CN101706346A - Method for compensating for nonlinear temperature drift of measurement of intelligent force sensor - Google Patents

Method for compensating for nonlinear temperature drift of measurement of intelligent force sensor Download PDF

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CN101706346A
CN101706346A CN200910218945A CN200910218945A CN101706346A CN 101706346 A CN101706346 A CN 101706346A CN 200910218945 A CN200910218945 A CN 200910218945A CN 200910218945 A CN200910218945 A CN 200910218945A CN 101706346 A CN101706346 A CN 101706346A
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temperature
load
code value
sensor
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CN101706346B (en
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许晨光
袁玉华
赵中兵
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No44 Institute Of China Academy Of Launch Vehicle Technology
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Abstract

The invention relates to a temperature compensation method, which can ensure that the measurement and output of a resistance strain intelligent force sensor are not influenced by temperature. The method comprises the following steps: dividing the working temperature of the demarcated sensor into eight temperature areas; utilizing a compound loading and demarcating device to adjust the environmental temperature of the demarcated sensor so that the environmental temperature reaches temperature points in each temperature area; adopting a five-segment six-point demarcation method to perform sensor load demarcation on each temperature point; tabulating for recording and storing the acquired eight groups of demarcation data and each temperature internal code value obtained during the demarcation in a data table; the actual measurement of the sensor comprises the steps: firstly acquiring a current environmental temperature value of the sensor and comparing the acquired current environmental temperature value with the data group of the same temperature area in the data table by a CPU to select the demarcated data group; comparing a load signal internal code value of a current temperature point with a demarcated load internal code value of the demarcated data group to select two load internal code values as the demarcated load data group; and performing calculation according to a standardized formula to obtain and output a measured load value.

Description

The temperature compensation of measurement of intelligent force sensor nonlinear temperature drift
Technical field
Content of the present invention belongs to electronics sensing weighing apparatus output variable Error Compensation Technology field, relates to a kind of resistance-strain type measurement of intelligent force sensor that guarantees and exports the not temperature compensation of temperature influence.
Background technology
Sensor technology has been widely used in the various industrial and agricultural productions practice so far, and the data message that a large amount of scientific researches and production run are obtained is all by its collection and be converted to that the electric signal of easy transmission and processing finally obtains.For high-precision sensor such as resistance-strain type intelligent force sensor etc., the influence that temperature error is brought to actual measurement has become the serious hindrance that improves its performance, and is particularly all the more so in the bigger application scenario of variation of ambient temperature.Because the power-electric property and the elastomeric elastic modulus of intelligent force sensor have correlativity closely, and elastomeric elastic modulus is subjected to Temperature Influence bigger, so the output signal of force transducer also changes with variation of temperature.But, based on the needs of measuring, require its output signal of force transducer only be loaded into sensor on power be directly proportional, and should not be subjected to influence of temperature variation, therefore need a kind of temperature compensation, in transducer range, the variation of the measuring-signal that can cause owing to temperature variation is adjusted, make output signal only relevant, thereby guarantee the authenticity and the accuracy of measurement with loaded load.
At present well known in the artly be used for that intelligent force sensor is carried out temperature compensation analog and digital two kinds of approach are arranged.
Common analog compensation method has two kinds of parallel temperature compensation and zero temperature compensation methods.Parallel temperature compensation act can be realized full remuneration theoretically, but in fact can only be approximate compensation, because its characteristic temperature compensation can only accomplish that be full compensation at 2 or 3, and other point is not that " over-compensation " is exactly " under-compensation ".Though the zero temperature compensation method can realize the high precision temperature compensation of sensor zero point output, without any contribution, therefore, its output will be acted upon by temperature changes when force transducer was stressed to the nonlinear temperature of elastomeric resilient modulus.
The digital temperature compensation method at first will be measured the temperature of sensing point, this temperature signal is sent into single-chip microcomputer as a road of multi-channel sampling switch acquired signal, temperature element normally is installed in the place of close sensitive element in the sensor, be used for measuring the environment temperature of sensing point, the output of temperature element is delivered to single-chip microcomputer through amplification and A/D conversion, single-chip microcomputer receives temperature data by serial line interface, and temporary temperature data, after the signal sampling end, single-chip microcomputer running temperature error compensation program, thereby the temperature error of compensation sensor signal.For a plurality of sensors, available a plurality of temperature elements, temperature element commonly used have semiconductor thermistor, AD950 temperature tube, PN junction diode etc.The three-dimensional curve that existing digital formula compensatory approach adopts least square method that temperature, load, signal are exported carries out match, in order to improve compensation precision, usually in computing, need to carry out the high order computing, and for embedded scm, carrying out the high order computing need lean on the sacrifice time to exchange for, complexity is also higher in the programmed algorithm establishment simultaneously, thereby has also brought the risk of reliability.
Summary of the invention
The objective of the invention is to the problem that prior art exists is solved, provide that a kind of design form is reasonable, computing velocity fast, to measure authenticity high and be more suitable for the temperature compensation that measurement of intelligent force sensor nonlinear temperature that the program of embedded scm realizes drifts about with accuracy.
To achieve the above object of the invention and the temperature compensation of the measurement of intelligent force sensor nonlinear temperature drift of design is a kind of on the digitized basis of force transducer, adopt many warm areas demarcation and use compound look-up table to carry out quick nonlinear temperature digital compensation calculating, and then the method for realizable force sensor non-linear temperature compensation, it comprises the steps:
1, the working temperature of the intelligent force sensor that will be demarcated is divided into-20 ℃~-10 ℃ ,-10 ℃~0 ℃, 0 ℃~10 ℃, 10 ℃~20 ℃, 20 ℃~30 ℃, 30 ℃~40 ℃, 40 ℃~50 ℃ and 50 ℃~60 ℃ totally eight warm areas-20 ℃~60 ℃ scopes;
2, utilize the compound loading caliberating device to regulate by the environment temperature of calibration sensor, make it reach a temperature spot in aforementioned eight warm areas respectively, totally eight temperature spots are designated as T respectively 1, T 2, T 3, T 4, T 5, T 6, T 7, T 8
3, after being incubated at least 1 hour on each temperature spot, adopt 5 sections 6 standardizations that each temperature spot is carried out the sensor load calibration, i.e. when temperature spot is Tn (n=1,2,3,4,5,6,7,8), nominal data comprises the load Fn at zero point of the interior code value DTn of the temperature of operating ambient temperature Tn, this temperature spot 0Load in code value DnFn 0, this temperature spot 1/5 load Fn 1Load in code value DnFn 1, this temperature spot 2/5 load Fn 2Load in code value DnFn 2, this temperature spot 3/5 load Fn 3Load in code value DnFn 3, this temperature spot 4/5 load Fn 4Load in code value DnFn 4And the full and down Fn of this temperature spot 5Load in code value DnFn 5, with eight temperature spots demarcate one by one finish after, code value carries out list records in each temperature of eight groups of nominal datas and timing signal with obtaining, and tables of data is deposited in order in the data-carrier store of intelligent force sensor and store;
4, in using, the sensor actual measurement obtains code value DFm in the load signal of the current ambient temperature value Tm of sensor and this temperature spot by CPU, at first the Tm value is compared with Tn, demarcate temperature value Tn as the nominal data group for immediate one that selects greater than Tm, again code value in the demarcation load of code value DFm and this nominal data group in the load signal of this temperature spot is compared, select code value DnFnx and DnFn (x+1) conduct demarcation load data group (x=0 in immediate two load in DFm two ends, 1,2,3,4,5), calculate according to following standardized calculation formula:
F = DFm × F nx - F n ( x - 1 ) D n F n ( x + 1 ) - D n F nx + Fn ( x - 1 )
The final load value F that obtains to measure also exports.
In the foregoing invention step, utilize the compound loading caliberating device to regulate by the environment temperature of calibration sensor eight temperature spot T that it is reached respectively 1, T 2, T 3, T 4, T 5, T 6, T 7And T 8Numerical value be followed successively by-15 ℃ ,-5 ℃, 5 ℃, 15 ℃, 25 ℃, 35 ℃, 45 ℃ and 55 ℃.
It is as described below according to principle that compensation method of the present invention is set up.
The temperature repeatability of resistance-strain type intelligent force sensor is very high.Though the output signal of load device can change (under the constant situation of load) along with the variation of environment temperature, but the synthermal monotonic functional relationship that is changed to of the variable quantity of signal, promptly, under the constant situation of load, the variation of temperature amount is a unique corresponding relation with the variable quantity of sensor load signal output.Therefore can use compound calibration system (can change the device of the environment temperature of the normal loading amount that imposes on force transducer and force transducer) to realize temperature, load, signal output three's multidimensional match function of a single variable relation.Referring to load shown in Figure 1, signal and thetagram
Under different temperature environments (T1, T2, T3, T4), funtcional relationship between load and the output signal has trickle variation, this is because the elastomeric elastic modulus that resistance strain gage adheres to is caused by Temperature Influence, and this variation can't be adopted the method change of physics, can only select specific resilient material to be improved.But, it should be noted that, on each temperature spot, load and signal are output into direct ratio, and has good temperature repdocutbility, therefore can take environment temperature subregion (be about to the total temperature scope and carried out staging treating), the way of in each humidity province load and curve of output signal being carried out line-fitting realizes that full warm area signal non-linear compensates.Concrete approximating method as shown in Figure 2.
Fig. 2 is the load under the fixed environment temperature---signal fitting figure, i.e. the load of strain-type intelligent force sensor/signal curve line-fitting figure.Curve S is actual load---signal relation curve among the figure, adopts the end-point method fitting a straight line can obtain fitting a straight line L, and consequent measuring error can find out in the drawings that maximum error is designated as H1.If adopt the match of line segment difference, then can form matched curve jointly by L1, L2, L3, L4, L5, as can be seen, the fitted figure that adopts this method to obtain is approached actual signal curve S more, and the maximum error of generation also can be come mark by H2.Be not difficult to find out, H1>>H2, therefore, can draw and adopt the line segment difference to carry out the much smaller conclusion of error that measuring error that the monotonous curve fitting method produced produces more than end-point method.And on fitted figure, load F for any point, there is and have only an output signal D corresponding with it, and linear D=KF+C (K, C is constant), otherwise, also can obtain the functional expression (k of F=kD+c, c also is a constant), promptly when measuring a signal D, must there be and have only a load F corresponding with it.Signal fitting and measurement under a fixed environment temperature have been realized thus.
Said method is generalized in the temperature province of each delimitation and carries out load---the apparent end difference match of signal curve, just can obtain one group under the condition of different temperatures load F and the fitted figure between the output signal D, its function expression is:
D 1=K 1F+C 1(K when environment temperature is T1 1, C 1Be constant)
D 2=K 2F+C 2(K when environment temperature is T2 2, C 2Be constant)
……
……
D 8=K 8F+C 8(K when environment temperature is T8 8, C 8Be constant)
Funtcional relationship between the signal that can obtain load thus and measure is
D 1=k 1F+c 1(k when environment temperature is T1 1, c 1Be constant)
D 2=k 2F+c 2(k when environment temperature is T2 2, c 2Be constant)
……
……
D 8=k 8F+c 8(k when environment temperature is T8 8, c 8Be constant)
According to the above-mentioned relation formula, when we measure, at first obtain the measured value of environment temperature, judge thus going out corresponding load value, promptly to obtain above-mentioned standardized calculation formula by the functional relation of choosing under the corresponding environment temperature according to the calculated signals that measures
F = DFm × F nx - F n ( x - 1 ) D n F n ( x + 1 ) - D n F nx + Fn ( x - 1 )
And then realized high-acruracy survey.
In order to verify the accuracy of said temperature compensation method, deviser of the present invention had once carried out demarcation and test experiments to strain-type intelligent force sensors such as sputtered film type and silicon pressure drag types, the test incubator be program control incubator, in the test compensation before and the compensation after test all adopt same circuit module.Test result shows: after adopting the present invention program that the strain-type intelligent force sensor is carried out temperature compensation, the nonlinear technology index of strain-type intelligent force sensor all improves a lot in the different temperatures environment, can guarantee that under all temperature environments the nonlinearity erron of sensor all is controlled on the level consistent with the repeatability index of sensor.
Description of drawings
Fig. 1 is load, signal and the thetagram of strain-type intelligent force sensor.
Fig. 2 is the load/signal curve line-fitting figure of strain-type intelligent force sensor.
Embodiment
Temperature compensation of the present invention the performing step look-up table that is divided into many warm area demarcation, the storage of nominal data form, measurement data calculate three parts.
At first, when carrying out transducer calibration, the operating temperature range (being generally-20 ℃~60 ℃) of sensor is divided into 8 warm areas, promptly-20 ℃~-10 ℃ ,-10 ℃~0 ℃, 0 ℃~10 ℃, 10 ℃~20 ℃, 20 ℃~30 ℃, 30 ℃~40 ℃, 40 ℃~50 ℃, 50 ℃~60 ℃.Use the compound loading caliberating device to regulate by the environment temperature of calibration sensor, make it reach-15 ℃ ,-5 ℃, 5 ℃, 15 ℃, 25 ℃, 35 ℃, 45 ℃, 55 ℃ totally 8 temperature spots respectively, it is designated as T1, T2, T3, T4, T5, T6, T7, T8 respectively, on each temperature spot, be incubated at least 1 hour laggard line sensor load calibration, and code value in the temperature of nominal data and timing signal is carried out record.As, be T in temperature 1The time, adopt 5 sections 6 standardizations to demarcate, nominal data is: operating ambient temperature T 1, code value DT in the temperature 1, T 1Load load at the zero point F at zero point of temperature spot 10And code value D in the load 1F 10, T 11/5 load F of temperature spot 11And code value D in the load 1F 11, T 12/5 load F of temperature spot 12And code value D in the load 1F 12, T 13/5 load F of temperature spot 13And code value D in the load 1F 13, T 14/5 load F of temperature spot 14And code value D in the load 1F 14, T 1The full and down F of temperature spot 15And code value D in the load 1F 15When we 8 temperature spots are demarcated one by one finish after, can obtain 8 groups of nominal datas, one group of each temperature spot.The nominal data record is as follows:
T 1:(T 1,DT 1)、(F 10,D 1F 10)、(F 11,D 1F 11)、(F 12,D 1F 12)、(F 13,D 1F 13)、(F 14,D 1F 14)、(F 15,D 1F 15);
T 2:(T 2,DT 2)、(F 20,D 2F 20)、(F 21,D 2F 21)、(F 2,D 2F 22)、(F 23,D 2F 23)、(F 24,D 2F 24)、(F 25,D 2F 25);
……
……
T 8:(T 8,DT 8)、(F 80,D 8F 80)、(F 81,D 8F 81)、(F 82,D 8F 82)、(F 83,D 8F 83)、(F 84,D 8F 84)、(F 85,D 8F 85);
Then above-mentioned tables of data is deposited in order in the data-carrier store of intelligent force sensor and store.Storage format sees the following form:
Sequence number Title Register address The register number Data type Describe Remarks
??1 Code value in the 1st warm area temperature ??0020 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??2 The 1st warm area code value in zero point ??0021 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??3 The 1st warm area load value at zero point ??0022 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
Sequence number Title Register address The register number Data type Describe Remarks
??4 Code value in the 1st warm area the 1st calibration point ??0023 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??5 The 1st warm area the 1st calibration point load value ??0024 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??6 Code value in the 1st warm area the 2nd calibration point ??0025 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??7 The 1st warm area the 2nd calibration point load value ??0026 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??8 Code value in the 1st warm area the 3rd calibration point ??0027 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??9 The 1st warm area the 3rd calibration point load value ??0028 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??10 Code value in the 1st warm area the 4th calibration point ??0029 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??11 The 1st warm area the 4th calibration point load value ??002A ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??12 Code value in the 1st warm area the 5th calibration point ??002B ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??13 The 1st warm area the 5th calibration point load value ??002C ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??14 The 2nd warm area temperature ??002D ??1 16 of no symbols 2 bytes, most-significant byte hang down 8 preceding
Interior code value Integer The position after
??15 The 2nd warm area code value in zero point 002E ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
Sequence number Title Register address The register number Data type Describe Remarks
16 The 2nd warm area load value at zero point 002F 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
17 Code value in the 2nd warm area the 1st calibration point 0030 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
18 The 2nd warm area the 1st calibration point load value 0031 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
19 Code value in the 2nd warm area the 2nd calibration point 0032 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
20 The 2nd warm area the 2nd calibration point load value 0033 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
21 Code value in the 2nd warm area the 3rd calibration point 0034 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
22 The 2nd warm area the 3rd calibration point load value 0035 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
23 Code value in the 2nd warm area the 4th calibration point 0036 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
24 The 2nd warm area the 4th calibration point load value 0037 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
25 Code value in the 2nd warm area the 5th calibration point 0038 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
26 The 2nd warm area the 5th calibration point load value 0039 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
。。。。。 。。。 1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
Sequence number Title Register address The register number Data type Describe Remarks
??92 Code value in the 8th warm area temperature 007B ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??93 The 8th warm area code value in zero point 007C ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??94 The 8th warm area load value at zero point 007D ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??95 Code value in the 8th warm area the 1st calibration point 007E ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??96 The 8th warm area the 1st calibration point load value 007F ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??97 Code value in the 8th warm area the 2nd calibration point 0080 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??98 The 8th warm area the 2nd calibration point load value 0081 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
??99 Code value in the 8th warm area the 3rd calibration point 0082 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
?100 The 8th warm area the 3rd calibration point load value ??0083 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
?101 Code value in the 8th warm area the 4th calibration point ??0084 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
?102 The 8th warm area the 4th calibration point load value ??0085 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
?103 Code value in the 8th warm area the 5th calibration point ??0086 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
Sequence number Title Register address The register number Data type Describe Remarks
?104 The 8th warm area the 5th calibration point load value ??0087 ??1 16 integers of no symbol 2 bytes, most-significant byte are preceding, low 8 after
Intelligence sensor is in actual measurement is used, and the CPU of sensor will obtain the interior code value of current environment temperature Tm of sensor and load signal DFm, obtain these two data after, CPU is first with the same T of environment temperature Tm 1, T 2, T 3, T 4, T 5, T 6, T 7, T 8Relatively, to determine using which group nominal data to carry out standardized calculation, after having determined the nominal data group of using, code value compares in the demarcation load of code value DFm and this nominal data group in load, to determine using which segment mark given data section to carry out standardized calculation, final load value and the output that obtains measurement.Example is as follows:
If Tm is same T 1, T 2, T 3, T 4, T 5, T 6, T 7, T 8Relatively, T 2<Tm<T 3, use T 3The nominal data group of warm area; And the same T of DFm 3The nominal data group D of warm area 3F 30, D 3F 31, D 3F 32, D 3F 33, D 3F 34, D 3F 35After comparing, D 3F 34<DFm<D 3F 35, the load value F of this intelligence sensor that then measures is:
F=DFm×(F 34-F 33)/(D 3F 35-D 3F 34)+F 33
So far, promptly finished load measurement and realized the non-linear temperature compensation of load.
By the said method statement as seen, in compensation operation, only used simple addition subtraction multiplication and division computing, therefore, for single-chip microcomputer, arithmetic speed is very fast.

Claims (2)

1. the temperature compensation of a measurement of intelligent force sensor nonlinear temperature drift is characterized in that comprising the steps:
1.1 the working temperature of the intelligent force sensor that will be demarcated is divided into-20 ℃~-10 ℃ ,-10 ℃~0 ℃, 0 ℃~10 ℃, 10 ℃~20 ℃, 20 ℃~30 ℃, 30 ℃~40 ℃, 40 ℃~50 ℃ and 50 ℃~60 ℃ totally eight warm areas-20 ℃~60 ℃ scopes;
1.2 utilize the compound loading caliberating device to regulate by the environment temperature of calibration sensor, make it reach a temperature spot in aforementioned eight warm areas respectively, totally eight temperature spots are designated as T respectively 1, T 2, T 3, T 4, T 5, T 6, T 7, T 8
1.3 after being incubated at least 1 hour on each temperature spot, adopt 5 sections 6 standardizations that each temperature spot is carried out the sensor load calibration, i.e. when temperature spot is Tn (n=1,2,3,4,5,6,7,8), nominal data comprises the load Fn at zero point of the interior code value DTn of the temperature of operating ambient temperature Tn, this temperature spot 0Load in code value DnFn 0, this temperature spot 1/5 load Fn 1Load in code value DnFn 1, this temperature spot 2/5 load Fn 2Load in code value DnFn 2, this temperature spot 3/5 load Fn 3Load in code value DnFn 3, this temperature spot 4/5 load Fn 4Load in code value DnFn 4And the full and down Fn of this temperature spot 5Load in code value DnFn 5, with eight temperature spots demarcate one by one finish after, code value carries out list records in each temperature of eight groups of nominal datas and timing signal with obtaining, and tables of data is deposited in order in the data-carrier store of intelligent force sensor and store;
1.4 in the sensor actual measurement is used, obtain code value DFm in the load signal of the current ambient temperature value Tm of sensor and this temperature spot by CPU, at first the Tm value is compared with Tn, demarcate temperature value Tn as the nominal data group for immediate one that selects greater than Tm, again code value in the demarcation load of code value DFm and this nominal data group in the load signal of this temperature spot is compared, select code value DnFnx and DnFn (x+1) conduct demarcation load data group (x=0 in immediate two load in DFm two ends, 1,2,3,4,5), calculate according to following standardized calculation formula:
F = DFm × F nx - F n ( x - 1 ) D n F n ( x + 1 ) - D n F nx + Fn ( x - 1 )
The final load value F that obtains to measure also exports.
2. the temperature compensation of measurement of intelligent force sensor nonlinear temperature drift according to claim 1, it is characterized in that utilizing the compound loading caliberating device to regulate, make its eight temperature spots that reach respectively be followed successively by-15 ℃ ,-5 ℃, 5 ℃, 15 ℃, 25 ℃, 35 ℃, 45 ℃ and 55 ℃ by the environment temperature of calibration sensor.
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