CN102231360A - 等离子体刻蚀腔体内刻蚀气体调节方法 - Google Patents
等离子体刻蚀腔体内刻蚀气体调节方法 Download PDFInfo
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- CN102231360A CN102231360A CN2011101417704A CN201110141770A CN102231360A CN 102231360 A CN102231360 A CN 102231360A CN 2011101417704 A CN2011101417704 A CN 2011101417704A CN 201110141770 A CN201110141770 A CN 201110141770A CN 102231360 A CN102231360 A CN 102231360A
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN 201110141770 CN102231360B (zh) | 2011-05-27 | 2011-05-27 | 等离子体刻蚀腔体内刻蚀气体调节方法 |
TW100141812A TWI450331B (zh) | 2011-05-27 | 2011-11-16 | 電漿刻蝕腔體內刻蝕氣體調節方法 |
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CN 201110141770 CN102231360B (zh) | 2011-05-27 | 2011-05-27 | 等离子体刻蚀腔体内刻蚀气体调节方法 |
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CN102231360A true CN102231360A (zh) | 2011-11-02 |
CN102231360B CN102231360B (zh) | 2013-05-15 |
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CN 201110141770 Active CN102231360B (zh) | 2011-05-27 | 2011-05-27 | 等离子体刻蚀腔体内刻蚀气体调节方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104370268A (zh) * | 2013-08-16 | 2015-02-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 基片刻蚀方法 |
CN104752153A (zh) * | 2013-12-29 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 基片刻蚀方法 |
CN112951696A (zh) * | 2019-12-10 | 2021-06-11 | 中微半导体设备(上海)股份有限公司 | 等离子体处理设备及其气体挡板结构、等离子体处理方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1116888A (ja) * | 1997-06-24 | 1999-01-22 | Hitachi Ltd | エッチング装置及びその運転方法 |
TW472286B (en) * | 1998-12-28 | 2002-01-11 | Tokyo Electron Yamanashi Ltd | Plasma processing method |
US20060016559A1 (en) * | 2004-07-26 | 2006-01-26 | Hitachi, Ltd. | Plasma processing apparatus |
CN101017771A (zh) * | 2006-02-08 | 2007-08-15 | 东京毅力科创株式会社 | 气体供给装置、基板处理装置和气体供给方法 |
CN101136322A (zh) * | 2006-08-15 | 2008-03-05 | 东京毅力科创株式会社 | 基板处理装置、气体供给装置、基板墀理方法和存储介质 |
CN101473415A (zh) * | 2006-06-20 | 2009-07-01 | 朗姆研究公司 | 气体喷射以均匀地蚀刻基片 |
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2011
- 2011-05-27 CN CN 201110141770 patent/CN102231360B/zh active Active
- 2011-11-16 TW TW100141812A patent/TWI450331B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1116888A (ja) * | 1997-06-24 | 1999-01-22 | Hitachi Ltd | エッチング装置及びその運転方法 |
TW472286B (en) * | 1998-12-28 | 2002-01-11 | Tokyo Electron Yamanashi Ltd | Plasma processing method |
US20060016559A1 (en) * | 2004-07-26 | 2006-01-26 | Hitachi, Ltd. | Plasma processing apparatus |
CN101017771A (zh) * | 2006-02-08 | 2007-08-15 | 东京毅力科创株式会社 | 气体供给装置、基板处理装置和气体供给方法 |
CN101473415A (zh) * | 2006-06-20 | 2009-07-01 | 朗姆研究公司 | 气体喷射以均匀地蚀刻基片 |
CN101136322A (zh) * | 2006-08-15 | 2008-03-05 | 东京毅力科创株式会社 | 基板处理装置、气体供给装置、基板墀理方法和存储介质 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104370268A (zh) * | 2013-08-16 | 2015-02-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 基片刻蚀方法 |
CN104370268B (zh) * | 2013-08-16 | 2016-06-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 基片刻蚀方法 |
CN104752153A (zh) * | 2013-12-29 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 基片刻蚀方法 |
CN112951696A (zh) * | 2019-12-10 | 2021-06-11 | 中微半导体设备(上海)股份有限公司 | 等离子体处理设备及其气体挡板结构、等离子体处理方法 |
CN112951696B (zh) * | 2019-12-10 | 2024-04-09 | 中微半导体设备(上海)股份有限公司 | 等离子体处理设备及其气体挡板结构、等离子体处理方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI450331B (zh) | 2014-08-21 |
CN102231360B (zh) | 2013-05-15 |
TW201248716A (en) | 2012-12-01 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method for regulating etching gas in plasma etching cavity Effective date of registration: 20150202 Granted publication date: 20130515 Pledgee: China Development Bank Co Pledgor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Registration number: 2009310000663 |
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Date of cancellation: 20170809 Granted publication date: 20130515 Pledgee: China Development Bank Co Pledgor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Registration number: 2009310000663 |
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Address after: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee after: Medium and Micro Semiconductor Equipment (Shanghai) Co., Ltd. Address before: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee before: Advanced Micro-Fabrication Equipment (Shanghai) Inc. |
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