CN102082074A - Film laminating device for saving adhesive film - Google Patents

Film laminating device for saving adhesive film Download PDF

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Publication number
CN102082074A
CN102082074A CN 201010517183 CN201010517183A CN102082074A CN 102082074 A CN102082074 A CN 102082074A CN 201010517183 CN201010517183 CN 201010517183 CN 201010517183 A CN201010517183 A CN 201010517183A CN 102082074 A CN102082074 A CN 102082074A
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film
saving
glued membrane
sticking apparatus
film sticking
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CN 201010517183
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CN102082074B (en
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张明星
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SHANGHAI JIMEI ELECTRNIC TECHNOLOGY CO LTD
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SHANGHAI JIMEI ELECTRNIC TECHNOLOGY CO LTD
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Abstract

The invention discloses a film laminating device for saving an adhesive film, which is characterized by comprising a vacuum absorbing device, wherein the vacuum absorbing device comprises a suction nozzle, the suction nozzle is communicated with a vacuumizing device; the suction nozzle can be movably arranged along the horizontal direction; and the film laminating device also comprises a cutter capable of moving along the width direction of the film, and the cutter is provided with an opening and used for cutting the film. By using the film laminating device for saving the adhesive film, the adhesive film can be saved, the procedures are reduced, the film laminating efficiency is improved and the film laminating quality can be enhanced.

Description

Save the film sticking apparatus of glued membrane
Technical field
The present invention relates to a kind of film sticking apparatus of saving glued membrane.Relate in particular to a kind of film sticking apparatus of the saving glued membrane that uses in the semiconductor production field.
Background technology
With the wafer pad pasting is example, is illustrated in figure 1 as a kind of film sticking apparatus, comprises pedestal 101, and pedestal 101 middle parts are provided with the platform dish (not shown) that is used for supporting wafer, and wafer 102 is placed on the platform dish of pedestal 101.Glued membrane 103 is rolled into the hollow cylinder shape, is sleeved on the rotating cylinder 1031.Cylinder 1031 is placed on a side of pedestal 101.At cylinder 1031 and the pedestal 101 middle clips 104 that are equipped with.Clip 104 operation principles are similar to the clip that daily life is used.Roller 105 is installed, but roller 105 moves with clip 104 level of synchronization directions above glued membrane 103.Roller 105 can move along guide rail with clip 104, and the shift motion of horizontal direction makes clip 104 make it cover pedestal 101 by clamping glued membrane 103.
When the beginning pad pasting, clip 104 closures are clamped the edge of glued membrane 103, move along guide rail, and film 103 pairs are covered on wafer 102, and 105 times general who has surrendered's glued membranes 103 of roller are pressed on wafer 102 and the platform dish 1011.Roller 105 moves back and forth before and after guide rail, pushes film 103, and glued membrane 103 is closely sticked on the wafer 102, finishes pad pasting one time.Clip 104 is opened, and removes the chucking power to glued membrane 103.Clip 104 is retracted into the position before the pad pasting shown in Figure 1, and clip 104 closure is again clamped glued membrane 103, prepares pad pasting next time.Cutter 106 move along glued membrane 103 Widths, and glued membrane 103 is cut off.One time the pad pasting process finishes.
Platform dish 102 must be fixed on the pedestal 101, and the length of pedestal 101 and width are all greater than the diameter of platform dish 102.Be limited by the structure of clip 104, adopt the deficiency of the device pad pasting among Fig. 1 to be that mainly glued membrane 103 wastages are bigger, glued membrane 103 is not utilized completely.Be illustrated in figure 2 as clip structure schematic diagram and use principle analysis chart among Fig. 1; Clip 104 structures and pliers are similar, are made up of 2 folder rods (1041,1042).Two clips 104 are clamped the glued membrane two edges respectively along the glued membrane Width.When clip 104 was opened, the folder rod was opened downwards, so clip 104 opens directly over pedestal 101 time and can be subjected to stopping of pedestal 101, can't smooth opening.Can return back to pedestal shown in Figure 1 101 right sides smoothly as after clip 104 is opened, a kind of situation is as shown in Figure 2, and the width of glued membrane 103 must be greater than the width of pedestal 101.Like this, when clip 104 returned back to the position of beginning before the pad pasting, glued membrane 103 was positioned between two folder rods (1041,1042) of clip 104 all the time.During pad pasting, the glued membrane 103 that is drawn out just in time covers crystal round fringes along its length and gets final product like this, and glued membrane does not have waste along its length, but the broad ways waste is bigger.Second kind of situation is, if the width of glued membrane 103 is less than the width of pedestal 101, even then clip 104 is opened, because glued membrane 103 has pasted on wafer 102, in the position process before clip 104 returns back to the beginning pad pasting, or the glued membrane that can be subjected to being attached on the wafer 102 stops; The both sides of the edge of glued membrane 103 Widths are broken away from from clip 104,, also can't clamp glued membrane 103 smoothly, can influence pad pasting next time even clip 104 returns back to the preceding position of beginning pad pasting.Even there are not these adverse effects, glued membrane is at the less wastage of Width, but length direction, glued membrane must be crossed wafer.So, the situation that exists glued membrane to waste along its length.Use the film sticking apparatus among Fig. 1, no matter use which kind of method, all unavoidably waste glued membrane.
Based on above analysis as seen, the glued membrane that pastes of actual needs in length with Width as long as identical with diameter wafer.And above film sticking apparatus and method, because the design feature of clip 104, the length and the width that cover the glued membrane on the wafer 102 must be complementary with pedestal, rather than mate with diameter wafer.So just certainly will cause at glued membrane length direction and the Width glued membrane greater than diameter wafer and can't use, can only excise in the subsequent treatment program, wastage is very big, has increased production cost.
Summary of the invention
The objective of the invention is provides a kind of film sticking apparatus of the saving glued membrane that avoids waste in order to overcome deficiency of the prior art.
For achieving the above object, the present invention is achieved through the following technical solutions:
Save the film sticking apparatus of glued membrane, it is characterized in that comprise vacuum absorption device, described vacuum absorption device comprises suction nozzle, described suction nozzle and vacuum extractor UNICOM; But described suction nozzle along continuous straight runs is installed movably; Also comprise the cutter that can move along the thin-film width direction, described cutter has an opening, is used to cut off film.
Preferably, also comprise the platform dish that is used to place wafer, described dish is arranged on the suction nozzle below, and the stroke size that the horizontal direction of suction nozzle moves can cover film on the wafer of placing on the platform dish it.
Preferably, described dish is arranged on the pedestal.
Preferably, also comprise roller, described roller is rotatably installed on the roller shaft, but the roller shaft along continuous straight runs install movably, the shift motion of roller shaft can be exerted pressure it to the film that covers on the wafer.
Preferably, described roller shaft can vertically be installed movably.
Preferably, also include the cutter that are used to cut film.
Preferably, described cutter can be installed movably along the thin-film width direction.
Preferably, but the installation movably synchronously of described cutter along continuous straight runs and suction nozzle, and suction nozzle is arranged between cutter and the roller.
Preferably, the installation movably synchronously of described suction nozzle and roller or suction nozzle, roller and cutter can be installed synchronously movably.
Preferably, also comprise two frame plates that are provided with at interval, but the frame plate along continuous straight runs is installed movably; The first cross bar two ends are connected on the frame plate; On first cross bar suction nozzle is installed, suction nozzle and vacuum extractor UNICOM; Roller is rotatably installed on the roller shaft, and the roller shaft two ends are connected on the frame plate.
Preferably, described two frame plates be arranged in parallel.
Preferably, described first cross bar can vertically be installed on the frame plate movably.
Preferably, described frame plate is provided with first cylinder, and first cylinder is provided with take-off lever; Described take-off lever matches with first cross bar and drives first cross bar and vertically move.
Preferably, described frame plate is provided with second cylinder, and second cylinder is provided with take-off lever, and at least one end of roller shaft matches with the take-off lever of second cylinder, and the take-off lever driving rolls axle of second cylinder vertically moves.
Preferably, the folder film device is installed also on the described frame plate, described folder film device is provided with the slit that can allow film to pass, and the folder film device is arranged on the roller top.
Preferably, the slit adjustable size of described folder film device.
Preferably, described folder film device can all be clamped film along the thin-film width direction.
Preferably, described folder film device comprises fixed lever and support bar, and the gap between fixed lever and the support bar is a slit; Described support bar is cylindrical, and fixed lever is provided with inner groovy and matches with support bar; Described frame plate is provided with the 3rd cylinder, and the 3rd cylinder is provided with take-off lever, matches with the take-off lever of the 3rd cylinder in the end of support bar, by the take-off lever of the 3rd cylinder drive support bar near or away from fixed lever, to regulate the size of slit.
Preferably, also be provided with second cross bar on the described frame plate, second cross bar is provided with the knife rest that can move along the thin-film width direction, and the knife rest lower end is provided with cutter.
Preferably, described frame plate cooperates with wire rod thread, and described screw mandrel is connected with electric machine main shaft, drives screw mandrel by electric machine main shaft and rotates.
Preferably, also comprise guide rail, described frame plate lower end is provided with gathering sill; Gathering sill matches with guide rail.
Preferably, the cutter with an opening is installed on the knife rest, and described knife rest can be installed movably along the thin-film width direction.
Preferably, also be provided with second cross bar on the described frame plate, knife rest is arranged on second cross bar movably, and the cutter with an opening is installed on the knife rest.
Preferably, described cutting tool placket adjustable size.
Preferably, described cutter comprises first blade and second blade, be provided with opening between described first blade and second blade, described first blade is fixedly mounted on the knife rest lower end, second blade moves to regulate the size of described opening by control lever, described control lever passes knife rest, and a distal process is for the knife rest upper end, and the other end is connected with second blade.
Preferably, be provided with spring between the control lever end that protrudes in knife rest upper end and the knife rest upper end, described compression spring can produce the elastic force that makes the control lever homing when control lever adjusting openings of sizes.
The present invention has following beneficial effect:
1, solved that the folder film device can't be opened directly over pedestal and the problem that causes wasting makes that each pad pasting does not need film is pulled to above base position, on length, can save glued membrane.
With wafer attenuate pad pasting is that example explanation glued membrane is saved situation.At present when pasting the attenuate film, use many sizes of cover wafer permanent plant can be used for fixing the wafer pad pasting of different size, as the wafer of 8 inches, 6 inches and 4 inches.The wafer permanent plant adopt 8 inches platform dishes successively the mode of 6 inches platform dishes of suit and 4 inches platform dishes design, 8 inches platform dish is installed in the centre of pedestal.Like this, the platform dish of the size of pedestal than 4 inches is big a lot.If the film sticking apparatus described in the use background technology, cooperate many sizes wafer permanent plant, when being 4 inches wafer pad pastings, the folder film device also needs to clamp just can be opened after glued membrane covers pedestal, and the film that actual needs uses only needs 4 inches parts of diameter, and glued membrane waste ratio surpasses 100%.Even and 8 inches wafer pad pastings, glued membrane waste ratio also will surpass 20%.Use method and apparatus of the present invention, then can avoid these wastes.
2, changed the structure of the parts of clamping film, change employing folder film device of the present invention into by each pliers shape structure of traditional both sides, make the folder film device can adapt to the glued membrane of different in width, thereby can be so that the glued membrane that each size wafer uses width to be complementary has been saved glued membrane on width.
Be that example explanation glued membrane is saved situation with wafer attenuate pad pasting equally.When 8 inches wafer pad pastings, the width of glued membrane is generally about 230mm, and when carrying out 4 inches wafer pad pastings, the structure that is limited by the folder film device also must be used the glued membrane of 230mm, and the actual part of using has only 100mm.Use folder film device of the present invention, can directly change the glued membrane that width is complementary, width is generally about 120mm.Therefore Width is saved glued membrane above 90%.
3, improved the pad pasting quality.Traditional pliers shape folder film device for guaranteeing to clamp glued membrane, must apply enough chucking powers.Can make the position that is held of glued membrane fold occur unavoidably.When pad pasting, fold might extend on the glued membrane of wafer top, influences the pad pasting quality.The present invention adopts the edge of the form fixed film of vacuum suction, can avoid making film fold occur, can improve the pad pasting quality.
Folder film device among the present invention, owing to be that broad ways has been clamped whole glued membranes, and adopt circular-arc design in contact portion, and fit with the crooked route of glued membrane, can reduce the possibility that fold appears in glued membrane.
4, when carrying out the substrate pad pasting, substrate need be sticked together with framework.Substrate and framework are generally rectangle.When the described device pad pasting of background technology, the glued membrane of use must surpass the scope of framework, and after finishing pad pasting, the glued membrane that needs to exceed frame part excises again, has both wasted film, has increased operation again, and efficient is low.After using the inventive method and device, be complementary just by the film length selecting the suitable glued membrane of width, can make to paste and width and framework, paste and need not carry out secondary cut to film after finishing.After finishing pad pasting, there is not unnecessary glued membrane.Therefore not only can save glued membrane, and save operation, improve pad pasting efficient.
Description of drawings
Fig. 1 is a kind of film sticking apparatus schematic diagram.
Fig. 2 is folder film device structural representation and the use principle analysis chart among Fig. 1.
Fig. 3 is the structural representation of the embodiment of the invention 1.
Fig. 4 is roller structure and the assembling schematic diagram among the embodiment 1.
Fig. 5 is folder film device structure and the installation site schematic diagram among the embodiment 1.
Fig. 6 is cutter structure and the assembling schematic diagram among the embodiment 1.
Fig. 7 is structure and the user mode schematic diagram of embodiment 1.
Fig. 8 is the use principle figure of embodiment 1.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in detail:
Embodiment 1
Save the film sticking apparatus of glued membrane, as shown in Figure 3, comprise base 2, on the base 2 at interval and be arranged with two frame plates (41,42) in parallel.Two frame plates (41,42) lower end is provided with the gathering sill (not shown).Base 2 is provided with two guide rails (21,22).Guide rail 21 matches with the gathering sill of frame plate 41 lower ends, makes frame plate 41 can move along guide rail 21 when being activated.Guide rail 22 matches with the gathering sill of frame plate 42 lower ends, makes frame plate 42 can move along guide rail 22 when being activated.Base 2 is provided with motor 23 and screw mandrel 24.The output shaft of motor 23 is connected with screw mandrel 24, and motor 23 can drive screw mandrel 24 and rotate.Guide rail (21,22) flatly is arranged on the base 2, therefore, when frame plate (41,42) is mobile, also is that along continuous straight runs moves.
First cylinder 521 is installed on the frame plate 41.First cylinder 522 is installed on the frame plate 42.First cylinder 521 and first cylinder 522 are provided with take-off lever.First cross bar, 51 1 ends are connected on the take-off lever of first cylinder 521; The other end is connected on the take-off lever of first cylinder 522.Utilize first cylinder 521 and first cylinder 522, can drive first cross bar 51 and vertically move back and forth.On first cross bar 51 suction nozzle 5 is installed, suction nozzle 5 is a tube shape, and opening is towards base 2.The number of suction nozzle 5 is more than two, is evenly distributed on first cross bar 51 between two frame plates (41,42).Suction nozzle 5 with by tracheae (not shown) and vacuum extractor (not shown) UNICOM.Vacuum extractor can adopt vacuum generator or vacuum pump.Start vacuum generator, can form vacuum adsorption force, utilize this vacuum adsorption force thin film adsorbs can be fixed on the suction nozzle 5 in the around openings of suction nozzle 5.First cross bar 51 and suction nozzle 5 can be followed two frame plates (41,42) along continuous straight runs and be moved.
Two frame plates (41,42) connect by connecting rod 43, and like this, frame plate 41 is driven when mobile, can drive frame plate 42 same moved further.
Fig. 4 is the roller structure and assembling schematic diagram of embodiment 1.As shown in Figure 3, Figure 4, roller 9 is rotatably installed on the roller shaft 92.Second cylinder 911 is installed on the frame plate 41.Second cylinder 912 is installed on the frame plate 42.Second cylinder 911 and second cylinder 912 are provided with take-off lever.The take-off lever of second cylinder 911 is connected with carriage 931.The take-off lever of second cylinder 912 is connected with carriage 932.Roller shaft 92 1 ends are connected with carriage 931, and the other end is connected with carriage 932.But second cylinder 911 and second cylinder, 912 driving rolls axles 92 and roller 9 vertically move back and forth.
Fig. 4 also shows the structure of motor 23 driving machine frame plates 41.Be set with sleeve 25 on the screw mandrel 24, sleeve 25 and screw mandrel 24 threaded engagement.Among Fig. 4, sleeve 25 is the states that separate with frame plate 41, and when reality was used, sleeve 25 was fixedlyed connected with frame plate 41.Make screw mandrel 24 when rotating, can move along guide rail 21 by sleeve 25 driving machine frame plates 41.
Fig. 5 is folder film device structure and the assembling schematic diagram of embodiment 1.As Fig. 3, shown in Figure 5, folder film device 8 comprises fixed lever 81 and the support bar 82 that the gap is provided with.Being provided with the gap between fixed lever 81 and the support bar 82 is slit.Film can pass from the gap between fixed lever 81 and the support bar 82.Support bar 82 is cylindrical, and fixed lever 81 is provided with the inner groovy (not shown) and matches with the shape of support bar 82.The length of fixed lever 81 and support bar 82 is greater than the width of film, so that both can all clamp film along the thin-film width direction.Frame plate 41 is provided with one the 3rd cylinder, 83, the three cylinders 83 and is provided with take-off lever 831.Frame plate 42 is provided with one the 3rd cylinder (not shown), and this 3rd cylinder also is provided with take-off lever.One end of support bar 82 is connected with the take-off lever 831 of the 3rd cylinder 83; The other end is connected with the take-off lever of the 3rd cylinder on being arranged at frame plate 42.Two the 3rd cylinders can drive support bar 82 near or away from fixed lever 81, to regulate the size in gap between the two.Folder film device 8 is positioned at roller 9 oblique uppers.
Fig. 6 is cutter structure and the assembling schematic diagram among the embodiment 1.As Fig. 3 and shown in Figure 6, second cross bar, 61 1 ends are connected on the frame plate 41; The other end is connected on the frame plate 42.Knife rest 6 is clamped on second cross bar 61, and can move on second cross bar 61 between frame plate 41 and the frame plate 42.It promptly is to move along the thin-film width direction that knife rest 6 moves on second cross bar 61 between frame plate 41 and the frame plate 42.Knife rest 6 lower ends are installed with first blade 62.Second blade, 63 1 ends are by being rotatably installed on the bolt 67, and second blade, 63 middle parts are connected with control lever 65 lower ends.The blade of first blade 62 and second blade, 63 blades are oppositely arranged, and are provided with opening 64 between first blade 62 and second blade 63.When control lever 65 moves down, can promote second blade 63 and rotate, opening 64 is dwindled.Opening 64 is more little, helps cutting off film more.The present invention cuts off having higher success rate of film with respect to the structure that a blade only is set.Because film has certain ductility, when only using a blade cuts, if blade is sharp inadequately, just possibly can't cut off film rapidly,, will make film edge fold occur along with moving of blade, not only the success rate and the efficient of film is cut off in influence, also can influence the quality that pastes.Use two insert design to become the shape of scissors among the present invention, in the time of need cutting off film, make film be positioned at 64, two blades of opening and can improve the success rate of cutting off film.If can't cut off film smoothly, the adjustable size of opening 64 makes it cut off whole film again after the film edge place cuts off an opening as scissors, has improved and has cut off the success rate of film, and can not influence the quality of the film of pad pasting.
Control lever 65 passes knife rest 6, and the upper end protrudes in knife rest 6 upper ends.Be provided with compression spring 66 between control lever 65 upper ends and knife rest 6 upper ends.When pressing lower control arm 65 and adjust openings 64 big or small, compressing compression spring 66 after compression spring 66 is compressed, produces elastic force, and this elastic force can make control lever 65 return back to original position.
As shown in Figure 3, exhibition film bar 7 one ends are fixed on the frame plate 41, and the other end is fixed on the frame plate 42.Has certain distance between exhibition film bar 7 and the folder film device 8.As shown in Figure 8, exhibition film bar 7 can turn to the position that is lower than support bar 82.
As shown in Figure 3, also be provided with back shaft 31 on the base 2, be used for the support film volume.Back shaft 31 is installed on the base 2 by support 3.
Fig. 7 is the film sticking apparatus structure and the user mode schematic diagram of the saving glued membrane among the embodiment 1.As shown in Figure 7, pedestal 201 is arranged between frame plate 41 and the frame plate 42.And pedestal 201 is positioned at first cross bar 51, second cross bar 61, folder film device 8 and exhibition film bar 7 belows.Pedestal 201 is provided with platform dish 202, is used for supporting wafer.The size of the shift motion of frame plate 41 and frame plate 42 when making suction nozzle 5 move film, can make film cover on the wafer.
Fig. 8 is the use principle schematic diagram of embodiment 1.As Fig. 7, shown in Figure 8, during use, film rolling is sleeved on the back shaft 31 rotationally.Film 300 is walked around from exhibition film bar 7 belows successively, and the slit from folder film device 8 passes again, and walks around roller 4 belows, and film 300 edges are fixing by suction nozzle 5.The setting of exhibition film bar 7 makes film 300 when walking around exhibition film bar 7, can film be stretched flat by the frictional force of exhibition film bar 7.Folder film device 8 is arranged on roller 9 tops, can further utilize the frictional force of 8 pairs of films 300 of folder film device, makes film keep smooth and corrugationless.Folder film device 8 can clamp film 300, drives film 300 and moves, so that film covers on the wafer.
Suction nozzle 5 is by the edge of vacuum suction mode fixed film 300.Along with frame plate (41,42) along continuous straight runs moves forward, folder film device 8 and suction nozzle 8 common pulling films 300 cover on the wafer film 300.Roller 9 vertically moves down, and is pressed on the film.Close vacuum generator, remove the vacuum adsorption force of 5 pairs of films of suction nozzle, frame plate (41,42) along continuous straight runs moves back and forth, and makes roller 9 push film, and film is tightly adhered on the wafer.After stickup is finished, the slit of folder film device 8 increases, releasing is to the chucking power of film 300, frame plate (41,42) moves backward, and suction nozzle 5 moves to the film place that does not paste on wafer, start vacuum generator, make suction nozzle 5 adsorb film, follow rest 6 utilizes cutter that the film broad ways is cut off.
In the present embodiment, also can cut off film earlier, restart vacuum generator, utilize suction nozzle 5 to adsorb the edge of film.
Vertical direction in the present embodiment, promptly vertical with pedestal, can be above pedestal near pedestal or away from the direction of pedestal.
Roller 9 is arranged on the roller shaft 92 rotationally, can reduce the frictional force between roller 9 and the film, and the active force that makes 9 pairs of films of roller mainly is the pressure towards wafer, can prevent that roller 9 is bad from the wafer stranding with film.
Embodiment 2
The difference of present embodiment and embodiment 1 is, has omitted second cross bar 61, knife rest 6 and cutter.When using present embodiment, cut off film, but operator's hand takes cutter that the film cut-out is got final product as need.
Embodiment 3
The difference of present embodiment and embodiment 2 is, on the basis of embodiment 2, has omitted exhibition film bar, can realize purpose of the present invention equally.
Embodiment 4
The difference of present embodiment and embodiment 2 is, on the basis of embodiment 2, has omitted back shaft 31, support 3 and base 2, can realize purpose of the present invention equally.
Above embodiment only is used to illustrate the execution mode of comparative optimization of the present invention, is not to be the unique execution mode of the present invention, not influencing on the basis of realizing the object of the invention, can carry out other combination.
Embodiment among the present invention only is used for that the present invention will be described, does not constitute the restriction to the claim scope, and other substituting of being equal in fact that those skilled in that art can expect are all in protection range of the present invention.

Claims (26)

1. save the film sticking apparatus of glued membrane, it is characterized in that comprise vacuum absorption device, described vacuum absorption device comprises suction nozzle, described suction nozzle and vacuum extractor UNICOM; But described suction nozzle along continuous straight runs is installed movably; Also comprise the cutter that can move along the thin-film width direction, described cutter has an opening, is used to cut off film.
2. the film sticking apparatus of saving glued membrane according to claim 1, it is characterized in that, also comprise the platform dish that is used to place wafer, described dish is arranged on the suction nozzle below, and the stroke size that the horizontal direction of suction nozzle moves can cover film on the wafer of placing on the platform dish it.
3. the film sticking apparatus of saving glued membrane according to claim 2 is characterized in that, described dish is arranged on the pedestal.
4. the film sticking apparatus of saving glued membrane according to claim 1, it is characterized in that also comprise roller, described roller is rotatably installed on the roller shaft, but the roller shaft along continuous straight runs is installed movably, and the shift motion of roller shaft can be exerted pressure it to the film that covers on the wafer.
5. the film sticking apparatus of saving glued membrane according to claim 4 is characterized in that, described roller shaft can vertically be installed movably.
6. according to the film sticking apparatus of claim 1 or 4 described saving glued membranes, it is characterized in that, also include the cutter that are used to cut film.
7. the film sticking apparatus of saving glued membrane according to claim 6 is characterized in that, described cutter can be installed movably along the thin-film width direction.
8. the film sticking apparatus of saving glued membrane according to claim 7 is characterized in that, but the installation movably synchronously of described cutter along continuous straight runs and suction nozzle, and suction nozzle is arranged between cutter and the roller.
9. the film sticking apparatus of saving glued membrane according to claim 6 is characterized in that, the installation movably synchronously of described suction nozzle and roller or suction nozzle, roller and cutter can be installed synchronously movably.
10. the film sticking apparatus of saving glued membrane according to claim 1 is characterized in that, also comprise two frame plates that are provided with at interval, but the frame plate along continuous straight runs is installed movably; The first cross bar two ends are connected on the frame plate; On first cross bar suction nozzle is installed, suction nozzle and vacuum extractor UNICOM; Roller is rotatably installed on the roller shaft, and the roller shaft two ends are connected on the frame plate.
11. the film sticking apparatus of saving glued membrane according to claim 10 is characterized in that, described two frame plates be arranged in parallel.
12. the film sticking apparatus according to claim 10 or 11 described saving glued membranes is characterized in that, described first cross bar can vertically be installed on the frame plate movably.
13. the film sticking apparatus of saving glued membrane according to claim 12 is characterized in that, described frame plate is provided with first cylinder, and first cylinder is provided with take-off lever; Described take-off lever matches with first cross bar and drives first cross bar and vertically move.
14. film sticking apparatus according to claim 10 or 11 described saving glued membranes, it is characterized in that, described frame plate is provided with second cylinder, second cylinder is provided with take-off lever, at least one end of roller shaft matches with the take-off lever of second cylinder, and the take-off lever driving rolls axle of second cylinder vertically moves.
15. the film sticking apparatus according to claim 10 or 11 described saving glued membranes is characterized in that, the folder film device also is installed on the described frame plate, described folder film device is provided with the slit that can allow film to pass, and the folder film device is arranged on the roller top.
16. the film sticking apparatus of saving glued membrane according to claim 15 is characterized in that, the slit adjustable size of described folder film device.
17. the film sticking apparatus of saving glued membrane according to claim 15 is characterized in that, described folder film device can all be clamped film along the thin-film width direction.
18. the film sticking apparatus of saving glued membrane according to claim 15 is characterized in that, described folder film device comprises fixed lever and support bar, and the gap between fixed lever and the support bar is a slit; Described support bar is cylindrical, and fixed lever is provided with inner groovy and matches with support bar; Described frame plate is provided with the 3rd cylinder, and the 3rd cylinder is provided with take-off lever, matches with the take-off lever of the 3rd cylinder in the end of support bar, by the take-off lever of the 3rd cylinder drive support bar near or away from fixed lever, to regulate the size of slit.
19. the film sticking apparatus of saving glued membrane according to claim 10 is characterized in that, also is provided with second cross bar on the described frame plate, second cross bar is provided with the knife rest that can move along the thin-film width direction, and the knife rest lower end is provided with cutter.
20. the film sticking apparatus according to claim 10 or 11 described saving glued membranes is characterized in that described frame plate cooperates with wire rod thread, described screw mandrel is connected with electric machine main shaft, drives screw mandrel by electric machine main shaft and rotates.
21. the film sticking apparatus according to claim 10 or 11 described saving glued membranes is characterized in that, also comprises guide rail, described frame plate lower end is provided with gathering sill; Gathering sill matches with guide rail.
22. the film sticking apparatus of the saving glued membrane of saving glued membrane according to claim 1 is characterized in that, the cutter with an opening is installed on the knife rest, and described knife rest can be installed movably along the thin-film width direction.
23. the film sticking apparatus of the saving glued membrane of saving glued membrane according to claim 22 is characterized in that, also is provided with second cross bar on the described frame plate, knife rest is arranged on second cross bar movably, and the cutter with an opening is installed on the knife rest.
24. the film sticking apparatus according to the saving glued membrane of claim 1,22 or 23 described saving glued membranes is characterized in that described cutting tool placket adjustable size.
25. the film sticking apparatus of the saving glued membrane of saving glued membrane according to claim 24, it is characterized in that, described cutter comprises first blade and second blade, be provided with opening between described first blade and second blade, described first blade is fixedly mounted on the knife rest lower end, and second blade moves to regulate the size of described opening by control lever, and described control lever passes knife rest, one distal process is for the knife rest upper end, and the other end is connected with second blade.
26. the film sticking apparatus of the saving glued membrane of saving glued membrane according to claim 25, it is characterized in that, be provided with spring between the control lever end that protrudes in knife rest upper end and the knife rest upper end, described compression spring can produce the elastic force that makes the control lever homing when control lever adjusting openings of sizes.
CN2010105171836A 2010-10-22 2010-10-22 Film laminating device for saving adhesive film Active CN102082074B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104385767A (en) * 2014-12-03 2015-03-04 苏州恒铭达电子科技有限公司 Automatic film attaching method
CN108313372A (en) * 2018-04-28 2018-07-24 奥克斯空调股份有限公司 Laminating machine and use its film covering method
CN108527833A (en) * 2018-04-28 2018-09-14 奥克斯空调股份有限公司 Film-covering mechanism and laminating machine
CN113370515A (en) * 2021-05-19 2021-09-10 宁波力匠机器人科技有限公司 Film pasting production line for producing injection molding parts with arc-shaped high smooth surfaces
CN115285420A (en) * 2022-08-30 2022-11-04 华天科技(西安)有限公司 Automatic film sticking machine

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JP2005314100A (en) * 2004-05-26 2005-11-10 Lintec Corp Sticking device
CN1943025A (en) * 2004-04-14 2007-04-04 琳得科株式会社 Wafer processing device and wafer processing method
US20080121347A1 (en) * 2006-11-28 2008-05-29 Samsung Electronics, Co., Ltd. Wafer protection tape cutting apparatus, back lapping equipment, and wafer protection tape cutting method using the same

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
CN1943025A (en) * 2004-04-14 2007-04-04 琳得科株式会社 Wafer processing device and wafer processing method
JP2005314100A (en) * 2004-05-26 2005-11-10 Lintec Corp Sticking device
US20080121347A1 (en) * 2006-11-28 2008-05-29 Samsung Electronics, Co., Ltd. Wafer protection tape cutting apparatus, back lapping equipment, and wafer protection tape cutting method using the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104385767A (en) * 2014-12-03 2015-03-04 苏州恒铭达电子科技有限公司 Automatic film attaching method
CN108313372A (en) * 2018-04-28 2018-07-24 奥克斯空调股份有限公司 Laminating machine and use its film covering method
CN108527833A (en) * 2018-04-28 2018-09-14 奥克斯空调股份有限公司 Film-covering mechanism and laminating machine
CN108527833B (en) * 2018-04-28 2024-03-15 奥克斯空调股份有限公司 Film laminating mechanism and film laminating machine
CN113370515A (en) * 2021-05-19 2021-09-10 宁波力匠机器人科技有限公司 Film pasting production line for producing injection molding parts with arc-shaped high smooth surfaces
CN115285420A (en) * 2022-08-30 2022-11-04 华天科技(西安)有限公司 Automatic film sticking machine

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