CN101585508B - Preparation method of organic glass micro-fluidic chip based on photosensitive thixotrope film - Google Patents
Preparation method of organic glass micro-fluidic chip based on photosensitive thixotrope film Download PDFInfo
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- CN101585508B CN101585508B CN2009100542875A CN200910054287A CN101585508B CN 101585508 B CN101585508 B CN 101585508B CN 2009100542875 A CN2009100542875 A CN 2009100542875A CN 200910054287 A CN200910054287 A CN 200910054287A CN 101585508 B CN101585508 B CN 101585508B
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Abstract
The invention belongs to the technical field of a micro-fluidic chip, in particular, relates to a preparation method of an organic glass micro-fluidic chip based on a photosensitive thixotrope film. Adefinite polymethyl methacrylate particle is dissolved in methyl methacrylate having a light trigger or polymethyl methacrylate particle that is dissolved with the light trigger is prepolymerized for a period of time under an ultraviolet lamp to produce a viscous light-sensitive emulsion liquid. The emulsion liquid is coated on a polymer based membrane, and then a removable protective layer is co ated on one face having emulsion liquid to gain the photosensitive thixotrope film. Before using, the film is cut in pieces with the same size of the pre-processed chip. After the protective layer is removed, one face having emulsion liquid is pressed on a surface of a male mold of the micro-fluidic chip having a projection microstructure with a press roller, and polymerized and formed with ultraviolet radiation to gain a chip substrate of the microstructure. A cover glass of the micro-fluidic chip drilled with a solution connection hole is hot pressed and encapsulated to gain the finished organic glass micro-fluidic chip.
Description
Technical field
The invention belongs to the micro-fluidic chip technical field, be specifically related to a kind of preparation method of the lucite micro-fluidic chip based on photosensitive thixotroping glued membrane.
Background technology
Since nineteen ninety Manz etc. proposes micro-full analytical system first [1], micro-fluidic chip is just efficient with it, fast, few, the low consumption of reagent dosage and integrated level advantages of higher caused domestic and international analysis science circle and life science circle relevant expert's extensive concern, shown good prospects for application in fields such as biological medicine, environmental monitoring, clinical diagnosis, food and medicine analyses, one of bottleneck that restricts its extensive use at present is exactly its higher price and lower output.Micro-fluidic chip has very bright application prospect and great demand, and low-cost process technology is imperative in batches to set up it.In recent years, chip material and the low-cost process technology research of batch as the micro-fluidic chip basis has been subjected to extensive concern.
Micro-fluidic chip mainly uses glass, quartz and polymer to make [2], the method processing that glass and quartzy micro-fluidic chip mainly adopt photoetching to combine with chemical etching, technology and equipment requires high, is difficult to adopt mould to be produced in enormous quantities, the price comparison costliness has limited its extensive use.So polymeric micro-fluidic chip is developed and payes attention in recent years, can use mould to carry out batch low-cost production [3] by technology such as injection moulding, die and casting.The polymer that is used to process micro-fluidic chip has lucite (polymethyl methacrylate), dimethyl silicone polymer, Merlon, polystyrene etc., wherein lucite with its favorable mechanical and optical property, electrical insulating property, easy-formation, good biocompatibility, the batch process cost is low and advantage such as easy chemical modification, uses more in the processing of micro-fluidic chip.Lucite also is a kind of " green " chip material, and after discarding, at high temperature it can be decomposed into methyl methacrylate monomer, reusable edible again.
The process technology of lucite micro-fluidic chip has hot pressing [4], injection moulding [5] and laser ablation [6] etc. at present, wherein hot-pressing technique is the most commonly used, promptly under the condition that is higher than the lucite vitrification point, the structure of anode membrane is copied on the lucite sheet, and the silicon anode membrane of use or metal anode membrane adopt micro electronmechanical process technology to make.Hot pressing is higher to the requirement of mechanical strength of chip mould, and silicon mould is frangible, and the hot pressing number of times is no more than 50 times usually, is not suitable for the batch hot pressing processing of lucite micro-fluidic chip.Recently, adopt heat to cause [7] methyl methacrylate polymerisation in bulk and prepare the existing bibliographical information of lucite chip, be shaped for up to 12 hours, can't be used for the batch machining of chip but the problem that exists is polymerization.In addition, because of volume contraction in the polymerization process, owing to use the rigid die cavity, chip internal is easy to generate bubble, needs the extra monomer solution that adds in the polymerization process, the operation more complicated, so low-cost process technology is significant in batches to set up fast and convenient lucite micro-fluidic chip.
Inventor's imagination is dissolved in methyl methacrylate solution pre-polymerization under ultraviolet ray that maybe will contain light trigger in the methyl methacrylate solution that contains light trigger with lucite, the photosensitive glue of the viscosity that makes is applied to and makes photosensitive thixotroping glued membrane on the polymer-based film, will set up the lucite micro-flow control chip preparation method based on photosensitive thixotroping glued membrane on this basis.This chip manufacture technology has advantage easy and simple to handle, that equipment is simple and cost is low, the photosensitive thixotroping glued membrane that uses can adopt existing coating technique large-scale production, the easy automation of chip forming technology is having good prospects for application aspect the batch low-cost production of lucite micro-fluidic chip.
List of references
[1]Manz?A.，Graber?N.，Widmer?H.M.Sens.Actuators?B?1990，1，244-248.
[2]Verpoorte?E.Electrophoesis?2002，23，677-712.
[3]Becker?H.，Gartner?C.Electrophoresis?2000，2，12-26.
[4] Du Xiaoguang, Guan Yanxia, Wang Furen, Fang Zhaolun. SCI, 2003,24,962-1966.
[5] Zhou Xiaomian, Dai Zhongpeng, Luo Yong, etc. SCI, 2005,26,52-54.
[6]Roberts?M.A.，Rossier?J.S.，Bercier?P.，Girault?H.Anal.Chem.1997，69，2035-2042.
[7]Chen?ZF，Gao?YH，Su?RG，Li?CW，Lin?JM.Electrophoresis?2003，24，3246-3252.
Summary of the invention
The objective of the invention is to propose a kind of preparation method of the lucite micro-fluidic chip based on photosensitive thixotroping glued membrane, cause at ultraviolet light on the basis of methyl methacrylate polymerisation in bulk, invent photosensitive thixotroping glued membrane and be used for the processing of lucite micro-fluidic chip, can shorten the chip manufacturing step and reduce the chip manufacturing cost, for the low-cost processing of the batch of micro-fluidic chip provides new technology.
The preparation method that the present invention proposes based on the lucite micro-fluidic chip of photosensitive thixotroping glued membrane, concrete steps are:
(1) the polymethyl methacrylate particle is dissolved in methyl methacrylate solution pre-polymerization under ultraviolet ray that maybe will be dissolved with light trigger in the methyl methacrylate solution that contains light trigger, makes the photosensitive glue of viscosity;
(2) the photosensitive glue of step (1) gained viscosity is coated on the polymer-based film, has the one side of glue to cover layer protecting film, promptly get photosensitive thixotroping glued membrane;
(3) the photosensitive thixotroping glued membrane of step (2) gained is cut into small pieces with the same size of preprocessing chip before using, tear diaphragm off, to there be the one side of glue to attach to the micro-fluidic chip male mold surfaces of protruding micro-structural by roll-in, be shaped through ultraviolet-initiated polymerization, the chip substrate of microfluxion must be arranged;
(4) step (3) gained chip substrate and the micro-fluidic chip cover plate that is drilled with solution connection holes are passed through packaging by hot pressing, promptly get the lucite micro-fluidic chip.
Among the present invention, light trigger described in the step (1) is styrax and ethers or benzophenone compound, as styrax, benzoin methyl ether, styrax diethyl ether or benzophenone etc.
Among the present invention, in the step (1) the polymethyl methacrylate particle is dissolved in the methyl methacrylate solution that contains light trigger, wherein, the quality percentage composition of polymethyl methacrylate and light trigger is respectively 15-30% and 0.1%-0.2%.
Among the present invention, the methyl methacrylate that is dissolved with light trigger in the step (1) refers to that in pre-polymerization under the ultraviolet ray at room temperature condition be irradiation 30-120 minute under the ultraviolet ray of 365nm in wavelength, wherein, the addition of light trigger is the 0.1%-0.2% of methyl methacrylate quality.
Among the present invention, have the one side of glue to attach to the micro-fluidic chip male mold surfaces of protruding micro-structural in the step (3), through ultraviolet-initiated polymerization, adopting wavelength is the complete polymerization that the ultraviolet ray irradiation of 365nm caused photosensitive thixotroping glue-line in 10 minutes-30 minutes.
The lucite micro-flow control chip preparation method based on photosensitive thixotroping glued membrane that the present invention proposes is described in further detail as follows:
Adopt computer aided design software design chips structure, typical design as shown in Figure 1, constitute by single right-angled intersection microchannel and solution connection holes, adopt high-resolution (as 3600dpi) laser photocomposing system on transparent membrane, to be printed as mask, the microchannel part is a black lines, width is the 20-100 micron, and other parts are transparent.In silicon chip (p type through oxidation processes, thick 500 μ m, 4 inches of diameters, crystal orientation＜100 〉, surface silica dioxide oxidation bed thickness 800nm) and apply one deck positive photoresist (ShipleyS1813 photoresist by the spin-coating technology, Shipley, Marlborough, MA, the U.S.), the spin coating condition is 2000-4000rpm, and the time is 40-80 second.Handle 40-80 second to improve adhering to and removing out residual solvent (drying by the fire exposure before) of photoresist 100-120 ℃ of baking then, cover mask (microfluxion that contains design) then, use KarlSussMA6/BA6 litho machine (KarlSuss, Germany) carry out contact ultraviolet exposure 30-50 after second, immerse 20%Microposit351 developer (Shipley) 60-100 second, photoresist layer with flush away exposure part, baking made capillary channel and the unexposed photoresist sclerosis of solution connection holes part in 20-40 minute in 140-160 ℃ of baking oven then, the SiO that is not covered by photoresist through 0.5-2mol/L ammonium acid fluoride flush away
2Behind the layer, silicon chip to the degree of depth of exposing with 50-70 ℃ 35%-55%KOH aqueous solution etching is the 30-50 micron, promptly can be made into silicon chip formpiston 14 after removing photoresist at last.
Dissolving a little light initator (styrax and ethers thereof and benzophenone compound in the methyl methacrylate monomer of certain mass, the 0.1-0.2% of monomer mass), add the polymethyl methacrylate particle then, fully get the photosensitive glue 9 of glycerine shape viscosity after the dissolving, wherein the content of polymethyl methacrylate particle is 15-30%.The photosensitive glue 9 of viscosity also can be that irradiation obtained in 30-120 minute under the ultraviolet ray of 365nm by the methyl methacrylate solution that will be dissolved with light trigger benzoin ethyl ether (0.1-0.3% of monomer mass) in wavelength at room temperature condition.The photosensitive glue 9 of viscosity needs to store under the low-temperature dark condition, can preserve at least 6 months in 4 ℃ refrigerator.The photosensitive glue 9 of viscosity can be coated onto on the polymer-based film 8 that thickness is 25-100 μ m by technology such as silk screen process coating and scraping blade coatings, as shown in Figure 2, photosensitive thixotrope liquid layer thickness is 100-300 μ m, be further polyase 13 0-60 second under the ultraviolet ray of 365nm in wavelength then, with the cohesive force that improves photosensitive thixotroping glue-line 9 and with the adhesion of basement membrane 8.Be the polymer of 25-100 μ m or papery diaphragm 13 then with thickness by roll-in cover on the photosensitive glue-line 9 photosensitive thixotroping glued membrane 12.The schematic three dimensional views of photosensitive thixotroping glued membrane 12 is seen accompanying drawing 3.
As shown in Figure 4; photosensitive thixotroping glued membrane 12 is cut into small pieces with the same size of micro-fluidic chip of preprocessing; after tearing diaphragm 13 off; to there be the one side of glue to attach to the surface of the micro-fluidic chip formpiston 14 of protruding micro-structural by roll-in; be the complete polymerization that ultraviolet ray 10 irradiation of 365nm caused photosensitive thixotroping glue-line in 10-30 minute through wavelength then, the micro-structural that formpiston 14 protrudes can high-fidelity is replicated to the microchannel that micro-fluidic chip substrate 15 surfaces fall in.Micro-fluidic chip substrate 15 is very firm with the mould bonding, after tearing basement membrane off, can heat 10-20 second in the water-bath prior to 75-85 ℃, place 20-25 ℃ cold water 1-2 minute then, substrate 15 separates automatically with mould 14 finishes the demoulding, and the chip substrate 15 of microfluxion can be arranged.Before the encapsulation, substrate 15 and micro-fluidic chip cover plate 17 waters that are drilled with solution connection holes and isopropyl alcohol flushing, after drying up, closed face-to-face in the surface of substrate 15 and cover plate 17 immediately compressed air, with the hydraulic press pressure head substrate 15 and cover plate 17 are clipped between two sheet glass sheets, under 100-120 ℃ temperature, apply about 2-5kg/cm by chip area
2Pressure 8-12min, take out cool to room temperature, promptly finish the encapsulation of substrate 15 and cover plate 17, the thick sheet that makes gets lucite micro-fluidic chip finished product through deburring, photo in kind is seen Fig. 5.The electron scanning micrograph in microchannel cross section is seen accompanying drawing 6 in the lucite micro-fluidic chip of use the present invention processing.
The lucite micro-flow control chip preparation method that the present invention proposes based on photosensitive thixotroping glued membrane, the methyl methacrylate polymerisation in bulk is prepared preparation and the ultraviolet light that lucite micro-fluidic chip process is divided into photosensitive thixotroping glued membrane 12 cause photosensitive 12 two steps of polymerization process lucite micro-fluidic chip of thixotroping glued membrane, simplified operation greatly, easy automation of processing technology and mass, and with low cost, can be used for the low-cost processing of batch of lucite micro-fluidic chip.
Description of drawings
Fig. 1 is the commonly used single right-angled intersection micro-fluidic chip design drawing that the present invention relates to.
Fig. 2 is photosensitive thixotroping glued membrane processing schematic diagram among the present invention.(A) at the photosensitive glue 9 of basement membrane 8 surface coating viscosity; (B) the photosensitive glue 9 further initiated polymerizations of UV-irradiation viscosity are to increase glue-line autohemagglutination power and adhesive force; (C) cover diaphragm 13.
Fig. 3 is photosensitive thixotrope membrane structure schematic three dimensional views among the present invention.
Fig. 4 among the present invention based on the lucite micro-fluidic chip flow process chart of photosensitive thixotroping glued membrane.(A) tear 12 diaphragms 13 of photosensitive thixotroping glued membrane off, the roll-in of glue one side is arranged on silicon formpiston 14; (B) ultraviolet ray 10 causes the photosensitive glue 9 complete polymerizations of viscosity; (C) tear the basement membrane 8 and the demoulding off and get lucite micro-fluidic chip substrate 15; (D) substrate 15 gets finished product lucite micro-fluidic chip (end view) with lucite cover plate 17 bondings.
Fig. 5 is the lucite micro-fluidic chip that uses the inventive method preparation photo (in the present embodiment, having increased grid and chip identification literal in single right-angled intersection micro-fluidic chip chip) in kind.
Fig. 6 is the electron scanning micrograph in microchannel cross section in the lucite micro-fluidic chip that uses the present invention's processing.Multiplication factor is 200.
Number in the figure: 1 is the sample solution hole; 2 for separating microchannel; 3 is micro-fluidic chip; 4,5 and 6 be the cushioning liquid hole; 7 is the sample introduction microchannel; 8 is polymer-based film, and 9 is photosensitive thixotrope liquid layer, and 10 is ultraviolet light; 11 is the photosensitive thixotroping glued membrane of unprotect film; 12 is the photosensitive thixotroping glued membrane of finished product, and 13 is diaphragm, and 14 is the silicon formpiston; 15 is lucite micro-fluidic chip substrate; 16 is the outlet of microchannel in the micro-fluidic chip, and 17 is cover plate, and 18 is the cross sectional representation of lucite micro-fluidic chip micro-fluidic chip.
The specific embodiment
Further describe the present invention below by embodiment and accompanying drawing:
(A) design of micro-fluidic chip
Use the microchannel and the solution connection holes of Adobe Illustrator 10.0 software design chips, adopt high-resolution (3600dpi) laser photocomposing system to have at the polyester transparent film on the one side of medicine film and be printed as mask, microchannel width on the mask is 40 μ m, solution connection holes is the circular hole of diameter 2mm, wherein microchannel (separation capillary 2 and sample introduction capillary 7) and solution hole 1,4,5 and 6 (Fig. 1) are black, and remainder is transparent.Micro-fluidic chip (Fig. 1 is seen in the design of 75mm * 16mm), separates microchannel 2 long 66mm, sample introduction microchannel 5 long 5mm, and wherein capillary 4 and 5 crosspoints are 5mm to the distance of three nearest solution connection holes.
(B) making of silicon formpiston
In silicon chip (p type through oxidation processes, thick 500 μ m, 4 inches of diameters, crystal orientation＜100 〉, surface silica dioxide oxidation bed thickness 800nm) and apply one deck positive photoresist (Shipley S1813 photoresist by the spin-coating technology, Shipley, Marlborough, MA, the U.S.), the spin coating condition is 3000rpm, and the time is 60 seconds.Handle 60 seconds to improve adhering to and removing out residual solvent of photoresist 110 ℃ of bakings then, cover mask (microfluxion that contains design) then, use Karl Suss MA6/BA6 litho machine (Karl Suss, Germany) carry out the contact ultraviolet exposure after 40 seconds, immersed 20%Microposit 351 developers (Shipley) 80 seconds, photoresist layer with flush away exposure part, baking made capillary channel and the unexposed photoresist sclerosis of solution connection holes part in 30 minutes in 150 ℃ of baking ovens then, silicon chip is dipped in the 1mol/L ammonium hydrogen fluoride solution removed the SiO that is not covered by photoresist in 5 minutes
2Layer.Then silicon chip to the degree of depth of exposing with 60 ℃ 40%KOH aqueous solution etching is 40 microns (about 2 hours), promptly makes silicon chip formpiston 14 after removing photoresist.
(C) preparation of photosensitive thixotroping glued membrane
In the methyl methacrylate solution that is dissolved with a little light initator benzoin ethyl ether (monomer mass 0.15%), the lucite particle of dissolving methyl methacrylate quality 1/4, get the photosensitive glue 9 of glycerine shape viscosity, this solution needs to store under the low-temperature dark condition, can preserve at least 6 months in 4 ℃ refrigerator.The photosensitive glue 9 of viscosity is applied on the terylene basement membrane 8 that thickness is 50 μ m by the silk screen process coating technique, and as shown in Figure 2, glue-line 9 thickness are 200 μ m, and the order number of the silk screen of use is 100 orders.Be further polymerization 40 seconds under the ultraviolet ray of 365nm in wavelength then, with the cohesive force that improves photosensitive thixotroping glue-line 9 and with the adhesion of basement membrane 8.The uviol lamp that uses is the 40W low pressure mercury lamp, lamp and intermembranous be established as 15 centimetres.Then, with thickness be 50 μ m polyethylene protective film 13 by roll-in cover on the photosensitive glue-line 9 photosensitive thixotroping glued membrane 12.
(D) application of photosensitive thixotroping glued membrane in the processing of lucite micro-fluidic chip
As shown in Figure 4; photosensitive thixotroping glued membrane 12 is cut into and the same size of the micro-fluidic chip of the preprocessing (small pieces of 75mm * 16mm); after tearing diaphragm 13 off; to have the one side of glue to attach to the surface of the micro-fluidic chip formpiston 14 of protruding micro-structural by roll-in, be the complete polymerization that ultraviolet ray 10 irradiations of 365nm caused photosensitive thixotroping glue-line 9 in 20 minutes through wavelength then.The micro-structural that formpiston 14 protrudes can high-fidelity be replicated to the microchannel that micro-fluidic chip substrate 15 surfaces fall in.Micro-fluidic chip substrate 15 is very firm with the mould bonding, after tearing basement membrane off, will in 80 ℃ water-bath, heat 15 seconds earlier, place 20 ℃ cold water 1 minute then, finish the demoulding owing to the substrate that expands with heat and contract with cold separates automatically with mould, the chip substrate 15 of microfluxion can be arranged.Then, substrate 15 and the micro-fluidic chip cover plate 17 waters flushing that is drilled with solution connection holes, closed face-to-face in the surface of substrate 15 and cover plate 17 immediately after drying up, substrate 15 and cover plate 17 are clipped between two sheet glass sheets, under 110 ℃ temperature, apply about 3kg/cm by chip area with the hydraulic press pressure head
2Pressure 10min, take out cool to room temperature, promptly finish the encapsulation of substrate 15 and cover plate 17, the thick sheet that makes gets lucite micro-fluidic chip finished product (seeing accompanying drawing 5) through deburring.Adopt the lucite micro-fluidic structure of the present invention's processing complete, surperficial flawless, inner no bubble.Wherein the microchannel cross section of chip internal is by the visible microchannel structural integrity of accompanying drawing 6 scanning electron microscope diagram sheets free from flaw, and micro-fluidic chip substrate 15 and cover plate 17 merge fully.
The ultraviolet light of embodiment 2, the photosensitive glue of viscosity causes preparation of pre-polymerization method and the application in the processing of lucite micro-fluidic chip thereof
The photosensitive glue of viscosity that embodiment 1 uses is the polymethyl methacrylate particle to be dissolved in the methyl methacrylate solution that contains light trigger make, and present embodiment 2 adopts ultraviolet light to cause the preparation of pre-polymerization method.Method is: light trigger benzoin ethyl ether (methyl methacrylate quality 0.15%) is dissolved in the methyl methacrylate, at ambient temperature, is that the ultraviolet ray of 365nm was shone this solution 60-80 minute with wavelength, can get the photosensitive glue of viscosity.But be somebody's turn to do the processing that glue employing method similarly to Example 1 is coated with into photosensitive thixotroping glued membrane and is used for the lucite micro-fluidic chip, the chip of chip quality that makes and embodiment 2 processing is suitable.
Claims (2)
1. preparation method based on the lucite micro-fluidic chip of photosensitive thixotroping glued membrane is characterized in that concrete steps are:
(1) the polymethyl methacrylate particle is dissolved in methyl methacrylate solution pre-polymerization under ultraviolet ray that maybe will be dissolved with light trigger in the methyl methacrylate solution that contains light trigger, makes the photosensitive glue of viscosity;
(2) the photosensitive glue of step (1) gained viscosity is coated on the polymer-based film, has the one side of glue to cover layer protecting film, promptly get photosensitive thixotroping glued membrane;
(3) the photosensitive thixotroping glued membrane of step (2) gained is cut into small pieces with the same size of preprocessing chip before using, tear diaphragm off, to there be the one side of glue to attach to the micro-fluidic chip male mold surfaces of protruding micro-structural by roll-in, be shaped through ultraviolet-initiated polymerization, the chip substrate of microfluxion must be arranged;
(4) step (3) gained chip substrate and the micro-fluidic chip cover plate that is drilled with solution connection holes are passed through packaging by hot pressing, promptly get the lucite micro-fluidic chip;
Wherein, light trigger described in the step (1) is styrax and ethers or benzophenone compound, in the step (1) the polymethyl methacrylate particle is dissolved in the methyl methacrylate solution that contains light trigger, the quality percentage composition of polymethyl methacrylate and light trigger is respectively 15-30% and 0.1%-0.2%; The methyl methacrylate that is dissolved with light trigger in the step (1) refers to that in pre-polymerization under the ultraviolet ray at room temperature condition be irradiation 30-120 minute under the ultraviolet ray of 365nm in wavelength, and the addition of light trigger is the 0.1%-0.2% of methyl methacrylate quality.
2. the preparation method of the lucite micro-fluidic chip based on photosensitive thixotroping glued membrane according to claim 1, it is characterized in that having in the step (3) one side of glue to attach to the micro-fluidic chip male mold surfaces of protruding micro-structural, through ultraviolet-initiated polymerization, the employing wavelength is the complete polymerization that the ultraviolet ray irradiation of 365nm caused photosensitive thixotroping glue-line in 10 minutes-30 minutes.
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| WO2012077383A1 (en) * | 2010-12-06 | 2012-06-14 | アルプス電気株式会社 | Method for manufacturing microchip |
| CN102921480B (en) * | 2012-10-26 | 2014-10-01 | 北京理工大学 | Method for manufacturing micro-fluidic chip by ultraviolet cured optical cement |
| CN104190482B (en) * | 2014-08-21 | 2015-10-07 | 四川大学 | Take photosensitive dry film as the method that etching mask makes glass microfluidic devices |
| CN104607257A (en) * | 2015-01-15 | 2015-05-13 | 安徽理工大学 | Micro-fluidic chip surface hydrophilic modification treatment method and hydrophilic surface gradient manufacture method |
| CN106280465A (en) * | 2015-05-13 | 2017-01-04 | 苏州锐材半导体有限公司 | A kind of preparation method of polydimethylsiloxane porous membrane |
| CN105858595B (en) * | 2016-04-06 | 2018-01-23 | 西南交通大学 | Flatness self-compensating large area micro Process Multi-tip array preparation method |
| CN107971052A (en) * | 2018-01-16 | 2018-05-01 | 广东工业大学 | A kind of micro-fluidic chip based on photosensitive dry film and preparation method thereof |
| CN113649097B (en) * | 2021-09-17 | 2023-06-16 | 鲁东大学 | Method for preparing double-channel structure on micro-fluidic chip by using single-channel PDMS (polydimethylsiloxane) induced template |
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| US6454925B1 (en) * | 1997-08-25 | 2002-09-24 | Shimadzu Corporation | Device for electrophoresis and component therefor |
| CN1464303A (en) * | 2002-06-20 | 2003-12-31 | 中国科学院理化技术研究所 | Process for preparing high polymer micro-flow control chips |
| CN1302282C (en) * | 2004-12-23 | 2007-02-28 | 复旦大学 | Method for preparing noumenal modification polymethyl methacrylate micro flow control chip |
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| CN101434377A (en) * | 2008-11-28 | 2009-05-20 | 复旦大学 | Method for preparing organic glass micro-fluidic chip by infrared ray auxiliary mass polymerization |
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