CN101441177B - Minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector - Google Patents

Minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector Download PDF

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Publication number
CN101441177B
CN101441177B CN2008102372198A CN200810237219A CN101441177B CN 101441177 B CN101441177 B CN 101441177B CN 2008102372198 A CN2008102372198 A CN 2008102372198A CN 200810237219 A CN200810237219 A CN 200810237219A CN 101441177 B CN101441177 B CN 101441177B
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chip
optical fiber
light
micro
photodetector
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CN101441177A (en
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温志渝
徐溢
顾雯雯
廖海洋
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Chongqing University
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Chongqing University
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Abstract

The invention discloses a miniaturized fluorescence detector of a general LED induced optical-fiber type integrated PIN photodetector suitable for glass microfluidic chips, wherein, high-power LED is employed as the excitation light source of the detector, and the light is introduced into the chip detection window by using multi-beam and multi-fiber combined transmission mode. The light filtering system is an emitted-light interference color-filtering film with the thickness of 2-3 micrometers; the photodetector is a mm-level chip-type PIN photodetector capable of covering the detection range of common fluorescent reagents; and various fluorescence samples can be detected by reasonably selecting excitation light source and designing the central wavelength and the spectral bandwidth of the emitted-light interference color-filtering film. The emitted-light interference color-filtering film, chip-type PIN photodetector, and the microfluidic chip are integrated, and the detachable seamless seaming of the specially-designed pipe casing cover and the chamber is used to shield the interference light outside, so as to realize the non-interference detection for the fluorescence signals of the sample in the chip microtube. The invention is applicable to the technical field for biological detection, environmental detection, food detection, and the like.

Description

The minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector
Technical field:
The invention belongs to the micro-total analysis technical field, relate to a kind of integrated exciting light transmission channel, filter system, and the minitype fluorescence detector of chip type PIN photodetector.
Background technology:
(μ-TAS) claims chip lab (lab-on-a-chip) or micro-fluidic chip again to micro-total analysis system, related course of reaction is finished in the geometry of micron dimension usually, therefore, compare with the traditional experiment chamber, detecting device is had higher requirement, comprise high sensitivity, response fast, microminiaturization etc.Up to now, the detection technique that is applied to micro-fluidic chip reaches tens kinds, wherein is most widely used with optical detection and electrochemical assay.Laser-induced fluorescence (LIF) (LIF) is the detection method that present sensitivity is the highest, range of application is the widest as typical case's representative of optical detection.The shortcoming that but traditional LIF detection system exists usually is bulky, cost an arm and a leg, power consumption is higher has restricted the popularization and the use of micro-fluidic chip to a certain extent.For develop volume little, be easy to carry, cheap LIF detection system, research group adopts small semiconductor laser or LED as excitation source both at home and abroad, volume and cost have been reduced to a certain extent, but owing to equally with common LIF system need to add collector lens etc. separate optical element between light source and detecting device, distance is integrated to still have suitable distance.On the other hand,, increased the distance of micro-fluidic chip check point, reduced the sensitivity of LIF detection system to the detector photosurface as the exciting light color filter of fluorescence detecting system discrete device and the use of photodetector.Therefore, if will reduce the volume of fluorescence detector, must corresponding optical system is integrated.The optical system integrated approach of present report, the existing light emitting diode that will excite usefulness, plane light wave conduit etc. directly are machined on the micro-fluidic chip, this method can reach microminiaturized and integrated purpose, but need meticulous chip manufacture technology and expensive process equipment, chip cost is improved greatly.
Summary of the invention:
The object of the present invention is to provide a kind of integrated exciting light transmission channel, filter system, and the minitype fluorescence detector of chip type PIN photodetector, the overall dimensions of fluorescence detecting system is decided on concrete micro-fluidic chip size, and its length is all in several cm range.
The present invention takes following technical scheme: the minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector, form by excitation source, fibre-optic transmission system (FOTS), filter system, photodetector system, micro-fluidic chip and system's locating device.The exciting light that sends from great power LED directly is coupled into multiple beam optical fiber, and the micro-fluidic chip by chip package lid top detects the fluoroscopic examination point that mouth shines the microchannel end, is excited to send the fluorescence of respective wavelength to excite fluorescent material in the microchannel; The fluorescence that is produced by the emission interference of light colour filter film filtering parasitic light that is machined in micro-fluidic chip bottom after, enter in the chip type PIN photoelectric detector of being close under it, be converted into current signal, pin output through shell cavity base, after signal processing circuit amplification, filtering, be converted into voltage signal again, transfer to workstation or registering instrument, finish the test analysis of sample.
Described excitation source adopts large-power light-emitting diodes, it combines with the incident end of multiple beam optical fiber, the exit end of multiple beam optical fiber is fixed on the chip detection mouth place at chip package lid top, can select the light emitting diode of different peak wavelengths as exciting light sources according to the excitation spectrum characteristic of fluorescent reagent sample.5 core diameters of exciting light transmission channel employing are that 100 microns single fiber forms fibre bundle by peripheral metal sleeve binding combination, can strengthen the ability of optical fiber coupling exciting light light intensity greatly.
Described filter system is that thickness only is 2~3 microns, the emission interference of light colour filter film that band leads to scope can be set according to the characteristic spectral emission of different fluorescent reagent samples, directly be made in the micro-fluidic chip bottom by processing film technology, realize the integrated of filter system and micro-fluidic chip.
Described photodetector system adopts chip type PIN photodetector, it has, and high sensitivity, response fast, photosensitive area and micro-fluidic chip microchannel size are suitable, spectral response curve can cover characteristics such as fluorescent reagent sensing range commonly used, by with the mode of micro-fluidic chip silicon-glass bonding, realize the integrated of detecting device and micro-fluidic chip.
Emission interference of light colour filter film, chip type PIN photodetector and micro-fluidic chip are realized integrated.Multiple beam optical fiber exciting light exit end only is 1~2 millimeter apart from micro-fluidic chip, by being machined in the ring flange location at chip package lid top; Ring flange is embedded in the cross groove at chip package lid top, by the fine setting ring flange, and the position of control exciting light outgoing hot spot irradiation microfluidic channel fluoroscopic examination point.Micro-fluidic chip is encapsulated in chip package lid and the chip shell cavity fixing.Shell cavity base pin is used for the bonding point pressure welding encapsulation of chip type PIN pipe, and the dismountable seamless involution shielding external interference light of package lid and cavity is realized the noiseless detection of fluorescent.
The present invention has the following advantages owing to adopt above technical scheme:
The minitype fluorescence detector of the LED induction optical fiber type integrated PIN photo detector that the present invention proposes can select the light emitting diode of different peak wavelengths as exciting light sources according to different fluorescent samples, and adopt peripheral metal sleeve binding combination to form the ability that fibre bundle strengthens optical fiber coupling exciting light, can effectively improve fluorescence and produce efficient.To launch interference of light colour filter film and chip type PIN photodetector, integrated by processing film technology and bonding encapsulation technology in the micro-fluidic chip bottom, realized the integrated of micro-optical component and micro-fluidic chip.Adopt the mode of chip shell encapsulation micro-fluidic chip, multiple beam optical fiber is fixed in package lid; Integrated have the micro-fluidic chip of emission interference of light colour filter film, chip type PIN photodetector to place the shell cavity; The dismountable seamless involution maskable external interference light of chip package lid and cavity.Realized truly microminiaturization of fluidic chip detecting system and integrated.
Description of drawings:
The minitype fluorescence detector synoptic diagram of Fig. 1 LED induction optical fiber type integrated PIN photo detector;
The minitype fluorescence detector chip shell structural drawing of Fig. 2 LED induction optical fiber type integrated PIN photo detector;
Fig. 3 launches the impact effect figure of interference of light colour filter film to the great power LED emission spectrum;
Fig. 4 adopts on the glass-based electrophoresis chip that the present invention obtains 10 -4The electrophoresis pattern of mol/L phenylalanine-FITC.
Embodiment:
The minitype fluorescence detector structure of the LED induction optical fiber type integrated PIN photo detector that the present invention proposes is as shown in Figure 1: large-power light-emitting diodes 1 combines with the incident end of multiple beam optical fiber 2, the exciting light that sends from large-power light-emitting diodes 1 directly is coupled into multiple beam optical fiber 2, the exit end of multiple beam optical fiber 2 is fixed on chip package lid 3 tops, and it is corresponding with the microchannel terminal position of micro-fluidic chip, realize fixing by the ring flange 8 that is machined in chip package lid top, ring flange is embedded in the cross groove of cover plate top, referring to Fig. 2, by fine setting ring flange position, make exciting light outgoing hot spot cover the fluoroscopic examination point of micro-fluidic microchannel end, the exciting light exit end of multiple beam optical fiber 2 only is 1~2 millimeter apart from micro-fluidic chip 4.Glass-based micro-fluidic chip 4 bottoms are coated with emission interference of light colour filter film 5 by processing film technology, be used for exciting light and other parasitic lights that filtering large-power light-emitting diodes 1 sends, thickness only is that 2~3 microns filter system has shortened in the microchannel greatly through exciting the fluorescence signal of inducing generation and the distance of photodetector, has improved system sensitivity.The photosurface of chip type PIN photodetector 6 is close to emission interference of light colour filter film 5 over against the fluoroscopic examination point of microchannel end by the mode of silicon-glass bonding.Adopt semiconducter process that the extension line pad of chip type PIN photodetector 6 is linked to each other with the pin of chip shell cavity 7 bases.Realized the integrated encapsulation of micro-fluidic chip and narrow emission interference of light colour filter film, chip type PIN photodetector and chip shell cavity by above-mentioned processing film technology, silicon-Glass Bonding Technology and semiconductor pressure welding encapsulation technology.Chip type PIN photodetector the has received filtering fluorescence of clutter interference light, light intensity signal is converted into current signal, pin output through shell cavity base, export workstation or registering instrument to, finish the check and analysis of sample after signal processing circuit is amplified, be converted into voltage signal after the filtering.
Use-case: at the split tunnel end of glass-based electrophoresis chip, the minitype fluorescence detector of employing LED induction optical fiber type integrated PIN photo detector detects the phenylalanine of fluorescein isothiocynate (FITC) mark.Containing on the glass-based electrophoresis chip of cruciform microchannel, be buffer system with pH=10,10mmol/L borax soln, the FITC mark phenylalanine sample of Ngatively pressurized sampling nL level variable concentrations, sample injection time is 10s, the separation field intensity is 300V/cm.Selecting centre wavelength for use is that 470nm blue light great power LED is as excitation source, it is that 520nm, bandwidth are that 15nm, thickness only are the logical emission of the band interference of light colour filter film of 3 μ m that filter system adopts centre wavelength, the complete filtering of exciting light that the blue light great power LED can be sent, and allow most fluorescence signals by (peak transmittance is 92%).Figure 3 shows that the impact effect figure of this emission interference of light colour filter film to blue light great power LED emission spectrum, the blue light great power LED curve of spectrum is a, and the logical emission of band interference of light colour filter film transmittance curve is b, and the curve of spectrum of exciting light after the colour filter system is c.Figure 4 shows that the phenylalanine electrophoresis spectrogram that the minitype fluorescence detector that adopts LED induction optical fiber type integrated PIN photo detector of the present invention records, test result shows that this integrated minitype fluorescence detector reaches 10 to the concentration of phenylalanine detection limit of FITC mark -6Mol/L.
Minitype fluorescence detector by above-mentioned example explanation LED induction optical fiber type integrated PIN photo detector is under the prerequisite that does not adopt complex optical components such as dichroic prism, lens combination and structure, finished the separation detection of chemical example to be measured, and the present invention has simplified apparatus structure greatly, reduced system bulk, the length size all in cm range, has really realized the integrated of detection system.

Claims (3)

1.LED the minitype fluorescence detector of induction optical fiber type integrated PIN photo detector is made up of excitation source, fibre-optic transmission system (FOTS), filter system, photodetector system, micro-fluidic chip and system's locating device; It is characterized in that: described excitation source adopts large-power light-emitting diodes (1), fibre-optic transmission system (FOTS) adopts multiple beam optical fiber (2), filter system adopts emission interference of light colour filter film (5), photodetector system adopts chip type PIN photodetector (6), and system's locating device adopts chip package lid (3) and chip shell cavity (7);
Described micro-fluidic chip (4) is encapsulated in chip package lid (3) and the chip shell cavity (7);
Described large-power light-emitting diodes (1) combines with the incident end of multiple beam optical fiber (2), the exit end of multiple beam optical fiber (2) is fixed on the terminal correspondence position in chip package lid (3) top and micro-fluidic chip (4) microchannel, and makes the outgoing hot spot cover the fluoroscopic examination point of the microchannel end of micro-fluidic chip; The exit end of described multiple beam optical fiber (2) is by being machined in ring flange (8) location at chip package lid (3) top, and ring flange is embedded in the cross groove of chip package lid top;
Described emission interference of light colour filter film (5) is produced on the bottom of micro-fluidic chip (4) by processing film technology;
The photosurface of described chip type PIN photodetector (6) is terminal fluoroscopic examination point over against micro-fluidic chip (4) microchannel, be close to emission interference of light colour filter film (5) bottom surface by the mode of silicon-glass bonding, the extension line pad of chip type PIN photodetector (6) links to each other with the pin of chip shell cavity base, draws detection signal.
2. the minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector according to claim 1 is characterized in that: 5 core diameters of described multiple beam optical fiber (2) employing are that 100 microns single fiber forms fibre bundle by peripheral metal sleeve binding combination.
3. the minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector according to claim 2 is characterized in that: the exciting light exit end of described multiple beam optical fiber (2) is apart from (4) 1~2 millimeters of micro-fluidic chips.
CN2008102372198A 2008-12-25 2008-12-25 Minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector Expired - Fee Related CN101441177B (en)

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CN101813628B (en) * 2010-04-08 2012-07-25 长春理工大学 Manufacture method of ultraviolet biological chip integrated sensor
CN101949847B (en) * 2010-08-13 2012-05-30 浙江大学 Lensless fluorescence imaging detection device and application
CN103234949A (en) * 2013-01-30 2013-08-07 大连海事大学 Microalgae activity detection method and device in ship ballast water
CN106940305A (en) * 2016-01-05 2017-07-11 中国科学院苏州纳米技术与纳米仿生研究所 Antibiotic detection means and detection method based on micro-fluidic chip
CN107271421A (en) * 2017-07-27 2017-10-20 深圳中科芯海智能科技有限公司 A kind of microparticle fluorescence detection means in fluid sample
CN108872110B (en) * 2018-07-04 2020-12-11 暨南大学 High-refractive-index-sensitivity optical fiber micro-flow sensor and preparation method thereof
CN110146026A (en) * 2019-05-15 2019-08-20 深圳市兆驰节能照明股份有限公司 Fluorescent film holder for x-ray film and fluorescence membrane probing system
CN111239202B (en) * 2020-02-26 2022-05-17 湖南理工学院 Non-contact conductivity detection device for microfluidic chip and preparation method

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