CN102016131B - 介电涂层在半导体基材上的电沉积 - Google Patents

介电涂层在半导体基材上的电沉积 Download PDF

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Publication number
CN102016131B
CN102016131B CN2009801148747A CN200980114874A CN102016131B CN 102016131 B CN102016131 B CN 102016131B CN 2009801148747 A CN2009801148747 A CN 2009801148747A CN 200980114874 A CN200980114874 A CN 200980114874A CN 102016131 B CN102016131 B CN 102016131B
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China
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composition
weight
resin
resin solids
microgel
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Expired - Fee Related
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CN2009801148747A
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English (en)
Chinese (zh)
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CN102016131A (zh
Inventor
K·L·摩尔
M·J·鲍里克
M·G·桑德拉
C·A·威尔逊
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PPG Industries Inc
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PPG Industries Inc
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/22—Servicing or operating apparatus or multistep processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/44—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications
    • C09D5/4407—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications with polymers obtained by polymerisation reactions involving only carbon-to-carbon unsaturated bonds
    • C09D5/4411—Homopolymers or copolymers of acrylates or methacrylates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/44—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications
    • C09D5/4407—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications with polymers obtained by polymerisation reactions involving only carbon-to-carbon unsaturated bonds
    • C09D5/4415—Copolymers wherein one of the monomers is based on an epoxy resin
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/44—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications
    • C09D5/4419—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for electrophoretic applications with polymers obtained otherwise than by polymerisation reactions only involving carbon-to-carbon unsaturated bonds
    • C09D5/443—Polyepoxides
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/12—Electrophoretic coating characterised by the process characterised by the article coated
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6342—Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00—Electrophoretic coating characterised by the process
    • C25D13/04—Electrophoretic coating characterised by the process with organic material

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Wood Science & Technology (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Paints Or Removers (AREA)
CN2009801148747A 2008-03-19 2009-03-18 介电涂层在半导体基材上的电沉积 Expired - Fee Related CN102016131B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US3781408P 2008-03-19 2008-03-19
US61/037,814 2008-03-19
US12/405,299 US8057654B2 (en) 2008-03-19 2009-03-17 Electrodeposition of dielectric coatings on semiconductive substrates
US12/405,299 2009-03-17
PCT/US2009/037489 WO2009117475A1 (en) 2008-03-19 2009-03-18 Electrodeposition of dielectric coatings on semiconductive substrates

Publications (2)

Publication Number Publication Date
CN102016131A CN102016131A (zh) 2011-04-13
CN102016131B true CN102016131B (zh) 2012-12-26

Family

ID=41087812

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801148747A Expired - Fee Related CN102016131B (zh) 2008-03-19 2009-03-18 介电涂层在半导体基材上的电沉积

Country Status (8)

Country Link
US (2) US8057654B2 (https=)
EP (1) EP2265750A1 (https=)
JP (1) JP5496178B2 (https=)
KR (1) KR101242884B1 (https=)
CN (1) CN102016131B (https=)
CA (1) CA2719044C (https=)
IL (1) IL208202A (https=)
WO (1) WO2009117475A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8877029B2 (en) 2007-08-15 2014-11-04 Ppg Industries Ohio, Inc. Electrodeposition coatings including a lanthanide series element for use over aluminum substrates
CN102965179B (zh) * 2012-07-23 2014-09-17 贵州航天精工制造有限公司 一种二硫化钼液体润滑剂及其制备方法
JP2020030448A (ja) * 2018-08-20 2020-02-27 地方独立行政法人大阪産業技術研究所 静電容量式タッチセンサおよびその製造方法
US20210269667A1 (en) * 2020-02-27 2021-09-02 Axalta Coating Systems Ip Co., Llc Electrocoating composition

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096556A (en) * 1990-06-25 1992-03-17 Ppg Industries, Inc. Cationic microgels and their use in electrodeposition
CN1671804A (zh) * 2002-06-27 2005-09-21 Ppg工业俄亥俄公司 涂于基材上的可电沉积介电涂料组合物和形成该介电涂料的方法

Family Cites Families (22)

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Publication number Priority date Publication date Assignee Title
US3984922A (en) 1944-10-10 1976-10-12 Leo Rosen Rotors
DE1546840C3 (de) 1965-02-27 1975-05-22 Basf Ag, 6700 Ludwigshafen Verfahren zum Herstellen von Überzügen
US4001101A (en) 1969-07-10 1977-01-04 Ppg Industries, Inc. Electrodeposition of epoxy compositions
US3975346A (en) 1968-10-31 1976-08-17 Ppg Industries, Inc. Boron-containing, quaternary ammonium salt-containing resin compositions
US3663389A (en) 1970-04-17 1972-05-16 American Cyanamid Co Method of electrodepositing novel coating
US3984299A (en) 1970-06-19 1976-10-05 Ppg Industries, Inc. Process for electrodepositing cationic compositions
US3962165A (en) 1971-06-29 1976-06-08 Ppg Industries, Inc. Quaternary ammonium salt-containing resin compositions
US3947338A (en) 1971-10-28 1976-03-30 Ppg Industries, Inc. Method of electrodepositing self-crosslinking cationic compositions
US3947339A (en) 1971-12-01 1976-03-30 Ppg Industries, Inc. Method of electrodepositing primary amine group-containing cationic resins
US3749657A (en) 1972-01-04 1973-07-31 Ppg Industries Inc Treatment of electrodeposition rinse water
US3793278A (en) 1972-03-10 1974-02-19 Ppg Industries Inc Method of preparing sulfonium group containing compositions
US3928157A (en) 1972-05-15 1975-12-23 Shinto Paint Co Ltd Cathodic treatment of chromium-plated surfaces
BE857754A (fr) 1976-08-18 1978-02-13 Celanese Polymer Special Co Composition de resine pour revetements, notamment par electrodeposition cathodique
DE2711425A1 (de) 1977-03-16 1978-09-21 Basf Ag Lackbindemittel fuer die kathodische elektrotauchlackierung
DE2963277D1 (en) 1978-12-11 1982-08-19 Shell Int Research Thermosetting resinous binder compositions, their preparation, and use as coating materials
JPS5785820A (en) * 1980-11-17 1982-05-28 Asahi Chem Ind Co Ltd Novel resin composition, paint containing said resin composition and painting thereof
US5371120A (en) * 1993-07-19 1994-12-06 E. I. Du Pont De Nemours And Company Crosslinked microgel for cathodic electrocoating compositions
US6165338A (en) 1998-12-21 2000-12-26 Basf Corporation Cathodic electrocoat having a carbamate functional resin
US20060141143A1 (en) 2004-12-17 2006-06-29 J Mccollum Gregory Method for creating circuit assemblies
KR100755415B1 (ko) * 2005-12-30 2007-09-04 (주)디피아이 홀딩스 양이온성 전착도료 조성물 및 그 제조 방법
KR20080080674A (ko) * 2005-12-30 2008-09-04 이 아이 듀폰 디 네모아 앤드 캄파니 전자회로형 용도를 위한 기판
KR101224063B1 (ko) * 2006-02-28 2013-01-18 알쉬메 전기 전도성 또는 반전도성 표면들의 표면상에 유기 전기-그래프트된 필름의 형성

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096556A (en) * 1990-06-25 1992-03-17 Ppg Industries, Inc. Cationic microgels and their use in electrodeposition
CN1671804A (zh) * 2002-06-27 2005-09-21 Ppg工业俄亥俄公司 涂于基材上的可电沉积介电涂料组合物和形成该介电涂料的方法

Also Published As

Publication number Publication date
US20090236231A1 (en) 2009-09-24
KR101242884B1 (ko) 2013-03-12
US8057654B2 (en) 2011-11-15
EP2265750A1 (en) 2010-12-29
JP5496178B2 (ja) 2014-05-21
CN102016131A (zh) 2011-04-13
JP2011515583A (ja) 2011-05-19
KR20100126524A (ko) 2010-12-01
IL208202A (en) 2014-07-31
IL208202A0 (en) 2010-12-30
HK1152353A1 (en) 2012-02-24
US20120006683A1 (en) 2012-01-12
WO2009117475A1 (en) 2009-09-24
US8333879B2 (en) 2012-12-18
CA2719044A1 (en) 2009-09-24
CA2719044C (en) 2012-12-11

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