Utilize the method for counting of the probe use amount of probe tester realization
Technical field
The present invention relates to a kind of method of counting that utilizes the probe use amount of probe tester realization.
Background technology
In the ic component test process, often to use probe wafer is tested.The probe that uses all is packaged on the probe now, needs timely replacing after probe uses up, thereby test job can be carried out smoothly.The number system of existing probe consumption as shown in Figure 1, this system sets up probe consumption enumeration data storehouse in probe tester outside, data are directly communicated by letter, accept to this database with probe station, content in this database is as shown in table 1, it preestablishes product category and employed probe model and each fields such as consumption, realizes counting to this probe actual amount by the wafer piece number and the product of each consumption that obtain after probe station test.
Product category |
The probe model |
Probe consumption/every piece of wafer |
AAA |
A |
50 times |
BBB |
B |
100 times |
CCC |
C |
80 times |
DDD |
D |
30 times |
…… |
…… |
…… |
Table 1
But, the accuracy of this method of counting is based upon on the basis that product must use identical test condition (being identical probe consumption) fully, if the continuous changed test condition of product, the actual amount of probe can can't be calculated accurately because of the fixed numbers that database middle probe card consumption field is set under the different condition.Calculate the probe consumption even if in this database, increase the test condition field related, also can need frequent maintenance data base (revising the setting value of probe consumption) to make whole counting process can't be fit to needs of production because of the continuous conversion of test condition under the different situations with product category.
For example, in table 1, product A AA has set the number of times 50 times of probe consumption in advance, but if product A AA needs often to use 2 operating conditions, its probe consumption corresponds to respectively 50 times and 100 times, according to the setting value of database middle probe card consumption, the probe actual amount can only be counted according to 50 times.This just causes the counting of probe consumption inaccurate, and probe is that arranged certain serviceable life, if the use of probe has surpassed serviceable life, will influence the test effect; Just do not change serviceable life if the use of probe reaches as yet, can cause waste again.
Summary of the invention
Technical matters to be solved by this invention provides a kind of method of counting that utilizes the probe use amount that the probe tester realizes, can be according to the information of current test condition the consumption of real-time, correct calculating probe.
For solving the problems of the technologies described above, the present invention utilizes the technical scheme of the method for counting of the probe use amount that the probe tester realizes to be, comprise probe usage data storehouse and test condition data storehouse, include in the described probe usage data storehouse probe type information, with the corresponding accumulative total of described probe model use amount information, and with the corresponding probe of the described probe model information in serviceable life; Include in the described test condition data storehouse probe type information, with the information of the corresponding various test conditions of described probe type information, and with described various test condition information corresponding under this test condition the information of probe single use amount; Described probe usage data storehouse and described test condition data storehouse are interrelated by the probe type information; It is characterized in that, described tester is obtained the information of described test condition information and employed probe model, in described test condition data storehouse, inquire the information of described probe single use amount according to the information of described test condition information and employed probe model, associating information by described probe model arrives described probe usage data storehouse then, the wafer number that described probe single use amount multiply by test just obtains the actual use amount of probe, actual use amount to described probe adds up, obtain accumulative total use amount information, with described accumulative total use amount information according in the described probe usage data of storing into of the probe type information correspondence storehouse, when corresponding accumulative total use amount information was more than or equal to probe information in serviceable life in the described probe usage data storehouse, described probe tester sent the prompting of changing probe.
The present invention has added up the access times of probe objectively according to actual service conditions, has played the effect of effective monitoring probe user mode, cooperates the periodic maintenance and the management in serviceable life of probe, has improved the management level of automated production middle probe card.
Description of drawings
The present invention is further detailed explanation below in conjunction with drawings and Examples:
Fig. 1 is the synoptic diagram of existing detecting probe card testing system;
Fig. 2 is the synoptic diagram of the test macro of employing probe tester of the present invention.
Embodiment
Silicon wafer characteristic test middle probe card tester used in the present invention, comprise probe usage data storehouse and test condition data storehouse, described probe usage data includes the probe type information in the storehouse, and with the corresponding accumulative total of described probe model use amount information; Described test condition data includes the probe type information in the storehouse, and with the information of the corresponding various test conditions of described probe type information, and with described various test condition information corresponding under this test condition the information of probe single use amount; Described probe usage data storehouse and described test condition data storehouse are interrelated by the probe type information.
Also include in the described probe usage data storehouse and the corresponding probe of the described probe model information in serviceable life.
Described test condition data storehouse also comprises the information of product category, and the information of described product category is corresponding mutually with described probe type information, test condition information and probe single use amount information.
Described probe usage data storehouse internal data structure can be joined and is shown in Table 2:
The probe model |
The accumulative total use amount |
PM returns number |
Serviceable life |
Remarks |
The A card |
500 |
%%% |
2000 |
%%% |
The probe model |
The accumulative total use amount |
PM returns number |
Serviceable life |
Remarks |
The B card |
%%% |
%%% |
%%% |
%%% |
The C card |
%%% |
%%% |
%%% |
%%% |
The D card |
%%% |
%%% |
%%% |
%%% |
…… |
…… |
…… |
…… |
…… |
Table 2
Described test condition data storehouse internal data structure can be joined and is shown in Table 3:
Product category |
The probe model |
Test condition |
The single use amount |
AAA |
The A card |
Condition 1 |
%%% |
AAA |
The A card |
Condition 2 |
50 |
BBB |
The B card |
Condition 3 |
%%% |
BBB |
The C card |
Condition 4 |
%%% |
…… |
…… |
…… |
…… |
Silicon wafer characteristic test middle probe card tester of the present invention in use as shown in Figure 2, described probe tester is connected on the probe station, in time obtains the data message such as the various needs of wafer number, test condition etc.
The invention provides a kind of method of counting that utilizes the silicon wafer characteristic test middle probe card use amount of above-mentioned silicon wafer characteristic test middle probe card tester realization, described tester is obtained the information of described test condition information and employed probe model, in described test condition data storehouse, inquire the information of described probe single use amount according to the information of described test condition information and employed probe model, associating information by described probe model arrives described probe usage data storehouse then, the wafer number that described probe single use amount multiply by test just obtains the actual use amount of probe, actual use amount to described probe adds up, obtain accumulative total use amount information, with described accumulative total use amount information according in the described probe usage data of storing into of the probe type information correspondence storehouse.
Corresponding accumulative total use amount information is more than or equal to serviceable life during information in the described probe usage data storehouse, and described probe tester sends the prompting of changing probe.
Described tester is obtained the information of described test condition information and employed probe model, and obtain the information of described product category, information according to described test condition information and employed probe model, and the information of product category, in described test condition data storehouse, inquire the information of described probe single use amount.
In conjunction with the content of Fig. 2, table 2 and table 3, now lift the specific implementation process of the method for counting of example explanation silicon wafer characteristic test middle probe card use amount of the present invention.Described probe tester obtains information, learn that the probe model is the A card, product category is AAA, test condition is a condition 2, wafer number is 7, described probe tester is inquired about in described test condition data storehouse, obtaining the single use amount is 50, the actual use amount that process calculates this test is the actual use amount 350 of single use amount 50 * wafer number 7=, before this, the accumulative total use amount of the A card in the described probe usage data storehouse is 500, so the probe tester just is updated to 500+350=850 with the accumulative total use amount of the A card in the probe usage data storehouse.When adding up use amount more than or equal to serviceable life, described probe tester sends the prompting of changing probe.
In sum, the present invention has added up the access times of probe objectively according to actual service conditions, play the effect of effective monitoring probe user mode, cooperated the periodic maintenance and the management in serviceable life of probe, improved the management level of automated production middle probe card.