CN101552318A - 多层压电驱动器的制造方法和多层压电驱动器 - Google Patents
多层压电驱动器的制造方法和多层压电驱动器 Download PDFInfo
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- CN101552318A CN101552318A CN200910084238.6A CN200910084238A CN101552318A CN 101552318 A CN101552318 A CN 101552318A CN 200910084238 A CN200910084238 A CN 200910084238A CN 101552318 A CN101552318 A CN 101552318A
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- multilayer piezoelectric
- acutator
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- ceramic
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims abstract description 50
- 238000005266 casting Methods 0.000 claims abstract description 8
- 238000007639 printing Methods 0.000 claims abstract description 8
- 239000000843 powder Substances 0.000 claims abstract description 7
- 239000000853 adhesive Substances 0.000 claims abstract description 4
- 230000001070 adhesive effect Effects 0.000 claims abstract description 4
- 238000004080 punching Methods 0.000 claims abstract description 4
- 238000001238 wet grinding Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims description 19
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 13
- 238000010304 firing Methods 0.000 claims description 10
- 230000003993 interaction Effects 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 4
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052593 corundum Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 230000010287 polarization Effects 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract 2
- 239000003643 water by type Substances 0.000 abstract 2
- 230000007547 defect Effects 0.000 abstract 1
- 230000002452 interceptive effect Effects 0.000 abstract 1
- 238000009421 internal insulation Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
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- Compositions Of Oxide Ceramics (AREA)
Abstract
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Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910084238.6A CN101552318A (zh) | 2009-05-14 | 2009-05-14 | 多层压电驱动器的制造方法和多层压电驱动器 |
Applications Claiming Priority (1)
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CN200910084238.6A CN101552318A (zh) | 2009-05-14 | 2009-05-14 | 多层压电驱动器的制造方法和多层压电驱动器 |
Publications (1)
Publication Number | Publication Date |
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CN101552318A true CN101552318A (zh) | 2009-10-07 |
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CN200910084238.6A Pending CN101552318A (zh) | 2009-05-14 | 2009-05-14 | 多层压电驱动器的制造方法和多层压电驱动器 |
Country Status (1)
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CN (1) | CN101552318A (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102281041A (zh) * | 2010-06-08 | 2011-12-14 | 湖南嘉业达电子有限公司 | 一种压电陶瓷径向振动模式频率器件芯片绝缘防潮的方法 |
CN102299254A (zh) * | 2010-06-25 | 2011-12-28 | 西安三瑞科技有限公司 | 一种流延法制备大尺寸厚膜压电复合材料的方法 |
CN102568818A (zh) * | 2010-12-20 | 2012-07-11 | 北京有色金属研究总院 | 一种玻璃陶瓷叠层电容器的内电极及其制备方法 |
CN103641475A (zh) * | 2013-11-29 | 2014-03-19 | 苏州衡业新材料科技有限公司 | 低温共烧多层压电陶瓷及其制备方法 |
CN107080893A (zh) * | 2017-04-10 | 2017-08-22 | 河北盛平电子科技有限公司 | 一种人造视网膜及其制造方法 |
CN107911044A (zh) * | 2017-12-10 | 2018-04-13 | 绍兴康健精密不锈钢有限公司 | 一种作动器定子结构 |
CN107919811A (zh) * | 2017-12-10 | 2018-04-17 | 绍兴康健精密不锈钢有限公司 | 一种基于逆压电效应的作动器 |
CN113013321A (zh) * | 2021-02-07 | 2021-06-22 | 西安交通大学 | 一种压电单晶层叠驱动器的制备方法 |
-
2009
- 2009-05-14 CN CN200910084238.6A patent/CN101552318A/zh active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102281041A (zh) * | 2010-06-08 | 2011-12-14 | 湖南嘉业达电子有限公司 | 一种压电陶瓷径向振动模式频率器件芯片绝缘防潮的方法 |
CN102299254A (zh) * | 2010-06-25 | 2011-12-28 | 西安三瑞科技有限公司 | 一种流延法制备大尺寸厚膜压电复合材料的方法 |
CN102299254B (zh) * | 2010-06-25 | 2013-07-17 | 西安三瑞科技有限公司 | 一种流延法制备大尺寸厚膜压电复合材料的方法 |
CN102568818A (zh) * | 2010-12-20 | 2012-07-11 | 北京有色金属研究总院 | 一种玻璃陶瓷叠层电容器的内电极及其制备方法 |
CN103641475A (zh) * | 2013-11-29 | 2014-03-19 | 苏州衡业新材料科技有限公司 | 低温共烧多层压电陶瓷及其制备方法 |
CN107080893A (zh) * | 2017-04-10 | 2017-08-22 | 河北盛平电子科技有限公司 | 一种人造视网膜及其制造方法 |
CN107080893B (zh) * | 2017-04-10 | 2023-06-09 | 河北盛平电子科技有限公司 | 一种人造视网膜及其制造方法 |
CN107911044A (zh) * | 2017-12-10 | 2018-04-13 | 绍兴康健精密不锈钢有限公司 | 一种作动器定子结构 |
CN107919811A (zh) * | 2017-12-10 | 2018-04-17 | 绍兴康健精密不锈钢有限公司 | 一种基于逆压电效应的作动器 |
CN113013321A (zh) * | 2021-02-07 | 2021-06-22 | 西安交通大学 | 一种压电单晶层叠驱动器的制备方法 |
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Application publication date: 20091007 |