CN102153951B - 含有聚硅氮烷的涂布组合物 - Google Patents

含有聚硅氮烷的涂布组合物 Download PDF

Info

Publication number
CN102153951B
CN102153951B CN201110006067.2A CN201110006067A CN102153951B CN 102153951 B CN102153951 B CN 102153951B CN 201110006067 A CN201110006067 A CN 201110006067A CN 102153951 B CN102153951 B CN 102153951B
Authority
CN
China
Prior art keywords
molecular weight
coating composition
perhydropolysilazane
weight
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201110006067.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN102153951A (zh
Inventor
林昌伸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merck Patent GmbH
Original Assignee
Merck Performance Materials IP Japan GK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck Performance Materials IP Japan GK filed Critical Merck Performance Materials IP Japan GK
Publication of CN102153951A publication Critical patent/CN102153951A/zh
Application granted granted Critical
Publication of CN102153951B publication Critical patent/CN102153951B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/16Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/007After-treatment
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/20Diluents or solvents
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326Deposition processes
    • H10P14/6342Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69Inorganic materials
    • H10P14/692Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6921Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
    • H10P14/69215Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material being a silicon oxide, e.g. SiO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Formation Of Insulating Films (AREA)
  • Paints Or Removers (AREA)
  • Silicon Polymers (AREA)
  • Element Separation (AREA)
CN201110006067.2A 2010-01-07 2011-01-06 含有聚硅氮烷的涂布组合物 Active CN102153951B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-001883 2010-01-07
JP2010001883A JP5172867B2 (ja) 2010-01-07 2010-01-07 ポリシラザンを含むコーティング組成物

Publications (2)

Publication Number Publication Date
CN102153951A CN102153951A (zh) 2011-08-17
CN102153951B true CN102153951B (zh) 2015-03-25

Family

ID=44435640

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110006067.2A Active CN102153951B (zh) 2010-01-07 2011-01-06 含有聚硅氮烷的涂布组合物

Country Status (4)

Country Link
JP (1) JP5172867B2 (https=)
KR (1) KR101711662B1 (https=)
CN (1) CN102153951B (https=)
TW (1) TWI568806B (https=)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5970197B2 (ja) * 2012-02-08 2016-08-17 メルクパフォーマンスマテリアルズマニュファクチャリング合同会社 無機ポリシラザン樹脂
JP6107188B2 (ja) * 2012-03-13 2017-04-05 セントラル硝子株式会社 防曇膜形成材料、防曇膜形成用塗布液、防曇性物品、及びそれらの製法
KR101556672B1 (ko) 2012-12-27 2015-10-01 제일모직 주식회사 실리카계 절연층 형성용 조성물, 실리카계 절연층 형성용 조성물의 제조방법, 실리카계 절연층 및 실리카계 절연층의 제조방법
US20140322486A1 (en) * 2013-04-30 2014-10-30 Shigeto Kobori Method for preparing modified silica film, coating liquid for the same and modified silica film prepared from the same
JP2014213318A (ja) * 2013-04-30 2014-11-17 チェイル インダストリーズインコーポレイテッド 改質シリカ膜の製造方法、塗工液、及び改質シリカ膜
JP6104785B2 (ja) 2013-12-09 2017-03-29 アーゼッド・エレクトロニック・マテリアルズ(ルクセンブルグ)ソシエテ・ア・レスポンサビリテ・リミテ ペルヒドロポリシラザン、およびそれを含む組成物、ならびにそれを用いたシリカ質膜の形成方法
JP6198685B2 (ja) * 2014-07-01 2017-09-20 国立大学法人東京工業大学 ポリベンゾオキサジン−シリカ複合体およびその製造方法
US10020185B2 (en) 2014-10-07 2018-07-10 Samsung Sdi Co., Ltd. Composition for forming silica layer, silica layer, and electronic device
KR101806328B1 (ko) * 2014-10-07 2017-12-07 삼성에스디아이 주식회사 실리카계 막 형성용 조성물, 실리카계 막, 및 전자 디바이스
KR101833800B1 (ko) 2014-12-19 2018-03-02 삼성에스디아이 주식회사 실리카계 막 형성용 조성물, 실리카계 막의 제조방법 및 상기 실리카계 막을 포함하는 전자 소자
KR101837971B1 (ko) 2014-12-19 2018-03-13 삼성에스디아이 주식회사 실리카계 막 형성용 조성물, 실리카계 막, 및 전자 디바이스
KR20170014946A (ko) 2015-07-31 2017-02-08 삼성에스디아이 주식회사 실리카 막 형성용 조성물, 실리카 막의 제조방법 및 실리카 막
KR102066271B1 (ko) * 2017-04-18 2020-01-14 단국대학교 천안캠퍼스 산학협력단 정전척 실링방법
WO2019065035A1 (ja) * 2017-09-27 2019-04-04 信越化学工業株式会社 含フッ素コーティング剤組成物、表面処理剤及び物品
CN108329506A (zh) * 2018-03-01 2018-07-27 苏州维洛克电子科技有限公司 含全氢聚硅氮烷-尿素涂层的聚酯薄膜的制备方法
KR102432933B1 (ko) 2019-05-17 2022-08-12 삼성에스디아이 주식회사 실리카 막 형성용 조성물, 그로부터 형성된 실리카 막, 및 상기 실리카 막을 포함하는 전자 소자
KR102094647B1 (ko) * 2019-10-31 2020-03-31 화성이엔씨(주) 상온포장 가능한 이액형 미끄럼방지 차열포장재 및 이의 제조방법
CN110925779A (zh) * 2019-12-11 2020-03-27 大连东泰产业废弃物处理有限公司 一种含有全氢聚硅氮烷废有机溶剂用于焚烧炉的利用方法
JP7222948B2 (ja) 2020-04-23 2023-02-15 信越化学工業株式会社 高硬度皮膜形成用コーティング剤組成物
JP2022036556A (ja) * 2020-08-24 2022-03-08 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング ポリシラザン、およびそれを含むシリカ質膜形成組成物、ならびにそれを用いたシリカ質膜の製造方法
KR102265267B1 (ko) * 2021-01-13 2021-06-17 (주)에스케이솔라에너지 건축물에 적용 가능한 컬러태양광모듈
KR102253483B1 (ko) * 2021-01-13 2021-05-20 (주)에스케이솔라에너지 건축물에 적용 가능하고 효율이 개선된 컬러태양광모듈
CN119350970A (zh) * 2024-10-29 2025-01-24 无锡聚合高新材料科技有限公司 一种应用于石油炼化设备耐超高温重防腐涂料、制备方法及其涂布方法
CN120230292B (zh) * 2025-05-30 2025-08-15 中国科学院化学研究所 一种含硅聚合物在纳米沟槽结构填充中的应用及含硅聚合物与制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1608314A (zh) * 2001-12-27 2005-04-20 克拉瑞特国际有限公司 用于处理聚硅氮烷的溶剂和采用这种溶剂处理聚硅氮烷的方法
CN101001930A (zh) * 2004-08-13 2007-07-18 Az电子材料(日本)株式会社 具有较小平带位移的硅质膜及其制备方法
CN101111575A (zh) * 2005-02-02 2008-01-23 Az电子材料(日本)株式会社 聚硅氮烷处理溶剂及用该溶剂处理聚硅氮烷的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2613787B2 (ja) 1987-08-13 1997-05-28 財団法人石油産業活性化センター 無機シラザン高重合体、その製造方法及びその用途
JPH03232709A (ja) * 1990-02-09 1991-10-16 Tonen Corp 窒化珪素繊維用ポリシラザン及びその製法
JP3015104B2 (ja) * 1991-07-16 2000-03-06 触媒化成工業株式会社 半導体装置およびその製造方法
JPH05148720A (ja) * 1991-11-22 1993-06-15 Honda Motor Co Ltd ポリシラザン繊維、その製造方法及びセラミツク繊維
US5459114A (en) * 1992-11-26 1995-10-17 Tonen Corporation Method for producing ceramic products
JP3208040B2 (ja) 1995-04-04 2001-09-10 触媒化成工業株式会社 シリカ系被膜形成用塗布液および被膜付基材
JP5020425B2 (ja) * 2000-04-25 2012-09-05 Azエレクトロニックマテリアルズ株式会社 微細溝をシリカ質材料で埋封する方法
KR100362834B1 (ko) * 2000-05-02 2002-11-29 삼성전자 주식회사 반도체 장치의 산화막 형성 방법 및 이에 의하여 제조된 반도체 장치
CN100444331C (zh) * 2003-11-11 2008-12-17 三星电子株式会社 旋涂玻璃组合物和在半导体制造工序中使用该旋涂玻璃形成氧化硅层的方法
DE102004011212A1 (de) * 2004-03-04 2005-09-29 Clariant International Limited Perhydropolysilazane enthaltende Beschichtungen für Metall- und Polymeroberflächen
JP2009158887A (ja) * 2007-12-28 2009-07-16 Jgc Catalysts & Chemicals Ltd 半導体装置およびその製造方法
JP5306669B2 (ja) * 2008-02-29 2013-10-02 AzエレクトロニックマテリアルズIp株式会社 シリカ質膜の形成方法およびそれにより形成されたシリカ質膜
JP5692736B2 (ja) * 2009-10-05 2015-04-01 株式会社Adeka 絶縁膜形成用塗布液、それを用いた絶縁膜

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1608314A (zh) * 2001-12-27 2005-04-20 克拉瑞特国际有限公司 用于处理聚硅氮烷的溶剂和采用这种溶剂处理聚硅氮烷的方法
CN101001930A (zh) * 2004-08-13 2007-07-18 Az电子材料(日本)株式会社 具有较小平带位移的硅质膜及其制备方法
CN101111575A (zh) * 2005-02-02 2008-01-23 Az电子材料(日本)株式会社 聚硅氮烷处理溶剂及用该溶剂处理聚硅氮烷的方法

Also Published As

Publication number Publication date
JP5172867B2 (ja) 2013-03-27
CN102153951A (zh) 2011-08-17
KR101711662B1 (ko) 2017-03-02
TWI568806B (zh) 2017-02-01
TW201132716A (en) 2011-10-01
KR20110081043A (ko) 2011-07-13
JP2011142207A (ja) 2011-07-21

Similar Documents

Publication Publication Date Title
CN102153951B (zh) 含有聚硅氮烷的涂布组合物
JP6104785B2 (ja) ペルヒドロポリシラザン、およびそれを含む組成物、ならびにそれを用いたシリカ質膜の形成方法
CN104114483A (zh) 无机聚硅氮烷树脂
JPWO2008029834A1 (ja) シリカ質膜形成用組成物およびそれを用いたシリカ質膜の製造法
SG191997A1 (en) Method for producing silicon dioxide film
CN103189972B (zh) 隔离结构的形成方法
CN107778876B (zh) 用于形成二氧化硅层的组成物、二氧化硅层和电子装置
TW201811671A (zh) 用於形成二氧化矽層的組成物、二氧化矽層和電子裝置
TW202225282A (zh) 聚矽氮烷、包含其之矽質膜形成組成物及使用其製造矽質膜的方法
CN111944320B (zh) 用于形成二氧化硅层的组成物、二氧化硅层及电子装置
JP7714631B2 (ja) ポリシラザン、およびそれを含むシリカ質膜形成組成物、ならびにそれを用いたシリカ質膜の製造方法
TWI723234B (zh) 矽氧氮烷化合物、及含其之組成物、以及使用其之二氧化矽質膜之形成方法
JP2004292642A (ja) 多孔質膜形成用組成物、多孔質膜の製造方法、多孔質膜、層間絶縁膜、及び半導体装置
CN101512737A (zh) 硅质薄膜形成用组合物及应用所述组合物的硅质薄膜的形成方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C53 Correction of patent of invention or patent application
CB02 Change of applicant information

Address after: Tokyo, Japan

Applicant after: AZ Electronic Materials (Japan) K. K.

Address before: Tokyo, Japan

Applicant before: AZ electronic materials (Japan) Co., Ltd.

COR Change of bibliographic data

Free format text: CORRECT: APPLICANT; FROM: AZ ELECTRONIC MATERIALS (JAPAN) K.K. TO: AZ ELECTRONIC MATERIALS IP (JAPAN) K.K.

C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: MERCK PATENT GMBH

Free format text: FORMER OWNER: AZ ELECTRONIC MATERIALS IP (JAPAN) K.K.

Effective date: 20150331

TR01 Transfer of patent right

Effective date of registration: 20150331

Address after: Darmstadt

Patentee after: Merck Patent GmbH

Address before: Tokyo, Japan

Patentee before: AZ Electronic Materials (Japan) K. K.