CN102324947A - Digital real-time radio frequency automatic matcher and matching method thereof - Google Patents
Digital real-time radio frequency automatic matcher and matching method thereof Download PDFInfo
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- CN102324947A CN102324947A CN201110131560A CN201110131560A CN102324947A CN 102324947 A CN102324947 A CN 102324947A CN 201110131560 A CN201110131560 A CN 201110131560A CN 201110131560 A CN201110131560 A CN 201110131560A CN 102324947 A CN102324947 A CN 102324947A
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Abstract
The invention discloses a digital real-time radio frequency automatic matcher and a matching method thereof. The matcher is a modular system which is based on a microprocessor unit (MPU) (singlechip), and comprises a load impedance real-time monitoring module, an L-type matching network and a dual-parameter automatic control system, wherein the load impedance real-time monitoring module comprises a dual-directional coupler and a signal conditioning circuit, and is used for real-timely measuring and providing the calculated original parameters of the load impedance to the MPU, the L-type matching network is a triple-element L-type matching network which is formed by at least two adjustable capacitors, and the dual-parameter automatic control system is a bridging controller which connects the output end of the MPU with the two capacitors of the L-type matching network. After the radio frequency automatic matcher of the embodiment of the invention is applied, the high-radio frequency and high-power application matching instantaneity can be effectively improved, and the application environment and matching precision of the matcher are improved at the same time.
Description
Technical field
The present invention relates to the coalignment and the implementation method automatically in real time of radio frequency source and terminate load in the high power RF transmission technique field.
Background technology
During radio frequency high-power was used, terminate load was such as application such as antenna, radio frequency plasma cavity, radio frequency firing equipments.They present different load complex impedances because of model or environment for use have nothing in common with each other.Common like this do not match with output impedance radio frequency power source (general qualified radio frequency power source output impedance is 50 Ω).So just must between signal source and load, insert matching network.The most also be extensive use be L type network, jB as shown in Figure 1, jX, they all are variable capacitances.At the power source output directed coupler of connecting, detect the mould of forward power signal | U
i| with the mould of reflected signal | U
R|.After their digitlizations, calculate the mould of reflection coefficient.Data handling machine is adjusted at twice: transfer jX earlier, transfer jB again, calculate reflection coefficient again; If reflection coefficient does not reach requirement (such as 1.05), then transfer jX again, inferior accent jB; So iterate and to reach up to a hundred times; Perhaps be based upon on the method according to the equiva lent impedance of predetermined plasma chamber, their real-time is not high, is difficult to use on the modern production line.
Summary of the invention
Seeing that the defective of above-mentioned prior art aspect real-time coupling the objective of the invention is to propose a kind of automatic adaptation of digital real-time radio frequency and matching process thereof, in the hope of improving the real-time matching performance that radio frequency high-power is used.
Above-mentioned first purpose of the present invention, its technical solution is:
The automatic adaptation of a kind of digital real-time radio frequency; It is characterized in that: said adaptation is SCM Based modular system; Comprise the real-time monitoring modular of load impedance, L type matching network and bivariate automatic control system; The real-time monitoring modular of wherein said load impedance comprises dual directional coupler and signal conditioning circuit; Be used for real-time and measure and provide single-chip microcomputer to carry out the raw parameter that load impedance calculates, the said L type matching network element L type matching network that at least two tunable capacitors constitute of serving as reasons, and said bivariate automatic control system is for connecting the bridge controller of single-chip microcomputer output and two electric capacity of L type matching network.
Further; Said dual directional coupler is the double-sided PCB that is carved with forward and reverse coupled line; The output of this two coupling line is connected to the passive phase wave detector that is used for measure phase difference in the lump in signal conditioning circuit; The output of two coupling lines simultaneously connects the passive wave amplitude wave detector that is used to measure self modulus separately, and the output of two wave detectors inserts single-chip microcomputer.
Further, the main component of said bivariate automatic control system is for to mate two stepping motors that link to each other with two tunable capacitors of L type matching network one to one, and the output of said step motor control input and single-chip microcomputer joins.
Above-mentioned second purpose of the present invention, a kind of digital real-time radio frequency automatic matching method, its realization depends on the automatic adaptation of last solution, it is characterized in that comprising step:
I, adopt dual directional coupler to monitor coaxial line in real time, after the coupling of coaxial line same position and signal conditioning circuit are to signal processing, send into single-chip microcomputer through forward and reverse two coupling lines along coaxial line normal direction;
II, in single-chip microcomputer, obtain magnitude of voltage corresponding through-put power and reflection power by the calibration of actual transmission power and reflection power, and calculate complex reflection coefficient, and then calculate load impedance: Z by transmission line theory
L=R
L± jX
L
III, calculate the numerical value of two tunable capacitors, and through bivariate automatic control system two electric capacity of adjustment synchronously, realizes that real-time transmission system matees according to the network matching theory.
The application implementation of the automatic adaptation of radio frequency of the present invention, its outstanding effect is: can effectively improve the real-time that radio frequency high-power is used coupling, improve the suitable environment and the matching precision of adaptation simultaneously.
Following constipation closes the embodiment accompanying drawing, and specific embodiments of the invention is done further to detail, so that technical scheme of the present invention is easier to understand, grasp.
Description of drawings
Fig. 1 is the RF match sketch map of prior art;
Fig. 2 a is a coaxial line dual directional coupler sketch map of the present invention;
Fig. 2 b is the entity structure sketch map of dual directional coupler of the present invention;
Fig. 3 is the structural representation of the used signal conditioning circuit of the automatic adaptation of the present invention;
Fig. 4 is the structure diagram of L type matching network of the present invention.
Embodiment
For in radio frequency high-power is used, real-time changeable load impedance being measured fast, mated, the present invention breaks through the limitation of conventional radio frequency matching technique, has proposed to innovation a kind of automatic adaptation of digital real-time radio frequency and matching process thereof.
Constitute from the hardware of automatic adaptation: this adaptation is for (to be also referred to as microprocessor based on single-chip microcomputer; Below all being called for short MPU with English refers to; Not shown) modular system; Comprise the real-time monitoring modular of load impedance, L type matching network and two-parameter automatic control system, wherein the real-time monitoring modular of this load impedance is one of key character of the present invention, shown in Fig. 2 a and Fig. 2 b; It comprises dual directional coupler and signal conditioning circuit, is used for the real-time measurement and provides MPU to carry out the raw parameter that load impedance calculates; As shown in Figure 4 again, this L type matching network element L type matching network that at least two tunable capacitors (C1, C2) constitute of serving as reasons, basic identical with existing L type matching network commonly used; Also please be as shown in Figure 3, this bivariate automatic control system is intended to two tunable capacitor output control signals are realized the coupling to the radio frequency coaxial line for connecting the bridge controller of MPU output and two electric capacity of L type matching network.
Further refinement: above-mentioned this dual directional coupler is the double-sided PCB 1 that is carved with forward and reverse coupled line; The output of two coupling lines and signal conditioning circuit is connected to the passive phase wave detector that is used for measure phase difference in the lump in signal conditioning circuit; The output of two coupling lines simultaneously connects the passive wave amplitude wave detector that is used to measure self modulus separately, and the output of two wave detectors inserts MPU.And in the present embodiment; What the main component of bivariate automatic control system adopted is two stepping motors of synchronous operation; Coupling connects two tunable capacitor C1, the C2 of L type matching network one to one, and to its synchronous adjustment, can ensure to obtain real-time, accurate match.Wherein the output of this step motor control input and MPU joins.
From concrete coupling embodiment: incident wave Vi, reflected wave Vr and their relative phase difference of measuring same position through dual directional coupler.The output of two coupling lines is connected to the passive phase wave detector, measures the phase difference between them.Two coupling lines output simultaneously connects passive amplitude detector separately, measures their modulus separately.
Thereby, only need suitably selected dual directional coupler forward, the reverse degree of coupling separately, again through the processing of signal conditioning circuit.Under the situation that can calibrate in advance the through-put power that obtains the magnitude of voltage correspondence and reflection power by actual transmission power and reflection power, can draw the exact value of complex reflection coefficient according to transmission line theory, calculate load impedance: Z thus
L=R
L± jX
L
Can calculate C1 according to the network matching theory, the numerical value of C2.For avoiding adjusting respectively C1, what C2 caused does not match.So control C1, C2 adopts two stepping motor bivariate control system, adjusts C1 synchronously, C2.Show their transient process just 0.02 second through emulation.Can make transmission system reach matched well in real time accurately like this.
To sum up, the automatic adaptation of the digital real-time radio frequency of the present invention can automatic time be measured the complex impedance of Protean vacuum equipment, so just can accurately calculate when reaching matching status the desired value that all right one way or the other power transformation is held in the L type matching network.And adopt the bivariate automatic control system that all right one way or the other power transformation appearance of match circuit is carried out Synchronization Control, iterations is tapered to 2～3 times.
Those of ordinary skill in the art will be appreciated that; Above embodiment is used for explaining the present invention; And be not to be used as qualification of the present invention; As long as in connotation scope of the present invention, all will drop in claims scope of the present invention variation, the modification of the above embodiment.
Claims (4)
1. automatic adaptation of digital real-time radio frequency; It is characterized in that: said adaptation is SCM Based modular system; Comprise the real-time monitoring modular of load impedance, L type matching network and two-parameter automatic control system; The real-time monitoring modular of wherein said load impedance comprises dual directional coupler and signal conditioning circuit; Be used for real-time and measure and provide single-chip microcomputer to carry out the raw parameter that load impedance calculates, the said L type matching network element L type matching network that at least two tunable capacitors constitute of serving as reasons, and said two-parameter automatic control system is for connecting the bridge controller of single-chip microcomputer output and two electric capacity of L type matching network.
2. the automatic adaptation of a kind of digital real-time radio frequency according to claim 1; It is characterized in that: said dual directional coupler is the double-sided PCB that is carved with forward and reverse coupled line; The output of this two coupling line is connected to the passive phase wave detector that is used for measure phase difference in the lump in signal conditioning circuit; The output of two coupling lines simultaneously connects the passive amplitude detector that is used to measure self modulus separately, and the output of two wave detectors inserts single-chip microcomputer.
3. the automatic adaptation of a kind of digital real-time radio frequency according to claim 1; It is characterized in that: the main component of said two-parameter automatic control system is for to mate two stepping motors that link to each other with two tunable capacitors of L type matching network one to one, and the output of said step motor control input and single-chip microcomputer joins.
4. a digital real-time radio frequency automatic matching method utilizes the realization of the said automatic adaptation of claim 1, it is characterized in that comprising step:
I, adopt dual directional coupler to monitor coaxial line in real time, after the coupling of coaxial line same position and signal conditioning circuit are to signal processing, send into single-chip microcomputer through forward and reverse two coupling lines along coaxial line normal direction;
II, in single-chip microcomputer, obtain magnitude of voltage corresponding through-put power and reflection power by the calibration of actual transmission power and reflection power, and calculate complex reflection coefficient, and then calculate load impedance: Z by transmission line theory
L=R
L± jX
L
III, calculate the numerical value of two tunable capacitors, and through bivariate automatic control system two electric capacity of adjustment synchronously, realizes that real-time transmission system matees according to the network matching theory.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102638280A (en) * | 2012-04-19 | 2012-08-15 | 汤姆逊广播电视技术(北京)有限公司 | Self-adaption tuning system of middle-wave broadcast transmitting antenna |
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| CN101019032A (en) * | 2004-09-14 | 2007-08-15 | 皇家飞利浦电子股份有限公司 | Circuit for detecting the impedance of a load |
| US20080129407A1 (en) * | 2004-11-09 | 2008-06-05 | Daihen Corporation | Impedance matching apparatus |
| CN101509944A (en) * | 2009-03-13 | 2009-08-19 | 摩比天线技术（深圳）有限公司 | Standing wave ratio measurement method and apparatus |
| CN101882936A (en) * | 2009-05-08 | 2010-11-10 | 赵洪亮 | EAST-ICRF (Experimental Advanced Superconducting Tokamak-Ion Cyclotron Resonant Heating) transmitter impedance matching and regulating system |
| CN102055491A (en) * | 2010-04-14 | 2011-05-11 | 锐迪科创微电子（北京）有限公司 | Radio frequency front-end module and mobile communication device provided with same |
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2011
- 2011-05-20 CN CN201110131560A patent/CN102324947A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101019032A (en) * | 2004-09-14 | 2007-08-15 | 皇家飞利浦电子股份有限公司 | Circuit for detecting the impedance of a load |
| US20080129407A1 (en) * | 2004-11-09 | 2008-06-05 | Daihen Corporation | Impedance matching apparatus |
| CN101509944A (en) * | 2009-03-13 | 2009-08-19 | 摩比天线技术（深圳）有限公司 | Standing wave ratio measurement method and apparatus |
| CN101882936A (en) * | 2009-05-08 | 2010-11-10 | 赵洪亮 | EAST-ICRF (Experimental Advanced Superconducting Tokamak-Ion Cyclotron Resonant Heating) transmitter impedance matching and regulating system |
| CN102055491A (en) * | 2010-04-14 | 2011-05-11 | 锐迪科创微电子（北京）有限公司 | Radio frequency front-end module and mobile communication device provided with same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102638280A (en) * | 2012-04-19 | 2012-08-15 | 汤姆逊广播电视技术(北京)有限公司 | Self-adaption tuning system of middle-wave broadcast transmitting antenna |
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Application publication date: 20120118 |