CN102011096B - Vacuum evaporation system capable of controlling evaporating airflow distribution and components - Google Patents

Vacuum evaporation system capable of controlling evaporating airflow distribution and components Download PDF

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CN102011096B
CN102011096B CN2010106110859A CN201010611085A CN102011096B CN 102011096 B CN102011096 B CN 102011096B CN 2010106110859 A CN2010106110859 A CN 2010106110859A CN 201010611085 A CN201010611085 A CN 201010611085A CN 102011096 B CN102011096 B CN 102011096B
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evaporation
evaporated
gun
material
crucible
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CN2010106110859A
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CN102011096A (en
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张建华
张志林
蒋雪茵
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上海大学
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Abstract

The invention relates to a vacuum evaporation system capable of controlling evaporating airflow distribution and components. The system comprises an evaporation gun, a high-temperature evaporation crucible and a storage tank filled with an evaporating material, wherein a nozzle with an upper conical surface and a lower conical surface is formed on the evaporation gun, and a movable airflow guidance plug is arranged inside the nozzle; a substrate to be evaporated is opposite to the front of the nozzle; the evaporation gun is connected with the high-temperature evaporation crucible which is provided with a cross baffle through a heat pipeline or a surge flask, and the other side of the crucible is connected with the storage tank through a pipeline which is provided with a feed valve; heating coils are arranged on the evaporation gun, the heat pipeline, the high-temperature evaporation crucible and the outer wall of the pipeline, and a heat coil is arranged on the outer wall of the storage tank as well; the evaporating material in the storage tank is delivered into the high-temperature evaporation crucible through the feed valve and the pipeline, so that the evaporating material to be evaporated is immediately turned to be vapor delivered to the evaporating gun; and the volume and the direction of the vapor can be controlled by changing the relative position of the airflow guidance plug and the nozzle, and the vapor is evaporated to the substrate to form an evaporating film, which is uniform and has set area and multiple components. The vacuum evaporation system has simple structure, can improve the utilization rate of the organic evaporating material, and can improve the production efficiency.

Description

可控制蒸发气流分布和成分的真空蒸发系统 Airflow distribution can be controlled evaporation and vacuum evaporation system component

技术领域 FIELD

[0001] 本发明涉及用于制作有机发光二极管(0LED)、有机薄膜晶体管(TFT)、有机太阳电池、半导体器件、平板显示器件,及其他有机及无机器件时把有机及无机的蒸发料蒸镀到基板上的可控制蒸发气流分布和成分的真空蒸发系统。 [0001] The present invention relates to making organic light emitting diodes (0LED), an organic thin film transistor (the TFT), organic solar cells, semiconductor devices, flat panel display, and other organic and inorganic components when the organic and inorganic vapor deposition material was evaporated evaporated in vacuo to a control system components and air distribution evaporated on the substrate.

背景技术 Background technique

[0002] 真空蒸镀工艺已广泛的用于半导体元器件及平板显示器件的制作。 [0002] The vacuum vapor deposition process has been widely used in the production of semiconductor components and flat panel display devices. 特别如有机发光二极管(OLED)等方面已形成了一个很大的产业,在OLED的制备过程中主要的过程是真空蒸发,就是把有机蒸发料放在加热的坩埚中把蒸发料变成蒸汽后沉积在基板上。 The particular aspect of the organic light emitting diode (OLED) has formed a big industry, in the production process of an OLED main vacuum evaporation process, evaporation of the organic material is placed in the heated crucible into the evaporator after the steam feed deposited on the substrate. 由于随着平板显示面积的不断扩大,对大面积蒸发的均勻性和低成本的蒸发要求越来越高。 With the flat panel display because of the growing area, the evaporation of large area uniformity and low cost evaporated increasingly demanding. 而一般常用蒸发源有点蒸发源和线蒸发源。 Commonly used evaporation source and the evaporation source and bit lines evaporation source. 对于点蒸发源如中国专利01129122、200810210270. x、003110977等,该种蒸发源由于蒸发时呈球面状因此在蒸发到平面基板时是不均勻的,中间厚周边薄。 For point evaporation source Chinese Patent 01129122,200810210270. X, 003110977, etc. Since the evaporative source upon evaporation of a spherical shape is not uniform and therefore the plane of the substrate upon evaporation, a thin peripheral thickness of the intermediate. 为了要得到均勻的薄膜则需要把蒸发源放在基板的边缘而在基板旋转的情况下才能得到均勻的薄膜。 In order to obtain a uniform thin film need to be put on the edge of the evaporation source and the substrate in order to obtain a uniform film in the case of the rotating substrate. 这不仅增加了工艺的复杂性而且也造成了蒸发料的大量浪费。 This not only increases the complexity of the process but also caused a lot of waste material evaporation. 一般用这种方法的蒸发料的利用率只有百分之几。 Only a few percent of the general use of this method of evaporation material utilization. 特别是对有机发光器件其有机发光的材料很昂贵的情况下它大大的增加了成本。 Especially for the organic light-emitting organic light emitting device which case very expensive material greatly increases its cost. 为了提高蒸发料的利用率有很多专利如中国专利200710169464. 5等提出了线蒸发源的方案。 In order to improve the utilization of the evaporation material had a lot of patents and other like China Patent 200710169464.5 been proposed evaporation source line. 其方法是通过线蒸发源即把蒸发舟制成一长条形的蒸发舟形成一均勻的线状的蒸发源,通过该线蒸发源或基板的等速移动来实现均勻的蒸发。 The method by which evaporation source line i.e. the evaporation boat made of a long strip of evaporation boats to form a uniform linear evaporation source to achieve uniform evaporation of the wire through the constant movement of the evaporation source or substrate. 它的蒸发料利用率有了很大提高,可以达到20%左右的利用率。 It has been greatly improved utilization of the evaporation material can reach 20% utilization. 但是它的结构复杂为实现线上的均勻蒸发速率其控制的因素很多,设备成本就比较高。 But its complex structure to achieve a uniform evaporation rate line control many factors, equipment cost is relatively high. 此外由于一般的有机发光层多需要有搀杂剂因此需要多源蒸发。 Furthermore, since the organic light emitting layer generally requires a plurality dopant requiring multi-source evaporation. 这不仅带来了更多的控制,为了调节其稳定的蒸发速率需要很长的调试过程,这也带来了很大的蒸发料的浪费和工艺成本。 This not only brings more control to adjust the steady evaporation rate it takes a long debugging process, which also brought waste and process costs a lot of evaporation materials.

发明内容 SUMMARY

[0003] 本发明的目的在于针对已有技术存在的缺陷,提供一种可控制蒸发气流分布和成分的真空蒸发系统,蒸发到基板上的薄膜厚度是均勻的,且大大提高有机蒸发料的利用率, 系统结构简单,提高生产率。 [0003] The object of the present invention is for the defects of the prior art, and evaporated in vacuo to provide a control system components and air distribution evaporation, evaporation to a film thickness on the substrate is uniform, and greatly enhance the utilization of the organic material evaporation rate, the system is simple and increase productivity.

[0004] 为达到上述目的,本发明采用下述技术方案: [0004] To achieve the above object, the present invention adopts the following technical scheme:

[0005] 一种可控制蒸发气流分布和成分的真空蒸发系统,包括蒸发枪、高温蒸发坩埚和装有蒸发料的储料罐,其特征在于所述蒸发枪带有一个上下锥面的喷口,且在喷口内侧安置一个可移动的气流导向塞子,待蒸镀的基板对准所述的喷口前方,该蒸发枪通过一个加热管道或缓冲瓶与带有交叉挡板的所述高温蒸发坩埚相连,在所述坩埚的另一侧通过一个装有送料阀门的输料管道与所述储料罐相连;所述蒸发枪、加热管道、高温蒸发坩埚和输料管道外壁上都有加热线圈,在储料罐外壁上亦有加热线圈;通过送料阀门和输料管道把储料罐中的蒸发料投放到高温蒸发坩埚中进行蒸发的蒸发料瞬间变成蒸发气体而输送至蒸发枪,通过改变气流导向塞子与喷口的相对位置可控制蒸发气流的大小和方向,蒸发气体蒸发到基板上形成设定面积的、均勻的、多组分的蒸 [0005] A control system was evaporated in vacuo and the evaporation flow distribution component, comprising a gun evaporation, high-temperature evaporation crucible with the supply vessel and the evaporation material, characterized in that said evaporator gun having a nozzle of the upper and lower tapered surface, and a nozzle disposed in the inside of the air flow guide movable stopper, a substrate to be deposited in front of the alignment of the spout, which is connected via a heat gun evaporation pipe or buffer vial with the high-temperature evaporation crucible with cross baffle, in the other side of the crucible through a feed valve provided with conveying conduit connected to the reservoir tank feed; the gun evaporation, heat pipes, high-temperature evaporation crucible and the outer wall of the conveying duct has a heating coil in the reservoir material outside of the tank wall also heating coil; through feed valves and conveying pipeline to deliver the supply vessel is vaporized material to an elevated temperature evaporation crucible evaporated material instantaneously evaporated into the evaporated gas is conveyed to the evaporator gun, the guide stopper by changing the air flow the relative position of the nozzle can control the evaporation amount and direction of air flow, the boil-off gas evaporated setting area formed on the substrate, a uniform, multi-component vapor 发薄膜。 Hair film.

[0006] 所述蒸发枪的带有上下锥面的喷口的截面形状可根据基板的形状和蒸发气流流量的分布而做成正方形、或长方形、或圆形,而对应锥面的形状是正方锥形、或长方锥形、或圆锥形,上下锥面的形状是对称的或不对称的。 [0006] The sectional shape having upper and lower cone nozzle gun evaporation can be made in accordance with the shape of the distribution of air flow rate and evaporation of the square substrate, or rectangular, or circular, a shape corresponding to the tapered surface is square pyramids shaped, rectangular, or tapered, or conical, shape of the upper and lower tapered surfaces are symmetrical or asymmetrical.

[0007] 所述喷口内侧可移动的气流导向塞子的形状是球状、或椭球状、或锥状;可移动的气流导向塞子与一移动杆相连,该移动杆伸出蒸发枪的体外,一个波纹管一端与移动杆固定连接,另一端与蒸发枪壳体固定连接,使蒸发枪腔体形成一个密封整体。 [0007] The shape of the spout inside the air flow guide movable plug is spherical or spheroidal, or conical; air flow guide movable plug connected to a movable rod, the movable rod projecting vitro gun evaporation, a ripple one end of the tube and the moving rod is fixedly connected, the other end fixedly connected to the evaporator housing gun, the gun evaporation chamber form a sealed integrally. 通过驱动移动杆移动气流导向塞子来调节气流导向塞子与喷口的距离,进而起到调节气流的分布和大小以及达到关闭的功能。 Adjusting the airflow guide plug and the nozzle hole by driving the moving rod from the guide stopper moving gas stream, and thus play a size distribution and air flow regulating function to achieve closed.

[0008] 所述蒸发料是单一材料,或者是多种材料的混合材料,该混合材料是机械混合料, 或者是通过把搀杂料溶解在适当的溶剂中再加入到基质中微量杂质。 [0008] The evaporated material is a single material or a mixed material of a plurality of materials, the mixed material is a mechanical mixture, or added to the substrate, then by the trace impurity doping material dissolved in a suitable solvent.

[0009] 所述蒸发料是粉末状。 [0009] The evaporated material is a powder.

[0010] 所述高温蒸发坩埚的坩埚底部呈锥状或球状。 [0010] The high-temperature evaporation crucible bottom crucible tapered or spherical.

[0011] 所述蒸发枪、加热管道和高温蒸发坩埚的材料是不锈钢,钼,钽,钨以及高温陶瓷中任选一种。 [0011] The gun evaporation, heat pipes and high-temperature evaporation crucible material is stainless steel, molybdenum, tantalum, tungsten, and, optionally, one high-temperature ceramic.

[0012] 一种可控制蒸发气流分布和成分的真空蒸发系统,包括蒸发枪和装有蒸发料的储料罐,其特征在于所述蒸发枪带有上下锥面的喷口,且在喷口内侧安置一个移动的气流导向塞子,对准所述喷口的前方安置待蒸镀的基板,该蒸发枪内腔下部设有交错挡板,蒸发枪通过装有送料阀门的管道连接所述储料罐;蒸发枪外壁上装有加热线圈,管道和储料罐外壁上装有加热线圈。 [0012] A control gas flow distribution and evaporated in vacuo evaporation system components, including evaporation guns and with the evaporation material supply vessel, characterized in that said evaporator gun nozzle with upper and lower cone, and disposed inside a nozzle air guide stopper is moved forward, the alignment of the spout is disposed a substrate to be vapor-deposited, the lower interior portion gun evaporation with staggered baffles, equipped with an evaporator feed gun through the valve conduit connecting said storage tank; gun evaporation an outer wall provided with a heating coil, and an outer pipe wall of the supply vessel equipped with a heating coil.

[0013] 本发明与现有技术相比较,具有如下显而易见的突出实质性特点和显著优点: [0013] The present invention compared with the prior art, has a protruding apparent substantive features and significant advantages:

[0014] 1)由于本发明中的蒸发枪的喷口和导向塞具有定向和各方向的气流的定向分配的功能,使之到达一定距离的基板时的气体流量正好是均勻的从而达到在指定的面积里是均勻的,而且所有的气流都集中在基板的有效面积内。 [0014] 1) Since the present invention is the evaporation of the gun nozzle and the guide plug having orientation and the gas flow directions functional orientation distribution, so that to the gas flow rate of the substrate at a distance of exactly uniform to achieve the specified It is uniform in area, and all the gas flow are concentrated in the effective area of ​​the substrate. 这样既保证了蒸发到基板上的薄膜厚度是均勻的,又大大的提高了有机蒸发料的利用率降低了成本。 This will ensure the film thickness was evaporated on the substrate to be uniform, and greatly improves the utilization of the organic evaporation material reduces costs. 由于所有的蒸发料都蒸发到基板上了,因此真空蒸发腔体内其它部分不会被污染保证了真空蒸发腔体的洁净度。 Since all of the evaporation materials are evaporated onto the substrate, so other parts of the vacuum evaporation chamber is not contaminated ensure the cleanliness of the vacuum evaporation chamber.

[0015] 2)通过蒸发枪的喷口锥形与导向塞形状的设计不仅可以实现大面积的蒸发均勻性而且可以缩短蒸发的距离,从而可以大大缩小蒸发腔体的体积。 [0015] 2) a tapered plug shape by the guide nozzle gun evaporation evaporator design can be achieved not only a large area uniformity and can shorten the distance of evaporation, which can greatly reduce the volume of the evaporation chamber.

[0016] 3)通过定向蒸发能得到均勻的蒸发薄膜,因此基板以及与之相接触的金属掩膜板都不需要转动,这使得在蒸发系统的设计上可以得到简化。 [0016] 3) evaporating a uniform orientation can be obtained by evaporating a thin film, the substrate and the metal mask plate in contact therewith do not need to be rotated, which makes the design can be simplified in the evaporation system.

[0017] 4)由于此系统的蒸发枪与蒸发料的气化是分开的,所以其气流的方向可以向任何方向既可以向上也可以向下或平射。 [0017] 4) Since the gun vaporized evaporation material to the evaporation of this system are separate, so the direction of gas flow may be in any direction either upward or downward may be flat trajectory. 这样在蒸发系统设计时基板既可以在蒸发枪的上面, 以减少污染,也可以在蒸发枪的下面有利于基板和金属掩膜板的紧密接触,或者基板可以是直立的形式有利于基板的移动。 In the evaporation system design such a substrate may be evaporated on top of the gun, to reduce pollution, may facilitate close contact with the substrate and the metal mask plate below the gun evaporation, or the substrate may be in the form of upstanding facilitate movement of the substrate . 这给蒸镀系统的设计带来很多的灵活性。 This brings a lot of flexibility to the design of the deposition system.

[0018] 5)相比一般的点蒸发源或线蒸发源此系统的体积可以比较小,相对来说其发热面积可以比较小,蒸发的速率比较快,这样可以降低基板的温度,和缩短系统节拍时间,这有助于提高OLED屏的性能和提高系统的生产效率。 [0018] 5) compared to the general point evaporation source or a line source volume of the system evaporator can be relatively small, which heating area can be relatively small, relatively fast evaporation rate, so that the temperature of the substrate can be reduced, and shortening system takt time, which helps increase productivity and improve system performance OLED screen.

[0019] 6)由于所用的蒸发料是投料后一次性蒸发掉的,因此不像一般点蒸发源或线蒸发源的蒸发料是总在高温底下,在开始蒸发到蒸发完时的状况会不同而造成成膜质量的差已 [0019] 6) Since the use of evaporation material after feeding the disposable evaporate, so unlike point evaporated material evaporation source or line evaporation source is always under high temperature condition at the start of evaporation to complete the evaporation will be different the resulting film quality was poor

[0020] 7)由于可以通过蒸发料的投料的数量来控制基板上的成膜厚度,所以大大简化了膜厚的控制系统。 [0020] 7) since it is possible to control the film thickness on the substrate by evaporation of the number of feed materials, so greatly simplifying the control system of the film thickness. 而且在蒸发完成后,基板转换和金属掩膜板对位的时间可以不投料这与一般的点蒸发源和线蒸发源相比可以节省很多的蒸发料。 After evaporation and complete, conversion of the substrate and the metal mask bit time may not feed this general point evaporation source and the evaporation source lines can save a lot of material as compared to evaporation. 因为在一般的点蒸发源和线蒸发源在蒸发时为了保证均勻的蒸发速度,在转换基板和金属掩膜板对位时蒸发源是仍然在勻速蒸发状态,只是用挡板把蒸发流挡住而已,这部分料是浪费的。 Because in general the point evaporation source and the evaporation source lines upon evaporation in order to ensure a uniform evaporation rate, the conversion of the substrate and the metal mask evaporation source is evaporated bits are still in uniform state, except that the evaporation flow blocked by the shutter only this part of the material is wasted.

[0021] 8)由于所用的蒸发料是已经经过搀杂的,因此不需要多源蒸发,这给蒸发系统的结构设计可以简化很多。 [0021] 8) Since the evaporation material is used has passed doped, multi-source evaporation is not required, to design an evaporation system which may be much simplified. 也取消了调制不同蒸发源的蒸发速率的时间,从而节约了蒸发料和时间。 Also canceled time evaporation rate modulation different evaporation sources, the evaporation material and thereby saving time.

附图说明 BRIEF DESCRIPTION

[0022] 图1是本发明中可控制蒸发气流分布和成分的真空蒸发系统结构示意图; [0022] FIG. 1 is a schematic of the present invention, the control structure of the evaporator system was evaporated in vacuo and the flow distribution component;

[0023] 图2是本发明中简化的可控制蒸发气流分布和成分的真空蒸发系统的结构示意图; [0023] the present invention, FIG. 2 is a simplified schematic view of the control may be evaporated in vacuo and the air distribution system of evaporation of the components;

[0024] 图3是本发明中在实施向上可控制蒸发气流分布和成分的真空蒸发系统的结构示意图; [0024] FIG. 3 is a schematic view of the present invention can control the evaporation upward gas flow distribution in the embodiment and components of the vacuum evaporation system;

[0025] 图4是本发明中实施移向下可控制蒸发气流分布和成分的真空蒸发系统的结构示意图。 [0025] FIG. 4 is a schematic view of an evaporator airflow distribution can be controlled and moved toward the component under vacuum evaporation system in the embodiment of the present invention.

具体实施方式 Detailed ways

[0026] 本发明的优选实施例结合附图详述如下: Detailed description of the following embodiments in conjunction with [0026] preferred embodiment of the present invention:

[0027] 实施例1 :参见图1,本可控制蒸发气流分布和成分的真空蒸发系统是由蒸发枪(3)、高温管道(4)、高温蒸发坩埚(5)、送料阀门(8)和储料罐(9)组成,所述蒸发枪(3)带有上下锥面的喷口(1),且在喷口(1)内侧安置一个可移动的气流导向塞子(2),待蒸镀的基板(16)对准所述的喷口(1)的前方,蒸发枪(3)通过所述加热管道(4)或缓冲瓶与带有交叉挡板(6)的高温蒸发坩埚(5)相连,在坩埚(5)的另一侧通过装有送料阀门(8)的输料管道(7)和储料罐(9)相连。 [0027] Example 1: Referring to Figure 1, this can control the vacuum evaporation system evaporator air distribution and composition by evaporation guns (3), heat pipes (4), high temperature evaporation crucible (5), a feed valve (8) and storage tank (9), with the evaporator lance (3) with a vertical tapered nozzle (1), the nozzle and the substrate (1) is disposed inside a movable flow guide plug (2) to be vapor-deposited (16) aligned with said nozzle (1) front and evaporated gun (3) (5) is connected (4) or buffer vial and high-temperature evaporation crucible with a cross flap (6) through said heating pipe, in the other side of the crucible (5) is provided with a feed through valve (8) of the conveying pipe (7) and the storage tank (9) is connected. 蒸发枪(3)、加热管道(4)、高温蒸发坩埚(5)和输料管道(7) 外壁上有加热线圈(13),储料罐(9)外壁上有加热线圈(15)。 Evaporation guns (3), the heating pipe (4), high temperature evaporation crucible (5) and the conveying pipe (7) an outer wall of the heating coil (13), the storage tank (9) an outer wall of a heating coil (15). 过程是在储料罐中的蒸发料(10)经阀门把一定量的蒸发料投入到高温蒸发舟中,由于该舟的温度多高于蒸发料的蒸发温度因此该蒸发料很快的被蒸发成气体,该高温气体经过高温管道进入高温的真空蒸发枪在喷口(1)和可移动的气流导向塞子的作用下形成中间弱周边强的气流使之达到基板时能获得均勻的蒸发薄膜。 Process evaporation material (10) through a valve into the feed to the amount of evaporation in the high temperature evaporator boat material storage tank, the temperature of the boat above the evaporation temperature of the evaporator multi-material so that the evaporation material is evaporated quickly into the gas, high-temperature gas through the pipe into the high-temperature high-temperature and evaporated in vacuo nozzle gun formed at (1) the flow guide and the movable stopper effect can be obtained even when the intermediate film evaporator airflow around the weak and strong so as to reach the substrate. 这里的储料罐是由金属如铝、不锈钢或者玻璃制成的容器其底部有一可打开的加料和抽气的孔储料罐外有一组加热线圈(15),用作开始抽空时加热去气时用,其加热温度由特定的温度控制器进行程序控制。 Here an outer storage tank is a metal container made from such as aluminum, stainless steel or glass having an openable feeding and evacuating a bottom hole having a set of storage tank heating coil (15) serves as a heating gas to the start of evacuation when used, the heating temperature is controlled by a particular programmed temperature controller. 这里的送料器可以有多种结构,随蒸发料的状态而变,对粉末状蒸发料可以是螺旋式送料机,履带式运送机,对颗粒状蒸发料可用推拉式送料机或旋转式送料机。 Here feeders may have various structures, depending on the state of the evaporated materials becomes, powdered evaporation material feeder may be a spiral, the track conveyors, evaporation of particulate material available push-type feeder or a rotary feeder . 送料机的材料可以是不锈钢或者玻璃。 The material feeder may be stainless steel or glass. 这里的高温蒸发舟是由不锈钢、钼、钽等耐高温材料制成,其形状可以是锥形,平底形圆筒式的结构,为保证蒸发气流中没有小颗粒,在高温蒸发舟中可采用装有多层挡板的迷宫式结构。 Here high-temperature evaporation boat made of stainless steel, molybdenum, tantalum, high temperature resistant material, which shape may be tapered, flat-shaped cylindrical structure, in order to ensure there are no small particles evaporated gas stream may be employed in the high-temperature evaporation boat labyrinth structure with multiple layers of baffles. 这里的高温真空蒸发枪是本系统的核心。 Here high-temperature vacuum evaporation system is the core of the gun. 它是由耐高温的材料如钼、钽、不锈钢等材料制成。 It is such as molybdenum, tantalum, stainless steel and other materials made of a refractory material. 喷口的上下都呈圆锥形或方锥形这样的喷口本身就有发散的功能,在喷口的下面还有一个气体导向塞子(12)其形状可以是球状,椭球状或者是锥形状。 Radiate down spout or conical square tapered orifices such divergent function itself, below the nozzle there is a gas guide plug (12) which shape may be spherical, ellipsoidal or conical shape. 它与喷口形成空间成为导向通道使喷出的气流呈余弦的倒数的分布。 It serves as a guide space is formed with the nozzle passage so that air discharged form the reciprocal of the cosine distribution. 其形状也可以通过流体力学来进行设计和计算。 The shape may also be designed and calculated fluid dynamics. 该气体导向塞子与喷口之间的距离可以由外面通过连在塞子上的移动杆(11)的推拉来调节使在不同的气流强度的情况下都能得到均勻的薄膜。 The distance between the gas plug and the guide nozzle may be adjusted by push or pull out the plug attached to the travel bar (11) so that a uniform film can be obtained in case of different flow intensity. 而该移动杆(11)还通过一波纹管(12)与枪体连接形成一密闭的空间使气流只能通过喷口喷出。 And the moving rod (11) through a bellows (12) connected to the gun body to form a sealed space so that air flow can only be discharged through the spout. 系统里的蒸发枪(3),高温管道(4),高温蒸发舟(5 )都由加热装置(13 )经温度控制器进行精确的温度控制和加热。 Gun evaporation system (3), heat pipes (4), high temperature evaporation boat (5) by heating means (13) precise temperature control, and heating the temperature controller. 加热装置的外面有绝热保护层为了防止加热装置的能量转到基板上,在它的外面还有一个水冷却套,以防止基板和蒸发掩膜被加热。 Heating means outside heat insulating protective layer in order to prevent the energy of the heating means to the substrate, outside of it there is a water cooling jacket to prevent evaporation of the mask and the substrate are heated.

[0028] 实施例2 :参见图2,本可控制蒸发气流分布和成分的真空蒸发系统是实施例1的简化结构,在本实施例中把整个系统简化为由高温真空蒸发枪(3)送料阀门(8)和储料罐(9)组成。 [0028] Example 2: see FIG. 2, this can control the vacuum evaporation system evaporator air distribution and composition to simplify the structure of embodiment 1, embodiment the entire system is simplified by the high temperature vacuum evaporation guns (3) feeding in this embodiment the valve (8) and the storage tank (9) the composition. 这里的高温真空蒸发枪(3)综合了实施例1中的高温真空蒸发枪(3)、高温管道(4)、高温蒸发坩埚(5)的功能。 Here high-temperature vacuum evaporation guns (3) a combination of high temperature vacuum evaporation guns (3) in Example 1, the heat pipes (4), high temperature evaporation crucible (5) function. 在这里的真空蒸发枪既作为蒸发枪又作为蒸发坩埚。 Evaporated in vacuo gun here both as an evaporator and as a gun evaporator crucible. 该高温真空蒸发枪它是由耐高温的材料如钼、钽、不锈钢等材料制成。 The high-temperature and evaporated in vacuo gun which is made of a refractory material such as molybdenum, tantalum, stainless steel and other materials. 喷口的上下都呈锥形这样的喷口本身就有发散的功能,在喷口的下面还有一个气体导向塞子(12)其形状可以是球状,椭球状或者是锥形状。 Such vertical nozzle orifices radiate diverging cone itself functions below the spout and a gas guide plug (12) which shape may be spherical, ellipsoidal or conical shape. 它与喷口形成空间成为导向通道使喷出的气流呈余弦的倒数的分布。 It serves as a guide space is formed with the nozzle passage so that air discharged form the reciprocal of the cosine distribution. 该真空蒸发枪的底部是锥形或球形可以作坩埚用,里面还有多层当板(6)呈迷宫式结构以防止颗粒蒸发到基板上。 The bottom gun is evaporated in vacuo conical or spherical crucible can be made, when there is also a multilayer board (6) as a labyrinth structure to prevent evaporation of the particles onto the substrate. 蒸发料(10)则通过送料阀门(8)进入到高温真空蒸发枪(3)中并快速的转化为气体经喷口(1)与气体导向塞子(12)之间的空间形成定向的气流由喷口(1)喷出。 Evaporation material (10) goes through the feed valve (8) to a high temperature vacuum evaporation guns (3) and quickly converted to gas through the nozzle (1) and the gas guide space between (12) the plug is formed directed air flow from the nozzle (1) discharge.

[0029] 实施例3 :参见图3,本可控制蒸发气流分布和成分的真空蒸发系统与实施例1基本相同,本实施例与实施例1的不同是在整个系统中在高温真空蒸发枪(3)的上面有带有透孔的掩膜板(17)和基板(16)。 [0029] Example 3: Referring to Figure 3, this can control the vacuum evaporation system evaporator air distribution and composition of Example 1 is substantially the same, the present embodiment differs from Embodiment 1 is the entire system in a high temperature vacuum evaporation guns ( there mask plate having through-holes (17) and the substrate (16) above 3). 它展示了由于使用实施例1的高温真空蒸发枪(3)可以得到由高温真空蒸发枪向上定向的对基板来说是均勻的真空蒸发气流,在基板是固定不动的情况下由于在高真空的情况下蒸发气体的分子基本是直线运动的,因此即使掩膜板与基板不是紧密接触的情况下仍能得到较好的向上的掩膜投影效果。 It shows the use of high-temperature vacuum evaporation gun Example 1 (3) may be evaporated in vacuo to give a uniform gas stream is directed to the substrate by a high temperature and evaporated in vacuo up gun, in the case where the substrate is stationary due to the high vacuum boil-off gas molecules in the case of substantially linear movement, and therefore even when the mask plate and the substrate into close contact is not obtained still better mask projection upward.

[0030] 实施例4 :参见图4,本可控制蒸发气流分布和成分的真空蒸发系统与实施例1基本相同,本实施例与实施例3不同的是这里的高温真空蒸发枪的方向向下转动180度,使蒸发气流向下蒸发。 [0030] Example 4: Referring to Figure 4, this can control the air distribution system evaporator evaporated in vacuo and the components substantially the same as in Example 1, the present embodiment is different from Example 3 where the temperature is evaporated in vacuo gun downward direction rotated 180 degrees, evaporated down stream of the evaporator. 这时的基板(16)是面向上的,在基板板的上面有一个带有透孔的掩膜板(17)。 A substrate (16) is oriented on the case, a mask having through-holes (17) on top of the substrate plate. 此结构的优点是整个基板和掩膜板可以放在平整的托板上,使基板和掩膜板都保持高度的平整度。 The advantage of this configuration is that the entire substrate and the mask plate can be placed on a flat pallet, the substrate and the mask plate have a high degree of flatness. 这一点对大面积的薄基板来说具有很大的优越性。 This thin substrate of a large area is of great advantage. 同时也可以把高温真空蒸发枪的方向转到水平的方向,这时的基板可以呈垂直的方向。 Also can be of elevated temperature and evaporated in vacuo to a horizontal direction of the gun, this time may be in a direction perpendicular to the substrate.

[0031] 实施例5 :参见图1,本实施例与实施例1基本相同,特别之处如下:所述蒸发枪(3)的带有上下锥面的喷口(1)截面形状可根据基板(16)的形状和蒸发气流流量的分布而做成正方形、或长方形、或圆形,而对应锥面的形状是正方锥形、或长方锥形、或圆锥形,上下锥面的形状是对称的或不对称的。 [0031] Example 5: Referring to Figure 1, the present embodiment is substantially the same as in Example 1, the following special: the evaporator gun (3) (1) with a spout vertically tapered cross-sectional shape may vary depending on the substrate ( 16) the shape and distribution of air flow rate and evaporator made square, or rectangular, or circular, a shape corresponding to the tapered surface is tapered square, rectangular, or tapered, or conical, shape of the upper and lower tapered surface is symmetrical or asymmetrical.

[0032] 所述喷口(1)内侧可移动的气流导向塞子(2)的形状是球状、或椭球状、或锥状; 可移动的气流导向塞子(2)与一移动杆(11)相连,该移动杆(11)伸出蒸发枪(3)的体外, 一个波纹管(12)—端与移动杆(11)固定连接,另一端与蒸发枪(3)壳体固定连接,使蒸发枪腔体形成一个密封整体。 [0032] The nozzle (1) the shape of the inner flow guide movable plug (2) is spherical, or ellipsoidal, or tapered; the air flow guide movable plug (2) and a moving bar (11) is connected, in vitro the moving rod (11) projecting gun evaporator (3), a bellows (12) - end of the moving bar (11) is fixed and the other end of the evaporator gun (3) is fixedly connected to the housing, an evaporation chamber gun a seal formed integrally. 通过驱动移动杆(11)移动气流导向塞子(2 )来调节气流导向塞子(2)与喷口的距离,进而起到调节气流的分布,大小以及达到关闭的功能。 By moving the drive rod (11) moving air guide plug (2) to adjust the air guide plug (2) and the distance from the nozzle, and thus can modulate the gas flow distribution, size, and to achieve close function.

[0033] 所述蒸发料(10)是单一材料,或者是多种材料的混合材料,该混合材料是机械混合料,或者是通过把搀杂料溶解在适当的溶剂中再加入到基质中使其会有微量杂质。 [0033] The evaporation material (10) is a single material or a mixed material of a plurality of materials, the mixed material is a mechanical mixture, or added to the substrate by doping the material dissolved in a suitable solvent so as It will trace impurities.

[0034] 所述蒸发料(10)是粉末状。 [0034] The evaporation material (10) is powdered.

[0035] 所述高温蒸发坩埚(5)的坩埚底部呈锥状或球状。 The bottom of the crucible [0035] The high-temperature evaporation crucible (5) is tapered or spherical.

[0036] 所述蒸发枪(3)、加热管道(4)和高温蒸发坩埚(5)的材料是不锈钢,钼,钽,钨以及高温陶瓷中任选一种。 Materials [0036] The gun evaporator (3), the heating pipe (4) and the high temperature evaporator crucible (5) is stainless steel, molybdenum, tantalum, tungsten, and, optionally, one high-temperature ceramic.

Claims (8)

1. 一种可控制蒸发气流分布和成分的真空蒸发系统,包括蒸发枪(3)、高温蒸发坩埚(5)和装有蒸发料(10)的储料罐(9),其特征在于所述蒸发枪(3)带有一个上下锥面的喷口(1),且在喷口(1)内侧安置一个可移动的气流导向塞子(2),待蒸镀的基板(16)对准所述的喷口(1)前方,该蒸发枪(3 )通过一个加热管道(4 )或缓冲瓶与带有交叉挡板(6 )的所述高温蒸发坩埚(5)相连,在所述坩埚(5)的另一侧通过一个装有送料阀门(8)的输料管道(7)与所述储料罐(9)相连;所述蒸发枪(3)、加热管道(4)、高温蒸发坩埚(5)和输料管道(7)外壁上都有加热线圈(13),在储料罐(9)外壁上亦有加热线圈(15);通过送料阀门(8) 和输料管道(7)把储料罐(9)中的蒸发料(10)投放到高温蒸发坩埚(5)中进行蒸发的蒸发料(14)瞬间变成蒸发气体而输送至蒸发枪(3),通过改变气 1. A control gas flow distribution and evaporated in vacuo evaporation system components, including evaporation guns (3), the evaporation temperature of the crucible (5) and equipped with an evaporator feed (10) of the storage tank (9), characterized in that said evaporator gun (3) having a tapered vertical spout (1), and aligned in said nozzle orifice (1) is disposed inside a movable flow guide plug (2), the substrate (16) to be vapor-deposited ( 1) forward, the evaporation guns (3) through a heating pipe (4) or buffer vial evaporation temperature with the cross rails (6) of the crucible (5) connected to the other in the crucible (5) by feeding side with a valve (8) of the conveying pipe (7) and the storage tank (9) is connected; evaporating said gun (3), the heating pipe (4), high temperature evaporation crucible (5) and output feed conduit (7) has an outer wall of the heating coil (13), the storage tank (9) also has an outer wall of a heating coil (15); feed through valve (8) and the conveying pipe (7) to the storage tank ( evaporation material (10) 9) serving to high evaporation crucible (5) in the evaporation material is evaporated (14) to become evaporated instantaneously conveyed to the evaporator gas lance (3), by varying the gas 导向塞子(2)与喷口(1)的相对位置可控制蒸发气流的大小和方向,蒸发气体蒸发到基板(16)上形成设定面积的、均勻的、多组分的蒸发薄膜。 The relative position of the guide stopper (2) and the nozzle (1) may control the amount and direction of airflow evaporation, boil-off gas evaporated onto the substrate (16) formed of the set area, a uniform, thin film evaporation multicomponent.
2.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述蒸发枪(3 )的带有上下锥面的喷口( 1)的截面形状可根据基板(16)的形状和蒸发气流流量的分布而做成正方形、或长方形、或圆形,而对应锥面的形状是正方锥形、或长方锥形、或圆锥形,上下锥面的形状是对称的或不对称的。 2. The system can control the evaporation evaporated in vacuo and the flow distribution component according to claim 1, characterized in that the cross-sectional shape of the evaporator gun (3) of the nozzle (1) with a vertical tapered surface of a substrate according to (16 ) shape and distribution of the air flow rate of evaporation is made square, or rectangular, or circular cone shape corresponding to the taper is square, rectangular, or tapered, or conical, shape of the upper and lower tapered surface is symmetrical or asymmetrical.
3.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述喷口(1)内侧可移动的气流导向塞子(2)的形状是球状、或椭球状、或锥状;可移动的气流导向塞子(2)与一移动杆(11)相连,该移动杆(11)伸出蒸发枪(3)的体外,一个波纹管(12)—端与移动杆(11)固定连接,另一端与蒸发枪(3)壳体固定连接,使蒸发枪腔体形成一个密封整体;通过驱动移动杆(11)移动气流导向塞子(2)来调节气流导向塞子(2)与喷口的距离,进而起到调节气流的分布和大小以及达到关闭的功能。 3 may be controlled according to claim 1, the system evaporator is evaporated in vacuo and the flow distribution component, wherein the shape of the spout (1) inside the movable air guide plug (2) is spherical, or ellipsoidal, or tapered; vitro movable flow guide plug (2) and a moving bar (11) is connected to the mobile rod (11) projecting gun evaporator (3), a bellows (12) - end of the moving bar (11 ) is fixed and the other end of the evaporator gun (3) is fixedly connected to the housing, the gun evaporation chamber a seal is formed integrally; (2) to adjust the air flow guide by a drive moving the stopper rod (11) moving air guide plug (2) and nozzle distance, and thus can modulate the distribution and size of the gas flow, and achieve shutdown feature.
4.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述蒸发料(10)是单一材料,或者是多种材料的混合材料,该混合材料是机械混合料,或者是通过把搀杂料溶解在适当的溶剂中再加入到基质中使其含有微量杂质。 4. Control system was evaporated in vacuo and the evaporation flow distribution component according to claim 1, wherein said evaporation material (10) is a single material or a mixed material of a plurality of materials, the mixed material is mechanically mixed material, or by adding the doping material is dissolved in a suitable solvent to the matrix to contain trace impurities.
5.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述蒸发料(10)是粉末状,或者是把蒸发料包封在带小孔的金属容器中形成蒸发小球。 The evaporation may control air distribution system was evaporated in vacuo and the component according to claim 1, wherein said evaporation material (10) is a powder, or the evaporation material encapsulated in a metal container with the aperture forming pellets evaporated.
6.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述高温蒸发坩埚(5)的坩埚底部呈锥状或球状。 6. The system of evaporation may be controlled evaporated in vacuo and the flow distribution component according to claim 1, characterized in that the tapered or spherical bottom of the crucible evaporation temperature of the crucible (5).
7.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述蒸发枪(3)、加热管道(4)和高温蒸发坩埚(5)的材料是不锈钢,钼,钽,钨以及高温陶瓷中任选一种。 7 may be controlled according to claim 1, the system evaporator is evaporated in vacuo and the air distribution components, wherein said gun evaporator (3), heating the material pipe (4) and the high temperature evaporator crucible (5) is stainless steel, molybdenum , tantalum, tungsten, and, optionally, one high-temperature ceramic.
8.根据权利要求1所述的可控制蒸发气流分布和成分的真空蒸发系统,其特征在于所述加热线圈(13 )外面有绝热保护层,在绝热保护层的外面还有一个水冷却套。 May be controlled according to claim 1, the system evaporator is evaporated in vacuo and the flow distribution component, wherein said heating coil (13) outside the heat insulating protective layer, and a water jacket outside the protective insulating layer.
CN2010106110859A 2010-12-29 2010-12-29 Vacuum evaporation system capable of controlling evaporating airflow distribution and components CN102011096B (en)

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CN103160788B (en) * 2011-12-16 2017-06-30 上海大学 Vacuum Evaporation System
WO2015100730A1 (en) * 2014-01-03 2015-07-09 北京航空航天大学 Write-through vacuum evaporation system and a method therefor
CN104596906B (en) * 2015-01-16 2017-08-25 上海大学 Water plurality of oxygen permeability measuring head measuring system
CN105200373A (en) 2015-09-14 2015-12-30 京东方科技集团股份有限公司 Filling device and filling method for evaporation system of organic light emitting diode (OLED)
CN105349948A (en) * 2015-12-04 2016-02-24 贵州大学 Novel thermal evaporation coating device and using method thereof
CN106947941A (en) * 2017-04-13 2017-07-14 合肥鑫晟光电科技有限公司 Evaporation system
CN107587117B (en) * 2017-08-16 2019-06-11 武汉华星光电半导体显示技术有限公司 A kind of gas diffuser

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