CN102133731A - Pressure control system for plurality of chambers of CMP (chemical mechanical polishing) head - Google Patents
Pressure control system for plurality of chambers of CMP (chemical mechanical polishing) head Download PDFInfo
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- CN102133731A CN102133731A CN 201110002122 CN201110002122A CN102133731A CN 102133731 A CN102133731 A CN 102133731A CN 201110002122 CN201110002122 CN 201110002122 CN 201110002122 A CN201110002122 A CN 201110002122A CN 102133731 A CN102133731 A CN 102133731A
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Abstract
The invention relates to a pressure control system for a plurality of chambers of a CMP (chemical mechanical polishing) head, belonging to the technical field of semiconductor manufacture. The pressure control system is characterized by comprising a pressure source, a control valve group, a pressure sensor, a CPU (central processing unit), digital-to-analog and analog-to-digital conversion circuits and the like. In the control system, pressure control for all chambers at remote ends is realized by control the pressure and the flow of all branches. Each branch in the control valve group consists of a positive pressure channel, a negative pressure and a two-way filter. Each positive pressure channel consists of a pressure reducing valve, a positive pressure air bag, an electric control proportioning valve and a positive and negative pressure switch valve group which are connected with the pressure source in sequence, wherein all the positive pressure channels share the same pressure reducing valve and the same positive pressure air bag. Each negative pressure channel consists of a vacuum switch valve, a vacuum generator, a vacuum air bag, a vacuum pressure adjusting valve and a positive and negative pressure switch valve group which are connected with the pressure source in sequence, wherein all the negative pressure channels share the same vacuum switch valve, the same vacuum generator and the same vacuum air bag. The outputs of the positive and negative switch valve groups are connected with the filters. The pressure sensor transmits acquired pressure of all the chambers to the CPU by the A/D conversion circuits.
Description
Technical field
The present invention relates to the pneumatic control system in the semiconductor manufacturing facility, particularly a kind of chemically mechanical polishing (Chemical Mechanical Polishing, CMP) malleation of rubbing head and vacuum control system of being used for.
Background technology
Current, CMP is the otherwise effective technique of wafer overall situation planarization in the semiconductor fabrication process.Throw in the copper field at CMP, rubbing head clamping silicon chip will wait to throw the polishing disk that the copper laminar surface is pressed to rotation, realize that by polishing pad friction on the polishing disk and polishing fluid corrosion the copper layer removes fast and effectively.Wherein, rubbing head can be by the overall dynamic adjustments of each annulus chamber pressure realization of the control silicon chip back side to silicon wafer polishing pressure.
The rubbing head internal chamber is equivalent to a plurality of airtight chamber, and extruding can be pushed or not have to inflatable and contraction mutually between the chamber.Coupling between the chamber mainly contains three kinds of situations: a kind of is the volume coupling, i.e. extruding between each chamber or contraction cause the variation of cavity volume; A kind of is source of the gas input coupling, causes source of the gas moment air supply pressure fluctuation when each chamber pressurizes simultaneously; At last a kind of is vacuum output coupling, and during the vacuum action simultaneously of multi-cavity chamber, the variation of a certain chamber vacuum (such as leaking gas) causes other chamber vacuum and changes.For the common way that solves of the situation of volume coupling is to change ways such as structural design or software compensation; And source of the gas input coupling and vacuum output coupling can realize by changing the design of gas circuit control structure.
In addition, the pressure sensitive unit in this control system is used to gather the real-time pressure of chamber, feeds back to control system subsequently and constitutes the control of full cut-off ring.Yet be subjected to the restriction of structure, the installation site of this sensing unit usually can not be positioned over the rubbing head chamber interior, but is placed in the pneumatic control system exit.
Summary of the invention
The object of the present invention is to provide a kind of control pressurer system of the CMP of being used for rubbing head.It is characterized in that containing:
As source of the gas, control valve group, pressure sensor, A/D change-over circuit, D/A change-over circuit and the CPU of pressure source, wherein:
Total N of pressure sensor, N 〉=1, gather N same in a far-end rubbing head chamber pressure respectively, each chamber pressure that collects is input among the CPU by an A/D change-over circuit with same N passage, the swivel joint of described N chamber on a wherein said N pressure sensor and chemically mechanical polishing (CMP) equipment links to each other
The control valve group, total N bar branch road, each branch road correspondence is connecting a described chamber, the input of described every branch road links to each other with pressure source, the output of every branch road links to each other with input corresponding to the described chamber of this branch road, every route malleation passage, negative pressure channel and a dual flow filter are formed, wherein:
Positive pressure passageway, pressure-reducing valve, malleation air bag, electronically controlled proportional valve and positive negative pressure switch valve group by series connection successively constitute, the input of described pressure-reducing valve links to each other with the output of described pressure source, wherein shared same pressure-reducing valve of the positive pressure passageway of all branch roads and same malleation air bag
Negative pressure channel, constitute by the vacuum switch valve, vacuum generator, negative pressure gasbag, vacuum regulating valve of the normally open of series connection successively and with the shared positive negative pressure switch valve group of described positive pressure passageway, the input of described vacuum switch valve links to each other with the output of described pressure source, the wherein shared same vacuum switch valve of the negative pressure channel of all branch roads, vacuum generator and same negative pressure gasbag
The output of described positive negative pressure switch valve group links to each other with the input of a dual flow filter, and the output of this dual flow filter links to each other with described chamber on the corresponding branch road,
Described positive negative pressure switch valve group is by a 3-position-3-way valve, or two two-way valves parallel with one another, or a two-position three-way valve and a two-way valve composition of series connection mutually,
CPU, for each described chamber is set a chamber pressure value, simultaneously, set the electronically controlled proportional valve of a differential pressure signal output in described positive pressure passageway and export described setting chamber pressure and the difference of surveying chamber pressure, difference is greater than zero, expression continues pressurization to described chamber, difference is less than zero, expression is to described chamber depressurization, also be provided with: the switch-over control signal output simultaneously with the pulldown start-up control signal input part of the vacuum switch valve of described negative pressure channel and with the linking to each other of described positive negative pressure switch valve group by required running status switch-over control signal input, between startup pulldown process and chamber pressure regulation process, switch, the differential pressure signal of described differential pressure output output outputs to the control signal input of electronically controlled proportional valve in the described positive pressure passageway after through the D/A change-over circuit, the air pressure after the regulation and control under described switch-over control signal control via described positive negative pressure switch valve group, be sent to corresponding chamber behind the dual flow filter; Described pulldown start-up control signal is opened the vacuum switch valve output of described negative pressure channel, by the vacuum regulating valve pressure regulation after described dual flow filter is sent to corresponding chamber, under off-position, the tangential negative pressure channel of described positive negative pressure switch valve group.
The control pressurer system of a kind of CMP of being used for rubbing head multi-cavity of the present invention chamber has the following advantages and good effect:
Vacuum leak caused silicon chip to come off when 1, system can avoid owing to system's accident power-off.
2, effectively overcome the influence of source of the gas input coupling and vacuum output coupling.
3, effectively improve because the sensing accuracy error that the sensing unit riding position is brought.
4, because the interpolation of malleation air bag and negative pressure gasbag not only eliminated the influence of coupling, and what is more important is saved cost.
Description of drawings
Fig. 1 is a rubbing head multi-cavity chamber pressure control system general structure schematic diagram of the present invention, L1, and L2 ... Ln represents to lead to every branch road of chamber; DO represents the digital quantity output signal of CPU output;
Fig. 2 is the part detailed structure schematic diagram of Fig. 1 control system, P
1... P
nRepresent to be sent in the positive pressure passageway branch road of positive negative pressure switch valve group, V
1... V
nBe sent to the branch road of positive negative pressure switch valve group in the expression negative pressure channel; Δ P represents the difference of setup pressure value and observed pressure value;
Fig. 3 is the main composition schematic diagram of switch valve group, P
nRepresent to be sent in the positive pressure passageway branch road of positive negative pressure switch valve group, V
nBe sent to the branch road of positive negative pressure switch valve group in the expression negative pressure channel;
Fig. 4 is the structural representation of the embodiment of the invention, L1, and L2 ... Ln represents to lead to every branch road of chamber;
The specific embodiment
A kind of control pressurer system that is used for CMP rubbing head multi-cavity chamber provided by the invention belongs to technical field of manufacturing semiconductors, it is characterized in that comprising pressure source, control valve group, pressure sensor, CPU, digital-to-analogue and analog to digital conversion circuit etc.This control system realizes the pressure of each chamber of far-end is controlled by pressure and the flow-control to each branch road.Every route malleation of control valve group is formed with two passages of negative pressure and a dual flow filter.Positive pressure passageway is by the pressure-reducing valve, malleation air bag, the electronically controlled proportional valve that link to each other successively with pressure source, just negative pressure switch valve group constitutes, wherein shared same pressure-reducing valve of each positive pressure passageway and malleation air bag.Negative pressure channel is made of the vacuum switch valve that links to each other successively with pressure source, vacuum generator, vacuum air bag, vacuum regulating valve and positive negative pressure switch valve group, wherein the shared same vacuum switch valve of each negative pressure channel, vacuum generator and vacuum air bag.Positive negative pressure switch valve group output connects filter.Each chamber pressure that pressure sensor will collect is delivered to CPU through the A/D change-over circuit.
Further, described each bar branch line comprises malleation and two passages of negative pressure.
Further, the malleation air bag is added in the proportioning valve porch in described each positive pressure passageway.
Further, the vacuum regulating valve front end adds negative pressure gasbag in described each negative pressure channel.
Further, described sensor is the positive/negative pressure sensor.
Further, described A/D change-over circuit adopts 12 precision at least.
Further, described multi-region control pressurer system only is made up of a pressure source.
Further, described rubbing head multi-region is collapsible and expansion, can push mutually between the zone.
Below with reference to accompanying drawing pneumatic control system of the present invention is done further and to be elaborated.
Fig. 1 is a multi-cavity chamber pressure control system general structure schematic diagram of the present invention.Control pressurer system of the present invention comprises pressure source 10, pressure sensor 30, and CPU40, A/D and D/A output unit 50, control valve group 60 is formed.Control valve group 60 is connecting each chamber 20 in pressure source and the rubbing head, and (Z1～Zn), chamber pressure is gathered to CPU40 through pressure sensor 30, handles the back through software and is exported by output unit 50 control valve groups.Herein, the rubbing head chamber is a flexibility or rigidity, coupling or non-coupling between the chamber.
In Fig. 2 system control valve group 60, each branch road Li is connecting pressure source 10, and (i=1～n), each branch road mainly is made up of positive pressure passageway and negative pressure channel with each chamber 20Zi of far-end.Positive pressure passageway is composed in series successively by pressure-reducing valve 68, malleation air bag 69, electronically controlled proportional valve 62 and positive negative pressure switch valve group 63.Negative pressure channel mainly is composed in series successively by vacuum switch valve 65, vacuum generator 66 (for example ZH series of SMC company production), vacuum air bag 61, vacuum regulating valve 64 and positive negative pressure switch valve group 63.The output of positive negative pressure channel is connected to each chamber of far-end through dual flow filter 68, and positive negative pressure switch valve group 63 is the negative-pressure adsorption state when cutting off the power supply, and helps protecting silicon chip.When positive pressure passageway is worked, control positive negative pressure switch valve group 63 tangential malleation paths by CPU40 by DO output unit 50, close vacuum switch valve 65 simultaneously, regulate electronically controlled proportional valve 62 according to the pressure that the user sets, pressure sensor 30 is gathered chamber pressure to CPU40 in real time, realizes that by software control chamber pressure is consistent with setting pressure.During negative pressure channel work, positive negative pressure switch valve group 63 tangential negative pressure channels; Vacuum switch valve 65 is opened, and the positive pressure source 10 of its connection will trigger vacuum generator work, and the vacuum of chamber is regulated by vacuum regulating valve 64 and realized.
In addition, the present invention can also be communicated with atmosphere except can producing pressure and negative pressure.When being communicated with atmosphere, vacuum switch valve 65 cuts out, and this moment, vacuum generator did not produce vacuum, but was communicated with atmosphere, can realize that by positive negative pressure switch valve group 63 tangential vacuum loops each chamber links to each other with atmosphere.
Fig. 3 is the main composition schematic diagram of switch valve group.The detailed formation of switch valve group can be composed in parallel by two two-way valves (to be schemed a), also can be composed in series (figure b) by a two-bit triplet and two-way valve, perhaps be made up of a 3-position-3-way valve (figure c) etc.
Fig. 4 is embodiments of the invention, and control pressurer system of the present invention is connected to the swivel joint 80 of CMP equipment 90, and 120 chamber Z1～Zn link to each other with rubbing head, and sensor is installed on far-end swivel joint porch.When CMP equipment was carried out polished silicon slice, each district set control electronically controlled proportional valve 62 by the user and applies back pressure, and the while compares with the real time data that sensor collects, and makes chamber pressure reach desired value fast by software control.Polishing finishes when grasping silicon chip and mobile silicon chip, and vacuum loop is opened, the malleation pathway closure.
Claims (5)
1. control pressurer system that is used for the CMP rubbing head is characterized in that containing: as source of the gas, control valve group, pressure sensor, A/D change-over circuit, D/A change-over circuit and the CPU of pressure source, wherein:
Total N of pressure sensor, N 〉=1, gather N same in a far-end rubbing head chamber pressure respectively, each chamber pressure that collects is input among the CPU by an A/D change-over circuit with same N passage, the swivel joint of described N chamber on a wherein said N pressure sensor and the chemically mechanical polishing CMP equipment links to each other
The control valve group, total N bar branch road, each branch road correspondence is connecting a described chamber, the input of described every branch road links to each other with pressure source, the output of every branch road links to each other with input corresponding to the described chamber of this branch road, every route malleation passage, negative pressure channel and a dual flow filter are formed, wherein:
Positive pressure passageway, pressure-reducing valve, malleation air bag, electronically controlled proportional valve and positive negative pressure switch valve group by series connection successively constitute, the input of described pressure-reducing valve links to each other with the output of described pressure source, wherein shared same pressure-reducing valve of the positive pressure passageway of all branch roads and same malleation air bag
Negative pressure channel, constitute by the vacuum switch valve, vacuum generator, negative pressure gasbag, vacuum regulating valve of the normally open of series connection successively and with the shared positive negative pressure switch valve group of described positive pressure passageway, the input of described vacuum switch valve links to each other with the output of described pressure source, the wherein shared same vacuum switch valve of the negative pressure channel of all branch roads, vacuum generator and same negative pressure gasbag
The output of described positive negative pressure switch valve group links to each other with the input of a dual flow filter, and the output of this dual flow filter links to each other with described chamber on the corresponding branch road,
Described positive negative pressure switch valve group is by a 3-position-3-way valve, or two two-way valves parallel with one another, or a two-position three-way valve and a two-way valve composition of series connection mutually,
CPU, for each described chamber is set a chamber pressure value, simultaneously, set the electronically controlled proportional valve of a differential pressure signal output in described positive pressure passageway and export described setting chamber pressure and the difference of surveying chamber pressure, difference is greater than zero, expression continues pressurization to described chamber, difference is less than zero, expression is to described chamber depressurization, also be provided with: the switch-over control signal output while links to each other with the pulldown start-up control signal input part of the vacuum switch valve of described negative pressure channel and with the control signal input that switches by required running status of described positive negative pressure switch valve group, between startup pulldown process and chamber pressure regulation process, switch, the differential pressure signal of described differential pressure output output outputs to the control signal input of electronically controlled proportional valve in the described positive pressure passageway after through the D/A change-over circuit, the air pressure after the regulation and control under described switch-over control signal control via described positive negative pressure switch valve group, be sent to corresponding chamber behind the dual flow filter; Described pulldown start-up control signal is opened the vacuum switch valve output of described negative pressure channel, by the vacuum regulating valve pressure regulation after described dual flow filter is sent to corresponding chamber, under off-position, the tangential negative pressure channel of described positive negative pressure switch valve group.
2. a kind of control pressurer system that is used for CMP rubbing head multi-cavity chamber as claimed in claim 1 is characterized in that: described vacuum regulating valve is any in manual pressure regulating valve, automatically controlled pressure regulator valve and the electronically controlled proportional valve.
3. a kind of control pressurer system that is used for CMP rubbing head multi-cavity chamber as claimed in claim 1 is characterized in that: when the vacuum switch valve was opened, described vacuum generator produced vacuum; When the vacuum switch valve cut out, described vacuum generator linked to each other with atmosphere.
4. a kind of control pressurer system that is used for CMP rubbing head multi-cavity chamber as claimed in claim 1, it is characterized in that: described pressure sensor is installed on the air inlet end of described CMP equipment rubbing head.
5. a kind of control pressurer system that is used for CMP rubbing head multi-cavity chamber as claimed in claim 1, it is characterized in that: described pressure sensor is positive B/P EGR Back Pressure Transducer EGR.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110002122A CN102133731B (en) | 2011-01-06 | 2011-01-06 | Pressure control system for plurality of chambers of CMP (chemical mechanical polishing) head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110002122A CN102133731B (en) | 2011-01-06 | 2011-01-06 | Pressure control system for plurality of chambers of CMP (chemical mechanical polishing) head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102133731A true CN102133731A (en) | 2011-07-27 |
| CN102133731B CN102133731B (en) | 2012-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110002122A Expired - Fee Related CN102133731B (en) | 2011-01-06 | 2011-01-06 | Pressure control system for plurality of chambers of CMP (chemical mechanical polishing) head |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014039985A (en) * | 2012-08-23 | 2014-03-06 | Disco Abrasive Syst Ltd | Grinding device |
| CN105701320A (en) * | 2016-03-09 | 2016-06-22 | 天津华海清科机电科技有限公司 | Static pressurization control algorithm of multi-pressure-partition polishing head |
| CN105773397A (en) * | 2016-03-09 | 2016-07-20 | 天津华海清科机电科技有限公司 | Chemico-mechanical polishing multi-partition pressure online control algorithm |
| CN108032211A (en) * | 2017-12-11 | 2018-05-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Pressure test device and polissoir |
| CN108172534A (en) * | 2017-12-26 | 2018-06-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Air pressure monitor method, apparatus and electronic equipment |
| CN110032223A (en) * | 2019-04-18 | 2019-07-19 | 安徽皖仪科技股份有限公司 | High-precision positive/negative-pressure is double to apply automatically controlled regulator |
| CN113400195A (en) * | 2021-07-21 | 2021-09-17 | 北京烁科精微电子装备有限公司 | Method and system for online partition adjustment of loading and unloading pressure of polishing head |
| CN115256218A (en) * | 2022-06-20 | 2022-11-01 | 北京烁科精微电子装备有限公司 | Pneumatic control device for polishing head and polishing equipment thereof |
Families Citing this family (1)
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| US11266959B2 (en) * | 2014-10-08 | 2022-03-08 | Versum Materials Us, Llc | Low pressure fluctuation apparatuses for blending fluids, and methods of using the same |
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| US5443416A (en) * | 1993-09-09 | 1995-08-22 | Cybeq Systems Incorporated | Rotary union for coupling fluids in a wafer polishing apparatus |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014039985A (en) * | 2012-08-23 | 2014-03-06 | Disco Abrasive Syst Ltd | Grinding device |
| CN105701320A (en) * | 2016-03-09 | 2016-06-22 | 天津华海清科机电科技有限公司 | Static pressurization control algorithm of multi-pressure-partition polishing head |
| CN105773397A (en) * | 2016-03-09 | 2016-07-20 | 天津华海清科机电科技有限公司 | Chemico-mechanical polishing multi-partition pressure online control algorithm |
| CN108032211A (en) * | 2017-12-11 | 2018-05-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Pressure test device and polissoir |
| CN108032211B (en) * | 2017-12-11 | 2020-04-28 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Air pressure detection device and polishing equipment |
| CN108172534A (en) * | 2017-12-26 | 2018-06-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Air pressure monitor method, apparatus and electronic equipment |
| CN108172534B (en) * | 2017-12-26 | 2020-02-11 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Air pressure monitoring method and device and electronic equipment |
| CN110032223A (en) * | 2019-04-18 | 2019-07-19 | 安徽皖仪科技股份有限公司 | High-precision positive/negative-pressure is double to apply automatically controlled regulator |
| CN113400195A (en) * | 2021-07-21 | 2021-09-17 | 北京烁科精微电子装备有限公司 | Method and system for online partition adjustment of loading and unloading pressure of polishing head |
| CN115256218A (en) * | 2022-06-20 | 2022-11-01 | 北京烁科精微电子装备有限公司 | Pneumatic control device for polishing head and polishing equipment thereof |
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| CN102133731B (en) | 2012-10-10 |
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