CN101666628A - Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface - Google Patents

Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface Download PDF

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Publication number
CN101666628A
CN101666628A CN200910072943A CN200910072943A CN101666628A CN 101666628 A CN101666628 A CN 101666628A CN 200910072943 A CN200910072943 A CN 200910072943A CN 200910072943 A CN200910072943 A CN 200910072943A CN 101666628 A CN101666628 A CN 101666628A
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CN
China
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axis
interferometer
revolving
ultra
aspheric
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CN200910072943A
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Chinese (zh)
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CN101666628B (en
Inventor
谭久彬
王伟波
刘俭
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哈尔滨工业大学
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Abstract

The invention relates to a measuring apparatus with two spliced shafts for a large-caliber convex aspheric surface, belonging to the optical detection field. The measuring apparatus comprises a vibration-isolation base, an optical wave surface interferometer, a vertical ultra-precise air-floating revolving platform and a horizontal ultra-precise revolving haft, wherein the vertical ultra-precise air-floating revolving platform and the horizontal ultra-precise revolving shaft are both installed on the vibration-isolation base; a Z-shaped cantilever beam is fixed on the horizontal ultra-preciserevolving shaft; a linear guide rail is fixed on the tail end of the Z-shaped cantilever beam; the linear guide rail is provided with the optical wave surface interferometer; a revolving axis of the vertical ultra-precise air-floating revolving platform is orthogonal with that of the horizontal ultra-precise revolving shaft, and an optical axis of the optical wave surface interferometer passes through the orthogonal point; the optical axis of an aspheric surface to be measured is superposed with the revolving axis of the vertical ultra-precise air-floating platform; and three crossing points of an aspheric surface pericenter, a measuring wave front focus of the optical wave surface interferometer and the crossing points of the revolving axis of the horizontal ultra-precise revolving shaftand the revolving axis of the vertical ultra-precise air-floating platform are superposed or have very small three-dimensional concentricity. In the technical scheme, the mechanism is simple, the measurement chain is short, and the high-precision detection of the large-caliber convex aspheric surface can be realized by the precision advantage of the revolving motion.

Description

Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface
Technical field
The invention belongs to the optical detective technology field, relate generally to a kind of measuring apparatus with two spliced shafts for large-caliber convex aspheric surface.
Background technology
Aspherical optical element has the relative aperture that improves system imaging quality, aberration correction, increase system, enlarge advantage such as field angle, can also simplify optical system simultaneously, reduce system's physical dimension, reduce weight, reduce the optical system cost, reduce optical energy loss, therefore in the contemporary optics system, obtain application more and more widely.Particularly in fields such as space camera, astronomical telescope, the detection of ground extraterrestrial target and identification, weapon laser system, inertial confinement fusion, the aspheric surface device has become the key element of decision systems performance.
Non-spherical surface face shape quality high Precision Detection is one of aspheric most critical technology of widespread use, also is the aspheric basis of high-precision processing.Along with the continuous development of optics processing and detection technique, adopt aspheric surface more and more general in the optical system.No matter be astronomical research, still in military affairs and space industry, need to use non-spherical element more and more, and the bore of non-spherical element be also increasing.It is a guardian technique difficult problem that faces at present that yet bore detects greater than Φ 300mm aperture aspherical optical mirror slip.
Aspheric high-precision fixed quantity measuring method mainly contains aberrationless point method, compensator method and calculation holographic method, sub-aperture stitching method.Because the restriction of calculating holographic element size is mainly adopted aberrationless point method, compensator method and sub-aperture stitching method for the detection of aperture aspherical.
The aberrationless method is only applicable to check reflective secondary aspherical, and it is formed around the axis rotation that connects its geometrical focus by quafric curve.Except that check concave ellipsoidal surface mirror, all the other quadric aberrationless detect and all need to utilize auxiliary plane mirror or spherical mirror.Chinese patent publication number CN 101241000, open day on August 13rd, 2008, denomination of invention discloses a kind of aberrationless point method aperture splicing measuring method of high steepness convex secondary aspherical for " the aberrationless point method aperture splicing measuring method of high steepness convex secondary aspherical ", the aberrationless method is combined with the sub-aperture stitching method, expanded aspheric detection bore, but the detected object of this method still is limited to the quadric surface reflecting surface, and this method needs bigbore auxiliary minute surface, especially detect convex aspheric surface, the bore of auxiliary minute surface is several times of minute surface to be measured often.In fact this method still can't realize for the detection of the dark type aspheric surface of heavy caliber, convex aspheric surface.
To not having the right aspheric surface of aberrationless point, often adopt compensator null check method.At present the compensator in the null check method generally all adopts refraction type, and it is very high not only to make accuracy requirement, and relative position also requires very accurately in debuging process, and deviation is arranged slightly, will make a big impact to testing result.The Hubble telescope is exactly because there is error the position of compensating glass when detecting, and causes the quadratic term coefficient of primary mirror wrong so that bring about great losses.When the bore of convex aspheric surface is big, generally need to adopt the method for back of the body inspection, since detect the time at the back surface incident of convex aspheric surface on aspheric surface, therefore, except that needing to make the null lens, it is good especially also to require to make aspheric material homogeneity, and aspheric another surface also will be worked into very high precision, and this has increased expense and manufacture difficulty undoubtedly.Especially to the detection of large-caliber convex aspheric surface, not only testing cost height, cycle are long, just can't detect sometimes at all.Chinese patent publication number CN 1587950, open day on March 2nd, 2005, denomination of invention is " a kind of interferometric method of realizing aspheric surface with the part offset lens ", this scheme discloses a kind of interferometric method that utilizes the part offset lens to realize aspheric surface, do not require that offset lens is necessarily with the big aberration corrugated full remuneration of tested aspheric surface, but it is poor to allow the residue ripple that is not more than 50 wavelength, and traditional small echo difference interferometer measuration system is become big ripple difference interferometer measuration system.This method is simplified the structure of offset lens, design, the difficulty of processing of compensating glass have been reduced, can expand its measurement range to a certain extent to a certain compensating glass simultaneously, can detect the bigger aspheric surface of aspherical degree, but small-bore aspheric surface detects in only limiting to, and the scope of application of compensator is still restricted, different aspheric surfaces needs different compensators, and big mouth mirror aspheric surface needs bigbore compensator, involves great expense, and the problem of the installation and measuring of himself is still unresolved.
In order to realize the detection of optical elements of large caliber, the sub-aperture stitching method begins by the thought of extensive studies sub-aperture stitching interferometer measuring method based on " big with little assembly ", the heavy caliber minute surface is divided into some overlapped sub-apertures, each sub-aperture available standards interferometer is measured, and by suitable algorithm each sub-inside diameter measurement result is stitched together, the face shape error that obtains on unified distributes.The sub-aperture stitching method can effectively increase the vertical survey scope, improves lateral resolution, does not need compensator just can directly measure heavy-calibre planar, sphere and comprises the optical mirror plane face shape error of aspheric surface.
It is a milestone of sub-aperture stitching technology that U.S. QED technology company in 2003 has succeeded in developing the sub-aperture stitching interferometer instrument workstation SSI of QED company." An automated subaperture stitchinginterferometer workstation for spherical and aspherical surfaces; P.E.Murphy; andG.W.Forbes; Proc.SPIE; Vol.5188; 296-307,2003 " and in the United States Patent (USP) " US 6956657B2 "; proposed the aspheric surface error-detecting sub-aperture stitching method of QED; by 6 motion platforms; adjust tested aspheric surface or interferometer, detection is interfered in the antithetical phrase aperture, adopted stitching algorithm to obtain unified splicing result then.This method is only applicable to bore 200mm following plane, sphere and appropriate aspheric surface optical accessory, can't be used for the particularly detection of heavy caliber convex surface of aperture aspherical, and this system needs the high-precision workbench of a 6DOF, freedom of motion is many, motion and bearing accuracy accuracy requirement height, the control difficulty is bigger.
Chinese patent publication number CN101251435A, open day on August 27th, 2008, denomination of invention is " workstation for splicing son aperture of macrotype optical mirror plane ", this scheme discloses a kind of horizontal optical mirror plane sub-aperture stitching workstation based on interferometer five dimension motion adjustment and measured lens bidimensional tilt adjustments, but this scheme motion complexity, freedom of motion is many, chain tape is long, the error source of introducing is more, precision control difficulty is bigger, and at aperture aspherical, the detectability deficiency of large-caliber convex aspheric surface particularly.
Summary of the invention
Problem and shortage at above-mentioned existing aspheric surface pick-up unit existence, the present invention proposes a kind of measuring apparatus with two spliced shafts for large-caliber convex aspheric surface, this device adopts two pillow block structures, utilize the axial gyration of the close air supporting panoramic table control of vertical superfinishing measured piece, utilize of the radial scan campaign of horizontal ultra-precision rotary shaft control interferometer along measured piece, the two cooperation can obtain the sub-aperture data in each zone, adopts the sub-aperture stitching method can realize the unified measurement of measured lens then.
The object of the present invention is achieved like this: a kind of measuring apparatus with two spliced shafts for large-caliber convex aspheric surface, comprise vibro-damping mount, optical wave-front interferometer, close air supporting panoramic table of vertical superfinishing and horizontal ultra-precision rotary shaft are installed on vibro-damping mount, be fixed with Z type semi-girder on the horizontal ultra-precision rotary shaft, Z type semi-girder end is fixed with line slideway, disposes the optical wave-front interferometer on the line slideway; The axis of rotation of the close air supporting panoramic table of vertical superfinishing and the axis of rotation of horizontal ultra-precision rotary shaft be quadrature each other, and the optical axis of the axis of rotation of the close air supporting panoramic table of vertical superfinishing, the axis of rotation of horizontal ultra-precision rotary shaft, optical wave-front interferometer intersects at a point.
Horizontal ultra-precision rotary shaft can adopt air-bearing shafts system or based on the friction main shaft or the accurate ball axle system of antifriction material.The emerging wavefront focus of optical wave-front interferometer and the axis of rotation of horizontal ultra-precision rotary shaft overlap with the intersection point of the axis of rotation of the close air supporting panoramic table of vertical superfinishing.The optical axis of optical wave-front interferometer is parallel with line slideway.
Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface of the present invention is compared with existing aspheric surface pick-up unit, and the present invention has following innovation part:
1, adopts two pillow block structures, utilize the axial gyration of the close air supporting panoramic table control of vertical superfinishing measured piece, utilize the radial scan campaign of horizontal ultra-precision rotary shaft control interferometer along measured piece, the axis of rotation of the close air supporting panoramic table of vertical superfinishing and the axis of rotation of horizontal ultra-precision rotary shaft be quadrature each other.The two cooperation can obtain the sub-aperture data in each zone, adopts the sub-aperture stitching method can realize the unified measurement of measured lens then, and this is one of innovative point that is different from existing apparatus.
2, the optical axis of tested convex aspheric surface overlaps with the axis of rotation of the close air supporting panoramic table of vertical superfinishing.The intersection point of the axis of rotation of the nearly sphere centre of sphere of tested convex aspheric surface, the emerging wavefront focus of optical wave-front interferometer, the close air supporting panoramic table of vertical superfinishing and the axis of rotation of horizontal ultra-precision rotary shaft, 3 coincidences.When the convex aspheric surface position measurement, the optical wave-front interferometer can be focused along line slideway, make the measurement wavefront and the tested non-spherical surface coupling of optical wave-front interferometer, the splicing measuring process is then finished by rotatablely moving fully, have very big precision advantage, this be different from existing apparatus innovative point two.
After adopting above-mentioned technology, measuring apparatus with two spliced shafts for large-caliber convex aspheric surface of the present invention has following characteristics and good result:
1, this apparatus structure is simple, is easy to realize, adopts the sub-aperture stitching method, does not need extra compensator, can realize that the splicing of large-caliber convex aspheric surface detects;
2, freedom of motion is few, and the control difficulty is low.In measuring process, have only rotatablely moving of the gyration of the close air supporting panoramic table of vertical superfinishing, horizontal ultra-precision rotary shaft, two rotatablely move; The rectilinear motion of line slideway is only adjusted as auxiliary, and chain tape is short, and error source is few, and is convenient to the realization of control strategy, can effectively improve precision and efficient that splicing is measured.
3, main mode of motion is for rotatablely moving, and the precision advantage is big, and motion and bearing accuracy height help the raising of accuracy of detection.
Description of drawings
Fig. 1 is the measuring apparatus with two spliced shafts for large-caliber convex aspheric surface structural scheme of mechanism.
Fig. 2 is that synoptic diagram is divided in the sub-aperture of large-caliber convex aspheric surface
Piece number explanation among the figure: 1 vibro-damping mount, 2 horizontal ultra-precision rotary shafts, 3Z type semi-girder, 4 line slideways, 5 optical wave-front interferometers, the close air supporting panoramic table of 6 vertical superfinishings, 7 measured pieces
Embodiment
The present invention is described in more detail below in conjunction with accompanying drawing.
As shown in Figure 1, the measuring apparatus with two spliced shafts for large-caliber convex aspheric surface that the present invention proposes, comprise vibro-damping mount 1, optical wave-front interferometer 5, measured piece 7, close air supporting panoramic table 6 of vertical superfinishing and horizontal ultra-precision rotary shaft 2 are installed on the vibro-damping mount 1, measured piece 7 is fixed on the close air supporting panoramic table 6 of vertical superfinishing, be fixed with Z type semi-girder 3 on the horizontal ultra-precision rotary shaft 2, Z type semi-girder 3 ends are fixed with line slideway 4, dispose optical wave-front interferometer 5 on the straight line air-float guide rail 4.
The axis of rotation of the close air supporting panoramic table 6 of described vertical superfinishing and the axis of rotation of horizontal ultra-precision rotary shaft 2 be quadrature each other, and the optical axis of the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing, the axis of rotation of horizontal ultra-precision rotary shaft 2, optical wave-front interferometer 5 intersects at a point.Horizontal ultra-precision rotary shaft 2 can be air supporting, based on the friction main shaft of antifriction material or accurate ball axle system.
The optical axis of tested convex aspheric surface overlaps with the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing.The nearly sphere centre of sphere of tested convex aspheric surface overlaps with the intersection point of the axis of rotation of the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing and horizontal ultra-precision rotary shaft 2.
Described line slideway 4, Z type semi-girder 3 ends, can be along Z direction moving linearly, it mainly acts on is to adjust optical wave-front interferometer 5, and its emerging wavefront focus is overlapped with the intersection point of the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing with the axis of rotation of horizontal ultra-precision rotary shaft 2.When the convex aspheric surface position measurement, can make the measurement wavefront and the tested non-spherical surface coupling of optical wave-front interferometer 5 with optical wave-front interferometer 5 along the line slideway focusing.The direction of motion of line slideway 4 is parallel with tested convex aspheric surface optical axis.
Described optical wave-front interferometer 5 is when initial position, and its primary optical axis overlaps with the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing.Optical wave-front interferometer 5 can be along the Z-direction moving linearly under line slideway 4 drives, and the axis of rotation of interferometer emerging wavefront focus and horizontal ultra-precision rotary shaft 2 overlaps with the intersection point place of the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing.Wavefront interferometer 5 adopts Feisuo (Fizeau) type wavefront interferometer, can select the type of reference mirror and concrete F number according to concrete measured lens.When changing reference mirror be, need control line slideway 4, adjust optical wave-front interferometer 5, its emerging wavefront focus is overlapped with the intersection point of the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing with the axis of rotation of horizontal ultra-precision rotary shaft 2 again.Optical wave-front interferometer 5 is connected with the computing machine that the interference image acquisition software is installed; This computing machine also is equipped with the sub-aperture stitching process software, can realize that the splicing of sub-aperture data is handled, and rotatablely moving of control system control close air supporting panoramic table 6 of vertical superfinishing and horizontal ultra-precision rotary shaft 2 arranged.
Principle of work of the present invention:
At first, tested aspheric surface is divided into the sub-aperture that some suitable reference mirrors are measured, and as shown in Figure 2, between adjacent sub-aperture certain overlapping region is arranged, and all sub-apertures want to cover whole tested large diameter optical mirror face.
When measuring the large-caliber convex aspheric surface mirror, measured lens is placed on the table top of the close air supporting panoramic table 6 of vertical superfinishing, and tested large-caliber convex aspheric surface central axis overlaps with the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing.
Control horizontal ultra-precision rotary shaft 2 and make optical wave-front interferometer 5 be positioned at initial position, optical wave-front interferometer 5 primary optical axis overlap with the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing.Adjust line slideway 4 interferometer 5 is adjusted to suitable position, the emerging wavefront focus of optical wave-front interferometer 5 and the axis of rotation of horizontal ultra-precision rotary shaft 2 are overlapped with the intersection point of the axis of rotation of the close air supporting panoramic table 6 of vertical superfinishing.Adjust measured piece 7, obtain the interference fringe of initial position clearly, interference image is by the computer acquisition that image pick-up card and interference image collection analysis software are installed and store processing.
According to the sub-aperture stitching algorithm, can carry out sub-aperture to tested large-caliber convex aspheric surface and divide planning, calculate the sub-aperture stitching measuring process respectively, overlapping region size and relative position between adjacent with adjacent endless belt tested sub-aperture, adjacent two the tested sub-apertures of same endless belt change, and promptly determine the single rotation amount of the close air supporting panoramic table 6 of vertical superfinishing and the single rotation amount of horizontal ultra-precision rotary shaft 2 respectively.
When the measurement of finishing initial position, after obtaining the sub-aperture data of center bore, control system by horizontal ultra-precision rotary shaft 2, controlling horizontal ultra-precision rotary shaft 2 rotates to an angle, make optical wave-front interferometer 5 be in the best measurement position of first endless belt, first the sub-aperture number that carries out this endless belt is according to collection.When gathered first sub-aperture number according to after, control vertical superfinishing close air supporting panoramic table 6 turns an angle, and enters next sub-inside diameter measurement of this endless belt, until finishing all sub-inside diameter measurements of this endless belt.After finishing the measurement of first endless belt, control horizontal ultra-precision rotary shaft 2 and rotate to an angle again, make optical wave-front interferometer 5 be in the best measurement position of second endless belt, carry out the sub-aperture data acquisition of this endless belt, by that analogy, until the whole sub-inside diameter measurement of finishing all endless belt.
All sub-aperture data stores processor in computing machine, utilize interference image collection analysis software to extract all sub-aperture data messages, carry out a plurality of sub-aperture stitchings by stitching algorithm and synthesize, be output into unified wavefront, realize the high-acruracy survey of large-caliber convex aspheric surface.

Claims (4)

1, a kind of measuring apparatus with two spliced shafts for large-caliber convex aspheric surface, comprise vibro-damping mount (1), optical wave-front interferometer (5), it is characterized in that: close air supporting panoramic table of vertical superfinishing (6) and horizontal ultra-precision rotary shaft (2) are installed on vibro-damping mount (1), be fixed with Z type semi-girder (3) on the horizontal ultra-precision rotary shaft (2), Z type semi-girder (3) end is fixed with line slideway (4), disposes optical wave-front interferometer (5) on the line slideway (4); The axis of rotation of the axis of rotation of the close air supporting panoramic table of vertical superfinishing (6) and horizontal ultra-precision rotary shaft (2) is quadrature each other, and the optical axis intersection of the axis of rotation of the axis of rotation of the close air supporting panoramic table of vertical superfinishing (6), horizontal ultra-precision rotary shaft (2), optical wave-front interferometer (5) is in a bit.
2, measuring apparatus with two spliced shafts for large-caliber convex aspheric surface according to claim 1 is characterized in that: horizontal ultra-precision rotary shaft (2) can adopt air-bearing shafts system or based on the friction main shaft or the accurate ball axle system of antifriction material.
3, measuring apparatus with two spliced shafts for large-caliber convex aspheric surface according to claim 1 is characterized in that: the axis of rotation of the emerging wavefront focus of optical wave-front interferometer (5) and horizontal ultra-precision rotary shaft (2) overlaps with the intersection point of the axis of rotation of the close air supporting panoramic table of vertical superfinishing (6).
4, measuring apparatus with two spliced shafts for large-caliber convex aspheric surface according to claim 1 is characterized in that: the optical axis of optical wave-front interferometer (5) is parallel with line slideway (4).
CN2009100729434A 2009-09-22 2009-09-22 Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface CN101666628B (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105547344A (en) * 2015-12-08 2016-05-04 武昌船舶重工集团有限公司 Test equipment calibration device and calibration method thereof
CN105589062A (en) * 2015-12-05 2016-05-18 中国航空工业集团公司洛阳电光设备研究所 Dynamic target tracking accuracy test device for photoelectric detection equipment
CN105737760A (en) * 2016-02-25 2016-07-06 上海大学 Horizontal cylindricity error interference splicing measurement device and adjustment method thereof
WO2017107777A1 (en) * 2015-12-23 2017-06-29 中国科学院长春光学精密机械与物理研究所 Method for measuring surface shape error of rotary symmetrical unknown aspheric surface, and measurement device thereof
CN106979857A (en) * 2017-02-28 2017-07-25 上海大学 Vertical spherical interference splicing measuring device and its method of adjustment
CN107957249A (en) * 2016-10-14 2018-04-24 王喆 A kind of method and apparatus for measuring workpiece surface appearance
CN105910552B (en) * 2016-05-16 2018-07-03 中国科学院西安光学精密机械研究所 A kind of optical system is vertical to fill checking device and dress detecting method

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US6956657B2 (en) * 2001-12-18 2005-10-18 Qed Technologies, Inc. Method for self-calibrated sub-aperture stitching for surface figure measurement
CN100462673C (en) * 2007-01-31 2009-02-18 中国人民解放军国防科学技术大学 High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105589062A (en) * 2015-12-05 2016-05-18 中国航空工业集团公司洛阳电光设备研究所 Dynamic target tracking accuracy test device for photoelectric detection equipment
CN105547344A (en) * 2015-12-08 2016-05-04 武昌船舶重工集团有限公司 Test equipment calibration device and calibration method thereof
WO2017107777A1 (en) * 2015-12-23 2017-06-29 中国科学院长春光学精密机械与物理研究所 Method for measuring surface shape error of rotary symmetrical unknown aspheric surface, and measurement device thereof
CN105737760A (en) * 2016-02-25 2016-07-06 上海大学 Horizontal cylindricity error interference splicing measurement device and adjustment method thereof
CN105910552B (en) * 2016-05-16 2018-07-03 中国科学院西安光学精密机械研究所 A kind of optical system is vertical to fill checking device and dress detecting method
CN107957249A (en) * 2016-10-14 2018-04-24 王喆 A kind of method and apparatus for measuring workpiece surface appearance
CN106979857A (en) * 2017-02-28 2017-07-25 上海大学 Vertical spherical interference splicing measuring device and its method of adjustment
CN106979857B (en) * 2017-02-28 2019-10-11 上海大学 Vertical spherical interference splicing measuring device and its method of adjustment

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