CN101916022A - Flexible display panel and manufacturing method thereof - Google Patents
Flexible display panel and manufacturing method thereof Download PDFInfo
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- CN101916022A CN101916022A CN 201010230897 CN201010230897A CN101916022A CN 101916022 A CN101916022 A CN 101916022A CN 201010230897 CN201010230897 CN 201010230897 CN 201010230897 A CN201010230897 A CN 201010230897A CN 101916022 A CN101916022 A CN 101916022A
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Abstract
The invention relates to a flexible display panel and a manufacturing method thereof, and the manufacturing method comprises the following steps: providing a rigid substrate; providing a flexible substrate, wherein the flexible substrate comprises a first surface and a second surface; forming a plurality of release regions on the first surface, wherein the bonding strength outside the release regions is greater than that of the release regions; forming an adhesion layer between the rigid substrate and the first surface of the flexible substrate; forming a plurality of display units on the second surface, wherein each display unit is respectively positioned above one release region; pattering the flexible substrate for obtaining a plurality of flexible carrier plates carrying the display units; and separating the flexible carrier plates from the adhesion layer.
Description
[technical field]
The invention relates to a kind of display panel and manufacture method thereof, and particularly relevant for a kind of flexible display panel and manufacture method thereof.
[background technology]
In the development of display, along with the progress of photoelectric technology and semiconductor fabrication, have that high image quality, space utilization efficient are good, the flat-panel screens (flatdisplay panels) of low consumpting power, advantageous characteristic such as radiationless becomes the main flow in market gradually.
In the middle of display technique now,, become a new generation's display technique of looking forward to the prospect at present because flexible display panel has lightness, resistance to impact, flexibility, wearable property and advantage such as easy to carry.Yet in present flexible display panel processing procedure, the major technique bottleneck is how thin film transistor (TFT) array (Thin-Film-Transistor Array, TFT Array) is made on the flexible base plate.
Figure 1A to Fig. 1 E is the process flow diagram of the manufacture method of existing flexible display panel.Please refer to Figure 1A, Figure 1B and Fig. 1 C, one hard substrate 100 at first is provided, and on this hard substrate 100, form an organic adhesion material 110, afterwards a flexible base plate 120 is placed on organic adhesion material 110, and the mode by irradiate light (as UV-irradiation) solidifies organic adhesion material 110, and then flexible base plate 120 is attached on the hard substrate 100 by organic adhesion material 110.
Then please refer to Fig. 1 D and Fig. 1 E, after the attaching action of finishing flexible substrate 120, then on flexible base plate 120, carry out the making of thin film transistor (TFT) array 130.After the making of finishing thin film transistor (TFT) array 130, then flexible base plate 120 is taken off from hard substrate 100.
In the prior art, use organic adhesion material 110 still to have following several the bottlenecks that on processing procedure, met with still need overcome: first, general thin film transistor (TFT) array (as amorphous silicon film transistor) is when making, its the highest process temperatures is up to about 370 ℃, and the upper limit temperature of heat tolerance of existing organic adhesion material 110 is about 200 ℃～250 ℃ at present, therefore organic adhesion material 110 can't bear the phenomenon that is easy to generate cracking and aerogenesis (Out-gassing) in the manufacture process that has the thin film transistor (TFT) array now, causes flexible base plate 120 that warpages (warping) take place; The second, the anti-chemical solvent aggressivity of organic adhesion material 110 is not good, can't bear the chemical solvent that is used in the manufacture process of existing thin film transistor (TFT) array, causes flexible base plate 120 that warpages take place.
For thermotolerance and the not good problem of endurance of improving organic adhesion material 110; prior art can be mixed an amount of inorganic powder usually in organic adhesion material 110; to promote its thermotolerance and endurance; though the doping of inorganic powder can make the adhesion of organic adhesion material 110 promote; but can cause flexible base plate 120 to be difficult for taking off from hard substrate 100; make flexible base plate 120 from the process that hard substrate 100 takes off, (shown in Fig. 1 E) is destroyed for the thin film transistor (TFT) array 130 on the flexible base plate 120.
Except doping inorganic powder in organic adhesion material 110, what also have that prior art selects the photaesthesia type for use sticks together the glue material, after the thin film transistor (TFT) array completes, mode by irradiation makes sticks together sclerosis of glue material and forfeiture tackness, flexible base plate 120 can be removed easily, but the shortcoming of this technology is few for the material selectivity that the photaesthesia type sticks together the glue material, can not select the glue material arbitrarily.
[summary of the invention]
The invention provides a kind of flexible display panel and manufacture method thereof.
The invention provides a kind of manufacture method of flexible display panel, comprising: a hard substrate is provided; One flexible base plate is provided, and flexible base plate has a first surface and a second surface; Form a plurality of bonding shape areas on first surface, wherein the then intensity in the zone outside the bonding shape area is greater than the then intensity of bonding shape area; Form an adhesion layer between the first surface of hard substrate and flexible base plate; On second surface, form a plurality of display units, and each display unit lays respectively at one of them top, bonding shape area; The patterning flexible base plate is to obtain a plurality of pliability support plates that carry display unit respectively; And make the pliability support plate separate with adhesion layer.
In one embodiment of this invention, aforesaid bonding shape area is separated from one another.
In one embodiment of this invention, the then intensity between zone outside the aforesaid bonding shape area and the adhesion layer is greater than the then intensity between bonding shape area and the adhesion layer.
In one embodiment of this invention, the step of aforesaid formation adhesion layer between hard substrate and flexible base plate comprises: form adhesion layer on hard substrate, and the first surface of flexible base plate is affixed on the adhesion layer.
In one embodiment of this invention, aforesaid each pliability support plate only engages with adhesion layer by single bonding shape area.
In one embodiment of this invention, aforesaid hard substrate comprises a glass substrate.
In one embodiment of this invention, aforesaid adhesion layer comprises an organic adhesion layer.
In one embodiment of this invention, aforesaid flexible base plate comprises a plastic base.
In one embodiment of this invention, aforesaid flexible base plate comprises the choke pliability support plate that blocks water, the gas barrier layer that blocks water that the pliability support plate comprises that a flexible substrate and engages with flexible substrate and choke blocks water.
In one embodiment of this invention, aforesaid flexible base plate comprises the choke of a plurality of storehouses each other pliability support plate that blocks water, the gas barrier layer that blocks water that the pliability support plate comprises that a flexible substrate and engages with flexible substrate and each choke blocks water.
In one embodiment of this invention, the method that forms the bonding shape area comprises utilizes plasma or corona that a plurality of regional areas of first surface are carried out surface treatment, to change the surface energy of regional area.
In one embodiment of this invention, aforesaid bonding shape area is a water repellent region.
In one embodiment of this invention, the method that forms the bonding shape area is included on a plurality of regional areas of first surface and forms a plurality of hydrophobicity plated films.
In one embodiment of this invention, the method that forms the bonding shape area is included on a plurality of regional areas of first surface and forms a plurality of nano-coatings.
In one embodiment of this invention, the method that forms display unit afterwards, forms a display dielectric layer prior to forming a driving component array layer on the second surface on driving component array layer.
In one embodiment of this invention, aforesaid display dielectric layer comprises an electrophoretic display thin film or an electric moistening demonstration film.
In one embodiment of this invention, the method for patterning flexible base plate comprises laser cutting or machine cuts.
The present invention provides a kind of flexible display panel in addition, it comprises a pliability support plate and a display unit, wherein the pliability support plate has two surfaces, and display unit is disposed on the wherein surface of pliability support plate, and another surface of pliability support plate is a hydrophobic surface.
The present invention provides a kind of flexible display panel again, it comprises a pliability support plate, a display unit and a plated film, wherein the pliability support plate has two surfaces, display unit is disposed on the wherein surface of pliability support plate, another surface engagement of plated film and pliability support plate, and plated film comprises a hydrophobicity plated film or a nano-coating.
In one embodiment of this invention, aforesaid display unit comprises that a driving component array layer and is positioned at the display dielectric layer on the driving component array layer.
In one embodiment of this invention, aforesaid pliability support plate comprises one or more choke pliability support plate that blocks water, the gas barrier layer that blocks water that the pliability support plate comprises that a flexible substrate and engages with flexible substrate and choke blocks water.
In one embodiment of this invention, the material of aforesaid hydrophobicity plated film comprises poly-fluorine organic, Si oxide, silicon nitride, metal oxide, metal nitride.
In one embodiment of this invention, the material of aforesaid nano-coating comprises Si oxide, silicon nitride, metal oxide, metal nitride.
In one embodiment of this invention, the contact angle of aforesaid plated film is 30 to 150 degree.
Because the present invention is before adhesion layer and flexible base plate are followed, prior to forming the bonding shape area on the flexible base plate, so flexible display panel is difficult for the problem that has qualification rate to be difficult to promote when separating (de-bonding) with hard substrate.
For above-mentioned feature and advantage of the present invention can be become apparent, embodiment cited below particularly, and cooperate appended graphic being described in detail below.
[description of drawings]
Figure 1A to Fig. 1 E is the process flow diagram of the manufacture method of known flexible display panel.
Fig. 2 is the process flow diagram of manufacture method of the flexible display panel of first embodiment of the invention.
Fig. 3 A to Fig. 3 F is the diagrammatic cross-section of manufacture method of the flexible display panel of first embodiment of the invention.
Fig. 4 be have the bonding shape area flexible base plate on look synoptic diagram.
Fig. 5 A to Fig. 5 C is the diagrammatic cross-section of the flexible base plate of different kenels.
Fig. 6 A to Fig. 6 E is the diagrammatic cross-section of manufacture method of the flexible display panel of second embodiment of the invention.
[primary clustering symbol description]
100: hard substrate
110: organic adhesion material
120: flexible substrate
130: the thin film transistor (TFT) array
200: hard substrate
210: adhesion layer
220: flexible base plate
220 ': the pliability support plate
220a: first surface
220b: second surface
230: display unit
230a: driving component array layer
230b: display dielectric layer
240: hydrophobicity plated film or nano-coating
300,300 ': flexible display panel
P: plasma or corona
R: bonding shape area
R ': the zone outside the bonding shape area
S200～S260: step
[embodiment]
[first embodiment]
Fig. 2 is the process flow diagram of manufacture method of the flexible display panel of first embodiment of the invention.Please refer to Fig. 2, the manufacture method of the flexible display panel of present embodiment comprises: a hard substrate (step S200) is provided; One flexible base plate is provided, and flexible base plate has a first surface and a second surface (step S210); Form a plurality of bonding shape areas on first surface, wherein the then intensity in the zone outside the bonding shape area is greater than the then intensity (step S220) of bonding shape area; Form an adhesion layer (step S230) between the first surface of hard substrate and flexible base plate; On second surface, form a plurality of display units, and each display unit lays respectively at one of them top, bonding shape area (step S240); The patterning flexible base plate is to obtain a plurality of pliability support plates (step S250) that carry display unit respectively; And make the pliability support plate separate (step S260) with adhesion layer.Order that it should be noted that aforesaid step S200, S210, S220 can be done change arbitrarily.For example, can carry out step S200 earlier, carry out step S210 and step S220 again, certainly, also can carry out step S210 and step S220 by advanced row, carry out step S200 again.
Below will arrange in pairs or groups Fig. 3 A to Fig. 3 F, Fig. 4 and Fig. 5 A to Fig. 5 C are described in detail at the manufacture method of flexible display panel.
Fig. 3 A to Fig. 3 F is the diagrammatic cross-section of manufacture method of the flexible display panel of first embodiment of the invention, and Fig. 4 be have the bonding shape area flexible base plate on look synoptic diagram.Please refer to Fig. 2 and Fig. 3 A, a hard substrate 200 (step S200) at first is provided, then on hard substrate 200, form an adhesion layer 210.In the present embodiment, the material of hard substrate 200 for example is the substrate of glass substrate or other suitable material, and adhesion layer 210 for example is an organic adhesion layer, and this organic adhesion layer can be heat curing adhesion material or photocuring adhesion material.For example, adhesion layer 210 for example is that ultraviolet light polymerization adhesion material, infrared light solidify adhesion material etc.
Please refer to Fig. 2, Fig. 3 B and Fig. 4, a flexible base plate 220 is provided, this flexible base plate 220 has a first surface 220a and a second surface 220b (step S210).
For example, bonding shape area R is for example separated from one another.When employed adhesion layer 210 is organic adhesion layer, because adhesion layer 210 is generally the water wettability material, in successive process, can separate with adhesion layer 210 easily for making bonding shape area R, bonding shape area R can be treated to water repellent region usually.Present embodiment can utilize plasma or corona P that a plurality of regional areas of first surface 220a are carried out surface treatment, to change the surface energy of these regional areas, makes these regional areas become hydrophobic bonding shape area R.
Please refer to Fig. 2 and Fig. 3 C, with the first surface 220a of flexible base plate 220 towards hard substrate 200, so that adhesion layer 210 is between the first surface 220a of hard substrate 200 and flexible base plate 220 (step S230).Then, through after the suitable contraposition, make flexible base plate 220 contact, so that flexible base plate 220 is attached on the hard substrate 200 by adhesion layer 210 with adhesion layer 210.In the present embodiment, the region R outside the R of bonding shape area ' and adhesion layer 210 between then intensity greater than the intensity of following between bonding shape area R and the adhesion layer 210.
Please refer to Fig. 2 and Fig. 3 D, go up in the second surface 220b of flexible base plate 220 and form a plurality of display units 230, and each display unit lays respectively at one of them top, bonding shape area (step S240).In the present embodiment, the method for formation display unit 230 goes up formation one driving component array layer 230a prior to the second surface 220b of flexible base plate 220, afterwards, goes up in driving component array layer 230a and forms a display dielectric layer 230b.For example, the display dielectric layer 230a of present embodiment is the display medium of an electrophoretic display thin film, an electric moistening demonstration film or other kenel.
Please refer to Fig. 2 and Fig. 3 E, after having made display unit 230, follow patterning flexible base plate 220 (being illustrated among Fig. 3 D), to obtain a plurality of pliability support plates 220 ' (step S250) that carry display unit respectively.In the present embodiment, the method for patterning flexible base plate 220 comprises laser cutting or machine cuts.Can know from Fig. 3 E and to learn having single bonding shape area R on the wherein surface (basal surface) of pliability support plate 220 ', then be formed with a display unit 230 on another surface (top surface) of pliability support plate 220 '.At this moment, pliability support plate 220 ' only contacts with adhesion layer 210 by single bonding shape area R.
Please refer to Fig. 2 and Fig. 3 F, make pliability support plate 220 ' separate (step S260), tentatively to finish the making of flexible display panel 300 with adhesion layer 210.Because pliability support plate 220 ' only contacts with adhesion layer 210 by single bonding shape area R, and adhesion layer 210 and bonding shape area R then intensity is lower, therefore pliability support plate 220 ' with can separate with adhesion layer 210 easily, and be difficult for having display module 230 ruined phenomenons.
Please refer to Fig. 3 F, the flexible display panel 30 of present embodiment comprises a pliability support plate 220 ' and a display unit 230, wherein the pliability support plate has two surfaces, display unit 230 is disposed on the wherein surface of pliability support plate 220 ', and another surface of pliability support plate 220 ' is a hydrophobic surface (being hydrophobic bonding shape area R).
Fig. 5 A to Fig. 5 C is the diagrammatic cross-section of the flexible base plate of different kenels.Please refer to Fig. 5 A to Fig. 5 C, use at different products, present embodiment can adopt the flexible base plate 220 of multiple different kenels.For example, flexible base plate 220 comprises choke pliability support plate C (shown in Fig. 5 A) or a plurality of choke pliability support plate C (shown in Fig. 5 B and Fig. 5 C) that blocks water that blocks water, the gas barrier layer C2 that blocks water that pliability support plate C comprises that a flexible substrate C1 and engages with flexible substrate C1 and each choke blocks water.When flexible base plate 220 is to block water pliability support plate C when being constituted by a plurality of chokes, choke blocks water and for example sticks together each other by glue material G between the pliability support plate C.
[second embodiment]
Fig. 6 A to Fig. 6 E is the diagrammatic cross-section of manufacture method of the flexible display panel of second embodiment of the invention.Please refer to Fig. 6 A and Fig. 6 E, the manufacture method of the present embodiment and first embodiment is similar, but being in of the two main difference in the method for making difference of the bonding shape area R of present embodiment.In detail, the present embodiment method that forms bonding shape area R is included on a plurality of regional areas of first surface 220a and forms a plurality of hydrophobicity plated films or nano-coating 240.
Please refer to Fig. 6 E, the flexible display panel 300 ' of present embodiment comprises a pliability support plate 220 ', a display unit 230 and a plated film 240, wherein pliability support plate 220 ' has two surfaces, display unit 230 is disposed on the wherein surface of pliability support plate 220 ', another surface engagement of plated film 240 and pliability support plate 220 ', and plated film 240 comprises a hydrophobicity plated film or a nano-coating.In the present embodiment, the contact angle of plated film 240 for example is 30 to 150 degree.
For example, when plated film 240 be that its material comprises poly-fluorine organic, Si oxide, silicon nitride, metal oxide, metal nitride for the hydrophobicity plated film; When plated film 240 was nano-coating, its material comprised Si oxide, silicon nitride, metal oxide, metal nitride.
Because the present invention is before adhesion layer and flexible base plate are followed, prior to forming bonding shape area (surfaction kenel or plated film kenel) on the flexible base plate, so flexible display panel is difficult for the problem that has qualification rate to be difficult to promote when separating with hard substrate.
Though the present invention discloses as above with embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when doing a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (17)
1. the manufacture method of a flexible display panel comprises:
One hard substrate is provided;
One flexible base plate is provided, and this flexible base plate has a first surface and a second surface;
Form a plurality of bonding shape areas on this first surface, the then intensity in the zone outside the wherein said bonding shape area is greater than the then intensity of described bonding shape area;
Form an adhesion layer between this first surface of this hard substrate and this flexible base plate;
On this second surface, form a plurality of display units, and respectively this display unit lays respectively at wherein top, a bonding shape area;
This flexible base plate of patterning is to obtain a plurality of pliability support plates that carry display unit respectively; And
Make described pliability support plate separate with this adhesion layer.
2. the manufacture method of flexible display panel according to claim 1, it is characterized in that, described bonding shape area is separated from one another, and the then intensity between the zone outside the wherein said bonding shape area and this adhesion layer is greater than the then intensity between described bonding shape area and this adhesion layer.
3. the manufacture method of flexible display panel according to claim 1 is characterized in that, forms the step of this adhesion layer between this hard substrate and this flexible base plate and comprises:
On this hard substrate, form this adhesion layer; And
This first surface of this flexible base plate is affixed on this adhesion layer.
4. the manufacture method of flexible display panel according to claim 1 is characterized in that, respectively this pliability support plate only engages with this adhesion layer by single bonding shape area.
5. the manufacture method of flexible display panel according to claim 1 is characterized in that, this hard substrate comprises a glass substrate, and wherein this adhesion layer comprises an organic adhesion layer, and wherein this flexible base plate comprises a plastic base.
6. the manufacture method of flexible display panel according to claim 1 is characterized in that, this flexible base plate comprises at least one choke pliability support plate that blocks water, and the pliability support plate comprises and this choke blocks water:
One flexible substrate; And
One gas barrier layer that blocks water engages with this flexible substrate.
7. the manufacture method of flexible display panel according to claim 1, it is characterized in that, the method that forms described bonding shape area comprises utilizes plasma or corona that a plurality of regional areas of this first surface are carried out surface treatment, to change the surface energy of described regional area.
8. the manufacture method of flexible display panel according to claim 1, it is characterized in that the method that forms described bonding shape area is included in to form on a plurality of regional areas of this first surface on a plurality of regional areas that method that a plurality of hydrophobicity plated films wherein form described bonding shape area is included in this first surface and forms a plurality of nano-coatings.
9. the manufacture method of flexible display panel according to claim 1 is characterized in that, the method that forms described display unit comprises:
On this second surface, form a driving component array layer; And
Form a display dielectric layer on this driving component array layer, wherein this display dielectric layer comprises an electrophoretic display thin film or an electric moistening demonstration film, and wherein the method for this flexible base plate of patterning comprises laser cutting or machine cuts.
10. flexible display panel comprises:
One pliability support plate has two surfaces; And
One display unit is disposed on the wherein surface of this pliability support plate, and another surface of this pliability support plate is a hydrophobic surface.
11. flexible display panel according to claim 10 is characterized in that, this display unit comprises:
One driving component array layer; And
One display dielectric layer is positioned on this driving component array layer.
12. flexible display panel according to claim 10 is characterized in that, this pliability support plate comprises at least one choke pliability support plate that blocks water, and the pliability support plate comprises and this choke blocks water:
One flexible substrate; And
One gas barrier layer that blocks water engages with this flexible substrate.
13. a flexible display panel comprises:
One pliability support plate has two surfaces;
One display unit is disposed on the wherein surface of this pliability support plate; And
One plated film, with another surface engagement of this pliability support plate, wherein this plated film comprises a hydrophobicity plated film or a nano-coating.
14. flexible display panel according to claim 13 is characterized in that, this display unit comprises:
One driving component array layer; And
One display dielectric layer is positioned on this driving component array layer.
15. flexible display panel according to claim 13 is characterized in that, this pliability support plate comprises at least one choke pliability support plate that blocks water, and the pliability support plate comprises and this choke blocks water:
One flexible substrate; And
One gas barrier layer that blocks water engages with this flexible substrate.
16. flexible display panel according to claim 13, it is characterized in that, the material of this hydrophobicity plated film comprises poly-fluorine organic, Si oxide, silicon nitride, metal oxide, metal nitride, and wherein the material of this nano-coating comprises Si oxide, silicon nitride, metal oxide, metal nitride.
17. flexible display panel according to claim 13 is characterized in that, the contact angle of this plated film is 30 to 150 degree.
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