CN102175150B - Infrared interference detection device with point aligning and detecting double probe - Google Patents
Infrared interference detection device with point aligning and detecting double probe Download PDFInfo
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- CN102175150B CN102175150B CN 201110029807 CN201110029807A CN102175150B CN 102175150 B CN102175150 B CN 102175150B CN 201110029807 CN201110029807 CN 201110029807 CN 201110029807 A CN201110029807 A CN 201110029807A CN 102175150 B CN102175150 B CN 102175150B
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Abstract
The invention discloses an infrared interference detection device used for detecting the aspheric mirror of an infrared lens and the aberration quality of transmitted waves. In the invention, two infrared focal plane arrays are used as infrared detectors which provide a point aligning and detecting double-detection imaging optical path, and a five-dimensional adjustment frame is used for clamping a detected piece and is fixed on a slide block of a guide rail equipped with a precision length measuring device; in real interference detection, through observing a point aligning and detecting image and under the support of the precision length measuring device, the three-dimensional spatial position and inclination and pitch two-dimensional angles of the detected piece can be monitored in real time, the clamping adjustment of a standard lens and the detected piece can be completed quickly and conveniently, and the difficulty in clamping adjustment caused by the invisibility of infrared light in a detecting process can be solved.
Description
Technical field
The present invention relates to a kind of interference checking device, particularly a kind ofly be applicable to detect infrared aspheric lens, have the infrared striking rope type interference checking device to point, test double detector.
Background technology
The CO that adopts in the infrared interference detection technique
2Laser source wavelength is longer, can measure the measured piece larger with the reference surface surface form deviation, CO
2Laser can the transmission infra-red material, so can adopt the infrared interference detection technique to measure infrared aspheric lens.
Developed at present the infrared interference detection technique both at home and abroad, but existing infrared interference pick-up unit can't be finished test process fast and accurately, the problem of its existence is mainly manifested in: not for the sightless characteristics of infrared light, propose the clamping adjustment that effective method is finished standard mirror and measured piece quickly and easily when the test clamping is adjusted.Huang Shen is prosperous in " research of infrared interferometer debugging and measuring technique " (" optical precision engineering ", the 4th volume, the 2nd phase, 1996) developed a kind of striking rope type Infrared Plane interferometer in, assist the adjustment measured piece by the interference image of direct observation pyroelectricity camera acquisition, because measured piece comprises three dimensional local information and pitching, tilted two-dimensional angle information, only in that orientation and angle could obtain interferogram accurately, there be small departing to obtain interferogram, so adopt this method adjustment very consuming time.Wu Yongqian is at " Far-infrared Fizeau interferometer for large aspheric mirror " (SPIE, V7064,2008) developed striking rope type infrared interferometer in for detection of aspheric surface, in actual testing process, pass through to adjust the interferogram under the measured piece acquisition visible light condition, thereby obtain the interferogram under the infrared light condition, but ZnSe beam-expanding collimation mirror and all will be so that visible light and infrared light light path altogether with reference to spherical mirror in this device to test light path, even obtained the interferogram under the visible light condition, also be difficult to the interferogram under the synchronization gain infrared light condition, so the feasibility of this operation is poor.He Jun is in " phase shift Tai Man-Green's infrared interferometer adjustment technology " (" infrared and laser engineering ", the 37th volume, the 3rd phase, 2008) developed a kind of Tai Man-Green's type infrared interferometer in, adjust with the visible light guiding is auxiliary by the method that in light path, adds a condenser lens, adopt this method so that optical interference circuit can not be packed, be not suitable for instrument so this is a kind of experimental technique.
Summary of the invention
The object of the present invention is to provide a kind of XYZ three-dimensional space position and inclination, pitching two dimension angular that can the Real-Time Monitoring measured piece, the infrared interference pick-up unit of rapidly and accurately measured piece being adjusted to the right place has solved the difficulty that clamping is adjusted in the testing process that the infrared light invisibility brings.
The technical solution that realizes the object of the invention is: a kind of infrared interference pick-up unit that has point, test double detector comprises CO
2Laser instrument, semiconductor laser, first, two-mirror, beam expanding lens, little spectroscope, large spectroscope, off-axis parabolic mirror, aperture, the test imaging len, the test infrared eye, the first refluxing reflection mirror, ground glass, the second refluxing reflection mirror, to an imaging len, to an infrared eye, the two dimension adjustment rack, the guide rail of five dimension adjustment racks and outfit precise length measuring device, its medium and small spectroscope, large spectroscope, aperture, test imaging len and test infrared eye consist of the test imaging optical path, large spectroscope, refluxing reflection mirror, ground glass, refluxing reflection mirror, consist of to an imaging optical path, namely by CO to an imaging len with to an infrared eye
2The infrared laser that laser instrument sends is successively through first, two-mirror is incident to beam expanding lens, beam expanding lens is assembled the small-bore directional light of incident, light beam becomes the spherical wave of dispersing after the overconvergence focus, spherical wave reflexes to off-axis parabolic mirror through too small spectroscope and large spectroscope successively, the focus of this off-axis parabolic mirror overlaps with the focus of beam expanding lens, divergent spherical wave becomes the parallel beam of collimation after the off-axis parabolic mirror reflection, return behind this parallel beam process standard mirror and the measured piece, reflect the spherical wave that becomes convergence through off-axis parabolic mirror again, the part of Convergent Laser Beam is through large spectroscopical front surface reflection, transmission is through too small spectroscope successively, aperture and imaging len, final tested infrared eye collection forms the test imaging optical path; Another part of Convergent Laser Beam is through large spectroscope transmission, through the first refluxing reflection mirror light path of turning back, transmission is incident to imaging len through the second refluxing reflection mirror again by ground glass decay part light intensity, finally an infrared eye collection is formed an imaging optical path; Form interference cavity between standard mirror and the measured piece, standard mirror clamping is on two-dimentional adjustment rack, and the measured piece clamping is on five dimension adjustment racks, and five dimension adjustment racks are fixed on the slide block of guide rail.
The present invention compared with prior art, its significant advantage is: the difficulty that clamping is adjusted in the testing process that bring for the invisibility characteristics of infrared light (1), adopt two infrared focal plane arrays as infrared eye, provide point, the two detection imaging light paths of test.To can be in larger field range becoming a some picture with measured piece to the standard mirror to an infrared eye in the imaging optical path, thereby the inclination of monitoring standard mirror and measured piece, pitching two-dimensional signal realizes the coarse positioning to standard mirror and measured piece.The test infrared eye gathers the interferogram of standard mirror and measured piece interference formation in the test imaging optical path, finishes the accurate adjustment location to standard mirror and measured piece.(2) difficulty that clamping is adjusted in the testing process of bringing for the invisibility characteristics of infrared light adopts five dimension adjustment rack clamping measured pieces, and five dimension adjustment racks are installed on the slide block of guide rail, and guide rail is equipped with precise length measuring device.Five dimension adjustment racks can move axially along guide rail, have guaranteed the coaxiality of the collimated light beam of measured piece and the outgoing of infrared interference pick-up unit.The axial location information of precise length measuring device Real-Time Monitoring measured piece, opal and confocal position in the time of can seeking interference testing easily according to the structural parameters of measured piece.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Description of drawings
Fig. 1 is according to infrared interference pick-up unit principle schematic of the present invention.
Fig. 2 is based on the principle schematic of infrared interference pick-up unit test aspheric surface among the present invention.
Fig. 3 is based on the principle schematic of infrared interference pick-up unit test Infrared Lens wave aberration quality among the present invention.
Embodiment
In conjunction with Fig. 1, the present invention has the infrared interference pick-up unit to point, test double detector, comprises CO
2Laser instrument 1, semiconductor laser 2, first, two-mirror 3,4, beam expanding lens 5, little spectroscope 6, large spectroscope 7, off-axis parabolic mirror 8, aperture 9, test imaging len 10, test infrared eye 11, the first refluxing reflection mirror 12, ground glass 13, the second refluxing reflection mirror 14, to an imaging len 15, to an infrared eye 16, two dimension adjustment rack 17, five dimension adjustment racks 18 and outfit precise length measuring device are (such as grating scale, length-measuring interferometer etc.) guide rail 19, its medium and small spectroscope 6, large spectroscope 7, aperture 9, test imaging len 10 and test infrared eye 11 consist of the test imaging optical path, large spectroscope 7, refluxing reflection mirror 12, ground glass 13, refluxing reflection mirror 14, consist of to an imaging optical path, namely by CO to an imaging len 15 with to an infrared eye 16
2The infrared laser that laser instrument 1 sends (such as 10.6 μ m) is incident to beam expanding lens 5 through first and second catoptron 3,4 successively, and this beam expanding lens 5 is assembled the small-bore directional light of incident, and light beam becomes the spherical wave of dispersing after the overconvergence focus.Spherical wave reflexes to off-axis parabolic mirror 8 through too small spectroscope 6 and large spectroscope 7 successively, and the focus of this off-axis parabolic mirror 8 overlaps with the focus of beam expanding lens 5, and divergent spherical wave becomes the parallel beam of collimation after off-axis parabolic mirror 8 reflections.Parallel beam returns through standard mirror 20 and measured piece 21, becomes the spherical wave of convergence through off-axis parabolic mirror 8 reflections again.The part of Convergent Laser Beam is through the front surface reflection of large spectroscope 7, transmission is through too small spectroscope 6, aperture 9 and test imaging len 10 successively, final tested infrared eye 11 gathers and forms the test imaging optical path, another part of Convergent Laser Beam is through large spectroscope 7 transmissions, through the first refluxing reflection mirror 12 light path of turning back, transmission is by ground glass 13 decay part light intensity, turn catoptron 14 and be incident to imaging len 15 through rolling over second again, finally an infrared eye 16 is gathered and form an imaging optical path.Form interference cavity between standard mirror 20 and the measured piece 21, standard mirror 20 clampings are on two-dimentional adjustment rack 17, and measured piece 21 clampings are on five dimension adjustment racks 18, and five dimension adjustment racks 18 are fixed on the slide block of guide rail 19.When the light path of infrared interference pick-up unit is adjusted, introduce semiconductor laser 2 and finish the auxiliary adjustment of visible light, namely at first adjust visible light and infrared light is coaxial, the paper screen is placed on the emitting light path of beam-expanding collimation light path, each element orientation in the adjustment so that on the collimated light path hot spot bore of diverse location identical, namely finished the adjustment of beam-expanding collimation light path; Then place retroreflection element at collimated light path, so that the former road of collimation directional light of outgoing is returned, place the paper screen meeting of observation focus point at aperture 9 places, and adjustment aperture 9 orientation make light beam see through aperture; Then adjust the orientation of standard mirror 20, its meeting focus point that returns is overlapped with the meeting focus point that retroreflection element returns; Semiconductor laser 2 is shifted out from light path, open CO
2Laser instrument 1, can be at the background patterns of test infrared eye acquisition to 20 imagings of standard mirror, the adjusting knob that trace is adjusted the two-dimentional adjustment rack 17 of clamping standard mirror 20 obtains the uniform background patterns of edge clear brightness, has namely finished the adjustment of test imaging optical path; Regulate refluxing reflection mirror 12,14 and to the orientation of an imaging len 15, can be at the some picture that an infrared eye 16 is obtained return through standard mirror 17, trace is regulated the position of ground glass 13, so that moderate to the some image brightness on the infrared eye 16, to be arranged on to the crosshair on the infrared eye 16 center of a picture as the benchmark to putting, namely finish the adjustment to an imaging optical path.
It is 45 ° that the present invention has the first catoptron 3 of the infrared interference pick-up unit of point, test double detector and the angle of incident laser.The orientation of the second catoptron 4, beam expanding lens 5, little spectroscope 6, large spectroscope 7 satisfies the divergent spherical wave optical axis and the horizontal direction angle is 9.53 ± 5 °.The optical axis of off-axis parabolic mirror 8 and horizontal direction angle are 9.53 ± 5 °.The orientation of the first refluxing reflection mirror 12 satisfies Convergent Laser Beam optical axis after it turns back light path and becomes vertical direction.The angle of the orientation of the second refluxing reflection mirror 14 and spherical wave optical axis direction is 45 °.
In conjunction with Fig. 2, use infrared interference pick-up unit of the present invention to detect aspheric surface.Standard sphere germainium lens 23 is converted into the standard ball ground roll with the collimated light of infrared interference pick-up unit main frame 22 outgoing, and for the test infrared aspheric lens 24 aspheric surface provide with reference to sphere.The reference surface of standard sphere germainium lens 23 and the aspheric surface of tested infrared aspheric lens 24 are placed on confocal position, form interference cavity between the two.When aspheric surface detects the clamping adjustment, at first with standard sphere germainium lens 23 clampings on two-dimentional adjustment rack 20, observe the some picture that an infrared eye 16 subscript director sphere germainium lens 23 are returned at monitor, adjust the two-dimensional adjustment knob, the invocation point picture is overlapped substantially with crosshair, the background patterns that the standard sphere germainium lens 23 that gathers according to test infrared eye 11 on the monitor again returns, trace is adjusted the two-dimensional adjustment knob, so that background patterns edge clear and brightness are even; Then tested infrared aspheric lens 24 clampings are tieed up on the adjustment racks 18 five, structural parameters according to standard sphere germainium lens 23, adjust the axial location of tested infrared aspheric lens 24 at the guide rail 19 that is equipped with grating scale, and adjust five the dimension adjustment racks 18 inclination and pitch regulation knob so that the aspheric surface of Infrared Lens is placed on the opal position; Record the reading that grating scale shows when the opal position, add that tested aspheric radius can obtain the axial coordinate reading of confocal position, according to the real-time reading that shows of grating scale, move axially tested infrared aspheric lens 24 near confocal position at guide rail 19, this moment can tested infrared aspheric lens 24 returns on monitor observes an infrared eye 16 the some picture, regulate the XYZ D translation of five dimension adjustment racks 18 and adjust knob, so that the some picture that tested infrared aspheric lens 24 returns looks like to overlap with the point that standard ball germanium face lens 23 return, can observe the interferogram that test infrared eye 11 gathers this moment at monitor, trace is adjusted the pitching of five dimension adjustment racks 18, the tilt adjustment knob is until 1 ~ 2 interference fringe in the better edge clear of display comparison degree ground on the monitor.Adopt the movable phase interfere testing software, can calculate the aspheric surface of tested infrared aspheric lens 24 and the surface form deviation value of best-fit sphere.
In conjunction with Fig. 3, use infrared interference pick-up unit of the present invention to detect Infrared Lens transmitted wave aberration quality.The collimated light beam of infrared interference pick-up unit main frame 22 outgoing is assembled through tested infrared aspheric lens 24, and is confocal with tested infrared aspheric lens 24 with reference to sphere 26, standard germanium optical flat 25 with form interference cavity with reference to sphere 26.The method for test adjusting of infrared aspheric lens 24 transmitted wave aberration quality is identical with the described method of Fig. 2.Not only can detect the wave aberration quality of infrared aspheric lens 24 according to this principle device, can also detect the transmitted wave aberration quality of other infrared optical system.
Claims (6)
1. an infrared interference pick-up unit that has point, test double detector is characterized in that comprising CO
2Laser instrument [1], semiconductor laser [2], first, two-mirror [3,4], beam expanding lens [5], little spectroscope [6], large spectroscope [7], off-axis parabolic mirror [8], aperture [9], test imaging len [10], test infrared eye [11], the first refluxing reflection mirror [12], ground glass [13], the second refluxing reflection mirror [14], to an imaging len [15], to an infrared eye [16], two dimension adjustment rack [17], the guide rail [19] of five dimension adjustment racks [18] and outfit precise length measuring device, its medium and small spectroscope [6], large spectroscope [7], aperture [9], test imaging len [10] and test infrared eye [11] consist of the test imaging optical path, large spectroscope [7], the first refluxing reflection mirror [12], ground glass [13], the second refluxing reflection mirror [14], consist of to an imaging optical path, namely by CO to an imaging len [15] with to an infrared eye [16]
2The infrared laser that laser instrument [1] sends is successively through first, two-mirror [3,4] be incident to beam expanding lens [5], beam expanding lens [5] is assembled the small-bore directional light of incident, light beam becomes the spherical wave of dispersing after the overconvergence focus, spherical wave reflexes to off-axis parabolic mirror [8] through too small spectroscope [6] and large spectroscope [7] successively, the focus of this off-axis parabolic mirror [8] overlaps with the focus of beam expanding lens [5], divergent spherical wave becomes the parallel beam of collimation after off-axis parabolic mirror [8] reflection, return behind this parallel beam process standard mirror [20] and the measured piece [21], pass through again the spherical wave that off-axis parabolic mirror [8] reflection becomes convergence, the part of Convergent Laser Beam is through the front surface reflection of large spectroscope [7], transmission is through too small spectroscope [6] successively, aperture [9] and imaging len [10], final tested infrared eye [11] collection form the test imaging optical path; Another part of Convergent Laser Beam is through large spectroscope [7] transmission, through the first refluxing reflection mirror [12] light path of turning back, transmission is by ground glass [13] decay part light intensity, be incident to imaging len [15] through the second refluxing reflection mirror [14] again, finally an infrared eye [16] collection formed an imaging optical path; Form interference cavity between standard mirror [20] and the measured piece [21], standard mirror [20] clamping is on two-dimentional adjustment rack [17], and measured piece [21] clamping is on five dimension adjustment racks [18], and five dimension adjustment racks [18] are fixed on the slide block of guide rail [19];
When wherein the light path of infrared interference pick-up unit is adjusted, introduce semiconductor laser [2] and finish the auxiliary adjustment of visible light, namely at first adjust visible light and infrared light is coaxial, the paper screen is placed on the emitting light path of beam-expanding collimation light path, each element orientation in the adjustment so that on the collimated light path hot spot bore of diverse location identical, namely finished the adjustment of beam-expanding collimation light path; Then place retroreflection element at collimated light path, so that the former road of collimation directional light of outgoing is returned, locate to place paper screen observation meeting focus point at aperture [9], and adjustment aperture [9] orientation makes light beam see through aperture; Then adjust the orientation of standard mirror [20], its meeting focus point that returns is overlapped with the meeting focus point that retroreflection element returns; Semiconductor laser [2] is shifted out from light path, open CO
2Laser instrument [1], can be at the background patterns of test infrared eye acquisition to standard mirror [20] imaging, the adjusting knob that trace is adjusted the two-dimentional adjustment rack [17] of clamping standard mirror [20] obtains the uniform background patterns of edge clear brightness, has namely finished the adjustment of test imaging optical path; Regulate refluxing reflection mirror [12], [14] and to the orientation of an imaging len [15], can be at the some picture that an infrared eye [16] is obtained return through standard mirror [17], trace is regulated the position of ground glass [13], so that moderate to the some image brightness on the infrared eye [16], to be arranged on to the crosshair on the infrared eye [16] center of a picture as the benchmark to putting, namely finish the adjustment to an imaging optical path.
2. the infrared interference pick-up unit that has point, test double detector according to claim 1 is characterized in that the first catoptron [3] and the angle of incident laser are 45 °.
3. the infrared interference pick-up unit that has point, test double detector according to claim 1, the orientation that it is characterized in that the second catoptron [4], beam expanding lens [5], little spectroscope [6], large spectroscope [7] satisfies the divergent spherical wave optical axis and the horizontal direction angle is 9.53 ± 5 °.
4. the infrared interference pick-up unit that has point, test double detector according to claim 1 is characterized in that the optical axis of off-axis parabolic mirror [8] and horizontal direction angle are 9.53 ± 5 °.
5. the infrared interference pick-up unit that has point, test double detector according to claim 1, the orientation that it is characterized in that the first refluxing reflection mirror [12] satisfies Convergent Laser Beam optical axis after it turns back light path and becomes vertical direction.
6. the infrared interference pick-up unit that has point, test double detector according to claim 1 is characterized in that the orientation of the second refluxing reflection mirror [14] and the angle of spherical wave optical axis direction are 45 °.
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376199A (en) * | 2012-04-28 | 2013-10-30 | 深圳大学 | Method and experimental device for carrying out vision measurement by adjusting objective and background luminance |
| CN102749042A (en) * | 2012-07-16 | 2012-10-24 | 南京理工大学 | Double-triangle type multi-channel medium wave infrared interference detection device |
| CN103017681B (en) * | 2012-12-07 | 2013-12-25 | 南通大学 | Real time detecting method for rotary shaft symmetrically concave aspheric surfaces approximate to paraboloids |
| CN103322942A (en) * | 2013-07-15 | 2013-09-25 | 中国科学院光电技术研究所 | Method for detecting surface shape of each optical element of optical system based on wave aberration |
| CN108132026B (en) * | 2018-01-24 | 2024-02-27 | 赵智亮 | Infrared and visible light dual-wavelength transmission type interference testing device in semiconductor |
| CN114061449A (en) * | 2021-11-01 | 2022-02-18 | 南京理工大学 | Infrared interference detection device of single detector and design method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5055695A (en) * | 1990-06-28 | 1991-10-08 | Wyko Corporation | Alignment system and method for infrared interferometer |
| CN101858735A (en) * | 2010-05-19 | 2010-10-13 | 中国科学院光电技术研究所 | Large-caliber off-axis aspheric surface measuring and calibrating system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08233513A (en) * | 1995-02-24 | 1996-09-13 | Nikon Corp | Interference system |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5055695A (en) * | 1990-06-28 | 1991-10-08 | Wyko Corporation | Alignment system and method for infrared interferometer |
| CN101858735A (en) * | 2010-05-19 | 2010-10-13 | 中国科学院光电技术研究所 | Large-caliber off-axis aspheric surface measuring and calibrating system |
Non-Patent Citations (1)
| Title |
|---|
| 贺俊等.移相式泰曼-格林红外干涉仪调试技术.《红外与激光工程》.2008,第37卷(第03期), * |
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