CN102107195A - Method for cleaning float flowmeter on line and circulating cooling water system - Google Patents

Method for cleaning float flowmeter on line and circulating cooling water system Download PDF

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Publication number
CN102107195A
CN102107195A CN2009102009870A CN200910200987A CN102107195A CN 102107195 A CN102107195 A CN 102107195A CN 2009102009870 A CN2009102009870 A CN 2009102009870A CN 200910200987 A CN200910200987 A CN 200910200987A CN 102107195 A CN102107195 A CN 102107195A
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China
Prior art keywords
wash
out valve
cooling water
water system
suspended body
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Pending
Application number
CN2009102009870A
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Chinese (zh)
Inventor
杨文�
郝学涛
孙建军
黎健
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
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Priority to CN2009102009870A priority Critical patent/CN102107195A/en
Publication of CN102107195A publication Critical patent/CN102107195A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a method for cleaning a float flowmeter on line. The float flowmeter is arranged in a circulating cooling water system; and the two ends of the float flowmeter are connected with other parts of the circulating cooling water system through pipelines respectively, and are provided with a first cleaning valve and a second cleaning valve respectively. The method for cleaning the float flowmeter on line comprises the following steps of: opening the first cleaning valve and the second cleaning valve under the condition of keeping a water inlet and a water outlet of the circulating cooling water system in a closed state; spraying water into the first cleaning valve by using a high-pressure water gun, wherein the sprayed water flow flushes the float flowmeter and the excess water flows out of the second cleaning valve; and closing the first cleaning valve and the second cleaning valve after the flowmeter is unblocked. The invention also discloses the circulating cooling water system capable of realizing the method. In the scheme provided by the invention, the float flowmeter can be cleaned without being disassembled, the cleaning process is extremely convenient, and the time required by cleaning is greatly saved.

Description

Suspended body flowmeter is carried out on-line cleaning method and recirculating cooling water system
Technical field
The present invention relates to recirculated water cooling technical field, particularly suspended body flowmeter is carried out method and a kind of recirculating cooling water system of on-line cleaning.
Background technology
At present, various high-power industrial equipments (comprising semiconductor manufacturing facility) all can be used multi-form cooling system, and recirculating cooling water system (recirculating cooling water system) has in the industry cycle obtained using the most widely with its cheap cost and high cooling efficiency.
The essential structure of recirculating cooling water system mainly is made up of cooling device 101, water pump 102, water inlet 103, delivery port 104, flowmeter 105 and the pipeline that connects above-mentioned part successively as shown in Figure 1, and arrow is represented the flow direction of recirculated cooling water.In working order down, after cold water flow through the production equipment 106 (often claiming heat transmission equipment, as heat exchanger, condenser, reactor) that needs cooling, temperature rose; 101 water temperatures of current supercooling equipment that heat up are returned and are fallen, and except that the material from leakage of production equipment 106, the water that available water pump 102 will cool off is once more sent production equipment 106 back to and reused, and pipeline dispels the heat with wind outward usually.The effect of flowmeter 105 is the flowing velocities that detect water in the recirculating cooling water system, if water flow velocity cross slow or too fast all can cause the cooling of production equipment 106 not enough, therefore need regulate water pump 102 according to flowmeter 105, be that recirculated cooling water keeps suitable flow velocity.
It is recycling that recirculating cooling water system can access cooling water, and the consumption of cold water is reduced greatly, often can save more than 95%.Cooling water accounts for about 70% of industrial water consumption, and recirculating cooling water system has worked to save a large amount of water for industrial uses.
In practical application in industry, suspended body flowmeter is the flowmeter of normal employing.The flow element of suspended body flowmeter is made up of vertical Taper Pipe and a float group that moves up and down along the Taper Pipe axle of a bottom-up expansion.Operation principle as shown in Figure 2, when detected fluid is passed through the annular space 203 of Taper Pipe 201 and float 202 formation from bottom to top, float 202 upper and lower sides produce differential pressure and form climbing power, when float 202 suffered climbing powers when being immersed in the fluid float weight, float 202 just moves up, the area of annular space 203 increases thereupon, annular space 203 place's rate of flow of fluids descend immediately, float 202 upper and lower side differential pressures are reduced, the climbing power that acts on float 202 is also along with minimizing, when climbing power equaled to be immersed in the fluid float weight, float just was stabilized in a certain height.Therefore float 202 height and flow of passing through in Taper Pipe 201 has corresponding relation.
Cooling water in use, water temperature periodically circulates and raises and decline, though its physical behavior variation is little, after recycling for a long time, some dissolved matter concentrates or disappearance, dust accumulation, microorganism are grown in the water, causes in equipment, the pipeline dirty thing deposition or to the hardware corrosive pipeline.Recirculating cooling water system all can show some faults after using the long period (concrete time length depends on water quality), for example: cooling water flow descends and can't regulate, the cooling water flow unusual fluctuations, and the flowmeter float is stuck etc.More than these phenomenons all be that the direct embodiment silt up in various degree appears in the recirculated cooling water pipeline.If ignore, may cause the unit exception fault in a short time, gently then influence produce to improve equipment failure rate, and is heavy then cause possible permanent damage to equipment even to personnel; Hidden danger is not removed and then might be caused the whole circulation cooling water system to block in long-term.
The work characteristics of suspended body flowmeter has caused dirty thing deposition rate to be easier to appear in the suspended body flowmeter.And the effect of suspended body flowmeter is the flow velocity that detects recirculated cooling water, and suspended body flowmeter causes tremendous influence because the unusual easy duty of whole circulation cooling water system that makes appears in dirty thing deposition.Therefore be emphasis in the whole cleaning to the cleaning of suspended body flowmeter in the recirculating cooling water system.Usually the cleaning method of suspended body flowmeter is in the recirculating cooling water system that adopts in the prior art:
Switch off the pump 102, open delivery port 104, row discharges with the recirculated cooling water in the recirculating cooling water system;
Suspended body flowmeter is disassembled from recirculating cooling water system, and it is cleaned;
After finishing, cleaning again suspended body flowmeter is installed in the recirculating cooling water system; And
Close delivery port 104, open water inlet 103, new cooling water (also can be to clean preceding recirculated cooling water of discharging) is injected recirculating cooling water system, and the unlatching water pump circulates cooling water in system.
Do like this and can cause following problem:
1, recirculating cooling water system can't be worked in the cleaning process, therefore also need to make working equipment to shut down, it is higher to cause cleaning cost, so cleaning frequency can not be too high, and the long at interval dirt dirt that can cause being difficult to wash deposition of scavenging period causes vicious circle;
2, the dismounting of suspended body flowmeter and very inconvenience is installed owing to be subjected to the restriction of narrow and small working region, and make the scavenging period overwhelming majority all consume in the dismounting of suspended body flowmeter and installs.
Summary of the invention
In view of this, the objective of the invention is to, propose suspended body flowmeter is carried out the method for on-line cleaning, can need not to dismantle suspended body flowmeter and can realize cleaning suspended body flowmeter.
A kind of method of suspended body flowmeter being carried out on-line cleaning that the embodiment of the invention proposes, described suspended body flowmeter is installed in the recirculating cooling water system, its two ends are connected with other parts of recirculating cooling water system by pipeline respectively, and the two ends of described suspended body flowmeter are installed first wash-out valve and second wash-out valve respectively; Described on-line cleaning method comprises the steps:
Under the water inlet of maintenance recirculating cooling water system and the situation that delivery port is in closed condition, open first wash-out valve and second wash-out valve;
Spray water in first wash-out valve with giant, the current that sprayed wash suspended body flowmeter, and unnecessary water flows out from second wash-out valve, treat that flowmeter cuts out first wash-out valve and second wash-out valve after unimpeded.
The another kind that the embodiment of the invention proposes carries out the method for on-line cleaning to suspended body flowmeter, described suspended body flowmeter is installed in the recirculating cooling water system, its two ends are connected with other parts of recirculating cooling water system by pipeline respectively, and the two ends of described suspended body flowmeter are installed first wash-out valve and second wash-out valve respectively; Described on-line cleaning method comprises the steps:
Under the water inlet of maintenance recirculating cooling water system and the situation that delivery port is in closed condition, open first wash-out valve and second wash-out valve;
Carry out jetly in first wash-out valve with the nitrogen spray gun, the air-flow that is sprayed cleans suspended body flowmeter, and second wash-out valve is as exhaust outlet, treats that flowmeter cuts out first wash-out valve and second wash-out valve after unimpeded.
The present invention also aims to, propose a kind of recirculating cooling water system, can need not to dismantle suspended body flowmeter this recirculating cooling water system is realized cleaning.
This recirculating cooling water system comprises water inlet, delivery port and suspended body flowmeter, described recirculating cooling water system further comprises: first wash-out valve and second wash-out valve, described first wash-out valve and second wash-out valve are installed on described suspended body flowmeter two ends respectively.
As can be seen from the above technical solutions, can realize cleaning by opening first wash-out valve and second wash-out valve, and need not to dismantle suspended body flowmeter that cleaning process is very convenient, and has greatly saved and cleaned the required time to suspended body flowmeter.
Description of drawings
Fig. 1 is the recirculating cooling water system structural representation of prior art;
Fig. 2 is the structural representation of suspended body flowmeter, comprises front view and vertical view;
The recirculating cooling water system structural representation that Fig. 3 proposes for the embodiment of the invention.
The specific embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, the present invention is further elaborated below in conjunction with accompanying drawing.
The recirculating cooling water system that the embodiment of the invention proposes as shown in Figure 3, the pipeline that comprises cooling device 301, water pump 302, water inlet 303, delivery port 304, suspended body flowmeter 305, first wash-out valve 306, second wash-out valve 307 and connect above-mentioned part is successively formed.
In working order down, after cold water flow through the production equipment 308 that needs cooling, temperature rose; 301 water temperatures of current supercooling equipment that heat up are returned and are fallen, and the water that will cool off once more with water pump 102 is sent production equipment 308 back to and reused, and pipeline dispels the heat with wind outward usually.The effect of suspended body flowmeter 305 is the flowing velocities that detect water in the recirculating cooling water system, regulates water pump 302 according to suspended body flowmeter 305 detected flow velocitys, makes recirculated cooling water keep suitable flow velocity.
The key point of the embodiment of the invention is, be provided with first wash-out valve 306 and second wash-out valve 307 respectively at the two ends of suspended body flowmeter 305, when recirculating cooling water system was in running order, first wash-out valve 306 and second wash-out valve 307 were all closed.
When needs clean suspended body flowmeter 305, keep water inlet 303 and delivery port 304 still to close, open first wash-out valve 306 and second wash-out valve 307.Spray water in first wash-out valve 306 with giant, the current that sprayed wash suspended body flowmeter end or cooling water circulation pipe terminal, unnecessary water flows out from second wash-out valve 307, treats that flowmeter or pipeline close first wash-out valve 306 and second wash-out valve 307 after unimpeded.Open water inlet 303 and delivery port 304 afterwards, recover cooling water recirculation system, finish to this cleaning process.
Perhaps, keep water inlet 303 and delivery port 304 still to close, open first wash-out valve 306 and second wash-out valve 307.(N2 GUN) carries out jet in first wash-out valve 306 with the nitrogen spray gun, the air-flow that is sprayed cleans suspended body flowmeter end or cooling water circulation pipe terminal, second wash-out valve 307 is as exhaust outlet, treats that flowmeter or pipeline close first wash-out valve 306 and second wash-out valve 307 after unimpeded.Open water inlet 303 and delivery port 304 afterwards, recover cooling water recirculation system, finish to this cleaning process.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.

Claims (3)

1. method of suspended body flowmeter being carried out on-line cleaning, described suspended body flowmeter is installed in the recirculating cooling water system, its two ends are connected with other parts of recirculating cooling water system by pipeline respectively, it is characterized in that the two ends of described suspended body flowmeter are installed first wash-out valve and second wash-out valve respectively; Described on-line cleaning method comprises the steps:
Under the water inlet of maintenance recirculating cooling water system and the situation that delivery port is in closed condition, open first wash-out valve and second wash-out valve;
Spray water in first wash-out valve with giant, the current that sprayed wash suspended body flowmeter, and unnecessary water flows out from second wash-out valve, treat that flowmeter cuts out first wash-out valve and second wash-out valve after unimpeded.
2. method of suspended body flowmeter being carried out on-line cleaning, described suspended body flowmeter is installed in the recirculating cooling water system, its two ends are connected with other parts of recirculating cooling water system by pipeline respectively, it is characterized in that the two ends of described suspended body flowmeter are installed first wash-out valve and second wash-out valve respectively; Described on-line cleaning method comprises the steps:
Under the water inlet of maintenance recirculating cooling water system and the situation that delivery port is in closed condition, open first wash-out valve and second wash-out valve;
Carry out jetly in first wash-out valve with the nitrogen spray gun, the air-flow that is sprayed cleans suspended body flowmeter, and second wash-out valve is as exhaust outlet, treats that flowmeter cuts out first wash-out valve and second wash-out valve after unimpeded.
3. recirculating cooling water system, comprise water inlet, delivery port and suspended body flowmeter, it is characterized in that, described recirculating cooling water system further comprises: first wash-out valve and second wash-out valve, described first wash-out valve and second wash-out valve are installed on described suspended body flowmeter two ends respectively.
CN2009102009870A 2009-12-23 2009-12-23 Method for cleaning float flowmeter on line and circulating cooling water system Pending CN102107195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009102009870A CN102107195A (en) 2009-12-23 2009-12-23 Method for cleaning float flowmeter on line and circulating cooling water system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009102009870A CN102107195A (en) 2009-12-23 2009-12-23 Method for cleaning float flowmeter on line and circulating cooling water system

Publications (1)

Publication Number Publication Date
CN102107195A true CN102107195A (en) 2011-06-29

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107398697A (en) * 2017-07-14 2017-11-28 江苏大学 A kind of flowmeter cleaning and its automatic hookup wire of adapter
CN111842295A (en) * 2020-07-21 2020-10-30 江苏科技大学 Surface impurity removal system and method for gas field flowmeter
CN111842293A (en) * 2020-07-21 2020-10-30 江苏科技大学 System and method for removing surface impurities of gas field flow measuring device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107398697A (en) * 2017-07-14 2017-11-28 江苏大学 A kind of flowmeter cleaning and its automatic hookup wire of adapter
CN111842295A (en) * 2020-07-21 2020-10-30 江苏科技大学 Surface impurity removal system and method for gas field flowmeter
CN111842293A (en) * 2020-07-21 2020-10-30 江苏科技大学 System and method for removing surface impurities of gas field flow measuring device
CN111842295B (en) * 2020-07-21 2021-12-03 江苏科技大学 Surface impurity removal system and method for gas field flowmeter

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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Effective date: 20121116

C41 Transfer of patent application or patent right or utility model
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Effective date of registration: 20121116

Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation

Applicant after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation

C02 Deemed withdrawal of patent application after publication (patent law 2001)
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Application publication date: 20110629