CN102269933B - Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle - Google Patents

Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle Download PDF

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Publication number
CN102269933B
CN102269933B CN 201110021357 CN201110021357A CN102269933B CN 102269933 B CN102269933 B CN 102269933B CN 201110021357 CN201110021357 CN 201110021357 CN 201110021357 A CN201110021357 A CN 201110021357A CN 102269933 B CN102269933 B CN 102269933B
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CN
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Prior art keywords
nozzle
photoresist
system
fixed
resist
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CN 201110021357
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Chinese (zh)
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CN102269933A (en )
Inventor
王阳
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沈阳芯源微电子设备有限公司
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Abstract

The invention relates to the field of semiconductor, and specifically provides an auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle in a semiconducting even glue developing equipment. The device can be used for auxiliary positioning and semi-automatic fixing during manually replacing of a plurality of photoresist nozzles and has advantages of convenient replacing, adaptation to replacing of a plurality of nozzles, accurate positioning and firm fixing. The device comprises a carriage fixing system for photoresist nozzles and a photoresist nozzle system arranged on the carriage fixing system for photoresist nozzles. The carriage fixing system for photoresist nozzles is equipped with a cylinder carriage and a nozzle carriage which are connected with each other; the cylinder carriage has a pneumatic detent fixed thereon, and locating detents are arranged on a motion portion of the pneumatic detent. The photoresist nozzle system is equipped with a nozzle body, a nozzle and a guiding fixing clamp column, wherein the nozzle and the guiding fixing clamp column are parallel and fixed on the nozzle body. According to the invention, problems in prior art, such as time-consuming and labor-consuming replacing and influence to capacity, can be solved.

Description

光刻胶喷嘴更换辅助定位半自动固定装置 Semiautomatic resist nozzle changing secondary positioning fixture

技术领域 FIELD

[0001] 本发明涉及半导体领域,具体为一种用以在半导勻胶显影设备中光刻胶喷嘴更换辅助定位半自动固定装置,用以在多光刻胶喷嘴手动更换时的辅助定位和半自动固定,达到更换方便,适应多喷嘴更换,定位准确,固定结实的优点。 [0001] The present invention relates to the field of semiconductors, particularly as a semiconductor used in the developing apparatus of photoresist spin coating nozzle semiautomatic replacement secondary positioning fixture for positioning when replacing the auxiliary multi-nozzle photoresist manual and semi-automatic fixed, to achieve the advantages of easy to replace, to adapt to a multi-nozzle replacement, accurate positioning, fixing solid.

背景技术 Background technique

[0002] 目前,半导体后道封装中,一个勻胶显影设备需要在一个勻胶单元中集成多种光刻胶的喷嘴系统,达到一机多用,降低成本的需要。 [0002] Currently, the channel of the semiconductor package, a spin coating photoresist developing apparatus needs to integrate multiple nozzle system in a spin coating unit, to a machine, the need to reduce costs. 但是一般的喷嘴更换由于胶种众多,光刻胶供应管路大小不同,就需要手动更换。 However, in general many types of plastic because the nozzle replacement, the resist supply line different size, it is necessary to manually replace. 很多时候更换费时费力,严重影响生产的产能, 有些时候还由于固定失误,造成影响工艺的结果。 In many cases replace time-consuming, seriously affecting production capacity, sometimes also due to the fixed errors, the result of the impact caused by the process.

发明内容 SUMMARY

[0003] 为了克服上述的种种不足,本发明提供一种光刻胶喷嘴更换辅助定位半自动固定装置,解决现有技术中存在的更换费时费力、影响产能等问题,作为半导体生产中半导体方形基片旋转自动紧固装置,通过利用旋转离心作用,达到快速装卸和安全旋转方形基片的 [0003] In order to overcome the above shortcomings, the present invention provides a photoresist nozzle semiautomatic replacement secondary positioning fixing means to replace time-consuming solution, affect the production capacity and other problems present in the prior art, a semiconductor manufacturing rectangular semiconductor substrate automatically rotate the fastening means, by using a rotating centrifugal action, to achieve rapid and safe handling rotating rectangular substrate

双重需要。 Dual needs.

[0004] 本发明的技术方案是: [0004] aspect of the present invention is:

[0005] 一种光刻胶喷嘴更换辅助定位半自动固定装置,该装置设有光刻胶喷嘴的托架固定系统和光刻胶喷嘴系统,光刻胶喷嘴系统安装于光刻胶喷嘴的托架固定系统上; [0005] A resist nozzle semiautomatic replacement secondary positioning fixing means is provided with a bracket fixed nozzle system photoresist and photoresist nozzle system, the nozzle system is attached to the photoresist resist nozzle bracket fixed on the system;

[0006] 光刻胶喷嘴的托架固定系统设有气缸托架和喷嘴托架,气缸托架和喷嘴托架相连,在气缸托架上固定有气爪,在气爪的动作部分安装有定位爪; [0006] photoresist system is provided with a nozzle connected to the fixed bracket and the cylinder bracket nozzle carrier, the nozzle carrier and the carrier cylinder, the gripper is fixed on the cylinder bracket, the gripper portion is attached to the positioning operation claw;

[0007] 光刻胶喷嘴系统设有喷嘴体、喷嘴和导向固定卡柱,喷嘴和导向固定卡柱平行,喷嘴和导向固定卡柱固定在喷嘴体上。 [0007] The resist nozzle system provided with a nozzle body, a nozzle and a fixed guide post cards, post cards nozzle and the fixed guide parallel to the fixed nozzle guide and locking studs fixed on the nozzle body.

[0008] 所述的光刻胶喷嘴更换辅助定位半自动固定装置,光刻胶喷嘴系统垂直放在喷嘴托架上,光刻胶喷嘴系统通过喷嘴和导向固定卡柱同时与喷嘴托架定位;光刻胶喷嘴系统放到喷嘴托架上后,气爪闭合,同时带动气爪上连接的定位爪闭合,固定喷嘴;需要取走光刻胶喷嘴系统时,气爪张开,取走光刻胶喷嘴系统。 The photoresist [0008] The semi-automatic positioning auxiliary nozzle replacement fixture, the photoresist on the vertical nozzle system nozzle carrier, the nozzle and the resist nozzle system through fixed guide post cards and the nozzle while the carriage is positioned; light after the glue nozzle system engraved onto the nozzle carrier, the gripper closed while the positioning drive connected to the gripper jaws closed, the fixed nozzle; photoresist removal nozzle system when required, the gripper opening, the photoresist is removed nozzle system.

[0009] 所述的光刻胶喷嘴更换辅助定位半自动固定装置,喷嘴体放在喷嘴托架的带有定位孔的平台上,喷嘴通过定位孔来定位,在放置光刻胶喷嘴体的同时,和喷嘴平行的导向固定卡柱,同时放置在定位孔平台后面的定位爪中。 The photoresist [0009] The semi-automatic positioning nozzle replacement aid fixing means on the nozzle body with the nozzle bracket platform positioning holes, positioning holes positioned by the nozzle, the nozzle body in place while the photoresist, and a nozzle fixed parallel guide post card, while the positioning hole disposed at the back of the platform claws.

[0010] 本发明的优点及有益效果是: [0010] The advantages of the present invention and the beneficial effects:

[0011] 1、本发明可以实现装卸快速。 [0011] 1, the present invention can achieve rapid loading and unloading.

[0012] 2、本发明可以实现定位准确。 [0012] 2, the present invention can be achieved accurate positioning.

[0013] 3、本发明可以实现固定牢固、安全。 [0013] 3, the present invention may be fixed firmly secure.

[0014] 总之,本发明用以在多光刻胶喷嘴手动更换时的辅助定位和半自动固定,达到更换方便,适应多喷嘴更换,定位准确,固定结实的优点。 [0014] In summary, the present invention is to replace the manual multi-nozzle photoresist assisted positioning and semi-fixed, to achieve the advantages of easy to replace, to adapt to a multi-nozzle replacement, accurate positioning, fixing solid. 附图说明 BRIEF DESCRIPTION

[0015] 图1是本发明光刻胶喷嘴的托架固定系统示意图。 [0015] FIG. 1 is a schematic view of a bracket fixed to the resist nozzle system of the present invention.

[0016] 图2是本发明光刻胶喷嘴系统示意图。 [0016] FIG. 2 is a schematic view of a nozzle system of the present invention is a photoresist.

[0017] 图3是本发明光刻胶喷嘴的托架固定系统和光刻胶喷嘴系统固定后的示意图。 [0017] FIG. 3 is a schematic view of a nozzle of fixed photoresist systems of the present invention and a photoresist brackets nozzle system.

[0018] 图中,1气缸托架;2气爪;3定位爪;4喷嘴托架;5导向固定卡柱;6喷嘴;7喷嘴体;8定位孔。 [0018] FIG, 1 a cylinder bracket; gripper 2; 3 claw; nozzle carrier 4; 5 fixed guide post card; nozzle 6; 7 nozzle body; a positioning hole 8.

具体实施方式 Detailed ways

[0019] 如图1-3所示,本发明在半导体生产中光刻胶喷嘴更换辅助定位半自动固定装置,主要包括:一个光刻胶喷嘴的托架固定系统(图1)和一个光刻胶喷嘴系统(图2),或者一个光刻胶喷嘴的托架固定系统和多个光刻胶喷嘴系统,光刻胶喷嘴系统安装于光刻胶喷嘴的托架固定系统上。 [0019] 1-3, the present invention is replacement of the auxiliary positioning semiautomatic resist nozzle secured in a semiconductor manufacturing apparatus, including: a bracket photoresist nozzle system (FIG. 1) and a photoresist bracket system nozzle system (FIG. 2), or a photoresist nozzle system and a plurality of brackets resist nozzle system, the nozzle system is attached to the photoresist on the photoresist nozzle.

[0020] 如图1所示,光刻胶喷嘴的托架固定系统是由气缸托架1和喷嘴托架4连接而成, 在气缸托架1上固定有气爪2,在气爪2的动作部分安装有一对定位爪3。 [0020] 1, the resist nozzle bracket system is a cylinder carriage 4 and the nozzle connected to each carriage, gripper 2 is fixed to a bracket on the cylinder 1, the gripper 2 an operation portion with a pair of claws 3.

[0021] 如图2所示,光刻胶喷嘴系统是由喷嘴体7、固定在喷嘴体7上的喷嘴6和导向固定卡柱5组成,喷嘴6和导向固定卡柱5平行。 [0021] 2, the resist nozzle system by the nozzle body 7 is fixed to the nozzle 76 and the guide posts 5 fixed to the card body composition nozzle, the nozzle 6 and the card 5 is fixed parallel guide posts.

[0022] 如图3所示,光刻胶喷嘴的托架固定系统是固定的,光刻胶喷嘴系统在喷嘴托架4 上方垂直放在喷嘴托架4上,通过喷嘴6和导向固定卡柱5同时定位的,放到喷嘴托架上以后,让气爪2闭合,同时带动气爪2上连接的定位爪3闭合,从而固定住喷嘴6。 [0022] 3, a photoresist nozzle bracket system is fixed, the resist nozzle system placed vertically above the nozzle carrier 4 on the nozzle bracket 4, fixed by a nozzle 6 and the guide post card 5 are simultaneously positioned, placed after the nozzle carrier, so that the gripper 2 is closed, while driving the gripper claws connected to the closure 23, so that fixed nozzles 6. 需要取走光刻胶喷嘴系统时,只需要让气爪2张开,即可取走光刻胶喷嘴系统。 If desired removal of the photoresist nozzle system, just let grippers 2 open, to resist removal of the nozzle system.

[0023] 本发明中,整个光刻胶喷嘴的托架固定系统是一个系统平台,在需要更换不同喷嘴6的时候,喷嘴体7放在喷嘴托架4的带有定位孔8的平台上,喷嘴6通过定位孔8来定位,作用是在放置光刻胶喷嘴系统的时候起到辅助定位的作用。 [0023] In the present invention, the entire resist nozzle bracket system is a system platform, needs to be replaced when a different nozzle 6, the nozzle body 7 is placed on the platform 8 of the nozzle bracket with a positioning hole 4, 8 the nozzle 6 is positioned by the positioning hole, role play a supporting role at the time of placing the photoresist positioned nozzle system. 在放置光刻胶喷嘴体7的同时,和喷嘴6平行的导向固定卡柱,同时放置在定位孔8平台后面的定位爪3中,然后定位爪3闭合,最终达到放置、定位和紧固的作用。 Placing the photoresist while the nozzle body 7, and the nozzle 6 is fixed parallel guide post card, placed in the rear while the positioning hole 3 8 internet positioning pawl, the positioning pawl 3 is closed and, ultimately placing, fastening and positioning of effect.

Claims (1)

  1. 1. 一种光刻胶喷嘴更换辅助定位半自动固定装置,其特征在于:该装置设有光刻胶喷嘴的托架固定系统和光刻胶喷嘴系统,光刻胶喷嘴系统安装于光刻胶喷嘴的托架固定系统上;光刻胶喷嘴的托架固定系统设有气缸托架和喷嘴托架,气缸托架和喷嘴托架相连,在气缸托架上固定有气爪,在气爪的动作部分安装有定位爪;光刻胶喷嘴系统设有喷嘴体、喷嘴和导向固定卡柱,喷嘴和导向固定卡柱平行,喷嘴和导向固定卡柱固定在喷嘴体上;光刻胶喷嘴系统垂直放在喷嘴托架上,光刻胶喷嘴系统通过喷嘴和导向固定卡柱同时与喷嘴托架定位;光刻胶喷嘴系统放到喷嘴托架上后,气爪闭合,同时带动气爪上连接的定位爪闭合,固定喷嘴;需要取走光刻胶喷嘴系统时,气爪张开,取走光刻胶喷嘴系统;喷嘴体放在喷嘴托架的带有定位孔的平台上,喷嘴通过定 1. A resist nozzle semiautomatic replacement secondary positioning fixture, wherein: the apparatus is provided with a bracket fixed nozzle system photoresist and photoresist nozzle system, the nozzle system is attached to the photoresist resist nozzle the bracket system; photoresist system is provided with nozzles connected to the bracket and the cylinder bracket nozzle carrier, the nozzle carrier and the carrier cylinder, the gripper is fixed on the cylinder bracket, in the operation of the gripper a positioning pawl mounting portion; resist nozzle system provided with a nozzle body, a nozzle and a fixed guide post cards, post cards nozzle and fixed parallel guide, and the guide nozzle is fixed to the fixing post cards nozzle body; resist vertical discharge nozzle system on the nozzle carrier, the nozzle and the resist nozzle system through fixed guide post cards and the nozzle while the carriage location; a photoresist nozzle system onto the nozzle carrier, the gripper closed while the positioning drive is connected to the gripper jaw is closed, the fixed nozzle; photoresist removal nozzle system when required, the gripper opening, removal of the resist nozzle system; nozzle body on the nozzle bracket platform having positioning holes, the nozzle by the constant 孔来定位,在放置光刻胶喷嘴体的同时,和喷嘴平行的导向固定卡柱,同时放置在定位孔平台后面的定位爪中。 Holes positioned in place while the resist nozzle body, and the nozzle is fixed parallel guide post card, while the positioning hole disposed at the back of the platform claws.
CN 201110021357 2011-01-19 2011-01-19 Auxiliary positioning semi-automatic fixing device for replacing photoresist nozzle CN102269933B (en)

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Publication number Priority date Publication date Assignee Title
CN103809390B (en) * 2012-11-14 2016-08-31 沈阳芯源微电子设备有限公司 A developing head
CN104597714A (en) * 2013-10-30 2015-05-06 沈阳芯源微电子设备有限公司 Gluing nozzle distribution device and method

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CN101474685A (en) 2009-01-16 2009-07-08 江苏格尔顿传动有限公司 Equipment for automatically processing vehicle steering universal-joint fork ear punch

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CN1611341A (en) 2003-10-28 2005-05-04 发那科株式会社 Aligning device for an injection nozzle
CN101428280A (en) 2008-12-23 2009-05-13 中国科学院广州能源研究所 Continuous washing device spray groove for band
CN101474685A (en) 2009-01-16 2009-07-08 江苏格尔顿传动有限公司 Equipment for automatically processing vehicle steering universal-joint fork ear punch

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