CN102252022A - Air bearing, air floatation movement system, and method for stabilizing revolving shaft in air bearing - Google Patents
Air bearing, air floatation movement system, and method for stabilizing revolving shaft in air bearing Download PDFInfo
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- CN102252022A CN102252022A CN2011101424341A CN201110142434A CN102252022A CN 102252022 A CN102252022 A CN 102252022A CN 2011101424341 A CN2011101424341 A CN 2011101424341A CN 201110142434 A CN201110142434 A CN 201110142434A CN 102252022 A CN102252022 A CN 102252022A
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- Prior art keywords
- rotating shaft
- pneumatic bearing
- lip part
- gas
- air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
Abstract
The invention discloses an air bearing. The air bearing comprises an air bearing body and a revolving shaft which is positioned in the air bearing body; the revolving shaft comprises a revolving shaft part which is cylindrical and a flange part which is formed vertically to an axial line where the revolving shaft is; the air bearing body is provided with a plurality of air guide holes; when the revolving shaft moves, air flowing through the air guide holes forms an air membrane between the revolving shaft and the air bearing body; and when the revolving shaft is static, the axial action force provided by the air flowing through the air guide holes ensures that the partial surface of the flange part is closely contacted with the air bearing body. In the air bearing, when the revolving shaft is static, the revolving shaft is closely contacted with the air bearing body by using air, so that the revolving shaft is in a very stable state. Then, a good effect can be achieved for observation operation or other processing operation.
Description
[technical field]
The present invention relates to a kind of pneumatic bearing, particularly be used for the design of ultraprecise air supporting moving system moving element.
[background technique]
Pneumatic bearing (Air Bearing) is such as one of critical component in the ultraprecise air supporting moving system that is comprised in the equipment such as microscope, lithography machine, ultra precision cutting processing machine.Because pneumatic bearing adopts air film as oiling agent,, but also has the bad shortcoming of stability under some applied environment simultaneously so it has high rigidity, cleans and do not have plurality of advantages such as friction.The stability of described pneumatic bearing comprises the dynamic stability under static stability and the inner rotating shaft high speed rotating state.
Squeeze film effect when little vibration that the common factor of static stability of restriction pneumatic bearing produces on pneumatic bearing when comprising pneumatic hammer oscillatory occurences, gas flow, the self-excitation resonance of pneumatic bearing and carrying object or the like.For example little vibration is because the gas vibration that the non-stationary flow movable property is given birth in air flue; And the very big compressibility that gas has, the object that can cause pneumatic bearing to be carried can not stably be in a certain equilibrium position, but presses the self-excitation resonance phenomena of sinusoidal regular movement.These factors all may make the bad stability of pneumatic bearing when being in static state, and can't satisfy the demand of using.In actual use, rotating shaft in the pneumatic bearing all is by comprising magneto, air feeder and programmable logic controller (PLC) (Programmable Logic Controller usually, PLC) etc. the closed loop control system of device drives, and this closed loop control system drives described rotating shaft rotation and makes the worktable that links to each other with described rotating shaft in different dynamically and in the static state changing according to certain predetermined logic.At this moment, because the variation in pressure between rotating shaft and the air film, the factors such as magnetic flux change of magneto have further influenced the static stability of pneumatic bearing, make the static stability of existing pneumatic bearing can not satisfy some requirements in using.Need fix a point to observe in a certain special position such as the microscope carrier that comprises pneumatic bearing in the microscope, need pneumatic bearing to be in static state this moment, if but the static stability of the pneumatic bearing of using is relatively poor, will cause that observation failure or observation are inaccurate; The worktable that comprises pneumatic bearing such as lithography machine or the processing of ultraprecise cutter need fix a point in a certain special position to carry out continuous operation for another example, similarly, if this moment pneumatic bearing static stability relatively poor, will make the yield of product descend.
Therefore be necessary to provide a kind of new pneumatic bearing to solve the problems referred to above.
[summary of the invention]
One object of the present invention is to provide a kind of pneumatic bearing, and it has static stability preferably.
Another object of the present invention is to provide a kind of ultraprecise air supporting moving system, adopt the pneumatic bearing of static stability preferably that has that proposes among the present invention.
A further object of the present invention is to provide a kind of method of stable air bearing shaft, and described method can provide described rotating shaft static stability preferably.
In order to reach purpose of the present invention, according to an aspect of the present invention, the invention provides a kind of pneumatic bearing, described pneumatic bearing comprises the pneumatic bearing body and is positioned at the intrinsic rotating shaft of described pneumatic bearing, described rotating shaft comprises and is shaft and the lip part that is formed on the described shaft, be formed with several gas ports on the described pneumatic bearing body, when described rotating shaft is in when dynamic, the gas of the described gas port of flowing through forms air film between described rotating shaft and described pneumatic bearing body; With when described rotating shaft is in static state, the part surface that the gas of the described gas port of flowing through provides axial active force to make described lip part closely contacts with described pneumatic bearing body.
At one further among the embodiment, described lip part is positioned at the middle part of described cylindrical shaft, described lip part is a kind of in rectangle, fusiformis, circle and the ellipse along the sectional shape that comprises described rotating shaft place axis, is formed with on the described pneumatic bearing body perpendicular to described lip part surface and symmetrical some to gas port.
At another further among the embodiment, described lip part comprises first lip part that is positioned at described shaft top and is positioned at second lip part of described shaft bottom, described first lip part and second lip part are a kind of in rectangle, fusiformis, circle and the ellipse along the sectional shape that comprises described rotating shaft place axis, are formed with on the described pneumatic bearing body perpendicular to described first lip part lower surface and symmetrical some to gas port perpendicular to the described second lip part upper surface.
At one further among the embodiment, comprise on the described pneumatic bearing body with respect to the upper surface of described lip part and the gas port of lower surface, when the part or all of gas port with respect to a surface of described lip part continues or quickens supply gas, and slow down supply gas, supply gas or when being in vacuum state, described gas provides the active force perpendicular to a surface of described lip part to make another surface of described lip part closely contact with described pneumatic bearing body not with respect to the part or all of gas port on another surface of described lip part.
Described pneumatic bearing also comprises the air feeder that links to each other with described gas port further among the embodiment at one, described air feeder according to predetermined logic to each gas port air feed.
Described pneumatic bearing also comprises the drive unit that links to each other with described shaft further among the embodiment at one, and described drive unit drives according to the described shaft rotation of predetermined logic.
At one further among the embodiment, described drive unit is a permanent magnet motor.
According to a further aspect in the invention, the invention provides a kind of ultraprecise air supporting moving system, it has adopted aforesaid pneumatic bearing.
In accordance with a further aspect of the present invention, the invention provides the method for rotating shaft in a kind of stable air bearing, described method is included in the intrinsic rotating shaft of pneumatic bearing and forms lip part, and is formed with the gas port with respect to described lip part in the pneumatic bearing body;
When described rotating shaft need be changed into when dynamic by static state, utilize the gas of gas port in the described pneumatic bearing body of flowing through between described rotating shaft and described pneumatic bearing body, to form air film, and forming the described rotating shaft rotation of air film rear driving;
When described rotating shaft need be static state by dynamic transition, driving described rotating shaft is decelerated to static according to the acceleration of predetermined logic, utilize the gas of the described gas port with respect to lip part of flowing through to produce then along the axial active force of described rotating shaft, make the part surface of described rotating shaft contact with described pneumatic bearing body and be in stablize static.
In embodiment further, described gas port with respect to described lip part is arranged at the relative position on two relative surfaces of described lip part respectively, to or quicken supply gas with respect to sustainable supply gas in the some or all of gas port on a surface of described lip part, and the supply gas that slows down in the some or all of gas port with respect to another surface of described lip part, stop supply gas or form vacuum and make described gas provide along the axial active force of described rotating shaft to described rotating shaft, make comprise in the described rotating shaft another surperficial part surface of described lip part contact with described pneumatic bearing body and be in stablize static
Wherein, the delivery rate of gas and vacuum and variation are controlled by predetermined logic in each gas port.
Compared with prior art, the pneumatic bearing among the present invention is utilized air that described rotating shaft is closely contacted with the pneumatic bearing body, thereby is made described rotating shaft can be in highly stable state when rotating shaft is in static state.At this moment, no matter observe operation or other machining operation etc. can obtain good effect.
[description of drawings]
In conjunction with reaching ensuing detailed description with reference to the accompanying drawings, the present invention will be more readily understood, the structure member that wherein same reference character is corresponding same, wherein:
Fig. 1 is the pneumatic bearing generalized section in one embodiment among the present invention;
Fig. 2 is the pneumatic bearing principle schematic in one embodiment among the present invention;
Fig. 3 is the rotating shaft schematic perspective view in another embodiment among the present invention;
Fig. 4 is the schematic perspective view of rotating shaft in another embodiment among the present invention;
Fig. 5 is the schematic perspective view of rotating shaft in another embodiment among the present invention;
Fig. 6 is the ultraprecise air supporting moving system structural representation in one embodiment among the present invention; With
Fig. 7 is the method method flow diagram in one embodiment of the stable air bearing shaft among the present invention.
[embodiment]
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Please refer to Fig. 1, it shows the generalized section of pneumatic bearing in an embodiment 100 among the present invention.Described pneumatic bearing 100 comprises pneumatic bearing body 120 and is positioned at the rotating shaft 140 of described pneumatic bearing body 120.
The lip part 144 that described rotating shaft 140 comprises cylindrical shaft 142 and forms perpendicular to described rotating shaft place axis, described lip part 144 is positioned at the middle part of described cylindrical shaft 142, and the section (also be this figure shown in section) of described lip part 144 on the cross section that comprises described rotating shaft place axis is shaped as rectangle.Be formed with several gas ports 122 on the described pneumatic bearing body 120, described gas port 122 normally occurs in pairs, and relative surface perpendicular to described lip part 144.
When described rotating shaft 140 is in when dynamic, when also being described rotating shaft 140 rotations, the gas of the described gas port 122 of flowing through forms air film between described rotating shaft 140 and described pneumatic bearing body 120.By said structure, realized the fundamental function of pneumatic bearing.Especially, when described rotating shaft 140 rotates to a certain special position and need transfer static state to, prior art is by according to certain acceleration deceleration or stop to drive described rotating shaft 140 rotations, keeps motionless and make described rotating shaft 140 stop at the precalculated position.Rotating shaft described in the present embodiment 140 is after adopting prior art to be in static state, and the gas of the described gas port 122 of flowing through also provides active force vertically that the upper surface of described lip part 144 or lower surface are closely contacted with described pneumatic bearing body 120.That is to say, after described rotating shaft 140 is in static state, can adopt the gas port 122 that is positioned at described lip part 144 upper surfaces top to continue air guide, and the gas port 122 that is positioned at described lip part 144 lower surfaces below stops air guide, air-breathing or be in the vacuum form to generate negative pressure, produce vertically and downward active force makes the lower surface of described lip part 144 closely contact with described pneumatic bearing body 120, make the part generation of described lip part 144 and described pneumatic bearing body 120 be similar to the effect that fits tightly of " vacuum engagement ".Obviously, when the lower surface of described lip part 144 with after described pneumatic bearing body 120 closely contacts, factors such as air-flow will have influence on minimum to the static stability of described rotating shaft 140.At this moment, described rotating shaft 140 has kept static stability preferably.Concrete principle can be with reference to shown in Figure 2.It should be noted that in the described pneumatic bearing body 120 with respect to the gas port on the shaft surface of described rotating shaft 140 supply gas continually and steadily also, with the stress balance that keeps described rotating shaft 140 radially to go up.
When described rotating shaft 140 is in static state, and need be changed to when dynamic, need at first make the gas port 122 that is positioned at described lip part 144 upper surfaces top and lower surface below continue air guide, between described rotating shaft 140 and described pneumatic bearing body 120, form air film again, the drive unit that drives described rotating shaft 140 rotations then produces driving force, makes described rotating shaft 140 begin rotation.
In sum, described pneumatic bearing portion's rotating shaft within it on the one hand is in when dynamically also promptly rotating, and utilizes air to form lubricated air film; On the other hand, when its inner rotating shaft is in static state, utilize air that described rotating shaft and pneumatic bearing body are closely pressed together, improved the static stability of described pneumatic bearing.For the details that does not disclose among Fig. 1, all be the content that those skilled in the art know and are easy to realize such as shape, quantity and the position of gas port, the structure of air supply channel, the various enforcement structures of pneumatic bearing body etc., this paper is not repeated.Easy full of beard and ground, those skilled in the art can also adopt more improvement details to obtain better static stability.Such as the described rotating shaft of control, has the gap of rational width between lip part in the particularly described rotating shaft and the pneumatic bearing body so that described rotating shaft produces error radially when moving vertically as small as possible; Such as described rotating shaft, the part surface that lip part in the particularly described rotating shaft and pneumatic bearing body are fitted mutually should have the shape of coincideing as far as possible again; Also the material of suitable stiffness, plasticity and wearability be should select, and wearing and tearing and dust or the like produced when avoiding described rotating shaft and described pneumatic bearing body to fit such as described rotating shaft and described pneumatic bearing body.
Though the sectional shape of the lip part 144 shown in Fig. 1 is a rectangle, but easily full of beard reaches, described lip part 144 may be positioned at arbitrary position of described shaft 142, the sectional shape of described lip part 144 also may be other shape, for example the sectional shape of the lip part 344 in the rotating shaft 340 shown in Fig. 3 is a fusiformis, and is positioned at the middle and upper part of shaft 342; For example the sectional shape of the lip part 444 in the rotating shaft 440 shown in Fig. 4 is an approximate ellipsoidal again, and is positioned at the middle and lower part of shaft 442; For example include two lip parts in the rotating shaft 540 shown in Fig. 5 again, comprise first lip part 544 that is positioned at described shaft 542 tops and second lip part 546 that is positioned at described shaft 542 bottoms, described first lip part 544 and second lip part 546 are semicircle along the sectional shape that comprises described rotating shaft place axis.No matter which kind of shape is the particular location of described lip part where be in, specifically be shaped as, one of emphasis of the present invention and main points are for providing axial active force by air, make certain part of rotating shaft closely contact with the pneumatic bearing body on the surface in other words, and make described rotating shaft can be in static state, and has stability preferably.
Please continue with reference to figure 6, it shows the structural representation of ultraprecise air supporting moving system in an embodiment 600 among the present invention.Described ultraprecise air supporting moving system 600 comprises pneumatic bearing 620, the air feeder 640 that links to each other with gas port in the described pneumatic bearing 620, the drive unit 660 and the control gear 680 that link to each other with rotating shaft in the described pneumatic bearing 620.
Described pneumatic bearing 620 comprises pneumatic bearing body 622 and rotating shaft 624, comprises gas port in the described pneumatic bearing body 622.Described pneumatic bearing 620 has the structure that is similar to pneumatic bearing shown in Figure 1 substantially.Described pneumatic bearing 620 can utilize air that the part of described rotating shaft 624 is closely contacted with pneumatic bearing body 622 when described rotating shaft 624 is in static state.One end of described rotating shaft 624 links to each other with worktable 628, and the other end of described rotating shaft 624 links to each other with drive unit 660.
Described air feeder 640 comprises air feed module 641, filter 642, shunt head 643 and the tracheae 644 that links to each other with described gas port, comprises controllable valve 645 on the described tracheae 644.Described air pump 641 links to each other with described control gear 680 with controllable valve 645.In one embodiment, comprise in the gas treatment equipments such as air pump, inert gas source of the gas, vacuum pump, compressor and exsiccator one or more in the described air feed module 641, to provide certain pressed gas or vacuum to described tracheae 644.Described controllable valve 645 can be adopted such as pulse duration modulation (Pulse Width Modulation by described control gear 680, PWM) control technique such as technology is controlled, and is in open mode, closed condition respectively or is in predetermined amount of flow state of a control etc. according to predetermined logic in the different periods.
Described drive unit 660 can be a magneto, and described magneto 660 links to each other with the rotating shaft 624 of described pneumatic bearing 620, and drives described rotating shaft 624 rotations or static.Described magneto 660 also links to each other with described control gear 680.
Described control gear 680 can be the PLC programmable control system, it comprises structures such as grating sensor 682 and single-chip microcomputer 684, described grating sensor 682 can detect the change in displacement on the described worktable 626, and testing result is transferred to described single-chip microcomputer 684, described single-chip microcomputer 684 can be imported according to described testing result and user and produce control logic, and use described control logic to control the switch or the flow of described controllable valve 645 and control the angle of swing and the rotating speed of described magneto 662.
By said structure, can form a closed loop control system, produce the change in location that the expectant control logic is controlled described rotating shaft 624 and coupled worktable 628 according to user's input.
When described rotating shaft 624 and coupled worktable 628 are in when dynamic, the described controllable valve 645 of described control gear 680 controls is on state, be formed with air film between described pneumatic bearing body 622 and the rotating shaft 624, described pneumatic bearing 620 can normally be rotated.
When described rotating shaft 624 and coupled worktable 628 are about to rotate or are moved to a certain special position, the described magneto 662 of described control gear 680 controls slows down with a certain acceleration, make described worktable 628 just in time stop when rotating to described special position, and according to the feedback of described grating sensor 682 and correction error.
When described worktable 628 when described special position is in static state, some valves in the described controllable valve 645 of described control gear 680 controls are in closed condition, make closely contact between the local surfaces of described pneumatic bearing body 622 and rotating shaft 624, be positioned at described special position thereby make described worktable to stablize, be convenient to operations such as other monitoring, processing, cutting.
Obviously, in order better to control effect, described control gear can also be controlled gas output and other factor of described air pump; Described control gear can also take more excellent control logic to control air quantity that enters in each gas port or the like.Because ins and outs like that do not relate to flesh and blood of the present invention on the one hand, are that those skilled in the art are easy to realize on the other hand, so this paper no longer continues to do detailed disclosure yet.
Please continue with reference to figure 7, it shows the method flow diagram of method in an embodiment 700 of the stable air bearing shaft among the present invention.The method needs of described stable air bearing shaft are formed with lip part at the shaft branch of pneumatic bearing in advance, and are formed with the gas port with respect to described lip part in the pneumatic bearing body.The method 700 of described stable air bearing shaft comprises:
Step 701 is because under the original state, all gas ports can be not air guides.At first need to described pneumatic bearing supply air, make the stable air film of formation between described rotating shaft and the described pneumatic bearing, described rotating shaft at this moment is in static state.
Step 702 after forming stable air film between described rotating shaft and the described pneumatic bearing, utilizes the drive unit such as magneto to drive described rotating shaft rotation, makes described rotating shaft be in dynamically.Described rotating shaft be in dynamically comprise described rotating shaft according to the predetermined control logic with the rotation of a certain constant acceleration or with a certain constant speed speed rotation or with a certain fluctuating acceleration rotation.
Step 703, when described rotating shaft need be when dynamically becoming static state, can drive described rotating shaft serves as that zero back keeps static with negative acceleration rotation until the speed of being decelerated to, and perhaps takes other mode that stops to drive described rotating shaft and so on that described rotating shaft is stopped the rotation and remains on a certain precalculated position.
Step 704 when described rotating shaft becomes static state, utilizes the gas of the described gas port with respect to lip part of flowing through to produce along the axial active force of described rotating shaft, makes the part surface of described rotating shaft contact with described pneumatic bearing body and is in stable state of rest.Insight in advance adopts the gas of the described gas port with respect to lip part of flowing through to produce and can adopt multiple mode along the axial active force of described rotating shaft.Can be arranged at the relative position on two surfaces up and down of described lip part respectively such as described gas port with respect to described lip part, to or quicken supply gas with respect to sustainable supply gas in the some or all of gas port of the upper surface of described lip part, and the supply gas that slows down in the some or all of gas port with respect to the lower surface of described lip part, stop supply gas or form vacuum and make described gas provide along the axial active force of described rotating shaft to described rotating shaft, make comprise in the described rotating shaft another surperficial part surface of described lip part contact with described pneumatic bearing body and be in stablize static.But should keep described rotating shaft in the radial direction stability, only produce vertically active force in described rotating shaft.
Simultaneously, should take rational gas to supply with control, make described rotating shaft when axial motion, keep more level and smooth process.That is to say, in described rotating shaft and process that the surface of described pneumatic bearing body contacts, adopt as far as possible gently mode to make that after two surface contacts, intensified pressure makes described rotating shaft and described pneumatic bearing body fit tightly gradually again.And do not adopt comparatively suddenly or mode hurriedly, avoid making described rotating shaft and described pneumatic bearing body to bump and produce and damage and dust. as far as possible
Step 705, when described rotating shaft need be in when dynamic again, at first the axial force that described gas is produced is cancelled gradually, makes to form stable air film again between described rotating shaft and the described pneumatic bearing body, and described rotating shaft this moment is in static state.
Step 706 is got back in the step 702, after forming stable air film between described rotating shaft and the described pneumatic bearing, utilizes the drive unit such as magneto to drive described rotating shaft rotation, makes described rotating shaft be in dynamically.
Obviously, repeat the part steps in the said process, can be so that described rotating shaft changes between dynamic, static and stable static state.Whole process can realize closed loop control by corresponding control logic, thereby obtains comparatively stable and system efficiently, has improved the static stability of pneumatic bearing in application scenes.
Above-mentioned explanation has fully disclosed the specific embodiment of the present invention.It is pointed out that and be familiar with the scope that any change that the person skilled in art does the specific embodiment of the present invention does not all break away from claims of the present invention.Correspondingly, the scope of claim of the present invention also is not limited only to described embodiment.
Claims (10)
1. pneumatic bearing is characterized in that it comprises:
Pneumatic bearing body and be positioned at the intrinsic rotating shaft of described pneumatic bearing, described rotating shaft comprise shaft and are formed at lip part on the shaft, are formed with several gas ports on the described pneumatic bearing body,
When described rotating shaft is in when dynamic, the gas of the described gas port of flowing through forms air film between described rotating shaft and described pneumatic bearing body; With
When described rotating shaft was in static state, the part surface that the gas of the described gas port of flowing through provides axial active force to make described lip part closely contacted with described pneumatic bearing body.
2. pneumatic bearing according to claim 1, it is characterized in that, described lip part is positioned at the middle part of described cylindrical shaft, described lip part is a kind of in rectangle, fusiformis, circle and the ellipse along the sectional shape that comprises described rotating shaft place axis, is formed with on the described pneumatic bearing body perpendicular to described lip part surface and symmetrical some to gas port.
3. pneumatic bearing according to claim 1, it is characterized in that, described lip part comprises first lip part that is positioned at described shaft top and is positioned at second lip part of described shaft bottom, described first lip part and second lip part are a kind of in rectangle, fusiformis, circle and the ellipse along the sectional shape that comprises described rotating shaft place axis, are formed with on the described pneumatic bearing body perpendicular to described first lip part lower surface and symmetrical some to gas port perpendicular to the described second lip part upper surface.
4. according to the arbitrary described pneumatic bearing of claim 1 to 3, it is characterized in that, comprise on the described pneumatic bearing body with respect to the upper surface of described lip part and the gas port of lower surface, when the part or all of gas port with respect to a surface of described lip part continues or quickens supply gas, and slow down supply gas with respect to the part or all of gas port on another surface of described lip part, supply gas or when being in vacuum state, described gas provides the active force perpendicular to a surface of described lip part to make another surface of described lip part closely contact with described pneumatic bearing body not.
5. pneumatic bearing according to claim 4 is characterized in that described pneumatic bearing also comprises the air feeder that links to each other with described gas port, described air feeder according to predetermined logic to each gas port supply gas or produce vacuum.
6. pneumatic bearing according to claim 4 is characterized in that described pneumatic bearing also comprises the drive unit that links to each other with described shaft, and described drive unit drives according to the described shaft rotation of predetermined logic.
7. pneumatic bearing according to claim 6 is characterized in that, described drive unit is a permanent magnet motor.
8. a ultraprecise air supporting moving system is characterized in that, it comprises as the arbitrary described pneumatic bearing of claim 1 to 7.
9. the method for rotating shaft in the stable air bearing is characterized in that it comprises:
In the intrinsic rotating shaft of pneumatic bearing, form lip part, and in the pneumatic bearing body, be formed with gas port with respect to described lip part;
When described rotating shaft need be changed into when dynamic by static state, utilize the gas of gas port in the described pneumatic bearing body of flowing through between described rotating shaft and described pneumatic bearing body, to form air film, and forming the described rotating shaft rotation of air film rear driving;
When described rotating shaft need be static state by dynamic transition, driving described rotating shaft is decelerated to static according to the acceleration of predetermined logic, utilize the gas of the described gas port with respect to lip part of flowing through to produce then along the axial active force of described rotating shaft, make the part surface of described rotating shaft contact with described pneumatic bearing body and be in stablize static.
10. the method for rotating shaft is characterized in that described gas port with respect to described lip part is arranged at the relative position on two relative surfaces of described lip part respectively in the stable air bearing according to claim 9,
To or accelerate supply gas with respect to sustainable supply gas in the some or all of gas port on a surface of described flange part; And the supply gas that slows down in the some or all of gas port with respect to another surface of described flange part, stop supply gas or form vacuum and so that described gas provide along the axial active force of described rotating shaft to described rotating shaft; Be in so that comprise another surperficial part surface of described flange part to contact with described air bearing body in the described rotating shaft stablize static
Wherein, the delivery rate of gas and vacuum and variation are controlled by predetermined logic in each gas port.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101424341A CN102252022A (en) | 2011-05-30 | 2011-05-30 | Air bearing, air floatation movement system, and method for stabilizing revolving shaft in air bearing |
| PCT/CN2012/072573 WO2012163138A1 (en) | 2011-05-30 | 2012-03-19 | Air bearing, air floatation motion system and method for stabilizing the inner shaft of the air bearing |
| CN201290000136.7U CN203348321U (en) | 2011-05-30 | 2012-03-19 | Air bearing and air floatation motion system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101424341A CN102252022A (en) | 2011-05-30 | 2011-05-30 | Air bearing, air floatation movement system, and method for stabilizing revolving shaft in air bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102252022A true CN102252022A (en) | 2011-11-23 |
Family
ID=44979508
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101424341A Pending CN102252022A (en) | 2011-05-30 | 2011-05-30 | Air bearing, air floatation movement system, and method for stabilizing revolving shaft in air bearing |
| CN201290000136.7U Expired - Fee Related CN203348321U (en) | 2011-05-30 | 2012-03-19 | Air bearing and air floatation motion system |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201290000136.7U Expired - Fee Related CN203348321U (en) | 2011-05-30 | 2012-03-19 | Air bearing and air floatation motion system |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN102252022A (en) |
| WO (1) | WO2012163138A1 (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012163138A1 (en) * | 2011-05-30 | 2012-12-06 | 无锡微焦科技有限公司 | Air bearing, air floatation motion system and method for stabilizing the inner shaft of the air bearing |
| CN103047286A (en) * | 2012-12-31 | 2013-04-17 | 浙江工业大学 | Rotary air feeding device capable of realizing series air feeding |
| CN103047284A (en) * | 2012-12-31 | 2013-04-17 | 浙江工业大学 | Rotary air supply device capable of supplying air in series |
| CN103104602A (en) * | 2012-12-11 | 2013-05-15 | 吴江兰瑞特纺织品有限公司 | Anti-flying suspension roll shaft |
| CN105683600A (en) * | 2013-08-28 | 2016-06-15 | 盖迪科斯系统公司 | Single axis rotational gas bearing with feed-through |
| CN107110881A (en) * | 2014-12-24 | 2017-08-29 | 泰拉丁公司 | Brakes |
| CN107289005A (en) * | 2016-03-31 | 2017-10-24 | 曹阳 | What a kind of carrier state was monitored preloads porous gas suspension bearing |
| CN108374839A (en) * | 2018-03-09 | 2018-08-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Gas shield device and air axis protective device |
| CN110026572A (en) * | 2019-03-27 | 2019-07-19 | 浙江工业大学 | A kind of stepless variable damping device of gas-static main shaft air film |
| CN111285031A (en) * | 2020-03-11 | 2020-06-16 | 上海精测半导体技术有限公司 | Rotating platform |
| CN111421412A (en) * | 2020-05-20 | 2020-07-17 | 清华大学 | Grinding workbench and wafer thinning equipment |
| CN111927886A (en) * | 2020-07-15 | 2020-11-13 | 杭州电子科技大学 | AACMM high-precision joint based on static pressure air bearing and supporting method thereof |
| CN112628287A (en) * | 2020-12-15 | 2021-04-09 | 江苏集萃精凯高端装备技术有限公司 | Restrictor, aerostatic guideway and aerostatic guideway control system |
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| CN105259782B (en) * | 2015-10-09 | 2017-10-13 | 华中科技大学 | A kind of emulation mode of H types air supporting motion platform |
| JP7048258B2 (en) * | 2017-10-27 | 2022-04-05 | 川崎重工業株式会社 | Expansion turbine |
| CN109406052B (en) * | 2018-12-17 | 2023-12-22 | 洛阳恒锐测控科技有限公司 | High-speed high-precision bearing roller dynamic unbalance measurement device and measurement method |
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| JPH0377787A (en) * | 1989-08-14 | 1991-04-03 | Nkk Corp | Method for joining zirconium material and stainless steel material |
| JPH08303463A (en) * | 1995-05-09 | 1996-11-19 | Canon Inc | Indexing device |
| JPH09177787A (en) * | 1995-12-27 | 1997-07-11 | Mitsubishi Heavy Ind Ltd | Bearing of hydraulic cylinder |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012163138A1 (en) * | 2011-05-30 | 2012-12-06 | 无锡微焦科技有限公司 | Air bearing, air floatation motion system and method for stabilizing the inner shaft of the air bearing |
| CN103104602A (en) * | 2012-12-11 | 2013-05-15 | 吴江兰瑞特纺织品有限公司 | Anti-flying suspension roll shaft |
| CN103047286A (en) * | 2012-12-31 | 2013-04-17 | 浙江工业大学 | Rotary air feeding device capable of realizing series air feeding |
| CN103047284A (en) * | 2012-12-31 | 2013-04-17 | 浙江工业大学 | Rotary air supply device capable of supplying air in series |
| CN103047284B (en) * | 2012-12-31 | 2015-02-18 | 浙江工业大学 | Rotary air supply device capable of supplying air in series |
| CN105683600B (en) * | 2013-08-28 | 2017-11-03 | 盖迪科斯系统公司 | Single-shaft-rotation gas bearing with through hole |
| CN105683600A (en) * | 2013-08-28 | 2016-06-15 | 盖迪科斯系统公司 | Single axis rotational gas bearing with feed-through |
| CN107110881A (en) * | 2014-12-24 | 2017-08-29 | 泰拉丁公司 | Brakes |
| CN107110881B (en) * | 2014-12-24 | 2020-10-27 | 泰拉丁公司 | Brake system |
| CN107289005A (en) * | 2016-03-31 | 2017-10-24 | 曹阳 | What a kind of carrier state was monitored preloads porous gas suspension bearing |
| CN108374839A (en) * | 2018-03-09 | 2018-08-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Gas shield device and air axis protective device |
| CN110026572A (en) * | 2019-03-27 | 2019-07-19 | 浙江工业大学 | A kind of stepless variable damping device of gas-static main shaft air film |
| CN110026572B (en) * | 2019-03-27 | 2024-03-26 | 浙江工业大学 | Stepless damping device that becomes of gas static pressure main shaft air film |
| CN111285031B (en) * | 2020-03-11 | 2021-09-14 | 上海精测半导体技术有限公司 | Rotating platform |
| CN111285031A (en) * | 2020-03-11 | 2020-06-16 | 上海精测半导体技术有限公司 | Rotating platform |
| CN111421412A (en) * | 2020-05-20 | 2020-07-17 | 清华大学 | Grinding workbench and wafer thinning equipment |
| CN111927886A (en) * | 2020-07-15 | 2020-11-13 | 杭州电子科技大学 | AACMM high-precision joint based on static pressure air bearing and supporting method thereof |
| CN112628287A (en) * | 2020-12-15 | 2021-04-09 | 江苏集萃精凯高端装备技术有限公司 | Restrictor, aerostatic guideway and aerostatic guideway control system |
| CN112628287B (en) * | 2020-12-15 | 2022-03-11 | 江苏集萃精凯高端装备技术有限公司 | Restrictor, aerostatic guideway and aerostatic guideway control system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN203348321U (en) | 2013-12-18 |
| WO2012163138A1 (en) | 2012-12-06 |
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Application publication date: 20111123 |