CN101750702B - Five-freedom lens adjusting device - Google Patents

Five-freedom lens adjusting device Download PDF

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Publication number
CN101750702B
CN101750702B CN2009102144088A CN200910214408A CN101750702B CN 101750702 B CN101750702 B CN 101750702B CN 2009102144088 A CN2009102144088 A CN 2009102144088A CN 200910214408 A CN200910214408 A CN 200910214408A CN 101750702 B CN101750702 B CN 101750702B
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CN
China
Prior art keywords
support plate
clamping seats
rotary support
turning axle
screw
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009102144088A
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Chinese (zh)
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CN101750702A (en
Inventor
李斌
吴涛
黄禹
郑振华
李海洲
龚时华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DG-HUST MANUFACTURING ENGINEERING INSTITUTE
Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd.
Dongguan Huake precision silicon electrical equipment Co.,Ltd.
Original Assignee
GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT CO Ltd filed Critical GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT CO Ltd
Priority to CN2009102144088A priority Critical patent/CN101750702B/en
Publication of CN101750702A publication Critical patent/CN101750702A/en
Application granted granted Critical
Publication of CN101750702B publication Critical patent/CN101750702B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention relates to a five-freedom lens adjusting device, which comprises a three-dimensional adjusting mechanism, a lens clamping seat and a rotation device, wherein the rotation device comprises a first rotation device and a second rotation device, the first rotation device comprises a first rotation support plate, a first rotation shaft, a first upper adjusting screw and a first lower adjustment screw, the second rotation device comprises a second rotation support plate, a second rotation adjusting plate, a second rotation shaft, a second upper adjusting screw and a second lower adjusting screw, the plane on which the second rotation support plate is arranged is parallel to the plane on which the second rotation adjusting plate is arranged, the second rotation support plate and the second rotation adjusting plate are arranged at both sides of the lens clamping seat, and the plane on which the second rotation support plate is arranged is perpendicular to the plane on which the first rotation support plate is arranged. The invention can accurately adjust the verticality of the lens and has the characteristics of simple structure, convenient adjustment, economy and practicability.

Description

A kind of five-freedom lens adjusting device
Technical field
The present invention relates to the chip scanning equipment and technology, particularly relate to a kind of five-freedom lens adjusting device.
Background technology
The chip for example letter sorting of led chip is a key link in the chip industry production run, and it provides the data necessary parameter for follow-up technological process.Chip sorting is typically carried out: chip is positioned at supplies with platform Wafer surface, and scanning system is positioned at supplies with platform Wafer top, and the image of the chip that scans through scanning system sorts chip according to scanning result again.Therefore, influence the chip sorting key of success and depend on the accurate location of scanning system chip position.
In the prior art, mostly the adjusting of scanning lens is to adopt three-dimension adjusting mechanism, and the position of scanning lens is regulated.But three-dimension adjusting mechanism can only be adjusted the relative position of scanning lens and chip, can not be to the verticality of adjustment scanning lens to chip.There is deviation in the chip position that often causes scanning system to scan with supply platform Wafer movement position, has a strong impact on the accurate extracting of swing arm transfer system to wafer, thereby causes chip omission or damage.Therefore, the adjustment scanning lens is a key factor for the verticality of chip.
So, not enough to prior art, provide that a kind of can to adjust scanning lens very necessary to the five-freedom lens adjusting device of the verticality of chip.
Summary of the invention
The objective of the invention is to avoid the weak point of prior art and a kind of five-freedom lens adjusting device is provided, can effectively adjust the verticality of scanning lens chip through this device.
The object of the invention is realized through following technical measures:
A kind of five-freedom lens adjusting device; Comprising can be along the three-dimension adjusting mechanism and the camera lens clamping seats of three directions adjustment of X, Y, Z, and said camera lens clamping seats comprises cloudy clamping seats and the positive clamping seats that cooperatively interacts and connect, cloudy clamping seats and the positive clamping seats fixed lens that cooperatively interacts; It is characterized in that: said five-freedom lens adjusting device is provided with whirligig; Said camera lens clamping seats is connected with said whirligig, and said whirligig is connected with said three-dimension adjusting mechanism
Said whirligig comprises first whirligig and second whirligig,
Said first whirligig comprises adjustment screw and first time adjustment screw on the first rotary support plate, first turning axle, first; Said first turning axle is arranged between the positive clamping seats of said first rotary support plate and said camera lens clamping seats; And with the positive clamping seats of said first rotary support plate and said camera lens clamping seats in one of them be fixedly connected and paste mutually with another one; The said first rotary support plate is provided with the through hole and first lower through-hole on first; Through hole and said first lower through-hole are provided with internal thread on said first; On said first on the adjustment screw and said first through hole cooperate, saidly adjust screw first time and cooperate with said first lower through-hole, the said first rotary support plate is fixedly connected with said three-dimension adjusting mechanism;
Said second whirligig comprises on the second rotary support plate, the second rotation adjustment plate, second turning axle and second adjusts screw, second time adjustment screw; The plane parallel at the plane at said second rotary support plate place and the said second rotation adjustment plate place; Said second rotary support plate and the said second rotation adjustment plate are arranged at the both sides of said camera lens clamping seats; The plane at said second rotary support plate place is vertical each other with the plane at said first rotary support plate place; The said second rotary support plate, the said second rotation adjustment plate are fixedly connected with the said first rotary support plate; Said second turning axle is arranged between the positive clamping seats of said second rotary support plate and said camera lens clamping seats; And with the positive clamping seats of said second rotary support plate and said camera lens clamping seats in one of them be fixedly connected and paste mutually with another one, the said second rotation adjustment plate is provided with the through hole and second lower through-hole on second, through hole and said second lower through-hole are provided with internal thread on said second; On said second on the adjustment screw and said second through hole cooperate, saidly adjust screw second time and cooperate with said second lower through-hole.Preferably, above-mentioned first turning axle is fixedly connected with the positive clamping seats of said camera lens clamping seats and said first turning axle pastes with the first rotary support plate mutually, and said first turning axle and said positive clamping seats are one-body molded.
Preferably, above-mentioned first turning axle is fixedly connected with the said first rotary support plate and the positive clamping seats of said first turning axle and said camera lens clamping seats pastes mutually, and said first turning axle and the said first rotary support plate are one-body molded.
Another is preferred, and above-mentioned second turning axle is fixedly connected with the positive clamping seats of said camera lens clamping seats, and said second turning axle pastes with the said second rotary support plate mutually, and said second turning axle and said positive clamping seats are one-body molded.
Another is preferred, and above-mentioned second turning axle and the said second rotation adjustment plate are fixedly connected, and said second turning axle pastes with the positive clamping seats of said camera lens clamping seats mutually, and said second turning axle and said second rotates that to adjust plate one-body molded.
Further, the above-mentioned second rotary support plate is provided with screw, and the said first rotary support plate is provided with screw, and said second rotary support plate and the said first rotary support plate are fixed through screw;
The said second rotation adjustment plate is provided with screw, and the said first rotary support plate is provided with screw, and said second rotation adjustment plate and the said first rotary support plate are fixed through screw.
Further, through hole is set to two on above-mentioned first, and the adjustment screw is set to two on said first, and said first time adjustment screw is set to two.
Further, through hole is set to one on above-mentioned second, and the adjustment screw is set to one on said second, and said second time adjustment screw is set to one.
A kind of five-freedom lens adjusting device of the present invention; Comprising can be along the three-dimension adjusting mechanism and the camera lens clamping seats of X, Y, three direction adjustment of Z; Said camera lens clamping seats comprises cloudy clamping seats and the positive clamping seats that cooperatively interacts and connect; Cloudy clamping seats and the positive clamping seats fixed lens that cooperatively interacts, said five-freedom lens adjusting device is provided with whirligig, and said camera lens clamping seats is connected with said whirligig; Said whirligig is connected with said three-dimension adjusting mechanism; Said whirligig comprises first whirligig and second whirligig, and said first whirligig comprises adjustment screw and first time adjustment screw on the first rotary support plate, first turning axle, first, and said first turning axle is arranged between the positive clamping seats of said first rotary support plate and said camera lens clamping seats; And with the positive clamping seats of said first rotary support plate and said camera lens clamping seats in one of them be fixedly connected and paste mutually with another one; The said first rotary support plate is provided with the through hole and first lower through-hole on first, and through hole and said first lower through-hole are provided with internal thread on said first, on said first on the adjustment screw and said first through hole cooperate; Said first time adjustment screw cooperates with said first lower through-hole, and the said first rotary support plate is fixedly connected with said three-dimension adjusting mechanism; Said second whirligig comprises on the second rotary support plate, the second rotation adjustment plate, second turning axle and second adjusts screw, second time adjustment screw; The plane parallel at the plane at said second rotary support plate place and the said second rotation adjustment plate place; Said second rotary support plate and the said second rotation adjustment plate are arranged at the both sides of said camera lens clamping seats; The plane at said second rotary support plate place is vertical each other with the plane at said first rotary support plate place; The said second rotary support plate, the said second rotation adjustment plate are fixedly connected with the said first rotary support plate; Said second turning axle is arranged between the positive clamping seats of said second rotary support plate and said camera lens clamping seats; And with the positive clamping seats of said second rotary support plate and said camera lens clamping seats in one of them be fixedly connected and paste mutually with another one, the said second rotation adjustment plate is provided with the through hole and second lower through-hole on second, through hole and said second lower through-hole are provided with internal thread on said second; On said second on the adjustment screw and said second through hole cooperate, saidly adjust screw second time and cooperate with said second lower through-hole.A kind of five-freedom lens adjusting device of the present invention has been set up whirligig on the basis of three-dimensional rotation mechanism, can realize the accurate adjusting to the camera lens verticality through first whirligig and second whirligig.This five-freedom lens adjusting device is simple in structure, easy to adjust, economical and practical.
Description of drawings
Utilize accompanying drawing that the present invention is further described, but the content in the accompanying drawing does not constitute any restriction of the present invention.
Fig. 1 is the structural representation of a kind of five-freedom lens adjusting device of the present invention;
Fig. 2 is the explosive view of Fig. 1.
Embodiment
In conjunction with following examples the present invention is described further.
A kind of five-freedom lens adjusting device, like Fig. 1, shown in Figure 2, comprising can be along three-dimension adjusting mechanism 1, camera lens clamping seats 2, the whirligig 3 of X, Y, three direction adjustment of Z.Camera lens clamping seats 2 comprises cloudy clamping seats 21 and positive clamping seats 22, and cloudy clamping seats 21 cooperates and can camera lens 5 be fixed in wherein with positive clamping seats 22.Whirligig 3 is connected with camera lens clamping seats 2, and three-dimension adjusting mechanism 1 is fixedly connected with whirligig 3.Three-dimension adjusting mechanism 1 be provided with X to adjusting knob 11, Y to adjusting knob 12 and Z to adjusting knob 13; But through regulating three-dimension adjusting mechanism 1 driven rotary device 3 along X, Y, three direction adjustment of Z; Camera lens clamping seats 2 is also and then done corresponding adjustment, and then the position of adjustment camera lens 5.Through whirligig 3, can adjust the verticality of camera lens 5.Whirligig 3 comprises first whirligig 31 and second whirligig 32.First whirligig 31 comprises adjustment screw 313 and first time adjustment screw 314 on the first rotary support plate 311, first turning axle 312, first.First turning axle 312 is arranged between the positive clamping seats 22 of the first rotary support plate 311 and camera lens clamping seats 2; First turning axle 312 is fixedly connected with the positive clamping seats 22 of camera lens clamping seats 2; For the ease of manufacturing, reduce equipment cost, first turning axle 312 and positive clamping seats 22 are one-body molded.The first rotary support plate 311 is provided with the through hole 3111 and first lower through-hole 3112 on first; The through hole 3111 and first lower through-hole 3112 are provided with internal thread on first; On first the adjustment screw 313 and first on through hole 3111 cooperate; First time adjustment screw 314 cooperates with first lower through-hole 3112, and the first rotary support plate 311 is fixedly connected with three-dimension adjusting mechanism 1.
Second whirligig 32 comprises on the second rotary support plate 321, second turning axle 322, second adjustment screw 323, second time the adjustment screw 324 and the second rotation adjustment plate 325.The plane parallel at the plane at the second rotary support plate, 321 places and the second rotation adjustment plate, 325 places; The second rotary support plate 321 and the second rotation adjustment plate 325 are arranged at the both sides of camera lens clamping seats 2; The plane at the second rotary support plate, 321 places is vertical each other with the plane at the said first rotary support plate 311 places; The second rotary support plate 321, second rotates adjustment plate 325 and is fixedly connected with the first rotary support plate 311 respectively, and this structural design is convenient to camera lens 5 and is matched with the structure of clamping seats 2.Concrete; The second rotary support plate 321 is provided with screw 3211; The first rotary support plate 311 also is provided with screw 3113, passes the screw 3211 of the second rotary support plate 321 and the screw 3113 of the first rotary support plate 311 makes the second rotary support plate 321 be fixed in the first rotary support plate 311 through screw.The second rotation adjustment plate 325 is provided with screw 3253; The first rotary support plate 311 also is provided with screw 3114, and the screw 3114 that passes screw 3253 and the first rotary support plate 311 of the second rotation adjustment plate 325 through screw makes second rotation adjust plate 325 to be fixed in the first rotary support plate 311.Second turning axle 322 is arranged between the positive clamping seats 22 of the second rotary support plate 321 and camera lens clamping seats 2, and second turning axle 322 is fixedly connected with the second rotary support plate 321, and second turning axle 322 pastes with the positive clamping seats 22 of camera lens clamping seats 2 mutually.Usually, be convenient to produce and reduce equipment cost in order to reduce, second turning axle 322 and the second rotary support plate 321 are one-body molded.The second rotation adjustment plate 325 is provided with the through hole 3251 and second lower through-hole 3252 on second; The through hole 3251 and second lower through-hole 3252 are provided with internal thread on second; On second on the adjustment screw 323 and second through hole 3251 cooperate, adjust screw 324 and cooperate for second time with second lower through-hole 3252.Because the second rotary support plate 321 is less with the second rotation adjustment plate, 325 volumes, therefore with adjustment screw 323 on through hole on second 3251, second lower through-hole 3252, second with adjust screw 324 for second time and respectively be set to one and get final product.
A kind of five-freedom lens adjusting device of the present invention, its principle of work is: between the first rotary support plate 311 of its whirligig 3, the second rotary support plate 321 and the second rotation adjustment plate 325, it is fixing to cooperatively interact, and camera lens clamping seats 2 is fixing.Because the sandwich effect of the second rotary support plate 321 and 325 pairs of camera lens clamping seats 2 of the second rotation adjustment plate; When regulate first whirligig 31 first on adjustment screw 313 when adjusting screw 314 with first time; Adjustment screw 313 and first time adjustment screw 314 can produce acting force to the positive clamping seats 22 of camera lens clamping seats 2 on first; Whole camera lens clamping seats 2 will be that fulcrum is done the rotation around first turning axle 312 with the osculatory of first turning axle 312 and the first rotary support plate 311, thereby realize the adjustment to camera lens clamping seats 2.The sense of rotation of camera lens clamping seats 2 can be through the direction change of screwing of adjustment screw 313 on first and first time adjustment screw 314.
The second rotary support plate 321 is fixedly connected with the first rotary support plate 311 respectively with the second rotation adjustment plate 325; When adjustment screw 323 in the adjustment second and second time adjustment screw 324; Camera lens clamping seats 2 will be that fulcrum is done the rotation around second turning axle 322 with second turning axle 322, thereby realize the adjustment to camera lens 5.The sense of rotation of camera lens clamping seats 2 can be through the direction change of screwing of adjustment screw 323 on second and second time adjustment screw 324.
Can realize accurate adjustment through first whirligig 31 and second whirligig 32 to the verticality of camera lens 5.Have high, the easy to adjust characteristics of adjustment precision.In addition, this whirligig 3 is simple in structure, with low cost.
Need to prove that first turning axle 312 of first whirligig 31 is fixedly connected with positive clamping seats 22 in the present embodiment, and first turning axle 312 pastes mutually with the first runing rest seat 311.Can also first turning axle 312 be fixedly connected with first seat board 311, and first turning axle 312 pastes with positive clamping seats 22 mutually,, also can be set to first turning axle 312 and first seat board 311 one-body molded for the ease of making and installing.
In addition, in the present embodiment, second turning axle 322 is fixedly connected with the second rotary support plate 321, and second turning axle 322 pastes with the positive clamping seats 22 of camera lens clamping seats 2 mutually.Can also second turning axle 322 of second whirligig 32 be fixedly connected with positive clamping seats 22, and second turning axle 322 pastes with the second rotary support plate 321 mutually.To be convenient to produce and reduce equipment cost in order reducing, also can be set to second turning axle 322 and the second rotary support plate 321 one-body molded.Need to prove that the second rotary support plate 321, second rotates the screw connected mode of annexation in present embodiment of the adjustment plate 325 and the first rotary support plate 311, can also fix through other modes.
Should be noted that at last; Above embodiment is only in order to technical scheme of the present invention to be described but not to the restriction of protection domain of the present invention; Although the present invention has been done detailed description with reference to preferred embodiment; Those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement technical scheme of the present invention, and do not break away from the essence and the scope of technical scheme of the present invention.

Claims (8)

1. five-freedom lens adjusting device; Comprising can be along the three-dimension adjusting mechanism and the camera lens clamping seats of three directions adjustment of X, Y, Z, and said camera lens clamping seats comprises cloudy clamping seats and the positive clamping seats that cooperatively interacts and connect, cloudy clamping seats and the positive clamping seats fixed lens that cooperatively interacts; It is characterized in that: said five-freedom lens adjusting device is provided with whirligig; Said camera lens clamping seats is connected with said whirligig, and said whirligig is connected with said three-dimension adjusting mechanism
Said whirligig comprises first whirligig and second whirligig,
Said first whirligig comprises adjustment screw and first time adjustment screw on the first rotary support plate, first turning axle, first; Said first turning axle is arranged between the positive clamping seats of said first rotary support plate and said camera lens clamping seats; And with the positive clamping seats of said first rotary support plate and said camera lens clamping seats in one of them be fixedly connected and paste mutually with another one; The said first rotary support plate is provided with the through hole and first lower through-hole on first; Through hole and said first lower through-hole are provided with internal thread on said first; On said first on the adjustment screw and said first through hole cooperate, saidly adjust screw first time and cooperate with said first lower through-hole, the said first rotary support plate is fixedly connected with said three-dimension adjusting mechanism;
Said second whirligig comprises on the second rotary support plate, the second rotation adjustment plate, second turning axle and second adjusts screw, second time adjustment screw; The plane parallel at the plane at said second rotary support plate place and the said second rotation adjustment plate place; Said second rotary support plate and the said second rotation adjustment plate are arranged at the both sides of said camera lens clamping seats; The plane at said second rotary support plate place is vertical each other with the plane at said first rotary support plate place; The said second rotary support plate, the said second rotation adjustment plate are fixedly connected with the said first rotary support plate; Said second turning axle is arranged between the positive clamping seats of said second rotary support plate and said camera lens clamping seats; And with the positive clamping seats of said second rotary support plate and said camera lens clamping seats in one of them be fixedly connected and paste mutually with another one, the said second rotation adjustment plate is provided with the through hole and second lower through-hole on second, through hole and said second lower through-hole are provided with internal thread on said second; On said second on the adjustment screw and said second through hole cooperate, saidly adjust screw second time and cooperate with said second lower through-hole.
2. a kind of five-freedom lens adjusting device according to claim 1; It is characterized in that: said first turning axle is fixedly connected with the positive clamping seats of said camera lens clamping seats; And said first turning axle pastes with the said first rotary support plate mutually, and said first turning axle and said positive clamping seats are one-body molded.
3. a kind of five-freedom lens adjusting device according to claim 1; It is characterized in that: said first turning axle is fixedly connected with the said first rotary support plate; And said first turning axle pastes with the positive clamping seats of said camera lens clamping seats mutually, and said first turning axle and the said first rotary support plate are one-body molded.
4. a kind of five-freedom lens adjusting device according to claim 1; It is characterized in that: said second turning axle is fixedly connected with the positive clamping seats of said camera lens clamping seats; And second turning axle pastes with the said second rotary support plate mutually, and said second turning axle and said positive clamping seats are one-body molded.
5. a kind of five-freedom lens adjusting device according to claim 1; It is characterized in that: said second turning axle is fixedly connected with the said second rotation adjustment plate; And second turning axle pastes with the positive clamping seats of said camera lens clamping seats mutually, and said second turning axle and the said second rotation adjustment plate are one-body molded.
6. according to claim 1 or 2 or 3 or 4 or 5 described a kind of five-freedom lens adjusting devices; It is characterized in that: the said second rotary support plate is provided with screw; The said first rotary support plate is provided with screw, and said second rotary support plate and the said first rotary support plate are fixed through screw;
The said second rotation adjustment plate is provided with screw, and the said first rotary support plate is provided with screw, and said second rotation adjustment plate and the said first rotary support plate are fixed through screw.
7. a kind of five-freedom lens adjusting device according to claim 6 is characterized in that: through hole is set to two on said first, and the adjustment screw is set to two on said first, and said first time adjustment screw is set to two.
8. a kind of five-freedom lens adjusting device according to claim 7 is characterized in that: through hole is set to one on said second, and the adjustment screw is set to one on said second, and said second time adjustment screw is set to one.
CN2009102144088A 2009-12-30 2009-12-30 Five-freedom lens adjusting device Expired - Fee Related CN101750702B (en)

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102193161B (en) * 2011-05-31 2012-12-05 哈尔滨工业大学 Five-freedom-degree precise position fixing device for adjustment of lens sets
CN102494625B (en) * 2011-11-22 2013-10-02 吴江市博众精工科技有限公司 Laser mechanism rotating module
CN102494624B (en) * 2011-11-22 2013-10-02 吴江市博众精工科技有限公司 Laser adjustment module
CN102645323B (en) * 2012-05-15 2014-09-10 哈尔滨工业大学 Five-freedom positioning device for lens set point source transmittance testing
CN103423556B (en) * 2013-07-31 2015-10-07 吴江市博众精工科技有限公司 A kind of CCD adjustment mechanism
CN106291855B (en) * 2016-09-23 2018-08-31 上海理工大学 The manual adjustment mechanism of five degree of freedom can be achieved
CN109443699A (en) * 2018-11-16 2019-03-08 苏州伊欧陆系统集成有限公司 A kind of edge-emitting laser slide glass test fiber-optical coupled cramping apparatus system
CN112620928B (en) * 2020-12-22 2022-07-22 武汉凌云光电科技有限责任公司 Multi-lens synchronous adjusting device
CN112881288B (en) * 2021-01-13 2023-11-07 苏州凌云光工业智能技术有限公司 MicroLED detection equipment

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CN201589883U (en) * 2009-12-30 2010-09-22 东莞华中科技大学制造工程研究院 Five-degree-of-freedom lens adjusting device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201589883U (en) * 2009-12-30 2010-09-22 东莞华中科技大学制造工程研究院 Five-degree-of-freedom lens adjusting device

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