CN101407283B - Substrate conveying device - Google Patents

Substrate conveying device Download PDF

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Publication number
CN101407283B
CN101407283B CN 200810176658 CN200810176658A CN101407283B CN 101407283 B CN101407283 B CN 101407283B CN 200810176658 CN200810176658 CN 200810176658 CN 200810176658 A CN200810176658 A CN 200810176658A CN 101407283 B CN101407283 B CN 101407283B
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CN
China
Prior art keywords
mentioned
substrate
glass substrate
throughput
mentioned substrate
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Application number
CN 200810176658
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Chinese (zh)
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CN101407283A (en
Inventor
安田守
藤崎畅夫
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奥林巴斯株式会社
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Priority to JP2002116581 priority Critical
Priority to JP2002-116581 priority
Priority to JP2002116581 priority
Application filed by 奥林巴斯株式会社 filed Critical 奥林巴斯株式会社
Publication of CN101407283A publication Critical patent/CN101407283A/en
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Publication of CN101407283B publication Critical patent/CN101407283B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups

Abstract

The present invention provides a substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held and pulled in conveying direction (C).

Description

Substrate conveying device
The application be that April 16, application number in 2003 are 03808707.3 the applying date, denomination of invention is the division of the application for a patent for invention of " substrate conveying device ".
Technical field
The present invention relates to make glass substrate to float and the substrate conveying device carried at transport path, this glass substrate be for for example large-scale liquid crystal display (below, economize slightly LCD) and flat-panel monitor such as Plasmia indicating panel (below, economize slightly PDP) (below, economize slightly FPD) etc.
Background technology
In recent years, for the maximization of corresponding screen with reduce the requirement of cost, in the FPD field in the FPD manufacturing process size of handled glass substrate the tendency that maximizes is day by day arranged.As the method for transportation large-scale glass substrate in the FPD manufacturing process, the known rolling conveying mechanism that has employing to use cylinder.
For example in patent disclosure communique 2000-193604 number and patent disclosure communique 2000-9661 number, putting down in writing the technology of transportation large-scale glass substrate.The former supports by a pair of back-up roller mechanism only being contacted be examined the left and right sides below the substrate (being equivalent to glass substrate), and the position of limiting left and right directions by a pair of restriction cylinder mechanism that docks with end about glass substrate.In addition because the centre portion of glass substrate is crooked downwards because of gravity, so in order to limit the bending of this glass substrate, and below glass substrate the injection pressure air.
The latter is transported to detection of defects portion by the rolling delivery section with glass substrate, the Locating Glass substrate, and carry out detection of defects by the end of clamping device clamping glass substrate.During detection of defects, for support glass substrate non-contiguously, from air float discharge high pressure air the exhausr port that platform arranges after, the height of glass substrate is remained necessarily.
But the conveying of the former glass substrate so carry glass substrate as if high speed, has then produced the abrasion mark of cylinder owing to used a pair of back-up roller mechanism and a pair of restriction cylinder mechanism at the rolling surface of the glass substrate that contacts with cylinder.
The latter is in order to carry glass substrate by the rolling delivery section, and is identical with the former, if carry glass substrate at a high speed, then produced the abrasion mark of cylinder at the rolling surface of the glass substrate that contacts with cylinder.
Summary of the invention
Therefore, the purpose of this invention is to provide and a kind ofly under contactless state, carry, can carry out the substrate conveying device that the high speed of not scratch glass substrate is carried.
Substrate conveying device of the present invention, the substrate of manufacturing is characterized in that in the conveying flat display fabrication process, comprising: substrate floats piece, form shortlyer than the width of above-mentioned substrate with respect to the width on the vertical direction of the throughput direction of above-mentioned substrate, float above-mentioned substrate; Positioning unit, has the attitude control part that the attitude of above-mentioned substrate is positioned the reference position, and being arranged on above-mentioned substrate floats on the piece, the edge that detects above-mentioned substrate under the state that has floated above-mentioned substrate is with the identification attitude, and the attitude that makes this identified above-mentioned substrate moves along above-mentioned throughput direction, with respect to the vertical direction of throughput direction by above-mentioned attitude control part and navigates to the said reference position; And substrate transfer mechanism, be arranged to clip that above-mentioned substrate floats piece and removable along the throughput direction of above-mentioned substrate, and absorption keeps floating the piece back side at the both ends of outstanding above-mentioned substrate laterally from above-mentioned substrate, under the state that has floated above-mentioned substrate, carries to above-mentioned throughput direction.
Described substrate conveying device, it is characterized in that, above-mentioned positioning unit, have a plurality of sensors that the boundary position information to the both sides of above-mentioned substrate orthogonal under the state that has floated above-mentioned substrate detects, and according to identifying above-mentioned attitude by the detected above-mentioned boundary position information of these sensors, and by above-mentioned attitude control part above-mentioned substrate is positioned.
Described substrate conveying device is characterized in that, above-mentioned positioning unit has: a plurality of sensors, detect the boundary position on the orthogonal both sides of above-mentioned substrate,
Gesture recognition portion according to the boundary position information by the both sides of the detected above-mentioned substrate of these sensors, identifies the attitude of above-mentioned substrate,
Wherein, above-mentioned attitude control part moves control to above-mentioned substrate transfer mechanism, navigates to the reference position with the attitude of the above-mentioned substrate that will be identified by above-mentioned gesture recognition portion.
Described substrate conveying device, it is characterized in that, be positioned at the above-mentioned substrate transfer of of moving into side mechanism and have adsorbent pad and arm, above-mentioned adsorbent pad is adsorbed the back side of above-mentioned substrate, above-mentioned arm carries out fine motion along the vertical direction of above-mentioned throughput direction and this throughput direction, above-mentioned positioning unit by above-mentioned arm with above-mentioned substrate orientation to the said reference position.
Described substrate conveying device, it is characterized in that, above-mentioned positioning unit carries out attitude control, be parallel to above-mentioned throughput direction so that float the above-mentioned substrate that floats on the piece at above-mentioned substrate, and carry out attitude control so that the center of above-mentioned substrate and above-mentioned substrate to float the center of transport path of piece consistent.
Described substrate conveying device, it is characterized in that, above-mentioned positioning unit keeps along the both ends of the above-mentioned substrate of above-mentioned throughput direction with the adsorbent pad absorption of above-mentioned substrate conveyor structure respectively, make at least one end in the maintained both ends mobile and make above-mentioned substrate rotation at above-mentioned throughput direction, make its throughput direction with above-mentioned substrate parallel, and make above-mentioned substrate mobile in the direction vertical with above-mentioned throughput direction, thereby above-mentioned substrate orientation is arrived the reference position.
According to main points of view of the present invention, a kind of substrate conveying device is provided, the substrate of manufacturing in the conveying flat display fabrication process, it is characterized in that, comprise: substrate floats piece, form shortlyer than the width of above-mentioned substrate with respect to the width on the vertical direction of the throughput direction of above-mentioned substrate, float above-mentioned substrate; Positioning unit is arranged on above-mentioned substrate and floats on the piece, positions under the state that has floated above-mentioned substrate; And the substrate transfer unit, float piece along above-mentioned substrate and dispose movably, under the state that has floated the above-mentioned substrate that has been carried out the location by above-mentioned positioning unit, absorption keeps the back side of above-mentioned substrate and carries to throughput direction.
Description of drawings
Fig. 1 is the plane structure chart of first embodiment of the substrate conveying device that the present invention relates to of expression;
Fig. 2 is the construction profile of same device;
Fig. 3 is in the same device, the scheme drawing of the glass substrate of floating at substrate loading stage 1;
Fig. 4 is that the air of the glass substrate in the same device is carried the scheme drawing of action;
Fig. 5 is the scheme drawing of the location action in the same device;
Fig. 6 is the scheme drawing of the location action in the same device;
Fig. 7 is the scheme drawing of the location action in the same device;
Fig. 8 is the scheme drawing that the conveying glass substrate after the location action in the same device is carried;
Fig. 9 is the constructional drawing of second embodiment of the substrate conveying device that the present invention relates to of expression;
Figure 10 be in the same device at the scheme drawing that floats a plurality of grooves that piece forms.
The specific embodiment
Below, with reference to the description of drawings first embodiment of the present invention.
Fig. 1 be with substrate (substrate) feedway be applicable to large LCD and PDP etc. the FPD operation become plane structure chart under line (イ Application ラ イ Application) the inspection situation, Fig. 2 is the construction profile of same device.
The substrate loading stage 1 of moving into usefulness is arranged on the vibration-free tables 2.This substrate loading stage 1 loads the glass substrate of moving into 3, and its width (direction vertical with throughput direction C) forms shorter slightly than the width of glass substrate 3.This above substrate loading stage 1 setting be also used as a plurality of airports 4 that air blows and sucks.In addition, these airports 4 also can roughly be arranged on whole of substrate loading stage 1 regularly.On this substrate loading stage 1, be that parallel direction and the predetermined space ground that is separated by form two grooves 5 with respect to throughput direction C.In addition, a plurality of lifting pins (リ Off ト ピ Application) 6 of lifting when substrate loading stage 1 arranges glass substrate 3 and moves into.
Move into transfer robot 7 in the entrance side setting with respect to throughput direction C vertical direction of substrate loading stage 1.This is moved into transfer robot 7 and makes 8 rotations of two arms, advances and retreat by multi-joint arm not shown in the figures, takes out unchecked glass substrate 3 simultaneously from box, and moves on the substrate loading stage 1.
At the outlet side of substrate loading stage 1, be set up in parallel conveying pallet 9 along throughput direction C.This conveying pallet 9 forms length and moves into side to taking out of side from glass substrate 3.Should carry pallet 9 to be loaded on the vibration-free tables 10.
From moving into side to taking out of side on this conveying pallet 9, run through this and move into side and float piece 11 with the total length setting of taking out of side.This floats piece 11, and to form its width (with respect to the vertical direction of throughput direction C) shorter slightly than the width of glass substrate 3.Setting is also used as a plurality of airports 12 that air blows and sucks on this floats piece 11.In addition, also can these airports 12 roughly be set equably floating on whole of piece 11.Float on the piece 11 at this, be parallel direction and be separated by the compartment of terrain predetermined and form two grooves 13 with throughput direction C.The surface elevation that floats the surface elevation of piece 11 and substrate loading stage 1 is roughly the same.
Roughly midway location on the throughput direction C that carries pallet 9 arranges the E of inspection portion that the glass substrate 3 of carrying with certain speed is carried out various inspections.The E of this inspection portion for example carries various inspections such as microscope, line sensor (ラ イ Application セ Application サ) or ccd video camera on door type arm 15 with equipment 14.For example, check that a plurality of line sensors that pass through to arrange with equipment 14 obtain the view data of glass substrate 3.And, handle image inspection that this view data waits to carry out glass substrate 3 for example, detection of defects etc. by image.
Outlet side carrying pallet 9 is set up in parallel the substrate loading stage 16 of taking out of usefulness along throughput direction C.This substrate loading stage 16 is arranged on the vibration-free tables 17.This substrate loading stage 16 is in order to take out of from floating the glass substrate 3 that piece 11 transports and temporarily load, and its width (with respect to the vertical direction of throughput direction C) forms shorter slightly than the width of glass substrate 3.This above substrate loading stage 16 setting be also used as a plurality of airports 18 that air blows and sucks.In addition, also these airports 18 can be set regularly roughly on whole of substrate loading stage 16.Be that parallel direction and the predetermined space ground that is separated by form two grooves 19 with respect to throughput direction C on this substrate loading stage 16.In addition, a plurality of lifting pins 20 of lifting when substrate loading stage 16 arranges glass substrate 3 and takes out of.The surface elevation of substrate loading stage 16 is roughly the same with the surface elevation that floats piece 11.
Substrate loading stage 16 with throughput direction C be that the outlet side of vertical direction arranges and to take out of with transfer robot 21.This is taken out of with transfer robot and makes two arm rotations, moves forward and backward by multi-joint arm not shown in the figures, simultaneously the glass substrate 3 that checks out is received in the box.
Carrying on pallet 9 and the vibration-free tables 17, along throughput direction C many groups are being set in parallel with each other and clip each a pair of slide block 23~28 that floats piece 11 and substrate loading stage 16.A pair of slide block 23,24 and 27,28 is arranged on a pair of slide block 25,26 more lateral.In addition, the height and position of these slide blocks 23~28 is set to identical.
A pair of slide block 23,24 is arranged on location (the ア ラ イ メ Application ト) A of portion that carries pallet 9 entrance sides.On these slide blocks 23,24, be set to a pair of end 29,30 of respectively carrying respectively movably.These carry end 29,30 to have: each arm 29a, the 30a that can stretch along the vertical direction respectively and arrange with rotating freely; Arrange at the leading section of these arms 29a, 30a, absorption keeps each adsorbent pad 29b, the 30b at the both ends at glass substrate 3 back sides respectively; Be arranged on and respectively carry in the end 29,30, and each push rod (プ ラ Application ジ ヤ) that each arm 29a, 30a are moved along the direction vertical with throughput direction C.
A pair of slide block 25,26 is arranged on the outlet side of location division (calibration portion) A and carries between the outlet side of pallet 9.On these slide blocks 25,26, be set to a pair of end 31,32 of respectively carrying respectively movably.These carry ends 31,32 with each conveying end 29,30 identical, have each arm 31a, 32a and each adsorbent pad 31b, 32b.
A pair of slide block 27,28 is arranged between the outlet side of the outlet side of carrying pallet 9 and substrate loading stage 16.On these slide blocks 27,28, be set to a pair of end 33,34 of respectively carrying respectively movably.These carry ends 33,34 with each conveying end 29,30 identical, have each arm 33a, 34a and each adsorbent pad 33b, 34b.
In addition, because a pair of slide block 23,24 and 27,28 is arranged on a pair of slide block 25,26 more lateral, so set the length of each arm 29a, 30a, 33a, 34a, make that the position of position and each slide block 25,26 each adsorbent pad 31b, 32b of each slide block 23, each adsorbent pad 29b, 30b of 24 and 27,28,33b, 34b is identical.
In addition, if can be along the structure of XY direction minute movement for each arm 29a, 30a of keeping glass substrate 3,31a, 32a, 33a, 34a, then these conveying ends 29,30,31,32,33,34 also can be arbitrary structures.
At the location division A that floats on the piece 11 3 alignment sensors 43~45 are set.These alignment sensors 43~45 detect each edge on orthogonal two limits (longitudinal and transverse) of glass substrate 3, and the detection signal of its boundary position of output expression.These alignment sensors 43~45th are arranged the line sensor of a plurality of detecting elements respectively by wire.
Alignment sensor 43 is at the midway location that floats piece 11 Widths, along with throughput direction C equidirectional arrange the line detection side to.This alignment sensor 43 detects in the A of location division and floats the glass substrate 3 that stops in the forward edge of throughput direction C.
The predetermined space of being separated by in the side of floating piece 11 arranges each alignment sensor 44,45.Along making the line detection side to being that vertical direction arranges these alignment sensors 44,45 with respect to throughput direction C.These alignment sensors 44,45 in the A of location division, detect float the glass substrate 3 that stops with throughput direction C equidirectional on the edge.
On the other hand, pressurized air supply unit 46 by pipeline with the substrate loading stage 1 of moving into usefulness, float piece 11, each space part of taking out of the substrate loading stage 16 of usefulness is communicated with, and supply with pressurized air selectively respectively and from each airport 4,12,18 blowing compressed air, and at the substrate loading stage 16 of moving into the substrate loading stage 1 of usefulness, float piece 11 or taking out of usefulness glass substrate 3 is floated.In addition, pressurized air supply unit 46 blows from each airport 4,12,18 and has except the air of electric effect, for example by the air after plasma or the negative ion ionization.
Vacuum suction portion 47 by pipeline with the substrate loading stage 1 of moving into usefulness, float piece 11, each space part of taking out of the substrate loading stage 16 of usefulness is communicated with, and be evacuated selectively respectively, and through each airport 4,12,18 glass substrate 3 absorption are remained on the substrate loading stage 1 of moving into usefulness and the substrate loading stage 16 of the taking out of usefulness.
In addition, vacuum suction portion 47 is communicated with each adsorbent pad 29b, 30b, 31b, 32b, 33b, 34b respectively by pipe arrangement, by these adsorbent pad 29b, 30b, 31b, 32b, 33b, 34b are evacuated, keeps glass substrate 3 and adsorb.
Mobile control division 48 is respectively carried end 29,30,31,32,33,34 in each slide block 23,24,25,26,27,28 mobile controls respectively.
Each detection signal that 49 inputs of gesture recognition portion are exported respectively from three alignment sensors 43~45 according to by 3 three locational boundary position information of the glass substrate shown in these detection signals, is identified the attitude of glass substrate 3.
Attitude control part 50 navigates to the reference position for the attitude of the glass substrate 3 that will be identified by gesture recognition portion 49, and moves a pair of conveying of control end 31,32 along throughput direction C, the direction vertical with respect to throughput direction C.
The action of the device that constitutes as mentioned above then, is described.
Each carries end 29,30 to move to the side of moving on each slide block 23,24, and stops standby.
Move into transfer robot 7 rotations, the arm 8 that moves forward and backward, and from box, take out unchecked glass substrate 3, and be transported to the top of substrate loading stage 1.And each lifting pin 6 of substrate loading stage 1 raises.Move into transfer robot 7 and arm 8 is descended and glass substrate 3 is loaded on each lifting pin 6.Descend by each lifting pin 6, glass substrate 3 is loaded on the substrate loading stage 1.Because the width of glass substrate 3 is longer than the width of substrate loading stage 1, so give prominence to the two end portions of glass substrate 3 from substrate loading stage 1.
Then, each carries end 29,30 that each arm 29a, 30a is raise, and makes each adsorbent pad 29b, 30b absorption from the back side of the outstanding glass substrate 3 of substrate loading stage 1.The absorption position of these adsorbent pad 29b, 30b is the end, the back side of the not formation circuit pattern (パ タ one Application) in the glass substrate 3, for example, is the both ends that become the back side of glass substrate 3 front sides to throughput direction C.At this moment, each adsorbent pad 29b, 30b are raising under the state at the back side that is adsorbed in glass substrate 3 on only than the high position of the surface elevation of substrate loading stage 1.
And pressurized air supply unit 46 is supplied with pressurized air by pipe arrangement to the space part of substrate loading stage 1, and goes up blowing compressed air from airport 4.At this moment, pressurized air has except the air after the ionization of electric effect because of use, and can in and the static of glass substrate, stop charged on the glass substrate 3.
Blow by on compressed-air actuated, form air layer between substrate loading stage 1 and glass substrate 3, as shown in Figure 3, glass substrate 3 is floated from the surface of substrate loading stage 1.At this moment, the air that blows out from each airport 4 flows out from air layer by each groove 5 between substrate loading stage 1 and glass substrate 3.Therefore, because airiness, and be not trapped between substrate loading stage 1 and the glass substrate 3, so glass substrate 3 keeps levelness ground to float at substrate loading stage 1.
Then, mobile control division 48 is respectively carried end 29,30 (arm 29a, 30a) synchronous with what same speed made each adsorbent pad 29b, 30b with the glass substrate of being adsorbed in 3 back sides respectively, and is moved at each slide block 23,24 upper edge throughput direction C as shown in Figure 4.
Thus, glass substrate 3 is being floated and with above the substrate loading stage 1 and float piece 11 above under the complete non-contacting state, is being carried end 29,30 to draw, and carry at a high speed along throughput direction C by each.Carry at a high speed by this, glass substrate 3 arrives the location division A that floats on the piece 11.
When arriving location division A, glass substrate 3 has the situation of relative throughput direction C inclination as shown in Figure 5.Alignment sensor 43 among the A of location division detects and floats the glass substrate 3 that stops at the edge on one side, front side of throughput direction C in the A of location division, and exports its detection signal.
In addition, each alignment sensor 44,45 detect in the A of location division, float the glass substrate 3 that stops with throughput direction C be that its detection signal is exported at the edge of the another side of equidirectional.
Each detection signal that gesture recognition portion 49 input is exported respectively from three alignment sensors 43~45, according to by the glass substrate 3 shown in these detection signals three locational boundary position information, identify the attitude of glass substrate 3.At this moment, glass substrate 3 relative throughput direction C, the right part of front is more side-prominent forward than the left part, and throughput direction C tilts to the left relatively.
Then, attitude control part 50 at first, as shown in Figure 5, makes one to carry end 30 relative throughput direction C to reversing sense (rear side) minute movement from the gesture recognition result of the glass substrate 3 that obtained by gesture recognition portion 49.Thus, glass substrate 3 axle centered by adsorbent pad 29a rotates along arrow F direction, and throughput direction C is configured abreast relatively.
Again, each detection signal of exporting respectively from three alignment sensors 43~45 of gesture recognition portion 49 input is identified the attitude of glass substrate 3.The result of this identification, glass substrate 3 as shown in Figure 6, the left part is near slide block 23 sides.
Attitude control part 50 as shown in Figure 6, drive a push rod of carrying end 29, and along arrow H direction (direction vertical with respect to throughput direction C) extension arm 29a, and, synchronous with it, drive another push rod of carrying end 30 and shorten arm 30a along arrow H direction, thereby and move glass substrate 3 along arrow H direction the center of glass substrate 3 and the center of transport path are mated.
Afterwards, attitude control part 50 makes respectively carries synchronously side shifting forward of end 29,30, makes that the leading section of glass substrate 3 is consistent with the center of alignment sensor 43.At this moment, each carries end 29,30 for example as shown in Figure 7, along arrow N direction minute movement.
As a result, as shown in Figure 7, Locating Glass substrate 3, make the reference position, namely center parallel with respect to throughput direction C and glass substrate 3 is roughly consistent with the center of transport path.In addition, the reference position is the place that each boundary position of glass substrate 3 in three alignment sensors 43~45 detects respectively with center sensor.
When the location of glass substrate 3 stopped, mobile control division 48 made with same speed respectively along the direction opposite with throughput direction C and respectively to carry end 31,32 synchronous as shown in Figure 4, and at each slide block 25,26 mobile.
When these carried end 31,32 to arrive the below of glass substrate 3, the substrate transfer reference position on each slide block 25,26 stopped, and each arm 31a, 32a are raise, and made the back side of each adsorbent pad 31b, 32b absorption glass substrate 3.The absorption position of these adsorbent pad 31b, 32b is the both ends, the back side that the throughput direction C in the glass substrate 3 becomes the front side.
These adsorbent pad 31b, 32b absorption is during glass substrate 3, remove the absorption of respectively carrying end 29,30 each adsorbent pad 29a, 30b after, each arm 29a, 30a descend.
Thus, the absorption of glass substrate 3 maintenance is carried end 29,30 to be delivered to and is respectively carried end 31,32 from each.Each carries end 29,30 mobile in each slide block 23,24 upper edges direction (rear side) opposite with throughput direction C, and after stopping on the substrate transfer reference position of the substrate loading stage 1 of moving into usefulness, carries out standby.If during the transmission of glass substrate 3 termination, each carries end 31,32 as shown in Figure 8, and is synchronous with same speed, and move at each slide block 25,26 along throughput direction C.Thus, carry end 31,32 tractions floating the glass substrate 3 that piece 11 floats, C carries at a high speed along throughput direction, and arrives the inspection E of portion by each.
Among the E of inspection portion, pressurized air supply unit 46 stops to the compressed-air actuated supply of each airport 4 that floats piece 11.
Then, carry out the switching to vacuum suction portion 47 from pressurized air supply unit 46.This vacuum suction portion 47 vacuumizes each airport 12 that floats piece 11 by pipe arrangement, floats on the piece 11 and glass substrate 3 absorption are remained on.In addition, at this moment, after the absorption of each adsorbent pad 31b, the 32b at the back side of releasing absorption maintenance glass substrate 3, each arm 31a, 31b descend.
Among the E of inspection portion, for example, the view data of using inspection with line sensor to obtain by the various inspections by glass substrate 3 with equipment 14 is carried out the pattern inspection, detection of defects of glass substrate 3 etc.At this moment, load the door type arm 15 that checks with equipment 14 and moved along fore-and-aft direction relative to throughput direction C by making, and carried out various inspections by inspection with the whole face of 14 pairs of glass substrate 3 of equipment.
When the inspection of the E of inspection portion stopped, each carried end 31,32 that each arm 31a, 32a are raise, and made each adsorbent pad 31b, 32b become two ends at the back side of front side to glass substrate 3 to throughput direction C absorption.
And vacuum suction portion 47 stops vacuumizing each airport 12 that floats piece 11.And, carry out the switching to pressurized air supply unit 46 from vacuum suction portion 47.This pressurized air supply unit 46 is supplied with pressurized airs to each airport 12 that floats piece 11, and blows pressurized air after the ionization from these airports 12, and glass substrate 3 is floated.
In addition, also can float under the state that piece 11 floats glass substrate 3, make with certain speed respectively along throughput direction and respectively carry end 31,32 synchronous, and at each slide block 23,24 mobile, check the inspection of the E of portion simultaneously.
Afterwards, same as described above, under the state that the glass substrate 3 of floating on the piece 11 is floated fully by compressed-air actuated blowing, each carries end 31,32 to move at each slide block 25,26, and carries glass substrate 3 at a high speed along throughput direction C.
Glass substrate 3 arrives when floating the outlet side of piece 11, and the absorption of glass substrate 3 keeps carrying end 31,32 to be delivered to and respectively carries end 33,34 from each, and the pressurized air supply unit is supplied with pressurized air to each airport 8 of substrate loading stage 16.Carry end 29,30 to carry end 31,32 transmission same to each with above-mentioned from each, carry out carrying end 31,32 to carry the transmission of end 33,34 glass substrate 3 to each from these.
When the transmission of glass substrate 3 stopped, each carried end 33,34 at each slide block 27,28 mobile and carry glass substrate 3 along throughput direction C.And when glass substrate 3 arrived the top of the substrate loading stage 16 of taking out of usefulness, each carried end 33,34 to stop on the substrate transfer reference position.
Each lifting pin 20 raises in the substrate loading stage 16.Pressurized air supply unit 46 stops to the compressed-air actuated supply of each airport 18 of substrate loading stage 16, and each adsorbent pad 33b, 34b remove the absorption to the back side of glass substrate 3, and each arm 33a, 34a are descended.Thus, glass substrate 3 is loaded on each lifting pin 20.Take out of with transfer robot 21 and make arm 22 rotation, move forward and backward, and after each lifting pin 20 takes out the glass substrate 3 that checks out, be contained in the box.
Afterwards, repeat successively a plurality of glass substrate 3 to the moving into of substrate loading stage 1, air carry, the location, check, taking out of from substrate loading stage 16.
Like this, among above-mentioned first embodiment, from each substrate loading stage 1,16 and float a plurality of airports 4,18,12 that piece 11 forms and blow air and make under the state that glass substrate 3 floats, absorption keeps glass substrate 3 to draw at the leading section two ends of throughput direction C, carries simultaneously.Thus, can be under the state that floats large glass substrate 3, not scratch glass substrate 3 is carried and carry out high speed.
Because a plurality of airports 4,18,12 are arranged on each substrate loading stage 1,16 and float on the air conveyor surface of piece 11 regularly, and be provided with each groove 5,13,19, so flow through each groove 5,13,19 from a plurality of airports 4,18,12 air that blow out, so glass substrate 3 and each substrate loading stage 1,16 and float between the piece 11 not air entrapment, and flow through by each groove 5,13,19.Thus, large-scale glass substrate 3 bending that can carry out that middle body does not swell etc., keep very high levelness ground to carry.
Each groove 5,13,19 forms in the direction identical with throughput direction C, so the last blow pressure power of air distributes the same with throughput direction C.Thus, glass substrate 3 is when carrying, and vibration along the vertical direction can not carried under stabilized conditions.
The conveying of glass substrate 3 is adsorbed maintenance respectively to the back side both end sides of the front side of the throughput direction C of glass substrate 3, and forces traction, carries out high speed simultaneously and carries.Thus, glass substrate 3 can carry out not being relative throughput direction C stable conveying the quiveringly such as crawl under float state.In addition, because absorption keeps the back side both end sides of glass substrate 3, so do not contact the part of the circuit pattern that forms on the glass substrate 3, can not influence circuit pattern.
Like this, because high speed transportation large-scale glass substrate 3 non-contactly, so make etc. in such field of semiconductor manufacture at FPD, can satisfy the requirement that not making the product quality deterioration and improving the production rate.
Owing to blow pressurized air after the ionization from each airport 4,18,12, and carry glass substrate 3 at a high speed, thus can in and static, stop charged on glass substrate 3.
Because among the A of location division, under the state that glass substrate 3 is floated, position by three alignment sensors 43~45, gesture recognition portion 49 and attitude control part 50, so can be under the contactless state that floats glass substrate 3, the glass substrate 3 that not scratch is large-scale, and carry out the failure-free location.
In addition, in this location, respectively carry end 29,30 by what carry glass substrate 3 along the two-dimensional direction minute movement, make these carry end 29,30 except the conveying function of glass substrate 3, can be also used as the location, and the conveying that can follow glass substrate 3 positions continuously, can shorten the required time of location.
In the location, owing to pass through the attitude of three alignment sensors, 43~45 identification glass substrate 3, so can detect the attitude of glass substrate 3 accurately.
Further, float in the piece 11 because three alignment sensors 43~45 embed, so the reference position of each alignment sensor 43~45 does not have deviation, can locate each glass substrate 3 accurately according to 3 boundary position information usually.
In addition, above-mentioned first embodiment for example can arrange a plurality of inspection E of portion, applicable to the operation that is provided with various treatment process.
Then, the second embodiment of the present invention is described.In addition, the part identical with Fig. 1 added prosign and omitted its detailed description.
Fig. 9 is the constructional drawing of substrate conveying device.This substrate conveying device is provided with each transfer robot 7,21, making to move into to use becomes the direction identical with throughput direction C with each transfer robot 7 of taking out of usefulness, each arm 8 of 21,22 the direction that moves forward and backward, and can move the retainer (ホ Le ダ) 60 that absorption remains on the glass substrate 3 on the conveying pallet 9 along throughput direction C.
In addition, remove and move into and take out of each lifting pin 6,20 that each substrate loading stage 1 and 16 of usefulness has.Thus, each transfer robot 7,21 is by stretching into each arm 8,22 in each groove 5,19 of each substrate loading stage 1 and 16, and directly loads glass substrate 3 at substrate loading stage 1, or directly takes out glass substrate 3 from substrate loading stage 16.
On conveyance pallet 9, throughput direction C lays two tracks 61 in parallel with each other relatively.On these tracks 61, arrange mobile with floating piece (below, be called retainer) 60 movably.
On the surface of retainer 60 at whole a plurality of airports 62 that blow and suck that the double as air is set.Same with substrate loading stage 1, it is shorter slightly than the width of glass substrate 3 that this retainer 60 forms width, and the height on retainer surface forms with the surface elevation of substrate loading stage 1 roughly the same.
Carry on the pallet 9, a pair of slide block 63,64 that clips retainer 60 is set in parallel with each other along throughput direction C.At the substrate loading stage 1 of moving into side with take out of between the transfer robot 21 of side these slide blocks 63,64 are set.On these slide blocks 63,64, be set to movably respectively a pair of oriented side respectively carry end 29,30 and check side respectively carry end 31,32.
The end 29,30 of respectively carrying of oriented side moves back and forth between the right-hand end Aa of the left end of the transfer robot of moving into side 7 sides on each slide block 63,64 and location division A.Check respectively carrying end 31,32 at the right-hand end Aa of the location division A on each slide block 63,64 and take out of between the right-hand end of substrate loading stage 16 of usefulness and moving back and forth of side.Carry out in the same manner transmitting to respectively carry end 31,32 the glass substrate 3 that check side from the end 29,30 of respectively carrying of oriented side with above-mentioned first embodiment.
The action of the device that constitutes as mentioned above then, is described.
Floated at substrate loading stage 1 by the glass substrate 3 that transfer robot 7 is moved into from box, and with synchronously carry end 29,30 to draw by each to the movement of throughput direction C, and be transported to above the retainer 60 of standby on the A of location division.In addition, each carry end 29,30 absorption position be glass substrate 3 become the two ends at the back side of front side to throughput direction C.
Among the A of location division, glass substrate 3 is identical with above-mentioned first embodiment, carries end 29,30 small movements to position on retainer 60 by each.When the location of glass substrate 3 stops, switch to vacuum suction portion 47 from pressurized air supply unit 46, and glass substrate 3 absorption are remained on the retainer 60.
At this moment, each absorption of carrying end 29,30 to remove glass substrate 3 keeps, and turns back to the left end of moving into side transfer robot 7 sides (substrate transfer reference position) on each slide block 63,64.
Then, retainer 60 has kept under the state of glass substrate 3 in absorption, and C moves along throughput direction.When retainer 11 arrives the inspection E of portion, same as described above, in the E of inspection portion, carry out the various inspections of glass substrate 3.
When the inspection of glass substrate 3 is stopped, respectively carry end 31, each arm 31a, 32a of 32 of on substrate transfer reference position standby are raise, and the back side that keeps glass substrate 3 by each adsorbent pad 31b, 32b absorption.These carry ends 31,32 absorption position is the two ends to the back side of throughput direction C front side of glass substrate 3.Afterwards, 16 supply with pressurized air from pressurized air supply unit 46 to the substrate loading stage, and glass substrate 3 is floated from retainer 60.Under this state, glass substrate 3 is carried end 31,32 tractions by each, and highly is transported on the substrate loading stage 16.
Take out of with in transfer robot 21 insertion grooves 19, and raise, adsorb the back side that keeps glass substrate 3.At this moment, respectively carry end 31,32 adsorbent pad 31b, the absorption of 32b from the back side releasing of glass substrate 3.Take out of with transfer robot 21 and make arm 22 risings, and, make arm 22 rotations, move forward and backward, and take out the glass substrate 3 that checks out from substrate loading stage 16, be received in the box.
Like this, according to above-mentioned second embodiment, can reach the effect identical with above-mentioned first example.In addition, owing to do not move into and take out of each the lifting pin 6,20 that has in each substrate loading stage 1 and 16 of usefulness, so can be shortened each lifting pin 6, opening time of 20 time.
In addition, the present invention is not limited to above-mentioned each example, the implementation phase various distortion can be arranged in the scope that does not break away from its main idea.
Make mode that glass substrate 3 is floated be not limited to back side injection air to glass substrate 3, also can float by electrostatic means.Under the situation of floating by electrostatic means, can carry out removing glass substrate 3.
The mode of the glass substrate 3 that conveying is floated is not limited to for example in a pair of slide block 23, the 24 mobile a pair of ends 29,30 of respectively carrying, also can be in each groove 13 arrange movably have each adsorbent pad respectively carry the end, and carry ends absorption to keep the back side of glass substrate 3 leading sections to carry by these.
Absorption holding position when carrying glass substrate 3 is not limited to the leading section both sides of the glass substrate 3 among the throughput direction C, also can bring in absorption by the leading section two ends of glass substrate 3 and rearward end two and keep, or adsorb maintenance by each central portion on the relative both sides of glass substrate 3 or along a plurality of positions on both sides.If adsorb maintenance glass substrate 3 by the central portion on four angles of this glass substrate 3, relative both sides or along a plurality of positions on both sides, then not only can carry to conveyance direction C, also can carry to the direction opposite with throughput direction C.In addition, if the absorption holding position of glass substrate 3 is the parts that do not form circuit pattern, then also can be surface or the back of the body surface of glass substrate 3.
Loading glass substrate 3 or take out glass substrate 3 from substrate loading stage 16 and also can use certain mechanism except each transfer robot 7,21 to substrate loading stage 1, also can be to carry the substrate of air etc. to float supply unit from other lines.
In the above-mentioned example, although understand the conveying that becomes the glass substrate 3 in the ray examination of the manufacturing process such as flat board of large LCD and PDP etc., but be not limited to this, also applicable to various substrates such as semiconductor wafer and tabular object being floated carry out the situation of carrying at a high speed.In addition, glass substrate 3 is floated carry out the mode of carrying at a high speed to be not limited to from substrate loading stage 1 to retainer conveying on 60, also applicable to the conveying between each retainer that is provided with under a plurality of movably retainer 60 situations.
Each used among the A of location division alignment sensor 43~45 uses line sensor, but is not limited to this, also can use the boundary position of bidimensional ccd video camera identification glass substrate 3.
For at each substrate loading stage 1,16 and float the bending that piece 11 does not have glass substrate 3 central portions, and the maintenance levelness, be provided with two grooves 5,13,19 of the exhaust passage (escaping the げ road) as air respectively, but as shown in figure 10, these grooves 5,13,19 also relatively throughput direction C arrange a plurality of abreast.Because these grooves 5,13,19 are from the air exhaust passage that each airport 4,12,18 blows out, thus can make the two ends of groove open in air, or the circle at the perforation back side or the air escape hole of striated are set in groove, make it can well discharge air.
In addition, these grooves 5,13,19 shape also can be quadrangle, U font, V font, circular-arc concavity.In addition, these grooves 5,13,19 width also can be at each substrate loading stage 1,16 and float the width size that forms air layer between piece 11 and the glass substrate 3 and can float glass substrate 3.
It is identical that these grooves 5,13,19 width form relative throughput direction C, and the air pressure part that imposes on the glass substrate 3 of throughput direction C also can be even.
In addition, for the two ends that make glass substrate 3 do not have downward bending, also can each substrate loading stage 1,16 and the two ends of floating piece 11 a plurality of air squit holes are set, respectively to the both ends injection air of glass substrate 3.
Among above-mentioned second embodiment, though each slide block 63,64 extends to conveyance robot 21 sides of taking out of usefulness,, also may extend into transfer robot 7 sides of moving into usefulness.
Utilizability on the industry
The present invention is used for the conveying that becomes the glass substrate in the ray examination of the operations such as FPD of large LCD and PDP etc., various substrates and tabular object is floated carry out high speed conveying etc.

Claims (6)

1. substrate conveying device, the substrate of manufacturing is characterized in that in the conveying flat display fabrication process, comprising:
Substrate floats piece, forms shortlyer than the width of above-mentioned substrate with respect to the width on the vertical direction of the throughput direction of above-mentioned substrate, floats above-mentioned substrate;
Positioning unit, has the attitude control part that the attitude of above-mentioned substrate is positioned the reference position, and being arranged on above-mentioned substrate floats on the piece, the edge that detects above-mentioned substrate under the state that has floated above-mentioned substrate is with the identification attitude, and the attitude that makes this identified above-mentioned substrate moves along above-mentioned throughput direction, with respect to the vertical direction of throughput direction by above-mentioned attitude control part and navigates to the said reference position; And
Substrate transfer mechanism, be arranged to clip that above-mentioned substrate floats piece and removable along the throughput direction of above-mentioned substrate, and absorption keeps floating the piece back side at the both ends of outstanding above-mentioned substrate laterally from above-mentioned substrate, under the state that has floated above-mentioned substrate, carries to above-mentioned throughput direction.
2. substrate conveying device as claimed in claim 1 is characterized in that,
Above-mentioned positioning unit, have a plurality of sensors that the boundary position information to the both sides of above-mentioned substrate orthogonal under the state that has floated above-mentioned substrate detects, and according to identifying above-mentioned attitude by the detected above-mentioned boundary position information of these sensors, and by above-mentioned attitude control part above-mentioned substrate is positioned.
3. substrate conveying device as claimed in claim 1 is characterized in that,
Above-mentioned positioning unit has:
A plurality of sensors detect the boundary position on the orthogonal both sides of above-mentioned substrate,
Gesture recognition portion according to the boundary position information by the both sides of the detected above-mentioned substrate of these sensors, identifies the attitude of above-mentioned substrate,
Wherein, above-mentioned attitude control part moves control to above-mentioned substrate transfer mechanism, navigates to the said reference position with the attitude of the above-mentioned substrate that will be identified by above-mentioned gesture recognition portion.
4. as each described substrate conveying device of claim 1 to 3, it is characterized in that,
Be positioned at the above-mentioned substrate transfer of of moving into side mechanism and have adsorbent pad and arm, above-mentioned adsorbent pad is adsorbed the back side of above-mentioned substrate, above-mentioned arm carries out fine motion along the vertical direction of above-mentioned throughput direction and this throughput direction, above-mentioned positioning unit by above-mentioned arm with above-mentioned substrate orientation to the said reference position.
5. as each described substrate conveying device of claim 1 to 3, it is characterized in that,
Above-mentioned positioning unit carries out attitude control, is parallel to above-mentioned throughput direction so that float the above-mentioned substrate that floats on the piece at above-mentioned substrate, and carry out attitude control so that the center of above-mentioned substrate and above-mentioned substrate to float the center of transport path of piece consistent.
6. as each described substrate conveying device of claim 1 to 3, it is characterized in that,
Above-mentioned positioning unit keeps along the both ends of the above-mentioned substrate of above-mentioned throughput direction with the adsorbent pad absorption of above-mentioned substrate conveyor structure respectively, and make at least one end in the maintained both ends mobile and make above-mentioned substrate rotation at above-mentioned throughput direction, make its throughput direction with above-mentioned substrate parallel, and make above-mentioned substrate mobile with the direction of above-mentioned throughput direction quadrature, thereby above-mentioned substrate orientation is arrived the reference position.
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