CN101382648B - Darkfield objective device - Google Patents
Darkfield objective device Download PDFInfo
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- CN101382648B CN101382648B CN2008102133905A CN200810213390A CN101382648B CN 101382648 B CN101382648 B CN 101382648B CN 2008102133905 A CN2008102133905 A CN 2008102133905A CN 200810213390 A CN200810213390 A CN 200810213390A CN 101382648 B CN101382648 B CN 101382648B
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- lens
- urceolus
- dark field
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- ring
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/082—Condensers for incident illumination only
- G02B21/084—Condensers for incident illumination only having annular illumination around the objective
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Abstract
The present invention provides a dark field objective apparatus, which is simple, and may irradiate sufficient light to an observation object region. The dark field objective apparatus is equipped with a light source configured at the outside of the objective system in ring-like manner, and converts emergent light from the light source into parallel light via a meridian plane at the front end andinclinedly irradiate to an observation object. Besides, it is preferable that a screw thread portion is arranged at the periphery of the inner barrel for accommodating the objective apparatus, for engaging with a converter of a bright field microscope.
Description
Technical field
What the present invention relates to is that the use dark field illumination receives it and diffuses or diffraction light, objective for dark-ground observation and the dark field illumination device observing or check.
Background technology
Checking that vlsi circuitry (IC pattern) or liquid crystal when having or not foreign matter such as scar or dust, often use dark field illumination to observe, because the observation of suitable this class object of observation thing of dark field illumination with on glass.This dark field illumination, different with the bright field illumination that object of observation thing is carried out to shine on the optical axis direction, be from object of observation thing laterally or vergence direction shines, and will or diffuse the income object lens and the illumination observed from the diffraction light of object of observation thing.
This dark field is observed the lens barrel of usefulness, constitutes (patent documentation 1) by reception is housed from the inner core of the diffraction light of object of observation thing or the objective system that diffuses and the hollow urceolus that the leaded light that the directional light that dark field illumination is used imports is used.
Patent documentation 1: day disclosure communique, spy open flat 7-281098 number
Patent documentation 2: day disclosure communique, spy open 2006-039418 number
Patent documentation 3: day disclosure communique, spy open 2000-121949 number
Patent documentation 4: day disclosure communique, spy open 2001-154103 number
Summary of the invention
Shown in patent documentation 1, the objective for dark-ground observation of the mode that the directional light that dark field illumination is used imports abreast from the optical axis of the outside of objective system and objective system, there is following problem.
In the patent documentation 1, outside microscopical optical system, need to be provided with in addition one and comprise light supply apparatus and the light that this light supply apparatus sends is converted to the collimation optics of directional light, and its directional light is coupled to the lamp optical system of the coupling optical system in the microscopical optical system.Under the situation of the formation of patent documentation 1,, therefore reduce from the diffraction light of object of observation thing or the contrast that diffuses because dark field illumination light is understood some light in the eyepiece optical system that bled by objective system (scattered light).
In the dark field that imports dark field illumination is used the outside annulus of lens barrel, in order to support urceolus, and inner core between need three linking arms at least, its shadow occurs as illumination light, because the part of this shadow tails off the light quantity of shining in object of observation zone.In addition, also need optical element for the influence that reduces this shadow.
In addition, in order illumination light not to be entered objective system circular optical filter need be set, thereby the light quantity that causes entering the dark field viewing area tails off.
The dark field lens barrel of object lens, owing to be provided with the leaded light urceolus that dark field illumination is used, therefore diameter group is big mutually with the objective for bright-field observation lens barrel, can't directly be installed on the converter of bright-field microscope, observes thereby can't use bright-field microscope to carry out dark ground microscope.In addition, only carry out the bright field and observe and since the bright field with lens barrel with respect to the converter of dark ground microscope and diameter is little, therefore on the converter of dark ground microscope, use the bright field also need purchase translation interface with object lens.
In addition, even shown in patent documentation 2, utilize the light source that constitutes by a plurality of LED directly object of observation thing to be thrown light on like that, owing to be not that directional light is shone in object of observation thing, also identical with the bright field observation, so and be not suitable for observing from the diffraction light of object of observation thing or the dark field that diffuses.
And then though used semiconductor laser in the patent documentation 3, laser only imports in the outside of the inner core that photographic element and objective system are housed as directional light, therefore produce with prior art under the identical problem of dark field illumination usefulness lens barrel.In addition, in the technology of this patent documentation 3,, therefore can't use same objective system to carry out the bright field simultaneously and observe owing in the lens barrel camera is housed.In addition, also can't the objective system that multiplying power is different be installed on the microscope and observe with different multiplying powers.
In addition, in the patent documentation 4, owing to the ring-type LED illumination that dark field is used is arranged with the lens barrel branch, though illumination light is difficult to into objective system.But because not about how it being become directional light and shining in the motion of object of observation thing, dark field illumination light is imported in the objective system in addition, therefore it does not consider the multiplying power difference of object lens, the situation that yet will change to the irradiation focal length of object of observation thing.
The present invention carries out in order to address these problems, it is a kind of that its purpose is to provide, thereby easy and sufficient light quantity can be shone and carry out objective for dark-ground observation device that dark field observes and the dark field illumination device that is used in this device in object of observation zone.
Objective for dark-ground observation device of the present invention is provided with light source in the form of a ring in the inner core outside of the lens barrel that objective system is housed.And, the optical element that makes illumination light be converted to the meridian ellipse directional light and shine object of observation thing obliquely is set between light source and object of observation thing, to be converted to the meridian ellipse directional light from the illumination light of light source, and shine in the dark field irradiation area that becomes object of observation zone.Be access in objective system from the light of diffuse reflection of object of observation thing or diffraction, and be imported into microscopical eyepiece optical system, take the back by camera apparatus etc. and implement Flame Image Process or carry out visualization.In addition, the diameter of screw of the end periphery of the inner core of this objective for dark-ground observation device is made the installation diameter of screw of the converter of bright-field microscope, just the bright field can be observed intactly being used in dark field with microscope and observing.
As the optical element of inclination outgoing, be good with the lens that use ring-type or non-spherical reflector or annulus wheel tyre surface lens.Visual field and operating distance are different respectively owing to the difference of object lens multiplying power, therefore will use optical element matched with it according to the visual field and the operating distance of object lens.In addition, be good as light source with the LED element.
Because the depth of parallelism of emergent light in meridian ellipse of the optical element of inclination outgoing, be that focal length, visual field by the optical element of the width ((D-d)/2) of the interval between the optical element of led light source device and inclination outgoing, ring and inclination outgoing determined, therefore to satisfy following condition be good to constitute.
Under the situation of ring lens,
The focal length of ring lens be 0.9WD＜f＜1.1WD,
Dark field irradiation area (visual field) be S≤(D-d)/2,
Distance between the optical element of light source and inclination outgoing is L＞3.3 (D-d),
Wherein, WD is that bright field lens operating distance, D are that internal diameter, the d of urceolus is the external diameter that the inner core of objective system is housed.
In addition, the optical element of inclination outgoing is under the situation of non-spherical reflector, with
Dark field irradiation area (visual field) S form S≤(D-d)/2,
Distance L between light source and the non-spherical reflector forms L＞3.3 (D-d) for good.
In addition, be that the emergence angle α of tire tread lens in meridian ellipse of ring-type becomes under the situation of the objective system part ring-type tire tread lens that hollowed out into circular hole at the optical element of inclination outgoing
α≥tan
-1[(S+d)/2WD]、
The width b of annulus wheel tyre surface lens form b 〉=S * Cos α,
Distance L between light source and the annulus wheel tyre surface lens forms L=fb
For good.
And then, objective for dark-ground observation device of the present invention between the inboard of the outside of inner core and urceolus, in the battery that can charge of ring-type is housed.The power supply of light source also can import from the outside, if but use the ring-type battery, can carry out dark field illumination just dark field viewing objective lens barrel can be installed on microscope with monomer, can observe operation easily.In addition, the distribution that does not need the electric consumption on lighting source.The battery that to make this battery be secondary cell, promptly can charge, and charging is set with terminal on the lens barrel urceolus, can keep often spendable state by charging.
In addition, the present invention is to use when objective system is being housed, can carry out the objective for dark-ground observation device of dark field illumination, and it has the urceolus of annular shape, in the inside of urceolus illuminating light source is housed, and optical element; Wherein, urceolus is in the outside of the lens barrel that objective system is housed, be concentric circles and fixable/dismountable with this lens barrel, optical element be mounted in the urceolus and make the illumination light of sending from light source be converted in the meridian ellipse directional light and to the outgoing obliquely of object of observation thing.
The present invention observes dark field and is loaded in the light source of usefulness in the lens barrel or fixable/dismountable the outside that is disposed at the lens barrel that objective system is housed, and sufficient light quantity can be shone in dark field is observed the visual field, therefore can improve the inspection effect of utilizing dark field to observe.
Description of drawings
Fig. 1 is the sectional view of the objective for dark-ground observation device of expression first embodiment of the invention.
To be expression be installed on the sectional view of the state behind the converter of bright-field microscope with objective for dark-ground observation device shown in Figure 1 to Fig. 2.
Fig. 3 is the sectional view of the objective for dark-ground observation device of expression second embodiment of the invention.
Fig. 4 is the sectional view of the objective for dark-ground observation device of expression third embodiment of the invention.
Fig. 5 is the sectional view of the state behind the microscopical lens barrel that the dark field illumination device that fourth embodiment of the invention relates to is installed on.
Fig. 6 is the sectional side view from right-hand observation dark field illumination device gained shown in Figure 5, is with the sectional view after the II-II line cut-out of Fig. 8.
Fig. 7 is the outboard profile from right-hand observation dark field illumination device gained shown in Figure 5.
Fig. 8 is the upward view that the arrow A direction from Fig. 7 is observed dark field illumination device gained shown in Figure 5.
Fig. 9 is the sectional side view of the dark field illumination device that relates to of fifth embodiment of the invention, is the figure that is equivalent to Fig. 6.
Symbol description
1 inner core
2,25,32 urceolus
3 objective systems
4 batteries
5 circuit boards
6,26 LED elements (led light source device)
7 ring lens
8 power switches
9 charging terminals
10 threaded portions
11 converters
12 bright field illumination systems
13 non-spherical reflectors
14,27 annulus wheel tyre surface lens
20,30 dark field illumination devices
22 lens barrels
23 object lens configuration spaces
33 ring-type tire tread lens
34 catoptrons
S: dark field irradiation area (visual field)
D: ring internal diameter (bright field lens external diameter)
D: ring external diameter
WD: bright field lens operating distance
Distance between the optical element of L:LED light supply apparatus and inclination outgoing
α: the emergence angle of annulus wheel tyre surface lens in meridian ellipse
B: the width of annulus wheel tyre surface lens
Fb: the back focal length in the meridian ellipse of annulus wheel tyre surface lens
Embodiment
Below, with reference to accompanying drawing example of the present invention is described.
(first embodiment)
Fig. 1 is the sectional view of the objective for dark-ground observation device of expression first embodiment of the invention.
Present embodiment is made of concentrically ringed inner core 1 and urceolus 2, and objective system 3 is housed in the inner core 1.The external diameter of the observation thing side of inner core 1 is d (a ring internal diameter), the bright field lens external diameter when being equivalent to utilize object lens to carry out the bright field observation.Urceolus 2 forms and concentric cylindric of inner core 1.In the annulus between urceolus 2 and inner core 1, take in ring-type battery 4, the circuit board 5 that becomes the LED of light source element 6 is installed and will be converted on the meridian ellipse directional light from the illumination light of LED element 6 and outgoing in the ring lens 7 of dark field irradiation area S.The power switch 8 of the bright lamp control usefulness of LED element 6 is arranged on the circuit board 5 and is exposed to the surface of urceolus 2.In addition, the secondary cell of battery 4 for charging, its charging is arranged at the appropriate location of urceolus 2 with terminal 9.At this, lens 7 are optical element.And then LED element 6 and lens 7 become the component parts that the LED lighting device is used.
The upper periphery of the microscopical installation side in inner core 1 disposes promising microscopical converter 11 (with reference to Fig. 2) threaded portion 10 of using (being screwed into) is installed.Because the diameter identical (for example being φ 20) of the external diameter of inner core 1 and objective for bright-field observation device, so can be intactly and the threaded engagement of the converter 11 of bright-field microscope.Thus, can use bright-field microscope and carry out the dark field observation.Fig. 2 represents that the objective for dark-ground observation device with first embodiment is installed on the sectional view of the state behind the converter 11 of bright-field microscope.
Bright-field microscope is provided with bright field illumination system 12, throws light on by this bright field illumination system 12 when carrying out the bright field observation, when carrying out the dark field observation, makes the power switch 8 of objective for dark-ground observation device connect (ON) and carry out dark field illumination.Thus, can carry out both sides' observation of bright field and dark field by bright-field microscope.
Be made as D if the external diameter (external diameter of the inner core 1 of objective system 3 is housed) of inner core 1 is made as the internal diameter of d, urceolus 2, the dark field irradiation area is made as S, and then to be in the pass of S≤(D-d)/2 be good to S.
And then if the distance between LED element 6 and the ring lens 7 is made as L, then L is in L〉pass of 3.3 (D-d) is good.
The depth of parallelism of emergent light in meridian ellipse from ring lens 7, determine by the width ((D-d)/2) of distance L, ring lens 7 and focal distance f, the dark field irradiation area S of lens 7, collimated illumination light is to be used for the required condition that dark field is observed, wherein, ring lens 7 will be from the illumination light outgoing obliquely of LED element 6, and the reflected light that it will satisfy the illumination light of inclination outgoing does not directly enter objective system 3 these conditions.
In addition, above-mentioned condition is to use the beam spreading angle of bullet cut LED and its illumination light will satisfy in this condition below 15 ° as LED element 6.
If the beam spreading angle, is difficult to ring lens 7 illumination light of the high depth of parallelism of outgoing obliquely by monomer more than 15 °.
(second embodiment)
Below, as second embodiment, describe shining in the example of the objective for dark-ground observation device of dark field irradiation area S by non-spherical reflector 13 from the illumination light of LED element 6 with reference to Fig. 3.
Fig. 3 is the sectional view of the objective for dark-ground observation device of the non-spherical reflector 13 that is provided with ring-type of the front end at urceolus 2.Structure beyond the non-spherical reflector 13 is identical with first embodiment, therefore omits non-spherical reflector 13 explanation in addition.
Among this second embodiment, the internal diameter that is made as d, urceolus 2 as if the external diameter (external diameter of the inner core 1 of objective system 3 is housed) with inner core 1 is made as D, identical with first embodiment, the dark field irradiation area is made as S, then to be in the pass of S≤(D-d)/2 be good to S, and then if the distance between LED element 6 and the non-spherical reflector 13 is made as L, then L is in L〉pass of 3.3 (D-d) is good.
(the 3rd embodiment)
Below, as the 3rd embodiment, describe shining in the example of the objective for dark-ground observation device of dark field irradiation area S by annulus wheel tyre surface lens 14 from the illumination light of LED element 6 with reference to Fig. 4.
Fig. 4 is the sectional view that is provided with the objective for dark-ground observation device of annulus wheel tyre surface lens 14 at the front end of urceolus 2.Among the 3rd embodiment, the installation configuration of LED element 6 is different with first embodiment, second embodiment, it is configured to, make the leading section of the urceolus 2 that LED element 6 is housed be the significantly coniform form of expansion with respect to inner core 1, so that LED element 6 does not change and throws light on obliquely with respect to dark field irradiation area S lighting optical axis.That is to say that be umbrella from middle part to the front end of inner core 1 urceolus 2 is installed like that, wherein, urceolus 2 contains a plurality of LED elements 6, circuit board 5, the annulus wheel tyre surface lens 14 that are configured to ring-type.Then, will shine in dark field irradiation area S by the directional light that annulus wheel tyre surface lens 14 are converted in the meridian ellipse from the light of LED element 6.
The diameter of the microscope side installation portion of inner core 1 is identical with the diameter of objective for bright-field observation device, dispose the threaded portion 10 of the converter 11 (with reference to Fig. 2) that is used to be installed on bright-field microscope at this, thereby can directly be installed on the converter 11 of bright-field microscope.
The 3rd embodiment, different with first embodiment or second embodiment, make from the illumination light of LED element 6 outgoing and do inclined light shaft conversion, but be in same optical axis, in line the relation of Lian Jieing with annulus wheel tyre surface lens 14-dark field irradiation area S of LED element 6-ring-type.
At this, if being made as the distance that the width of α, annulus wheel tyre surface lens 14 is made as between b, LED element 6 and the annulus wheel tyre surface lens 14, the emergence angle of annulus wheel tyre surface lens 14 is made as L, then the emergence angle α of annulus wheel tyre surface lens 14 is in α 〉=tan
-1The pass of [(S+d)/2WD] is that pass that width b good, annulus wheel tyre surface lens 14 are in b 〉=S * Cos α is that to be in that L=fb closes be good for distance L between good, LED element 6 and the annulus wheel tyre surface lens 14.
Thus, from the illumination light of LED element 6 be converted in the meridian ellipse directional light and obliquely outgoing in dark field irradiation area S.
Second embodiment and the 3rd embodiment also dispose threaded portion 10 in the end of inner core 1 periphery in the same manner with first embodiment, and can be installed on the converter 11 of bright-field microscope.
In each embodiment of above first, second, third, owing to can change with the object lens monomer, therefore the operability of checking also can improve.In addition, use, therefore do not need to use especially the dark ground microscope that disposes objective for dark-ground observation installation usefulness converter owing to being installed on the bright-field microscope.
(the 4th embodiment)
Below, as the 4th embodiment, describe with reference to the dark field illumination device 20 of accompanying drawing to the periphery that releasably is installed on microscopical lens barrel 22.
Fig. 5 is the sectional view that the dark field illumination device 20 that the 4th embodiment relates to is installed on the state of microscopical lens barrel 22.Fig. 6 is the sectional side view of dark field illumination device 20 gained from right-hand observation Fig. 5, is the sectional view after the II-II line cut-out with Fig. 8.Fig. 7 is the outboard profile of dark field illumination device 20 gained that relate to from right-hand observation the 4th embodiment.Fig. 8 is the upward view that the arrow A direction from Fig. 7 is observed dark field illumination device 20 gained that the 4th embodiment relates to.
Dark field illumination device 20 is for carrying out the dark field illumination means of dark field when observing by microscope.Shown in Fig. 5 and Fig. 6 etc., dark field illumination device 20 has the form of the central ring-type that is hollowed out, and releasably is installed on the outside of microscopical lens barrel 22.Lens barrel 22 is mainly by the objective system of formation such as object lens (omit diagram) with 24 formations of the cylindrical shell with summary cylindrical shape of this objective system are housed.Object lens are configured in the space 23 that cylindrical shell 24 surrounded.Dark field illumination device 20 encases the cylindrical shell 24 of object lens, thereby the main body that can adjust the telescope to one's eyes is carried out installation or removal.In addition, on cylindrical shell 24, going up screw-in in three positions (left among Fig. 5, right-hand and paper front side) that separate with 90 intervals of spending along circumferencial direction has screw 24a.By this screw 24a, dark field illumination device 20 is fixed in cylindrical shell 24.
As Fig. 6 and shown in Figure 8, dark field illumination device 20 is provided with: the urceolus 25 with cyclic form, separate certain intervals in a circumferential direction and be equipped on urceolus LED element 26 25 inside, that become light source, corresponding with LED element 26 and separate certain intervals in a circumferential direction and be equipped near annulus wheel tyre surface lens 27 front end (openend) portion of urceolus 25, that become optical element and the support plate 28 (with reference to Fig. 8) of supporting the ring-type of annular tire tread lens 27.In addition, in this example, LED element 26 equally spaced disposes nine altogether, and the annulus wheel tyre surface lens 27 of same shape also dispose nine.Annulus wheel tyre surface lens 27 are configured to, respectively circumferencial direction with the such size of 40 degree amplitudes adjacency.Like this, with odd number and equally spaced configuration, there are not symmetry in LED element 26 or annulus wheel tyre surface lens 27, is being desirable aspect the diffuse reflection of light.
As Fig. 6 and shown in Figure 8, urceolus 25 has the form of the central ring-type that is hollowed out.Specifically, urceolus 25 is by covering top wall 40 its top surface side, have cyclic form when the top of Fig. 6 is observed, on optical axis direction, extend and cover the circle-shaped internal perisporium 41 of all sides in it, and constitute with circle-shaped periphery wall 42 that top wall 40 was set up and covered circumferential lateral surface continuously.Therefore, urceolus 25 has and caves in the slightly light guide section 43 of concavity along circle-shaped top towards Fig. 6.That is to say, light guide section 43 in urceolus 25 along circle-shaped open lower side to Fig. 6.This light guide section 43 connects at circumferencial direction, and forms ring-type.As shown in Figure 6, internal perisporium 41 tilts to the central axis M of urceolus 25 direction after extending below interior Zhou Duanxiang Fig. 6 of top wall 40.In addition, this central axis M is equivalent to optical axis.In addition, the openend 41a of internal perisporium 41 is positioned at the top of Fig. 6 with respect to the openend 42a of periphery wall 42.In addition, on top wall 40, on three positions (left among Fig. 6, central authorities and paper front side) that circumferencial direction separates at interval with 90 degree, be provided with slightly flat form to outstanding joint portion 45, the top of Fig. 6.On these each joint portions 45, be formed with by towards the notch 45a that laterally cuts out.In addition, notch 45a all in a circumferential direction to same direction cutting, still also can make any one form to reverse cutting in a circumferential direction.
As shown in Figure 6, LED element 26 separates certain intervals and is equipped with nine altogether along circumferencial direction in the inboard of urceolus 25 to be fixed in the form of top wall 40.Top wall 40 forms along with tilting to the below of Fig. 6 towards outer circumferential side, so LED element 26 is fixed in urceolus 25 with the state that tilts to the inside.
As Fig. 6 and shown in Figure 8, annulus wheel tyre surface lens 27 are near the openend of urceolus 25, and are corresponding with LED element 26 and separate certain intervals and be equipped with nine altogether along circumferencial direction.In addition, these annulus wheel tyre surface lens 27 are set with the state that tilts to the inside.Specifically, annulus wheel tyre surface lens 27 separate certain intervals and are fixed in (with reference to Fig. 8) on the ring-type support plate 28 towards circumferencial direction.Annulus wheel tyre surface lens 27 are for having the round lens of annulus wheel tyre surface.In addition, in the annulus wheel tyre surface lens 27, the face relative with LED element 26 forms smooth face.Support plate 28 is configured to, and tilts to the below of Fig. 6 towards outer circumferential side from interior all sides.That is the form that, has the central umbrella that is hollowed out.This support plate 28 to be fixed with the state of annulus wheel tyre surface lens 27, is fixed in the open end portion of urceolus 25 as sealing light guide section 43.
Dark field illumination device 20, by lens barrel 22 being inserted in the inboard of the internal perisporium 41 of urceolus 25, and urceolus 25 is rotated in a circumferential direction, the notch 45a that is formed at each joint portion 45 is combined with the shaft portion of screw 24a, under bonding state, tighten screw 24a, thereby be installed on lens barrel 22.Be installed at dark field illumination device 20 under the state of lens barrel 22, the object lens that become the fore-end that is disposed at this lens barrel 22 are inserted into the state (with reference to Fig. 5) of summary middle body of the short transverse of dark field illumination device 20.In addition, be installed at dark field illumination device 20 under the state of lens barrel 22, dark field illumination device 20 is in the outside of lens barrel 22, is that the center is configured to concentric circles with the optical axis of this lens barrel 22.That is to say, become the optical axis state consistent of lens barrel 22 with the central axis M of dark field illumination device 20.
As shown in Figure 5, dark field illumination device 20, the directional light that the illumination light from each LED element 26 is converted in the meridian ellipse by annulus wheel tyre surface lens 27, and to the dark field irradiation area S outgoing obliquely that becomes irradiation area.Therefore, by the power switch 46 of dark field illumination device 20 is connected (ON), make from the illumination light of each LED element 26 and shine obliquely, thereby can carry out microscopic examination to the light of observed object diffraction or scattering by objective system in dark field irradiation area S.That is to say, passed through the light of objective system, be received eyepiece optical system and enter human eye, and can observe object of observation thing.
At this, be made as the back focal length that distance between b, LED element 26 and the annulus wheel tyre surface lens 27 is made as the annulus wheel tyre surface lens 27 in L and the meridian ellipse and be made as fb if the emergence angle of annulus wheel tyre surface lens 27 shown in Figure 5 is made as width that operating distance (distances between object of observation thing and the object lens) that external diameter that α, dark field irradiation area (irradiation area) be made as S, lens barrel 22 is made as d, object lens is made as WD, annulus wheel tyre surface lens 27, then form following relation
α≥tan
-1[(S+d)/2WD]、
b≥S×Cosα、
L＝fb
For good.
Form this relation, just can guarantee to be converted to directional light in the meridian ellipse from the illumination light of LED element 26, and obliquely outgoing in dark field irradiation area S.
The dark field illumination device 20 of Gou Chenging as described above can make illumination light from each LED element 26 be converted in the meridian ellipse directional light and shines obliquely to dark field irradiation area S.Therefore, can be by packing in the objective system of lens barrel 22, can send diffraction to the object of observation thing on the dark field irradiation area S or irreflexive light carries out visualization.In addition, also can utilize camera apparatus to take and implement Flame Image Process, carry out image and observe.
In addition, in dark field illumination device 20, make from the illumination light of LED element 26 and shine in dark field irradiation area S by annulus wheel tyre surface lens 27.Therefore, can will be converted to the directional light in the meridian ellipse from the illumination light of LED element 26 radiation by annulus wheel tyre surface lens 27 and the object of observation thing of dark field irradiation area S be shone.Therefore in addition,, object of observation thing can be spreaded all over the illumination in full week from its outside, make object of observation thing obtain sufficient irradiates light because annulus wheel tyre surface lens 27 are and dispose a plurality ofly circle-shapedly.Consequently, can more clearly observe object of observation thing.
(the 5th embodiment)
Below, as the 5th embodiment, the dark field illumination device 30 of the periphery that releasably is installed on microscopical lens barrel 22 is described with reference to Fig. 9.In addition, in the dark field illumination device 30 that the 5th embodiment relates to,, omit when being marked with prosign or simplify its explanation for the common part of the dark field illumination device that relates to the 4th embodiment 20.
Fig. 9 is the sectional view of the dark field illumination device 30 that relates to of the 5th embodiment, is the figure that is equivalent to Fig. 6.
As shown in Figure 9, dark field illumination device 30 has the cyclic form that central authorities are hollowed out, and releasably is installed on the outside of microscopical lens barrel 22.
As shown in Figure 9, dark field illumination device 30 is provided with: the urceolus 32 with cyclic form, separate certain intervals in a circumferential direction and be equipped on urceolus LED element 26 32 inside, that become light source, become near the ring-type tire tread lens 33 optical element, that have cyclic form of open end that are equipped on urceolus 32, and the catoptron 34 that makes the illumination light reflection that is incident to ring-type tire tread lens 33.
As shown in Figure 9, urceolus 32 has the cyclic form that central authorities are hollowed out.In addition, on urceolus 32, along circle-shaped towards Fig. 9 the top and cave in and become slightly that the light guide section 35 of concavity forms ring-type.As shown in Figure 9, near the open end of the periphery wall 36 in covering urceolus 32 outsides, become the rake 37 that tilts to the central axis N of urceolus 32 direction.In addition, cover the openend 38a of the internal perisporium 38 of urceolus 32 inboards, be positioned at the top of Fig. 9 with respect to the openend 37a of rake 37.In addition, be provided with three joint portions 45 on the top of urceolus 32.
As shown in Figure 9, LED element 26, the form with the end face that is fixed in light guide section 35 separates certain intervals, for example is equipped with nine altogether along circumferencial direction in the inboard of urceolus 32.Ring-type tire tread lens 33 have the cyclic form that central authorities are hollowed out, and all sides are provided with the annulus wheel tyre surface 33a that spreads all over full week and form in it.In addition, on the outer circumferential side of ring-type tire tread lens 33, be formed with the inclined plane part 33b that tilts towards central axis N direction.These ring-type tire tread lens 33 are as sealing light guide section 35 and be equipped near the open end of urceolus 32.
In addition, has the catoptron 34 of aspheric surface shape of the cyclic form that hollowed out of central authorities between the rake 37 of the inclined plane part 33b of ring-type tire tread lens 33 and urceolus 32.This catoptron 34 is fixed in inclined plane part 33b.But, can catoptron 34 be fixed in inclined plane part 33b yet, and be fixed in rake 37.The reflecting surface of this catoptron 34 forms smooth face.In addition, the reflecting surface of catoptron 34 can not formed tabular surface yet, but form the face of other forms such as curved surface shape.
Dark field illumination device 30 is installed on the lens barrel 22 with the dark field illumination device 20 identical methods that relate to above-mentioned example.Be installed at dark field illumination device 30 under the state of lens barrel 22, the optical axis of lens barrel 22 is consistent with the central axis N of dark field illumination device 30.
Dark field illumination device 30, illumination light from each LED element 26 is reflected by catoptron 34, this reflected light is converted into the directional light of meridian ellipse by ring-type tire tread lens 33 at annulus wheel tyre surface 33a place, and to dark field irradiation area S outgoing obliquely.Therefore, by power connection (ON) with dark field illumination device 30, make from the illumination light of each LED element 26 and shine obliquely, thereby can utilize objective system that diffraction or irreflexive light of object are carried out the dark ground microscope observation in dark field irradiation area S.
In the dark field illumination device 30 that constitutes as described above, can be from the illumination light of each LED element 26 by catoptron 34 reflections, and shine obliquely to dark field irradiation area S after this reflected light is converted to directional light.Therefore, can utilize the objective system that is loaded into lens barrel 22 that the object of observation thing of dark field irradiation area S is produced diffracted or irreflexive light and carry out visualization.In addition, because illumination light reflect on catoptron 34, so angle by accommodation reflex mirror 34 or size etc. and can easily change dark field irradiation area S.
In addition, in dark field illumination device 30, the ring-type tire tread lens 33 from the illumination light of the LED element 26 annulus wheel tyre surface 33a by having ring-type are shone in dark field irradiation area S.Therefore, can make the directional light that is converted in the meridian ellipse by ring-type tire tread lens 33 from the illumination light of LED element 26 irradiations, and the object of observation thing of dark field irradiation area S is shone.In addition,, therefore can spread all over the illumination in full week from its outside, can make object of observation thing obtain sufficient irradiates light object of observation thing because ring-type tire tread lens 33 have the form of ring-type.Consequently, object of observation thing more clearly.
More than, each example of the present invention is illustrated, but the invention is not restricted to above-mentioned form, can implement with various deformation forms.
In each above-mentioned example, LED element 6 disposes a plurality of in the form of a ring, and LED element 26 is and is equipped with nine circle-shapedly, but the quantity of LED element 6,26 is not limited to nine, can be made as below eight, also can be made as more than ten.In addition, in above-mentioned example, the quantity of annulus wheel tyre surface lens 14,27 also is not limited to nine, can be made as below eight, also can be made as more than ten.In addition, cylindrical shell 24 forms the main body that can adjust the telescope to one's eyes and carries out installation or removal, but cylindrical shell 24 also can form and is fixed in microscope body and non-dismountable.
In addition, in the 3rd to the 5th example, adopted annulus wheel tyre surface lens 14,27 with annulus wheel tyre surface or ring-type tire tread lens 33 as optical element, but also can adopt the lens of other kinds such as Fresnel lens as optical element with annulus wheel tyre surface 37a.In addition, various lens or non-spherical reflector 13 have been represented as optical element, but except lens or non-spherical reflector, also there are prism, optical filter, diffraction grating, wave plate, polarization element, optical fiber, catoptron etc. as optical element, also can adopt these optical elements to replace lens or non-spherical reflector.
In addition, in each above-mentioned example, to using the situation of LED element 6,26 to be illustrated as light source, but as light source except the LED element, also can adopt the fluorescence radiation element that for example uses zinc paste, also can adopt high meticulous zinc-oxide nano pothole (nano pit) light emitting array, the organic EL luminous element (particularly white light emission organic EL) that similarly utilizes zinc paste, the solid-state light emitting element that utilizes carbon nano-tube.
Utilize possibility on the industry
By the present invention, can provide easy objective for dark-ground observation device and the dark field lighting device that is used in this device. These devices can be applicable to that all use microscopical field, all need the field of dark field illumination, and then also can be conducive to the application to IC, liquid crystal industry.
Claims (3)
1. an objective for dark-ground observation device when can putting into objective system, can carry out dark field illumination, and this objective for dark-ground observation device is provided with:
Can put into the inner core of above-mentioned objective system and become concentrically ringed urceolus with above-mentioned inner cylindrical, wherein, have in the urceolus outside that is arranged at above-mentioned inner core in the form of a ring and outgoing illumination light light source and will from the light of this light source by meridian ellipse be converted to directional light and obliquely outgoing in the optical element of object of observation thing
The outer peripheral portion of one side's end side of above-mentioned inner core exposes, and this exposed portions serve is provided with and is used for the threaded portion that cooperates with the converter hole of bright-field microscope,
And then, between the inboard of the outside of above-mentioned inner core and above-mentioned urceolus, in the battery that can charge of ring-type is housed, it is characterized in that,
The optical element of described inclination outgoing for objective system part is hollowed out the ring lens in circular hole, and is installed on the fore-end of above-mentioned urceolus, and constitutes and satisfy following condition:
(1) focal distance f of the optical element of above-mentioned inclination outgoing be 0.9WD＜f＜1.1WD,
(2) dark field irradiation area S be S≤(D-d)/2,
(3) distance L between the optical element of light source and inclination outgoing is L＞3.3 (D-d),
Wherein, WD is that bright field lens operating distance, D are the internal diameter of urceolus, and d is an external diameter of taking in the inner core of objective system.
2. objective for dark-ground observation device as claimed in claim 1 is characterized in that the optical element of described inclination outgoing replaces with the non-spherical reflector that is arranged at above-mentioned outer cylinder front end, and constitutes and satisfy following condition:
(1) dark field irradiation area S be S≤(D-d)/2,
(2) distance L between light source and the non-spherical reflector is L＞3.3 (D-d).
Wherein, D is the internal diameter of urceolus, and d is an external diameter of taking in the inner core of objective system.
3. objective for dark-ground observation device as claimed in claim 1, it is characterized in that, described light source is made of the LED element, and the LED lighting device that this LED element and above-mentioned optical element are constituted is set to respect to above-mentioned urceolus, makes irradiates light to the direct projection of dark field irradiation area; The optical element of described inclination outgoing, the configuring area that replaces with above-mentioned objective system part is hollowed out into the tire tread lens of the ring-type of circular hole, and is installed on the fore-end of above-mentioned urceolus, and constitutes and satisfy following condition:
(1) the emergence angle α 〉=tan of the tire tread lens of ring-type in meridian ellipse
-1[(S+d)/2WD],
(2) the width b of the tire tread lens of ring-type be b 〉=S * Cos α,
(3) distance L between the tire tread lens of light source and ring-type is L=fb.
Wherein, WD is that bright field lens operating distance, D are the internal diameter of urceolus, and d is an external diameter of taking in the inner core of objective system, and S is the dark field irradiation area, and fb is the back focal length of the tire tread lens of ring-type.
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-006919 | 2007-09-06 | ||
| JP2007006919 | 2007-09-06 | ||
| JP2007006919U JP3137236U (en) | 2007-09-06 | 2007-09-06 | Dark field objective lens system |
| JP2007232248 | 2007-09-07 | ||
| JP2007-232248 | 2007-09-07 | ||
| JP2007232248A JP2009063856A (en) | 2007-09-07 | 2007-09-07 | Dark field objective lens device |
| JP2008002595U JP3142994U (en) | 2008-04-22 | 2008-04-22 | Dark field illumination device |
| JP2008-002595 | 2008-04-22 | ||
| JP2008002595 | 2008-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101382648A CN101382648A (en) | 2009-03-11 |
| CN101382648B true CN101382648B (en) | 2011-03-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102133905A Expired - Fee Related CN101382648B (en) | 2007-09-06 | 2008-09-02 | Darkfield objective device |
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| CN (1) | CN101382648B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106066562B (en) * | 2015-04-21 | 2020-07-10 | 康代有限公司 | Inspection system with extended angular coverage |
| CN105022150A (en) * | 2015-07-31 | 2015-11-04 | 梧州奥卡光学仪器有限公司 | Dry type dark field condenser |
| CN109541789B (en) * | 2018-11-22 | 2021-09-21 | 深圳市爱科学教育科技有限公司 | Microscope |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5690417A (en) * | 1996-05-13 | 1997-11-25 | Optical Gaging Products, Inc. | Surface illuminator with means for adjusting orientation and inclination of incident illumination |
| US6259557B1 (en) * | 1998-04-30 | 2001-07-10 | Nikon Corporation | Device and method for dark field illumination |
| CN2794867Y (en) * | 2005-04-07 | 2006-07-12 | 赵洪哲 | Light emitting pen |
| CN2828846Y (en) * | 2005-08-24 | 2006-10-18 | 罗意宽 | Ring lamp |
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2008
- 2008-09-02 CN CN2008102133905A patent/CN101382648B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5690417A (en) * | 1996-05-13 | 1997-11-25 | Optical Gaging Products, Inc. | Surface illuminator with means for adjusting orientation and inclination of incident illumination |
| US6259557B1 (en) * | 1998-04-30 | 2001-07-10 | Nikon Corporation | Device and method for dark field illumination |
| CN2794867Y (en) * | 2005-04-07 | 2006-07-12 | 赵洪哲 | Light emitting pen |
| CN2828846Y (en) * | 2005-08-24 | 2006-10-18 | 罗意宽 | Ring lamp |
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| CN101382648A (en) | 2009-03-11 |
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