CN101522950A - 具有至少一层多元氧化物混晶层的层体系 - Google Patents
具有至少一层多元氧化物混晶层的层体系 Download PDFInfo
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- CN101522950A CN101522950A CNA2007800376573A CN200780037657A CN101522950A CN 101522950 A CN101522950 A CN 101522950A CN A2007800376573 A CNA2007800376573 A CN A2007800376573A CN 200780037657 A CN200780037657 A CN 200780037657A CN 101522950 A CN101522950 A CN 101522950A
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- mixed crystal
- crystal layer
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- coating systems
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Laminated Bodies (AREA)
Abstract
Description
材料 | I-源1 | I-源2 | I-源3 | I-源4 | U-偏压-bp | O2 | N2 | p | T |
[A] | [A] | [A] | [A] | [V] | [sccm] | [sccm] | [Pa] | [℃] | |
AlCrO | -- | 200 | -- | 200 | -60 | 1000 | -- | 2.6 | 550℃ |
AlCrO-AlCrN多层 | -- | 200 | -- | 200 | -60 | 1000 | 1000 | 2.6 | 550℃ |
材料 | I-源1 | I-源2 | I-源3 | I-源4 | U-偏压DC | Ar | C2H2 | N2 | p | T |
[A] | [A] | [A] | [A] | [V] | [sccm] | [sccm] | [sccm] | [Pa] | [℃] | |
TiAlN | 200 | -- | 200 | -- | -40 | -- | 压力调节 | 3 | 550℃ | |
TiN | 180 | -- | 180 | -- | -100 | -- | 压力调节 | 0.8 | 550℃ | |
TiCN | 190 | -- | 190 | -- | -100 | 420 | 15-125 | 500-150 | 2.5-2.0 | 550℃ |
AlCrN | 200 | -- | 200 | -- | -100 | -- | -- | 1000 | 2.6 | 550℃ |
AlMeN | 140 | -- | 140 | -- | -80 | -- | -- | 600 | 0.8 | 500℃ |
AlMeCN | 220 | 220 | -120 | 300 | 10-150 | 压力调节 | 2.5 | 600℃ |
Claims (49)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH16142006 | 2006-10-10 | ||
CH01614/06 | 2006-10-10 | ||
PCT/EP2007/059196 WO2008043606A1 (de) | 2006-10-10 | 2007-09-03 | Schichtsystem mit zumindest einer mischkristallschicht eines mehrfachoxids |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101522950A true CN101522950A (zh) | 2009-09-02 |
CN101522950B CN101522950B (zh) | 2012-08-29 |
Family
ID=37607420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800376573A Active CN101522950B (zh) | 2006-10-10 | 2007-09-03 | 具有至少一层多元氧化物混晶层的层体系 |
Country Status (17)
Country | Link |
---|---|
EP (1) | EP2082079B1 (zh) |
JP (2) | JP5725466B2 (zh) |
KR (1) | KR101508159B1 (zh) |
CN (1) | CN101522950B (zh) |
AU (1) | AU2007306494B2 (zh) |
BR (1) | BRPI0719774A2 (zh) |
CA (1) | CA2665044C (zh) |
HK (1) | HK1135439A1 (zh) |
IL (1) | IL198044A (zh) |
MX (1) | MX2009003130A (zh) |
MY (1) | MY151941A (zh) |
NZ (1) | NZ576185A (zh) |
RU (1) | RU2456371C2 (zh) |
TW (1) | TWI421356B (zh) |
UA (1) | UA99819C2 (zh) |
WO (1) | WO2008043606A1 (zh) |
ZA (1) | ZA200902479B (zh) |
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CN102666908A (zh) * | 2009-09-25 | 2012-09-12 | 欧瑞康贸易股份公司(特吕巴赫) | 用于制备立方氧化锆层的方法 |
CN103189541A (zh) * | 2010-03-18 | 2013-07-03 | 欧瑞康贸易股份公司(特吕巴赫) | 基于尖晶石结构的NiAl2O4的涂层 |
CN103748256A (zh) * | 2011-09-07 | 2014-04-23 | 瓦尔特公开股份有限公司 | 具有含铬功能层的工具 |
CN105089711A (zh) * | 2015-06-25 | 2015-11-25 | 重庆德蚨乐机械制造有限公司 | 涡轮增压器及其喷嘴环 |
CN105624677A (zh) * | 2014-11-03 | 2016-06-01 | 南京中车浦镇城轨车辆有限责任公司 | 硬质合金刀具表面金刚石/TiAlN复合涂层制备方法 |
CN108291299A (zh) * | 2015-11-27 | 2018-07-17 | 塞梅孔公司 | 用金刚石层和硬质材料层涂覆体 |
CN108699674A (zh) * | 2016-02-12 | 2018-10-23 | 欧瑞康表面解决方案普费菲孔股份公司 | 内燃机的具有涂层的摩擦学系统 |
CN109790616A (zh) * | 2016-07-14 | 2019-05-21 | 欧瑞康表面解决方案股份公司,普费菲孔 | 用于受热应力的结构的保护涂层 |
CN110214195A (zh) * | 2016-12-23 | 2019-09-06 | 株式会社Posco | 金色钢板及其制造方法 |
CN111945111A (zh) * | 2020-08-27 | 2020-11-17 | 威士精密工具(上海)有限公司 | 一种沉积在立方氮化硼刀具表面的复合涂层及沉积方法 |
CN115011919A (zh) * | 2021-03-05 | 2022-09-06 | 株洲钻石切削刀具股份有限公司 | 含多周期氧化物层的复合涂层切削刀具 |
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JP4850189B2 (ja) * | 2008-01-08 | 2012-01-11 | 日立ツール株式会社 | 被覆工具 |
JP5234925B2 (ja) * | 2008-04-03 | 2013-07-10 | 株式会社神戸製鋼所 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
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2007
- 2007-09-03 NZ NZ576185A patent/NZ576185A/xx not_active IP Right Cessation
- 2007-09-03 MY MYPI20091427 patent/MY151941A/en unknown
- 2007-09-03 BR BRPI0719774-8A2A patent/BRPI0719774A2/pt not_active IP Right Cessation
- 2007-09-03 RU RU2009117577/02A patent/RU2456371C2/ru active
- 2007-09-03 WO PCT/EP2007/059196 patent/WO2008043606A1/de active Application Filing
- 2007-09-03 KR KR1020097007421A patent/KR101508159B1/ko active IP Right Grant
- 2007-09-03 CN CN2007800376573A patent/CN101522950B/zh active Active
- 2007-09-03 MX MX2009003130A patent/MX2009003130A/es active IP Right Grant
- 2007-09-03 CA CA2665044A patent/CA2665044C/en not_active Expired - Fee Related
- 2007-09-03 ZA ZA200902479A patent/ZA200902479B/xx unknown
- 2007-09-03 EP EP07803181.2A patent/EP2082079B1/de active Active
- 2007-09-03 UA UAA200904546A patent/UA99819C2/ru unknown
- 2007-09-03 JP JP2009531796A patent/JP5725466B2/ja active Active
- 2007-09-03 AU AU2007306494A patent/AU2007306494B2/en not_active Ceased
- 2007-10-04 TW TW096137223A patent/TWI421356B/zh not_active IP Right Cessation
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- 2009-04-06 IL IL198044A patent/IL198044A/en active IP Right Grant
- 2009-12-17 HK HK09111889.2A patent/HK1135439A1/xx not_active IP Right Cessation
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Cited By (21)
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CN102666908B (zh) * | 2009-09-25 | 2020-07-21 | 欧瑞康表面解决方案股份公司,普费菲孔 | 用于制备立方氧化锆层的方法 |
CN107299313A (zh) * | 2009-09-25 | 2017-10-27 | 欧瑞康表面解决方案股份公司,普费菲孔 | 用于制备立方氧化锆层的方法 |
CN102666908A (zh) * | 2009-09-25 | 2012-09-12 | 欧瑞康贸易股份公司(特吕巴赫) | 用于制备立方氧化锆层的方法 |
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MY151941A (en) | 2014-07-31 |
CA2665044C (en) | 2016-08-23 |
WO2008043606A1 (de) | 2008-04-17 |
CN101522950B (zh) | 2012-08-29 |
RU2009117577A (ru) | 2010-11-20 |
EP2082079B1 (de) | 2019-09-18 |
JP2010506049A (ja) | 2010-02-25 |
BRPI0719774A2 (pt) | 2014-04-22 |
TW200833851A (en) | 2008-08-16 |
TWI421356B (zh) | 2014-01-01 |
HK1135439A1 (en) | 2010-06-04 |
JP2014077201A (ja) | 2014-05-01 |
UA99819C2 (ru) | 2012-10-10 |
AU2007306494B2 (en) | 2012-05-31 |
IL198044A0 (en) | 2009-12-24 |
EP2082079A1 (de) | 2009-07-29 |
ZA200902479B (en) | 2010-07-28 |
AU2007306494A1 (en) | 2008-04-17 |
RU2456371C2 (ru) | 2012-07-20 |
MX2009003130A (es) | 2009-06-22 |
KR101508159B1 (ko) | 2015-04-14 |
JP5725466B2 (ja) | 2015-05-27 |
JP6000233B2 (ja) | 2016-09-28 |
CA2665044A1 (en) | 2008-04-17 |
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