: the axis light generator be incident to the coaxial light of on material strip and camera lens camera after the material strip reflection again through the axis light generator directly into being incident upon on camera lens.
Another object of the present invention is to provide a kind of method of work of above-mentioned Optical Inspection Machine.
The technical solution used in the present invention is: its light detecting method is: by the light check system, the chip on the material strip that is still in the regional guide-track groove that is arranged in the material strip conveying of its light inspection is captured detection, the camera of described smooth check system and axis light generator are arranged up and down; When capturing detection, electric-control system starts the axis light generator, the axis light generator is incident to the coaxial light of on material strip and camera lens camera and is incident in camera lens by described axis light generator after the material strip reflection again, electric-control system synchronously transports on material strip length and Width by drives camera and axis light generator, and the candid photograph of completing all chips on material strip detects.
Preferably, the charging method that material strip is entered in the guide-track groove of material strip conveying comprises the steps:
Step 1a, feeding box mobile device move to the feeding box of its clamping the material strip that makes in feeding box on the material loading position that connects with the charging aperture of described guide-track groove on its length direction, then execution in step 1b;
Step 1b, swing the left side opening of material-pulling device by feeding box with all material strips in feeding box along its length direction together from the extrapolated preset distance of the right openings of hopper, then execution in step 1c;
Step 1c, clamp as the material strip tong device of charging tong device the material strip that connects with guide-track groove from the right openings of feeding box to the fore-end that exposes outside, and the material strip that clamps is drawn in described guide-track groove along its length direction, charging tong device is still in guide-track groove material strip the material strip that clamps being drawn in the rear stop motion in light inspection zone.
Preferably, in step 1c, when the front end of the material strip that clamps moves to the position of the charging aperture detecting sensor that is arranged on guide-track groove charging aperture place, charging tong device unclamps material strip, the material strip that is detected according to the charging aperture detecting sensor by the feeding box mobile device and the position of the offset correction material strip of charging aperture on the material strip Width are in material strip and can insert smoothly on the position of charging aperture; Charging tong device clamps material strip again after correction, and the material strip that clamps is drawn in described guide-track groove along its length direction.
Preferably, the baiting method that the material strip of in this method of work, light having been examined is packed in hopper is: the tail end of the material strip of having examined as material strip tong device and the light of discharging tong device offsets, and promote the material strip that light examined and travel forward along its length direction, until the material strip that light has been examined complete enter lower feed box move in the slot that the discharging opening with guide-track groove connects under the drive of lower feed box mobile device till.
Beneficial effect of the present invention is: at first, three Optical Inspection Machines of the present invention are captured chip gold thread information by the axis light generator is installed below camera, can capture the picture of high-resolution in tracking shifter drives the process of its fast moving; Secondly, the hopper feeding system can be by swinging material-pulling device with the disposable whole release certain distances of the material strip in real hopper, just can material strip gripping from hopper be pulled out and be entered in guide-track groove by one, material strip tong device piece ground afterwards; Again, feeding box mobile device of the present invention can be completed the correction of material strip position according to the positional information that the charging aperture detecting sensor detects, make it enter smoothly in guide-track groove; At last, lower feed box mobile device of the present invention coordinates the automatic plug-in mounting of material strip that material strip tong device can examine light to lower feed box.
Description of drawings
Fig. 1 is the structural representation of the chief component of the full-automatic Optical Inspection Machine of IC material strip of the present invention;
Fig. 2 is the one-piece construction schematic diagram of the full-automatic Optical Inspection Machine of IC material strip of the present invention;
Fig. 3 is the one-piece construction schematic diagram of hopper feeding system of the present invention when being loaded with hopper;
Fig. 4 is the one-piece construction schematic diagram of hopper feeding system shown in Figure 3 when zero load;
Fig. 5 is the structural representation of the feeding box in-out apparatus shown in Fig. 3 and 4;
Fig. 6 is the feeding box mobile device shown in Fig. 3 and 4 and the structural representation that swings material-pulling device;
Fig. 7 is the structural representation of swing material-pulling device shown in Figure 6;
Fig. 8 is the explosive view of swing material-pulling device shown in Figure 6;
Fig. 9 is the structural representation of the gripping hopper mechanism of feeding box mobile device shown in Figure 6;
Figure 10 is the explosive view of gripping hopper shown in Figure 9 mechanism;
Figure 11 is the perspective view of material strip induction system;
Figure 12 a is the stereographic map of the material strip tong device in the material strip induction system;
Figure 12 b is the explosive view of the material strip tong device in the material strip induction system;
Figure 12 c is the explosive view of the tong mechanism in material strip tong device;
Figure 13 is three-dimensional total figure of smooth check system shown in Figure 1;
Figure 14 is the partial exploded view of smooth check system shown in Figure 13;
Figure 15 is the perspective view of illumination apparatus in Figure 13;
Figure 16 is the scheme of installation of camera and axis light generator in Figure 15;
Figure 17 is the structural representation of axis light generator;
Figure 18 is the structural representation of generator backlight.
Embodiment
Normally used hopper comprises slot type material box and stack type material box, has the slot that is used for the plug-in mounting material strip of arranging from top to bottom in slot type material box, left side and the right side of slot type material box on the material strip length direction has respectively left side and right openings, with plug-in mounting and the extraction of carrying out material strip.The hopper that the present invention relates to is above-mentioned slot type material box, the hopper that the material strip for the treatment of that light inspection and light have been examined is housed is called feeding box and lower feed box, in addition, and as shown in Figure 3, to be fully loaded with again and treat that light inspection or light examine the hopper of material strip and be called real hopper AF, the hopper of sky is called empty charging box AE.
Three Optical Inspection Machines of IC material strip of the present invention mainly comprise material strip induction system 4 and light check system 6 as illustrated in fig. 1 and 2, the material strip induction system comprises the material strip conveying, the front side rail as shown in figure 11 406 of material strip conveying and rear side rail 408 are provided with the guide-track groove for embedding for material strip dual-side in the longitudinal direction respect to one another, and namely the material strip throughput direction of material strip conveying is consistent with the material strip length direction; This light check system 6 comprises illumination apparatus and tracking shifter, the camera of illumination apparatus (with camera lens) and axis light generator can be synchronized with the movement by length and the Width along material strip under the drive of tracking shifter, with all chips on quick candid photograph material strip, complete the collection of gold thread information, wherein, camera is positioned at the top of axis light generator, the light that the axis light generator is incident on material strip is coaxial with the camera lens of camera, the light of material strip reflection again through the axis light generator directly into being incident upon on camera lens.
The adoptable smooth detecting method of Optical Inspection Machine of the present invention is: under first material strip delivered to the light check system, when being parked in light inspection zone, electric-control system 10 as shown in Figure 2 obtains material strip and puts in place and start immediately light check system 6 after information, drive tracking shifter and drive top that camera and axis light generator etc. move to the first predetermined core assembly sheet detection position of material strip (in the present embodiment, can once capture and detect four chip blocks, the first row of the close front side rail of the four chip block operated by rotary motion of first group and last two chip blocks of the second row).At this moment, illumination apparatus enters the triggering state, beginning is synchronizeed on the automatic feeding bar chip and is carried out quick intermittent movement and capture detection with tracking shifter, after namely candid photograph has detected first group of four chip block, tracking shifter drive camera etc. moves two chip block distances along the material strip throughput direction, arrive the top of second group of four chip block, this moment, illumination apparatus triggered the glittering detection of again capturing, and then go as mentioned above to capture and detect four chip blocks of the 3rd group, until this two row chip candid photograph of the first row on material strip and the second row detects complete.Afterwards, tracking shifter drive camera etc. moves two chip block distances along the material strip Width, namely move to the top near foremost two chip blocks of the third and fourth row of front side rail, after capturing detection, the edge directions opposite with the material strip throughput direction such as tracking shifter drive camera move two chip block distances, and then go as mentioned above to capture and detect.So like this capture to detect repeatedly (snakelike track), detect when completing until the whole chips on material strip are captured, illumination apparatus enters closed condition, and tracking shifter moves to initial position with camera etc., waits for second material strip of sending detection here.
Above-mentioned camera is captured the chip gold thread information that arrives at every turn under illumination apparatus is assisted, all can pass immediately toward computing machine and with the template comparative analysis of demarcating, whether qualified with the gold thread that judges this chip.
In order to accelerate light inspection speed, configurable two covers of smooth check system of the present invention are by the synchronous illumination apparatus that drives of tracking shifter, both be responsible for respectively the first half of material strip on its length direction and the candid photograph of latter half of chip, the distance between is both determined by the length of material strip.In like manner, this light check system also can configure the two above illumination apparatus of cover.
the operating distance of axis light generator is preferably 25～50mm more than material strip, show a kind of enforcement structure of axis light generator 601 with reference to Figure 17, it comprises a shell 704, shell 704 middle parts are provided with diffuse reflector 702, the shell of one side of diffuse reflector 702 is provided with the LED particle board 701 relative with it, with the diffuse reflector 702 relative base of opposite side from the top margin of diffuse reflector 702 to shell is obliquely installed a semi-transparent half reflection plate 703, at this, those skilled in the art all should be clear that, the periphery of diffuse reflector 702, and the periphery of semi-transflective reflective plate 703 all should with the inwall close contact of shell, as embed in the inwall of shell, to guarantee the consistance of light path.Shell 704 arranges respectively all coaxial with the camera lens of camera upper light hole and lower light hole in the above and below of semi-transflective reflective plate 703.LED particle board 701 is connected with external power source by power lead, the light that LED on the LED particle board sends is reflected by semi-transflective reflective plate 703 after diffuse reflection occurs diffuse reflector 702, the light that forms after reflection penetrates by lower light hole, and then be radiated on material strip, and the light of material strip emission incides in the camera lens of camera by lower light hole, semi-transflective reflective plate (playing the transmission effect this moment) and upper light hole, and then makes camera can clearly capture the gold thread of chip.
In the present invention, applied camera is industrial camera, requirement to this industrial camera is relevant to the requirement of the hourly output (UPH) of equipment with the user, desired UPH is larger, candid photograph rate request to camera is higher, as adopting AVTSTINGRAY F504B industrial camera, it is the CCD camera of 500W for pixel, and frame per second is 9fps, and the satiable UPH of this camera is 30K.At this, those skilled in the art can select corresponding industrial camera according to design requirement.
More advantageously, this light check system also is provided with generator D backlight as shown in figure 15, and it covers the light inspection zone of light check system, and is installed on the below of guide-track groove, be about to be arranged in the below of the material strip that is still in guide-track groove, for camera 602 and axis light generator 601 provide backlight.The operating distance of generator D backlight can for below material strip-50～0mm.With reference to Figure 18, generator D backlight can comprise emitting led particle board 711 and setting light source diffusion sheet 712 thereon.
As shown in figure 15, the area backlight of illumination apparatus is larger, can cover all chips on material strip, the spacing of generator D backlight and material strip C depending on the lighting effect of this batch of material bar, and after spacing is set up, it is regional that generator D backlight will be locked in the light inspection.And the axis light area area relatively backlight that axis light generator 601 produces is less, and axis light, is captured chip gold thread information for camera the more reliably lighting effect of high-quality is provided when entering the triggering state with backlight.
As shown in Figure 13 and 14, as a kind of enforcement structure, the camera 602 of this illumination apparatus and axis light generator 601 are installed on vertical installing plate 603, vertically have slotted hole groove (seeing Figure 16) on installing plate 603, are used for adjusting the height distance of 601, camera 602 and axis light generator.Vertically installing plate 603 connects firmly with illumination apparatus installing plate 606 by horizontal installing plate 604 and web joint 605.Distance between camera 602 and axis light generator 601 can according to chip specification requirement on material strip, be adjusted linear electric motors 617 by the camera spacing and adjust.
Illumination apparatus installing plate 606 with and directions X guide rail 607 have the directions X roller screw transmission nut 610 that is slidably matched to connect firmly, when directions X transmission servomotor 612 drive directions X roller screw transmissions 610 moved, illumination apparatus installing plate 606 just moved around along directions X (material strip throughput direction) together with camera mounted thereto 602 and axis light generator 601.Location sensitive sheet 609 connects firmly with illumination apparatus installing plate 606, location sensitive sheet 609 is moving around with it and is inserting the position sensor 608 that is arranged in the left side or when being positioned at the position sensor 608 on right side, electric-control system 8 will receive illumination apparatus that position sensor the sends signal that puts in place, at this moment, electric-control system 8 will be controlled 612 stalls of directions X transmission servomotor.The mounting distance that two position sensors of the left and right sides are 608, the length of visual material strip is adjusted.Illumination apparatus installing plate 606 is driven by Timing Belt connecting gear 618 and Y-direction roller screw transmission 613 by Y-direction transmission servomotor 614 and realizes along the movement of Y-direction (material strip Width).Above-mentioned directions X roller screw transmission nut 610, directions X transmission servomotor 612 and directions X roller screw transmission 610, and Y-direction transmission servomotor 614, Timing Belt connecting gear 618 and Y-direction roller screw transmission 613 have consisted of tracking shifter of the present invention.Wherein, Y-direction driving member erecting frame 616 can be packed in the top of bearing seat 615, and Y-direction roller screw transmission 613 is arranged in erecting frame 616.
In order to realize the automatic transport of material strip, this material strip induction system 4 also comprises material strip tong device, will treat that by this material strip tong device the material strip of light inspection is delivered to the light inspection regional, and the material strip that light has been examined is transferred in lower feed box.
Carry out simultaneously in order to improve light inspection efficient, make the material loading for the treatment of light inspection material strip and the blanking that light has been examined material strip, the present invention has adopted two material strip tong devices, respectively as charging tong device 401 and discharging tong device 4019.as shown in Figure 12 a and 12b, material strip tong device comprises the line slide rail 5020 that is arranged at the front side rail outside along the material strip throughput direction, tong mechanism, the x direction travel mechanism that main transmission piece 506 and drive main transmission piece move on the material strip throughput direction, wherein, tong mechanism has the left linear slider 5019 of the relation of being slidably connected to connect firmly by its tong back-up block 5017 with line slide rail 5020, main transmission piece 506 with have the right linear slider 5023 of the relation of being slidably connected to be connected with line slide rail 5020, main transmission piece 506 is positioned at the place ahead of tong mechanism on the material strip throughput direction, be fixed with the x direction on the side towards main transmission piece 506 of tong back-up block 5017 (right flank) and attract magnet 5018, this magnet produces attractive force to the left side of main transmission piece 506, the distance that the large I of attractive force relies on the milscale 507 that is packed on main transmission piece 506 to adjust the magnet 5018 on main transmission pieces 506 and back-up block 5017 realizes, the attractive force size is as the criterion with the dynamics of not damaging material strip.tong mechanism goes gripping when the material strip of light inspection, mechanism is moved to the left by the promotion of the milscale on main transmission piece 506 tong, tong mechanism clamps when light inspection material strip is carried to the right, mechanism follows main transmission piece 506 to move right by the attraction tong, when occurring getting stuck, when power is greater than magnetic pull if get stuck, tong mechanism can separate with main transmission piece 506, to guarantee not damage material strip, in addition, be installed in tong mechanism sensing chip 5025 will be installed on main transmission piece 506 on inductor 5026 separate and send separation signal to electric-control system, at this moment, electric-control system will be notified manually and fix a breakdown.
This x direction travel mechanism can comprise stepper motor 501, synchronizing wheel 502, and Timing Belt 503, roller screw 504, right bearing seat 505 and roller screw nut 5024, roller screw 504 is packed on base plate 5022 by left and right bearing seat 5021 and 505; Roller screw is driven by synchronizing wheel 502 and Timing Belt 503 by stepper motor 501; One end of main transmission piece 506 is connected with roller screw nut 5024, and then, can move back and forth with nut 5024, main transmission piece 506 is connected with right linear slider 5023 by the other end.
As shown in Figure 12 a, 12b and 12c, tong mechanism comprises extension spring 508, tong opening limiting piece 509, intermediate support piece 5010, upper tong swinging block 5011, upper tong 5012, upside adhesive electromagnet 5013, lower tong 5014, lower tong swinging block 5015, downside adhesive electromagnet 5016 and tong back-up block 5017.wherein, upper tong 5012 and lower tong 5014 are installed on respectively on tong swinging block 5011 and lower tong swinging block 5015, upper and lower tong swinging block is hinged by separately pin and intermediate support block 5010, linked by two extension springs 508 and up and down tong swinging block, make up and down tong swinging block be in open configuration, the size of opening is controlled by the tong opening limiting piece 509 that is arranged on intermediate support block 5010, on, the closure of lower tong attracts respectively by upside adhesive electromagnet 5013 and the downside adhesive electromagnet 5016 that is embedded in two shrinkage pools up and down on intermediate support block 5010, lower tong swinging block is realized, intermediate support block 5010 is packed on tong back-up block 5017.When needing upper and lower tong gripping material strip, electromagnet gets electric generation attractive force and overcomes spring force and clamp material strip, and when needs unclamped material strip, electromagnet dead electricity and losing its reliss opened upper and lower tong by spring force.At this, upper and lower tong swinging block extends respectively the inboard of front side rail from the above and below of front side rail, makes tong and lower tong clamp respectively the material strip that dual-side is placed in guide-track groove from the above and below.
The tong mechanism of charging tong device 401 and discharging tong device 4019 is respectively shown in Figure 11 charging tong mechanism 402 and discharging tong mechanism 4018.
In order to make this material strip induction system 4 can adapt to the material strip of different in width, as shown in figure 11, front side rail 406 maintains static, rear side rail 408 has the rear side rail Width adjusting mechanism 4020 of annexation by slide block 404 and slideway 403 and with rear side rail, can make rear side rail 408 and front side rail do parallel, with the spacing of guide rail before and after adjusting.This kind Width adjusting mechanism 4020 (being straight-line motion mechanism) is very easily to realize to those skilled in the art, and itself is not innovative point of the present invention for its structure yet, is not described further at this.
Advantageously, side guide 4011 and rear side guide 409 before the top of front side and rear side rail is respectively arranged with on the position in light inspection zone, when material strip arrived light inspection zone, front side and rear side guide compressed material strip respectively under the effect of separately pressing plate pressurized cylinder 4012 and 4010, examine in order to light.
In addition, rear side rail one side at the charging aperture of guide-track groove is provided with charging aperture detecting sensor 407, so that the aligning of material strip and charging aperture; Rear side rail one side at the discharging opening of guide-track groove is provided with discharging opening detecting sensor 4016, and its effect is to detect the tail end that is sent to the material strip in lower feed box whether to enter lower feed box fully.
in order automatically to complete the material loading for the treatment of light inspection material strip, as shown in Figure 1, three Optical Inspection Machines of IC material strip of the present invention also are provided with hopper feeding system 1, hopper feeding system 1 is arranged at the charging aperture side of guide-track groove, as shown in Fig. 3 and 4, it comprises feeding box in-out apparatus 1A, feeding box mobile device 1C and swing material-pulling device 1B, this feeding box in-out apparatus 1A comprises real hopper conveyer and be positioned at the empty charging box conveyer (wherein the empty charging box conveyer is not necessary) of its below for feeding box in-out apparatus 1A, carriage direction both is opposite each other, and parallel with the Width of material strip (namely vertical with the material strip throughput direction), the empty charging box conveyer is arranged on installing plate A, feeding box mobile device 1C comprises elevating mechanism, horizontal mobile mechanism and the gripping hopper 1a of mechanism, horizontal mobile mechanism is arranged on installing plate A, the moving direction of horizontal mobile mechanism is parallel with the carriage direction of feeding box in-out apparatus 1A, elevating mechanism is fixedly mounted in the motion section of horizontal mobile mechanism, and the gripping hopper 1a of mechanism is fixedly installed in the orientation relative with feeding box in-out apparatus 1A on the front of motion section of elevating mechanism, as shown in Fig. 7 and 8, this swing material-pulling device 1B comprises the material-pulling device actuator 115 that axis of swing 134, swing arm 119, charging ram 125 and drive axis of swing 134 rotate, and this axis of swing 134 is installed on axis of swing erecting frame 116 rotatably, this swing arm 119 is fixed on axis of swing 134, drives swing arm 119 when axis of swing 134 rotates around the center line swing of axis of swing 134 to drive at the material-pulling device actuator, this charging ram 125 is installed on swing arm 119 along the centerline direction of axis of swing 134, the length direction that is charging ram is consistent with the centerline direction of axis of swing 134, the length of charging ram 125 is slightly less than the hopper height between inwall up and down, can make it enter in hopper and touch wherein all material strips, as shown in Figure 6, this swing material-pulling device 1B is fixedly installed in by its axis of swing erecting frame 116 on the side of motion section of elevating mechanism, make charging ram 125 enter the pusher of wherein completing along the material strip length direction from the left side opening of the feeding box of the gripping hopper 1a of mechanism clamping.
like this, after first real hopper of the gripping hopper 1a of mechanism location clamping, just can first real hopper be moved to the position that the guide-track groove with the material strip conveying connects under the drive of elevating mechanism and horizontal mobile mechanism, and electric-control system puts in place after information obtaining real hopper, to start the material-pulling device actuator, make charging ram 125 in the process that swings along the direction that enters real hopper inside (being counterclockwise for embodiment shown in Figure 4), all material strips in real hopper be released certain distance (as 6mm) to the direction near guide-track groove, afterwards, charging ram 125 remains on this position always, until charging tong device shifts out all material strips from real hopper, charging ram 125 just swings and gets back to original position, and then prevent that material strip from returning in hopper because of the touching of charging tong mechanism.
when first real hopper puts in place (in real hopper, a bottom material strip aligns with the delivery chute of material strip conveying) and material strip during by charging ram 125 release preset distance (as 6mm), electric-control system will start the material strip induction system after obtaining these information that put in place charging tong device should the bottom material strip of reality hopper move right, when the front portion of material strip moves to the charging aperture detecting sensor of material strip induction system, charging tong mechanism unclamps, the doing suitable adjustment in extent of deviation and move of the material strip that elevating mechanism and horizontal mobile mechanism will detect according to the charging aperture detecting sensor, so that material strip is accurately aimed at the guide rail throat-fed, at this, because guide-track groove has certain thickness, therefore, correction herein mainly refer to horizontal mobile mechanism according to material strip and charging aperture the deviation on its Width adjust.Charging tong device will the clamping material strip enter in guide-track groove after correction, to light inspection zone conveying.
After in real hopper, bottom first material strip sent, electric-control system starts elevating mechanism immediately, drives the spacing of a material strip of real hopper decline, and charging tong device will be sent nethermost second material strip according to said method, so repeatedly, until the material strip of real hopper is all sent feeding box.After handling, electric control system controls elevating mechanism and horizontal mobile mechanism interlock are delivered to empty charging box on the empty charging box conveyer, by the empty charging box conveyer, empty charging box is transferred out afterwards, then by manually taking away.So repeatedly, just can complete at hopper feeding system place the material loading of feeding box and shifting out of empty charging box, the movement of feeding box, and the correction of material strip and output.
As shown in Fig. 3,4 and 5, the real hopper conveyer of this feeding box in-out apparatus 1A can comprise that real hopper transports platform 13, is arranged on real hopper and transports real hopper belt gear 14 and real hopper approach switch 16 on platform 13, this reality hopper approach switch 16 is arranged on the end on real hopper carriage direction that real hopper transports platform 13, whether transported and put in place to respond to real hopper, the notice feeding box mobile device 1B real hopper of gripping that comes.Real hopper belt gear can comprise that at least two (having adopted three in embodiment shown in Figure 5) parallel to each other transporting the tooth-like belt of driven by motor and drive the real hopper that all cog belts are synchronized with the movement by real hopper transport motor.This reality hopper transports platform 13 can arrange a top clamping breach between two tooth-like belts of outermost in the end that real hopper approach switch 16 is set, and the 1a of mechanism enters for the gripping hopper, is convenient to stably gripping and has transported the real hopper AF that puts in place.In addition, can register pin be set in the both sides of top clamping breach, register pin can be positioned on straight line perpendicular to real hopper carriage direction with real hopper approach switch 16.
in addition, the both sides that this reality hopper transports platform 13 can respectively arrange a real hopper baffle plate 15 that prevents that real hopper is offset to both sides on real hopper belt gear 14, at this, in order to adapt to the hopper of different size, one real hopper baffle plate 15 can be fixedly installed in real hopper transports on platform 13, and another real hopper baffle plate 15 is installed on real hopper by a baffle width adjusting mechanism 17 transports on platform 13, this reality hopper baffle plate 15 can adjust upward the position in the side vertical with real hopper carriage direction under the effect of baffle width adjusting mechanism 17, and then adjust two distances between real hopper baffle plate 15.This kind baffle width adjusting mechanism 17 is easy to those skilled in the art realize, as feed screw nut formula gear train, chain type transmission mechanism and rack and pinion drive mechanism etc., is not described further at this.
For swinging material-pulling device 1B, the position for the ease of electric control system controls swing arm 119 swings in the counterclockwise direction can arrange limited block 126 on axis of swing erecting frame 116.
in order to make electric-control system can detect in real time the resistance that charging ram 125 bears in promoting the material strip process, and then judge whether to occur getting stuck, swing material-pulling device of the present invention also comprises guide, magnet suction block 120 and inductive switch, wherein, this guide and swing arm 119 is along the direction sliding connection vertical with axis of swing, an outwardly directed end of side and the charging ram 125 from swing arm 119 of this guide are connected, and the outwardly directed end of the opposite side from swing arm 119 and the magnet suction block 120 of this guide are connected, this swing arm 119 on the side of magnet suction block 120, magnet 136 is installed, the sensing chip 135 of this inductive switch is installed on magnet suction block 120, the inductor 138 of this inductive switch is installed on swing arm 119, this sensing chip 135 can insert in the groove of inductor 138, and being respectively signal, the groove both sides of inductor 138 send side (as sending light signal) and signal receiver side (as receiving optical signals), when inserting in groove, sensing chip 135 can hinder the reception of signal, when sensing chip 135 breaks away from groove, the signal receiver side just can receive corresponding signal, electric-control system just can detect the relative position relation of 119 of magnet suction block 120 and swing arms in real time like this.
The glide direction of this guide is preferably consistent with the tangential direction of axis of swing 134.
In one embodiment, this guide is two axis of guides 123, and the end of the axis of guide 123 can be connected with charging ram 125 by a charging ram installing plate 124.
In one embodiment, this swing arm 119 is " U " type framework, and axis of swing 134 is installed on two free ends of framework, and this guide, magnet 136 are installed on two free-ended connecting portions of connection of framework.
Like this, when charging ram 125 promotes material strip, if the pusher resistance promotes the magnet suction block to the direction motion away from swing arm 119 greater than the suction of 136 of magnet suction block 120 and magnet, and then when making sensing chip 135 break away from the groove of inductors 138, electric-control system can judge that the pusher resistance is excessive, and then send the signal that gets stuck, notify operating personnel manually to fix a breakdown.
For capable of regulating is judged as Resistance Value when getting stuck, can make the attractive force of 136 of above-mentioned magnet suction block 120 and magnet be set to adjustable structure.At this, can fixedly mount a milscale 121 on magnet suction block 120, and swing arm 119 a buffer stopper 137 is installed on the side of magnet suction block 120, the head of this milscale 121 can abut against on buffer stopper 137 under the effect of magnetic force.Like this by regulating milscale 121 with regard to the spacing of 136 of adjustable magnetic iron suction block 120 and magnet, and then the attractive force between regulating both.
This axis of swing erecting frame 116 can comprise a horizontal top plate and a riser, this material-pulling device actuator 115 is installed on horizontal top plate, the output shaft of this material-pulling device actuator 115 is in transmission connection by shaft coupling 117 and axis of swing 134 after passing horizontal top plate, and this axis of swing 134 is supported in the top chock 118 and step 122 that is packed on riser.In addition, this material-pulling device actuator 115 can be oscillating cylinder.
As shown in Fig. 3,4 and 5, the empty charging box conveyer of this feeding box in-out apparatus 1A can comprise that empty charging box transports platform 11 and is arranged on empty charging box and transport empty charging box belt gear 12 on platform 11.In like manner, empty charging box belt gear 12 can comprise that the empty charging box that at least two (having adopted three in embodiment shown in Figure 5) tooth-like belt parallel to each other and all cog belts of drive are synchronized with the movement transports motor.This empty charging box transports platform 12 can arrange at the place, top on the empty charging box carriage direction bottom clamping breach between two tooth-like belts of outermost, the 1a of mechanism enters for the gripping hopper, is convenient to the gripping hopper 1a of mechanism empty charging box AE stably is placed on empty charging box belt gear 12.
As shown in Figure 6, this horizontal mobile mechanism comprises horizontal direction lead screw transmission secondary 19 and drives that it moves in the horizontal direction moves horizontally motor 18.This elevating mechanism comprises vertical direction lead screw transmission secondary 214 and drives the lifting motor 113 of its in the vertical direction motion, and this elevating mechanism can be fixedly mounted in the motion section of horizontal mobile mechanism by Connection Block 110.At this, a mounting groove can be set on installing plate A, elevating mechanism passes this mounting groove and is connected with the horizontal mobile mechanism that is installed on installing plate A below.
As shown in Figures 9 and 10, this gripping hopper 1a of mechanism comprises chuck top board 112, the chuck bottom plate below it, drives the compression hopper cylinder 132 of chuck top board 112 in the vertical direction motions and the hopper locating piece between chuck top board and bottom plate, this compression hopper cylinder 132, chuck bottom plate and hopper locating piece all are installed on gripping hopper mechanism installing plate 133, and hopper that whether the induction hopper put in place the inductor 131 that puts in place is installed on this hopper locating piece.At this, the width of chuck bottom plate is less than the width that equals upper and lower clamping breach, make it can enter to hold in top clamping breach and transport by real hopper belt gear 14 the real hopper that puts in place, and it can be entered in bottom clamping breach the empty charging box of handling is placed on empty charging box belt gear 14.
in order to realize the accurate location of hopper, this chuck bottom plate comprises two lower trays 111 that are divided into both sides, lower tray 111 is provided with the inner side edge of opening up feed tank along the draw-in groove 111a that embeds, in the present embodiment, the inner side edge of hopper is stuck in this draw-in groove 111a along outstanding, a hopper positioning cylinder 127 is all installed in the inboard of each lower tray 111, make the direction of motion of its movable part consistent with the hopper carriage direction, the projection that can fit with the inwall on the inner side edge edge of hopper bottom is installed on the movable part of this hopper positioning cylinder 127, like this, when tray 111 holds up under real hopper quilt, electric-control system will start hopper positioning cylinder 127, utilize the projection on its inwall that is stuck in the inner side edge edge that real hopper is tightened up the location to the direction near the hopper locating piece, and then make hopper be close to inwards the hopper locating piece as far as possible.At this, when the empty charging box that will complete material loading as feeding box mobile device 1C is delivered on the empty charging box conveyer, lower tray 111 will be under the drive of elevating mechanism descends a little and a bit withdraws from again, and like this, empty charging box just can not blocked by projection and draw-in groove 111a in letting slip journey unloading.
This time tray 111 can be installed on gripping hopper mechanism installing plate 133 by back up pad 128, and two lower trays 111 are fixedly installed in respectively on two lateral surfaces respect to one another of back up pad 128.
As shown in Figure 4, be designed to comprise the structure of two lower trays 111 that are divided into both sides for the chuck bottom plate, also top clamping breach can be designed to comprise two with the lower tray 111 right clamping breach of the left clamping breach in top and top of corresponding setting one by one, like this, for the embodiment that three cog belts are set, just three cog belts can be arranged on three parts that are divided into by the right clamping breach of the left clamping breach in top and top that real hopper transports platform 13.In like manner, also bottom clamping breach can be designed to comprise two with lower the tray 111 left clamping breach in bottom and the lower right clamping breach of corresponding setting one by one.
for the material strip plug-in mounting automatically light examined to the draw-in groove of lower feed box, as shown in Figure 1, the present invention also is provided with hopper blanking system 9, this hopper blanking system is positioned at the discharging opening side of guide-track groove, it comprises lower feed box in-out apparatus and lower feed box mobile device, wherein, the lower feed box in-out apparatus can have essentially identical structure with the feeding box in-out apparatus, the lower feed box mobile device can have essentially identical structure with the feeding box mobile device, the direction of motion of its horizontal mobile mechanism is same vertical with the material strip throughput direction, but the empty charging box conveyer that the real hopper conveyer of feeding box in-out apparatus and empty charging box conveyer are equivalent to respectively the lower feed box in-out apparatus and real hopper motion, the effect of the empty charging box conveyer of lower feed box in-out apparatus is that empty charging box is transported on the position that supplies the clamping of lower feed box mobile device, the lower feed box mobile device drives empty charging box and moves to and make its nethermost slot on the position that connects with the discharging opening of guide-track groove on the length direction of material strip, after the material strip that light has been examined is inserted in nethermost slot, the lower feed box mobile device moves down the distance of a material strip thickness, the penultimate slot is positioned on the position that the discharging opening with guide-track groove connects, after empty charging box is filled the material strip that light examined, the lower feed box mobile device will be filled the real hopper of the material strip that light examined and deliver on the real hopper conveyer of lower feed box in-out apparatus, when real hopper conveyer, real hopper is transported put in place after, electric-control system will notify operating personnel to take real hopper away.
the method that the material strip that discharging tong device 4019 clamping light have been examined is completed blanking is, discharging tong device clamps the material strip that light examined and carries to the discharging opening direction, the front end of material strip is inserted moved under the drive of lower feed box mobile device this moment in the locational slot that the discharging opening with guide-track groove connects, after the tail end of material strip leaves light inspection zone, discharging tong device unclamps material strip, and rollback is to the rear of material strip tail end, at this moment, discharging tong device upper, lower tong is closed, promote the tail end of material strip with its closing face, until the material strip tail end is by the discharging opening detecting sensor, just stop motion, and reposition, the material strip that next piece light has been examined is transported in preparation.
if the material strip that adopts said method to carry light to examine, discharging tong device need to carry out the rollback motion, and need to increase control rollback distance, prevent that discharging tong device and next piece from treating the sensor that light inspection material strip collides, for the ease of simplifying the motion control method of discharging tong device, material strip conveying device of the present invention arranges the one-level conveying roller closing on the position of discharging opening, this conveying roller comprises pinch roller 4014, pinch roller cylinder 4015, the output roller motor 4013 that output roller 4017 and drive output roller 4017 rotate, pinch roller 4014 and output roller 4017 lay respectively at the above and below of material strip, in the time of between material strip enters both, pinch roller will press down under the effect of pinch roller cylinder 4015, and then make material strip complete conveying under the effect of pinch roller and output roller.adopt the carrying method of one-level conveying roller to be reduced to, discharging tong device clamps the material strip that light examined and carries to the discharging opening direction, when the front end of material strip enters between pinch roller 4014 and output roller 4017, discharging tong device unclamps material strip, and stop on this position, at this moment, continue to carry material strip by conveying roller, the front end of material strip is inserted moved under the drive of lower feed box mobile device this moment in the locational slot that the discharging opening with guide-track groove connects, when the tail end of material strip leaves conveying roller, discharging tong device upper, lower tong is closed, drive at electric-control system the tail end that promotes material strip in its proal process with its closing face, until the material strip tail end is by the discharging opening detecting sensor, just stop motion, and reposition, the material strip that next piece light has been examined is transported in preparation.The concrete structure of this pinch roller can be that 201333836 subject name is the Chinese utility model patent of " two guide rail material strip conveying devices of IC material strip laser mark printing machine " referring to all notification numbers of the applicant.
Material strip induction system of the present invention, the guide rail both sides arrange some grades of conveying rollers and require to arrange according to parking of material strip processing technology the structure that some material strips are parked block relatively, not only simple in structure, and the position, reference mark is few, and then lowered device fabrication cost and maintenance difficulties, and be particularly suitable for the conveying of the relatively poor material strip of the rigidity of the envelope of mould not yet.
In addition, as shown in Figure 2, three Optical Inspection Machines of the present invention comprise that also keyboard 3 all is connected with electric-control system 8 communications with display 2 for the keyboard 3 of revising parameter and input message with for the display 2 that shows the each several part duty.
Only being in sum preferred embodiment of the present invention, is not to limit practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application the scope of the claims change and modify, all should belong to technology category of the present invention.
Claims (8)
1. three Optical Inspection Machines of an IC material strip, is characterized in that, comprising:
One material strip induction system, described material strip induction system comprises the material strip conveying, the front side rail of material strip conveying and rear side rail are provided with the guide-track groove for embedding for material strip dual-side in the longitudinal direction respect to one another; And,
One smooth check system, described smooth check system comprise illumination apparatus and drive the tracking shifter that illumination apparatus moves on material strip length direction and Widths; Described illumination apparatus comprises camera and is positioned at the axis light generator of camera below, and the position relationship of axis light generator and camera is: the axis light generator be incident to the coaxial light of on material strip and camera lens camera after the material strip reflection again through the axis light generator directly into being incident upon on camera lens; Described material strip induction system comprises that also being delivered to light for the material strip that will treat the light inspection examines the zone, and the material strip that light has been examined is transferred to material strip tong device in lower feed box, described material strip tong device comprises along the material strip throughput direction and is arranged at the line slide rail in the front side rail outside, the tong mechanism that is used for the clamping material strip, main transmission piece and drives main transmission piece mobile x direction travel mechanism on the material strip throughput direction; Described tong mechanism has the left linear slider of the relation of being slidably connected to connect firmly by its tong back-up block with line slide rail, the main transmission piece with have the right linear slider of the relation of being slidably connected to be connected with line slide rail, the main transmission piece is positioned at the place ahead of tong mechanism on the material strip throughput direction, the x direction that the main transmission piece is produced attractive force that is fixed with on the side of main transmission piece of tong back-up block attracts magnet.
2. three Optical Inspection Machines of IC material strip according to claim 1, is characterized in that, described smooth check system also comprises generator backlight, and described generator backlight covers the light inspection zone of light check system, and be installed on the below of guide-track groove.
3. three Optical Inspection Machines of IC material strip according to claim 1, is characterized in that, is equipped with on described main transmission piece to adjust itself and the milscale of the spacing of x direction attraction magnet; In described tong mechanism, sensing chip is installed, on described main transmission piece, the inductor that is used in conjunction with sensing chip is installed, inductor is used for sending separation signal to electric-control system when the power of getting stuck makes sensing chip separate with inductor greater than attractive force.
4. three Optical Inspection Machines of IC material strip according to claim 1, it is characterized in that, also comprise the hopper feeding system, described hopper feeding system comprises: the feeding box in-out apparatus, comprise that the carriage direction of described real hopper conveyer is vertical with the material strip throughput direction be used to the real hopper conveyer that transports as the real hopper of feeding box; The feeding box mobile device, comprise elevating mechanism, horizontal mobile mechanism and gripping hopper mechanism, described horizontal mobile mechanism is arranged on installing plate, the moving direction of horizontal mobile mechanism is parallel with the carriage direction of real hopper conveyer, elevating mechanism is fixedly mounted in the motion section of horizontal mobile mechanism, gripping hopper mechanism is fixedly installed in the motion section of elevating mechanism with the orientation relative with the feeding box in-out apparatus, transports through real hopper conveyer the feeding box that puts in place with gripping; And, swing material-pulling device, comprise the material-pulling device actuator that axis of swing, swing arm, charging ram and drive axis of swing rotate, described axis of swing is installed on the axis of swing erecting frame rotatably; Described swing arm is fixed on axis of swing; Described charging ram is installed on swing arm along the centerline direction of axis of swing, and the length of charging ram makes it can enter in real hopper and touches wherein all material strips; Described axis of swing erecting frame be fixedly installed in elevating mechanism motion section make charging ram when swinging on the position from the left side opening of the real hopper of gripping hopper mechanisms grip enters real hopper.
5. three Optical Inspection Machines of IC material strip according to claim 4, it is characterized in that: described rear side rail is provided with the charging aperture detecting sensor in the charging aperture side of guide-track groove, and the correction information that provides on the position of accurately docking with charging aperture is provided a material strip for the feeding box mobile device described charging aperture detecting sensor.
6. the method for work of three Optical Inspection Machines of the described IC material strip of any one according to claim 1 to 5, it is characterized in that, its light detecting method is: by the light check system, the chip on the material strip that is still in the regional guide-track groove that is arranged in the material strip conveying of its light inspection is captured detection, the camera of described smooth check system and axis light generator are arranged up and down; When capturing detection, electric-control system starts the axis light generator, the axis light generator is incident to the coaxial light of on material strip and camera lens camera and is incident in camera lens by described axis light generator after the material strip reflection again, electric-control system synchronously transports on material strip length and Width by drives camera and axis light generator, and the candid photograph of completing all chips on material strip detects.
7. method of work according to claim 6, is characterized in that, the charging method that material strip is entered in the guide-track groove of material strip conveying comprises the steps:
Step 1a, feeding box mobile device move to the feeding box of its clamping the material strip that makes in feeding box on the material loading position that connects with the charging aperture of described guide-track groove on its length direction, then execution in step 1b;
Step 1b, swing the left side opening of material-pulling device by feeding box with all material strips in feeding box along its length direction together from the extrapolated preset distance of the right openings of feeding box, then execution in step 1c;
Step 1c, clamp as the material strip tong device of charging tong device the material strip that connects with guide-track groove from the right openings of feeding box to the fore-end that exposes outside, and the material strip that clamps is drawn in described guide-track groove along its length direction, charging tong device is still in guide-track groove material strip the material strip that clamps being drawn in the rear stop motion in light inspection zone.
8. method of work according to claim 6, it is characterized in that, the baiting method that the material strip that light has been examined is packed in lower feed box is: the tail end of the material strip of having examined as material strip tong device and the light of discharging tong device offsets, and promote the material strip that light examined and travel forward along its length direction, until the material strip that light has been examined complete enter lower feed box move in the slot that the discharging opening with guide-track groove connects under the drive of lower feed box mobile device till.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201110207361 CN102359968B (en) | 2011-07-22 | 2011-07-22 | Tertiary optical detection machine for IC (integrated circuit) strips and operating method thereof |
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| CN 201110207361 CN102359968B (en) | 2011-07-22 | 2011-07-22 | Tertiary optical detection machine for IC (integrated circuit) strips and operating method thereof |
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| CN102359968B true CN102359968B (en) | 2013-06-05 |
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| CN111721778B (en) * | 2020-05-21 | 2023-01-24 | 深圳格芯集成电路装备有限公司 | Vertical visual inspection equipment for chip defects |
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Address after: 518000 Guangdong city of Shenzhen province Baoan District Longhua sea with rich industrial park third area Huarong Road Long Fu Industrial Zone 3 and 4, 7, 8, 1-4 Patentee after: Shenzhen geland intelligent equipment Limited by Share Ltd Address before: 518000 Guangdong city of Shenzhen province Baoan District Longhua sea with rich industrial park third area Huarong Road Long Fu Industrial Zone 3 and 4, 7, 8, 1-4 Patentee before: Grand Technology (Shenzhen) Co.,Ltd. |
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Effective date of registration: 20210326 Address after: 518000 1st to 3rd floors of phase II plant of Granda equipment Industrial Park, 33 Cuijing Road, Zhukeng community, Longtian street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Gexin integrated circuit equipment Co.,Ltd. Address before: 518000 floor 1-4, building 3, 4, 7 and 8, longfu Industrial Zone, Huarong Road, the third functional area of Longhua dalangtong fufu Industrial Park, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN GRAND INTELLIGENT EQUIPMENT Co.,Ltd. |
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