CN101504513A - Air-supporting slide rail system - Google Patents

Air-supporting slide rail system Download PDF

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Publication number
CN101504513A
CN101504513A CNA2009100458714A CN200910045871A CN101504513A CN 101504513 A CN101504513 A CN 101504513A CN A2009100458714 A CNA2009100458714 A CN A2009100458714A CN 200910045871 A CN200910045871 A CN 200910045871A CN 101504513 A CN101504513 A CN 101504513A
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China
Prior art keywords
air
guide rail
supporting
float guide
valve
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CNA2009100458714A
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CN101504513B (en
Inventor
李生强
齐芊枫
张锋
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Shanghai Micro Electronics Equipment Co Ltd
Shanghai Micro and High Precision Mechine Engineering Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
Shanghai Micro and High Precision Mechine Engineering Co Ltd
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Abstract

The invention relates to an air-float guide rail system, which belongs to the field of precision instruments. The air-float guide rail system comprises a compressed air control air circuit, a vacuum control air circuit and an air-float guide rail, wherein the air-float guide rail comprises an air-float area and a vacuum cavity; the compressed air control air circuit comprises a first constant pressure air bag for supplementing air for the air-float area of the air-float guide rail; and the vacuum control air circuit comprises a second constant pressure air bag for extracting the air in the vacuum cavity of the air-float guide rail. The air-float guide rail system has the characteristic of small air film vibration.

Description

A kind of air-supporting slide rail system
Technical field
The invention belongs to field of precision instruments, be specifically related to a kind of air-supporting slide rail system that comprises pressurized air control gas circuit, vacuum control gas circuit.
Background technology
Ultraprecise air supporting work stage system is the core subsystem of current main-stream litho machine, requires to have nano level repetitive positioning accuracy and is synchronized with the movement precision.Because high two orders of magnitude of ratio of precision ball line slideway of air-supporting slide rail system have advantages such as precision height, friction is low, the life-span is long, satisfy high precision, high stability waits requirement at a high speed, the widespread use in ultraprecise work stage system of air-float guide rail structure.But find in using that it is nano level micro breadth oscillation that air-float guide rail has amplitude, frequency from tens hertz to several KHz.And this vibration frequency is positioned within the control bandwidth, belongs to the disturbance outside the closed loop, and control system is very little to the inhibiting effect of this vibration, and in a single day ultraprecise air supporting work stage system enables, and the vibration amplification that will be excited reduces the control accuracy of system greatly.
Document " the little vibration and the inhibition of ultraprecise air supporting work stage " (Zhang Ming, Zhu Yu, Duan Guanghong, " manufacturing technology and lathe ", o. 11th in 2005) the little vibration and the inhibition of ultraprecise air supporting work stage are disclosed, introduced little vibration origin cause of formation, drawn the little vibration measure that suppresses ultraprecise air supporting work stage and be the air supporting hole of adopting diameter littler.Practice is proof also, adopt the littler air supporting hole of diameter to help to improve little vibration of ultraprecise air supporting work stage really, but littler air supporting hole is owing to the too little reason of diameter, because of the effect of microparticle choking phenomenon takes place in actual applications easily, severe patient can lead to major accident, can not only start with from reducing the air supporting hole so suppress little vibration of ultraprecise air supporting work stage.
Document " based on the development of the linear electric motors high performance operation platform of static pressure air-float guide rail " (Zhang Congpeng, Liu Qiang, " machine science and technology ", 2006 the 10th phases) introduced the relevant knowledge such as kind, method for designing, prestrain technology of air-float guide rail, drawing the effective method of the prestrain of air-float guide rail is to adopt vacuum prestrain, convenient, flexible, but how its gas circuit to air-float guide rail in the ultraprecise air supporting work stage guarantees that its pressure stability does not relate to.
Number of patent application is that 200610027352.1 " a kind of gas bearing support of regulating the air film two-way stiffness " discloses a kind of gas bearing support that is used for the adjusting air film two-way stiffness of ultraprecise air supporting work stage, and this bearing can effectively guarantee the kinematic accuracy of air supporting work stage.And the key that guarantees the gas bearing support kinematic accuracy is to regulate gas circuit pressure according to actual needs, guarantees air-film thickness and air supporting rigidity.It needs accurately to regulate to pressure in the gas circuit during application, avoiding little oscillation phenomenon of ultraprecise air supporting work stage, and how to regulate, how to guarantee the stable of gas circuit pressure, and this patent does not relate to, and this gas bearing support complex structure.
Discover that the micro breadth oscillation that occurs during the ultraprecise air-float guide rail uses is relevant with gas flow in the air flue.Flowing of fluid has two states usually, and a kind of is laminar flow, a kind of is turbulent flow, distinguish with Reynolds number in the engineering, Reynolds number surpass 3000 be turbulent flow; Reynolds number is lower than 2000 the laminar flow that is; Marginal is transition state; Reynolds number be calculated as formula (1):
Re=ρuD/m u (1)
Wherein ρ is a fluid density; U is a fluid velocity; D is a pipe diameter; m uBe fluid viscosity.
When adopting less air supporting bore dia in the engineering practical application, Reynolds number has been reduced to below 2000, during for laminar condition, finds because the air supporting hole is too little, and blocks the air supporting hole easily, causes that easily accident takes place.So suppress little oscillation phenomenon of ultraprecise air-float guide rail, except the air supporting hole that guarantees the certain diameter size, also need to provide highly stable air feed source of the gas of pressure and specific air-float guide rail structure.
Summary of the invention
The technical problem to be solved in the present invention is, is to suppress the air film micro breadth oscillation phenomenon of air-float guide rail in using, and the invention provides a kind of gas control precision, air-film thickness is constant relatively and air supporting rigidity is high air-supporting slide rail system.
For solving the problems of the technologies described above, air-supporting slide rail system provided by the invention comprises pressurized air control gas circuit, vacuum control gas circuit and air-float guide rail, and air-float guide rail comprises air flotation zone and vacuum chamber; Described pressurized air control gas circuit comprises the first constant voltage air bag, is used for the air flotation zone make-up gas to described air-float guide rail; Described vacuum control gas circuit comprises the second constant voltage air bag, is used for extracting the gas of the vacuum chamber of described air-float guide rail.
According to air-supporting slide rail system provided by the invention, wherein, described pressurized air control gas circuit also comprises filtrator, accurate voltage regulating valve, first solenoid valve, flow control valve and first pressure switch; Filtrator, accurate voltage regulating valve, first solenoid valve, the first constant voltage air bag, flow control valve and first pressure switch are connected and lead to the air flotation zone of air-float guide rail successively by sealing pipeline.Comprise two or more first constant voltage air bags and two or more flow control valves in the described pressurized air control gas circuit, each first constant voltage air bag is directly connected in each flow control valve by sealing pipeline.Described first solenoid valve is one of two-position two-way solenoid valve or two-position three way magnetic valve.Described flow control valve is the one-way flow variable valve.The sensitivity of described accurate voltage regulating valve is less than 0.2% of its maximum range
According to air-supporting slide rail system provided by the invention, wherein, described vacuum control gas circuit also comprises accurate voltage regulating valve, flow control valve, second solenoid valve, second pressure switch and filtrator; Accurate voltage regulating valve, the second constant voltage air bag, flow control valve and filtrator are connected and lead to the vacuum chamber of air-float guide rail successively by sealing pipeline, second pressure switch is serially connected with between vacuum chamber and the flow control valve, and second solenoid valve is serially connected with between the accurate voltage regulating valve and second pressure switch.Second solenoid valve is the vacuum special electromagnetic valve, is one of two-position two-way solenoid valve or two-position three way magnetic valve.Described flow control valve is the one-way flow variable valve.The sensitivity of described accurate voltage regulating valve is less than 0.2% of its maximum range
As the preferred technique scheme, in the air-supporting slide rail system provided by the invention, described air-float guide rail comprises odd number air flotation zone and the plural even number vacuum chamber more than three, air flotation zone and vacuum chamber are alternately arranged mutually and are formed air-float guide rail, and air flotation zone is with the central axis symmetric configuration of air-float guide rail, the vacuum chamber central axis symmetric configuration with air-float guide rail.Described air flotation zone comprises four air supporting holes and four air supporting balancing slits, described air supporting hole symmetric configuration in the air flotation zone plane, described air supporting balancing slit symmetric configuration in the air flotation zone plane.The pore size unanimity in described air supporting hole, the degree of depth unanimity of described air supporting balancing slit, the width unanimity of air supporting balancing slit.The aperture D in described air supporting hole calculates according to following formula:
Re=ρuD/m u
Wherein, Re is a Reynolds number, and ρ is a fluid density, and u is a fluid velocity, and D is a pipe diameter, m uBe fluid viscosity; By being set, air supporting aperture parameters D make Re be less than or equal to 2000.
Described air-float guide rail also comprises the insulated chamber that places between described vacuum chamber and the air flotation zone, the described relatively central axis symmetric configuration of insulated chamber.All air flotation zones connect by the gas path, and by being arranged on first pipe adapter on the described gas path to all air flotation zone air feed, first pipe adapter is connected in pressurized air control gas circuit simultaneously.All vacuum chambers connect by the gas path, and by being arranged on second pipe adapter on the described gas path to all vacuum chamber extracting airs, second pipe adapter is connected in the vacuum control gas circuit simultaneously.
Technique effect of the present invention is: by in pressure gas control gas circuit the first constant voltage air bag being set, first aspect, gas in the first constant voltage air bag can be responded to pressure in the gas circuit rapidly less than predetermined value, thereby make-up gas in gas circuit, overcome by the slow characteristics of compressed air source make-up gas reaction, thereby made the air film vibration of air flotation zone less relatively; Second aspect, because the fluctuation of the gaseous tension of compressed air source is big, directly by compressed air source make-up gas in air flotation zone, it is unbalanced and cause the air film vibration of vacuum chamber to cause pressurized air control gas circuit to flow to the air-flow of air flotation zone, by the first constant voltage air bag is set, can obviously overcome this shortcoming.By the second constant voltage air bag is set in the vacuum control gas circuit, first aspect, the second constant voltage pneumatophore can be responded to the air pressure change of vacuum chamber rapidly, thereby the gas in the direct extracting vacuum chamber, overcome by the relatively slow characteristics of vacuum source system extracting gases reaction, thereby made the air film vibration of vacuum chamber less relatively.Second aspect, because the fluctuation of the gaseous tension of vacuum source system is big, directly by the gas in the vacuum source system extracting vacuum chamber, it is unbalanced and cause the air film vibration of vacuum chamber to cause vacuum chamber to flow to the air-flow of vacuum control gas circuit, by the second constant voltage air bag is set, can obviously overcome this shortcoming.Therefore air-supporting slide rail system provided by the invention has the little characteristics of air film vibration.
In the further preferred technique scheme, the structural symmetry layout of air-float guide rail, inner identical, pressure homogeneous between the air flotation zone; Each air flotation zone all has four air supporting holes, and four air supporting balancing slits are formed, and air supporting hole and air supporting balancing slit all are symmetric configuration on each air flotation zone; This just guarantees that air flotation zone pressure is in full accord, can guarantee that when bearing the external change load air-film thickness is constant.The symmetric configuration characteristics of air flotation zone and vacuum chamber also can improve the air supporting rigidity of system.
Description of drawings
Fig. 1 is the example structure synoptic diagram that the invention provides air-supporting slide rail system;
Fig. 2 is the air-float guide rail structure embodiment synoptic diagram in the air-supporting slide rail system that provides of Fig. 1.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, the present invention is described in further detail below in conjunction with accompanying drawing.
Figure 1 shows that the example structure synoptic diagram that the invention provides air-supporting slide rail system.As shown in Figure 1, air-supporting slide rail system comprises pressurized air control gas circuit 20, vacuum control gas circuit 40 and two air-float guide rails 70.Pressurized air control gas circuit 20 and vacuum control gas circuit 40 can be that the structural parameters of two air-float guide rails are identical to two air-float guide rails while air feed simultaneously to one or more air-float guide rail while air feed in this embodiment.In the pressurized air control gas circuit 20, include filtrator 25, accurate voltage regulating valve 26, first solenoid valve 27, two the first constant voltage air bags 28 and 30, flow control valve 29 and 31 and first pressure switches 32, filtrator 25, accurate voltage regulating valve 26, first solenoid valve 27, the first constant voltage air bag 28, flow control valve 29, the first constant voltage air bag 30, flow control valve 31 and first pressure switch 32 are connected successively by sealing pipeline.Therefore, pressurized air can be successively by inputing to the air flotation zone of air-float guide rail after filtrator 25, accurate voltage regulating valve 26, first solenoid valve 27, the first constant voltage air bag 28, flow control valve 29, the first constant voltage air bag 30, flow control valve 31 and first pressure switch 32.By the line branching after the pressure switch, lead to the air flotation zone of two air-float guide rails simultaneously in this embodiment.Filtrator 25 is used for the particulate of pressurized air is filtered, and when preventing that it from feeding air flotation zone, obstruction is caused in the air supporting hole in the air flotation zone; According to the size accuracy in air supporting hole, can select other filtrator of different accuracy level.Accurate voltage regulating valve 26 is used for according to air flotation zone air pressure requirement on the one hand and regulates the air pressure size, be used for tentatively promoting compressed-air actuated stable gas pressure on the other hand, in this embodiment, the sensitivity of accurate voltage regulating valve is 0.2% of its maximum range, further, the more air-supporting slide rail system of high precision further is provided if desired, and its sensitivity can further improve, and sensitivity can be less than 0.2% of its maximum range.Solenoid valve 27 and pressure switch 32 are electrically connected in (among the figure shown in the dotted line), and the switch motion of solenoid valve 27 and pressure switch 32 is synchronous; According to the induction of gaseous tension situation in 32 pairs of air flotation zones of pressure switch, can send synchronous control signal to solenoid valve 27; Thereby also can make the action of pressure switch 32 synchro switches by solenoid valve 27 being sent control signal; Therefore pressure switch 32 is arranged on from the nearer place of air flotation zone, the gas pressure change induction of air flotation zone is more accelerated, and after solenoid valve is arranged on the accurate voltage regulating valve, generally is near the control end of total system, and is distant from air flotation zone; Solenoid valve 27 can be two-position two-way solenoid valve or two-position three way magnetic valve.The first constant voltage air bag 28 and 30 is used for reaction rapidly and has introduced the embodiment of two air bags in the present embodiment, but can be not limited to two air bags in other embodiments to the air flotation zone make-up gas of air-float guide rail.Pneumatic parameter according to air flotation zone is set demand, and the first constant voltage air bag can be selected different constant voltage values, and wherein the volume of the first constant voltage air bag 30 is greater than the volume of the first constant voltage air bag 28; Because the relative compressed air gas source of the first constant voltage air bag is arranged on the place of close more air flotation zone, when the pressure of air flotation zone during less than predetermined value, pressure switch 32 is opened rapidly, gas in the air bag can be responded to pressure in the gas circuit rapidly less than predetermined value, thereby make-up gas in gas circuit, overcome by the slow characteristics of compressed air source make-up gas reaction, thereby made the air film vibration of air flotation zone less relatively.On the other hand, because the gaseous tension of compressed air source is unbalanced, directly by compressed air source make-up gas in air flotation zone, it is unbalanced and cause the air film vibration of vacuum chamber to cause pressurized air control gas circuit to flow to the air-flow of air flotation zone, by the first constant voltage air bag is set, can obviously overcome this shortcoming.Flow control valve is used for controlling the gas flow of the first constant voltage air bag when the gas circuit make-up gas to be regulated, the air film vibration that causes to the air flotation zone make-up gas because the gas of the first constant voltage air bag to the gas shock of air flotation zone, also helps reducing when differing big with the pressure of the pressure that prevents the first constant voltage air bag and air flotation zone; Flow control valve 29 and 31 is unidirectional conducting, and gas can pass through from left to right in the figure.All direct tracheae connects a flow control valve behind each first constant voltage air bag.
Continue as shown in Figure 1, the vacuum control gas circuit comprises at least one constant voltage air bag 37, accurate voltage regulating valve 38, flow control valve 36, second solenoid valve 35, second pressure switch 34 and filtrator 33.In this embodiment, the middle gas of the vacuum chamber of air-float guide rail can flow to the system that vacuumizes by filtrator 33, second pressure switch 34, second solenoid valve 35, flow control valve 36, the second constant voltage air bag 37 and accurate voltage regulating valve 38 successively.By the line branching after the pressure switch, lead to the vacuum chamber of two air-float guide rails simultaneously in this embodiment.Filtrator 33 is used for the particulate of vacuum chamber is filtered, and prevents that it from entering gas circuit, and various instruments in the gas circuit are resulted in blockage.Accurate voltage regulating valve 38 is used for requiring to regulate the air pressure size according to the air pressure of vacuum chamber on the one hand, be used for tentatively promoting the stable gas pressure of pumped vacuum systems on the other hand to gas circuit gas, in this embodiment, the sensitivity of accurate voltage regulating valve is 0.2% of its maximum range, further, the more air-supporting slide rail system of high precision further is provided if desired, and its sensitivity can further improve, and sensitivity can be less than 0.2% of its maximum range.Solenoid valve 35 and pressure switch 34 are electrically connected in (among the figure shown in the dotted line), and the switch motion of the solenoid valve 35 and second pressure switch 34 is synchronous; According to the induction of gaseous tension (gaseous tension is less relatively) situation in 34 pairs of vacuum chambers of second pressure switch, can send synchronous control signal to solenoid valve 38; Thereby also can make the action of pressure switch 34 synchro switches by solenoid valve 38 being sent control signal second; Second pressure switch 34 is arranged on from the nearer place of vacuum chamber, therefore the gas pressure change induction of vacuum chamber is more accelerated, and solenoid valve is arranged between the flow control valve 36 and second pressure switch 34, generally be near the control end of total system, from vacuum chamber distant (pipeline in the practical application between pressure switch 34 and the solenoid valve 35 is longer); Solenoid valve 27 can be two-position two-way solenoid valve or two-position three way magnetic valve, and solenoid valve 27 is a vacuum solenoid.What need further specify is that solenoid valve 35 can be arranged on any gas circuit position between the accurate voltage regulating valve 38 and second pressure switch 34.The second constant voltage air bag 37 is used for reaction rapidly to the vacuum chamber extracting gases of air-float guide rail, sets demand according to the pneumatic parameter of vacuum chamber, and the second constant voltage air bag 37 can be selected different constant voltage values, can adopt in other embodiments to be not limited to a constant voltage air bag.Because the second constant voltage air bag relative vacuum source is arranged on the place of close more vacuum chamber, when the gaseous tension of vacuum chamber during greater than predetermined value, pressure switch 33 is opened rapidly, pressure is less than the pressure in the vacuum chamber in the air bag, the second constant voltage pneumatophore can be responded to rapidly, thereby directly the gas in the extracting vacuum chamber has overcome by the relatively slow characteristics of vacuum source system extracting gases reaction, thereby makes the air film vibration of vacuum chamber less relatively.On the other hand, because the gaseous tension of vacuum source system is unbalanced, directly by the gas in the vacuum source system extracting vacuum chamber, it is unbalanced and cause the air film vibration of vacuum chamber to cause vacuum chamber to flow to the air-flow of vacuum control gas circuit, by the second constant voltage air bag is set, can obviously overcome this shortcoming.Flow control valve 36 is used for controlling the gas flow of the second constant voltage air bag 37 when the gas circuit extracting gases to be regulated, the air film vibration that causes to the vacuum chamber extracting gases because the second constant voltage air bag extracting gases to the gas shock of vacuum chamber, also helps reducing when differing big with the pressure of the pressure that prevents the second constant voltage air bag and vacuum chamber; Flow control valve 36 is unidirectional conducting, and gas can pass through from right to left in the figure.It may be noted that the time, according to actual needs, a plurality of second constant voltage air bag and flow control valves can be set in the vacuum control gas circuit, behind each first constant voltage air bag a flow control valve is set all.
Continue as shown in Figure 1, when air-float guide rail runs into special circumstances, the variation in thickness that may cause the air film of air-float guide rail forms micro breadth oscillation, and this micro breadth oscillation to be gaseous tension by the air flotation zone in the air-float guide rail cause greater than predetermined value rapidly less than the gaseous tension of predetermined value, vacuum chamber rapidly.The gaseous tension of air flotation zone is during rapidly less than predetermined value, first pressure switch 32 and solenoid valve 27 are opened rapidly, because the first constant voltage air bag is nearer from air flotation zone, therefore can reflect the low-pressure situation of air flotation zone rapidly, pressure in the first constant voltage air bag is greater than the pressure in the air flotation zone, the first constant voltage air bag is inflated in air flotation zone by flow control valve 29, thereby the pressure in the air flotation zone is returned near the predetermined value.The gas make-up of the first constant voltage air bag is behind air flotation zone, air compressor by pressurized air control gas circuit accurate filter 25 accurate voltage regulating valves 26 and solenoid valve 27 make-up gas to the first constant voltage air bags to constant atmospheric pressure value, because the gas circuit of this process is long, so reacting phase replenishes process to being slower than the above-mentioned first constant voltage air bag to air flotation zone.After last air pressure was all stablized, first pressure switch 32 and solenoid valve 27 were closed.In this process, be not by pressure gas directly to the air flotation zone make-up gas, therefore also avoided generally because the influence that the gaseous tension fluctuation of pressure gas impacts to air flotation zone has greatly reduced the air film vibration.Precision pressure variable valve 26 also can further reduce the gaseous tension fluctuation of pressure gas.
In like manner, in the vacuum control gas circuit, the gaseous tension of vacuum chamber is during rapidly greater than predetermined value, second pressure switch 34 and solenoid valve 35 are opened rapidly, because the second constant voltage air bag 37 is nearer from vacuum chamber, therefore can reflect the high pressure situation of vacuum chamber rapidly, the pressure in the second constant voltage air bag 37 is less than the pressure in the vacuum chamber, the second constant voltage air bag 37 passes through flow control valve 36 extracting gases in vacuum chamber, thereby the pressure in the vacuum chamber is returned near the predetermined value.After the second constant voltage air bag is drawn into the gas of vacuum chamber, the accurate voltage regulating valve that passes through the vacuum control gas circuit 38 in vacuum pressure source extracts the gas of the second constant voltage air bag 37 to constant atmospheric pressure value, because the gas circuit of this process is long, so reacting phase is to being slower than the above-mentioned second constant voltage air bag extracting vacuum chamber gas process.After last air pressure was all stablized, second pressure switch 34 and solenoid valve 35 were closed.In this process, be not by the vacuum pressure source directly to the vacuum chamber extracting gases, therefore also avoided generally because the influence that the gaseous tension fluctuation in vacuum pressure source impacts to vacuum chamber has greatly reduced the air film vibration.Precision pressure variable valve 38 also can further reduce the gaseous tension fluctuation of vacuum source.
Figure 2 shows that the air-float guide rail structure embodiment synoptic diagram in the air-supporting slide rail system that Fig. 1 provides.The air-float guide rail of this embodiment combines application with pressure gas shown in Figure 1 control gas circuit and vacuum control gas circuit, can realize reducing better the air film vibration and guarantee air supporting rigidity.As shown in Figure 2, air-float guide rail is overlooked and is that rectangle, air-float guide rail comprise the identical air flotation zone of three form parameters 701, two vacuum chambers that form parameter is identical 702, and as shown in the figure, three air flotation zones 701 and two vacuum chambers 702 alternately rearrange air-float guide rail.According to the shape needs of air-float guide rail, three above odd number air flotation zones and plural even number vacuum chamber can be set, for example, can be five air flotation zones and four alternately arrangements of vacuum chambers, air flotation zone is arranged in the two ends of air-float guide rail all the time.The central axis of air-float guide rail drops in the middle air flotation zone, other air supportings outside the central axis are with the central axis symmetric configuration of air-float guide rail, also with the central axis symmetric configuration of air-float guide rail, simultaneously, middle air flotation zone self is also with the central axis rotational symmetry for vacuum chamber.Wherein, each air flotation zone 701 all includes four air supporting hole 703a, four air supporting balancing slit 703b, air supporting hole 703a is a symmetric configuration in the plan view plane of each air flotation zone 701, and air supporting balancing slit 703b also is a symmetric configuration in the plan view plane of each air flotation zone 701.All air supporting hole 703a pore sizes, material are in full accord, are made by ruby, can calculate the aperture parameters that air supporting hole 703a is set by formula (1), and Reynolds number is dropped to below 2000.All air supporting balancing slit 703b degree of depth, width are also in full accord.
Continue as shown in Figure 2, the inside of three air flotation zones 701 communicates, concentrate to three air flotation zone 701 air feed by first pipe adapter 708, wherein two first pipe adapters 708 shown in the figure are to control gas circuit with pressure gas shown in Figure 1 simultaneously to be connected, thereby can realize that the pressure gas that is full of certain air pressure in the air flotation zone forms air film.The two ends of the internal path of three air flotation zones 701 have by plug 705 to be blocked.The inside of two vacuum chambers 702 also communicates, and is bled through aspirating hole 709 by second pipe adapter 706, and the two ends of the internal path of two vacuum chambers 702 are blocked by plug 704.Aspirating hole 709 is positioned at the positive center of vacuum chamber 702, and is positioned on the axis of symmetry (perpendicular to above-described central axis) of air-float guide rail, and two aspirating hole 709 diameters are in full accord, can guarantee the consistance of the pressure and other parameters of different vacuum chambers like this.Wherein two second pipe adapters 706 shown in the figure are simultaneously to connect passage mutually with vacuum control gas circuit shown in Figure 1, thereby can realize keeping in the vacuum chamber relative vacuum atmospheric pressure state.
Continue as shown in Figure 2, this air-float guide rail also comprises four insulated chambers 707, and insulated chamber 707 is used to isolate air flotation zone 701 and vacuum chamber 702, and it is in the layout of between air flotation zone 701 and the vacuum chamber 702, size dimension is finished unanimity, also with respect to the central axis symmetric configuration of air-float guide rail.This air-float guide rail adopts aviation aluminium or sintered ceramic to make.
Air-float guide rail shown in Figure 2 is applied to the air-supporting slide rail system of Fig. 1, the structural symmetry layout of air-float guide rail, inner identical, pressure homogeneous between the air flotation zone; Each air flotation zone all has four air supporting holes, and four air supporting balancing slits are formed, and air supporting hole and air supporting balancing slit all are symmetric configuration on each air flotation zone; This just guarantees that air flotation zone pressure is in full accord, can guarantee that when bearing the external change load air-film thickness is constant.The symmetric configuration characteristics of air flotation zone and vacuum chamber also can improve the air supporting rigidity of system, can effectively eliminate under the situation such as acceleration and deceleration in the work stage motion influence to air supporting rigidity.Therefore among this embodiment, the air-film thickness that can guarantee air-float guide rail is that 8 microns, air supporting rigidity are up to 10 8N/m.Simultaneously; because the control technology of having used pressurized air control gas circuit and vacuum control gas circuit to combine; make air-supporting slide rail system can regulate supply gas pressure and vacuum values simultaneously very easily; by accurate adjusting coupling to the pressure of pressurized air control gas circuit, vacuum air-channel two-way gas; the air film vibration of air-supporting slide rail system reduces greatly, even also can effectively protect accurate air-float guide rail under unexpected state.This air-supporting slide rail system embodiment is applied in the litho machine ultraprecise work stage.But other chip mounters can adopt the present invention program in the contour performance semiconductor of the ball bonding machine high-performance motion table apparatus.
Under situation without departing from the spirit and scope of the present invention, can also constitute many very embodiment of big difference that have.Should be appreciated that except as defined by the appended claims, the invention is not restricted at the specific embodiment described in the instructions.

Claims (15)

1. an air-supporting slide rail system comprises pressurized air control gas circuit, vacuum control gas circuit and air-float guide rail, and air-float guide rail comprises air flotation zone and vacuum chamber; It is characterized in that described pressurized air control gas circuit comprises the first constant voltage air bag, is used for the air flotation zone make-up gas to described air-float guide rail; Described vacuum control gas circuit comprises the second constant voltage air bag, is used for extracting the gas of the vacuum chamber of described air-float guide rail.
2. air-supporting slide rail system according to claim 1 is characterized in that, described pressurized air control gas circuit also comprises filtrator, accurate voltage regulating valve, first solenoid valve, flow control valve and first pressure switch; Described filtrator, accurate voltage regulating valve, first solenoid valve, the first constant voltage air bag, flow control valve and first pressure switch are connected and lead to the air flotation zone of air-float guide rail successively by sealing pipeline.
3. air-supporting slide rail system according to claim 1 is characterized in that, described vacuum control gas circuit also comprises accurate voltage regulating valve, flow control valve, second solenoid valve, second pressure switch and filtrator; Described accurate voltage regulating valve, the second constant voltage air bag, flow control valve and filtrator are connected and lead to the vacuum chamber of air-float guide rail successively by sealing pipeline, second pressure switch is serially connected with between vacuum chamber and the flow control valve, and second solenoid valve is serially connected with between the accurate voltage regulating valve and second pressure switch.
4. air-supporting slide rail system according to claim 2, it is characterized in that, comprise two or more first constant voltage air bags and two or more flow control valves in the described pressurized air control gas circuit, each constant voltage air bag is directly connected in each flow control valve by sealing pipeline.
5. air-supporting slide rail system according to claim 2 is characterized in that, described first solenoid valve is two-position two-way solenoid valve or two-position three way magnetic valve.
6. air-supporting slide rail system according to claim 3 is characterized in that, described second solenoid valve is the vacuum special electromagnetic valve, and described vacuum special electromagnetic valve is two-position two-way solenoid valve or two-position three way magnetic valve.
7. according to claim 2 or 3 described air-supporting slide rail systems, it is characterized in that described flow control valve is the one-way flow variable valve.
8. according to claim 2 or 3 described air-supporting slide rail systems, it is characterized in that the sensitivity of described accurate voltage regulating valve is less than 0.2% of its maximum range.
9. air-supporting slide rail system according to claim 1, it is characterized in that, described air-float guide rail comprises odd number air flotation zone and the plural even number vacuum chamber more than three, air flotation zone and vacuum chamber are alternately arranged mutually and are formed air-float guide rail, and air flotation zone is with the central axis symmetric configuration of air-float guide rail, the vacuum chamber central axis symmetric configuration with air-float guide rail.
10. air-supporting slide rail system according to claim 9 is characterized in that, described air flotation zone comprises four air supporting holes and four air supporting balancing slits, described air supporting hole symmetric configuration in the air flotation zone plane, described air supporting balancing slit symmetric configuration in the air flotation zone plane.
11. air-supporting slide rail system according to claim 10 is characterized in that, the pore size unanimity in described air supporting hole, the degree of depth unanimity of described air supporting balancing slit, the width unanimity of air supporting balancing slit.
12. air-supporting slide rail system according to claim 11 is characterized in that, the aperture D in described air supporting hole calculates according to following formula:
Re=ρuD/m u
Wherein, Re is a Reynolds number, and ρ is a fluid density, and u is a fluid velocity, and D is a pipe diameter, m uBe fluid viscosity; By being set, air supporting aperture parameters D make Re be less than or equal to 2000.
13. air-supporting slide rail system according to claim 9 is characterized in that, described air-float guide rail also comprises the insulated chamber that places between described vacuum chamber and the air flotation zone, the described relatively central axis symmetric configuration of insulated chamber.
14. air-supporting slide rail system according to claim 9, it is characterized in that, all air flotation zones connect by the gas path, and by being arranged on first pipe adapter on the described gas path to all air flotation zone air feed, first pipe adapter is connected in pressurized air control gas circuit simultaneously.
15. air-supporting slide rail system according to claim 9, it is characterized in that, all vacuum chambers connect by the gas path, and by being arranged on second pipe adapter on the described gas path to all vacuum chamber extracting airs, second pipe adapter is connected in the vacuum control gas circuit simultaneously.
CN2009100458714A 2009-01-23 2009-01-23 Air-supporting slide rail system Active CN101504513B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102444670A (en) * 2010-10-15 2012-05-09 上海微电子装备有限公司 Gas floating structure
CN102789136A (en) * 2011-05-19 2012-11-21 上海微电子装备有限公司 Air-flotation support system
CN104074867A (en) * 2014-06-27 2014-10-01 上海仙丰智能设备有限公司 Constant-pressure air flotation guide rail system
CN104162831A (en) * 2014-08-06 2014-11-26 陈菊芳 Pneumatic guide rail type grinding machine
CN104749895A (en) * 2013-12-30 2015-07-01 上海微电子装备有限公司 Double air floatation large-scale substrate transmission apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100428057C (en) * 2006-06-07 2008-10-22 上海微电子装备有限公司 Air float support base for regulating air diaphragm two-way rigidity
CN101241314B (en) * 2008-03-11 2010-06-23 上海微电子装备有限公司 6 freedom degrees precision positioning station capable of compensating Z-direction position

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102444670A (en) * 2010-10-15 2012-05-09 上海微电子装备有限公司 Gas floating structure
CN102789136A (en) * 2011-05-19 2012-11-21 上海微电子装备有限公司 Air-flotation support system
CN102789136B (en) * 2011-05-19 2014-08-20 上海微电子装备有限公司 Air-flotation support system
CN104749895A (en) * 2013-12-30 2015-07-01 上海微电子装备有限公司 Double air floatation large-scale substrate transmission apparatus
CN104074867A (en) * 2014-06-27 2014-10-01 上海仙丰智能设备有限公司 Constant-pressure air flotation guide rail system
CN104162831A (en) * 2014-08-06 2014-11-26 陈菊芳 Pneumatic guide rail type grinding machine

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