CN101469442B - Pulse modulation power supply and electrochemical polish apparatus equipped therewith - Google Patents
Pulse modulation power supply and electrochemical polish apparatus equipped therewith Download PDFInfo
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- CN101469442B CN101469442B CN2007103078652A CN200710307865A CN101469442B CN 101469442 B CN101469442 B CN 101469442B CN 2007103078652 A CN2007103078652 A CN 2007103078652A CN 200710307865 A CN200710307865 A CN 200710307865A CN 101469442 B CN101469442 B CN 101469442B
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Abstract
The invention discloses a pulse modulation power supply and an electrochemical polishing device with the power supply. The pulse modulation power supply comprises a controller and a pulse execution circuit, wherein the controller is used for changing direction of output pulse current by controlling the pulse execution circuit; and the pulse execution circuit is used for outputting the pulse current with changed direction. The pulse modulation power supply can periodically change the direction of the output pulse current.
Description
Technical field
The present invention relates to a kind of pulsed modulation power supply and have the electrochemical polish apparatus of this power supply.
Background technology
Electrochemical etching is meant in electrolytic solution and dissolves as anodic metal works (polished workpiece) that its surfaceness descends, luminance brightness improves thereby make, and produces the surface finishing technology of certain metalluster.At present, this technology prepares and needs the field of control surface quality and smooth finish to obtain to use extremely widely at metal finish, metal sample, demonstrate some advantages that mechanical polishing and other surface finishing technology can't match in excellence or beauty, as efficient height, surface no work hardening layer, internal stress free effect, corrosion-resistant etc.The material that electrochemical etching relates to has nearly all metallic substance such as stainless steel, pure metal, carbon steel, steel alloy, non-ferrous metal, alloy and noble metal thereof.
Traditional electrochemical etching power supply generally is that the direct current after the pressure regulation is powered to electrolyzer.In recent years, along with industrial equipments and product constantly develop to the precise treatment direction, traditional direct supply method is difficult to satisfy high-precision polishing requirement.Flow field, electric field and the electrochemical process in electrochemical etching gap can't be accurately controlled in the electrochemical etching existence of employing direct supply and polish temperature is higher, the more high defective of workpiece loss.Compare with traditional direct supply, adopt the electrochemical etching of the pulse power can fundamentally improve flow field, electric field and the electrochemical process in electrochemical etching gap, thereby obtain the higher erosion ability of removing, obtain higher polishing precision and surface quality.Current research shows, periodically changes the size and Orientation of the pulsed current of pulse power output, can further reduce polish temperature, reduces the loss of metal works.Yet the existing pulse power that is used for electrochemical etching does not have the function of direction of the pulsed current of periodically-varied output.
Summary of the invention
For addressing the above problem, the purpose of this invention is to provide a kind of pulsed modulation power supply and have the electrochemical polish apparatus of this power supply, the direction of the pulsed current that this pulsed modulation power supply can periodically-varied output.
For achieving the above object, the invention provides a kind of pulsed modulation power supply, this pulsed modulation power supply comprises controller and pulse executive circuit; Wherein, described controller is used for the direction that the setting pulse executive circuit changes the pulsed current of output; Described pulse executive circuit is used for the pulsed current of output change direction under the control of controller.
The present invention also provides a kind of electrochemical polish apparatus, and this device comprises electrode, electrolytic bath and the pulse power; Described electrode inserts in the electrolytic bath, the pulse power be used for electrode be connected by the metal works of electropolishing, wherein, the described pulse power is above-mentioned pulsed modulation power supply.
When using, controller to described pulsed modulation power supply is set the pulsed modulation parameter, controller is controlled described pulse executive circuit according to the control signal that the pulsed modulation parameter output of setting comprises this parameter information, changes the direction of the pulsed current of pulse executive circuit output.Electrochemical polish apparatus provided by the invention, owing to have above-mentioned pulsed modulation power supply, therefore, described burnishing device can further reduce polish temperature in use, reduces the loss of metal works, improves the performance of electrochemical etching.
Description of drawings
Fig. 1 is the structured flowchart of pulsed modulation power supply provided by the invention;
Fig. 2 is the circuit structure diagram of pulse executive circuit in the pulsed modulation power supply provided by the invention;
Fig. 3 is the structure iron of electrochemical polish apparatus provided by the invention;
Fig. 4 is the voltage regulating module of electrochemical polish apparatus provided by the invention and the structure iron of pulse executive circuit;
Fig. 5 is a pulsed modulation power work schema provided by the invention.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
With reference to Fig. 1, Fig. 2, the invention provides a kind of pulsed modulation power supply, this pulsed modulation power supply comprises controller 1 and pulse executive circuit 2; Wherein, described controller 1 is used for the direction that setting pulse executive circuit 2 changes the pulsed current of output; Described pulse executive circuit 2 is used for the pulsed current of output change direction under the control of controller 1.
Described pulse executive circuit 2 comprises a plurality of gate-controlled switch K, a plurality of gate-controlled switch K are divided into two groups, gate-controlled switch K series connection in every group, the end that an end and another of one group of placed in-line gate-controlled switch K organized placed in-line gate-controlled switch K is electrically connected, input terminus as electric current, the other end common ground of two groups of placed in-line gate-controlled switch K, controller 1 is connected with the control end of each gate-controlled switch K respectively, be used to control the break-make of gate-controlled switch K, belong to the contact of a pair of adjacent two gate-controlled switch K among the same group of placed in-line gate-controlled switch K and belong to another contact of organizing a pair of adjacent two gate-controlled switch K among the placed in-line gate-controlled switch K as 2 one groups of current output terminals of pulse executive circuit.Described pulse executive circuit 2 can be for a plurality of.
Preferably, the gate-controlled switch of described pulse executive circuit 2 is 4, and each number of organizing placed in-line gate-controlled switch K is 2.
Described controller 1 is by the time and the direction that changes the pulsed current of output in proper order of control gate-controlled switch K break-make.
Described gate-controlled switch K well known to a person skilled in the art the power switch with controlled end, and for example silicon controlled rectifier, CMOS pipe, IGBT etc. are preferably IGBT.
Described controller 1 is for well known to a person skilled in the art programmable microprocessor, and for example micro-chip, arm processor and dsp chip etc. are preferably dsp chip and peripheral circuit thereof.Described controller 1 is set the pulsed modulation parameter, and controller 1 is given pulse executive circuit 2 according to the control signal that the pulsed modulation parameter output of setting comprises this parameter information, the make-and-break time of a plurality of gate-controlled switch K of setting pulse executive circuit 2 and order.Described pulsed modulation parameter comprises parameter informations such as PRT, pulse-repetition, pulse duty factor, controller 1 calculates according to above-mentioned information, method of calculation comprise step: according to the PRT parameter, a recurrence interval is divided into current lead-through stage and current cut-off stage; Calculate current lead-through stage and shared separately time in current cut-off stage according to pulse-repetition and duty cycle parameters.According to the result of aforementioned calculation, controller 1 changes pulsed current into by the galvanic current that the break-make of controlling gate-controlled switch K can will be input to described pulse executive circuit 2.Described pulsed modulation parameter also comprises the parameter of the break-make order of described a plurality of gate-controlled switch K, and according to this parameter, the break-make order of the described a plurality of gate-controlled switch K of controller 1 control can change the direction of the pulsed current of pulse executive circuit 2 outputs.Described controller 1 control gate-controlled switch K produces pulsed current and changes the direction of exporting pulsed current can be by realizing controller 1 editor.
Described pulsed modulation power supply also comprises voltage stabilized source 3 and voltage regulating module 4; Voltage stabilized source 3 is used to voltage regulating module 4 that power supply output is provided; Voltage regulating module 4 is used to regulate the size of the electric current of described voltage stabilized source 3 outputs, and the electric current after will regulating outputs to the current input terminal of pulse executive circuit 2; Described controller 1 also is used to control the size of the electric current of voltage regulating module 4 outputs.Described controller 1 also is used to control the size of the described pulse executive circuit 2 current input terminal electric currents of input.
Described pulsed modulation parameter also comprises the pulsed current size parameter, and controller 1 is controlled the size of the galvanic current of described voltage regulating module 4 outputs according to this parameter.The size of described controller 1 control current can be by realizing controller 1 editor.
Described voltage stabilized source 3 and voltage regulating module 4 are as well known to those skilled in the art, seldom do and give unnecessary details.
The pulsed modulation power supply also comprises diode D, and described diode D is connected between the current input terminal of described voltage regulating module 4 and pulse executive circuit 2, is used to prevent that reversal of current from flowing into voltage regulating module 4.Described diode D is as well known to those skilled in the art.
Described pulsed modulation power supply also comprises control panel 5 and storer 6; Control panel 5 is used for described controller 1 is set the pulsed modulation parameter, and the pulsed modulation parameter of setting is input to controller 1, and controller 1 is sent work order; Described storer 6 is used for storage controller 1 application program and predefined pulsed modulation parameter, for controller 1 calling program and pulsed modulation parameter.
Described control panel 5 is as well known to those skilled in the art, can set described pulsed current modulation parameter by described control panel 5, and controller 1 is sent various work orders etc.Described storer 6 is as well known to those skilled in the art, and for example storer 6 can be selected EEPROM for use.Storer 6 is used for storage controller 1 application program and predefined pulsed modulation parameter, for controller 1 calling program and pulsed modulation parameter.In the present invention, described storer 6 can be stored many group pulses current-modulation parameter that pre-set pulsed current modulation parameter or storage set by control panel 5 as self-defined pulsed current modulation parameter, calls for controller 1 when needed.
Below with reference to Fig. 5, set forth the workflow of pulse modulated circuit provided by the invention.
Described controller 1 receives the work order that control panel 5 sends, and judges that the operating mode of selecting is manual mode or automatic mode;
If manual mode, whether controller 1 detects manual mode and allows to start, if allow, then reads the pulsed current modulation parameter of setting by control panel 5;
Calculate according to above-mentioned method of calculation paired pulses current-modulation parameter;
Control the break-make of described a plurality of gate-controlled switch K and the order of break-make according to the result after calculating, and the size of control voltage regulating module 4 output DCs stream.
Under manual mode, controller 1 reads the pulsed current modulation parameter of setting on the control panel 5 again every a setting-up time (as 0.1 second), if this parameter changes, then this parameter is calculated again, control the break-make of described a plurality of gate-controlled switch K and the order of break-make according to the result after calculating again, and the size of control voltage regulating module 4 output DCs stream.
If automatic mode, whether controller 1 detects automatic mode and allows to start, if allow, then reads the pulsed current modulation parameter of selected 6 li storages of described storer;
Calculate according to above-mentioned method of calculation paired pulses current-modulation parameter;
Control the break-make of described a plurality of gate-controlled switch K and the order of break-make according to the result after calculating, and the size of control voltage regulating module 4 output DCs stream.
By above description, those skilled in the art can be expressly understood very that pulsed modulation power supply provided by the invention can change the size and Orientation of output pulsed current as required, satisfies the needs that multiple needs provide the device of pulsed current.
With reference to Fig. 3, Fig. 4, the present invention also provides a kind of electrochemical polish apparatus, and this device comprises electrode 73, electrolytic bath 71 and the pulse power; Described electrode 73 inserts in the electrolytic baths 71, the pulse power be used for electrode 73 be connected by the workpiece 74 of electropolishing, wherein, the described pulse power is above-mentioned pulsed modulation power supply.
Described burnishing device also comprises electrolytic solution 72, and electrolytic solution 72 is arranged in electrolytic bath 71, described electrode 73 and inserted in the electrolytic baths 71 by the workpiece 74 of electropolishing.
The pulse executive circuit 2 of described pulsed modulation power supply comprises at least one " H " bridge circuit unit, described " H " bridge circuit unit comprises four gate-controlled switch K, the end of first and second gate-controlled switch K is connected as the current output terminal of pulse executive circuit 2, the other end of first and second gate-controlled switch K connects the end of third and fourth gate-controlled switch K respectively, the other end ground connection of third and fourth gate-controlled switch K, the contact of described first and the 3rd gate-controlled switch K, the contact of second and the 4th gate-controlled switch K is drawn one group of current output terminal as pulse executive circuit 2 respectively.
Described pulsed modulation power supply also comprises voltage stabilized source 3 and voltage regulating module 4; Voltage stabilized source 3 is used to voltage regulating module 4 that power supply output is provided; Voltage regulating module 4 is used to regulate the size of the electric current of described voltage stabilized source 3 outputs, and the electric current after will regulating outputs to the current input terminal of pulse executive circuit 2; Described controller 1 also is used to control the size of the electric current of voltage regulating module 4 outputs.
Described voltage regulating module 4 comprises a plurality of current output terminals, the electric currents of the size of output difference respectively, be connected with gate-controlled switch K between the current input terminal of each current output terminal and pulse executive circuit 2, described controller 1 is controlled the size of the electric current of voltage regulating module 4 outputs by the break-make of control gate-controlled switch K.
Preferably, the number of described voltage regulating module 4 current output terminals is 2.
The described electrode 73 of unitary current output terminal one termination of described " H " bridge circuit, another termination is wanted polished workpiece 74, controller 1 is selected the current output terminal of outward current by the gate-controlled switch K on the control voltage regulating module 4, thereby controls the size of the electric current of voltage regulating module 4 outputs.The time of four gate-controlled switch K break-makes on controller 1 control " H " bridge circuit unit produces exports to the described polished workpiece 74 and the pulsed current of electrode 73, and the order of controlling four gate-controlled switch K break-makes changes the direction of the pulsed current of described output.
Specifically, when described first and the 4th gate-controlled switch K conducting of controller 1 control, when second and the 3rd gate-controlled switch K disconnected, the direction of the pulsed current of output was from the contact to the second of described first and the 3rd gate-controlled switch K and the contact of the 4th gate-controlled switch K; When described second and the 3rd gate-controlled switch K conducting of controller 1 control, when first and the 4th gate-controlled switch K disconnected, the direction of the pulsed current of output was from the contact to the first of described second and the 4th gate-controlled switch K and the contact of the 3rd gate-controlled switch K.
Described electrode 73, electrolytic bath 71 and electrolytic solution 72 are conventionally known to one of skill in the art, electrode 73 and electrolytic solution 72 that workpiece 74 materials that described electrode 73 and electrolytic solution 72 are polished as required different and selecting adapt.
Electrochemical polish apparatus provided by the invention, owing to have above-mentioned pulsed modulation power supply, therefore, described burnishing device can further reduce polish temperature in use, reduces the loss of polished workpiece 74, improves the performance of electrochemical etching.
Claims (10)
1. pulsed modulation power supply, this pulsed modulation power supply comprises controller (1) and pulse executive circuit (2); Wherein, described controller (1) is used for the direction that setting pulse executive circuit (2) changes the pulsed current of output, and the size of control input described pulse executive circuit (2) current input terminal electric current; Described pulse executive circuit (2) is used for the pulsed current of output change direction under the control of controller (1),
Described pulsed modulation power supply also comprises voltage stabilized source (3), voltage regulating module (4) and diode (D), and voltage stabilized source (3) is used to voltage regulating module (4) that power supply output is provided; Voltage regulating module (4) is used to regulate the size of the electric current of described voltage stabilized source (3) output, and the electric current after will regulating outputs to the current input terminal of pulse executive circuit (2); Described diode (D) is connected between the current input terminal of described voltage regulating module (4) and pulse executive circuit (2); Described controller (1) also is used to control the size of the electric current of voltage regulating module (4) output.
2. pulsed modulation power supply according to claim 1, wherein, described pulse executive circuit (2) comprises a plurality of gate-controlled switches, a plurality of gate-controlled switches are divided into two groups, gate-controlled switch series connection in every group, the end that one end and another of one group of placed in-line gate-controlled switch organized placed in-line gate-controlled switch is electrically connected, input terminus as electric current, the other end common ground of two groups of placed in-line gate-controlled switches, controller (1) is connected with the control end of each gate-controlled switch respectively, be used to control the break-make of gate-controlled switch, belong to the contact of a pair of adjacent gate-controlled switch in the same group of placed in-line gate-controlled switch and belong to another contact of organizing a pair of adjacent gate-controlled switch in the placed in-line gate-controlled switch as (2) one groups of current output terminals of pulse executive circuit.
3. pulsed modulation power supply according to claim 1 and 2, wherein, described pulse executive circuit (2) is a plurality of.
4. pulsed modulation power supply according to claim 2, wherein, described controller (1) is by the time and the direction that changes the pulsed current of output in proper order of control gate-controlled switch break-make.
5. pulsed modulation power supply according to claim 2, wherein, described gate-controlled switch is 4, each number of organizing placed in-line gate-controlled switch is 2.
6. pulsed modulation power supply according to claim 1 and 2, wherein, described pulsed modulation power supply also comprises control panel (5) and storer (6);
Control panel (5) is used for described controller (1) is set the pulsed modulation parameter, and the pulsed modulation parameter of setting is input to controller (1), and controller (1) is sent work order;
Described storer (6) is used for storage controller (1) application program and predefined pulsed modulation parameter, for controller (1) calling program and pulsed modulation parameter.
7. electrochemical polish apparatus, this device comprises electrode (73), electrolytic bath (71) and the pulse power; Described electrode (73) inserts in the electrolytic bath (71), the pulse power be used for electrode (73) be connected by the workpiece of electropolishing (74), it is characterized in that the described pulse power is as the described pulsed modulation power supply of each claim among the claim 1-6.
8. burnishing device according to claim 7, wherein, this device also comprises electrolytic solution (72), electrolytic solution (72) is arranged in electrolytic bath (71), described electrode (73) and inserted in the electrolytic bath (71) by the workpiece of electropolishing (74).
9. burnishing device according to claim 7, wherein, the pulse executive circuit (2) of described pulsed modulation power supply comprises at least one H bridge circuit unit, described H bridge circuit unit comprises four gate-controlled switches, one end of first and second gate-controlled switch is connected as the current input terminal of pulse executive circuit (2), the other end of first and second gate-controlled switch connects an end of third and fourth gate-controlled switch respectively, the other end ground connection of third and fourth gate-controlled switch, the contact of described first and the 3rd gate-controlled switch, the contact of second and the 4th gate-controlled switch is drawn one group of current output terminal as pulse executive circuit (2) respectively.
10. burnishing device according to claim 7, wherein, the voltage regulating module of described pulsed modulation power supply (4) comprises a plurality of current output terminals, the electric currents of the size of output difference respectively, be connected with gate-controlled switch between the current input terminal of each current output terminal and pulse executive circuit (2), described controller (1) is controlled the size of the electric current of voltage regulating module (4) output by the break-make of control gate-controlled switch.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007103078652A CN101469442B (en) | 2007-12-29 | 2007-12-29 | Pulse modulation power supply and electrochemical polish apparatus equipped therewith |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2007103078652A CN101469442B (en) | 2007-12-29 | 2007-12-29 | Pulse modulation power supply and electrochemical polish apparatus equipped therewith |
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| CN101469442A CN101469442A (en) | 2009-07-01 |
| CN101469442B true CN101469442B (en) | 2011-12-14 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106424733A (en) * | 2016-12-13 | 2017-02-22 | 广东汉唐量子光电科技有限公司 | CoCrMo alloy dental crown 3D printing and electrolytic polishing combined machining system |
| TWI668338B (en) * | 2018-05-18 | 2019-08-11 | 陳嘉朗 | Metal surface processing apparatus |
| CN110592651A (en) * | 2018-06-13 | 2019-12-20 | 陈嘉朗 | Metal surface treatment device |
| TWI694181B (en) * | 2018-08-29 | 2020-05-21 | 陳嘉朗 | Frequency conversion polarization of polishing device and method |
| CN113271030B (en) * | 2021-05-25 | 2022-11-29 | 中国工程物理研究院机械制造工艺研究所 | Pulse generation control method for pulse power supply |
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|---|---|---|---|---|
| US4206028A (en) * | 1976-12-14 | 1980-06-03 | Inoue-Japax Research Incorporated | Electrochemical polishing system |
| DE3609296A1 (en) * | 1986-03-19 | 1987-09-24 | Siemens Ag | Device for varying the current in a pulse-like manner in a direct current load, especially an electrolytic bath for material deposition and material erosion |
| EP0502507A1 (en) * | 1991-03-07 | 1992-09-09 | Fuji Photo Film Co., Ltd. | Method and apparatus for electrolytic treatment |
| CN1581665A (en) * | 2003-07-31 | 2005-02-16 | 快捷韩国半导体有限公司 | System and method for convertor |
| CN1596504A (en) * | 2002-09-30 | 2005-03-16 | 罗姆股份有限公司 | DC/AC conversion device and AC power supply method |
| CN1204300C (en) * | 1997-02-27 | 2005-06-01 | 阿托特德国有限公司 | Circuitry and method for electroplating plant or etching plant pulse power supply |
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2007
- 2007-12-29 CN CN2007103078652A patent/CN101469442B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4206028A (en) * | 1976-12-14 | 1980-06-03 | Inoue-Japax Research Incorporated | Electrochemical polishing system |
| DE3609296A1 (en) * | 1986-03-19 | 1987-09-24 | Siemens Ag | Device for varying the current in a pulse-like manner in a direct current load, especially an electrolytic bath for material deposition and material erosion |
| EP0502507A1 (en) * | 1991-03-07 | 1992-09-09 | Fuji Photo Film Co., Ltd. | Method and apparatus for electrolytic treatment |
| CN1204300C (en) * | 1997-02-27 | 2005-06-01 | 阿托特德国有限公司 | Circuitry and method for electroplating plant or etching plant pulse power supply |
| CN1596504A (en) * | 2002-09-30 | 2005-03-16 | 罗姆股份有限公司 | DC/AC conversion device and AC power supply method |
| CN1581665A (en) * | 2003-07-31 | 2005-02-16 | 快捷韩国半导体有限公司 | System and method for convertor |
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Effective date of registration: 20191225 Address after: 314411 Jianshe East Road, Guodian, Yanguan Town, Haining City, Jiaxing City, Zhejiang Province Patentee after: Haining Yanguan Industrial Investment Co., Ltd Address before: 518119 BYD Industrial Park, Yanan Road, Kwai Chung Town, Longgang District, Guangdong, Shenzhen Patentee before: Biyadi Co., Ltd. |
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