CN101488439A - Lamp unit - Google Patents
Lamp unit Download PDFInfo
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- CN101488439A CN101488439A CNA2009100034863A CN200910003486A CN101488439A CN 101488439 A CN101488439 A CN 101488439A CN A2009100034863 A CNA2009100034863 A CN A2009100034863A CN 200910003486 A CN200910003486 A CN 200910003486A CN 101488439 A CN101488439 A CN 101488439A
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- lamp
- tube
- conductor
- electrode
- trigger
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/547—Igniting arrangements, e.g. promoting ionisation for starting using an auxiliary electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/305—Flat vessels or containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
- H01J61/80—Lamps suitable only for intermittent operation, e.g. flash lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
The invention provides a lamp unit which restrains insulation breakdown between electrodes and triggering components before lighting up and reliably flashes to light up. Rare gas as luminious gas is enclosed into the inner of a rod shaped luminotron (25), a pair of electrodes are arranged relatively. A triggering component (3) is arranged on the outside of the luminotron (25). The triggering component (3) is composed of a trigger tube (31) in the straight tube with components having medium, e.g. quartz glass and a conductor (34) arranged in the inner of the trigger tube (31). The length of the conductor (34) is the same as the length of a spacial area between the electrodes and is shorted than the distance L1 of the electrodes, therefore, the insulation breakdown is restrained between the electrodes (23, 24) and the triggering component (3) before lighting up. In addition, the conductor (34) is arranged in the inner of the the trigger tube (31) having medium, lighting up is processed through applying voltage on the conductor (34).
Description
Technical field
The present invention relates to be used in the lamp unit of the annealing device of semiconductor manufacturing or film crystal pipe manufacturer.
Background technology
In semiconductor manufacturing or film crystal pipe manufacturer, use annealing device with lamp unit, this lamp unit possesses photoflash lamp.For example form the operation of (the impurity activate that ion injects) shallow diffusion layer (pn joint), use above-mentioned lamp annealing device on the Silicon Wafer top layer.
In above-mentioned annealing operation, especially to avoid the problem of the profile conquassation of the impurity that ion injected or formed pattern volatilization etc., and must obtain the excellent activity state of impurity.
In addition, on the film crystal pipe manufacturer that display panels is used, also must be really and make the semiconductor film activate that is formed on the substrate equably.Especially utilize the situation of glass substrate, when realizing this annealing in process, must prevent from the superheated of substrate is suppressed the generation of flexible or " warpage " of substrate.
Photoflash lamp that this kind annealing device is possessed and the triggering lamp unit that member constituted for example are described in the patent documentation 1.
Fig. 9 is the key diagram of the lamp unit 1 put down in writing of expression patent documentation 1.Fig. 9 (a) is the profile of expression along the length direction of photoflash lamp 2, and Fig. 9 (b) is the profile (the B-B profile of Fig. 9 (a)) of expression along the direction vertical with respect to the length direction of photoflash lamp 2.
In the outside of the luminous tube 25 of photoflash lamp 2, along the length direction of luminous tube 25 be equipped with as by rod-shaped conductor 34 that tungsten constituted as triggering members 3.At the two ends of this rod-shaped conductor 34, the belt 5 that conductor 34 is fixed in photoflash lamp 2 is reeled and is located at the outer peripheral face of luminous tube.
Figure 10 is the circuit configuration example that the lamp light source device of photoflash lamp 2 is lighted in expression.
The electrode 23,24 of photoflash lamp 2 is connected to lamp lamp circuit 50, is connected to trigger point circuit for lamp 53 and constitute the conductor 34 that triggers member 3.
So, by lighting photoflash lamp 2, the flash of light that becomes the radiating light that just can obtain the having high radiance at short notice state of lighting a lamp.
Patent documentation 1: TOHKEMY 2001-185088 communique
Summary of the invention
As recent people's expectation, for example form the operation of (the impurity activate that ion injects) shallow diffusion layer (pn joint), the expectation that has the part that to be formed on the diffusion layer on Silicon Wafer top layer to form on the Silicon Wafer top layer more shallowly.For this reason, consider also to lack than prior art, thereby the heated layer on for example Silicon Wafer top layer is only heated in the position more shallow than prior art by the flash pulse that makes photoflash lamp 2 is wide.
Even, form the necessary radiation briliancy of diffusion layer also much at one, thereby become the charging voltage rising that makes to the capacitor charging because chopped pulse is wide.
If use existing lamp unit 1 charging voltage of capacitor is risen by existing value, then before conductor 34 applies trigger voltage, can be at electrode 23,24 and to trigger member 3 be to produce insulation breakdown between the conductor 34, and electric current is at a side electrode and trigger and flow the situation that has this electric current to flow along luminous tube 25 outsides between the member 3.So, between the electrode that triggers member 3 and the opposing party, flow, can make lamp 2 begin to light a lamp, and on capacitor, can produce the problem that can't be applied to desired charging voltage by electric current.
The present invention finishes in order to solve the above problems, the insulation breakdown before the objective of the invention is to be to provide a kind of lamp unit, this lamp unit can suppress lamp to begin to light a lamp between electrode and triggering member, and can positively glisten and light a lamp.
In the present invention, solve above-mentioned problem as follows.
(1) a kind of lamp unit, comprise: by pair of electrodes, this electrode is located at the inner photoflash lamp that luminous tube constituted, and the triggering conductor of being located at the outside of above-mentioned luminous tube, it is characterized by: in the outside of above-mentioned luminous tube, along the axle that links above-mentioned pair of electrodes, at least in the whole total length of this electrode interpolar, setting has the trigger tube of medium, also want decompression state with making than atmospheric pressure in this trigger tube, or at inside inclosure inert gas, in this trigger tube, the length conductor shorter than above-mentioned interelectrode distance on the above-mentioned interelectrode space segment zone is set, and at least a portion of this conductor is disposed on the above-mentioned electrode.That is, across the zone that will be provided with electrode on the zone of the extend radially of luminous tube and interelectrode space segment is disposed conductor on the zone of the extend radially of luminous tube, and, make below above-mentioned interelectrode distance the length on the zone of the above-mentioned interelectrode space segment of this conductor.
(2) in above-mentioned (1), with above-mentioned conductor arrangement in the zone on interelectrode space segment on the above-mentioned electrode.That is, only on the zone of the extend radially of luminous tube, dispose above-mentioned conductor, and interelectrode space segment is not being disposed above-mentioned conductor on the zone of the extend radially of luminous tube in the zone that will be provided with electrode.
In the present invention, can obtain following effect.
(1) in the outside of luminous tube, along the axle that links above-mentioned pair of electrodes, at least the whole total length of this electrode interpolar, setting has the trigger tube of medium, also want decompression state with making than atmospheric pressure in this trigger tube, or at inside inclosure inert gas, in this trigger tube, the length conductor shorter than above-mentioned interelectrode distance on the zone of above-mentioned interelectrode space segment is set, and at least a portion of this conductor is disposed on the above-mentioned electrode, thereby can increase the required energy of insulation breakdown between electrode and conductor, and can suppress the insulation breakdown between the electrode of lamp before beginning to light a lamp and the triggering member.In addition, according to the length of this conductor and the required energy size of variable above-mentioned insulation breakdown thus, can put on desired current potential the capacitor that is connected electrode.
In addition, in interelectrode whole total length, setting has the trigger tube of medium, thereby can make the distance of trigger tube and electrode close, in addition, between electrode and conductor, can be situated between and establish the decompression state or the inert gas of the thick of trigger tube and trigger tube inside.
So, when lamp begins to light a lamp, if there is voltage to be applied in conductor, the trigger tube that then has conductor in inside has medium, thereby current potential puts on trigger tube, and have electric current to flow into the trigger tube approaching with it from the electrode of hot side, again can be to the electrode inflow current of the low potential side of close trigger tube.
That is, by making pair of electrodes and trigger tube close, insulation breakdown in the time of can easily finishing lamp and begin to light a lamp, can positively utilize the flash of light of photoflash lamp to light a lamp, make the desired energy that is stored in capacitor be transfused to photoflash lamp immediately, and with the wide radiating light that obtains having high activity of desired pulse.
(2) with above-mentioned conductor arrangement in the zone on interelectrode space segment on the above-mentioned electrode.Thus, can further suppress the electrode and the insulation breakdown that trigger member between of lamp before beginning to light a lamp, in addition, the light that discharge produced that utilization is taken place between electrode can not hindered by above-mentioned conductor, and can effectively utilize the light from lamp.
Description of drawings
Fig. 1 (a) is the key diagram of the lamp unit of expression the 1st embodiment of the present invention to Fig. 1 (c).
Fig. 2 is the key diagram of the lamp unit of expression the 2nd embodiment of the present invention.
Fig. 3 is the key diagram of the lamp unit of expression comparative example 1.
Fig. 4 is the key diagram of the lamp unit of expression comparative example 2.
Fig. 5 is the key diagram of the experiment condition of expression experiment 1.
Fig. 6 is the key diagram of the experimental result of expression experiment 1.
Fig. 7 is the key diagram of the experimental result of expression experiment 2.
Fig. 8 is the key diagram of the experimental result of expression experiment 3.
Fig. 9 is the key diagram of the existing lamp of expression unit.
Figure 10 is the figure of configuration example of the lamp light source device of expression existing lamp unit.
Symbol description
1: the lamp unit; 2: photoflash lamp; 21: one sides' lead-in wire; 22: the opposing party's lead-in wire;
23: anode; 24: negative electrode; 25: luminous tube; 26: the inside of luminous tube; 3: trigger member
31: trigger tube; 32: the inside of trigger tube; 33: sealing; 34: conductor; 35: paper tinsel
36: outside lead; 41: the 1 supporters; 42: the 2 supporters;
L1: distance between the electrode of opposite of pair of electrodes (anode and negative electrode);
L2: the total length of the length direction of luminous tube; L3: the external diameter of luminous tube;
L4: the internal diameter of luminous tube; L5: the total length of trigger tube length direction;
L6: the external diameter of trigger tube; L7: the internal diameter of trigger tube;
L8: the total length of the length direction of trigger tube conductor inside;
L9: be equipped on the distance that the luminous tube of the front end of the front end of trigger tube conductor inside and anode extends at tube axial direction
L10: with the length of the space segment between electrode of opposite along the trigger tube of the part of the outside of the luminous tube on the zone that luminous tube radially extends
Embodiment
With Fig. 1 the 1st embodiment of the present invention is described.
Fig. 1 is the key diagram of the lamp unit 1 of expression the 1st embodiment.Fig. 1 (a) is the profile of the length direction of the photoflash lamp 2 that possessed along lamp unit 1 of expression, and Fig. 1 (b) is the profile (the A-A profile of Fig. 1 (a)) of expression along the direction of the length direction of the photoflash lamp 2 that is possessed perpendicular to lamp unit 1.Fig. 1 (c) is the key diagram of photoflash lamp 2 and the support structure that triggers member 3 of the lamp unit 1 of expression pie graph 1 (a).In Fig. 1, at the position mark prosign identical with position shown in Figure 9.
In the present embodiment, shown in Fig. 1 (a) and Fig. 1 (b), lamp unit 1 is made of photoflash lamp 2 and triggering member 3.
This lead-in wire 21,22nd is for example formed by tungsten (W).In addition, the anode 23 of being located at a side lead-in wire 21 front ends is for example formed by tungsten (W), and the negative electrode 24 of lead-in wire 22 front ends of being located at the opposing party is for example by containing barium aluminate salt (BaAl
2O
3) tungsten (W) form.
In the outside of straight tube-like luminous tube 25, be provided with and the triggering member 3 parallel along this outside.
This triggering member 3 be by: have the straight tube-like trigger tube 31 that member constituted of the such medium of quartz glass for example, and the conductor 34 that for example tungsten (W) that is provided with in the mode at the extension of central axis of this trigger tube 31 is constituted is constituted.End (in Fig. 1 (a), the end of negative electrode 24 sides of trigger tube 31) at trigger tube 31 is formed with sealing 33.The sealing 33 of trigger tube 31 is to make it the body that Sealing Method (ピ Application チ シ-Le method) forms for example quartz glass that is extended from an end of trigger tube 31 that compresses of conquassation by making molten condition.In the inside of sealing 33, be embedded with the metal forming 35 that for example molybdenum (Mo) of electric connecting conductor 34 and outside lead 36 is constituted.
In addition, shown in Fig. 1 (c), the 1st supporter 41 and the 2nd supporter 42 are connected to the outside of luminous tube 25 respectively, and the outside of trigger tube 31, and lamp unit 1 is to be urged and clamping by the 1st supporter 41 and the 2nd supporter 42.
In addition, the sealing 33 of this trigger tube 31 also can be by based on the body that forms for example quartz glass that extends from an end of trigger tube 31 in the so-called collapsed seal method (シ ユ リ Application Network シ-Le method) to inner pressure relief of making under the molten condition.
In addition, the sealing 33 of trigger tube 31, also can not bury metal forming 35 underground, and the intermediate glass of heating (glass of the coefficient of linear expansion in the middle of conductor 34 and trigger tube 31) directly is wound on the periphery of conductor 34, the graded Sealing Method (グ レ-テ Star De シ-Le method) of welded seal on quartz glass.
So, the inside 32 of sealed trigger tube 31 for example makes and is depressurized to the following state of 0.01Torr, or encloses for example above nitrogen (N of 10Torr
2) the such inert gas of gas.
The trigger tube 31 that triggers member 3 is to be across to be provided with on the zone that pair of electrodes is anode 23 and negative electrode 24 (also to be about to be provided with electrode 23,24 part is in the zone of the extend radially of luminous tube), and between electrode on the space segment of (distance L 1) (also being about to the zone of interelectrode space segment at the extend radially of luminous tube), its total length comprehensively and luminous tube 25 butts and be equipped on the part of luminous tube 25 outsides concurrently at least.
In addition, be located at the conductor 34 of the inside 32 of trigger tube 31, in the present embodiment, the electrode 23 of conductor 34, length on the zone of 24 space segment is pair of electrodes 23,24 apart from below half of L1, is equipped on (also being about to the zone of interelectrode space segment at the extend radially of luminous tube) on the space segment of (distance L 1) between electrode and is provided with on a side the zone of electrode (for example electrode 24) (that is, will be provided with the part of electrode on the zone of the extend radially of luminous tube).
In addition, the length of conductor 34 is not limited to above-mentioned length, and the length on the zone of the space segment that electrode is 23,24 makes short just more passable than interelectrode distance L1, is mainly according to the necessary energy size of insulation breakdown etc. suitably to select.
Fig. 2 is the key diagram of the lamp unit 1 of the present invention the 2nd embodiment, the profile of the length direction of the photoflash lamp 2 that expression is possessed along lamp unit 1.Same along profile and Fig. 1 (b) perpendicular to the direction of the length direction of photoflash lamp 2.
In Fig. 2, the trigger tube 31 that triggers member 3 is with shown in Figure 1 same, across being provided with on the part that pair of electrodes is anode 23 and negative electrode 24 and between electrode on the space segment of (distance L 1), at least its total length comprehensively and luminous tube 25 butts is equipped on the part of luminous tube 25 outsides concurrently.
In addition, be located at the conductor 34 of the inside 32 of trigger tube 31, in the present embodiment, be equipped on the zone of the electrode (for example electrode 24) that is provided with a side (that is, will be provided with the zone of radially extending of the part of electrode at luminous tube).That is the conductor 34 of being located at the inside 32 of trigger tube 31 is provided on the space segment that is not positioned at (distance L 1) between the electrode of opposite 23,24.
Other constitute with the 1st embodiment shown in Figure 1 same, and in the inside that is sealed 26 of the bar-shaped luminous tube 25 that for example quartz glass constituted, enclosing for example has xenon (Xe) rare gas that gas constituted as luminous gas.In addition, in the inside 26 of bar-shaped luminous tube 25,, dispose the pair of electrodes (anode 23 and negative electrode 24) that is connected to bar-shaped lead-in wire 21,22 relatively in mode along its extension of central axis.The bar-shaped lead-in wire 21,22 that is connected to each electrode (anode 23 and negative electrode 24) is outstanding from the two ends of the length direction of luminous tube 25.
Below enumerate the numerical example of the lamp unit of the 1st, the 2 embodiment.
The total length L2 of the length direction of luminous tube 25 is 580mm, and 23,24 at electrode is 500mm apart from L1.The external diameter L3 of luminous tube 25 is 13mm, and the internal diameter L4 of luminous tube 25 is 10.5mm, and xenon (Xe) gas of enclosing the inside 26 of luminous tube 25 is 450Torr.
The total length L5 of the length direction of trigger tube 31 is 540mm, and the external diameter L6 of trigger tube 31 is 4mm, and the internal diameter L7 of trigger tube 31 is 2mm.
Being disposed at the front end of conductor 34 of inside 32 of trigger tube 31 and anode 23 distance L 9 at tube axial direction, is 250mm at the 1st embodiment, and is 550mm at the 2nd embodiment.
The lamp unit 1 of the 1st, the 2nd above-mentioned embodiment is in the annealing device that possesses, shown in Fig. 1 (c), the luminous tube 25 of photoflash lamp 2 and the trigger tube 31 that triggers member 3, the 1st supporter 41 of the outside by being connected to luminous tube 25 and the 2nd supporter 42 that is connected to the outside of trigger tube 31 are urged clamping, not shown lamp 2 power supplys are electrically connected on the pair of electrodes (anode 23 and negative electrode 24) of photoflash lamp 2, conductor 34 in the inside 32 of being located at the trigger tube 31 that triggers member 3 is electrically connected with not shown triggering power supply.
In addition, lamp 2 is before lighting a lamp, and desired voltage is applied on the not shown capacitor that is located between electrode and not shown lamp 2 power supplys by the power supply of not shown lamp 2, thus storage power.
The 1st, among the 2nd embodiment, with above-mentioned electrode 23, the length of the conductor 34 on the zone of 24 space segment, as below half of above-mentioned interelectrode distance L1, and owing at least one portion with this conductor 34 is disposed on the above-mentioned electrode, thereby the insulation distance of extensible electrode 23,24 and conductor 34.
So, before lamp 2 is lit a lamp, can increase the insulation breakdown energy needed between electrode 23,24 and the conductor 34.That is in electrode 23,24 and the insulation breakdown that triggers between the member 3, thereby it is mobile to be suppressed between electrode 23,24 and the triggering member 3 electric current before can being suppressed at lamp 2 and lighting a lamp.Desired current potential can be put on the illustrated capacitor of not giving of electrode 23,24 thus.
Especially, test shown in the experimental result of Fig. 7 of 2 conductor 34 of the inside 32 by will being located at trigger tube 31 as described later, make 23,24 half following length of electrode apart from L1, thereby before lamp 2 is lit a lamp, can increase the insulation breakdown energy needed between electrode 23,24 and the conductor 34.
Especially, as the 2nd embodiment,, can more increase lamp 2 required energy of insulation breakdown between electrode 23,24 and the conductor 34 before lighting a lamp by conductor 34 only being equipped on the zone of the electrode that is provided with a side.In addition, above-mentioned conductor 34 can not hamper the light that discharge produced that utilization is taken place between electrode.So, can be used to light efficiently from lamp.
In addition, the lamp unit 1 of the 1st, the 2 embodiment by conductor 34 being located at the inside 32 of the trigger tube 31 with medium, between electrode 23,24 and conductor 34, can be situated between and establish the thickness of trigger tube 31, and the decompression state or the inert gas of the inside 32 of trigger tube 31.
The 1st, the lamp unit 1 of the 2nd embodiment, when lamp 2 is lit a lamp, when voltage puts on conductor 34, then owing to had medium, thereby there is current potential to put on trigger tube 31 immediately, can will be stored in the electrode 23 that is connected to photoflash lamp 2 at inner 32 trigger tubes 31 with conductor 34, desired energy in 24 the capacitor is imported photoflash lamp 2 immediately, and can obtain with the wide radiating light with high activity of desired pulse.
Especially, test as described later shown in the experimental result of Fig. 6 of 1, enclose inert gases, before lamp 2 is lit a lamp, just can increase the insulation breakdown energy needed between electrode 23,24 and the conductor 34 by inside 32 at trigger tube 31.
In addition, the lamp unit 2 of the 1st, the 2 embodiment is to make with 23,24 of pair of electrodes by the length with trigger tube 31 to be equal at least apart from L1, then can make trigger tube 31 approaching with the distance of pair of electrodes (anode 23 and negative electrode 24).
So, when lamp 2 is lit a lamp, being applied in conductor 34 by voltage has current potential to put on trigger tube 31, then electric current flows to the trigger tube 31 of close this electrode from the electrode 23 of hot side, electric current flows along the length direction of trigger tube 31 in the inside 26 of luminous tube 25 in addition, can make electric current flow into the electrode 24 of the low potential side that approaches trigger tube 31 on this basis.That is, by making pair of electrodes 23,24 and trigger tube 31 close, then be easy to realize the insulation breakdown when lamp 2 is lit a lamp, and positively can utilize the flash of light of photoflash lamp 2 to light a lamp.
For the effect of the lamp unit 1 of representing the invention described above, use following lamp of the present invention unit 1 and comparative example 1,2 to carry out following experiment 1～3.
Fig. 3 represents the formation of above-mentioned comparative example 1.
Fig. 3 and above-mentioned Fig. 1, Fig. 2 are same, are the profiles of the length direction of the photoflash lamp 2 that possessed along lamp unit 1, with Fig. 1, the identical identical symbol of position mark shown in Figure 2.
Lamp unit shown in Figure 3 makes longer than interelectrode distance L1 with constituting the conductor 34 that triggers member 3 in the length of the tube axial direction of luminous tube 25.
That is, the trigger tube 31 that triggers member 3 is across being provided with on the zone that reaches the space segment of (distance L 1) between electrode on the zone that pair of electrodes is anode 23 and negative electrode 24, be the part of luminous tube 25 outsides, at least its total length comprehensively and luminous tube 25 butts set concurrently.
In addition, be located at the conductor 34 of the inside 32 of trigger tube 31, same with above-mentioned trigger tube 31, be across be provided with on the zone that pair of electrodes is anode 23 and negative electrode 24 and electrode between on the zone of space segment of (distance L 1), its total length is equipped on the part of luminous tube 25 outsides comprehensively at least.
Fig. 4 represents above-mentioned comparative example 2.
Fig. 4 and above-mentioned Fig. 1, Fig. 2 are same, are the profiles of the length direction of the photoflash lamp 2 that possessed along lamp unit 1, with Fig. 1, the identical position mark prosign in position shown in Figure 2.
Lamp unit shown in Figure 4 is that the trigger tube 31 that will constitute trigger member 3 makes below half of interelectrode distance L1 in the length of the tube axial direction of luminous tube 25, and the length of conductor 34 is made the length same with trigger tube 31.
(1) experiment 1
In experiment 1, be directed to existing lamp unit (with reference to Fig. 9) with trigger tube and lamp unit and come the comparison proof voltage with trigger tube.
That is, as existing lamp unit 1, be located at the outside of the luminous tube 25 of photoflash lamp 2 with triggering member 3, to constitute existing lamp unit 1 shown in Figure 9.In addition,, be located at the present embodiment of luminous tube 25 outsides, constitute lamp unit 1 shown in Figure 2 as triggering member 3 as lamp unit 1 with trigger tube.
The photoflash lamp 2 that is used in experiment 1 prepares to enclose in the inside 26 of luminous tube 25 sample of xenon (Xe) gas.Particularly, the enclosed volume of xenon (Xe) gas shown in the set-up dirgram 5 (a) 3 kind photoflash lamp A～C inequality.
Photoflash lamp A: the enclosed volume 300Torr of xenon-133 gas
Photoflash lamp B: the enclosed volume 450Torr of xenon-133 gas
Photoflash lamp C: the enclosed volume 600Torr of xenon-133 gas
Photoflash lamp A～C has following common formation except the enclosed volume of xenon-133 gas.
Luminous tube 25: quartz glass (total length L2=580mm, internal diameter L4=10.5mm, external diameter L3=13mm)
Negative electrode 24: the molybdenum that contains barium aluminate salt
Anode 23: tungsten
23,24 at electrode is apart from L1:500mm
In addition, be used in the triggering member of experiment 1, prepared bar-shaped tungsten conduct only by the triggering member 3 that conductor constituted that is used to constitute existing lamp unit 1.
In addition, as the triggering member 3 that is used to constitute the lamp unit 1 that compares with above-mentioned present embodiment, prepare the bar-shaped conductor that tungsten constituted 34 is enclosed in inner 32 the trigger tube that quartz glass constituted 31.
Particularly, shown in Fig. 5 (b), 3 kinds of triggering members of decompression or inclosure xenon-133 gas have been carried out in the inside of having prepared a kind of existing triggering member (conventional example) and trigger tube 31.
Conventional example: triggerless pipe 31
Trigger member a: the inside 32 of trigger tube 31 is decompression state (0.01Torr)
Trigger member b: the inside 32 of trigger tube 31 is xenon-133 gas (100Torr)
Trigger member c: the inside 32 of trigger tube 31 is xenon-133 gas (450Torr)
The triggering member of conventional example: conductor 34 is tungsten bar (total length 520mm, external diameter 1mm)
Trigger member a: conductor 34 is tungsten bar (external diameter 1mm)
Trigger member b: conductor 34 is tungsten bar (external diameter 1mm)
Trigger member c: conductor 34 is tungsten bar (external diameter 1mm)
The conductor 34 that triggers member a～c is only to be disposed on the zone of the electrode that is provided with a side, constitutes not to be disposed at (L9 is the triggering member of 550mm) on 23,24 zones apart from the space segment of L1 of electrode.
In addition, the trigger tube 31 that triggers member a～c is the trigger tubes shown in the above-mentioned comparative example 1, has following common formation.
Trigger tube 31: quartz glass (total length L5=540mm, internal diameter L7=2mm, external diameter L6=4mm)
Metal forming 35: molybdenum foil
In experiment 1, the lamp configuration of cells that will have above-mentioned conductor 34 and trigger tube 31 is in the dark position that surrounds lampshade, improve gradually for these lamp unit and to put on the charging voltage that condenser capacity is the capacitor of 200 μ F, and voltage is not being put under the state that triggers member 3, voltage when being determined at 23,24 generations of electrode insulation breakdown.This measurement result is shown in Fig. 6.
As shown in Figure 6, for lamp unit A～C any, all there is good proof voltage the lamp unit 1 that has trigger tube 31 as can be known.
Especially also expression has xenon-133 gas enclosed in the trigger tube b of trigger tube 31 and the lamp unit of c good proof voltage.
(2) experiment 2
In experiment 2, lamp of the present invention unit 1, in addition relatively change makes the line that radially extends at luminous tube from the front end along the conductor 34 of the inside 32 that is disposed at trigger tube 31, to along the proof voltage of anode 23 front ends when the distance (L9 shown in Figure 1) of extending at the tube axial direction of luminous tube 25 till the line that luminous tube radially extends changes.
In experiment 2, prepared above-mentioned distance L 9 and be 0mm (conductor 34 is for being across the comparative example 1 that reaches the Fig. 3 that is set on the zone of interelectrode space segment on the zone that is provided with anode 23 and negative electrode 24), 250mm (the lamp unit of the 1st embodiment shown in Figure 1), 375mm, 500mm (is being positioned at radially extension electrode 23, the part of luminous tube 25 outsides on the zone of 24 space segment, be not equipped with the lamp unit of conductor 34), 5 kinds of lamp unit of the present invention of 550mm (the lamp unit of the 2nd embodiment shown in Figure 2).
Each lamp unit has following common formation.
＜photoflash lamp 〉
Luminous tube 25: quartz glass (total length L2=580mm, internal diameter L4=10.5mm, external diameter L3=13mm)
The inside 26:450Torr of luminous tube 25
Negative electrode 24: the molybdenum that contains barium aluminate salt
Anode 23: tungsten
23,24 at electrode is apart from L1:500mm
＜triggering member 3 〉
Conductor 34: tungsten bar (external diameter=1mm)
Trigger tube 31: quartz glass (internal diameter L7=2mm, external diameter L6=4mm)
The inside 32 of trigger tube 31: xenon-133 gas (450Torr)
Metal forming 35: molybdenum foil
In experiment 2, with the dark position of each lamp configuration of cells in the encirclement lampshade, for each lamp unit 1, rise gradually and put on the charging voltage that condenser capacity is the capacitor of 200 μ F, do not applying a voltage under the state that triggers member 3, voltage when being determined at 23,24 generations of electrode insulation breakdown.This measurement result is shown in Fig. 7.
As shown in Figure 7, axially extended distance L 9 is big more can to improve proof voltage to the line that the line that radially extends at luminous tube from the front end along trigger tube 31 radially extends at luminous tube up to the front end along anode 23 more along managing at luminous tube 25, especially distance L 9 is more than the 250mm, that is, by electrode 23 with conductor 34, length on the zone of 24 space segment makes 23,24 of pair of electrodes apart from below half of L1, just can improve proof voltage.
In addition, the conductor 34 of the inside 32 of trigger tube 31 will be located at, only be disposed on the zone of the electrode that is provided with a side, constitute and be not disposed at electrode 23, on 24 zones (L9 is the lamp unit of 500mm and 550mm shown in Figure 2) apart from the space segment of L1, thus, can improve lamp 2 proof voltage between electrode 23,24 and the conductor 34 before lighting a lamp.In addition, so constitute the light that discharge produced that above-mentioned conductor 34 also can not hinder utilization to take place between electrode.
(3) experiment 3
In experiment 3, the lighting a lamp property that the length of change trigger tube 31 is come comparison lamp 2.
That is, be connected to electrode 23, apply on 24 the capacitor in the lamp of the present invention unit 1 of charging voltage of 6KV, in the electrode of opposite 23 that makes pair of electrodes (anode 23 and negative electrode 24), the length (L10 shown in Figure 4) of the trigger tube 31 of luminous tube 25 exterior portion on the space segment of 24 (distance L 1) is when being changed, relatively the lighting a lamp property of the lamp 2 by voltage being put on trigger tube 31.
In experiment 3, with electrode of opposite 23,24 space segment along the length L 10 of the trigger tube 31 in the zone of the extend radially of luminous tube 25 be 0mm (that is, trigger tube 31 is equipped on electrode of opposite 23,24 space segment is along the lamp unit in the zone in addition, the zone of radially extending of luminous tube 25), 250mm (that is, trigger tube 31 is equipped on electrode of opposite 23,24 space segment is along half the lamp unit in the zone of radially extending of luminous tube, lamp unit shown in Figure 4), 375mm, 500mm (that is trigger tube 31 is equipped on the space segment of 23,24 of the electrode of opposite lamp unit along the total length in the zone of radially extending of luminous tube), 550mm (that is, trigger tube 31 is equipped on the space segment of 23,24 of the electrode of opposite lamp unit 1 along the total length in the zone of the extend radially of luminous tube, in addition, the 50mm of trigger tube 31 is positioned at zone that electrode 23,24 is set along the lamp unit shown in Figure 3 on the zone of radially extending of luminous tube) 5 kinds of lamp unit.
In addition, be equipped on the conductor 34 of the inside 32 of trigger tube 31, be provided in about total length of its length direction of the inside 32 of trigger tube 31.
Each lamp unit 1 is to have following common formation.
＜photoflash lamp 〉
Luminous tube 25: quartz glass (total length L2=580mm, internal diameter L4=10.5mm, external diameter L3=13mm)
The inside 26:450Torr of luminous tube 25
Negative electrode 24: the molybdenum that contains barium aluminate salt
Anode 23: tungsten
23,24 at electrode is apart from L1:500mm
＜triggering member 〉
Conductor 34: tungsten bar (external diameter=1mm)
Trigger tube 31: quartz glass (internal diameter L7=2mm, external diameter L6=4mm)
The inside 32 of trigger tube 31: xenon-133 gas (450Torr)
Metal forming 35: molybdenum foil
In experiment 3, with each lamp configuration of cells in the dark position that is enclosed in lampshade, for each lamp unit 1, put on the state that condenser capacity is the capacitor of 200 μ F in charging voltage with 6KV, 15KV voltage is put on when triggering member 31 as tentative number of times 1 time, the tentative number of times of investigation adds up in 10 times, and having photoflash lamp 2 to carry out luminous number of times (number of light emission times) has several times.Its result is shown in Fig. 8.
As shown in Figure 8, trigger the trigger tube 31 of member 3, the part of luminous tube 25 outsides on the zone that the space segment with 23,24 at electrode radially extends, by at least with the comprehensive butt of its total length, 10 times tentative in, can realize that lamp all lights a lamp for 210 times.Thus, the length of trigger tube 31 is preferable more than 1 in the distance L of 23,24 at electrode.
Claims (2)
1. lamp unit comprises: by pair of electrodes, this electrode is located at the inner photoflash lamp that luminous tube constituted, and the triggering conductor of being located at the outside of above-mentioned luminous tube, it is characterized by:
In the outside of above-mentioned luminous tube, along the axle that links above-mentioned pair of electrodes,, the trigger tube with medium is set at least in this interelectrode whole total length,
To make the state that also reduces pressure than atmospheric pressure in this trigger tube, or enclose inert gas in inside,
In this trigger tube, the length conductor shorter than above-mentioned interelectrode distance on the above-mentioned interelectrode space segment zone is set, and at least a portion of this conductor is disposed on the above-mentioned electrode.
2. lamp as claimed in claim 1 unit is characterized by, with above-mentioned conductor arrangement in the zone on interelectrode space segment on the above-mentioned electrode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP005646/2008 | 2008-01-15 | ||
| JP2008005646A JP4433052B2 (en) | 2008-01-15 | 2008-01-15 | Lamp unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101488439A true CN101488439A (en) | 2009-07-22 |
Family
ID=40891259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100034863A Pending CN101488439A (en) | 2008-01-15 | 2009-01-15 | Lamp unit |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4433052B2 (en) |
| KR (1) | KR100973119B1 (en) |
| CN (1) | CN101488439A (en) |
| TW (1) | TW200931482A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7215707B2 (en) * | 2018-06-21 | 2023-01-31 | 株式会社ユメックス | short arc flash lamp |
| WO2022172579A1 (en) * | 2021-02-12 | 2022-08-18 | ウシオ電機株式会社 | Flash lamp, flash lamp unit, and light source device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57168464A (en) | 1981-04-09 | 1982-10-16 | Mitsubishi Electric Corp | High pressure electric-discharge lamp |
| JPH09326245A (en) * | 1996-06-04 | 1997-12-16 | Ushio Inc | Metal halide lamp light source device |
| JP2004022456A (en) | 2002-06-19 | 2004-01-22 | Ushio Inc | Flashing discharge lamp device |
| JP4273200B2 (en) | 2003-08-27 | 2009-06-03 | 株式会社オクテック | Flash lamp light emitting device |
-
2008
- 2008-01-15 JP JP2008005646A patent/JP4433052B2/en active Active
- 2008-11-03 TW TW097142358A patent/TW200931482A/en unknown
- 2008-11-17 KR KR1020080113841A patent/KR100973119B1/en active IP Right Grant
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2009
- 2009-01-15 CN CNA2009100034863A patent/CN101488439A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| KR100973119B1 (en) | 2010-07-29 |
| JP4433052B2 (en) | 2010-03-17 |
| TW200931482A (en) | 2009-07-16 |
| JP2009170208A (en) | 2009-07-30 |
| TWI348177B (en) | 2011-09-01 |
| KR20090078728A (en) | 2009-07-20 |
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Application publication date: 20090722 |