CN101373171B - Air molecule pollution sampling auxiliary device and sampling method - Google Patents
Air molecule pollution sampling auxiliary device and sampling method Download PDFInfo
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- CN101373171B CN101373171B CN2007100450785A CN200710045078A CN101373171B CN 101373171 B CN101373171 B CN 101373171B CN 2007100450785 A CN2007100450785 A CN 2007100450785A CN 200710045078 A CN200710045078 A CN 200710045078A CN 101373171 B CN101373171 B CN 101373171B
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Abstract
The invention discloses an airborne molecular contamination (AMC) sampling aid apparatus which is used together with an AMC sampling device arranged inside the AMC sampling aid apparatus. The AMC sampling aid apparatus provides an environment at a pressure equal to that of a negative pressure cavity to be measured and tested, so that the AMC sampling can be performed by the AMC sampling device in the environment at the pressure equal to that of the negative pressure cavity to be measured and tested. Moreover, the invention provides an AMC sampling method for a certain novel material. The technical proposal of the invention is adopted to allow the AMC sampling device to operate in the environment at the pressure equal to that of a negative pressure cavity to be measured and tested, so that the effects of pressure difference on the AMC sampling device can be avoided and the sampling precision is improved.
Description
Technical field
The present invention relates to the air molecule pollution Sampling techniques, more particularly, relate to a kind of air molecule pollution sampling additional device and the method for sampling.
Background technology
Air molecule pollution AMC sampling is an important step in the manufacture of semiconductor, generally is by an AMC sampling apparatus environment among the negative pressure cavity Exhaust Duct Chamber to be tested to be sampled, and obtains the AMC parameter.
Usually, a pump is arranged in the AMC sampling apparatus, environmental samples can be extracted in the AMC sampling apparatus and test, but generally speaking, negative pressure cavity to be tested is near vacuum, and pressure is very low, usually about-1800Pa, this has brought very big difficulty just for the environmental samples collecting work of pump.Because the pump in the AMC sampling apparatus can not be very large-scale, therefore can run into the situation that can't extract environmental samples.
Summary of the invention
The present invention aim to provide a kind of AMC sampling auxiliary during and the method for sampling, the AMC sampling apparatus is placed and the environment of negative pressure cavity to be tested with equal pressure, thereby eliminates pressure differential, make pump confession to extract environmental samples easily.
A first aspect of the present invention, a kind of air molecule pollution AMC sampling additional device is provided, be used in combination with the AMC sampling apparatus, this AMC sampling additional device provide one with the environment of negative pressure cavity equipressure to be tested, this AMC sampling apparatus places this AMC sampling additional device, with the environment of negative pressure cavity equipressure to be tested in AMC is sampled.
This AMC additional device comprises: a closed container is used to place this AMC sampling apparatus; And a connecting tube, be connected to this negative pressure cavity to be tested inside, the inside that makes this closed container with should the inner equipressure of negative pressure cavity to be tested.
Wherein, the sampling pipe of this AMC sampling apparatus passes the inside that connecting tube arrives negative pressure cavity to be tested and carries out the AMC sampling.Usually, the diameter of this connecting tube is greater than the sampling pipe of this AMC sampling apparatus.
In one embodiment, this AMC sampling apparatus also comprises an interface unit, and this AMC sampling servicing unit is connected with negative pressure cavity to be tested by this interface unit.
According to a second aspect of the invention, provide a kind of to the new material air molecule pollution AMC method of sampling, this method provide one with the environment of airtight normal pressure, with the environment of airtight normal pressure in AMC is sampled, obtain reference data.
According to an embodiment, this AMC method of sampling comprises: a closed container is provided, places the AMC sampling apparatus in this closed container; And a connecting tube is provided, and connect inner and this closed container inside of this negative pressure cavity to be tested, make this negative pressure cavity to be tested inner inner isobaric with this closed container.
Wherein, the sampling pipe of AMC sampling apparatus is passed the inside that described connecting tube arrives negative pressure cavity to be tested and carry out the AMC sampling.Usually, the diameter of this connecting tube is greater than the sampling pipe of this AMC sampling apparatus.
In one embodiment, this AMC sampling servicing unit is connected with negative pressure cavity to be tested by an interface unit.
Adopt technical scheme of the present invention, make the AMC sampling apparatus can with the environment of negative pressure cavity to be tested with equal pressure in sample, eliminated pressure differential to the influence that the AMC sampling apparatus brings, improved the accuracy of sampling.
Description of drawings
The above and other features of the present invention, character and advantage will be by becoming more obvious below in conjunction with accompanying drawing to the description of embodiment, and in the accompanying drawings, identical Reference numeral is represented identical feature all the time, wherein:
Fig. 1 shows and utilizes the auxiliary AMC sampling apparatus of AMC sampling additional device of the present invention to sample.
Fig. 2 shows the process flow diagram according to the AMC method of sampling of one embodiment of the invention.
Embodiment
Fundamental purpose of the present invention is to provide an environment with negative pressure cavity equipressure to be tested to the AMC sampling apparatus, makes pressure differential can be eliminated for the influence of pump.
With reference to shown in Figure 1, an aspect of of the present present invention provides a kind of air molecule pollution AMC sampling additional device 100, this AMC sampling additional device 100 is used in combination with AMC sampling apparatus 200, this AMC sampling additional device 100 provide one with the environment of negative pressure cavity 300 equipressures to be tested, this AMC sampling apparatus 200 places this AMC sampling additional device 100, with the environment of negative pressure cavity 300 equipressures to be tested in AMC is sampled.
With reference to embodiment shown in Figure 1, this AMC additional device 100 comprises:
One closed container 102 is used to place this AMC sampling apparatus 200;
One connecting tube 104 is connected to this negative pressure cavity to be tested 300 inside, makes the inside and these negative pressure cavity 300 inner equipressures to be tested of this closed container 102.
The sampling pipe 202 of this AMC sampling apparatus 200 passes the inside of connecting tube 104 arrival negative pressure cavity 300 to be tested and carries out the AMC sampling.Generally speaking, the diameter of connecting tube 104 is greater than the sampling pipe 202 of AMC sampling apparatus 200.Usually, the diameter of connecting tube 104 is big more, the isobaric environment of easy more creation negative pressure cavity to be tested 300 inside and AMC additional device inside.
Equally, in the embodiment shown in fig. 1, this AMC sampling servicing unit 100 also comprises an interface unit 106, and this AMC sampling servicing unit 100 is connected with negative pressure cavity 300 to be tested by this interface unit 106.Particularly, on the sidewall of negative pressure cavity 300 to be tested, open a perforate exactly, by the sealing of these interface unit 106 realizations for this perforate.Connecting tube 104 enters into the inside of negative pressure cavity 300 to be tested by this interface unit 106 then, sets up the inner communication paths with AMC sampling servicing unit 100 inside of negative pressure cavity to be tested 300, realizes both equipressures.
Like this, AMC sampling apparatus 200 just can with the environment of negative pressure cavity 300 equipressures to be tested under work, carry out the AMC sampling.Because pressure differential eliminates, the working pressure of the pump in this moment AMC sampling apparatus 200 will descend many, improve the working condition of pump greatly, improve the accuracy of sampling.
AMC sampling servicing unit shown in Figure 1 above utilizing, it is a kind of to the new material AMC method of sampling that the present invention also provides, and Fig. 2 shows the process flow diagram according to the AMC method of sampling 400 of one embodiment of the invention, and this method comprises:
Provide one with the environment of airtight normal pressure, with the environment of airtight normal pressure in AMC is sampled, obtain reference data.
As top said, when utilizing AMC sampling servicing unit 100 shown in Figure 1, this method further comprises:
402. a closed container is provided, in this closed container, places the AMC sampling apparatus;
404. a connecting tube is provided, connect inner and this closed container inside of this negative pressure cavity to be tested, make this negative pressure cavity to be tested inner inner isobaric with this closed container.
406. being passed the inside that connecting tube arrives negative pressure cavity to be tested, the sampling pipe of AMC sampling apparatus carries out the AMC sampling.
Wherein, the diameter of this connecting tube is greater than the sampling pipe of this AMC sampling apparatus.Usually, the diameter of connecting tube is big more, the isobaric environment of easy more creation negative pressure cavity to be tested inside and AMC additional device inside.
Same, in method shown in Figure 2 400, be that this AMC sampling servicing unit is connected with negative pressure cavity to be tested by an interface unit equally.
Adopt technical scheme of the present invention, make the AMC sampling apparatus can with the environment of negative pressure cavity to be tested with equal pressure in sample, eliminated pressure differential to the influence that the AMC sampling apparatus brings, improved the accuracy of sampling.
The foregoing description provides to being familiar with the person in the art and realizes or use of the present invention; those skilled in the art can be under the situation that does not break away from invention thought of the present invention; the foregoing description is made various modifications or variation; thereby protection scope of the present invention do not limit by the foregoing description, and should be the maximum magnitude that meets the inventive features that claims mention.
Claims (8)
1. air molecule pollution AMC sampling additional device, be used in combination with the AMC sampling apparatus, it is characterized in that, this AMC sampling additional device provide one with the environment of negative pressure cavity equipressure to be tested, this AMC sampling apparatus places this AMC sampling additional device, with the environment of negative pressure cavity equipressure to be tested in AMC is sampled, eliminate the influence that pressure differential is brought the AMC sampling apparatus;
This AMC sampling additional device comprises:
One closed container is used to place this AMC sampling apparatus;
One connecting tube is connected to this negative pressure cavity to be tested inside, makes the inside of this closed container and this negative pressure cavity to be tested inner isobaric.
2. AMC sampling additional device as claimed in claim 1 is characterized in that,
The sampling pipe of described AMC sampling apparatus passes the inside that described connecting tube arrives negative pressure cavity to be tested and carries out the AMC sampling.
3. AMC sampling additional device as claimed in claim 2 is characterized in that,
The diameter of this connecting tube is greater than the sampling pipe of this AMC sampling apparatus.
4. as each described AMC sampling additional device among the claim 1-3, it is characterized in that also comprise an interface unit, this AMC sampling additional device is connected with negative pressure cavity to be tested with described connecting tube by this interface unit.
5. air molecule pollution AMC method of sampling, it is characterized in that, AMC sampling additional device is provided, be used in combination with the AMC sampling apparatus, this AMC sampling additional device provide one with the environment of negative pressure cavity equipressure to be tested, this AMC sampling apparatus places this AMC sampling additional device, with the environment of negative pressure cavity equipressure to be tested in AMC is sampled, eliminate the influence that pressure differential is brought the AMC sampling apparatus; This AMC sampling additional device comprises a closed container and a connecting tube;
In this closed container, place this AMC sampling apparatus;
By described connecting tube, connect inner and this closed container inside of this negative pressure cavity to be tested, make this negative pressure cavity to be tested inner inner isobaric with this closed container.
6. the AMC method of sampling as claimed in claim 5 is characterized in that,
The sampling pipe of AMC sampling apparatus is passed the inside that described connecting tube arrives negative pressure cavity to be tested carry out the AMC sampling.
7. the AMC method of sampling as claimed in claim 6 is characterized in that,
The diameter of this connecting tube is greater than the sampling pipe of this AMC sampling apparatus.
8. as each described AMC method of sampling among the claim 5-7, it is characterized in that, this AMC sampling additional device is connected with negative pressure cavity to be tested with described connecting tube by an interface unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100450785A CN101373171B (en) | 2007-08-21 | 2007-08-21 | Air molecule pollution sampling auxiliary device and sampling method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100450785A CN101373171B (en) | 2007-08-21 | 2007-08-21 | Air molecule pollution sampling auxiliary device and sampling method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101373171A CN101373171A (en) | 2009-02-25 |
| CN101373171B true CN101373171B (en) | 2011-05-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100450785A Expired - Fee Related CN101373171B (en) | 2007-08-21 | 2007-08-21 | Air molecule pollution sampling auxiliary device and sampling method |
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| CN (1) | CN101373171B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2206299Y (en) * | 1994-06-20 | 1995-08-30 | 北京科智达技术发展公司 | Quick air extracting type vacuum for vacuum coating film equipment |
| CN1831440A (en) * | 2004-12-02 | 2006-09-13 | 台湾积体电路制造股份有限公司 | Air supply systems |
-
2007
- 2007-08-21 CN CN2007100450785A patent/CN101373171B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2206299Y (en) * | 1994-06-20 | 1995-08-30 | 北京科智达技术发展公司 | Quick air extracting type vacuum for vacuum coating film equipment |
| CN1831440A (en) * | 2004-12-02 | 2006-09-13 | 台湾积体电路制造股份有限公司 | Air supply systems |
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| Publication number | Publication date |
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| CN101373171A (en) | 2009-02-25 |
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Granted publication date: 20110518 Termination date: 20180821 |