CN101819078B - Laminar flow based multichannel pressure detection chip and production and pressure detection method thereof - Google Patents
Laminar flow based multichannel pressure detection chip and production and pressure detection method thereof Download PDFInfo
- Publication number
- CN101819078B CN101819078B CN2010101627765A CN201010162776A CN101819078B CN 101819078 B CN101819078 B CN 101819078B CN 2010101627765 A CN2010101627765 A CN 2010101627765A CN 201010162776 A CN201010162776 A CN 201010162776A CN 101819078 B CN101819078 B CN 101819078B
- Authority
- CN
- China
- Prior art keywords
- chip body
- measured
- liquid
- pressure
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The invention discloses a laminar flow based multichannel pressure detection chip and a production method and a pressure detection method thereof, applied to precise detection of microflow fluid pressure in the field of microflow control. The chip is provided with a Y-shaped flow path; on a certain condition, a laminar flow phenomenon occurs when liquid to be detected and reference liquid converge through a Y-shaped flow path, so that the liquid to be detected in a laminar flow state can be detected and the pressure of the liquid to be detected can be obtained by using laminar flow character. The invention also provides a method for producing pressure detection chips and a high-precision pressure detection chip which has high sensitivity to the low pressure of the microflow fluid can be produced by the method; in addition, a method for detecting the pressure of the microflow fluid by using the pressure detection chip is also provided by the invention and can obtain the pressure values of the microflow fluid by visualized measurement and simple calculation.
Description
Technical field
The present invention relates to micro-fluidic pressure detection field, particularly a kind of multi-path pressure detection chip and manufacturing and pressure testing method based on laminar flow.
Background technology
Laminar flow is a kind of flow state of fluid, and when rate of flow of fluid was very little, fluid layering flowed, and does not mix mutually, is called laminar flow, or is called laminar flow; When the laminar flow phenomenon appears in fluid; There is certain getting in touch between the width of the pressure of each layer fluid and the shared stream of fluid; In certain pressure limit; There is proportional relation between said pressure and the width, utilizes this relation, can be through the measurement directly perceived of laminar flow fluid width being obtained the pressure of fluid.
Existing fluid pressure test device generally needs the amount of fluid many; Pressure ratio is bigger; Just can reach more accurate measurement, be difficult to realize accurate measurement, even can not measure (pressure of measuring human capillary vessel's inner fluid like need) the miniflow fluid; Especially in recent years the fast development of microflow control technique has increased the demand of miniflow measuring technique especially.
Meanwhile; Because the fluid flow of miniflow fluid measurement is little, pressure is low; Processing and manufacturing technology to the miniflow fluid measurement instrument has also proposed challenge, and existing job operation is difficult to produce high-precision measurement mechanism, also is to cause microfluid to measure one of big major reason of difficulty.
To above-mentioned deficiency; The present invention has explored a kind of hyperchannel hydrodynamic pressure detection chip based on laminar flow; This chip is based on the laminar flow characteristics of fluid; Can accurately measure a plurality of fluid measured of treating simultaneously, simultaneously, also explore the method for making this chip and the method for using this chip the miniflow fluid to be carried out pressure measurement.
Summary of the invention
In view of this; The present invention provides a kind of hyperchannel hydrodynamic pressure detection chip based on laminar flow, can produce high-precision pressure measurement chip through described manufacturing approach, realizes simultaneously a plurality of fluid measured of treating accurately being measured; The manufacturing and the pressure testing method of this chip have also been proposed simultaneously.
One of the object of the invention provides a kind of multi-path pressure detection chip based on laminar flow; Comprise chip body; Said chip body is provided with Y shape stream, liquid to be measured inlet, reference liquid inlet and waste liquid outlet, and said Y shape stream is crossed by liquid branch road to be measured, reference liquid branch road and waste liquid branch road and forms, and liquid branch road to be measured is communicated with liquid inlet to be measured; The reference liquid branch road is communicated with the reference liquid inlet, and the waste liquid branch road is communicated with waste liquid outlet.
Further, be set side by side with on the said chip body at least two Y shape streams and with liquid branch road to be measured liquid to be measured one to one inlet, the reference liquid branch road of adjacent two Y shape streams is interconnected;
Further, said chip body is a rectangular structure, and the upper surface of chip body is provided with Y shape microstructure groove, and being sealed and matched with the chip body upper surface is provided with transparent last cover glass and makes Y shape microstructure groove notch sealing; Said liquid inlet to be measured, reference liquid inlet and waste liquid outlet all are arranged at the lower surface of chip body, and liquid inlet to be measured is communicated with liquid branch road to be measured through the through hole that runs through the upper and lower surface of chip body; Reference liquid inlet is communicated with the reference liquid branch road through the microstructure groove that is arranged at the chip body lower surface, the through hole that runs through chip body upper surface and lower surface, and being sealed and matched with the chip body lower surface is provided with transparent following cover glass microstructure groove notch is sealed; Said waste liquid outlet is communicated with the waste liquid branch road through through hole that runs through chip body upper surface, lower surface and the microstructure groove that is arranged at the chip body upper surface;
Further, comprise also and liquid to be measured inlet, reference liquid inlet and waste liquid outlet external catheter one to one that said external catheter passes down cover glass and respectively with liquid inlet to be measured, reference liquid enters the mouth and waste liquid outlet is communicated with;
Further, be provided with liquid storage tank on said liquid branch road to be measured and the reference liquid branch road.
Two of the object of the invention provides a kind of method of making above-mentioned multi-path pressure detection chip based on laminar flow, may further comprise the steps:
A) make mould: on two silicon chip surfaces, process patrix corresponding and the counterdie corresponding respectively with the chip body lower surface configuration with the chip body upper surface through photoetching technique;
B) preparation raw material:, in clean double dish, stir with PDMS (dimethyl silicone polymer) prepolymer and hardening agent 10: 1 mixed by weight;
C) application of vacuum: the PDMS mixed liquor that mixes is put into vacuum pump vacuumize;
D) molded: with the parallel cavity that in the organic glass mould, forms an opening that is set up in parallel of the upper die and lower die of making among the step a; Distance be 2mm between the adjustment upper die and lower die, slowly pours the PDMS mixed liquor after the step c processing into, puts into heating arrangement after leaving standstill 5～10min; In temperature is that heating was taken out after 60 minutes under 78 ℃ of conditions; And be cooled to normal temperature PDMS is solidified, the PDMS after solidifying is peeled off from upper die and lower die, promptly obtain chip body;
E) punching: make corresponding with chip body upper surface and lower surface respectively last cover glass and following cover glass, on the relevant position of chip body and following cover glass, punch;
F) clean bonding: will go up cover glass with following cover glass use acetone, anhydrous alcohol and washed with de-ionized water and dry up; And to chip body, go up cover glass and following cover glass and carry out plasma treatment after, upper and lower surface and the upper and lower cover slide bonding with chip body promptly obtains the multi-path pressure detection chip respectively.
Further, said step a also can print on two substrates respectively through the method for printed circuit board and make upper die and lower die with chip body upper surface and the corresponding structure of lower surface;
Further, said step a also can carve on the PMMA material substrate with chip body upper surface and lower surface counter structure through photoetching technique and make upper die and lower die.
Three of the object of the invention provides a kind of above-mentioned method of carrying out pressure measurement based on the multi-path pressure detection chip of laminar flow of using, and may further comprise the steps:
A) parametric measurement: above-mentioned multi-path pressure detection chip is placed microscopically; To the constant reference liquid of reference liquid inlet input pressure; To the corresponding adjustable test fluid of liquid inlet input pressure p to be measured of one of them Y shape stream; The adjustable extent of pressure p is 0.5～1.5 times of hydraulic coupling to be measured, and two bursts of flows cross through Y shape stream and laminar flow phenomenon, the pressure p of record test fluid take place
1And the width x of measurement and the shared stream of record test fluid
1, increase or reduce test fluid pressure gradually, the pressure p of record test fluid
2And the width x of measurement and the shared stream of record test fluid
2, repeat aforesaid operations, write down the pressure p of test fluid at last
nAnd x
n, for longitudinal axis x is that transverse axis is set up plane right-angle coordinate, in rectangular coordinate system, draw the graph of a relation between test fluid pressure p and the shared flow path width x of test fluid through above-mentioned record value with p; Get the linear segment of said graph of a relation; Its corresponding ordinate scope Pmin～Pmax is the accurately scope of pressure measurement of this Y shape stream, from figure, can draw c and the value of a among the linear segment relational expression p=cx+a, wherein; C is the slope of linear segment; A is the linear segment extended line value corresponding with the intersection point of the longitudinal axis, repeats said method, records corresponding c and a value of each Y shape stream on the chip body;
B) sample introduction is surveyed wide: to the liquid to be measured of liquid inlet input pressure p ' to be measured the unknown, simultaneously, to the reference liquid constant reference liquid of input pressure that enters the mouth, two bursts of flows are the genetic horizon flow phenomenon at Y shape stream place, measures and write down the width x ' of the shared runner of liquid to be measured;
C) calculate: draw hydraulic coupling to be measured through p '=cx '+a.
The beneficial effect of the invention: one of the object of the invention provides a kind of multi-path pressure detection chip based on laminar flow; Being used for micro-fluidic field accurately measures the miniflow hydrodynamic pressure; Make liquid to be measured and reference liquid form laminar flow through Y shape stream, so that laminar flow is observed and measured; Two of the object of the invention provides a kind of method of making this pressure detection chip, can produce the high pressure measurement chip of degree of accuracy through this method, and the low-pressure of miniflow fluid is had higher sensitivity; Three of the object of the invention provides a kind of method of using this pressure detection chip detection miniflow hydrodynamic pressure, can calculate through measuring intuitively with simple, obtains the pressure of miniflow fluid.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the surface structure synoptic diagram of chip body;
Fig. 3 is the lower surface configuration synoptic diagram of chip body;
Fig. 4 is the I place partial enlarged drawing of Fig. 1;
Fig. 5 is the II place partial enlarged drawing of Fig. 2;
Fig. 6 is the III place partial enlarged drawing of Fig. 2;
Fig. 7 is the graph of a relation of the pressure flow path width shared with it of miniflow fluid.
Embodiment
Fig. 1 is a structural representation of the present invention, and Fig. 2 is the surface structure synoptic diagram of chip body, and Fig. 3 is the lower surface configuration synoptic diagram of chip body; Fig. 4 is the I place partial enlarged drawing of Fig. 1, and Fig. 5 is the II place partial enlarged drawing of Fig. 2, and is as shown in the figure: the multi-path pressure detection chip based on laminar flow of present embodiment; Comprise chip body 1, said chip body 1 is provided with Y shape stream, liquid to be measured inlet 2, reference liquid inlet 3 and waste liquid outlet 4, and said Y shape stream is crossed by liquid branch road to be measured 5, reference liquid branch road 6 and waste liquid branch road 7 and forms; Liquid branch road 5 to be measured is communicated with liquid inlet 2 to be measured, and reference liquid branch road 6 is communicated with reference liquid inlet 3, and waste liquid branch road 7 is communicated with waste liquid outlet 4; During use, to the unknown liquid to be measured of liquid inlet input pressure to be measured, to the constant reference liquid of reference liquid inlet input pressure; Liquid to be measured and reference liquid converge at Y shape stream; And produce the laminar flow phenomenon, through this device and utilize the characteristic of laminar flow, can draw the pressure of liquid to be measured.
In the present embodiment; Be set side by side with on the said chip body 1 six Y shape streams and with liquid branch road to be measured liquid to be measured one to one inlet; The reference liquid branch road of adjacent two Y shape streams is interconnected, and a plurality of liquid to be measured inlets are set, and can realize simultaneously the liquid to be measured of a plurality of passages is carried out pressure measurement; The connection that crosses of the reference liquid branch road of adjacent Y shape stream; Can simplify the structure of the microstructure groove that is communicated with reference liquid branch road and reference liquid inlet to a plurality of Y shape stream input reference liquids through a reference liquid inlet and microstructure groove, reduce processing capacity.
In the present embodiment, said chip body 1 is a rectangular structure, and the upper surface of chip body 1 is provided with Y shape microstructure groove, and being sealed and matched with chip body 1 upper surface is provided with transparent last cover glass 8 and makes Y shape microstructure groove notch sealing; Said liquid to be measured inlet 2, reference liquid inlet 3 and waste liquid outlet 4 all are arranged at the lower surface of chip body 1, and liquid inlet to be measured 2 is communicated with liquid branch road 5 to be measured through the through hole that runs through chip body 1 upper and lower surface; Reference liquid inlet 3 is communicated with reference liquid branch road 6 through the microstructure groove that is arranged at chip body 1 lower surface, the through hole that runs through chip body 1 upper and lower surface, and being sealed and matched with chip body 1 lower surface is provided with transparent following cover glass 9 microstructure groove notch is sealed; Said waste liquid outlet 4 is communicated with waste liquid branch road 7 through through hole that runs through chip body 1 upper and lower surface and the microstructure groove that is arranged at chip body 1 upper surface; The fluid passage is arranged at respectively on the upper and lower surface of chip body with the mode of microstructure groove, is convenient to processing and manufacturing.
In the present embodiment; Said multi-path pressure detection chip based on laminar flow also comprises and liquid to be measured inlet 2, reference liquid inlet 3 and waste liquid outlet 4 external catheter 10 one to one; Said external catheter 10 passes down cover glass 9 and is communicated with liquid inlet to be measured 2, reference liquid inlet 3 and waste liquid outlet 4 respectively; Be used for liquid input to be measured, simultaneously, can confirm the size of external catheter according to the needs of actual sample introduction flow.
In the present embodiment, be provided with liquid storage tank 11 on said liquid branch road 5 to be measured and the reference liquid branch road 6, make flow before crossing, obtain buffering, and keep stream unobstructed.
Present embodiment also provides a kind of method of the multi-path pressure detection chip based on laminar flow, may further comprise the steps:
A) make mould: on two silicon chip surfaces, process patrix corresponding and the counterdie corresponding respectively with the chip body lower surface configuration with the chip body upper surface through photoetching technique; In addition, also can on substrate, print with the corresponding structure in the upper and lower surface of chip body and make upper die and lower die through the method that on the PMMA material substrate, carves or adopt printed circuit board;
B) preparation raw material: with PDMS (dimethyl silicone polymer) prepolymer and hardening agent 10: 1 mixed by weight; In clean double dish, stir; PDMS possesses anticorrosive, anti-oxidant, transparent characteristics; Adopt PDMS as chip material, make the chip damage that is difficult for being corroded, and observation experiment result preferably;
C) application of vacuum: the PDMS mixed liquor that mixes is put into vacuum pump vacuumize,, prevent after its moulding, to produce the bubble destruction stream to get rid of the gas in the mixed liquor;
D) molded: with the parallel cavity that in the organic glass mould, forms an opening that is set up in parallel of the upper die and lower die of making among the step a; Distance is 2mm between the adjustment upper die and lower die, slowly pours the PDMS mixed liquor after step c handles into, leaves standstill after 8 minutes and puts into heating arrangement; In temperature is that heating was taken out after 60 minutes under 78 ℃ of conditions; And be cooled to normal temperature PDMS is solidified, the PDMS after solidifying is peeled off from upper die and lower die, promptly obtain chip body;
E) punching: make corresponding with chip body upper surface and lower surface respectively last cover glass and following cover glass, on the relevant position of chip body and following cover glass, punch, so that conduit is installed.
F) clean bonding: will go up cover glass with following cover glass use acetone, anhydrous alcohol and washed with de-ionized water and dry up; And to chip body, go up cover glass and following cover glass and carry out plasma treatment after; Upper and lower surface and upper and lower cover slide bonding with chip body promptly obtains the multi-path pressure detection chip respectively, adopts the oxygen plasma oxidation processes, can form the Si-O key between chip body and the upper and lower cover slide; Realize irreversible bonding; The intensity of chip is improved, can bear bigger impressed pressure, water wettability improves simultaneously.In addition, also can adopt the mode of ultraviolet ray irradiation activation bonding to realize the object of the invention.Certainly, directly utilize model Dehua power to carry out reversible keying, operate simplyr, can realize the object of the invention equally, but intensity is not high, not high pressure resistant, break away from easily.
Fig. 6 is the III place partial enlarged drawing of Fig. 2; Fig. 7 is the graph of a relation of the pressure flow path width shared with it of miniflow fluid, and is as shown in the figure: present embodiment also provides a kind of above-mentioned method of carrying out pressure measurement based on the multi-path pressure detection chip of laminar flow of using, and may further comprise the steps:
A) parametric measurement: above-mentioned multi-path pressure detection chip is placed microscopically; To the constant reference liquid of reference liquid inlet input pressure; To the corresponding adjustable test fluid of liquid inlet input pressure p to be measured of one of them Y shape stream, the adjustable extent of pressure p is 0.5～1.5 times of testing pressure, as when testing pressure during in the 10cm water column left and right sides; Scope can be made as 5 to 15cm water columns, and in this scope, gets some force value as tested point.Reference solution pressure is made as the 10cm water column.Two bursts of flows cross through Y shape stream and laminar flow phenomenon, the pressure p of record test fluid take place
1And the width x of measurement and the shared stream of record test fluid
1, increase or reduce test fluid pressure gradually, the pressure p of record test fluid
2And the width x of measurement and the shared stream of record test fluid
2, repeat aforesaid operations, write down the pressure p of test fluid at last
n(cm water column) and x
n(μ m), (p x) is: (15,52.5), (14 to obtain the value of one group of pressure and the shared flow path width of test fluid; 51), (13,49), (12,45.5), (11,41), (10; 37.5), (9,33.5), (8,29), (7,25.5), (6; 22), for longitudinal axis x is that transverse axis is set up plane right-angle coordinate, in rectangular coordinate system, draw the graph of a relation between test fluid pressure p and the shared flow path width x of test fluid through above-mentioned record value with p; Get the linear segment of said graph of a relation, its corresponding ordinate scope Pmin～Pmax is the accurately scope of pressure measurement of this Y shape stream, from figure, can draw c value among the linear segment relational expression p=cx+a and be 0.25, a value is 0.625; Wherein, c is the slope of linear segment, and a is the linear segment extended line value corresponding with the intersection point of the longitudinal axis; Repeat said method, record corresponding c and a value of each Y shape stream on the chip body, present embodiment selects one of them to measure;
B) sample introduction is surveyed wide: to the liquid to be measured of liquid inlet input pressure p ' to be measured the unknown; Simultaneously, to the constant reference liquid of reference liquid inlet input pressure, two bursts of flows are the genetic horizon flow phenomenon at Y shape stream place; Measuring and write down the width x ' of the shared runner of liquid to be measured, is 38.5 μ m;
C) calculate: drawing hydraulic coupling to be measured through p '=cx '+a is the 10.25cm water column.
Explanation is at last; Above embodiment is only unrestricted in order to technical scheme of the present invention to be described; Although with reference to preferred embodiment the present invention is specified, those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement technical scheme of the present invention; And not breaking away from the aim and the scope of technical scheme of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (6)
1. multi-path pressure detection chip based on laminar flow; It is characterized in that: comprise chip body (1); Said chip body (1) is provided with Y shape stream, liquid to be measured inlet (2), reference liquid inlet (3) and waste liquid outlet (4), and said Y shape stream is crossed by liquid branch road to be measured (5), reference liquid branch road (6) and waste liquid branch road (7) and forms, liquid branch road to be measured (5) and liquid to be measured enter the mouth (2) be communicated with; Reference liquid branch road (6) is communicated with reference liquid inlet (3); Waste liquid branch road (7) is communicated with waste liquid outlet (4), is provided with liquid storage tank (11) on said liquid branch road to be measured (5) and the reference liquid branch road (6), be set side by side with on the said chip body (1) at least two Y shape streams and with liquid branch road to be measured liquid to be measured one to one inlet; The reference liquid branch road of adjacent two Y shape streams is interconnected; Said chip body (1) is a rectangular structure, and the upper surface of chip body (1) is provided with Y shape microstructure groove, and being sealed and matched with chip body (1) upper surface is provided with transparent last cover glass (8) and makes Y shape microstructure groove notch sealing; Said liquid inlet to be measured (2), reference liquid inlet (3) and waste liquid outlet (4) all are arranged at the lower surface of chip body (1), and liquid inlet to be measured (2) is communicated with liquid branch road to be measured (5) through the through hole that runs through chip body (1) upper surface and lower surface; Reference liquid inlet (3) is communicated with reference liquid branch road (6) through the microstructure groove that is arranged at chip body (1) lower surface, the through hole that runs through the upper and lower surface of chip body (1), and being sealed and matched with chip body (1) lower surface is provided with transparent following cover glass (9) microstructure groove notch is sealed; Said waste liquid outlet (4) is communicated with waste liquid branch road (7) through through hole that runs through chip body (1) upper surface, lower surface and the microstructure groove that is arranged at chip body (1) upper surface.
2. the multi-path pressure detection chip based on laminar flow according to claim 1; It is characterized in that: also comprise and liquid to be measured inlet (2), reference liquid inlet (3) and waste liquid outlet (4) external catheter (10) one to one, said external catheter (10) pass down cover glass (9) and enter the mouth (2) with liquid to be measured respectively, reference liquid enters the mouth (3) and waste liquid outlet (4) is communicated with.
3. make the method for the described multi-path pressure detection chip based on laminar flow of claim 1, it is characterized in that: may further comprise the steps:
A) make mould: on two silicon chip surfaces, process patrix corresponding and the counterdie corresponding respectively with the chip body lower surface configuration with the chip body upper surface through photoetching technique;
B) preparation raw material:, in clean double dish, stir with PDMS (dimethyl silicone polymer) prepolymer and hardening agent 10: 1 mixed by weight;
C) application of vacuum: the PDMS mixed liquor that mixes is put into vacuum pump vacuumize;
D) molded: with the parallel cavity that in the organic glass mould, forms an opening that is set up in parallel of the upper die and lower die of making among the step a; Distance be 2mm between the adjustment upper die and lower die, slowly pours the PDMS mixed liquor after the step c processing into, puts into heating arrangement after leaving standstill 5～10min; In temperature is that heating was taken out after 60 minutes under 78 ℃ of conditions; And be cooled to normal temperature PDMS is solidified, the PDMS after solidifying is peeled off from upper die and lower die, promptly obtain chip body;
E) punching: make corresponding with chip body upper surface and lower surface respectively last cover glass and following cover glass, on the relevant position of chip body and following cover glass, punch;
F) clean bonding: will go up cover glass with following cover glass use acetone, anhydrous alcohol and washed with de-ionized water and dry up; And to chip body, go up cover glass and following cover glass and carry out plasma treatment after, upper and lower surface and the upper and lower cover slide bonding with chip body promptly obtains the multi-path pressure detection chip respectively.
4. the method for manufacturing multi-path pressure detection chip according to claim 3 is characterized in that: said step a also can print on two substrates respectively through the method for printed circuit board and make upper die and lower die with chip body upper surface and the corresponding structure of lower surface.
5. the method for manufacturing multi-path pressure detection chip according to claim 4 is characterized in that: said step a also can carve on the PMMA material substrate with chip body upper surface and lower surface counter structure through photoetching technique and make upper die and lower die.
6. use the described method of carrying out pressure measurement of claim 1, it is characterized in that: may further comprise the steps based on the multi-path pressure detection chip of laminar flow:
A) parametric measurement: above-mentioned multi-path pressure detection chip is placed microscopically; To the constant reference liquid of reference liquid inlet input pressure; To the corresponding adjustable test fluid of liquid inlet input pressure p to be measured of one of them Y shape stream; The adjustable extent of pressure p is 0.5～1.5 times of hydraulic coupling to be measured, and two bursts of flows cross through Y shape stream and laminar flow phenomenon, the pressure p of record test fluid take place
1And the width x of measurement and the shared stream of record test fluid
1, increase or reduce test fluid pressure gradually, the pressure p of record test fluid
2And the width x of measurement and the shared stream of record test fluid
2, repeat aforesaid operations, write down the pressure p of test fluid at last
nAnd x
n, for longitudinal axis x is that transverse axis is set up plane right-angle coordinate, in rectangular coordinate system, draw the graph of a relation between test fluid pressure p and the shared flow path width x of test fluid through above-mentioned record value with p; Get the linear segment of said graph of a relation; Its corresponding ordinate scope Pmin～Pmax is the accurately scope of pressure measurement of this Y shape stream, from figure, can draw c and the value of a among the linear segment relational expression p=cx+a, wherein; C is the slope of linear segment; A is the linear segment extended line value corresponding with the intersection point of the longitudinal axis, repeats said method, records corresponding c and a value of each Y shape stream on the chip body;
B) sample introduction is surveyed wide: to the liquid to be measured of liquid inlet input pressure p ' to be measured the unknown, simultaneously, to the reference liquid constant reference liquid of input pressure that enters the mouth, two bursts of flows are the genetic horizon flow phenomenon at Y shape stream place, measures and write down the width x ' of the shared runner of liquid to be measured;
C) calculate: draw hydraulic coupling to be measured through p '=cx '+a.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101627765A CN101819078B (en) | 2010-04-30 | 2010-04-30 | Laminar flow based multichannel pressure detection chip and production and pressure detection method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101627765A CN101819078B (en) | 2010-04-30 | 2010-04-30 | Laminar flow based multichannel pressure detection chip and production and pressure detection method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101819078A CN101819078A (en) | 2010-09-01 |
| CN101819078B true CN101819078B (en) | 2012-04-18 |
Family
ID=42654256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101627765A Expired - Fee Related CN101819078B (en) | 2010-04-30 | 2010-04-30 | Laminar flow based multichannel pressure detection chip and production and pressure detection method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101819078B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393451B (en) * | 2011-08-01 | 2013-10-23 | 重庆大学 | Cell potassium electrode property detection method based on Nernst electric potential fluorochrome |
| CN102923637A (en) * | 2012-11-06 | 2013-02-13 | 郑州大学 | Method for researching flow condition of fluid inside fluid X-shaped micro-fluidic machine |
| CN104099247B (en) * | 2013-04-12 | 2016-06-01 | 中国科学院理化技术研究所 | Unify method based on the pressurization cell culture system of micro-fluidic chip |
| CN104568288B (en) * | 2014-12-24 | 2018-10-12 | 北京工业大学 | A kind of microchannel quick pressure measuring device based on capillary |
| CN109374194B (en) * | 2018-11-22 | 2020-05-19 | 华中科技大学 | Reference pressure adjustable flexible pressure sensor array and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007014336A1 (en) * | 2005-07-27 | 2007-02-01 | President And Fellows Of Harvard College | Pressure determination in microfluidic systems |
| CN101643701A (en) * | 2009-07-23 | 2010-02-10 | 清华大学 | Cell sorter micro-fluidic chip based on immunomagnetic separation technology and application thereof in aspect of enrichment of rare cells |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1250962C (en) * | 2003-11-27 | 2006-04-12 | 中国科学院长春应用化学研究所 | Preparing method of integrated capillary electrophoresis electrochemical luminescence detecting chip |
| CA2618105A1 (en) * | 2005-08-11 | 2007-03-01 | Daniel M. Hartmann | Microfluidic reduction of diffusion and complience effect in a fluid mixing region |
| CN101486004B (en) * | 2008-12-19 | 2012-06-13 | 中国科学院上海微系统与信息技术研究所 | Automatic device for quantitatively distributing microfluid and using method |
-
2010
- 2010-04-30 CN CN2010101627765A patent/CN101819078B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007014336A1 (en) * | 2005-07-27 | 2007-02-01 | President And Fellows Of Harvard College | Pressure determination in microfluidic systems |
| CN101643701A (en) * | 2009-07-23 | 2010-02-10 | 清华大学 | Cell sorter micro-fluidic chip based on immunomagnetic separation technology and application thereof in aspect of enrichment of rare cells |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101819078A (en) | 2010-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101819078B (en) | Laminar flow based multichannel pressure detection chip and production and pressure detection method thereof | |
| CN105112290B (en) | A kind of preparation method of single-molecule sequencing chip | |
| CN101245311B (en) | Three-dimensional high-flux medicaments sifting chip and manufacture method thereof | |
| CN205127986U (en) | Many indexs of ration reposition of redundant personnel detect micro -fluidic chip | |
| CN105289763A (en) | Multi-index detection micro-fluidic chip capable of quantitatively shunting | |
| CN107305214B (en) | A kind of production method of hard micro-fluid chip | |
| Shi et al. | Wearable tesla valve-based sweat collection device for sweat colorimetric analysis | |
| CN101454664A (en) | Microchannel for separating blood plasma | |
| AU2010277148A1 (en) | Phase behavior analysis using a microfluidic platform | |
| CN205127987U (en) | Micro -fluidic chip for multi -index detection | |
| CN106290076B (en) | A kind of microchannel experimental provision of variable orifice larynx quantity | |
| CN103230753B (en) | Micro-mixing detecting chip | |
| CN106362811B (en) | A kind of micro-fluidic chip measuring pressure change in the deformable channel of wall surface | |
| CN107159329A (en) | A kind of chip and its method for packing for sample detection | |
| CN107824105B (en) | Micro mixer capable of adjusting solution concentration gradient based on moving bubbles | |
| US20210060552A1 (en) | Pressure-driven fluidic logic gate | |
| CN107661784A (en) | After a kind of quantitative shunting be pre-stored in liquid hybrid detection micro-fluidic chip | |
| CN112295622A (en) | Integrated chip for total phosphorus digestion and real-time online detection based on optical flow control technology | |
| KR20110064445A (en) | Microfluidic device for generation of time-dependent concentration | |
| CN108414032B (en) | Portable automatic flow measuring device for open channel | |
| CN101716473B (en) | Chip-in micro-mixer and preparation method thereof | |
| CN108246371B (en) | Microcosmic oil displacement chip provided with scale marking displacement fluid injection amount in diversion flow channel | |
| CN102921481A (en) | Microfluid array device | |
| CN205235991U (en) | A micro -fluidic chip , detecting system for assembling phosphorus detects | |
| Zhou et al. | Universal logic gates via liquid-electronic hybrid divider |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120418 Termination date: 20130430 |