CN101571550B - Three-dimensional moving mechanism under high vacuum environment - Google Patents
Three-dimensional moving mechanism under high vacuum environment Download PDFInfo
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- CN101571550B CN101571550B CN2009100860774A CN200910086077A CN101571550B CN 101571550 B CN101571550 B CN 101571550B CN 2009100860774 A CN2009100860774 A CN 2009100860774A CN 200910086077 A CN200910086077 A CN 200910086077A CN 101571550 B CN101571550 B CN 101571550B
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- horizontal
- drive shaft
- gear set
- small car
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Abstract
The invention discloses a three-dimensional moving mechanism under a high vacuum environment, comprising a horizontal guide track, a vertical guide track, a horizontal small car, a vertical small car,two horizontal drive shafts, a vertical drive shaft, a horizontal screw rod, a vertical screw rod, a bevel gear group, worms, three stepping counting motors and the like. The three-dimensional moving mechanism realizes the three-dimensional large-range stereo measurement and uses the position counting motors for completing the recording. The three motors are all arranged outside a vacuum chamber and introduced by flanges. The worms are designed in the front of each screw rod and the shaft, the appropriate deflection deformation is allowable, and the different coaxial degrees can be installed.The horizontal small car and the vertical small car both adopt high and low wheel automatic clamping structures, thereby leading the movement of the small cars on the guide tracks to be smoother. A s ensor hanger can rotate along three different shaft lines by changing the installation position of the gear group on the vertical small car or the form of the gear group, thereby further reflecting the three-dimensional large-range measurement capability.
Description
[technical field]
The present invention relates to a kind of high vacuum, the low temperature environment three-dimensional moving mechanism of work down, belong to the control field of measuring.
[background technology]
All kinds of tests are difficult to the required total data of disposable acquisition when carrying out parameter measurement in the ground simulation test system, generally need the measuring position of removable probe sensor or testpieces; Even the mode by a large amount of placement sensor once obtains experimental data, but in the test of multi-state, destroy vacuum environment, generally also need the position of Long-distance Control testpieces or sensor probe for fear of opening body gate, cabin.As seen in environmental simulation test, three-dimensional moving mechanism can be saved the quantity of sensor in single working condition tests, a broken ring simulated environment of in the multi-state test, avoiding opening the cabin, and reduce the time of test preparation and the cost of pilot system operation.
Satellite thermal vacuum test or the test for contamination of vacuum plume effect are had relatively high expectations to simulated environment, the cleanliness factor of its experimental enviroment should be greater than 100,000 grades, for preventing to introduce pollution source, measure travel mechanism and can not adopt conventional oil lubrication or grease lubrication, and must adopt free of contamination lubricating system.
To the large space environment simulator of diameter＞Φ 4m, travel mechanism's effective range is the bigger the better.The at present common effective perform region of travel mechanism is less, upwards has only the hundreds of millimeter at folk prescription, and great majority are two-dimentional, can not realize the big area measure of 3 D stereo.
The motor of travel mechanism's control device is had relatively high expectations to the temperature of working environment, humidity etc., ultimate pressure＜10 in the vacuum chamber of general space simulator
-6Pa, temperature＜100K are so controlling the very difficult operate as normal of motor under the rugged environment.
Because the restriction of many-sided conditions such as working environment, testing requirements will be designed the traverse measurement mechanism of working and need satisfy following condition in large-scale environmental simulation vacuum chamber:
(1) measuring mechanism is three-dimensional, can realize three-dimensional big area measure;
(2) travel mechanism can not be to introducing pollution source in the cabin, and the lubricated of its rotatable parts should be pollution-free;
(3) travel mechanism can be in high vacuum, low temperature (pressure＜10
-4Pa, temperature＜100K) be operate as normal down;
(4) the energy Long-distance Control can accurately write down the measuring position, and precision is not less than ± 1mm.
[summary of the invention]
The purpose of this invention is to provide the big area measure device of a kind of 3 D stereo of under high vacuum, low temperature environment, using.The problem to be solved in the present invention is, in pressure＜10
-6Under the rugged surroundings of Pa, temperature＜100K, three-dimensional moving mechanism energy operate as normal, and can accurately write down displacement, and effectively the perform region is greater than Φ 1.2m * 2m, and this mechanism does not introduce pollution source to experimental enviroment in addition.
Three-dimensional moving mechanism under the high vacuum environment comprises horizontal guide rail (10), vertical guide rail (12), horizontal small car (11), vertical small car (13), three transmission shafts (two horizontal drive shafts and a vertical drive shaft), two rhizoid bars (horizontal lead screw and a down-feed screw), bevel gear set, worm screw and three step-by-step counting motors etc.
Horizontal small car (11) is provided with horizontal lead screw (7) and horizontal pushnut (16), motor A drives bevel gear set A (1), bevel gear set A (1) drives horizontal lead screw (7) by worm screw A (4), and horizontal lead screw (7) drives horizontal pushnut (16) thereby the motion of realization horizontal direction again.
Be fixed with bevel gear set E (18) on the horizontal small car (11), motor B drives bevel gear set B (2), bevel gear set B (2) drives transverse axis I (8) by worm screw B (5), transverse axis I (8) drives bevel gear set E (18) again, bevel gear set E (18) drives scroll bar E (20), and scroll bar E (20) drives vertical thrust nut (26) by down-feed screw (21) thereby the motion of realization vertical direction.
Bevel gear set D (17) is fixed on the horizontal small car (11), and motor C drives bevel gear set C (3) and then drives scroll bar C (6), and scroll bar C (6) drives transverse axis II (9) again; When vertical direction has motion, the rotation of transverse axis II (9) passes to Z-axis (22) by bevel gear set D (17), Z-axis (22) interacts with the changeable-teeth wheels (23) that are installed on the vertical small car (13), and realization part sensor (27) hanger winds perpendicular to Z-axis (22) direction and rotates.
Advantage of the present invention and good effect are: (1) has realized three-dimensional big regional measurement in space; (2) location records is finished by the counting motor; (3) work under mal-condition for fear of motor, three motors all are placed on the vacuum chamber outside, introduce by flange; (4) because screw mandrel and axle are longer, the problem of amount of deflection, right alignment variation can appear in installation and use, before every rhizoid bar and axle, all designed worm screw, allow suitable deflection deformation and installation malalignment; (5) the lubricated employing kollag of parts does not pollute vacuum chamber; (6) horizontal small car and vertical small car all adopt the high and low automatic clamping structure of taking turns, and it is more steady that dolly is moved on guide rail; (7) be installed in the installation site or the gear set form of the gear set (23) on the vertical small car (13) by change, can realize that sensor hanger (27) rotates around Z-axis axis, parallel with transverse axis and vertical with Z-axis axis, vertical with transverse axis and vertical with Z-axis axis.
[description of drawings]
Fig. 1 three-dimensional moving mechanism synoptic diagram
The local figure of Fig. 2 horizontal small car
The local figure of Fig. 3 vertical small car
Among the figure:
1-bevel gear set A; 2-bevel gear set B; 3-bevel gear set C; 4-scroll bar A; 5-scroll bar B; 6-scroll bar C; The 7-horizontal lead screw; 8-transverse axis I; 9-transverse axis II; The 10-horizontal guide rail; The 11-horizontal small car; The 12-vertical guide rail; The 13-vertical small car; The high wheel of 14-horizontal small car; The low wheel of 15-horizontal small car; The horizontal pushnut of 16-; 17-bevel gear set D; 18-bevel gear set E; 19-scroll bar D; 20-scroll bar E; The 21-down-feed screw; The 22-Z-axis; The 23-gear set; The high wheel of 24-vertical small car; The low wheel of 25-vertical small car; 26-vertical thrust nut; 27-sensor hanger
[embodiment]
Further specify the present invention below in conjunction with accompanying drawing 1, Fig. 2, Fig. 3.
A kind of high vacuum, the low temperature environment three-dimensional moving mechanism of work down comprise: guide rail (10,12: horizontal guide rail and vertical guide rail), dolly (11,13: horizontal small car and vertical small car), transmission shaft (8,9,22: 2 of levels, vertical 1), screw mandrel (7,21: 1 of level, vertical 1), bevel gear set 5 are seen Fig. 1 to 3 in (1,2,3,17,18), changeable-teeth wheels (23), worm screw 5 (4,5,6,19,20) and step-by-step counting motor etc.
Three-dimensional moving mechanism can be realized tangential movement, vertical movement and rotate around Z-axis axis, parallel with transverse axis and vertical with Z-axis axis, vertical with transverse axis and vertical with Z-axis axis.
By being installed in the motion that realizes horizontal direction that cooperates of horizontal pushnut (16) and horizontal lead screw (7) on the horizontal small car (11), translational speed is 0.1-2m/min, and effectively displacement is 2m, precision ± 1mm.
Mobile effective displacement of vertical direction is 1.2m, and translational speed is 1-2m/min, precision ± 1mm.
Pivot center has three, and the installation site or the gear set form that are installed in the variable gears group (23) on the vertical small car (13) by change are specified rotating shaft.Rotational angle is 360 °, and velocity of rotation is 30-60 °/min, precision ± 1 °.
Tangential movement parts and flow process: motor A → bevel gear set A (1) → worm screw A (4) → horizontal lead screw (7) → horizontal pushnut (16).
Vertical movement parts and flow process: motor B → bevel gear set B (2) → worm screw B (5) → transverse axis I (8) → bevel gear set E (18) → worm screw E (20) → down-feed screw (21) → vertical thrust nut (26).Transverse axis I has the long keyway (see figure 2) on (8).Bevel gear set E (18) is fixed on the horizontal small car (11), and when vertical direction did not have motion, bevel gear set E and horizontal small car can be slided on transverse axis I; When vertical direction has motion, the rotation of transverse axis I (8) passes to down-feed screw (21) by bevel gear set E (18), down-feed screw interacts with the vertical thrust nut (26) that is installed on the vertical small car (13), realizes the slip of vertical small car on vertical guide rail (12).
Rotational motion parts and flow process: motor C → bevel gear set C (3) → worm screw C (6) → transverse axis II (9) → bevel gear set D (17) → scroll bar D (19) → down-feed screw (21) → changeable-teeth wheels (23) → sensor hanger (27).Transverse axis II (9) and Z-axis (22) are similar to transverse axis I (8), have long keyway on axle.Bevel gear set D (17) is fixed on the horizontal small car (11), when rotation direction does not have motion, bevel gear set D (17) and horizontal small car (11) can go up at transverse axis II (9) and slide, and changeable-teeth wheels (23) and vertical small car (13) can go up at Z-axis (22) and slide; When vertical direction had motion, the rotation of transverse axis II (9) passed to Z-axis (22) by bevel gear set D (17), and Z-axis interacts with the changeable-teeth wheels that are installed on the vertical small car, realized that part sensor hanger rotates around given axis.
Claims (3)
1. the three-dimensional moving mechanism under the high vacuum environment, comprise horizontal guide rail (10), vertical guide rail (12), horizontal small car (11), vertical small car (13), horizontal drive shaft I (8), horizontal drive shaft II (9), vertical drive shaft (22), horizontal lead screw (7), down-feed screw (21), horizontal pushnut (16), vertical thrust nut (26), changeable-teeth wheels (23), part sensor hanger (27), bevel gear set (1,2,3,17,18), worm screw (4,5,6,19,20) and three step-by-step counting motors, horizontal small car (11) is provided with horizontal lead screw (7) and horizontal pushnut (16), motor A drives bevel gear set A (1), bevel gear set A (1) drives horizontal lead screw (7) by worm screw A (4), horizontal lead screw (7) drives horizontal pushnut (16) thereby the motion of realization horizontal direction again, be fixed with bevel gear set E (18) on the horizontal small car (11), motor B drives bevel gear set B (2), bevel gear set B (2) drives horizontal drive shaft I (8) by worm screw B (5), horizontal drive shaft I (8) drives bevel gear set E (18) again, bevel gear set E (18) drives scroll bar E (20), and scroll bar E (20) drives vertical thrust nut (26) by down-feed screw (21) thereby the motion of realization vertical direction; Bevel gear set D (17) is fixed on the horizontal small car (11), and motor C drives bevel gear set C (3) and then drives scroll bar C (6), and scroll bar C (6) drives horizontal drive shaft II (9) again; When vertical direction has motion, the rotation of horizontal drive shaft II (9) passes to vertical drive shaft (22) by bevel gear set D (17), vertical drive shaft (22) interacts with the changeable-teeth wheels (23) that are installed on the vertical small car (13), realize that part sensor hanger (27) rotates around the axis of appointment, the axis of described appointment is the axis of vertical drive shaft (22), parallel with horizontal drive shaft I (8) or horizontal drive shaft II (9) and with the vertical axis of vertical drive shaft (22), one of axis vertical and vertical with vertical drive shaft (22) with horizontal drive shaft I (8) or horizontal drive shaft II (9).
2. the three-dimensional moving mechanism under the high vacuum environment as claimed in claim 1, it is characterized in that: be installed in the installation site or the gear set form of the changeable-teeth wheels (23) on the vertical small car (13) by change, realize the axis rotation of sensor hanger (27) in the axis of vertical drive shaft (22), the axis parallel and vertical or the axis vertical and vertical with vertical drive shaft (22) with horizontal drive shaft I (8) or horizontal drive shaft II (9) with vertical drive shaft (22) with horizontal drive shaft I (8) or horizontal drive shaft II (9).
3. the three-dimensional moving mechanism under the high vacuum environment as claimed in claim 1 is characterized in that: horizontal small car (11) and vertical small car (13) all adopt the high and low automatic clamping structure of taking turns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100860774A CN101571550B (en) | 2009-06-08 | 2009-06-08 | Three-dimensional moving mechanism under high vacuum environment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100860774A CN101571550B (en) | 2009-06-08 | 2009-06-08 | Three-dimensional moving mechanism under high vacuum environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101571550A CN101571550A (en) | 2009-11-04 |
| CN101571550B true CN101571550B (en) | 2011-12-21 |
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ID=41230951
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100860774A Expired - Fee Related CN101571550B (en) | 2009-06-08 | 2009-06-08 | Three-dimensional moving mechanism under high vacuum environment |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103723524B (en) * | 2012-10-11 | 2015-11-11 | 珠海格力电器股份有限公司 | Feed mechanism |
| CN103143939A (en) * | 2013-03-18 | 2013-06-12 | 苏州市瑞昌机电工程有限公司 | Universal adjusting mechanism |
| CN107490704B (en) * | 2017-09-06 | 2019-06-18 | 清华大学 | Intersect sample transferring device and the ultrahigh vacuum measuring system with the intersection sample transferring device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101061897A (en) * | 2006-04-27 | 2007-10-31 | 翁清铿 | Three-dimensional measuring machine for the shoe mould |
| CN201034559Y (en) * | 2007-04-25 | 2008-03-12 | 上海大学 | Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane |
-
2009
- 2009-06-08 CN CN2009100860774A patent/CN101571550B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101061897A (en) * | 2006-04-27 | 2007-10-31 | 翁清铿 | Three-dimensional measuring machine for the shoe mould |
| CN201034559Y (en) * | 2007-04-25 | 2008-03-12 | 上海大学 | Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane |
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| Publication number | Publication date |
|---|---|
| CN101571550A (en) | 2009-11-04 |
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