CN101330190A - Photon crystal fibre ultraviolet femtosecond laser with high power and high repetition-rate - Google Patents
Photon crystal fibre ultraviolet femtosecond laser with high power and high repetition-rate Download PDFInfo
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- CN101330190A CN101330190A CNA2008100536263A CN200810053626A CN101330190A CN 101330190 A CN101330190 A CN 101330190A CN A2008100536263 A CNA2008100536263 A CN A2008100536263A CN 200810053626 A CN200810053626 A CN 200810053626A CN 101330190 A CN101330190 A CN 101330190A
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Abstract
The invention relates to a photonic crystal fiber ultraviolet femtosecond laser with high power and high repetition rate, and the laser belongs to the laser technical field. The laser comprises a photonic crystal fiber or solid femtosecond laser oscillator, a high power and large mode field photonic crystal fiber laser amplifier and a laser frequency multiplier. Compared with the excimer laser and the titanium-sapphire laser system in the prior art, the laser has the advantages of high repetition rate, small volume, simple structure, good stability and low running cost. Compared with the DPSS frequency double laser, the laser has the advantages of high power, high beam quality and narrow pulse width.
Description
Technical field
The present invention relates to the photon crystal fibre ultraviolet femtosecond laser of a kind of high power and high-repetition-rate, belong to laser technology field.
Background technology
The ultraviolet femtosecond laser of high power, high-repetition-rate has in fields such as physics, chemistry, material, medical science and military affairs widely to be used.Photon energy height with ultra-short pulse laser of ultraviolet wavelength can reach the chemical bond energy of material, can directly peel off processing and does not have heat exchange to take place, and this processing for biochip is very favourable; In addition, the short more diffraction limit of wavelength is just more little, therefore has more retrofit aspect advantage.So the ultraviolet ultrashort-pulse laser also is to carry out the micro-machined ideal tools of high accuracy.At present, the pulse laser of ultraviolet band mainly contains three kinds: (1) excimer laser; (2) solid state laser of LD pumping (DPSS); (3) ti sapphire laser [1,2], back two kinds of lasers need pass through frequency multiplication.The common drawback of these ultraviolet band laser devices is bulky, costs an arm and a leg repetition rate lower (1-50KHz); On pulse duration, the pulsewidth broad of excimer laser (only in the ns magnitude), the solid state laser pulsewidth of transferring Q is in ns or ps magnitude; Excimer laser also has the finite lifetime of high-purity gas working media to bring defectives such as high follow-up running expense and gas working dielectric be poisonous.In the ordinary optic fibre laser,, has good environmental stability because laser is limited in the fibre-optic waveguide and transmits; Optical fiber has fabulous radiating effect, can effectively avoid thermo-optic effect, makes fiber laser need not cooling system; Special geometry has determined it can obtain very high single by gain; Can directly utilize commercial semiconductor laser (LD) pumping, make its structure compact more, cost is cheaper.Therefore make it become the desirable seed light source of laser system of new generation.Yet, the major defect of ordinary optic fibre laser is: accumulation nonlinear phase shift when transmitting in long optical fibers owing to ultrashort laser pulse, under the effect of optical fiber dispersion, can cause pulse distortion, thereby restriction mode locked fiber laser single pulse energy [3], this is disadvantageous for obtaining high-power frequency multiplication output.Therefore, can the ultrashort pulse that directly obtain high-average power, high single pulse energy from fiber laser be to solve one of key technology of above-mentioned laser imperfections.
Photonic crystal fiber (PCF) was succeeded in developing by Bath university in 1996, because it possesses the unexistent characteristic of many general single mode fibers, so the research to PCF becomes focus, and obtained application at aspects such as optical communication, quantum information, transducer and lasers.2005, German Limpert group reported and has utilized the PCF that mixes ytterbium to realize that as gain media the laser of 131W, 220fs amplifies running.In the same year, the M.Moenster group of Germany has reported that the PCF that utilizes neodymium-doped has realized the laser generation level of 400fs for gain media and exported, and has from then on begun new trend, the new trend [4] of PCF femto-second laser research.The appearance of photon crystal optical fiber femtosecond laser has overcome the defective of second generation femto-second solid laser device with its exclusive characteristics, be about to become perfect relatively fs-laser system of new generation, this be because: first: the photon crystal optical laser device can be realized by the LD pump-coupling, conversion efficiency can descend cost up to 50%～80% significantly; Second: the needed gain of femto-second laser, chromatic dispersion and non-linear three big functions can be finished in photonic crystal fiber, realize that femto-second laser is integrated to an optical fiber by numerous resolution elements, thereby make femto-second laser become extremely brief, fixing and " fool " system that need not to adjust; The 3rd: the light beam of photonic crystal fiber fs-laser system is closed in the fibre core fully, no longer is subjected to the influence of surrounding environment; The 4th: photonic crystal fiber is as ordinary optic fibre, has big surface-volume ratio, it is fabulous to dispel the heat, but also can be designed to have the double clad structure (the single mode area can be bigger 2 more than the order of magnitude than ordinary optic fibre) of big mode field area, thereby can make superpower laser; The the 5th: under the high power situation, can guarantee single mode running and good beam quality.Thus, we propose based on the high power of large mode area pcf, the ultraviolet band femto-second laser of high-repetition-rate.
List of references
[1] C.Molpeceres, S.Lauzurica, J.J.Garcia-Ballesteros, M.Morales, J.L.
" advanced Ultra-Violet Laser 3 dimension micro-processing technologies ", microelectronic engineering,, the 84th volume, 1337-1340 page or leaf in 2007.
[2] D.Gomez, I.Goenaga, I.Lizuain, M.Ozaita, " femtosecond laser processing microfluid ", optical engineering,, the 44th volume, the 051105th page in 2005.
[3] N.J.Smith, F.M.Knox, N.J.Doran, K.J.Blow, and I.Bennion, " adopting the periodic dispersion management to increase the power of orphan in the optical fiber ", electronics wall bulletin,, the 32nd volume, 54-55 page or leaf in 1996.
[4] J.Limpert, F.Roser, T.Schreiber, A.Tunnermann, " the ultrafast fiber laser system of high power ", International Power and electronic engineering institute periodical " quantum electronics selection exercise question ",, the 12nd volume, 233-244 page or leaf in 2006.
Summary of the invention
The present invention is intended to propose the photon crystal fibre ultraviolet femtosecond laser of a kind of high power and high-repetition-rate, and this femto-second laser volume is little, simple in structure, good stability, and operating cost is low.
The present invention is realized by the following technical programs, a kind of high power and high-repetition-rate photon crystal fibre ultraviolet femtosecond laser, it is characterized in that, this device comprises femtosecond laser oscillator 1 photonic crystal fiber or solid, high power large mould field photon crystal optical laser amplifier 2 and laser multiple frequence device 3 constitute, wherein, the annexation of each parts is in the device, laser oscillator produces femtosecond orphan or similarity pulse, seed pulse as the large mould field photon crystal optical laser amplifier, through forming high-repetition-rate after amplification and the pulse compression, high-power femtosecond pulse train, carry out multiple frequence then, obtain the Ultra-Violet Laser of the high repetition frequency of femtosecond magnitude.
Above-mentioned photonic crystal fiber femtosecond laser oscillator is to cover photonic crystal gain fibre, semiconductor saturable absorbing mirror and polarization rotation (NPE) by the double-contracting of mixing ytterbium ion or erbium ion of big mould field to mix mode locker, grating pair or big negative dispersion optical fiber dispersion compensator formation.Wherein the core diameter of photonic crystal gain fibre is the 10-50 micron, and numerical aperture NA is 0.02-0.06, surrounding layer diameter 200-400 micron, and numerical aperture NA is 0.4-0.8, and length is 1-10m, and cladding pumping is the high-power laser diode of 5-30W.By regulating chamber internal dispersion compensator, this oscillator operates in orphan's type, breathing pattern and self similarity type operating condition respectively.
Above-mentioned high power large mould field photon crystal optical laser amplifier amplifying stage amplifies for the 1-3 level, every grade of amplification, the photonic crystal gain fibre is covered in the double-contracting of mixing ytterbium ion or erbium ion that comprises big mould field, grating pair or big negative dispersion optical fiber dispersion compensator constitute, wherein the core diameter of photonic crystal gain fibre is the 20-100 micron, numerical aperture NA is 0.02-0.06, surrounding layer diameter 200-400 micron, numerical aperture NA is 0.4-0.8, length is 1-10m, cladding pumping is the 20-100W high-power laser diode, amplifier between oscillator stage and the amplifier and amplifying stage the polarization faraday isolator all is set between at different levels.
Above-mentioned laser multiple frequence device is that barium metaborate (BBO) and three lithium borates (LBO) crystal or period polarized nonlinear crystal carry out the multiple frequence conversion, realizes the Ultra-Violet Laser running.
The invention has the advantages that: (1) laser system is based on the mode-locked laser amplification system of large mode area pcf, and specific volume is little mutually with the excimer laser that adopts at present and titanium sapphire laser system for it, and is simple in structure, good stability, and operating cost is low; Compare with the DPSS frequency double laser, have beam quality height, pulse width and high-power advantage.(2) having high-repetition-rate is another main advantage of the present invention.The repetition rate of ultraviolet band femto-second laser of the present invention is in the 1-100 order of megahertz, and this has good application prospects in little processing.(3) using polarization-maintaining photonic crystal fiber, to keep the polarization characteristic of laser beam, is that the anti-environmental interference ability of this laser system improves greatly and is convenient to Polarization Control.
Description of drawings
Fig. 1 is high power of the present invention, high-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser structure block diagram.
Among the figure: 1 large mode area pcf femtosecond oscillator stage; 2 large mode area pcf power amplifying systems; 3 laser multiple frequence systems.
Fig. 2 is the structural representation of photonic crystal fiber femtosecond oscillator stage 1 among Fig. 1.
Among the figure: 1-1 is the oscillator stage pumping source; 1-2 is an oscillator stage large mould field photon crystal gain fibre; 1-3 is that semiconductor saturable absorbing mirror and polarization rotation (NPE) mix mode locker; 1-4 is grating pair or big negative dispersion optical fiber dispersion compensator.
Fig. 3 is the structural representation of photonic crystal fiber femtosecond laser amplifier 2 among Fig. 1.
Among the figure: the isolator between the 2-1 two-stage; 2-2 is an amplifying stage large mould field photon crystal gain fibre; 2-3 is grating pair or big negative dispersion optical fiber dispersion compensator; 2-4 is an amplifying stage level pumping source.
Embodiment
High power of the present invention and high-repetition-rate photon crystal fibre ultraviolet femtosecond laser as shown in Figure 1, specific embodiment is as follows:
Laser generation level photon crystal optical laser device as shown in Figure 2, gain media adopts the big mould field double-contracting of mixing Yb to cover polarization-maintaining photonic crystal fiber 1-2,25 microns of core diameters, NA is 0.03, and 250 microns of surrounding layer diameters, NA are 0.5, length is 3.5m, cladding pumping is directly carried out through subsiding and polishing the oblique angle in two ends, or welds the SMF that goes up suitable length, by the pumping of WDM mode; Oscillator stage adopts the LD1-1 of 10W to carry out single or double cladding pumping form, one end of resonant cavity is taked semiconductor saturable absorbing mirror and polarization impeller locked mode 1-3 and as output port, adopts grating pair or big negative dispersion optical fiber dispersion compensator 1-4 to carry out dispersion compensation and pulse compression at the other end of resonant cavity.Oscillator stage can page or leaf be the solid mode-locked laser also, and bulk crystals is each crystalloid, glass and a pottery of mixing Yb or Nd; The auxiliary locked mode mode that the locked mode mode is taked traditional orphan, breathed orphan and similarity pulse mode-locking technique or adopt half SESAM and NPE to combine.The laser amplifying stage is a large mould field photon crystal optical laser amplification single-stage device as shown in Figure 3; Gain media adopts the big mould field double-contracting of mixing Yb or Er to cover polarization-maintaining photonic crystal fiber 2-2,40 microns of core diameters, NA is 0.03,270 microns of surrounding layer diameters, NA is 0.6, and length is 1.5m, and cladding pumping is directly carried out through subsiding and polishing the oblique angle in two ends, or weld the SMF that goes up suitable length, by the pumping of WDM mode; Adopt the LD2-4 of high power 30W to carry out single or double cladding pumping form, carry out dispersion compensation and pulse compression at the output employing grating pair or the big negative dispersion optical fiber dispersion compensator 2-3 of resonant cavity; The mode that whole amplification system adopts the above-mentioned single-stage of 1-3 level to amplify, the big mould field Yb-doped photon crystal optical fiber of gain media, each level length is respectively: 3-5m, 2-3m and 1-2m, core diameter is respectively: 20-40 micron, 40-60 micron and 60-100 micron, the power of pumping LD at different levels are 30W, 50W and 100W; Between oscillator stage and amplifying stage 2-1 and amplification at different levels, place the polarization faraday isolator, return oscillator stage to prevent laser.Laser multiple frequence device adopts the bbo crystal of thickness 1-4mm that laser is carried out frequency multiplication, and double-frequency laser and basic frequency laser carry out frequency tripling at LBO, BBO or the period polarized nonlinear crystal of thickness 2-5mm then, can obtain the multiple frequence conversion by that analogy.
Claims (4)
1. high power and high-repetition-rate photon crystal fibre ultraviolet femtosecond laser, it is characterized in that, whole device comprises: photonic crystal fiber or femto-second solid laser oscillator (1), high power large mould field photon crystal optical laser amplifier (2) and laser multiple frequence device (3) constitute, wherein, the annexation of each parts is in the device, laser oscillator produces femtosecond orphan or similarity pulse, seed pulse as the large mould field photon crystal optical laser amplifier, through forming high-repetition-rate after amplification and the pulse compression, high-power femtosecond pulse train, carry out multiple frequence then, obtain the Ultra-Violet Laser of the high repetition frequency of femtosecond magnitude.
2. by described high power of claim 1 and high-repetition-rate photon crystal fibre ultraviolet femtosecond laser, it is characterized in that, photonic crystal fiber femtosecond laser oscillator is to cover the photonic crystal gain fibre by the double-contracting of mixing ytterbium ion or erbium ion of big mould field, semiconductor saturable absorbing mirror and polarization rotation mix mode locker, grating pair or big negative dispersion optical fiber dispersion compensator constitute, wherein the core diameter of photonic crystal gain fibre is the 10-50 micron, numerical aperture NA is 0.02-0.06, surrounding layer diameter 200-400 micron, numerical aperture NA is 0.4-0.8, length is 1-10m, cladding pumping is the high-power laser diode of 5-30W, by regulating chamber internal dispersion compensator, this oscillator operates in orphan's type respectively, breathing pattern and self similarity type operating condition.
3. by described high power of claim 1 and high-repetition-rate photon crystal fibre ultraviolet femtosecond laser, it is characterized in that, the amplifying stage of high power large mould field photon crystal optical laser amplifier amplifies for the 1-3 level, every grade of amplification, the photonic crystal gain fibre is covered in the double-contracting of mixing ytterbium ion or erbium ion that comprises big mould field, grating pair or big negative dispersion optical fiber dispersion compensator constitute, wherein the core diameter of photonic crystal gain fibre is the 20-100 micron, numerical aperture NA is 0.02-0.06, surrounding layer diameter 200-400 micron, numerical aperture NA is 0.4-0.8, length is 1-10m, cladding pumping is the 20-100W high-power laser diode, amplifier between oscillator stage and the amplifier and amplifying stage the polarization faraday isolator all is set between at different levels.
4. by described high power of claim 1 and high-repetition-rate photon crystal fibre ultraviolet femtosecond laser, it is characterized in that, laser multiple frequence device is that barium metaborate and lithium triborate crystal or period polarized nonlinear crystal carry out the multiple frequence conversion, realizes the Ultra-Violet Laser running.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104201547A (en) * | 2014-09-16 | 2014-12-10 | 北京中科思远光电科技有限公司 | Integrated ultrashort pulse laser system with fiber-optic seed and integrated ultrashort pulse laser multiplier system with fiber-optic seed |
| CN105244738A (en) * | 2015-10-14 | 2016-01-13 | 安徽大学 | Single-frequency narrow linewidth green laser device |
| CN105470794A (en) * | 2016-01-11 | 2016-04-06 | 华东师范大学 | Active resonant cavity based self-similarity ultrashort pulse amplification system and working method therefor |
| CN105490144A (en) * | 2016-01-07 | 2016-04-13 | 华东师范大学 | Tunable ultraviolet light generation method based on self-similarity amplifier |
| CN105490145A (en) * | 2016-01-07 | 2016-04-13 | 华东师范大学 | Tunable ultraviolet light generation apparatus based on self-similarity amplifier |
| CN108941891A (en) * | 2018-08-31 | 2018-12-07 | 中国科学院力学研究所 | The high roughness texturing process method of roller surface based on optical-fiber laser train of pulse |
| CN109256664A (en) * | 2018-10-29 | 2019-01-22 | 上海交通大学 | Based on fluoride fiber mode-locked laser infrared in germanium dispersion management |
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2008
- 2008-06-25 CN CNA2008100536263A patent/CN101330190A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104201547A (en) * | 2014-09-16 | 2014-12-10 | 北京中科思远光电科技有限公司 | Integrated ultrashort pulse laser system with fiber-optic seed and integrated ultrashort pulse laser multiplier system with fiber-optic seed |
| CN105244738A (en) * | 2015-10-14 | 2016-01-13 | 安徽大学 | Single-frequency narrow linewidth green laser device |
| CN105490144A (en) * | 2016-01-07 | 2016-04-13 | 华东师范大学 | Tunable ultraviolet light generation method based on self-similarity amplifier |
| CN105490145A (en) * | 2016-01-07 | 2016-04-13 | 华东师范大学 | Tunable ultraviolet light generation apparatus based on self-similarity amplifier |
| CN105470794A (en) * | 2016-01-11 | 2016-04-06 | 华东师范大学 | Active resonant cavity based self-similarity ultrashort pulse amplification system and working method therefor |
| CN105470794B (en) * | 2016-01-11 | 2019-03-01 | 华东师范大学 | Self similarity ultrashort pulse amplification system and its working method based on active resonant cavity |
| CN108941891A (en) * | 2018-08-31 | 2018-12-07 | 中国科学院力学研究所 | The high roughness texturing process method of roller surface based on optical-fiber laser train of pulse |
| CN108941891B (en) * | 2018-08-31 | 2020-05-22 | 中国科学院力学研究所 | Roller surface high-roughness texturing processing method based on optical fiber laser pulse train |
| CN109256664A (en) * | 2018-10-29 | 2019-01-22 | 上海交通大学 | Based on fluoride fiber mode-locked laser infrared in germanium dispersion management |
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Open date: 20081224 |