CN102213793B - Photonic crystal with composite structure - Google Patents

Photonic crystal with composite structure Download PDF

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CN102213793B
CN102213793B CN 201110119775 CN201110119775A CN102213793B CN 102213793 B CN102213793 B CN 102213793B CN 201110119775 CN201110119775 CN 201110119775 CN 201110119775 A CN201110119775 A CN 201110119775A CN 102213793 B CN102213793 B CN 102213793B
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photonic crystal
middle layer
photon crystal
crystal plate
photon
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CN102213793A (en
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郑婉华
晏新宇
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Abstract

The invention discloses a photonic crystal with a composite structure, which comprises three layers of two-dimensional photonic crystal plates which are laminated, wherein the two-dimensional photonic crystal plate at the middle layer is horizontally arranged and used for realizing the regulation and control of light waves on the X-Y plane; the two-dimensional photonic crystal plates at the upper layer and the lower layer are vertically arranged and respectively arranged at the upper and lower sides of the two-dimensional photonic crystal plate at the middle layer; the normal directions of the two-dimensional photonic crystal plates at the upper and lower layers are perpendicular to the normal direction of the two-dimensional photonic crystal plate at the middle layer; and the two-dimensional photonic crystal plates at the upper and lower layers are used for realizing the regulation and control of the light waves in the Z direction. The photonic crystal disclosed by the invention realizes the three-dimensional regulation and control of the light waves and solves the problem that the regulation and control capabilities of the common two-dimensional photonic crystal plate on the light waves in the direction perpendicular to the plate are poor.

Description

Photonic crystal with composite structure
Technical field
The present invention relates to semicon industry photoelectron technology field, relate in particular to a kind of photonic crystal with composite structure be used to realizing three-dimensional light wave regulation and control.
Background technology
Photonic crystal is the structure of material periodic arrangement in the space of different dielectric properties, can play strong modulating action to the dissemination of photon in this material.A characteristic feature of photonic crystal is exactly the existence of photon band gap, and the photon state that is in the forbidden band can not be propagated in photonic crystal.According to the distribution of dielectric material at Spatial Dimension, photonic crystal can be divided into one dimension, two and three dimensions photonic crystal.
1991, American scientist produced that first has the photon crystal structure of omnidirectional gap in the world.Subsequently, all over the world scientist has designed and produced various photon crystal structures.If in photon crystal material, introduce disturbance or defective, will in photonic crystal can be with, introduce defect state.The photon that produces in the point defect will by local around this defective, form defect cavity.Utilize this defect mode, scientist has all over the world made various photonic crystal point defect laser instruments.Equally, also can be in photonic crystal the inlead defective, form photonic crystal optical waveguides.
In realizing process of the present invention, the applicant recognizes that there is following technological deficiency in prior art: although three-D photon crystal has full band gap, can both limit photon in all directions, and complex manufacturing technology, cost is higher; Compare with three-D photon crystal, 2 D photon crystal have make simple, practical advantage, but its shortcoming be can only be at three-dimensional two dimensions regulation and control photon, on the 3rd dimension to the ability of regulation and control of photon a little less than.
Summary of the invention
The technical matters that (one) will solve
For addressing the aforementioned drawbacks, the invention provides a kind of photonic crystal with composite structure based on the two-dimensional flat plate photonic crystal, to solve common 2 D photon crystal flat board perpendicular to the dull and stereotyped direction problem weak to the light wave ability of regulation and control.
(2) technical scheme
According to an aspect of the present invention, provide a kind of photonic crystal with composite structure.This photonic crystal with composite structure comprises: three layers of 2 D photon crystal plate that lamination arranges; Wherein: the 2 D photon crystal plate level in middle layer arranges, and is used for realization regulation and control to light wave on X-Y plane; The 2 D photon crystal plate of the upper and lower vertically arranges, and lays respectively at the up and down both sides of the 2 D photon crystal plate in middle layer, and its normal direction is vertical with the 2 D photon crystal plate normal direction in middle layer, is used for realization modulation to light wave on the Z direction.
Preferably, in the photonic crystal with composite structure of the present invention, the band gap of the 2 D photon crystal plate of upper strata, middle layer, lower floor all covers the wavelength for the treatment of modulated light wave; The band gap polarization of the 2 D photon crystal plate of the upper and lower is identical, and opposite with the band gap polarization of the 2 D photon crystal plate in middle layer.
Preferably, in the photonic crystal with composite structure of the present invention, the 2 D photon crystal plate in the middle layer arranges defect sturcture; The thickness of the 2 D photon crystal plate of the upper and lower can cover this defect sturcture at least.This defect sturcture is line defect structure or defects.
Preferably, in the photonic crystal with composite structure of the present invention, the material of the 2 D photon crystal plate of upper strata, middle layer, lower floor is determined by default can be with feature and defect state feature, is semiconductor material or dielectric material; The photonic crystal parameters of the 2 D photon crystal plate of upper strata, middle layer, lower floor is determined by default can be with feature and defect state feature.
Preferably, in the photonic crystal with composite structure of the present invention, a kind of fixing in the following manner of the 2 D photon crystal of upper strata, middle layer, lower floor: one-body molded mode; Be mounted to the support mode that presets; The bonding mode; Or cushion crimping mode.
(3) beneficial effect
The present invention has following beneficial effect:
1, the present invention has realized the regulation and control of the three-dimensional of light wave, has solved common 2 D photon crystal flat board perpendicular to the dull and stereotyped direction problem weak to the light wave ability of regulation and control;
2, versatility of the present invention is stronger, and by to three photonic crystal cycles, the adjusting of airport radius can design different band gap.Band gap can cross from visible-range infrared, realizes light wave is regulated and control in very large wavelength coverage;
3, in the present invention, by in the photonic crystal of middle layer, introducing defective, can make the optoelectronic device of specific function, such as optical waveguide, optical microcavity, the realization of three-dimensional optical regulation and control greatly improves the optical property of these devices.
Description of drawings
Fig. 1 a is the schematic diagram on embodiment of the invention photonic crystal with composite structure XZ plane;
Fig. 1 b is the schematic diagram on embodiment of the invention photonic crystal with composite structure YZ plane;
Fig. 1 c is the schematic diagram on 2 D photon crystal plate XY plane, embodiment of the invention photonic crystal with composite structure middle layer;
Fig. 2 a is the TE energy band diagram of the embodiment of the invention one photonic crystal with composite structure middle layer 2 D photon crystal plate;
Fig. 2 b is the TE energy band diagram of the embodiment of the invention one photonic crystal with composite structure up/down layer 2 D photon crystal plate;
Fig. 3 is the schematic diagram of the embodiment of the invention one photonic crystal with composite structure middle layer 2 D photon crystal board defect waveguide;
Fig. 4 is the schematic diagram in 2 D photon crystal board defect chamber, the embodiment of the invention two photonic crystal with composite structure middle layer;
Fig. 5 is the resonant wavelength figure in 2 D photon crystal board defect chamber, the embodiment of the invention two photonic crystal with composite structure middle layer.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
The invention discloses a kind of photonic crystal with composite structure based on the two-dimensional flat plate photonic crystal.This photonic crystal with composite structure comprises three two-dimensional crystal lattice photonic crystals, their laminations are placed, the airport direction of the photonic crystal that mediates and the airport perpendicular direction that is in the photonic crystal at two ends, the parameter of three 2 D photon crystals (thickness of material, cycle, airport radius, plate) is determined according to default separately band parameter and defect state feature.Utilize the present invention, can be in the regulation and control of three dimensions realizations to light.
In the embodiment on a basis of the present invention, a kind of photonic crystal with composite structure is disclosed.This photonic crystal with composite structure comprises: three layers of 2 D photon crystal plate that lamination arranges.Wherein, the 2 D photon crystal plate level in middle layer arranges, and is used for realization regulation and control to light wave on X-Y plane; The 2 D photon crystal plate of the upper and lower vertically arranges, lay respectively at the up and down both sides of the 2 D photon crystal plate in middle layer, the perpendicular direction of the 2 D photon crystal plate airport in the direction of its airport and middle layer is used for realization modulation to light wave on the Z direction.
Preferably, in the present embodiment, the band gap of the 2 D photon crystal plate of upper strata, middle layer, lower floor all covers the wavelength of light wave; The band gap polarization of the 2 D photon crystal plate of the upper and lower is identical, and opposite with the band gap polarization of the 2 D photon crystal plate in middle layer.
The present embodiment can be in the regulation and control of three dimensions realizations to light.Compare with traditional 2 D photon crystal plate, the present embodiment has improved the regulation and control perpendicular to the light of photonic crystal plate direction.And compare with the conventional three-dimensional photonic crystal, the present embodiment has utilized ripe 2 D photon crystal technology of preparing, and manufacture craft is relatively simple.
In order more to be well understood to the composition of photonic crystal with composite structure of the present invention, provide an alternative embodiment of the invention.Fig. 1 a is the schematic diagram on embodiment of the invention photonic crystal with composite structure XZ plane.Fig. 1 b is the schematic diagram on embodiment of the invention photonic crystal with composite structure YZ plane.Fig. 1 c is the schematic diagram on 2 D photon crystal plate XY plane, embodiment of the invention photonic crystal with composite structure middle layer.Shown in Fig. 1 a, Fig. 1 b and Fig. 1 c, this photonic crystal with composite structure comprises three layers of 2 D photon crystal plate that lamination arranges.Wherein, upper strata 2 D photon crystal plate is the 2 D photon crystal on the XZ plane, and its thickness is along Y-direction, and thickness is D1.The 2 D photon crystal plate in middle layer is the 2 D photon crystal on XY plane, and its thickness is along the Z direction, and thickness is D2.The 2 D photon crystal plate of lower floor is the 2 D photon crystal on XZ plane, and its thickness is along Y-direction, and thickness is D3.
Need to prove, in the present embodiment, photonic crystal is circular lattice, and in actual applications, the material of three photon crystal structures, cycle, airport radius, slab-thickness can design respectively, in order to realize specific function.
In order to realize specific function, often can in photonic crystal, introduce defect sturcture.In the further embodiment of the present invention, provide a kind of photonic crystal with composite structure.In this photonic crystal with composite structure, the 2 D photon crystal plate in the middle layer arranges defect sturcture; The thickness of the 2 D photon crystal plate of the upper and lower can cover this defect sturcture at least.Typically, defect sturcture is line defect structure or defects.
When this defect sturcture was the line defect structure, the thickness of the 2 D photon crystal plate of the upper and lower was greater than the lateral length of line defect structure, and along vertical covering line defect structure of defect sturcture.Preferably, the line defect structure can be removed by the 2 D photon crystal plate in the middle layer an emptying pore and be formed defect waveguide; The 2 D photon crystal plate of the upper and lower is along vertical covering defect waveguide of defect waveguide.
When this defect sturcture was defects, the thickness of the 2 D photon crystal plate of the upper and lower was greater than the diameter of defects, and covered this defects.Preferably, defects removes a photonic crystal defect cavity that airport forms in the 2 D photon crystal plate in the middle layer; The 2 D photon crystal plate of the upper and lower covers photonic crystal defect cavity.
In the photonic crystal with composite structure of the present invention, from consisting of the various parameters of 2 D photon crystal, comprise lattice period and airport shape, size etc., determined by default can be with feature and defect state feature.From consisting of the material of 2 D photon crystal, the material of three layers of 2 D photon crystal plate is determined by default can be with feature and defect state feature, the material of three layers of 2 D photon crystal plate can be identical, also can be different, the selection kind of material is also a lot, can be semiconductor material, such as GaAs, InP, Si, can be common dielectric material also, such as SiO 2
In the photonic crystal with composite structure of the present invention, combination from the 2 D photon crystal plate in the upper and lower 2 D photon crystal plate and middle layer, in order to keep the relative position of three flat boards, the fixed form of unitized construction, can flexible choice, if the material of three ply board is identical, can directly process this three ply board structure with micro-nano process technology; If material is different, three blocks of plates can be embedded in respectively in the support that has fixed, perhaps be fixed together by modes such as bonding or cushion crimping.
Therefore, when this photonic crystal with composite structure of specific design, frequency and the polarization state of light wave of regulation and control at first as required determined bandgap range and the polarization state of three photonic crystal plates, then selects suitable lattice period and airport radius.For example, the electromagnetic component that the light wave that need to regulate and control has is H y, E x, E z, wavelength is 1550nm.The principle of design of middle layer photonic crystal is to produce the TE band gap that comprises 1550nm, and the principle of design of levels photonic crystal is to produce the TM band gap that comprises 1550nm.
Below will on the basis of above-described embodiment, provide optimum embodiment of the present invention.Need to illustrate, this optimum embodiment only is used for understanding the present invention, is not limited to protection scope of the present invention.And, in the situation that without indicating especially, the technical characterictic that occurs in identical or different embodiment can be used in combination in not conflicting situation.
Embodiment one:
The material selection GaAs of the 2 D photon crystal in middle layer, refractive index is n=3.5, and photonic crystal is triangular crystal lattice, and the cycle is a=380nm, and airport radius r=0.3a, thickness are D 2=a.The material selection Si of levels photonic crystal, refractive index is n=3.4, photonic crystal is triangular crystal lattice, cycle b=1070nm, airport radius r=0.4b, thickness are D 1=D 3=3a.
Calculate the TE energy band diagram of middle layer photonic crystal shown in Fig. 2 a with plane-wave method.Shown in Fig. 2 a, the ratio in airport radius and cycle (r/a) is 0.3, and the coordinate of vertical direction is cycle/wavelength (a/ λ), and the coordinate of horizontal direction represents lattice direction, and the TE band gap of this photonic crystal has covered the wavelength of 1550nm.
Calculate the TM energy band diagram of two-layer photonic crystal up and down shown in Fig. 2 b with plane-wave method.Shown in Fig. 2 b, the ratio in airport radius and cycle (r/a) is 0.4, and the coordinate of vertical direction is cycle/wavelength (a/ λ), and the coordinate of horizontal direction represents lattice direction, and the TM band gap of this photonic crystal has also covered the wavelength of 1550nm.
In the 2 D photon crystal plate of middle layer, remove an emptying pore, namely incite somebody to action emptying pore GaAs Material Filling wherein, form defect waveguide as shown in Figure 3.The width of waveguide is a.Up/down layer 2 D photon crystal plate is faced waveguide place, dull and stereotyped direction is along the direction of waveguide.Because the thickness of up/down layer 2 D photon crystal plate is 3a, thus dull and stereotyped except covering defect waveguide, can also cover two the most contiguous emptying pores of waveguide.
In above-mentioned design, the wavelength of TE polarization is the light wave of 1550nm, can propagate in the defect waveguide of middle layer.The TE polarization in middle layer is the TM polarization of levels just, and the 1550nm wavelength just is in the TM forbidden band of levels.So can not propagate on the XZ plane, light wave just can be limited in the 2 D photon crystal board defect waveguide in middle layer well like this.
Embodiment two
The material selection InP of middle layer 2 D photon crystal plate, refractive index is n=3.4, and photonic crystal is triangular crystal lattice, and the cycle is a=420nm, airport radius r=0.3a, Thickness Design is D 2=a.The material selection Si of up/down layer 2 D photon crystal plate, refractive index is n=3.4, photonic crystal is triangular crystal lattice, cycle b=1220nm, airport radius r=0.4b, Thickness Design is D 1=D 3=3a.
In the 2 D photon crystal plate of middle layer, remove an airport, namely in an airport, fill the InP material, form photonic crystal defect cavity, as shown in Figure 4.
Fig. 5 is the resonant wavelength figure in 2 D photon crystal board defect chamber, the embodiment of the invention two photonic crystal with composite structure middle layer.In Fig. 5, horizontal ordinate is wavelength, and ordinate is the relative strength of resonance.As shown in Figure 5, the TE polarization resonant wavelength of middle layer defect cavity is 1765nm, and this 1765nm wavelength just is in the TM forbidden band of levels photonic crystal, and defect cavity can both be subject to good constraint three dimensions like this.
To sum up, the present invention has following beneficial effect: 1, the present invention has realized the regulation and control of the three-dimensional of light wave, has solved common 2 D photon crystal flat board perpendicular to the dull and stereotyped direction problem weak to the light wave ability of regulation and control; 2, versatility of the present invention is stronger, and by to three photonic crystal cycles, the adjusting of airport radius can design different band gap, and band gap can cross from visible-range infrared, realizes light wave is regulated and control in very large wavelength coverage.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. a photonic crystal with composite structure is characterized in that, this photonic crystal with composite structure comprises: three layers of 2 D photon crystal plate that lamination arranges; Wherein:
The 2 D photon crystal plate level in middle layer arranges, and is used for realizing that on X-Y plane to the regulation and control of light wave, wherein, the plane at the 2 D photon crystal plate place in middle layer is X-Y plane;
The 2 D photon crystal plate of the upper and lower vertically arranges, lay respectively at the up and down both sides of the 2 D photon crystal plate in described middle layer, its normal direction is vertical with the 2 D photon crystal plate normal direction in described middle layer, be used for realization modulation to light wave on the Z direction, wherein, the normal direction of the 2 D photon crystal plate in middle layer is the Z direction;
Wherein, the 2 D photon crystal plate in described middle layer arranges defect sturcture, and the thickness of the 2 D photon crystal plate of described the upper and lower can cover this defect sturcture at least.
2. photonic crystal with composite structure according to claim 1 is characterized in that:
The band gap of the 2 D photon crystal plate of described upper strata, middle layer, lower floor all covers the described wavelength for the treatment of modulated light wave;
The band gap polarization of the 2 D photon crystal plate of described the upper and lower is identical, and opposite with the band gap polarization of the 2 D photon crystal plate in middle layer.
3. photonic crystal with composite structure according to claim 1 is characterized in that, described defect sturcture is the line defect structure;
The thickness of the 2 D photon crystal plate of described the upper and lower is greater than the lateral length of described line defect structure, and along the described line defect structure of vertical covering of described defect sturcture.
4. photonic crystal with composite structure according to claim 3 is characterized in that,
Described line defect structure is removed an emptying pore by the 2 D photon crystal plate in described middle layer and is formed defect waveguide;
The 2 D photon crystal plate of described the upper and lower is along the described defect waveguide of vertical covering of described defect waveguide.
5. photonic crystal with composite structure according to claim 4 is characterized in that,
The material of the 2 D photon crystal plate in described middle layer is GaAs, and photonic crystal is triangular crystal lattice, and the cycle is a 1, the radius 0.3a of its airport 1, thickness a 1
The material of the 2 D photon crystal plate of described the upper and lower is Si, and photonic crystal is triangular crystal lattice, and the cycle is b 1, the radius 0.4b of its airport 1, thickness 3a 1
6. photonic crystal with composite structure according to claim 1 is characterized in that, described defect sturcture is defects;
The thickness of the 2 D photon crystal plate of described the upper and lower is greater than the diameter of described defects, and covers this defects.
7. photonic crystal with composite structure according to claim 6 is characterized in that,
Described defects removes a photonic crystal defect cavity that airport forms in the 2 D photon crystal plate in described middle layer;
The 2 D photon crystal plate of described the upper and lower covers described photonic crystal defect cavity.
8. photonic crystal with composite structure according to claim 7 is characterized in that,
The material of the 2 D photon crystal plate in described middle layer is InP, and photonic crystal is triangular crystal lattice, and the cycle is a 2, the radius 0.3a of its airport 2, thickness a 2
The material of the 2 D photon crystal plate of described the upper and lower is Si, and photonic crystal is triangular crystal lattice, and the cycle is b 2, the radius 0.4b of its airport 2, thickness 3a 2
9. photonic crystal with composite structure according to claim 1 is characterized in that,
The material of the 2 D photon crystal plate of described upper strata, middle layer, lower floor is determined by default can be with feature and defect state feature, is semiconductor material or dielectric material;
The photonic crystal parameters of the 2 D photon crystal plate of described upper strata, middle layer, lower floor is determined by default can be with feature and defect state feature.
10. each described photonic crystal with composite structure in 9 according to claim 1 is characterized in that, a kind of fixing in the following manner of the 2 D photon crystal of described upper strata, middle layer, lower floor: one-body molded mode; Be mounted to the support mode that presets; The bonding mode; Or cushion crimping mode.
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CN104459991B (en) * 2014-12-10 2016-08-24 欧阳征标 High-polarization based on slab photonic crystal and High Extinction Ratio TE photoswitch
CN111308582B (en) * 2020-03-06 2021-10-01 中南民族大学 Two-dimensional photonic crystal slab, design method and optical device using the slab

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Publication number Priority date Publication date Assignee Title
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CN105068184B (en) * 2015-07-24 2018-01-05 太原理工大学 A kind of 2 D photon crystal composite construction for strengthening wide range light absorbs

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