CN102315240A - High-voltage nitride LED (Light-Emitting Diode) circuit and corresponding high-voltage nitride LED device - Google Patents
High-voltage nitride LED (Light-Emitting Diode) circuit and corresponding high-voltage nitride LED device Download PDFInfo
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Abstract
Description
技术领域 technical field
本发明属于发光器件制造领域,涉及一种发光器件的结构设计与制造,尤其涉及一种集成反向放电二极管的高压氮化物LED器件。The invention belongs to the field of light-emitting device manufacturing, and relates to a structural design and manufacture of a light-emitting device, in particular to a high-voltage nitride LED device integrating a reverse discharge diode.
背景技术 Background technique
随着以氮化物为基础的高亮度LED应用的开发,新一代绿色环保固体照明光源氮化物LED已成为研究的重点,尤其是以第三代半导体氮化镓(GaN)为代表的蓝色LED的开发。以GaN、氮化铟镓(InGaN)和氮化铝镓(AlGaN)合金为主的III族氮化物半导体材料具有宽的直接带隙、内外量子效率高、高热导率、耐高温、抗腐蚀、抗震性、高强度和高硬度等特性,是世界上目前制造高亮度发光器件的理想材料。With the development of nitride-based high-brightness LED applications, a new generation of green and environmentally friendly solid-state lighting source nitride LEDs has become the focus of research, especially blue LEDs represented by the third-generation semiconductor gallium nitride (GaN) development. Group III nitride semiconductor materials based on GaN, indium gallium nitride (InGaN) and aluminum gallium nitride (AlGaN) alloys have wide direct bandgap, high internal and external quantum efficiency, high thermal conductivity, high temperature resistance, corrosion resistance, Shock resistance, high strength, and high hardness are ideal materials for manufacturing high-brightness light-emitting devices in the world.
随着LED背光应用、路灯等功能性照明领域的应用快速发展,高压LED器件将成为照明领域中的一个发展趋势。要实现LED器件的高压供电,需要将多个LED串联在一起。但是,LED器件在制造或使用的过程中,由于电荷或电场的存在而产生电荷转移,从而形成两个电压极性相反的能量叫静电。静电电荷会不断积累,如果静电缺乏泄放通道,不能及时释放,那么电荷能量经过一段时间会累计到很高的数值,一旦超过LED芯片的最大承受值,电荷将以极短的瞬间(纳秒级别)在LED两个电极层之间进行放电。由于静电放电现象往往在电阻值很小、电极周边的位置发生,因此,在这些很小的电阻上泄放电压瞬间上升,泄放电流也会相应的瞬间变大,产生功率焦耳的热量,从而在导电层之间局部,往往是在电阻值最小、电极周边的位置上形成高温,高温将会把导电层之间熔融成一些小孔,从而造成漏电、暗亮、死灯、电性飘移等现象,甚至烧毁LED发光器件。而对于多个发光二极管串联的高压LED,只要其中一个LED因静电作用被破坏,整组LED组件就会失效,从而使高压LED器件因为遭受到静电损害而大大降低可靠性。With the rapid development of LED backlight applications, street lamps and other functional lighting applications, high-voltage LED devices will become a development trend in the lighting field. To realize high-voltage power supply of LED devices, multiple LEDs need to be connected in series. However, in the process of manufacturing or using LED devices, charge transfer occurs due to the existence of charges or electric fields, thus forming two voltages with opposite polarities called static electricity. Electrostatic charges will continue to accumulate. If the static electricity lacks a discharge channel and cannot be released in time, then the charge energy will accumulate to a very high value after a period of time. Once the maximum withstand value of the LED chip is exceeded, the charge will be lost in a very short moment (nanoseconds). Level) discharges between the two electrode layers of the LED. Since the electrostatic discharge phenomenon often occurs at the position where the resistance value is small and around the electrode, the discharge voltage rises instantaneously on these small resistances, and the discharge current also increases instantaneously correspondingly, generating heat of power joules, thus Partially between the conductive layers, the high temperature is often formed at the position with the smallest resistance value and the periphery of the electrodes. The high temperature will melt the conductive layers into some small holes, resulting in leakage, dark light, dead lights, electrical drift, etc. Phenomenon, even burnt LED light-emitting devices. For high-voltage LEDs with multiple light-emitting diodes in series, as long as one of the LEDs is damaged due to static electricity, the entire set of LED components will fail, so that the reliability of high-voltage LED devices will be greatly reduced due to electrostatic damage.
因此,要想使高压LED在各类产品和各种环境里的使用,就必须提高高压LED的抗静电能力。人们正在试图从技术上尝试各种能提高LED的抗静电能力的方法。比如其中一种方式是在器件封装或电路制造时,将硅质材料制造的齐纳二极管独立的和LED器件并联在一起。的确,在LED器件上加接齐纳二极管能有效提高LED的抗静电能力。其实,发光二极管本身就属于半导体的P-N结二极管结构,如果在LED芯片制造过程中直接把放电二极管制造出来,并通过集成手段与发光二极管并联连接,就可以简化生产步骤,提高集成发光芯片自身的抗静电性能。Therefore, in order to use high-voltage LEDs in various products and environments, it is necessary to improve the antistatic ability of high-voltage LEDs. People are trying to technically try various methods that can improve the antistatic ability of LEDs. For example, one of the ways is to independently connect a Zener diode made of silicon material in parallel with an LED device during device packaging or circuit manufacturing. Indeed, adding a Zener diode to the LED device can effectively improve the antistatic ability of the LED. In fact, the light-emitting diode itself belongs to the P-N junction diode structure of the semiconductor. If the discharge diode is directly manufactured in the LED chip manufacturing process and connected in parallel with the light-emitting diode through integrated means, the production steps can be simplified and the integrated light-emitting chip itself can be improved. Antistatic properties.
综上所述,在制造III族氮化物高压LED发光芯片时一方面希望通过LED外延片自身质量的提高,以改善LED器件的抗静电能力,从而得到可靠的高压LED芯片。另一方面,在实际的实施过程中仍然存在着问题,亟待引进能有效改善上述缺陷的新方法,以解决第三代半导体材料使用面临的高压LED抗静电性能的二极管集成技术的问题。To sum up, when manufacturing III-nitride high-voltage LED light-emitting chips, on the one hand, it is hoped that the quality of the LED epitaxial wafer itself can be improved to improve the antistatic ability of the LED device, so as to obtain a reliable high-voltage LED chip. On the other hand, there are still problems in the actual implementation process, and it is urgent to introduce new methods that can effectively improve the above defects, so as to solve the problem of diode integration technology of high-voltage LED antistatic performance faced by the third-generation semiconductor materials.
发明内容 Contents of the invention
本发明所要解决的技术问题是提供一种能提高高压氮化物LED抗静电能力的方法。The technical problem to be solved by the present invention is to provide a method capable of improving the antistatic ability of high-voltage nitride LEDs.
为解决上述问题,本发明提出了一种高压氮化物LED电路,包括多个发光二极管串联成一路发光二极管,所述一路发光二极管按序连续划分成n组,每组发光二极管与一个放电二极管反向并联,其中n为自然数。In order to solve the above problems, the present invention proposes a high-voltage nitride LED circuit, which includes a plurality of light-emitting diodes connected in series to form one light-emitting diode, and the one-way light-emitting diodes are sequentially and continuously divided into n groups, and each group of light-emitting diodes is inversely connected to a discharge diode. To parallel, where n is a natural number.
相应地,本发明提供了一种高压氮化物LED器件,包括基底层以及形成在基底层上的第一器件区域和第二器件区域,所述第一器件区域内制作有N*M-K个发光二极管,所述第二器件区域内制作有K个放电二极管,使得基底层上集成的发光二极管和放电二极管的总数为N*M个,所述第一器件区域内的发光二极管串联成一路发光二极管,并按序连续划分成n组,每组发光二极管与第二器件区域内的一个放电二极管反向并联,其中,N、M、K、n为自然数,且N和M不同时为1、n≤N*M-K、K≤N*M/2。Correspondingly, the present invention provides a high-voltage nitride LED device, including a base layer and a first device region and a second device region formed on the base layer, and N*M-K light-emitting diodes are fabricated in the first device region , K discharge diodes are fabricated in the second device region, so that the total number of light-emitting diodes and discharge diodes integrated on the base layer is N*M, and the light-emitting diodes in the first device region are connected in series to form one light-emitting diode, And sequentially and continuously divided into n groups, each group of light-emitting diodes is connected in antiparallel with a discharge diode in the second device area, wherein, N, M, K, n are natural numbers, and N and M are not 1 at the same time, and n≤ N*M-K, K≤N*M/2.
相应地,本发明还提供了一种高压氮化物LED器件,包括基底层以及均匀分布在基底层上的n个单元,每个单元依次按序连续串联,所述每个单元包括一组发光二极管和与该组发光二极管反向并联的一个放电二极管,所述每个单元中的一组发光二极管依次串联连接,其中n为自然数。Correspondingly, the present invention also provides a high-voltage nitride LED device, which includes a base layer and n units evenly distributed on the base layer, each unit is sequentially connected in series, and each unit includes a group of light-emitting diodes and a discharge diode antiparallel to the group of light emitting diodes, a group of light emitting diodes in each unit are sequentially connected in series, wherein n is a natural number.
通过金属有机化学气相淀积生长LED外延区后,通过采用集成的放电二极管技术,在没有改变LED外延结构的前提下,有效利用了原有芯片的自身结构特性,通过一些简单的工艺就将多个LED分组,且每组LED分别和相应的放电二极管集成反向并联,不仅能制作高压LED器件,以提高一组LED的光通量,而且由于放电二极管在制造过程中与LED同步生成,因此,当一个反向的静电电荷积累瞬间冲击LED时,经过放电二极管,这些电荷时刻都会被放电二极管释放掉,因此,提高了抗静电性能,防止LED静电损害,延长了LED的使用寿命,降低了成本。After growing the LED epitaxial region by metal-organic chemical vapor deposition, the integrated discharge diode technology is used to effectively utilize the structural characteristics of the original chip without changing the LED epitaxial structure. LEDs are grouped, and each group of LEDs is integrated with the corresponding discharge diodes in antiparallel, not only to make high-voltage LED devices to improve the luminous flux of a group of LEDs, but also because the discharge diodes are generated synchronously with the LEDs during the manufacturing process. Therefore, when When a reverse electrostatic charge accumulates and instantly impacts the LED, the charge will be released by the discharge diode at any time through the discharge diode. Therefore, the antistatic performance is improved, the LED is prevented from being damaged by static electricity, the service life of the LED is extended, and the cost is reduced.
附图说明 Description of drawings
图1显示了本发明一种高压氮化物LED电路的示意图。Fig. 1 shows a schematic diagram of a high-voltage nitride LED circuit of the present invention.
图2显示了本发明一种高压氮化物LED器件的平面连接示意图。Fig. 2 shows a schematic diagram of plane connection of a high-voltage nitride LED device of the present invention.
图3显示了图2所示的高压氮化物LED器件的A-A截面示意图。FIG. 3 shows a schematic cross-section A-A of the high-voltage nitride LED device shown in FIG. 2 .
图4显示了本发明另一种高压氮化物LED器件的平面连接示意图。Fig. 4 shows a schematic diagram of plane connection of another high-voltage nitride LED device of the present invention.
图5显示了图4所示的高压氮化物LED器件的B-B截面示意图。FIG. 5 shows a B-B cross-sectional schematic diagram of the high-voltage nitride LED device shown in FIG. 4 .
其中,附图标记说明如下:Wherein, the reference signs are explained as follows:
L100 一路发光二极管L100 LED all the way
L-1、L-2、......、L-n 每组发光二极管L-1, L-2,..., L-n Each group of LEDs
L1、L2、......、Li、......、LN*M-K 发光二极管L1, L2,..., Li,..., LN*M-K LED
L01、L02、......、L0j、......、L0n(L0K) 放电二极管L01, L02,..., L0j,..., L0n(L0K) discharge diode
D1第一器件区域 D2第二器件区域D1 first device area D2 second device area
C1、......、Cj、......、Cn 二极管单元C1,...,Cj,...,Cn diode unit
200衬底 202低温成核层 204非掺杂氮化物层 206N型氮化物层 208基底层 209多量子阱 210第一P型氮化物层 211第二P型氮化物层 212P型氮化物层 213多层外延结构200
214衬底凹槽214 substrate groove
216放电二极管的N电极 218放电二极管的P电极216 N electrode of discharge diode 218 P electrode of discharge diode
220导电透明层220 conductive transparent layer
222绝缘层222 insulating layer
224发光二极管的P型电极 226发光二极管的N型电极224 P-type electrode of light-emitting diode 226 N-type electrode of light-emitting diode
228发光二极管P型电极与放电二极管N电极连接金属228 Light-emitting diode P-type electrode and discharge diode N-electrode connection metal
230发光二极管N型电极与放电二极管P电极连接金属230 Light-emitting diode N-type electrode and discharge diode P electrode connection metal
300多个发光二极管串联的连线金属More than 300 light-emitting diodes connected in series
具体实施方式 Detailed ways
为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似推广,因此本发明不受下面公开的具体实施的限制。In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar extensions without violating the connotation of the present invention, so the present invention is not limited by the specific implementations disclosed below.
其次,本发明利用示意图进行详细描述,在详述本发明实施例时,为便于说明,表示器件结构的剖面图会不依一般比例作局部放大,而且所述示意图只是实例,其在此不应限制本发明保护的范围。此外,在实际制作中应包含长度、宽度及深度的三维空间尺寸。Secondly, the present invention is described in detail using schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional view showing the device structure will not be partially enlarged according to the general scale, and the schematic diagram is only an example, and it should not be limited here. The protection scope of the present invention. In addition, the three-dimensional space dimensions of length, width and depth should be included in actual production.
参见图1,本发明提供的一种高压氮化物LED电路,包括多个发光二极管通过P型电极、N型电极首尾串联连接成一路发光二极管L100。所述一路发光二极管L100按序连续划分成n组:L-1、L-2、...、L-n,每组发光二极管与一个放电二极管反向并联(L-1与放电二极管L01反向并联,L-2与L02反向并联,...,L-n与L0n反向并联),即每组发光二极管的首尾P型电极、N型电极与相应的放电二极管的N电极、P电极相连接,其中n为自然数。Referring to FIG. 1 , a high-voltage nitride LED circuit provided by the present invention includes a plurality of light-emitting diodes connected in series end-to-end through P-type electrodes and N-type electrodes to form a light-emitting diode L100. The LEDs L100 of one path are continuously divided into n groups in sequence: L-1, L-2, ..., L-n, and each group of LEDs is connected in reverse parallel with a discharge diode (L-1 is connected in reverse parallel with discharge diode L01 , L-2 and L02 anti-parallel, ..., L-n and L0n anti-parallel), that is, the first and last P-type electrodes and N-type electrodes of each group of light-emitting diodes are connected with the N electrodes and P electrodes of the corresponding discharge diodes, where n is a natural number.
其中,所述每组发光二极管包括的发光二极管数目可以相同或不同,且每组发光二极管连接至不同的放电二极管。Wherein, the numbers of light emitting diodes included in each group of light emitting diodes may be the same or different, and each group of light emitting diodes is connected to different discharge diodes.
基于上述的高压氮化物LED电路,本发明提出了相应的高压氮化物LED器件及其制造方法以实现上述电路,下面将结合图2至图5进行具体说明。Based on the above-mentioned high-voltage nitride LED circuit, the present invention proposes a corresponding high-voltage nitride LED device and a manufacturing method thereof to realize the above-mentioned circuit, which will be described in detail below with reference to FIG. 2 to FIG. 5 .
参见图2,并配合参见图3,本发明提出的一种高压氮化物LED器件,包括基底层208以及形成在基底层208上的第一器件区域D1和第二器件区域D2,所述第一器件区域D1内制作有N*M-K个发光二极管Li(1≤i≤N*M-K),所述第二器件区域D2内制作有K个放电二极管L0j(1≤j≤K),使得基底层上集成的发光二极管和放电二极管的总数为N*M个,所述第一器件区域D1内的发光二极管串联成一路发光二极管,并按序连续划分成n组,每组发光二极管与第二器件区域D2内的一个放电二极管反向并联,其中,N、M、K、n为自然数,且N和M不同时为1、n≤N*M-K、K≤N*M/2。Referring to FIG. 2 and FIG. 3 together, a high-voltage nitride LED device proposed by the present invention includes a
其中,所述每个发光二极管的P型电极224、N型电极226首尾串联连接成一路发光二极管,每组发光二极管的首尾P型电极224、N型电极226连接到一个放电二极管的N电极216、P电极218上,且各组发光二极管分别连接至不同的放电二极管。Wherein, the P-
可选的,所述每组发光二极管包括的发光二极管的数量相同或不同。Optionally, the number of light emitting diodes included in each group of light emitting diodes is the same or different.
其次,多个所述高压氮化物LED器件制作在一LED芯片上,以N*M个发光二极管和放电二极管为一模块,通过切片和裂片工艺将LED芯片分裂,模块内不再进行切片和分裂。Secondly, multiple high-voltage nitride LED devices are manufactured on one LED chip, and N*M light-emitting diodes and discharge diodes are used as a module, and the LED chip is split by slicing and splitting processes, and slicing and splitting are no longer performed in the module .
然后,将所述各模块封装为一个高压氮化物LED并且所述每个高压氮化物LED由一个电源供电。Then, each module is packaged as a high-voltage nitride LED and each high-voltage nitride LED is powered by a power supply.
例如,本发明中的一种高压氮化物LED器件集成的二极管的总数为80个,其中,第一器件区域D1制作的发光二极管数目为71个,第二器件区域D2制作的放电二极管数目K为9个;所述发光二极管被分成n=9组,各组中发光二极管的个数依次可以为9、9、9、6、9、6、7、7、9,每组发光二极管分别与一个放电二极管反向并联。当然,各组发光二极管包括的发光二极管的数量也可以相同。当第一器件区域D1制作有70个发光二极管,第二器件区域D2制作有10个放电二极管时,可以将发光二极管分成10组,每组包括7个发光二极管,且每组分别与一个放电二极管反向并联。For example, the total number of diodes integrated in a high-voltage nitride LED device in the present invention is 80, wherein, the number of light-emitting diodes made in the first device region D1 is 71, and the number K of discharge diodes made in the second device region D2 is 9; the light-emitting diodes are divided into n=9 groups, and the number of light-emitting diodes in each group can be 9, 9, 9, 6, 9, 6, 7, 7, 9 in sequence, and each group of light-emitting diodes is connected with one The discharge diodes are connected in antiparallel. Certainly, the number of light emitting diodes included in each group of light emitting diodes may also be the same. When 70 light-emitting diodes are fabricated in the first device region D1 and 10 discharge diodes are fabricated in the second device region D2, the light-emitting diodes can be divided into 10 groups, each group includes 7 light-emitting diodes, and each group is connected to a discharge diode anti-parallel.
以上举例仅用于说明高压氮化物LED器件中发光二极管、放电二极管可采用的数目以及分组连接方式,并非用于限定本发明,只要在合理的布局范围内,M、N、K、n及各组发光二极管中包括的发光二极管数目都可以调整。The above examples are only used to illustrate the number and group connection methods of light-emitting diodes and discharge diodes in high-voltage nitride LED devices, and are not used to limit the present invention. As long as within a reasonable layout range, M, N, K, n and each The number of light emitting diodes included in the group of light emitting diodes can be adjusted.
参见图3,上述高压氮化物LED器件的制作方法,包括如下步骤:Referring to Fig. 3, the manufacturing method of the above-mentioned high-voltage nitride LED device includes the following steps:
S100:采用金属有机化学气相淀积方法在基底层上生长多层外延结构213。S100: growing a
所述基底层208由下至上依次包括衬底200、低温成核层202、未掺杂氮化物层204、N型氮化物层206。The
所述多层外延结构213由下至上依次包括多量子阱209、P型氮化物层212。The
所述P型氮化物层212由下至上依次包括第一P型氮化物层210、第二P型氮化物层211。The P-type nitride layer 212 includes a first P-type nitride layer 210 and a second P-type nitride layer 211 from bottom to top.
S101:对多层外延结构进行蚀刻停止在N型氮化物层。S101: Etching the multi-layer epitaxial structure stops at the N-type nitride layer.
对多层外延结构进行蚀刻停止在N型氮化物层,用以后续工艺制备发光二极管和放电二极管电极。The etching of the multi-layer epitaxial structure is stopped at the N-type nitride layer, which is used for preparing light-emitting diodes and discharge diode electrodes in subsequent processes.
S102:对所述基底层进行蚀刻停止在衬底用以制作衬底凹槽。S102: Etching the base layer to stop at the substrate to form substrate grooves.
对所述基底层208进行蚀刻,蚀刻停止在衬底200上,用以制作衬底凹槽214。所述衬底凹槽214通过贯穿多层外延结构213、N型氮化物层206、未掺杂氮化物层204、低温成核层202将后续工艺制备的发光二极管之间、放电二极管之间以及发光二极管与放电二极管之间进行隔离。The
S103:在第二P型氮化物层沉积导电透明层220。S103: Deposit a conductive
在所述第二P型氮化物层211上沉积导电透明层220,在所述导电透明层220上可以用来制备后续工艺中的发光二极管和放电二极管的P电极。A conductive
S104:根据所述高压氮化物LED的电路要求,在基底层上制作发光二极管、放电二极管的P电极和N电极。S104: According to the circuit requirements of the high-voltage nitride LED, fabricate the P electrode and the N electrode of the light emitting diode and the discharge diode on the base layer.
根据所述高压氮化物LED的电路要求,将基底层208划分用以后续制作发光二极管的第一器件区域D1和用以制作放电二极管的第二器件区域D2(见图2)。According to the circuit requirements of the high-voltage nitride LED, the
在基底层208上的第一器件区域D1中制作N*M-K个发光二极管的P型电极224、N型电极226,在第二器件区域D2中制作K个放电二极管的P电极218、N电极216,其中,N、M、K为自然数,K≤N*M/2。Make P-
其中,被隔离出来的第二器件区域D2要尽量小,以使在第二器件区域D2上制成的放电二极管的尺寸在保证工艺的条件下尽量小,第二器件区域D2的形状和位置不限于图2所示的情形,也可以根据用于制作发光二极管的第一器件区域D1的版图形状来调节D2的形状和位置,只要放电二极管集中排列在单一区域即所述第二器件区域D2中且第一器件区域D1和第二器件区域D2拼成矩形图形即可。Wherein, the isolated second device region D2 should be as small as possible, so that the size of the discharge diode made on the second device region D2 should be as small as possible under the condition of ensuring the process, and the shape and position of the second device region D2 should be different. Limited to the situation shown in FIG. 2 , the shape and position of D2 can also be adjusted according to the layout shape of the first device region D1 used to fabricate light emitting diodes, as long as the discharge diodes are arranged in a single region, that is, in the second device region D2 In addition, the first device region D1 and the second device region D2 can be assembled into a rectangular pattern.
例如,所述第一器件区域D1可以是朝任意方向开口的“L”型,则相应的第二器件区域D2位于一角,并与D1拼成矩形(见图2);或者所述第一器件区域D1是“回”字型,则相应的第二器件区域D2位于中央,与D1拼成矩形;或者所述第一器件区域D1还可以是朝任意方向开口的“凹”型,则相应的第二器件区域D2可以是一个“口”或者“凸”型并与D1拼成矩形;或者所述第一器件区域D1是“凸”型,则相应的第二器件区域D2可以是一个“凹”型并与D1拼成矩形。For example, the first device region D1 may be an "L" shape open in any direction, then the corresponding second device region D2 is located at one corner and forms a rectangle with D1 (see Figure 2); or the first device region If the region D1 is in the shape of "back", then the corresponding second device region D2 is located in the center and forms a rectangle with D1; or the first device region D1 can also be "concave" type opening in any direction, then the corresponding The second device region D2 can be a "mouth" or "convex" type and form a rectangle with D1; or the first device region D1 is a "convex" type, then the corresponding second device region D2 can be a "concave" ” and form a rectangle with D1.
本发明中所述第一器件区域D1和所述第二器件区域D2的形状不限于上述实例,只要所述第一器件区域D1和所述第二器件区域D2的形状可以完全匹配成有效的矩形图形,而不影响后续切片和裂片等工艺,且元件排列紧凑、布局布线合理,以提高多层外延结构213的利用效率。The shapes of the first device region D1 and the second device region D2 in the present invention are not limited to the above examples, as long as the shapes of the first device region D1 and the second device region D2 can be completely matched into an effective rectangle graphics, without affecting subsequent slicing and splitting processes, and the arrangement of components is compact, and the layout and wiring are reasonable, so as to improve the utilization efficiency of the
由于采用与通常LED兼容的制造工艺,不需要另加任何额外的步骤,解决了外接连接放电二极管导致LED芯片面积增大、成本增高的问题。Due to the adoption of a manufacturing process compatible with common LEDs, no additional steps are required, and the problems of increased area and cost of LED chips caused by external connection of discharge diodes are solved.
S105:除电极区域外生长绝缘层。S105: growing an insulating layer except for the electrode region.
其中,绝缘层222可以使用SiO2等材料等。Wherein, the insulating
S106:根据所述高压氮化物LED的电路要求进行分组设计,将发光二极管、放电二极管以及发光二极管与放电二极管的电极按照预先设计一次完成金属互连。S106: Carry out group design according to the circuit requirements of the high-voltage nitride LED, and complete the metal interconnection of the light-emitting diode, the discharge diode, and the electrodes of the light-emitting diode and the discharge diode at one time according to the pre-design.
为了实现本发明提供的一种高压氮化物LED器件,应当根据所述的高压氮化物LED的电路要求预先将多个发光二极管进行分组设计,分为n组(n为自然数)。然后,在电极上沉积金属,通过本步骤一次形成了发光二极管和放电二极管的各电极的欧姆接触,以及发光二极管的P型电极224和放电二极管的N电极216的连接金属228,发光二极管的N型电极226和放电二极管的P电极218的连接金属230,使每组发光二极管的首尾P型电极、N型电极与相应的放电二极管的N电极、P电极相连接,同时,形成了每组内的发光二极管的依次串联的连线金属300。In order to realize a high-voltage nitride LED device provided by the present invention, a plurality of light-emitting diodes should be grouped and designed in advance according to the circuit requirements of the high-voltage nitride LED, and divided into n groups (n is a natural number). Then, metal is deposited on the electrode, and the ohmic contact of each electrode of the light-emitting diode and the discharge diode is formed once by this step, and the
经过本步骤,第一器件区域D1中的所有发光二极管形成了串联,同时完成了n组发光二极管间的依次按序连接,且每组发光二极管与相应的放电二极管反向连接,实现了基于上述的高压氮化物LED的电路。After this step, all the light-emitting diodes in the first device region D1 are connected in series, and at the same time, the sequential connection between n groups of light-emitting diodes is completed, and each group of light-emitting diodes is connected to the corresponding discharge diode in reverse, realizing the realization based on the above The circuit of the high voltage nitride LED.
S107:多个所述高压氮化物LED器件制作在一LED芯片上,以N*M个发光二极管和放电二极管为一模块,通过切片和裂片工艺将LED芯片分裂,模块内不再进行切片和分裂,其中,每一模块中放电二极管可以为K个。S107: A plurality of the high-voltage nitride LED devices are manufactured on one LED chip, and N*M light-emitting diodes and discharge diodes are used as a module, and the LED chip is split by slicing and splitting processes, and the slicing and splitting are no longer performed in the module , where there may be K discharge diodes in each module.
S108:将所述各模块封装为一个高压氮化物LED并且所述每个高压氮化物LED由一个电源供电(图中未示)。S108: Package each module into a high-voltage nitride LED and each of the high-voltage nitride LEDs is powered by a power supply (not shown in the figure).
参见图4,并配合参见图5,本发明中还提出了另一种高压氮化物LED器件,包括基底层208以及均匀分布在基底层上的n个单元C1、...、Cj、...、Cn,所述每个单元Cj包括一组发光二极管和与该组发光二极反向并联的一个放电二极管L0j,所述每个单元内的一组发光二极管依次串联连接,所述各个单元间依次按序连续串联,其中n为自然数,1≤j≤n。Referring to Fig. 4 and referring to Fig. 5 together, another high-voltage nitride LED device is proposed in the present invention, which includes a
其中,所述每个单元内的各个发光二极管的P型电极224、N型电极226首尾串联连接成一组发光二极管,所述一组发光二极管的首尾P型电极、N型电极和一个放电二极管的N电极216、P电极218分别连接。所述每个单元间通过每个单元中的一组发光二极管的首尾P型电极、N型电极依次按序连续串联。Wherein, the P-
可选的,所述每个单元包括的发光二极管的数量相同或不同。Optionally, the number of light emitting diodes included in each unit is the same or different.
参见图5,上述高压氮化物LED器件的制作方法,包括如下步骤:Referring to Fig. 5, the manufacturing method of the above-mentioned high-voltage nitride LED device includes the following steps:
S100至S103的制作步骤及工艺参见图3中S100至S103描述的制作步骤及工艺,这里不再赘述。For the manufacturing steps and processes from S100 to S103, refer to the manufacturing steps and processes described in S100 to S103 in FIG. 3 , which will not be repeated here.
S104:根据所述高压氮化物LED的电路要求,在基底层上制作发光二极管、放电二极管的P电极和N电极。S104: According to the circuit requirements of the high-voltage nitride LED, fabricate the P electrode and the N electrode of the light emitting diode and the discharge diode on the base layer.
根据图4所述高压氮化物LED的电路要求,将基底层208均匀划分为用以后续工艺的n个单元,所述每个单元用于制作多个发光二极管和一个放电二极管,其中,n为自然数(见图4)。According to the circuit requirements of the high-voltage nitride LED described in FIG. 4, the
在基底层208上的所述每个单元中制作N*M-K个发光二极管的P型电极224、N型电极226和制作K个放电二极管的P电极218、N电极216,其中,N、M、K为自然数,K≤N*M/2。In each unit on the
其中,被隔离出来的放电二极管的尺寸在保证工艺的条件下尽量小,放电二极管的形状和位置不限于图4所示的情形,也可以根据每个单元中的发光二极管的版图调节被排列在每个单元中任意区域,只要元件排列紧凑、布局布线合理,以提高多层外延结构213的利用效率。Wherein, the size of the isolated discharge diode is as small as possible under the condition of ensuring the process. The shape and position of the discharge diode are not limited to the situation shown in FIG. In any area of each unit, as long as the components are arranged compactly and the layout and wiring are reasonable, the utilization efficiency of the
S105:除电极区域外生长绝缘层。S105: growing an insulating layer except for the electrode region.
其中,绝缘层222可以使用SiO2等材料等。Wherein, the insulating
S106:根据所述高压氮化物LED的电路要求进行单元设计,将发光二极管、放电二极管以及发光二极管与放电二极管的电极按照预先设计一次完成金属互连。S106: Carry out unit design according to the circuit requirements of the high-voltage nitride LED, and complete the metal interconnection of the light-emitting diode, the discharge diode, and the electrodes of the light-emitting diode and the discharge diode at one time according to the pre-design.
为了实现本发明提供的一种高压氮化物LED器件,应当根据所述的高压氮化物LED的电路要求预先将发光二极管和放电二极管分成n个单元(n为自然数)。然后,在电极上沉积金属,通过本步骤一次形成了发光二极管和放电二极管的个电极的欧姆接触,以及发光二极管的P型电极224和放电二极管的N电极216的连接金属228,发光二极管的N型电极226和放电二极管的P电极218的连接金属230,使单元Cj发光二极管的首尾P型电极、N型电极与一个放电二极管的N电极、P电极相连接,同时,形成了单元内的发光二极管的依次串联的连线金属300。In order to realize a high-voltage nitride LED device provided by the present invention, the light-emitting diode and the discharge diode should be divided into n units (n is a natural number) in advance according to the circuit requirements of the high-voltage nitride LED. Then, metal is deposited on the electrode, and the ohmic contact of each electrode of the light-emitting diode and the discharge diode is formed once by this step, and the
参见图4,通过连线金属300将所述每个单元中的每个发光二极管的P型电极、N型电极首尾串联连接成一组发光二极管,所述每个单元包括一组发光二极管和与该组发光二极管反向连接的一个放电二极管,所述反向连接是所述每个单元中的一组发光二极管的首尾P型电极、N型电极和一个放电二极管的N电极、P电极分别连接,所述每个单元间通过每个单元中的一组发光二极管的首尾P型电极、N型电极进行按序连续串联。Referring to FIG. 4 , the P-type electrodes and N-type electrodes of each light-emitting diode in each unit are connected in series end-to-end through the
经过本步骤,每个单元中的所有发光二极管形成了串联并与相应的放电二极管反向连接,同时完成了n个单元之间的依次按序连接,实现了基于上述的高压氮化物LED的电路。After this step, all the light-emitting diodes in each unit are connected in series and reversely connected with the corresponding discharge diode, and at the same time, the sequential connection between n units is completed, and the circuit based on the above-mentioned high-voltage nitride LED is realized. .
由于采用与通常LED兼容的制造工艺,不需要另加任何额外的步骤。Due to the use of a manufacturing process compatible with conventional LEDs, no additional steps are required.
S107:多个所述高压氮化物LED器件制作在一LED芯片上,以n个单元为一模块,通过切片和裂片工艺将LED芯片分裂,模块内不再进行切片和分裂。S107: A plurality of the high-voltage nitride LED devices are manufactured on one LED chip, and n units are used as a module, and the LED chip is split through a slicing and splitting process, and the slicing and splitting are no longer performed in the module.
S108:将所述各模块封装为一个高压氮化物LED并且所述每个高压氮化物LED由一个电源供电。S108: Package each module into a high-voltage nitride LED, and each high-voltage nitride LED is powered by a power supply.
由上述任何一种高压氮化物LED器件结构可知,在金属有机化学气相淀积工艺生长LED结构后,直接在LED结构上采用通常的制作工艺同步制造出集成的发光二极管和放电二极管,不仅防止LED被静电损坏,延长了LED的使用寿命,而且简化了生产工艺。It can be seen from any of the above-mentioned high-voltage nitride LED device structures that after the LED structure is grown by the metal organic chemical vapor deposition process, the integrated light-emitting diode and the discharge diode are manufactured directly on the LED structure using the usual manufacturing process, which not only prevents the LED Being damaged by static electricity prolongs the service life of the LED and simplifies the production process.
上述任何一种高压氮化物LED器件的制作方法均可以采用正面或倒装的封装方法。优选的,采用倒装的封装形式,从基底层一侧发光,可以改善出光效率和散热性。The fabrication method of any one of the above-mentioned high-voltage nitride LED devices can adopt a front-side or flip-chip packaging method. Preferably, a flip-chip package is used to emit light from the side of the base layer, which can improve light extraction efficiency and heat dissipation.
上述本发明中的不同实施例中涉及到的发光二极管Li、发光二极管组L-j、放电二极管L0j、单元Cj均不限于上述实施例的数量,可以根据实际情况的需要制备。另外,利用整流的交流电源供电装置也可以用于本发明的发光二极管芯片,同样属于本专利的保护范围。The light-emitting diode Li, light-emitting diode group L-j, discharge diode L0j, and unit Cj involved in the above-mentioned different embodiments of the present invention are not limited to the number of the above-mentioned embodiments, and can be prepared according to actual needs. In addition, the rectified AC power supply device can also be used for the LED chip of the present invention, which also belongs to the protection scope of this patent.
本发明中提供的不同实施例,通过上述步骤制得与放电二极管相连接的发光二极管,避免了以往在制造过程中没有同步制备放电二极管,而发光二极管随之工艺的完成就因为抗静电性能不高导致被瞬间极短的电流被击穿的风险,提高了高压氮化物LED器件的抗静电能力和延长了LED的使用寿命,从而得到了高压的集成反向并联的LED发光器件。According to the different embodiments provided in the present invention, the light-emitting diodes connected with the discharge diodes are produced through the above steps, which avoids the fact that the discharge diodes were not prepared synchronously in the manufacturing process in the past, and the completion of the process of the light-emitting diodes is due to poor antistatic performance. The high risk of being broken down by an instantaneous extremely short current improves the antistatic ability of the high-voltage nitride LED device and prolongs the service life of the LED, thereby obtaining a high-voltage integrated reverse-parallel LED light-emitting device.
本发明虽然以较佳实施例公开如上,但其并不是用来限定权利要求,任何本领域技术人员在不脱离本发明的精神和范围内,都可以做出可能的变动和修改,因此本发明的保护范围应当以本发明权利要求所界定的范围为准。Although the present invention is disclosed as above with preferred embodiments, it is not used to limit the claims. Any person skilled in the art can make possible changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection should be based on the scope defined by the claims of the present invention.
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Application publication date: 20120111 |