CN102159929A - 具有发射电流及偏压电位控制的电离计 - Google Patents

具有发射电流及偏压电位控制的电离计 Download PDF

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Publication number
CN102159929A
CN102159929A CN2009801370982A CN200980137098A CN102159929A CN 102159929 A CN102159929 A CN 102159929A CN 2009801370982 A CN2009801370982 A CN 2009801370982A CN 200980137098 A CN200980137098 A CN 200980137098A CN 102159929 A CN102159929 A CN 102159929A
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CN
China
Prior art keywords
pressure
ionization gauge
electron source
current
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2009801370982A
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English (en)
Chinese (zh)
Inventor
赖利·K·卡麦可
杰西·A·韦伯
约翰·H·亨利
麦可·N·史考特
葛拉多·A·布鲁克尔
肯尼斯·D·凡安特卫普
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MKS Instruments Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Priority to CN201610282044.7A priority Critical patent/CN106404277A/zh
Publication of CN102159929A publication Critical patent/CN102159929A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Solid Thermionic Cathode (AREA)
CN2009801370982A 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计 Pending CN102159929A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610282044.7A CN106404277A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19268408P 2008-09-19 2008-09-19
US61/192,684 2008-09-19
PCT/US2009/056612 WO2010033427A1 (en) 2008-09-19 2009-09-11 Ionization gauge with emission current and bias potential control

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201610282044.7A Division CN106404277A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Publications (1)

Publication Number Publication Date
CN102159929A true CN102159929A (zh) 2011-08-17

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN2009801370982A Pending CN102159929A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计
CN201610282044.7A Pending CN106404277A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

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CN201610282044.7A Pending CN106404277A (zh) 2008-09-19 2009-09-11 具有发射电流及偏压电位控制的电离计

Country Status (6)

Country Link
US (2) US8947098B2 (https=)
EP (2) EP2326931B1 (https=)
JP (3) JP2012503199A (https=)
CN (2) CN102159929A (https=)
DK (2) DK3517921T3 (https=)
WO (1) WO2010033427A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104303033A (zh) * 2012-02-08 2015-01-21 Mks仪器公司 用于高压操作的电离计
CN107407612A (zh) * 2015-03-23 2017-11-28 株式会社爱发科 三极管型电离真空计
CN112204696A (zh) * 2018-05-29 2021-01-08 万机仪器公司 利用倒磁控管源进行气体分析
CN112525419A (zh) * 2019-09-19 2021-03-19 佳能安内华股份有限公司 电子生成装置和电离真空计

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CN102159929A (zh) 2008-09-19 2011-08-17 布鲁克机械公司 具有发射电流及偏压电位控制的电离计
JP5901142B2 (ja) * 2011-05-18 2016-04-06 株式会社アルバック 水素またはヘリウム用の検出計及び水素またはヘリウムの検出方法並びにリークディテクタ
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US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
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US10242855B1 (en) * 2016-09-21 2019-03-26 The United States of America as requested by the Secretary of the Air Force Detector, system and method for droplet and/or cluster beam spectroscopy
JP6815283B2 (ja) * 2017-06-09 2021-01-20 アズビル株式会社 静電容量型圧力センサ
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104303033A (zh) * 2012-02-08 2015-01-21 Mks仪器公司 用于高压操作的电离计
CN107407612A (zh) * 2015-03-23 2017-11-28 株式会社爱发科 三极管型电离真空计
CN107407612B (zh) * 2015-03-23 2020-11-03 株式会社爱发科 三极管型电离真空计
CN112204696A (zh) * 2018-05-29 2021-01-08 万机仪器公司 利用倒磁控管源进行气体分析
CN112204696B (zh) * 2018-05-29 2021-10-22 万机仪器公司 倒磁控管冷阴极电离真空计、电离源、测量压力的方法
CN112525419A (zh) * 2019-09-19 2021-03-19 佳能安内华股份有限公司 电子生成装置和电离真空计

Also Published As

Publication number Publication date
JP6341970B2 (ja) 2018-06-13
US9383286B2 (en) 2016-07-05
JP2015062035A (ja) 2015-04-02
JP6031502B2 (ja) 2016-11-24
EP2326931A1 (en) 2011-06-01
CN106404277A (zh) 2017-02-15
EP2326931A4 (en) 2012-08-08
JP2012503199A (ja) 2012-02-02
EP2326931B1 (en) 2019-04-24
JP2017015738A (ja) 2017-01-19
EP3517921B1 (en) 2020-11-04
US20110163754A1 (en) 2011-07-07
WO2010033427A1 (en) 2010-03-25
US20150108993A1 (en) 2015-04-23
EP3517921A1 (en) 2019-07-31
DK2326931T3 (da) 2019-07-22
DK3517921T3 (da) 2021-01-18
US8947098B2 (en) 2015-02-03

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Owner name: MKS INSTRUMENTS INC.

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Effective date: 20141023

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Effective date of registration: 20141023

Address after: Massachusetts, USA

Applicant after: MKS Instruments Inc.

Address before: Massachusetts, USA

Applicant before: Brooks Automation Inc.

C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20110817