CN102269325A - Pipeline system and leakage detection method of pipeline system - Google Patents

Pipeline system and leakage detection method of pipeline system Download PDF

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Publication number
CN102269325A
CN102269325A CN2010101925092A CN201010192509A CN102269325A CN 102269325 A CN102269325 A CN 102269325A CN 2010101925092 A CN2010101925092 A CN 2010101925092A CN 201010192509 A CN201010192509 A CN 201010192509A CN 102269325 A CN102269325 A CN 102269325A
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CN
China
Prior art keywords
pipeline
pipe
line system
joint
test paper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010101925092A
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Chinese (zh)
Inventor
银宗强
姚念
罗钰萌
谭勇
郗志通
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Shanghai Corp
Wuhan Xinxin Semiconductor Manufacturing Co Ltd
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Wuhan Xinxin Semiconductor Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp, Wuhan Xinxin Semiconductor Manufacturing Co Ltd filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN2010101925092A priority Critical patent/CN102269325A/en
Publication of CN102269325A publication Critical patent/CN102269325A/en
Pending legal-status Critical Current

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Abstract

The invention provides a pipeline system and a leakage detection method of the pipeline system. The pipeline system comprises a first pipeline, a second pipeline and pH test paper, wherein the second pipeline is connected with the first pipeline, the pH test paper is arranged on the joint of the first pipeline and the second pipeline, and the pH test paper can effectively test if the pipeline system has chemical reagent leakage.

Description

Pipe-line system and pipe-line system leak detection method
Technical field
The present invention relates to intergrated circuit and make the field, particularly relate to a kind of pipe-line system and pipe-line system leak detection method.
Background technique
Make the field at intergrated circuit, semiconductor devices all needs just to be accomplished through many process steps, and these process steps nearly all need to use chemical reagent to finish.For example, in the wet etching process, need to use chemical reagent such as hydrofluoric acid, sulfuric acid and ammoniacal liquor; In chemical mechanical planarization process, then need to use citric acid solution.Therefore, in semiconductor factory, all can be provided with pipe-line system, utilize elements such as the configuration of pipeline of pipe-line system and control gear, chemical reagent is distributed to each technology board.Along with the pipeline quantity of pipe-line system is more and more, owing to reasons such as aging, burn into wearing and tearing, chemical reagent takes place in the joint of two pipelines leak and be difficult to avoid.
At present, the detecting method of pipe-line system leakage mainly contains two classes: direct Detection Method and indirect detection method.Direct Detection Method mainly adopts the method for physics or chemistry, as lay humidity transducer, the liquid that method direct detections such as diversion switch leak is installed, for example application number is that liquid that Chinese patents such as 94204155.0 and 94226766.4 all are based on leakage directly triggers sensor and implements to detect.Indirectly the leakage method is meant that the variation of physical state parameters such as the flow that causes according to pipeline leakage, pressure, sound implements to measure, its main detecting method has: negative pressure wave method, mass balance method, real-time model method, pressure gradient method, stress wave, sonic method etc., the detection device of implementing detection based on indirect leak detecting is more, and for example application number is 200510020194.2 the disclosed portable checker of pipeline leakage of Chinese patent.
But, in these above-mentioned detecting methods, just can detect the variation of leaking characteristic quantity when all being based on leak of liquid and arriving to a certain degree, then can't in time predict for the micro-leakage of the chemical reagent of pipeline.Therefore, in semiconductor factory, can the personnel of arranging work make regular check on pipe-line system, whether have chemical reagent to leak to judge pipe-line system (the especially joint of two pipelines) by naked-eye observation.But when the chemical reagent that trace is only arranged leaked, the staff also was difficult to observe.And for manufacture of semiconductor, employed chemical reagent all is acid solution or the alkaline solutions with severe corrosive, even these chemical reagent micro-leakages also can jeopardize the healthy of the interior staff of dust free room, and pollute the environment of dust free room, cause loss difficult to the appraisal.
Summary of the invention
The objective of the invention is to, a kind of pipe-line system is provided, to solve the problem that existing pipe-line system can't effectively detect the micro-leakage of chemical reagent.
Another object of the present invention is to, provide a kind of pipe-line system leak detection method, with the micro-leakage of effective signal piping joint chemical reagent.
For solving the problems of the technologies described above, the invention provides a kind of pipe-line system, described pipe-line system comprises first pipeline and second pipeline that is connected with described first pipeline, and described pipe-line system also comprises the PH test paper that is arranged at described first pipeline and the described second pipeline joint.
Optionally, in described pipe-line system, described PH test paper sticks to the joint of described first pipeline and described second pipeline.
Optionally, in described pipe-line system, described PH test paper is banded in the joint of described first pipeline and described second pipeline.
Optionally, in described pipe-line system, described first pipeline and described second pipeline are by being threaded.
Optionally, in described pipe-line system, the joint of described first pipeline and described second pipeline is provided with valve, and described PH test paper is arranged at the joint of described first pipeline and described valve, and described PH test paper is arranged at the joint of described second pipeline and described valve.
Optionally, in described pipe-line system, the joint of described first pipeline and described second pipeline is provided with flange, and described PH test paper is arranged at the joint of described first pipeline and described flange, and described PH test paper is arranged at the joint of described second pipeline and described flange.
Optionally, in described pipe-line system, the joint of described first pipeline and described second pipeline is provided with cutting ferrule, and described PH test paper is arranged at the joint of described first pipeline and described cutting ferrule, and described PH test paper is arranged at the joint of described second pipeline and described cutting ferrule.
The present invention also provides a kind of pipe-line system leak detection method, described pipe-line system comprises first pipeline, second pipeline that is connected with described first pipeline and is arranged at described first pipeline and the PH test paper of the second pipeline joint, described first pipeline and the second pipeline inside accommodate chemical reagent, described chemical reagent is acid solution or alkaline solution, and described pipe-line system leak detection method comprises: whether the color of observing described PH test paper changes; If the color of described PH test paper changes, judge that then the chemical reagent leakage takes place in the joint of described first pipeline and second pipeline; If the color of described PH test paper does not change, judge that then the chemical reagent leakage does not take place in the joint of described first pipeline and second pipeline.
Compared with prior art, the present invention has the following advantages:
Pipe-line system provided by the invention comprises the PH test paper that is arranged at first pipeline and the second pipeline joint, in case described pipe-line system generation chemical reagent leaks, the chemical reagent that oozes out can be absorbed by the PH test paper immediately, the color relation of described PH test paper can change, therefore, whether the staff can change by the color of observing the PH test paper and judge whether pipe-line system has chemical reagent to leak in the process of checking pipe-line system.
Description of drawings
The schematic representation of the pipe-line system that Fig. 1 provides for one embodiment of the invention;
The schematic representation of the pipe-line system that Fig. 2 provides for another embodiment of the present invention;
The schematic representation of the pipe-line system that Fig. 3 provides for yet another embodiment of the invention;
The schematic representation of the pipe-line system that Fig. 4 provides for further embodiment of this invention.
Embodiment
Below in conjunction with schematic representation the present invention is described in more detail, has wherein represented the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, because they can make the present invention because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
In the following passage, with way of example the present invention is described more specifically with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of the aid illustration embodiment of the invention lucidly.
Core concept of the present invention is, a kind of pipe-line system and pipe-line system leak detection method are provided, described pipe-line system comprises the PH test paper that is arranged at first pipeline and the second pipeline joint, in case described pipe-line system generation chemical reagent leaks, the chemical reagent that oozes out can be absorbed by described PH test paper immediately, the color relation of described PH test paper can change, therefore, whether the staff can change by the color of observing described PH test paper and judge whether described pipe-line system has chemical reagent to leak in the process of checking pipe-line system.
Please refer to Fig. 1, the schematic representation of the pipe-line system that it provides for one embodiment of the invention.As shown in Figure 1, described pipe-line system 100 comprises first pipeline 110, second pipeline 120 and PH test paper 130, and described second pipeline 120 is connected with first pipeline 110, and described PH test paper 130 is arranged at the joint of described first pipeline 110 and second pipeline 120.Described PH test paper 130 with low cost, and effectively whether signal piping system 100 the chemical reagent leakage phenomenon has taken place, if the chemical reagent leakage has taken place in described pipe-line system 100, the chemical reagent that oozes out can be absorbed by PH test paper 130, the color relation of described PH test paper 130 can change, and therefore, the staff is in the process of checking pipe-line system 100, can whether change by the color of observing PH test paper 130, judge whether described pipe-line system 100 has the chemical reagent micro-leakage.
In an embodiment of the present invention, described first pipeline 110 is provided with internal thread, described second pipeline 120 is provided with outside thread, described first pipeline 110 and second pipeline 120 are direct-connected by screw thread, and described PH test paper 130 is arranged at the threaded connection place of first pipeline 110 and second pipeline 120.
In an embodiment of the present invention, described PH test paper 130 can utilize two sided plaster to stick to the joint of described first pipeline 110 and second pipeline 120.Yet will be appreciated that, also can utilize alternate manner that described PH test paper 130 is fixed on the joint of first pipeline 110 and second pipeline 120, for example, can utilize band PH test paper 130 to be banded in the joint of described first pipeline 110 and second pipeline 120.
In an embodiment of the present invention, the length of described PH test paper 130 is greater than the girth of described first pipeline 110 and second pipeline 120, so that PH test paper 130 covers the joint of first pipeline 110 and second pipeline 120, thereby when guaranteeing have chemical reagent to leak in first pipeline 110 and second pipeline, 120 joints, the chemical reagent that oozes out can be absorbed by PH test paper 130.
Please refer to Fig. 2, it is the schematic representation of the pipe-line system that another embodiment of the present invention provided.As shown in Figure 2, the joint of described first pipeline 110 and second pipeline 120 is provided with valve 140, and described valve 140 can be used for controlling the flow of chemical reagent in first pipeline 110 and second pipeline 120.In another embodiment of the present invention, in described first pipeline 110 and the joint of valve 140 and the joint of second pipeline 120 and valve 140 PH test paper 130 is set all, to help detecting the micro-leakage whether each joint has chemical reagent.Certainly, described PH test paper 130 also can only be arranged at the joint of first pipeline 110 and valve 140; Perhaps, described PH test paper 130 only is arranged at the joint of second pipeline 120 and valve 140.
Please refer to Fig. 3, it is the schematic representation of the pipe-line system that yet another embodiment of the invention provided, and as shown in Figure 3, the joint of described first pipeline 110 and second pipeline 120 is provided with flange 150.In yet another embodiment of the invention, in described first pipeline 110 and the joint of flange 150 and the joint of second pipeline 120 and flange 150 PH test paper 130 is set all, to help detecting the micro-leakage whether each joint has chemical reagent.Certainly, described PH test paper 130 also can only be arranged at the joint of first pipeline 110 and flange 150; Perhaps, described PH test paper 130 only is arranged at the joint of second pipeline 120 and flange 150.
Please refer to Fig. 4, it is the schematic representation of the pipe-line system that further embodiment of this invention provided.As shown in Figure 4, the joint of described first pipeline 110 and second pipeline 120 is provided with cutting ferrule 160.In further embodiment of this invention, in described first pipeline 110 and the joint of cutting ferrule 160 and the joint of second pipeline 120 and cutting ferrule 160 PH test paper 130 is set all, to help detecting the micro-leakage whether each joint has chemical reagent.Certainly, described PH test paper 130 also can only be arranged at the joint of first pipeline 110 and cutting ferrule 160; Perhaps, described PH test paper 130 only is arranged at the joint of second pipeline 120 and cutting ferrule 160.
The embodiment of the invention also provides a kind of pipe-line system leak detection method, first pipeline 110 of described pipe-line system and second pipeline, 120 inside accommodate chemical reagent, described chemical reagent is acid solution or alkaline solution, and described pipe-line system leak detection method comprises: whether the color of observing PH test paper 130 changes; If the color of described PH test paper 130 changes, judge that then the chemical reagent leakage takes place in the joint of described first pipeline 110 and second pipeline 120; If the color of described PH test paper 130 does not change, judge that then the chemical reagent leakage does not take place in the joint of described first pipeline 110 and second pipeline 120.Even only there is the chemical reagent of trace to leak, the pipe-line system leak detection method of utilizing the embodiment of the invention to provide also can monitor timely and effectively, thereby the staff's is healthy in the guarantee dust free room, and guarantees that these chemical reagent can not endanger the environment of dust free room.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.

Claims (14)

1. a pipe-line system comprises first pipeline and second pipeline that is connected with described first pipeline, it is characterized in that, described pipe-line system also comprises the PH test paper that is arranged at described first pipeline and the described second pipeline joint.
2. pipe-line system as claimed in claim 1 is characterized in that, described PH test paper sticks to the joint of described first pipeline and described second pipeline.
3. pipe-line system as claimed in claim 1 is characterized in that, described PH test paper is banded in the joint of described first pipeline and described second pipeline.
4. pipe-line system as claimed in claim 1 is characterized in that, described first pipeline and described second pipeline are by being threaded.
5. pipe-line system as claimed in claim 1 is characterized in that, the joint of described first pipeline and described second pipeline is provided with valve.
6. pipe-line system as claimed in claim 5 is characterized in that described PH test paper is arranged at the joint of described first pipeline and described valve.
7. pipe-line system as claimed in claim 5 is characterized in that described PH test paper is arranged at the joint of described second pipeline and described valve.
8. pipe-line system as claimed in claim 1 is characterized in that, the joint of described first pipeline and described second pipeline is provided with flange.
9. pipe-line system as claimed in claim 8 is characterized in that described PH test paper is arranged at the joint of described first pipeline and described flange.
10. pipe-line system as claimed in claim 8 is characterized in that described PH test paper is arranged at the joint of described second pipeline and described flange.
11. pipe-line system as claimed in claim 1 is characterized in that, the joint of described first pipeline and described second pipeline is provided with cutting ferrule.
12. pipe-line system as claimed in claim 11 is characterized in that, described PH test paper is arranged at the joint of described first pipeline and described cutting ferrule.
13. pipe-line system as claimed in claim 11 is characterized in that, described PH test paper is arranged at the joint of described second pipeline and described cutting ferrule.
14. pipe-line system leak detection method, described pipe-line system comprises first pipeline, second pipeline that is connected with described first pipeline and is arranged at described first pipeline and the PH test paper of the second pipeline joint, described first pipeline and the second pipeline inside accommodate chemical reagent, described chemical reagent is acid solution or alkaline solution, and described pipe-line system leak detection method comprises:
Whether the color of observing described PH test paper changes;
If the color of described PH test paper changes, judge that then the chemical reagent leakage takes place in the joint of described first pipeline and second pipeline;
If the color of described PH test paper does not change, judge that then the chemical reagent leakage does not take place in the joint of described first pipeline and second pipeline.
CN2010101925092A 2010-06-04 2010-06-04 Pipeline system and leakage detection method of pipeline system Pending CN102269325A (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372261A (en) * 2015-12-18 2016-03-02 山东九章膜技术有限公司 Analysis instrument achieving reverse osmosis membrane element defective product leakage point detection and detection method
CN110702339A (en) * 2019-10-31 2020-01-17 苏州长光华芯光电技术有限公司 Air tightness leakage detection device and method
CN111322523A (en) * 2018-12-17 2020-06-23 夏泰鑫半导体(青岛)有限公司 Gas pipeline system and semiconductor equipment

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372261A (en) * 2015-12-18 2016-03-02 山东九章膜技术有限公司 Analysis instrument achieving reverse osmosis membrane element defective product leakage point detection and detection method
CN105372261B (en) * 2015-12-18 2018-05-08 山东九章膜技术有限公司 A kind of analyzer and detection method for realizing the detection of reverse-osmosis membrane element defective products leak source
CN111322523A (en) * 2018-12-17 2020-06-23 夏泰鑫半导体(青岛)有限公司 Gas pipeline system and semiconductor equipment
CN110702339A (en) * 2019-10-31 2020-01-17 苏州长光华芯光电技术有限公司 Air tightness leakage detection device and method

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Application publication date: 20111207