CN102359764A - Plane deformation non-destructive testing device on the basis of carbon nanotube as sensing medium - Google Patents
Plane deformation non-destructive testing device on the basis of carbon nanotube as sensing medium Download PDFInfo
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- CN102359764A CN102359764A CN2011102371483A CN201110237148A CN102359764A CN 102359764 A CN102359764 A CN 102359764A CN 2011102371483 A CN2011102371483 A CN 2011102371483A CN 201110237148 A CN201110237148 A CN 201110237148A CN 102359764 A CN102359764 A CN 102359764A
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Abstract
The invention discloses a plane deformation non-destructive testing method and device on the basis of a carbon nanotube as a sensing medium. The carbon nanotube is attached to the surface of a tested object at random or is doped inside the tested object; and a laser, a polarization adjusting component and a Raman spectrograph form a Raman spectrum testing system. The polarization mode switching and the polarization angle adjustment of the Raman spectrum testing system are carried out by the polarization adjusting component. The frequency shift increment of characteristic peaks of Raman spectrums generated before and after sampling points of the tested object deform are numerically equal to a linear equation which is expressed by four strain components of the plane deformation of the sampling points; the simultaneous solution is carried out on equations to which different polarization angles under different polarization modes correspond to obtain strain components of the plane deformation of the sampling points. The invention has the characteristics of non-destructive wireless, non-contact, small dimension of measure points, high space-time resolution ratio and the like and can be simultaneously applied to related application occasions of multiple fields such as experimental tests of microscale mechanical behaviors and the like.
Description
Technical field
The invention belongs to the engineering mechanics measuring technology, be specifically related to a kind of method and apparatus of planar micro yardstick deflection and the regularity of distribution thereof being measured with the spectroscopy mode.
Background technology
Needs along with material and information science technology development detect macroscopic view and micro-scale material mechanical performance, and the fail-safe analysis of micro devices have been become the focus of research.Because at present the measuring technique to the microdeformation amount is difficult to satisfy the new technology requirement, for example: the strain gage testing method requires its measuring point yardstick big, and the resistance-strain paster is at least more than several millimeters, and belongs to wired contact spot measurement; Classical optical measurement mechanics technology mainly is the measurement to the moderate finite deformation field, and the visual field is big and resolution is not enough.In the micrometering field, commercial micro measurement instrument (atomic force microscope, ESEM, transmission electron microscope, nano-hardness tester etc.) can be realized the pattern observation of nanometer to micro-meter scale level.But under power or environmental load (like the temperature field) effect, distortion and even a plurality of components of strain distribution situation of measured object are carried out quantitative measurment, then there are many limitations in above-mentioned instrument; Utilize the spectral class detection technique, the measuring point of x optical diffraction is big, and material is had certain limitation, and lack of resolution.Micro-Raman technology can be measured the regional principle stress of micron of Raman active material (like silicon etc.), but is not suitable for non-Raman active material.So up to the present, Shang Weiyou is to planar micro yardstick deflection, especially the method and apparatus of the measurement carried out of plane deformation component.Though disclosedly can solve the measurement of shearing strain as the detection method of Raman sensor information based on some material, can't eliminate the thermal strain influence that the temperature place causes, more can't realize the measurement of thermal strain.
Summary of the invention
Given this objective of the invention is: propose a kind of be sensor information with the CNT, be the method and apparatus to the plane deformation Non-Destructive Testing of measurement means with the Raman spectroscopy; Can be used for the quantitative measurment of the plane strain component (comprising normal strain, shearing strain and thermal strain) of material surface millimeter to submicron-scale measuring point, can realize the measurement of each components of strain regularity of distribution in the film micro area.
The present invention is made up of constructional device and measuring technique method two parts.
Aspect constructional device: based on CNT is plane deformation the cannot-harm-detection device of sensor information; Have CNT, testee, laser instrument, polarization adjusting part and Raman spectrograph; Its set of systems becomes: CNT constitutes the Raman spectrum test macro at random attached to the surface of testee or be doped in the inside of testee by laser instrument, polarization adjusting part and Raman spectrograph.The polarization adjusting part comprises half-wave plate, quarter-wave plate and polaroid.The laser of laser emitting constitutes input path through the surface that the polarization adjusting part projects testee; The scattered light that send on the testee surface gets into the Raman spectrograph through the polarization adjusting part and constitutes the scattering light path.Through the switching and the adjusting of optical axis direction separately of half-wave plate, quarter-wave plate and polaroid position in the polarization adjusting part, the polarization mode and the polarization angle of control Raman spectrum test macro incident light and scattered light.Wherein, place the input path of Raman spectrum test macro and scattering light path to form the two-wire polarization mode respectively half-wave plate in the polarization adjusting part and polaroid; Only place the input path of Raman spectrum test macro to form the single line polarization mode half-wave plate in the polarization adjusting part; Only place the input path of Raman spectrum test macro to form circular polarisation mode the quarter-wave plate in the polarization adjusting part.
The lossless detection method aspect: the surperficial Raman spectrum characteristic peak frequency displacement increment of sampled point arbitrarily of testee through the Raman spectrum test macro is obtained under above-mentioned three polarization modes is numerically equal to the linear equation of being expressed by four components of strain of this sampled point plane deformation.In this linear equation, four components of strain weight coefficient separately all is Composite Triangular functions of the polarization angle of Raman spectrum test macro under current polarization mode.The testee sampled point is obtained the Raman spectrum characteristic peak frequency displacement increment of a plurality of polarization angles through the Raman spectrum test macro under the different polarization pattern; The pairing components of strain linear equation of each raman characteristic peak frequency displacement increment is carried out simultaneous solution, draw each components of strain of sampled point plane deformation.Four components of strain are respectively: two normal strain components, a shearing strain component and a thermal strain component.
At the resonance Raman scattering state, the pairing linear equation by four components of strain expression of the Raman spectrum characteristic peak frequency displacement increment that the Raman spectrum test macro obtains is following to CNT:
Wherein, ε
XAnd ε
YThe normal strain component of representing X, Y direction respectively, γ
XYExpression shearing strain component, ε
TExpression thermal strain component;
The polarization angle of expression Raman spectrum test macro;
Expression Raman spectrum test macro is under the two-wire polarization mode, and incident light and scatter light polarization angle all are
The time, the sampled point Raman spectrum characteristic peak frequency displacement increment that obtains;
Expression Raman spectrum test macro is under the single line polarization mode, and the incident light polarization angle does
The time, the sampled point Raman spectrum characteristic peak frequency displacement increment that obtains; Δ Ω 1/4 representes the Raman spectrum test macro under the inclined to one side pattern of circle, the sampled point Raman spectrum characteristic peak frequency displacement increment that obtains, Ψ
SensorStrain-frequency-shifting operator for CNT strain sensing medium.
The Raman spectrum test macro is measured at least two kinds of polarization modes of acquisition, the Raman frequency shift increment under four different polarization angles; Bring corresponding components of strain linear equation into and carry out simultaneous solution, can draw four components of strain ε of testee sampled point plane deformation
X, ε
Y, γ
XYAnd ε
T
Advantage of the present invention and beneficial effect are:
(1) has characteristics such as harmless, wireless, noncontact, measuring point yardstick are little, original position, high time/spatial resolution, can realize each component ε of plane deformation under the situation that not damage testee not contacting
X, ε
Y, γ
XYAnd ε
TOriginal position directly measure.
(2) setting of Polarization Control assembly is easy to realize that polarization is regulated and the robotization and the sequencing of control, helps significantly improving the efficient and the temporal resolution of measurement.Cooperate dissimilar microscopes; The present invention can realize from the plane deformation analysis of millimeter to submicron-scale measuring point; And can realize the full-field distribution measurement of each components of strain in the planar micro zone through adopting the point by point scanning mode; Thereby meticulous the measurement difficult problem, particularly shearing strain of microscale mechanical test and micro element fail-safe analysis and the problems of measurement of thermal strain component have been solved.
(3) with classical photo-measuring experimental mechanics compared with techniques, experimental implementation, data processing are simple.
(4) with the micro-photo-measuring experimental mechanics compared with techniques of high-resolution, the decoupling zero of normal strain component, shearing strain component and thermal strain component and the problems of measurement of principal strain and principal strain directions thereof have been solved.
(5) with existing spectrum test compared with techniques, requirement has the limitation of Raman active to tested object to have broken through traditional Raman strain measurement technique.
(6) compare as the method for Raman sensor information based on some material with at present disclosed, not only can remove the thermal strain influence that the temperature place causes effectively, and and then realized the working in coordination with of mechanical strain and thermal strain, in site measurement.The present invention simultaneously can be used for the related application occasion in a plurality of fields such as test of experimental study, the MEMS micro element mechanical property of microscale mechanical behavior.
Description of drawings
Shown in accompanying drawing be structure of the present invention and know-why synoptic diagram, wherein long broken line is an incident light, short broken line is a scattered light.
Specific embodiment
Below through embodiment technical method of the present invention and device are done further explanation.Need to prove that present embodiment is narrative, does not limit protection scope of the present invention with this.
Based on CNT is plane deformation the cannot-harm-detection device of sensor information, and its light path is built shown in accompanying drawing: CNT 1 is at random attached to the surface of testee 2 or be doped in the inside of testee.Constitute the Raman spectrum test macro by laser instrument 3, polarization adjusting part 4 and Raman spectrograph 5.The laser of laser emitting constitutes input path through the surface that the polarization adjusting part projects testee; The scattered light that send on the testee surface gets into the Raman spectrograph through the polarization adjusting part and constitutes the scattering light path.The polarization adjusting part comprises half-wave plate 6, quarter-wave plate 7 and polaroid 8; Wherein half-wave plate and quarter-wave plate place input path; Polaroid places the scattering light path, and any one can be separately takes out half-wave plate, polaroid and quarter-wave plate three from light path and keep other.
Wherein: with quarter-wave plate 7 from light path, take out and keep half-wave plate 6,8 Raman spectrum test macros of polaroid switch to the two-wire polarization mode;
Polaroid 8 and quarter-wave plate 7 taken out from light path and keep 6 Raman spectrum test macros of half-wave plate switch to the single line polarization mode;
Half-wave plate 6 and polaroid 8 taken out from light path and keep 7 Raman spectrum test macros of quarter-wave plate switch to circular polarisation mode.
Under the two-wire polarization mode, through rotating fast axis direction and the polaroid analyzing direction of half-wave plate, and control the angle between the two and the initial polarization direction of incident laser, realization to the Raman spectrum test macro go into, the adjusting of scatter light polarization angle.
Under the single line polarization mode, through rotating the fast axis direction of half-wave plate, and control its with the initial polarization direction of incident laser between angle, realization is to the adjusting of Raman spectrum experiment test system polarization angle.
Based on CNT is the plane deformation lossless detection method of sensor information: the surperficial Raman spectrum characteristic peak frequency displacement increment of sampled point arbitrarily of testee through the Raman spectrum test macro is obtained under said three polarization modes is numerically equal to four linear equations that the components of strain are expressed by this sampled point plane deformation.In this linear equation, four components of strain have weight coefficient separately.Weight coefficient is the Composite Triangular function of the polarization angle of Raman spectrum test macro under current polarization mode.Through the Raman spectrum test macro to the testee sampled point under the different polarization pattern; Obtain the Raman spectrum characteristic peak frequency displacement increment of a plurality of polarization angles; Each raman characteristic peak frequency displacement increment and pairing components of strain linear equation are carried out simultaneous solution, draw each components of strain of sampled point plane deformation.
Be in the resonance Raman scattering state to CNT, following by the linear equation that four components of strain are expressed:
Wherein, ε
XAnd ε
YThe normal strain component of representing X, Y direction respectively, γ
XYExpression shearing strain component, ε
TExpression thermal strain component;
The polarization angle of
expression Raman spectrum test macro;
Δ Ω 1/4 representes the Raman spectrum test macro under the inclined to one side pattern of circle, the sampled point Raman spectrum characteristic peak frequency displacement increment that obtains;
Ψ
SensorStrain-frequency-shifting operator for CNT strain sensing medium.
Present embodiment is an embodiment with " deformation analysis of carbon-fibre reinforced epoxy resin thin plate under axial tension and temperature gradient field coupled load ", and testing procedure is following:
(1) specimen preparation: with purity is that 90% SWCN mixes according to mass ratio with liquid-state epoxy resin at 1: 999; After the ultrasonic dispersion mixed liquor press mold on the carbon-fibre reinforced epoxy resin thin plate is solidified; Thereby process the thick coherent film of 30 μ m at the carbon-fibre reinforced epoxy resin thin sheet surface, CNT evenly distributes at random in the film.
(2) utilize experimental system shown in the accompanying drawing to test, wherein laser instrument adopts 632.8nm He-Ne laser instrument, and SWCN is in the resonance raman state under this laser.
(3) Raman experiment measuring: the carbon-fibre reinforced epoxy resin thin plate that will be under axial tension and the temperature gradient field coupled load places among the Raman spectrum test macro, incident light is focused on the position to be measured of sample surfaces distortion.At first the polarization adjusting part is adjusted into two-wire polarization mode (promptly in light path, taking out quarter-wave plate) and keep, the scatter light polarization direction is parallel all the time; Gather polarization angle respectively and be the Raman spectrum of 0 °, 45 ° and 90 °, and then the polarization adjusting part is adjusted into the inclined to one side pattern of circle (in light path, taking out half-wave plate and polaroid) and gathers the Raman spectrum of this sampled point.
(4) Data Management Analysis: known Ψ
Sensor=1815cm
-1, the zero load frequency displacement is 2624cm
-1From the Raman spectrum data of all test gained, extract characteristic peak frequency displacement increment information, Δ Ω
(0 °, 0 °)=-9.287cm
-1, Δ Ω
(45 °, 45 °)=-9.226cm
-1, Δ Ω
(90 °, 90 °)=-9.408cm
-1With Δ Ω 1/4=-10.002cm
-1Bring above data into the pairing equation of each polarization mode and simultaneous solution, draw all four components of the plane deformation of this point:
The result shows ε
X≈ ε
Y≈ 0.5%, γ
XY≈ 0, visible this sample point in etc. biaxial stretch-formed state, its principal strain is about 0.5%.
In addition, there is 0.05% thermal strain in this sampled point.
Claims (4)
1. based on CNT plane deformation the cannot-harm-detection device of sensor information; Have CNT, testee, laser instrument, polarization adjusting part and Raman spectrograph; It is characterized in that: CNT (1) is at random attached to the surface of testee (2) or be doped in the inside of testee; Constitute the Raman spectrum test macro by laser instrument (3), polarization adjusting part (4) and Raman spectrograph (5); The polarization adjusting part comprises half-wave plate (6), quarter-wave plate (7) and polaroid (8); The laser of laser emitting constitutes input path through the surface that the polarization adjusting part projects testee; The scattered light that send on the testee surface gets into the Raman spectrograph through the polarization adjusting part and constitutes the scattering light path, through the switching and the adjusting of optical axis direction separately of half-wave plate, quarter-wave plate and polaroid position in the polarization adjusting part (4), and the polarization mode and the polarization angle thereof of control Raman spectrum test macro.
2. described according to claim 1 is plane deformation the cannot-harm-detection device of sensor information based on CNT, it is characterized in that: place the input path of said Raman spectrum test macro and scattering light path to form the two-wire polarization mode respectively half-wave plate (6) in the said polarization adjusting part (4) and polaroid (8); Only place the input path of said Raman spectrum test macro to form the single line polarization mode half-wave plate (6) in the said polarization adjusting part (4); Only place the input path of said Raman spectrum test macro to form circular polarisation mode the quarter-wave plate (7) in the said polarization adjusting part (4).
3. based on CNT the plane deformation lossless detection method of sensor information; It is characterized in that: through said Raman spectrum test macro under two-wire polarization mode or single line polarization mode or circular polarisation mode; The testee that obtains (2) surface is the Raman spectrum characteristic peak frequency displacement increment of sampled point arbitrarily; Be numerically equal to the linear equation of expressing by four components of strain of this sampled point plane deformation; Each weight coefficient in the linear equation is the Raman spectrum test macro at the Composite Triangular function of setting polarization angle under the polarization mode; Through the Raman spectrum test macro to testee (2) sampled point under the different polarization pattern, obtain the Raman spectrum characteristic peak frequency displacement increment of a plurality of polarization angles, the pairing components of strain linear equation of each raman characteristic peak frequency displacement increment is carried out simultaneous solution; Draw each components of strain of sampled point plane deformation, four components of strain are: two normal strain components, a shearing strain component and a thermal strain component.
4. described according to claim 3 is the plane deformation lossless detection method of sensor information based on CNT; It is characterized in that: CNT (1) is in the resonance Raman scattering state, and the Raman spectrum characteristic peak frequency displacement increment that is obtained by said Raman spectrum test macro linear equation corresponding, that expressed by four components of strain is following:
Wherein, ε
XAnd ε
YThe normal strain component of representing X, Y direction respectively, γ
XYExpression shearing strain component, ε
TExpression thermal strain component;
The polarization angle of expression Raman spectrum test macro;
Δ Ω 1/4 representes the Raman spectrum test macro under the inclined to one side pattern of circle, the sampled point Raman spectrum characteristic peak frequency displacement increment that obtains;
Ψ
SensorStrain-frequency-shifting operator for CNT strain sensing medium;
The Raman spectrum test macro is measured at least two kinds of polarization modes of acquisition, the Raman spectrum characteristic peak frequency displacement increment under four different polarization angles; Bring corresponding components of strain linear equation into and carry out simultaneous solution, draw four components of strain ε of testee sampled point plane deformation
X, ε
Y, γ
XYAnd ε
T
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103743620A (en) * | 2013-12-27 | 2014-04-23 | 天津大学 | Method for carrying out non-contact measurement on plane transformation by using low-dimensional nano material |
| CN107478171A (en) * | 2017-08-31 | 2017-12-15 | 长江存储科技有限责任公司 | The monitoring method and monitoring device of a kind of buckling deformations |
| CN110333219A (en) * | 2019-07-15 | 2019-10-15 | 天津大学 | The decoupling detection method and device of the components of stress |
| CN110333222A (en) * | 2019-07-15 | 2019-10-15 | 天津大学 | Two-way strain detecting method and apparatus in the face of graphene |
| CN111289492A (en) * | 2020-03-19 | 2020-06-16 | 浙江科技学院 | Method for representing chirality of single-walled carbon nanotube by utilizing polarized ultralow-frequency Raman spectrum |
| CN113075198A (en) * | 2021-04-20 | 2021-07-06 | 浙江科技学院 | Method for analyzing high-pressure deformation and recovery process of single-walled carbon nanotube |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030011765A1 (en) * | 2001-07-03 | 2003-01-16 | Xie Xiaoliang Sunney | System and method for polarization coherent anti-stokes raman scattering microscopy |
| US20080212180A1 (en) * | 2007-03-02 | 2008-09-04 | Jingyun Zhang | Polarization independent raman imaging with liquid crystal tunable filter |
| CN101477052A (en) * | 2009-01-05 | 2009-07-08 | 天津大学 | Strain component lossless detection technology based on carbon nano-tube as sensing medium |
| CN101776605A (en) * | 2010-01-28 | 2010-07-14 | 天津大学 | Simple coordinate regulation device for regulating polarization direction of Micro-Raman spectrum system |
| CN101929847A (en) * | 2010-06-01 | 2010-12-29 | 天津大学 | Carbon nanotube-based non-destructive detection technique of strain component of sensing media |
-
2011
- 2011-08-18 CN CN 201110237148 patent/CN102359764B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030011765A1 (en) * | 2001-07-03 | 2003-01-16 | Xie Xiaoliang Sunney | System and method for polarization coherent anti-stokes raman scattering microscopy |
| US20080212180A1 (en) * | 2007-03-02 | 2008-09-04 | Jingyun Zhang | Polarization independent raman imaging with liquid crystal tunable filter |
| CN101477052A (en) * | 2009-01-05 | 2009-07-08 | 天津大学 | Strain component lossless detection technology based on carbon nano-tube as sensing medium |
| CN101776605A (en) * | 2010-01-28 | 2010-07-14 | 天津大学 | Simple coordinate regulation device for regulating polarization direction of Micro-Raman spectrum system |
| CN101929847A (en) * | 2010-06-01 | 2010-12-29 | 天津大学 | Carbon nanotube-based non-destructive detection technique of strain component of sensing media |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103743620A (en) * | 2013-12-27 | 2014-04-23 | 天津大学 | Method for carrying out non-contact measurement on plane transformation by using low-dimensional nano material |
| CN107478171A (en) * | 2017-08-31 | 2017-12-15 | 长江存储科技有限责任公司 | The monitoring method and monitoring device of a kind of buckling deformations |
| CN107478171B (en) * | 2017-08-31 | 2019-10-18 | 长江存储科技有限责任公司 | A kind of monitoring method and monitoring device of buckling deformations |
| CN110333219A (en) * | 2019-07-15 | 2019-10-15 | 天津大学 | The decoupling detection method and device of the components of stress |
| CN110333222A (en) * | 2019-07-15 | 2019-10-15 | 天津大学 | Two-way strain detecting method and apparatus in the face of graphene |
| CN110333222B (en) * | 2019-07-15 | 2020-11-27 | 天津大学 | Method and device for detecting in-plane bidirectional strain of graphene |
| CN111289492A (en) * | 2020-03-19 | 2020-06-16 | 浙江科技学院 | Method for representing chirality of single-walled carbon nanotube by utilizing polarized ultralow-frequency Raman spectrum |
| CN111289492B (en) * | 2020-03-19 | 2023-08-22 | 浙江科技学院 | Method for representing chirality of single-walled carbon nanotube by using polarized ultra-low frequency Raman spectrum |
| CN113075198A (en) * | 2021-04-20 | 2021-07-06 | 浙江科技学院 | Method for analyzing high-pressure deformation and recovery process of single-walled carbon nanotube |
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