CN101254692B - Ejection rate measurement method, ejection rate adjustment method, liquid ejection method, method of manufacturing color filter - Google Patents

Ejection rate measurement method, ejection rate adjustment method, liquid ejection method, method of manufacturing color filter Download PDF

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CN101254692B
CN101254692B CN 200810081454 CN200810081454A CN101254692B CN 101254692 B CN101254692 B CN 101254692B CN 200810081454 CN200810081454 CN 200810081454 CN 200810081454 A CN200810081454 A CN 200810081454A CN 101254692 B CN101254692 B CN 101254692B
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discharge
step
head
amount
liquid
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CN 200810081454
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CN101254692A (en
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小岛健嗣
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精工爱普生株式会社
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Abstract

The invention provides an ejection rate measurement method, an ejection rate adjusting method, a liquid ejection method, a color filter manufacturing method, a manufacture method of the liquid display device and a manufacture method of the electric lighting device. The ejection rate measurement method for a device having a plurality of droplet ejection head columns mounted on a plurality of carriages includes the steps of (a) measuring an ejection rate of a liquid ejected from a droplet ejection head included in one of the plurality of droplet ejection head columns sandwiched between other two of the plurality of droplet ejection head columns, (b) sandwiching, after step (a), one of the plurality of droplet ejection head columns, which has not been sandwiched between other two of the plurality of droplet ejection head columns in step (a), between other two of the plurality of droplet ejection head columns, and measuring an ejection rate of a liquid ejected from a droplet ejection headincluded in one of the plurality of droplet ejection head columns sandwiched between other two of the plurality of droplet ejection head columns.

Description

喷出量测量和调整方法、液状体喷出方法、滤色器的制法 And adjusting the discharge amount measuring method, the liquid discharging method, a color filter manufacturing method

技术领域 FIELD

[0001] 本发明涉及喷出量测量方法、喷出量调整方法、液状体的喷出方法、滤色器的制造方法、液晶显示装置的制造方法及电光装置的制造方法,尤其涉及可以精度优良地测量从液滴喷出头喷出的液滴的喷出量的方法。 [0001] The present invention relates to a method of measuring the amount of discharge, the discharge amount adjusting method, the liquid discharging method, a method of manufacturing a color filter, a liquid crystal device manufacturing method and a method of manufacturing an electro-optical display device, particularly to a high accuracy can be measuring the discharge head for ejecting droplets from the droplet discharge method quantity.

背景技术 Background technique

[0002] 以往,作为对工件喷出液滴的方法,公知利用喷墨式液滴喷出装置进行喷出的方法。 [0002] Conventionally, as a method of discharging droplets of a workpiece, using a well-known ink jet method of discharging liquid droplet ejection apparatus of. 液滴喷出装置包括:工作台,其载置基板等工件,并使工件沿一个方向移动;和滑架,其沿配置在与工作台移动方向正交的方向上的导轨移动。 The droplet ejection apparatus comprising: a work table, which mounting substrate or the like, and the workpiece is moved in one direction; and a carriage which moves along the rail in a direction perpendicular to the moving direction of the stage configuration. 滑架配置喷墨头(以下称为液滴喷出头),对工件喷出液滴,然后进行涂覆。 Configuring the ink jet head carriage (hereinafter referred to as liquid droplet ejection head) for ejecting droplets of the workpiece, and then coated.

[0003] 使功能液成为液滴后通过向工件喷出液滴,从而所涂覆的功能液可以采用各种材料。 After [0003] the functional liquid into droplets by ejecting the droplets to the workpiece, so that the functional liquid can be coated by various materials. 功能液大多因为温度的变化而导致粘度发生变化,粘度发生变化也会导致流体电阻发生变化。 Most of the functional fluid as the temperature changes cause changes in viscosity, fluid viscosity changes will lead to the occurrence of a change in resistance. 流体电阻发生变化,从而流经液滴喷出头内的流路的功能液的流速也发生变化。 Fluid resistance changes, so that the flow rate of the functional liquid droplet discharging flows through a flow passage in the head also changes. 因为功能液的流速变化,故每个墨点的喷出量变动,难以精度优良地测量喷出量。 Because the change in the flow rate of the functional liquid, so that the discharge amount per dot changes, it is difficult to measure with good accuracy the amount of discharge.

[0004] 为了解决该问题,在专利文献1中,公开了一种精度优良地测量每个墨点的喷出量的方法。 [0004] In order to solve this problem, Patent Document 1 discloses a method of measurement with good accuracy the amount of each ink discharge point. 根据该方法,在腔室内设置了液滴喷出装置后,通过调整腔室内的温度与湿度, 从而控制液滴喷出装置的环境,测量喷出量。 After According to this method, a chamber is provided in the liquid droplet ejection apparatus, the temperature and humidity control chamber, thereby controlling the droplet ejection apparatus environment, measuring the amount of discharge.

[0005]【专利文献1】特开2004-2094¾号公报 [0005] [Patent Document 1] Laid-Open Patent Publication No. 2004-2094¾

[0006] 在利用压电元件对液滴喷出头的空腔(cavity)加压时,因压电元件的动作而增加的能量的一部分转换为热,成为使得液滴喷出头的温度上升的主要原因。 [0006] When using a piezoelectric element droplet discharge head cavity (cavity) pressurized by the operation of converting a portion of the piezoelectric element is increased to heat energy, so that the temperature of the droplet discharge head becomes increased the main reason. 再有,在未驱动压电元件时,压电元件不会发热,液滴喷出头散热,因此成为液滴喷出头的温度变动的主要原因。 Further, when the piezoelectric element is not driven, the piezoelectric element does not generate heat, heat droplet discharge head, a droplet discharge head becomes a factor of the temperature variation.

[0007] 在测量喷出量时,由于喷出量受到温度的影响,故测量时的喷头温度在每次测量的时候不能以大致相同的温度条件进行测量,存在测量精度下降的问题。 [0007] In the measurement of the amount of discharge, since the discharge amount affected by temperature, so that the head temperature measurement can not be measured at substantially the same temperature conditions in each measurement time, there is a problem of measurement accuracy is deteriorated.

发明内容 SUMMARY

[0008] 本发明是为了解决上述问题的至少一部分而进行的,能作为以下的形态或应用例来实现。 [0008] The present invention is made to solve the above problems and perform at least a part, can be implemented as the following forms or application examples.

[0009][应用例1] [0009] [Application Example 1]

[0010] 本应用例涉及的喷出量测量方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、上述液滴喷出头喷出的液状体的喷出量进行测量,其特征在于,该喷出量测量方法包括:第一测量工序,排列多个上述液滴喷出头列,从上述液滴喷出头喷出上述液状体,对从多个上述液滴喷出头列中的、处于被其他的上述液滴喷出头列夹持的状态的上述液滴喷出头列的上述液滴喷出头喷出的上述液状体的喷出量进行测量;和第二测量工序,在上述第一测量工序之后进行,通过排列多个上述液滴喷出头列,使上述第一测量工序中处于未被其他的上述液滴喷出头列夹持的状态的上述液滴喷出头列成为被用其他的上述液滴喷出头列夹持的状态,并使上述液滴喷出头喷出上述液状体后,对从上述液滴喷出头喷出的上述液状体的喷出量进行测量。 [0010] The discharge amount measuring method according to the present application example, discharged from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the droplet ejection head the discharge amount of the liquid material is measured, characterized in that the discharge amount measuring method comprising: a first measuring step of arranging a plurality of the droplet ejection heads column, the liquid ejection head ejecting the droplet from the the above-mentioned liquid, the droplet ejection head of the column from the plurality of droplet ejection heads in the other row of the droplet sandwiched state of the droplet discharge head row ejected ejection head the discharge amount thereof was measured; and a second measurement step, performed after the first measurement step, by arranging a plurality of the head arrays ejecting the droplet, so that the first step in the measurement of the droplet is not used by other after the droplet discharge head row holding state is a state column ejection head ejecting the droplet of the other head of the column clamp, and the droplet ejection head for ejecting the liquid material, on the the discharge amount of the liquid material ejection head for ejecting the droplet is measured.

[0011] 根据该喷出量测量方法,可以将喷出量的测量分为第一测量工序与第二测量工序来进行。 [0011] The measuring method of the discharge amount, the discharge amount may be divided into a first measuring step of measuring the second measurement step is performed.

[0012] 在使液状体作为液滴从喷嘴喷出时,对液状体进行加压。 [0012] in that the liquid material is ejected as droplets from the nozzle, the pressure of the liquid material. 通过对液状体进行加压, 从而液状体的压力升高。 By pressurizing the liquid material, whereby the liquid pressure rises. 此时,在喷嘴中,成为液状体与气体接触的状态。 At this time, in the nozzle, a state of the liquid contact with the gas. 而且,液状体的压力高于气体的气压,因此液状体的一部分成为液滴,被喷出到气体中。 Further, the liquid pressure is higher than the gas pressure, and therefore becomes a part of the liquid droplets are ejected into the gas.

[0013] 在对液状体进行加压时,所加压的能量的一部分被转换为热。 [0013] When the liquid material is pressurized, the pressurized part of the energy is converted into heat. 而且,液滴喷出头的温度上升。 Further, the droplet discharge head temperature rise. 液状体若温度上升,则构成液状体的分子的动能增加,因此大多粘度降低。 If the liquid temperature rises, increasing the kinetic energy of molecules constituting the liquid, and therefore most of the viscosity reduction. 若液状体的粘度变化,则通过喷嘴等流路时的流体电阻变化。 If the viscosity of the liquid changes, the resistance change of the fluid flow path through the nozzle or the like. 并且,从喷嘴喷出的液状体的喷出量变化。 And, from a change in the discharge amount of the liquid ejected from the nozzle.

[0014] 在第一测量工序中,排列多个液滴喷出头列后喷出液状体。 [0014] In a first measurement step, the liquid droplet ejection heads are arranged a plurality of discharging the liquid column. 此时,液滴喷出头列存在被其他液滴喷出头列夹持的状态的液滴喷出头和未被其他液滴喷出头列夹持的状态的液滴喷出头。 In this case, the presence status is discharged liquid droplet ejection head other droplets clamped column head row of other droplet ejection head and liquid discharge head is not clamped state column droplet discharge head. 而且,各液滴喷出头因为进行喷出时温度上升,因此进行喷出的液滴喷出头全部温度上升。 Further, since each of the droplet ejection head for discharging when the temperature rises, so the droplet discharge head for discharging all of the temperature rise.

[0015] 未被其他液滴喷出头列夹持的状态的液滴喷出头的一面与空气流相接触,容易释放热量,因此温度难以上升。 Droplets [0015] Other droplet discharge head is not clamped state column ejection head in contact with the side of the air flow, is easy to release heat, the temperature rise is difficult. 另一方面,被其他液滴喷出头列夹持的状态的液滴喷出头列因为温度上升,变得难以散热,故温度容易上升。 On the other hand, the droplet ejection head is sandwiched state of the other columns droplet ejection head column temperature increase, it becomes difficult to heat, and therefore the temperature tends to increase. 也就是说,属于被其他液滴喷出头列夹持的状态的液滴喷出头列的液滴喷出头与属于未被其他液滴喷出头列夹持的状态的液滴喷出头列的液滴喷出头相比,温度容易上升。 That is, belongs to the state of the other droplet ejection head columns sandwiched droplet ejection head of the droplet discharge head and the column not belonging to other columns droplet discharge head discharging droplets of a clamped state droplet ejection head as compared to heads column, the temperature is likely to rise.

[0016] 在该测量方法中,在第一测量工序中对从属于被其他液滴喷出头列夹持的状态的液滴喷出头列的液滴喷出头喷出时的喷出量进行测量。 The discharge amount of [0016] In this measuring method, a droplet in the first measuring step is dependent on the state of the other droplet ejection head columns clamped ejection head of the droplet discharge head discharging a column measurement. 然后,在第二测量工序中,用其他液滴喷出头列夹持第一测量工序中未被其他液滴喷出头列夹持的液滴喷出头列,在喷出液状体后对喷出量进行测量。 Then, in a second measurement step, the column with the other droplet ejection head is not holding a first measuring step in the other droplet ejection head of the droplet ejection head column holding a column, after the discharge of the liquid discharge amount measurement. 也就是说,在第一测量工序与第二测量工序中,测量从属于被其他液滴喷出头列夹持的状态下的液滴喷出头列的液滴喷出头喷出时的喷出量。 When the spray That is, in the first measurement step and second measurement step, the measurement is dependent on a droplet discharged at the other head of the column clamped state ejection head ejecting liquid droplet ejection heads column the amount. 因此,液滴喷出头可以对基本相同的温度下的喷出量进行测量。 Thus, the droplet discharge head may be measured at substantially the same amount of discharge temperature. 结果,可以精确地测量喷出量。 As a result, the amount of discharge can be accurately measured.

[0017][应用例2] [0017] [Application Example 2]

[0018] 在上述应用例涉及的喷出量测量方法中,其特征在于,上述第一测量工序及上述第二测量工序包括:测量上述喷出量的预定的上述液滴喷出头待机的喷出前待机工序;喷出上述液状体的测量用喷出工序;和对所喷出的上述液状体的喷出量进行测量的测量工序;在上述喷出前待机工序中,对上述液滴喷出头进行暖机驱动。 [0018] In the discharge amount measuring method according to the above application example, wherein the first measuring step and said second measuring step comprises: measuring a predetermined amount of the discharge of the droplet ejection head ejection standby a front holding step; measured by ejecting the liquid material discharge step; and a discharge amount of the liquid material being discharged measurement step of measuring; stand in front of the discharge step, the droplet ejection early warm-driven.

[0019] 根据该喷出量测量方法,在喷出前待机工序中,液滴喷出头通过进行暖机驱动,从而使得液滴喷出头的温度上升。 [0019] The measuring method of the discharge amount, the discharge step before the standby, the droplet ejection head driven by warm, so that the rise in temperature of the droplet ejection head. 而且,测量液滴喷出头的温度高的状态下的喷出量。 Further, measuring the amount of discharge of the droplet discharge head of a high temperature state. 在向工件喷出液状体时,因为液滴喷出头喷出液滴,故液滴喷出头的温度上升。 When discharging the liquid material to the workpiece, because the droplet discharge head discharging droplets, so the temperature of the droplet discharge head is increased. 也就是说,液滴喷出头通过进行暖机驱动,从而可以测量与向工件喷出液状体时大致相同的温度下的喷出量。 That is, the droplet discharge head is driven by a warm up, so that the discharge amount of discharge may be measured at substantially the same temperature when the liquid material to the workpiece. 因此,可以精确地测量向工件喷出液状体时的喷出量。 Accordingly, the discharge can be accurately measured amount of liquid material discharged to the workpiece.

[0020][应用例3] [0020] [Application Example 3]

[0021] 在上述应用例涉及的喷出量测量方法中,其特征在于,在上述暖机驱动中,驱动到从上述液滴喷出头不喷出上述液状体的程度。 [0021] In the discharge amount measuring method according to the above application example, wherein, in the warm-drive, to the extent that the driving of the droplet discharge head from the liquid material is not discharged. [0022] 根据该喷出量测量方法,暖机驱动到从喷嘴不喷出液滴的程度。 [0022] The measuring method of the discharge amount, the warm-up drive to the extent not discharging liquid droplets from the nozzle. 因此,因为液滴不会浪费地喷出,故可以成为节省资源的喷出量测量方法。 Therefore, since the droplets being ejected wastefully, so that the discharge can be a method of measuring the amount of resource saving.

[0023][应用例4] [0023] [Application Example 4]

[0024] 在上述应用例涉及的喷出量测量方法中,其特征在于,上述暖机驱动是在与上述测量用喷出工序中喷出上述液状体的场所大致相同的场所进行暖机驱动。 [0024] In the discharge amount measuring method according to the above application example, wherein the warm-up drive is substantially the same as the liquid material is discharged by the discharge in the above-described measuring step driving properties warm places.

[0025] 根据该喷出量测量方法,因为液滴喷出头为了进行测量而喷出液状体的场所和进行暖机驱动的场所是基本相同的场所,故在液滴喷出头进行暖机驱动后,无需为了进行测量而向喷出液状体的场所移动。 [0025] The measuring method of the discharge amount, because the liquid discharge head for discharging the liquid for measurement sites and warm-driving condition is substantially the same place, it is warmed in the droplet ejection head after driving, unnecessary to measure the liquid moves to the discharge sites. 因此,在移动液滴喷出头的期间内无需冷却液滴喷出头即可进行喷出,故可以减小液滴喷出头的温度中的分散,可以测量喷出量。 Thus, during the movement of the droplet discharge head without cooling can be ejected droplet ejection head, it is possible to reduce the dispersion of the droplet ejection head temperature, the discharge amount can be measured. 结果,可以精确地测量喷出量。 As a result, the amount of discharge can be accurately measured.

[0026][应用例5] [0026] [Application Example 5]

[0027] 在上述应用例涉及的喷出量测量方法中,其特征在于,在上述第一测量工序中,对上述多个滑架之中的一个滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的全部上述液滴喷出头的喷出量进行测量,在上述第二测量工序中,对上述多个滑架之中的一个滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的全部上述液滴喷出头的喷出量进行测量。 [0027] In the discharge amount measuring method according to the above application example, wherein, in the first measurement step, a droplet of the carriage in the carriage mounted on a plurality of ejection head later, a predetermined amount of discharge of all of the above measurement is measured droplet ejection head, the droplet of the other of the carriage among the plurality of carriages mounted on all of the above liquid discharging head, a predetermined measurement the amount of discharged droplets is measured ejection amount ejection head, thereby sequentially for all the droplet ejection heads in each predetermined measuring mounted on the carriage is measured in the second measuring step, the plurality of after a predetermined amount of discharge of all of the above measurement is measured droplet ejection head in a carriage mounted on a carriage of the droplet ejection head, the other among said plurality of sliding carriage , a predetermined amount of discharge of all of the above measurement is measured droplet ejection head frame mounted on the above-described droplet discharge head, thereby sequentially discharging all of the droplet in each predetermined measuring mounted on the carriage the amount of discharge head is measured.

[0028] 根据该喷出量测量方法,在对一个滑架所搭载的液滴喷出头的喷出量全部进行测量后,顺次改变滑架,对各滑架所装置的上述液滴喷出头的喷出量进行测量。 [0028] The measuring method of the discharge amount, the discharge amount of the droplet after a carriage mounted ejection head all measured sequentially changing the carriage, for each of the droplet ejection apparatus of the carriage the discharge amount of the head is measured. 因此,可以利用滑架的移动量较少的方法进行测量。 Thus, measurements can be made with a smaller amount of movement of the carriage way. 结果,因为可以减少使滑架移动的能量,故可以成为节省资源的测量方法。 As a result, energy can be reduced because the movement of the carriage, so that measurement can be saved resources.

[0029][应用例6] [0029] [Application Example 6]

[0030] 在上述应用例涉及的喷出量测量方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一测量工序中,对上述多个滑架之中的一个滑架所搭载的预定测量的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行测量后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、属于已经测量了喷出量的上述液滴喷出头的行的上述液滴喷出头,即位于与已经进行过测量的上述液滴喷出头接近的场所的上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的上述液滴喷出头的喷出量进行测量,在上述第二测量工序中,对上述多个滑架之中的一个滑架所搭载的预定测量的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行测量后,对上述多个滑架之中的其他 [0030] In the discharge amount measuring method according to the above application example, wherein the plurality of the droplet by a plurality of carriages mounted on the droplet ejection head ejection head row forming a plurality of rows, in after the first measurement step, a plurality of carriages in the carriage mounted on a predetermined measurement of the droplet discharge, the discharge amount of the liquid droplet ejection head portion of the head is measured for among the plurality of the droplet carriage mounted on another carriage ejection heads belonging to the droplet has been measured ejection head row of the droplet discharge head discharging amount, i.e., located has been measured discharge amount of the droplet ejection head closest place to the droplet ejection head was measured, whereby the above-described droplet ejection head sequentially measure each of the predetermined carriage mounted on the spray the amount of discharge is measured in the second measuring step, for a carriage among the plurality of carriages mounted on a predetermined measurement of the droplet ejection head, a part of the droplet ejection head after the amount of measurement, among others of the plurality of carriage 滑架所搭载的上述液滴喷出头中的、 属于已经测量了喷出量的上述液滴喷出头的行的上述液滴喷出头,即位于与已经进行过测量的上述液滴喷出头接近的场所的上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的上述液滴喷出头的喷出量进行测量,反复进行上述第一测量工序与上述第二测量工序,从而对预定测量的全部行中的上述液滴喷出头的喷出量进行测量。 A carriage mounted on the droplet ejection head, have been measured belonging to the droplet ejection head of the droplet discharge amount of the row discharge head, which is located with the droplet ejection have been measured the amount of the droplet discharge head closest place to measure ejection head, so that the discharge amount of each of the sequentially carriage mounted on predetermined measurements of the droplet ejection head is measured, repeating the first a second measuring step and the measurement step, the amount of discharge so as to measure the discharge head is a predetermined measure all rows in the droplet.

[0031] 根据该喷出量测量方法,在属于相同行的液滴喷出头中,测量了位于较近场所的液滴喷出头的喷出量后,顺次改变行进行测量。 After [0031] The measuring method of the discharge amount, belonging to the same row of the droplet ejection head, the amount of discharge is located close to the measured properties of the liquid droplet ejection head, is measured sequentially changing the row. 在测量液滴喷出头的喷出量时,液滴喷出头在温度被管理的环境内被进行测量。 When measuring the amount of discharged liquid droplet discharge head, a droplet discharge head is measured at a temperature in a managed environment. 此时,温度大多以大的周期变化。 At this time, most of the temperature change with a large period. 此时,接着测量液滴喷出头的某一行内邻近的液滴喷出头的喷出量。 In this case, the amount of discharge within a discharge head of the droplet ejection head row adjacent droplets then measured. 因此,在同一行中较近的喷头可以利用大致相同温度的影响所产生的误差对喷出量进行测量。 Thus, in the same row close to the discharge head can be measured using the amount of errors on substantially the same temperature generated.

[0032][应用例7] [0032] [Application Example 7]

[0033] 在上述应用例涉及的喷出量测量方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一测量工序中,对一个滑架所搭载的预定测量的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行测量,在上述第二测量工序中对位于上述第一测量工序测量过的上述液滴喷出头附近且属于上述液滴喷出头的行的上述液滴喷出头的喷出量进行测量,反复进行上述第一测量工序与上述第二测量工序,从而对属于规定行的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量,切换到未进行测量的上述液滴喷出头所属的行,反复进行上述第一测量工序与上述第二测量工序,从而对上述液滴喷出头的喷出量进行测量。 [0033] In the discharge amount measuring method according to the above application example, wherein the plurality of the droplet by a plurality of carriages mounted on the droplet ejection head ejection head row forming a plurality of rows, in in the first measurement step, a carriage mounted on predetermined measurements of the droplet ejection, a portion of the discharged amount of the droplet ejection heads in the head is measured, located above in the second measuring step the amount of the droplet discharge line in the vicinity of the first measuring step of measuring through the droplet ejection head and the droplet ejection heads belonging to the head of the discharge is measured, repeating the above-described first measurement and the second measurement step step, thereby, a predetermined amount of all of the above measured discharge liquid droplet ejection heads belonging to a predetermined row of the droplet ejection head is measured, is switched to the measurement of the droplet ejection not belong to the first line, repeating the above-described first measurement step and the second measuring step, whereby the amount of discharge of the droplet discharge head is measured.

[0034] 根据该喷出量测量方法,在对一个液滴喷出头的喷出量进行测量后,对位于该测量过的液滴喷出头附近的液滴喷出头的喷出量进行测量。 [0034] The measuring method of the discharge amount, after measuring the amount of a discharged liquid droplet ejection head, located on the discharge amount of the droplet through the measurement of discharge droplet discharge head near the head measuring. 因此,即使在周围的温度变化时, 在同一行中邻近位置的喷头也可以利用大致相同温度的影响所产生的误差来测量喷出量。 Accordingly, even when the ambient temperature changes, in the same row position adjacent to the head may be measured using a discharge amount error on substantially the same temperature generated.

[0035][应用例8] [0035] [Application Example 8]

[0036] 本应用例涉及的喷出量调整方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、上述液滴喷出头喷出的液状体的喷出量进行调整,其特征在于,该喷出量调整方法包括:第一测量工序,排列多个上述液滴喷出头列,从上述液滴喷出头喷出上述液状体,对从多个上述液滴喷出头列中的、处于被其他的上述液滴喷出头列夹持的状态的所述液滴喷出头列的上述液滴喷出头喷出的上述液状体的喷出量进行测量;第一调整工序,对上述第一测量工序测出的上述液滴喷出头的喷出量进行调整;第二测量工序,在上述第一调整工序之后进行,通过排列多个所述液滴喷出头列,使上述第一测量工序中处于未被其他的上述液滴喷出头列夹持的状态的上述液滴喷出头列成为被用其他的所述液滴喷出头列夹持的状态,并使上述液滴喷出头喷出上 [0036] The discharge amount adjusting process of the present application example, discharged from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the droplet ejection head the discharge amount of the liquid material is adjusted, characterized in that, the discharge amount adjusting method comprising: measuring a first step, the plurality of the droplet ejection heads are arranged column, the liquid ejection head ejecting the droplet from the , the droplet of the liquid discharge head of the column from the plurality of the droplet, the state of being of the droplet ejection head other columns of ejection head row clamped ejection head ejecting the the discharge amount of the liquid is measured; a first adjusting step, the amount of discharge of the droplet ejection head in the first measurement step of adjusting the measured; second measurement step, performed after said first adjustment step, by arranging the plurality of droplet discharge heads column, so that the first measurement step is not the other droplet ejection head row of the droplet ejection head holding state column becomes the other is said droplet ejection head row holding state, and the ejection of the droplet ejection heads 述液状体后,对从上述液滴喷出头喷出的上述液状体的喷出量进行测量;和第二调整工序,对在上述第二测量工序中测出的上述液滴喷出头的喷出量进行调整。 Described later, the liquid material, the discharge amount of the liquid material is discharged from the droplet discharge head is measured; and a second adjustment step, for measurement of the droplet in the second step is measured ejection head adjusting the discharge amount.

[0037] 根据该喷出量调整方法,在第一调整工序中对第一测量工序测量的液滴喷出头进行调整后,在第二调整工序中对第二测量工序测量的液滴喷出头进行调整。 [0037] According to the method for adjusting the amount of discharge, after a first adjustment step of adjusting a first ejection head measured by the measuring step of the droplet, the second step of discharging the droplets measured in a second measurement step of adjusting head to adjust. 而且,根据第一测量工序及第二测量工序中精确地测量了喷出量的测量结果,在第一调整工序及第二调整工序中可以精确地调整喷出量。 Further, according to the first measurement step and second measurement step of a measurement result precisely measured amount of discharge, the discharge amount can be precisely adjusted in the first adjustment step and the second adjustment step.

[0038][应用例9] [0038] [Application Example 9]

[0039] 在上述应用例涉及的喷出量调整方法中,其特征在于,还包括:第一喷出量调整工序,反复进行上述第一测量工序与上述第一调整工序,以使上述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行上述第二测量工序与上述第二调整工序,以使上述喷出量接近目标喷出量。 [0039] In the method for adjusting the discharge amount of the above-described application example is characterized in that, further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the ejection an amount close to the target discharge amount; and a second discharge amount adjusting step, the second measuring step is repeated and the second adjusting step, so that the discharge amount close to the target discharge amount.

[0040] 根据该喷出量调整方法,具有第一喷出量调整工序与第二喷出量调整工序。 [0040] According to the method for adjusting the amount of discharge, the discharge amount adjusting step of having a first and a second discharge amount adjusting step. 而且, 在第一喷出量调整工序中,根据第一测量工序测出的喷出量的测量结果,在第一调整工序 Further, in a first step of adjusting the discharge amount, the discharge amount of the measurement result of the first measurement step of measuring the first adjustment step

10中进行喷出量的调整。 10 for adjusting the amount of discharge. 接着,通过反复进行第一测量工序与第一调整工序,从而使得喷出量接近目标喷出量。 Subsequently, by repeatedly adjusting a first measurement step and the first step, so that the discharge amount close to the target discharge amount. 因此,与仅进行一次调整工序的方法相比,可以精确地调整喷出量。 Thus, compared with the method for adjusting step only once, the amount of discharge can be precisely adjusted.

[0041] 而且,即使在第二喷出量调整中也同样地进行,因此与仅进行一次调整工序的方法相比,可以精确调整喷出量。 [0041] Further, similarly performed even in the second discharge amount adjustment, as compared with the method of adjusting only one step, the amount of discharge can be precisely adjusted. 结果,可以成为能精确地调整喷出量的方法。 As a result, the method can be accurately adjust the discharge amount.

[0042][应用例 10] [0042] [Application Example 10]

[0043] 在上述应用例涉及的喷出量调整方法中,其特征在于,上述第一测量工序及上述第二测量工序包括:测量上述喷出量的预定的上述液滴喷出头待机的喷出前待机工序;喷出上述液状体的测量用喷出工序;和对所喷出的上述液状体的喷出量进行测量的测量工序;在上述喷出前待机工序中,上述液滴喷出头进行暖机驱动。 [0043] In the method for adjusting the discharge amount of the above application example, wherein the first measuring step and said second measuring step comprises: measuring a predetermined amount of the discharge of the droplet ejection head ejection standby a front holding step; measured by ejecting the liquid material discharge step; and a discharge amount of the liquid material being discharged measurement step of measuring; standby in the discharge step before the droplet ejection warm-head drive.

[0044] 根据该喷出量调整方法,在喷出前待机工序中液滴喷出头通过进行暖机驱动,从而使液滴喷出头的温度上升。 [0044] According to the method for adjusting the amount of discharge, the discharging standby step before the droplet ejection head driven by warm, so that the temperature rise of the droplet discharge head. 而且,对液滴喷出头的温度高的状态下的喷出量进行测量。 Further, the amount of discharge at a high temperature state droplet ejection head is measured. 在向工件喷出液状体时,因为液滴喷出头喷出液状体,故液滴喷出头的温度上升。 When discharging the liquid material to the workpiece, because the liquid discharge head discharging the liquid, so the temperature rise of the droplet ejection head. 也就是说, 液滴喷出头通过进行暖机驱动,从而对与向工件喷出液状体时大致相同的温度下的喷出量进行测量后,调整喷出量。 That is, the droplet ejection head driven by warming, thereby the discharge amount of the liquid material discharged when the workpiece is substantially the same as the temperature measured after adjusting the discharge amount. 因此,可以精确地调整向工件喷出液状体时的喷出量。 Thus, it is possible to precisely adjust the discharge amount of the discharged liquid material to the workpiece.

[0045][应用例 11] [0045] [Application Example 11]

[0046] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述暖机驱动中,驱动到从上述液滴喷出头不喷出上述液状体的程度。 [0046] In the method for adjusting the discharge amount of the above application example, wherein, in the warm-drive, to the extent that the driving of the droplet discharge head from the liquid material is not discharged.

[0047] 根据该喷出量调整方法,可以暖机驱动到从喷嘴不喷出液滴的程度。 [0047] According to the method for adjusting the amount of discharge, warm-up can be driven to an extent not discharging liquid droplets from the nozzle. 因此,因为不会浪费地喷出液滴,故可以成为节省资源的喷出量调整方法。 Thus, since the ejected liquid droplets is not wasted, so that the discharge amount can be a method for adjusting resource savings.

[0048][应用例 12] [0048] [Application Example 12]

[0049] 在上述应用例涉及的喷出量调整方法中,其特征在于,上述暖机驱动是在与上述测量用喷出工序中喷出上述液状体的场所大致相同的场所进行暖机驱动。 [0049] In the method for adjusting the discharge amount of the above application example, wherein the warm-up drive is substantially the same as the liquid material is discharged by the discharge in the above-described measuring step driving properties warm places.

[0050] 根据该喷出量调整方法,因为液滴喷出头为了进行测量而喷出液状体的场所和进行暖机驱动的场所为大致相同的场所,故在液滴喷出头进行暖机驱动后,无需为了测量而向喷出液状体的场所移动。 [0050] According to the method for adjusting the amount of discharge, because the droplet ejection head for discharging the liquid for measurement sites and warm-driving condition is substantially the same place, so that the liquid droplet ejection head warm- after driving, unnecessary to measure the liquid ejected moves place. 因此,在移动液滴喷出头的期间内无需冷却液滴喷出头即可进行喷出,故可以减小液滴喷出头的温度中的分散,可以测量喷出量。 Thus, during the movement of the droplet discharge head without cooling can be ejected droplet ejection head, it is possible to reduce the dispersion of the droplet ejection head temperature, the discharge amount can be measured. 结果,可以精确地测量喷出量。 As a result, the amount of discharge can be accurately measured.

[0051][应用例 13] [0051] [Application Example 13]

[0052] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第一喷出量调整工序中,对属于被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头、和属于未被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头所喷出的上述液状体的喷出量进行调整。 [0052] In the method for adjusting the discharge amount of the above application example, wherein, in the first discharge amount adjusting step, the droplets on the ejection heads belonging to the column holding the droplet ejection head the droplet ejection head of the column, not belonging to the discharge amount of the liquid material ejection head of the droplet ejected from the droplet ejection head column holding the droplet ejection head of the column is adjusted .

[0053] 根据该喷出量调整方法,在第一测量工序中,属于未被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头在第一喷出量调整工序与第二喷出量调整工序这两个工序中可以被调整喷出量。 [0053] According to the method for adjusting the amount of discharge, in a first measurement step, the liquid droplet ejection heads belonging to the other column not sandwiched droplet ejection head of the droplet ejection head column in the first ejection amount adjustment and a second step of the two step discharge amount adjusting step, the discharge amount can be adjusted.

[0054] 在第一测量工序中,属于未被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头在第一喷出量调整工序中进行喷出量的调整。 [0054] In a first measurement step, the liquid droplet ejection heads belonging to the other column not sandwiched droplet ejection head row droplet discharge head discharging a first amount of adjustment of the discharge amount adjusting step . 而且,该液滴喷出头的喷出量在调整为接近目标喷出量后,在第二喷出量调整工序中,再次调整喷出量。 Further, the amount of discharge of the droplet ejection head was adjusted to close to the target discharge amount, the discharge amount adjusting step, the second, again adjusting the discharge amount. 在第二喷出量调整工序中, 液滴喷出头的温度比第一喷出量调整工序中的温度还要上升。 In the second discharge amount adjusting step, the droplet discharge head temperature than the first discharge amount adjusting step is even temperature rise. 而且,液滴喷出头与在第一喷出量调整工序中未进行调整的情况相比,可以利用较少的反复次数进行调整。 Further case, the droplet discharge head and is not performed in a first adjustment step of adjusting the discharge amount in comparison, can be adjusted with a smaller number of iterations. 结果,可以成为生产率较佳的调整方法。 As a result, the productivity can be a preferred method of adjustment.

[0055][应用例 14] [0055] [Application Example 14]

[0056] 在上述应用例涉及的喷出量调整方法中,其特征在于,在由上述第一测量工序及上述第一调整工序构成的工序和由上述第二测量工序及上述第二调整工序构成的工序的至少一个工序中,多次进行测量工序及调整工序,上述调整工序包括粗调整工序与微调整工序。 [0056] In the method for adjusting the discharge amount of the above application example, wherein, in a first step composed of the first measuring step and the adjusting step and the second parameter is constituted by the above-described second step and adjustment step at least one process step, measurement step and multiple step adjustment, the adjusting step includes a coarse adjustment step and fine adjustment step.

[0057] 在此,粗调整工序与微调整工序的区别在于,进行调整时的喷出量的大小。 [0057] Here, the difference between the coarse and fine adjustment step of adjusting step that the discharge amount when resizing. 而且, 在粗调整工序中,与微调整工序相比,可以大幅度改变喷出量后进行调整。 In the coarse adjustment step, compared with the fine adjustment step may be adjusted to change the substantial discharge amount. 根据该喷出量调整方法,进行粗调整与微调整。 According to this method the discharge amount adjustment, coarse adjustment and fine adjustment. 此时,与反复进行微调整,每次少量地调整喷出量的情况相比,组合通过粗调整使得喷出量大幅度变化的工序和微调整工序后进行的方法,可以以较少的次数调整为作为目标的喷出量。 In this case, as compared with the case where the fine adjustment is repeated, each time a small amount to adjust the discharge amount, so that the combination of coarse adjustment and a step carried out after the method step of adjusting the micro-ejection amount changes greatly, with less number of times can be as the discharge amount is adjusted to the target. 因此,可以生产率良好地进行调整。 Therefore, the productivity can be adjusted well.

[0058][应用例 15] [0058] [Application Example 15]

[0059] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述粗调整工序之前进行的测量工序中喷出的上述液状体的量,比在上述微调整工序之前进行的测量工序中喷出的上述液状体的量少。 [0059] In the method for adjusting the discharge amount of the above application example, wherein the amount of the liquid material measuring step is performed before said discharged coarse adjustment step, the ratio of measurements made prior to the above-described fine adjustment step a small amount of the liquid material discharged in step.

[0060] 根据该喷出量调整方法,在粗调整工序中,与微调整工序相比,可以以较少的喷出量进行喷出量的测量。 [0060] According to the method for adjusting the amount of discharge, the coarse adjustment step, compared with the fine adjustment step, the discharge amount can be measured with a small discharge amount. 因此,可以减少所喷出的液状体的消耗量。 Thus, it is possible to reduce the consumption amount of the liquid discharged. 结果,可以成为节省资源的调整方法。 As a result, adjustments could be ways to save resources.

[0061][应用例 16] [0061] [Application Example 16]

[0062] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述粗调整工序之前进行的测量工序中单位时间内从上述液滴喷出头喷出上述液状体的次数,比在上述微调整工序之前进行的测量工序中单位时间内从上述液滴喷出头喷出上述液状体的次数多。 [0062] In the method for adjusting the discharge amount of the above application example, wherein the number of the measuring step is performed before said step of rough adjustment unit time from the droplet discharge head discharging the liquid material, the ratio of the measurement step is performed before said step of fine adjustment frequency per unit time from the droplet discharge head discharging the liquid material in the plurality.

[0063] 根据该喷出量调整方法,在粗调整工序中,与微调整工序相比,增多单位时间内喷出的次数。 [0063] According to the method for adjusting the amount of discharge, the coarse adjustment step, as compared with the fine adjustment step of increasing the number of ejection per unit time. 在粗调整工序以及微调整工序中,进行大致相同次数的喷出,测量喷出量时,粗调整工序可以在短时间内进行喷出。 In the coarse adjustment and the fine adjustment step of the step, performed substantially the same number of the ejection, measurement of the amount of discharge, the discharge coarse adjustment step may be performed in a short time. 因此可以生产率良好地进行调整。 It can be adjusted with high productivity.

[0064][应用例 17] [0064] [Application Example 17]

[0065] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第一调整工序中,对上述多个滑架之中的一个滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行了调整后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行调整,顺次对各上述滑架所搭载的预定调整的全部上述液滴喷出头的喷出量进行调整,在上述第二调整工序中,对上述多个滑架之中的一个滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行调整后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行调整,顺次对各上述滑架所搭载的预定调整的全部上述液滴喷出头的喷出量进行调整。 [0065] In the method for adjusting the discharge amount of the above application example, wherein, in the first adjustment step, a droplet of the carriage in the carriage mounted on a plurality of ejection head after the amount of adjustment of the predetermined discharge head discharging all the droplet has been adjusted, the droplet of the other of the carriage among the plurality of carriages mounted on the ejection head, a predetermined adjustment of all of the above an amount of discharge liquid droplet discharge head is adjusted, the amount of discharge is sequentially all of the droplet ejection head of each of the predetermined adjustment carriage mounted is adjusted in the second adjustment step, the plurality of after a carriage in a carriage mounted on the droplet ejection, a predetermined amount of adjustment of all of the above liquid droplet ejection head discharge head is adjusted, the other among said plurality of sliding carriage , adjusting the amount of discharge of all of the above predetermined droplet ejection head mounted frame for adjusting the liquid droplet ejection head sequentially to all of the droplet ejection head of each of the predetermined adjustments mounted on the carriage the discharge amount is adjusted.

[0066] 根据该喷出量调整方法,在对一个滑架所搭载的液滴喷出头的喷出量全部进行调整后,顺次改变滑架,对各滑架所装置的上述液滴喷出头的喷出量进行调整。 [0066] According to the method for adjusting the amount of discharge, the discharge amount of the droplet after a carriage mounted on all the discharge head is adjusted, sequentially changing the carriage, for each of the droplet ejection apparatus of the carriage the discharge amount of the head is adjusted. 因此,可以利用滑架的移动量较少的方法进行调整。 Thus, it can be adjusted with a smaller amount of movement of the carriage way. 结果,因为可以减少使滑架移动的能量,故可以成为节省资源的调整方法。 As a result, energy can be reduced because the movement of the carriage, it can be a method for adjusting resource savings.

[0067][应用例 18] [0067] [Application Example 18]

[0068] 在上述应用例涉及的喷出量调整方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一调整工序中,对上述多个滑架之中的一个滑架所搭载的预定调整的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行调整后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、属于已经调整了喷出量的上述液滴喷出头的行的一部分上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定调整的上述液滴喷出头的喷出量进行调整,在上述第二调整工序中,对上述多个滑架之中的一个滑架所搭载的预定调整的上述液滴喷出头中的、 一部分上述液滴喷出头的喷出量进行调整后,对上述多个滑架之中的其他滑架所搭载的上述液滴喷出头中的、属于已经调整了喷出量的上述 [0068] In the method for adjusting the discharge amount of the above application example, wherein the plurality of the droplet by a plurality of carriages mounted on the droplet ejection head ejection head row forming a plurality of rows, in after the first adjustment step, the adjustment of the droplet of a predetermined among the plurality of carriages mounted on a carriage ejection head, a part of the discharge amount of the droplet ejection head is adjusted to ejection head among the plurality of discharge carriage mounted on the carriage of other droplet ejection head, it has been adjusted belonging to the droplet discharge amount of the droplet ejection head portion of the line quantity measurement, thereby sequentially discharging amount of the droplet ejection head of each of the predetermined adjustment carriage mounted is adjusted in the second adjustment step, among a plurality of sliding carriage after adjustment of the droplet predetermined frame mounted on the discharge, a part of the amount of the liquid droplet ejection head ejection head is adjusted to the droplet in the other of the carriage mounted a plurality of spray carriage the head, the discharge amount has been adjusted belonging to the 滴喷出头的行的一部分上述液滴喷出头的喷出量进行调整,顺次对各上述滑架所搭载的预定调整的上述液滴喷出头的喷出量进行调整,反复进行上述第一调整工序与上述第二调整工序,从而对预定调整的全部行中的上述液滴喷出头的喷出量进行调整。 The amount of discharged droplet ejection head of the line portion of the droplet ejection head is adjusted sequentially for a predetermined amount of adjustment of each of the carriage mounted on the discharge liquid droplet ejection head is adjusted, the above is repeated a first step of adjusting and the second adjusting step to adjust the amount of discharge of the discharge head is adjusted in all of the rows of a predetermined droplet.

[0069] 根据该喷出量调整方法,在属于相同行的液滴喷出头中,调整了位于较近场所的液滴喷出头的喷出量后,顺次改变行进行调整。 After [0069] According to the method for adjusting the amount of discharge, belonging to the same line of the droplet ejection head, the ejection amount adjustment places located close droplet ejection head sequentially changing the row to be adjusted. 在调整液滴喷出头的喷出量时,液滴喷出头在温度被管理的环境内被进行调整。 When adjusting the amount of discharge of the droplet discharge head, a droplet discharge head is adjusted in a temperature-managed environment. 此时,温度大多以大的周期变化。 At this time, most of the temperature change with a large period. 此时,接着调整液滴喷出头的某一行内邻近的液滴喷出头的喷出量。 At this time, a row then adjusts the droplet discharge head adjacent the discharge amount of the droplet discharge head. 因此,在同一行中较近的喷头可以利用大致相同温度的影响所产生的误差对喷出量进行调整。 Thus, in the same row close to the discharge head can be adjusted by the amount of errors on substantially the same temperature generated.

[0070][应用例 19] [0070] [Application Example 19]

[0071] 在上述应用例涉及的喷出量调整方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一调整工序中,对一个滑架所搭载的预定调整的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行调整,在上述第二调整工序中对位于上述第一调整工序调整过的上述液滴喷出头附近且属于上述液滴喷出头的行的上述液滴喷出头的喷出量进行调整,反复进行上述第一调整工序与上述第二调整工序,从而对属于规定行的上述液滴喷出头的喷出量进行调整,切换到未进行调整的上述液滴喷出头所属的行,反复进行上述第一调整工序与上述第二调整工序,从而对上述液滴喷出头的喷出量进行调整。 [0071] In the method for adjusting the discharge amount of the above application example, wherein the plurality of the droplet by a plurality of carriages mounted on the droplet ejection head ejection head row forming a plurality of rows, in said first adjusting step, the droplet of a predetermined adjustment carriage mounted on the discharge portion of the discharge amount of the droplet ejection heads in the head is adjusted in the second pair is positioned in the adjustment step the droplet discharge amount adjusting step of adjusting a first droplet ejection through the head and the vicinity of the line belonging to the droplet discharge head of the discharge head is adjusted, repeating the first adjustment and the second adjustment step step, whereby the amount of discharge of a predetermined line belonging to the droplet discharge head is adjusted, is not switched to the droplet ejection adjusting the line head belongs, repeating the first step and the second adjusting step of adjusting , thereby the discharge amount of the droplet ejection head can be adjusted.

[0072] 根据该喷出量调整方法,在对一个液滴喷出头的喷出量进行调整后,对位于该调整过的液滴喷出头附近的液滴喷出头的喷出量进行调整。 [0072] According to the method for adjusting the amount of discharge, after adjusting the amount of discharge of a droplet discharge head, located on the adjusted amount of discharge liquid droplet discharge droplet discharge head near the head Adjustment. 因此,即使在周围的温度变化时, 在同一行中邻近位置的喷头也可以利用大致相同温度的影响所产生的误差来调整喷出量。 Accordingly, even when the ambient temperature changes, in the same row position adjacent to the head may affect substantially the same temperature using an error generated by the discharge amount is adjusted.

[0073][应用例 20] [0073] [Application Example 20]

[0074] 在上述应用例涉及的喷出量调整方法中,其特征在于,还包括:第一喷出量调整工序,反复进行上述第一测量工序与上述第一调整工序,以使上述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行上述第二测量工序与上述第二调整工序,以使上述喷出量接近目标喷出量;在上述第一喷出量调整工序中,除了属于被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头以外,还对从属于未被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头喷出的上述液状体的喷出量进行粗调整。 [0074] In the method for adjusting the discharge amount of the above-described application example is characterized in that, further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the ejection an amount close to the target discharge amount; and a second discharge amount adjusting step, the second measuring step is repeated and the second adjusting step, so that the discharge amount close to the target discharge quantity; adjusting the discharge amount of the first the liquid step, in addition to being the droplet ejection head is sandwiched between the droplet ejecting the column head row of droplet ejection heads, it also is not subordinate to the droplet ejection head arrays sandwiched the amount of the liquid material is discharged droplet ejection head of the droplet ejection head of the column discharged coarse adjustment.

[0075] 根据该喷出量调整方法,与在第一喷出量调整工序中未进行调整的情况相比,可以以较少的反复次数进行调整。 [0075] According to the method for adjusting the amount of discharge, compared with the case where no adjustment of the discharge amount adjustment in the first step, can be adjusted with a small number of iterations. 结果,可以成为生产率优良的调整方法。 As a result, productivity can be a good adjustment method.

[0076][应用例 21] [0076] [Application Example 21]

[0077] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第一喷出量调整工序中,调整为:从未被上述液滴喷出头列夹持的上述液滴喷出头喷出的上述液状体的喷出量比从被上述液滴喷出头列夹持的上述液滴喷出头喷出上述液状体的喷出量少。 [0077] In the method for adjusting the discharge amount of the above application example, wherein, in the first discharge amount adjusting step of adjusting: the droplet ejection head are never sandwiched droplet column discharging the liquid material than the ejection head ejecting ejection head ejecting a small amount of the liquid material ejected from the droplet ejection head is sandwiched between the droplet column.

[0078] 根据该喷出量调整方法,调整为从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量减少。 [0078] The discharge amount adjusting method, it has never been adjusted to reduce the discharge amount of the droplet discharge head according to a column holding the droplet discharge head discharging the liquid material. 未被液滴喷出头列夹持的液滴喷出头由于受到风的影响,温度降低。 Column droplet discharge head is not clamped droplet ejection head due to the influence of wind, temperature decreases. 而且,在温度降低时,喷出量减少。 Further, when the temperature decreases, the discharge amount is reduced. 在调整为喷出作为目标的喷出量的液状体后,在用其他液滴喷出头夹持并测量喷出量时,由于液滴喷出头的温度升高,故喷出量会超过作为目标的喷出量。 After adjusting the discharge amount of the liquid material is discharged as a target, while the other droplet ejection head holder and measuring the amount of discharge, since the temperature of the droplet discharge head is increased, so that the discharge amount exceeds as the discharge amount of goals.

[0079] 在此,调整为从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量比目标喷出量少。 [0079] Here, the discharge is never adjusted to the target is less than the discharged liquid droplet ejection head of the droplet ejection head column holding the liquid is discharged. 因此,在用其他液滴喷出头夹持并测量喷出量时,可以从与目标喷出量接近的喷出量开始对喷出量进行调整。 Thus, when the liquid droplet ejection head other gripping and measuring the amount of discharge, the discharge amount can be started from the closest to the target discharge amount of the discharge amount is adjusted. 结果,因为可以以极少的调整次数进行调整,故可以生产率良好地进行调整。 As a result, since the number of times may be adjusted to adjust the minimal, it is possible to adjust with good productivity.

[0080][应用例 22] [0080] [Application Example 22]

[0081] 在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第二测量工序中,以从被上述液滴喷出头列夹持的上述液滴喷出头喷出上述液状体的喷出量比上述第一喷出量调整工序中设定的喷出量少的方式变更设定后,喷出上述液状体,在上述第二调整工序中,对喷出量进行调整。 [0081] In the method for adjusting the discharge amount of the above application example, wherein, in the second measuring step, to be ejected from the droplet ejection head of the droplet ejection head of the column above the nip after discharging the first discharge amount adjustment method than the liquid ejection step of setting a small amount of change is set, the liquid material discharged, in the second adjusting step to adjust the amount of discharge .

[0082] 根据该喷出量调整方法,调整为从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量比目标喷出量少。 [0082] According to the method of adjusting the amount of discharge, it is never adjusted to the droplet discharge head row holding the droplet discharge head discharging the target ratio of discharged liquid material is ejected small. 因此,在用其他液滴喷出头夹持并测量喷出量时,可以从与目标喷出量接近的喷出量开始对喷出量进行调整。 Thus, when the liquid droplet ejection head other gripping and measuring the amount of discharge, the discharge amount can be started from the closest to the target discharge amount of the discharge amount is adjusted. 结果,因为可以以极少的调整次数进行调整,故可以生产率良好地进行调整。 As a result, since the number of times may be adjusted to adjust the minimal, it is possible to adjust with good productivity.

[0083][应用例 23] [0083] [Application Example 23]

[0084] 本应用例涉及的液状体的喷出方法,从液滴喷出头向工件喷出液状体,其特征在于,该液状体的喷出方法包括:对喷出量进行调整的喷出量调整工序;和向上述工件喷出液滴的涂敷工序;在上述喷出量调整工序中采用上述应用例记载的喷出量调整方法进行调離 [0084] The liquid material discharge method according to the present application example, the liquid droplet discharge head discharging the liquid material from the workpiece, characterized in that, the method of discharging a liquid material comprising: a discharge amount adjusting of the discharge amount adjustment step; and a discharging step of applying droplets to the workpiece; discharge amount using the application example described in the above-described step of adjusting the discharge amount adjusting method tune away

iF. ο iF. ο

[0085] 根据该液状体的喷出方法,在测量了喷出量后通过对喷出量进行调整,从而使得喷出量成为所希望的喷出量,并向工件喷出。 [0085] The liquid material discharge method, after the measurement of the amount discharged by the discharge amount adjustment, so that the discharge amount becomes the desired amount of discharge, and discharge the workpiece. 而且,因为以精确地测量了喷出量的测量值为基础,对喷出量进行调整,故向工件喷出的喷出量可以进行精确地调整过的喷出量的喷出。 Further, since the measurement to accurately measure the amount of discharge based on the values ​​of the discharge amount is adjusted, so that the amount of the discharged workpiece may be discharged through the discharge precisely adjusted ejection amount. 结果,可以使喷出量精确地向工件进行喷出。 As a result, the discharge amount can be accurately discharged to the workpiece.

[0086][应用例 [0086] [Application Example

[0087] 本应用例涉及的滤色器的制造方法,具有在基板上涂敷彩墨而形成滤色器的工 A method for producing [0087] The present embodiment relates to the application of a color filter having a colored ink coating work on a substrate and forming a color filter

序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述彩 Sequence, which is characterized in that a liquid material discharging method described in the application example, and discharged to the substrate coated with the above-described color

m m

蛮O Man O

[0088] 根据该滤色器的制造方法,由于可以以使彩墨的喷出量精确的方式喷出并进行涂敷,故可以成为以使彩墨的涂敷量精确的方式被涂敷的滤色器的制造方法。 [0088] The method for producing the color filter, and since the discharge is applied to the discharging amount of color ink in a precise manner, it is possible to become the coating amount of the color ink is applied in a precise manner the method of manufacturing a color filter.

[0089][应用例 25][0090] 本应用例涉及的液晶显示装置的制造方法,具有以下工序,即在第一基板与第二基板上形成取向膜,在上述第一基板与上述第二基板之间夹持液晶而形成液晶显示装置, 其特征在于,采用上述应用例记载的液状体的喷出方法,向上述第一基板与上述第二基板中的至少一方喷出并涂敷上述取向膜的材料后,通过使其固化,从而形成上述取向膜。 [0089] [Application Example 25] [0090] The present application example of the liquid crystal display device manufacturing method has the following steps, i.e., an alignment film is formed on the first substrate and the second substrate, the first substrate and the second a liquid crystal sandwiched between the substrates and a liquid crystal display device, characterized in that a liquid material discharging method described in the application example, the discharge and coated with the alignment at least one of said second substrate to said first substrate after the material film by curing, thereby forming the alignment film.

[0091] 根据该液晶显示装置的制造方法,由于可以以使取向膜材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使取向膜材料的涂敷量精确的方式被涂敷的液晶显示装置的制造方法。 [0091] The method for manufacturing the liquid crystal display apparatus, since the discharge amount in the alignment film material in a precise manner and applying the discharge, it is possible to become the alignment film material is applied in an amount to be coated in a precise manner a method for manufacturing a liquid crystal display apparatus cladding.

[0092][应用例沈] [0092] [Application Example Shen]

[0093] 本应用例涉及的液晶显示装置的制造方法,具有以下工序,即在第一基板上涂敷液晶后,在上述第一基板与第二基板之间夹持上述液晶而形成液晶显示装置,其特征在于, 采用上述应用例记载的液状体的喷出方法,向上述第一基板喷出并涂敷上述液晶。 [0093] A method for manufacturing a liquid crystal display according to the present application example, the following step, i.e., after coating the liquid crystal, between the first and second substrates sandwiching the liquid crystal on the first substrate to form a liquid crystal display device characterized in that the above-described discharging method described in the application example of the liquid discharge is applied to the first substrate and the liquid crystal.

[0094] 根据该液晶显示装置的制造方法,由于可以以使液晶的喷出量精确的方式喷出并进行涂敷,故可以成为以使液晶的涂敷量精确的方式被涂敷的液晶显示装置的制造方法。 [0094] The method for manufacturing the liquid crystal display apparatus, since the discharge and the discharge amount is applied to the liquid crystal in a precise manner, it is possible that the coating amount of the liquid crystal into a precise way the coated liquid crystal display the method of manufacturing a device.

[0095][应用例 27] [0095] [Application Example 27]

[0096] 本应用例涉及的电光装置的制造方法,具有在基板上涂敷发光元件形成材料后通过使其固化而形成发光元件的工序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述发光元件形成材料。 [0096] The method for manufacturing an electro-optical device according to the present application example, the light emitting device having a step of applying the material forming the light emitting element is formed by curing on a substrate, wherein the use of the liquid spray application described in Example a method of, and discharging the coating material for forming the light emitting element to the substrate.

[0097] 根据该电光装置的制造方法,由于可以以使发光元件形成材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使发光元件形成材料的涂敷量精确的方式被涂敷的电光装置的制造方法。 [0097] The method for manufacturing the electro-optical device, since the light emitting element may be formed in the discharge amount of the discharged material in a precise manner and the coating, so that the light emitting element can be formed so that the amount of material to be applied in a precise manner a method of manufacturing an electro-optical device is applied.

[0098][应用例观] [0098] [Application Example View]

[0099] 本应用例涉及的电光装置的制造方法,具有在基板上涂敷液状体的电极材料后通过使其固化而形成电极的工序,其特征在于,采用上述应用例记载的液状体的喷出方法, 向上述基板喷出并涂敷上述液状体的上述电极材料。 After [0099] The method for manufacturing an electro-optical device according to the present application example, an electrode material having the liquid applied on a substrate to form a cured through the electrodes, wherein the liquid material using spray application described in Example a method of, and coated with the electrode material ejecting the liquid material to the substrate.

[0100] 根据该电光装置的制造方法,由于可以以使液状体的电极材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使电极材料的涂敷量精确的方式被涂敷,从而形成电极的电光装置的制造方法。 [0100] The method for manufacturing the electro-optical device, since the discharge amount and the discharge is applied to the liquid so that the electrode material in a precise manner, it can be applied so that the electrode material is coated accurate manner the amount of welding, thereby forming the electro-optical device manufacturing method of an electrode.

[0101][应用例四] [0101] [Application Example Four]

[0102] 本应用例涉及的电光装置的制造方法,具有在基板上涂敷液状体的布线材料后通过使其固化而形成布线的工序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述液状体的上述布线材料。 [0102] The method for manufacturing an electro-optical device according to the present application example, after the step of applying a wiring material having a liquid material on a substrate to form a wiring by curing, characterized by using the liquid spray application of the above described embodiment a method, and applying the wiring material discharging the liquid material to the substrate.

[0103] 根据该电光装置的制造方法,由于可以以使液状体的布线材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使布线材料的涂敷量精确的方式被涂敷,从而形成布线的电光装置的制造方法。 [0103] The method for manufacturing the electro-optical device, since the discharge amount and the discharge is applied to the liquid so that a wiring material in a precise manner, it can be applied to the amount of the wiring material is coated accurate manner welding, thereby forming the electro-optical device manufacturing method of the wiring.

[0104][应用例 30] [0104] [Application Example 30]

[0105] 本应用例涉及的电光装置的制造方法,具有以下工序,即在基板上涂敷液状体的半导体材料并使其固化后,通过进行加热,从而形成半导体,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述液状体的上述半导体材料。 [0105] The method for manufacturing an electro-optical device according to this application example, includes the following steps, i.e., a semiconductor material, the liquid material is applied on a substrate and allowed to post-curing, by heating, to form a semiconductor, characterized in that said application using the method of discharging a liquid material described embodiment, the semiconductor material of the coating and discharging the liquid material to the substrate.

[0106] 根据该电光装置的制造方法,由于可以以使液状体的半导体材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使半导体材料的涂敷量精确的方式被涂敷,从而形成半导体的电光装置的制造方法。 [0106] The method for manufacturing the electro-optical device, since the discharge amount and the discharge is applied to cause the liquid semiconductor material in a precise manner, it is possible to become the coating amount of the semiconductor material to be coated in a precise manner welding, thereby forming a semiconductor manufacturing method of the electro-optical device.

附图说明 BRIEF DESCRIPTION

[0107] 图1是表示第一实施方式涉及的液滴喷出装置的构成的概略立体图。 [0107] FIG. 1 is a schematic perspective view showing the configuration of the droplet discharge according to a first embodiment.

[0108] 图2(a)是滑架的示意俯视图,(b)是用于说明滑架的结构的示意侧视图,(C)是用于说明液滴喷出头的结构的主要部分示意剖视图。 [0108] FIG. 2 (a) is a schematic plan view of a carriage, (b) is a schematic side view for explaining the structure of a carriage, (C) is a main portion configuration of a droplet ejection head for explaining a schematic cross-sectional view .

[0109] 图3是液滴喷出装置的电气控制框图。 [0109] FIG. 3 is an electrical control block diagram of the droplet ejection apparatus.

[0110] 图4是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 [0110] FIG 4 is a flowchart discharging droplets onto a substrate and the manufacturing process be coated.

[0111] 图5是用于说明调整液滴喷出头的喷出量的顺序的图。 [0111] FIG. 5 is a diagram illustrating the sequence of adjusting the discharge amount of the liquid droplet ejection head for explaining.

[0112] 图6是说明利用了液滴喷出装置的喷出方法的图。 [0112] FIG. 6 is a diagram illustrating a method using a droplet ejection apparatus of FIG discharge.

[0113] 图7(a)及(b)是表示液滴喷出头的驱动波形的时间图,(C)是表示驱动喷出次数与喷嘴温度的关系的曲线图,(d)是表示驱动电压与喷出量的关系的曲线图。 [0113] FIG. 7 (a) and (b) is a timing chart showing driving waveforms of the discharge head of the liquid droplet, (C) is a graph showing relationship between the driving frequency and the ejection nozzle temperature, (d) shows a driving graph showing the relationship of voltage and the discharge amount.

[0114] 图8是说明利用了液滴喷出装置的喷出方法的图。 [0114] FIG. 8 illustrates a method using a droplet ejection apparatus of FIG discharge.

[0115] 图9是说明利用了液滴喷出装置的喷出方法的图。 [0115] FIG 9 illustrates a method using a droplet ejection apparatus of FIG discharge.

[0116] 图10是表示第三实施方式涉及的向基板喷出液滴并进行涂覆的制造工序的流程图。 [0116] FIG. 10 shows a third embodiment of the liquid droplet ejection onto the substrate and a manufacturing process of the flowchart is coated.

[0117] 图11是表示第七实施方式涉及的液滴喷出装置的构成的概略立体图。 [0117] FIG. 11 is a schematic perspective view showing the configuration of the droplet discharge according to the seventh embodiment.

[0118] 图12是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 [0118] FIG. 12 is a flowchart discharging droplets onto a substrate and the manufacturing process be coated.

[0119] 图13是表示第八实施方式涉及的向基板喷出液滴并进行涂覆的制造工序的流程图。 [0119] FIG. 13 is a diagram showing an eighth embodiment of the discharged droplets and the substrate manufacturing process of the flowchart is coated.

[0120] 图14是表示第九实施方式涉及的向基板喷出液滴并进行涂覆的制造工序的流程图。 [0120] FIG. 14 shows a ninth embodiment relates to a liquid droplet is discharged onto the substrate and a manufacturing process of the flowchart is coated.

[0121] 图15是表示第十实施方式涉及的液晶显示装置的结构的概略分解立体图。 [0121] FIG. 15 is a schematic exploded perspective view showing the structure of a liquid crystal display according to the tenth embodiment.

[0122] 图16是表示第十一实施方式涉及的有机EL装置的结构的概略分解立体图。 [0122] FIG. 16 is a schematic exploded perspective view showing the structure of the organic EL device according to an eleventh embodiment.

[0123] 图17是表示第十二实施方式涉及的表面电场显示装置的概略分解立体图。 [0123] FIG. 17 is a schematic exploded perspective view of a twelfth embodiment relates to a surface electric field of the display.

[0124] 图18是表示第十三实施方式涉及的等离子显示装置的结构的概略分解立体图。 [0124] FIG. 18 shows a thirteenth embodiment relates to a plasma display apparatus a schematic configuration of an exploded perspective view of FIG.

[0125] 图中:7-作为工件的基板,12-滑架,12a-第一滑架,12b-第二滑架,12c-第三滑架,12d-第四滑架,12e-第五滑架,12f-第六滑架,14-液滴喷出头,41-作为液状体的功能液,44-液滴,71-作为液滴喷出头列的第一喷头列,72-作为液滴喷出头列的第二喷头列,73-作为液滴喷出头列的第三喷头列,74-作为液滴喷出头列的第四喷头列,75-作为液滴喷出头列的第五喷头列,76-作为液滴喷出头列的第六喷头列,77-作为液滴喷出头列的第七喷头列,78-作为液滴喷出头列的第八喷头列,79-作为液滴喷出头列的第九喷头列,80-作为液滴喷出头列的第十喷头列,81-作为液滴喷出头列的第i^一喷头列,82-作为液滴喷出头列的第十二喷头列,104-喷出量,110-作为行的第一喷头行,111-作为行的第二喷头行,112-作为行的第三喷头行,120-作为电光装置的液晶显示装置,122-液晶, 124-作 [0125] FIG: 7- workpiece as the substrate, 12 the carriage, 12A-first carriage, the second carriage 12b-, 12c-third of the carriage, the carriage 12D of the fourth, fifth 12E- carriage, 12f- sixth carriage, 14- droplet discharge heads, 41- as the functional liquid material liquid, droplets 44-, 71- head row as the first row of the droplet discharge head, a 72- the second droplet ejection head column head column, 73- head row as the third droplet ejection head of the column, 74- droplet discharge head as a fourth column head column 75 as a liquid droplet ejection head the fifth column head column, the column head as a sixth 76- droplet ejection head of the column, 77- droplet discharge head as the head row seventh column, 78- eighth head as droplet discharge head column column, 79- ninth droplet discharge head as the first column of the column, the column 80 as a liquid droplet ejection head of the tenth column head, 81- droplet discharge head as the first column of a head row i ^, 82 - a droplet ejection head row twelfth column head, the discharge amount of the 104-, 110- head row as the first row, the second row 111- head line, the head line of the third row as 112- , 120- liquid crystal electro-optical device as a display device, a liquid crystal 122-, 124- for 为第一基板的元件基板,125-作为第二基板的对置基板,130、157-作为电极的像素电极,131、151-作为半导体的TFT元件,132、152、169-作为布线的扫描线,133、153、170-作为布线的数据线,135、144-取向膜,141B、141G、141R-滤色器,143-作为电极的对置电极, The substrate is a first substrate element, 125- counter substrate as the second substrate, the pixel electrode of 130,157-, 131,151- TFT as a semiconductor element, the wiring line as a scanning 132,152,169- , 133,153,170- data line as a wiring, 135,144- alignment film, 141B, 141G, 141R- filter, 143- electrode as counter electrode,

16147-作为电光装置的有机EL装置,148、166、172、181、188-基板,158-作为发光元件的空穴输送层,159B、159G、159R-作为发光元件的发光层,160-作为发光元件的功能层,161-作为电极的阴极,163-作为电光装置的表面电场显示装置,168-作为电极的电子发射元件, 173-作为电极的阳极,178-作为电光装置的等离子显示装置,183-作为电极的地址电极, 190-作为电极的总线电极,191-作为电极的维持电极。 The organic EL device 16147- electro-optical device, the substrate 148,166,172,181,188-, 158- hole transport layer as the light emitting element, 159B, 159G, 159R- light-emitting element as a light emitting layer, a light emitting 160- the display device element functional layer, as a cathode electrode, 161-, 163- electro-optical device as the surface electric field, the electron emission element as an electrode 168-, 173- as an anode electrode, an ion 178- electro-optical device as a display device, etc., 183 - as the address electrode, the bus electrode as the 190-, 191- electrodes as sustain electrodes.

具体实施方式 Detailed ways

[0126] 以下,根据附图对实施方式进行说明。 [0126] Hereinafter, the embodiments of the drawings will be described.

[0127] 其中,为了使各附图中的各部件为在各附图上能识别的程度的大小,故以每个部件的缩小比例不同的方式进行图示。 [0127] wherein, for each member of the drawings can be identified on the drawings extent size, so it is illustrated with different reduction scale of each member manner.

[0128](第一实施方式) [0128] (First Embodiment)

[0129] 在本实施方式中,根据图1〜图9,对液滴喷出装置、利用该液滴喷出装置使液状体成为液滴并喷出时的特征性例子进行说明。 [0129] In the present embodiment, according to FIG. 1 ~ 9, the droplet ejection apparatus, a droplet ejection apparatus using the liquid material to become so characteristic example when the liquid droplet ejection, and will be described.

[0130](液滴喷出装置) [0130] (droplet ejection apparatus)

[0131] 首先,根据图1〜图3,说明向工件喷出液滴并进行涂覆的液滴喷出装置1。 [0131] First, according to FIG. 1 ~ 3, a droplet discharge and the workpiece coated with a droplet discharge device. 关于液滴喷出装置,虽然存在各种各样的装置,但优选采用喷墨法的装置。 About droplet discharge device, although the presence of a variety of means, but preferably the inkjet method using the apparatus. 喷墨法能进行微小液滴的喷出,因此适用于微细加工。 An ink jet method capable of discharging fine droplets, thus suitable for microfabrication.

[0132] 图1是表示液滴喷出装置的构成的概略立体图。 [0132] FIG. 1 is a schematic perspective view of a droplet discharge device. 由液滴喷出装置1喷出功能液并进行涂覆。 The droplet ejection apparatus 1 and discharged functional liquid is coated.

[0133] 如图1所示,液滴喷出装置1包括形成为长方体形状的基台2。 [0133] As shown, the droplet ejection apparatus 1 includes a rectangular parallelepiped shape of the base 2. 在本实施方式中, 将该基台2的长边方向设为Y方向,将与该Y方向正交的方向设为X方向。 In the present embodiment, the longitudinal direction of the base 2 in the Y direction, a direction orthogonal to the Y direction is defined as X direction.

[0134] 在基台2的上表面加上,沿Y方向延伸的一对导向轨3a、3b突设于该Y方向的整个宽度上。 [0134] On the upper surface of the base plus 2, extending in the Y direction of the pair of guide rails 3a, 3b provided in the projecting direction Y of the entire width. 在该基台2的上侧,安装有作为工作台的台面4,其构成具备与导向轨3a、!3b对应的未图示的直动机构的扫描装置。 On the side of the base 2, a table attached to table 4, which includes the guide rail configuration. 3A,! Scanning device corresponding to a linear motion mechanism (not shown) 3b. 该台面4的直动机构例如为螺纹式直动机构,其具备: 沿着导向轨3a、!3b沿Y方向延伸的螺纹轴(驱动轴);与该螺纹轴螺合的球状螺母(ball nut),该驱动轴与Y轴电动机(未图示)连接,该Y轴电动机接受规定的脉冲信号,以梯级(step)为单位正转反转。 The linear motion mechanism 4 of the mesa, for example, screw-type linear actuator, comprising: along the guide rails 3a, 3b of the screw shaft (drive shaft) extending in the Y direction; a ball nut engaged with the threaded shaft (ball nut! ), which is connected to the Y-axis drive motor (not shown), the Y-axis motor to accept a predetermined pulse signal to the step (step) forward reverse units. 然后,一旦与规定的梯级数对应的驱动信号被输入Y轴电动机, 则Y轴电动机正转或反转,台面4沿Y方向以规定的速度往动或复动(沿Y方向扫描)与该梯级数相当的量。 Then, once the driving signal corresponding to a predetermined number of steps is input Y-axis motor, the Y-axis motor forward or reverse, the table 4 in the Y direction at a predetermined speed of forward movement or backward movement (in the scanning direction Y) with the number of steps equivalent to the amount.

[0135] 进而,基台2的上表面加上,与导向轨3a、3b平行地配置有主扫描位置检测装置5,可以计量台面4的位置。 [0135] Further, the upper surface of the base 2 together with the guide rails 3a, 3b are arranged in parallel to the main scanning position detecting means 5, the position of the table 4 can be metered.

[0136] 该台面4的上表面上形成有载置面6,该载置面6上设有未图示的吸引式基板卡盘(chuck)机构。 [0136] is formed on the upper surface of the table 4 are the mounting surface 6, the mounting surface (not shown) provided with a suction-type substrate chuck (Chuck) mechanism 6. 然后,若载置面6上载置作为工件的基板7,则由基板卡盘机构将该基板7定位固定在载置面6的规定位置上。 Then, if the mounting surface of the workpiece 6 is placed as a substrate 7, substrate chuck mechanism by the positioning of the substrate 7 is fixed at a predetermined position on the mounting surface 6.

[0137] 基台2的X方向两侧立设一对支撑台8a、8b,这一对支撑台8a、8b上架设有沿X方向延伸的导向部件9。 [0137] X direction of the base 2 erected on both sides of a pair of support units 8a, 8b, the guide member is provided extending in the X direction on the support base 8a, 8b shelves 9.

[0138] 导向部件9的上侧配设有以能供给的方式收纳所喷出的液体的收纳容器10。 The upper side of [0138] the guide member 9 are disposed in a manner capable of supplying liquid storage container 10 is discharged. 另一方面,该导向部件9的下侧,沿X方向延伸的导向轨11突设于X方向的整个宽度上。 On the other hand, lower side of the guide member 9 extending in the X direction of the guide rail 11 protruding in the X direction on the entire width.

[0139] 配置为能沿导向轨11移动的滑架12由第一滑架1¾〜第六滑架12f这六个滑架构成,各滑架12a〜12f形成为底面大致是平行四边形的角柱形状。 [0139] configured to be movable along the guide rails 11 of the carriage 12 first carriage 1¾~ sixth carriage 12f into six carriage, each carriage 12a~12f formed by a bottom surface substantially parallelogram shaped prism . 该各滑架12a〜12f 具备直动机构,各滑架1¾〜12f分别独立移动。 Each carriage includes 12a~12f the linear motion mechanism, each of the carriage 1¾~12f are moved independently. 该直动机构例如是具备沿着导向轨11沿X方向延伸的螺纹轴(驱动轴)、和与该螺纹轴螺合的球状螺母的螺纹式直动机构,该驱动轴与X轴电动机(未图示)连接,该X轴电动机接受规定的脉冲信号,以梯级为单位正转反转。 For example, the linear motion mechanism includes a threaded shaft (drive shaft) extends along the guide rail 11 in the X direction, the ball nut and a screw shaft screwed to the screw-type linear actuator, the X-axis drive motor (not shown), the X-axis motor receiving a predetermined pulse signal, the unit step forward to reverse. 然后,一旦与规定的梯级数对应的驱动信号被输入X轴电动机,则X轴电动机正转或反转,滑架12沿X方向往动或复动(沿X方向扫描)与该梯级数相当的量。 Then, once the driving signal corresponding to a predetermined number of steps is input X-axis motor, the X-axis motor forward or reverse, the carriage 12 to move in the X direction or the backward movement (in the scanning direction X) equivalent to the number of the step It amounts. 导向部件9与滑架12之间配置有副扫描位置检测装置13,可以计量各滑架12a〜12f的位置。 Arranged sub-scanning position detecting means 13, the position of each carriage can be metered 12a~12f between the guide member 12 and the carriage 9. 然后,滑架12的下表面(台面4 一侧的面)突设有液滴喷出头14。 Then, a lower surface (the surface 4 of the mesa side) of the carriage 12 is provided with projections droplet discharge head 14.

[0140] 基台2的上侧、即台面4的单侧的一方(图中Y方向的相反方向)上配置有清洗单元15。 [0140] upper side of the base 2, i.e., the cleaning unit 15 is disposed on one side of one of the table 4 (the direction opposite to the Y direction in the drawing). 清洗单元15由维修台面16、配置于维修台面16上的第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20、重量测量装置21等构成。 The cleaning unit 15 by the service table 16, the maintenance unit is disposed in the first rinsing 17 on the table 16, the second flushing unit 18, capping unit 19, the wiping unit 20, the weight measuring apparatus 21 and the like.

[0141] 维修台面16位于导向轨3a、3b上,具备与台面4同样的直动机构。 [0141] maintenance of the mesa 16 of the guide rail 3a, the 3b, provided with the table 4 the same linear motion mechanism. 然后,通过利用未图示的维修台面位置检测装置来检测位置,并用直动机构进行移动,从而能够移动到所希望的场所后停止。 Then, by using the service table position detecting means (not shown) to detect the position, and for moving the linear motion mechanism can be moved to a desired place after stopping. 然后,维修台面16沿导向轨3a、!3b移动,从而第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20、重量测量装置21的其中一个装置配置在与液滴喷出头14对置的场所。 Then, the table 16 along the guide track maintenance 3a,! 3b moves so that the first flushing unit 17, the second flushing unit 18, capping unit 19, the wiping unit 20, which means a weight measuring device 21 disposed in the droplet ejection Site No. 14-something opposed.

[0142] 第一冲洗单元17及第二冲洗单元18在清洗液滴喷出头14内的流路时作为接受从液滴喷出头14喷出的液滴的装置。 Means for accepting from the droplet discharge head discharging droplets 14 when [0142] a first section 17 and the second flushing means flushing discharge passage 18 in the head 14 in the cleaning liquid droplet. 在液滴喷出头14内的功能液挥发时,由于功能液的粘度升高,故难以喷出。 When the functional liquid droplet discharging head 14 of the volatiles, the viscosity of the functional fluid is increased, it is difficult to discharge. 该情况下,由于从液滴喷出头14中排除粘度升高的功能液,故从液滴喷出头14喷出液滴并进行清洗。 In this case, since the viscosity increase exclusion liquid 14 from the liquid droplet ejection head, so that the liquid droplet discharge head discharging droplets 14 and washed. 第一冲洗单元17及第二冲洗单元18进行该接受液滴的功能。 The first and the second flushing unit 17 of the rinsing unit 18 functions to accept droplets.

[0143] 压盖单元19是具有对液滴喷出头14加盖的功能、和吸引液滴喷出头14的功能液的功能的装置。 Function means a function of the liquid [0143] 14 with the capping unit 19 is capped droplet ejection heads function, and the suction head 14 of the droplet discharge. 从液滴喷出头14喷出的液滴有时具有挥发性,若存在于液滴喷出头14内的功能液的溶剂从喷嘴挥发,则功能液的粘度变化,喷嘴堵塞。 Discharged from the droplet discharge head 14 droplets sometimes volatile, the solvent, if present in the functional liquid droplet ejection head 14 from the nozzles volatilization, the change in viscosity of the functional fluid, nozzle clogging. 压盖单元19通过对液滴喷出头14加盖,从而防止喷嘴堵塞。 The capping unit 19 by the droplet discharge head 14 capped to prevent nozzle clogging.

[0144] 进而,在液滴喷出头14的内部混入固态物体而无法喷出液滴时,吸引并除去液滴喷出头14内部的功能液和固态物体。 When [0144] Further, in the droplet ejection head 14 and the interior of solid objects can not be mixed into the discharged liquid droplet, and removing the suction inside the droplet discharge head 14 and the functional liquid solid objects. 然后,可以解除喷嘴的堵塞。 Then, nozzle clogging can be canceled.

[0145] 擦拭单元20是对配置有液滴喷出头14的喷嘴的喷嘴板进行擦拭的装置。 [0145] wiping unit 20 is configured with a nozzle plate of the droplet ejection nozzle head 14 performs wiping means. 喷嘴板是在液滴喷出头14中配置于与基板7对置一侧的面上的部件。 Droplet ejecting nozzle plate is disposed on the head member 14 and seven pairs of opposing surface side of the substrate. 在液滴附着于喷嘴板时,附着于喷嘴板上的液滴和基板7接触,在基板7中,液滴附着于预定外的场所。 When the droplets adhered to the nozzle plate, the droplets adhered to the substrate and contact with the nozzle plate 7, in the substrate 7, the droplets adhere to a predetermined place outside.

[0146] 进而,在液滴附着于喷嘴周边时,附着于喷嘴板上的液滴和喷出的液滴接触,喷出的液滴的轨道弯曲。 [0146] Further, when the droplets adhere to the periphery of the nozzle, a droplet attached to the contact with the nozzle plate and the jetting droplets curved track. 因此,所涂覆的场所和要涂覆的预定场所不同。 Thus, different predetermined place to be coated and the properties of the coating. 擦拭单元20通过擦拭喷嘴板,从而在基板7中防止液滴附着于预定外的场所。 By wiping unit wiping the nozzle plate 20, thereby preventing the droplets adhere to a predetermined place outside the substrate 7.

[0147] 重量测量装置21中设置有12台电子天平,各电子天平中配置有接受器皿。 [0147] 21 is provided with a weight measuring device 12 electronic balance, electronic balance in each receiving plate is disposed. 3个电子天平排列为1列,形成于大致Y方向上,该电子天平列配置有4列。 3 are arranged in an electronic balance, are formed on a substantially Y-direction, the electronic balance column 4 are disposed. 然后,液滴从液滴喷出头14被喷向接受器皿,电子天平测量液滴的重量。 Then, the droplet discharge head 14 is sprayed from the droplet receiving plate, electronic scales measure the weight of the droplets. 接受器皿具备海绵状的吸引体,所喷出的液滴不会跳到接受器皿之外。 Receiving plate member includes a sponge-like suction, liquid droplets will not jump outside the receiving vessel. 该电子天平在液滴喷出头14喷出液滴前后测量接受器皿的重量。 The electronic balance 14 in the droplet discharge head discharging droplets measured before and after the weight of the receiving vessel. 然后,通过运算喷出前后接受器皿的重量的差分,从而能够测量所喷出的液滴的重量。 Then, before and after operation of the discharge vessel accepts a differential weight, it is possible to measure the weight of the ejected droplet. [0148] 重量测量装置21两侧配置有第一冲洗单元17与第二冲洗单元18。 [0148] the weight measuring apparatus 21 arranged on both sides of the first unit 17 and the flushing unit 18 second rinsing. 然后,在测量从一部分液滴喷出头14喷出的喷出量的期间内,其他液滴喷出头14位于与第一冲洗单元17或第二冲洗单元18对置的场所,能够喷出液滴。 Then, in the measuring part of the droplet ejected from the head during the discharge amount of the discharge 14, the droplet discharge head 14 is located in the other places of the first or the second flushing unit 17 facing the flushing unit 18 can be discharged droplets.

[0149] 液滴喷出装置1的四角具备支柱22,在上部(图中上侧)具有空气控制装置23。 [0149] The liquid droplet ejection apparatus 1 is provided with the four corners of the pillars 22, the upper portion (upper side in the figure) has an air control means 23. 空气控制装置23具备风扇、过滤器、冷暖风装置、湿度调整装置等。 Air control means 23 includes a fan, a filter, means cold or warm wind, humidity control devices. 风扇(送风机)取入工厂内的空气,通过过滤器,从而除去空气内的尘埃,提供净化后的空气。 Fan (fan) air is taken in the plant, through a filter to remove the dust in the air to provide purified air.

[0150] 冷暖风装置是以将液滴喷出装置1的气氛温度保持规定的温度范围的方式对所提供的空气的湿度进行控制的装置。 [0150] The cold or warm wind droplet discharge means is a means of maintaining an atmosphere temperature of a predetermined temperature range of the humidity provided by way of an air control device performs. 湿度调整装置是以将液滴喷出装置1的气氛湿度保持规定的湿度范围的方式对空气进行除湿、或加湿,控制所提供的空气的湿度的装置。 The humidity control means is a liquid droplet ejection apparatus 1 atmosphere humidity of a predetermined humidity range manner dehumidify the air, or humidifying, the humidity is provided by means of control air.

[0151] 4根支柱22之间配置薄片24,以便切断空气的流通。 24 disposed between the sheet 22 [0151] 4 struts, to cut off air circulation. 从空气控制装置23供给的空气从空气控制装置23流向地面25 (图中Z方向的相反方向),被薄片M包围的空间内的尘埃向地面25流动。 Air supplied from the air control means 23 control means 23 from the air flow 25 (the direction opposite to the Z direction in the figure) surface, the dust in the space surrounded by the sheet M 25 flows to the ground. 由此,基板7上不易附着尘埃。 Accordingly, the substrate 7 is not easy adhesion of dust.

[0152] 进而,薄片M通过限制空气的流通,从而被薄片M包围的空间内的温度与湿度难以受到薄片M外部的影响。 [0152] Further, the sheet M by limiting the flow of air, so that the temperature and humidity within the space surrounded by the sheet M is not easily affected by external sheet M. 然后,空气控制装置23容易控制被薄片M包围的空间内的温度与湿度。 Then, air control means 23 is easy to control temperature and humidity in the space surrounded by the sheet M.

[0153] 图2(a)是表示滑架的示意俯视图。 [0153] FIG. 2 (a) is a schematic plan view of a carriage. 如图2(a)所示,1个滑架12上,3个液滴喷出头14排列为1列,形成于大致Y方向上,该液滴喷出头列配置有2列。 As shown in FIG 2 (a) as shown, a carriage 12, three droplet discharge heads 14 are arranged in one, substantially in the Y direction is formed, the droplet ejection head are arranged two columns. 然后,在液滴喷出头14的表面上,配置有喷嘴板30,喷嘴板30上形成有多个喷嘴31。 Then, on the surface of the droplet discharge head 14, the nozzle plate 30 is disposed, a plurality of nozzles 31 on the nozzle plate 30 is formed. 喷嘴31的个数只要根据所喷出的图案和基板7的大小进行设定即可,在本实施方式中,例如在1个喷嘴板30上形成有2列喷嘴31的排列,各列配置有15个喷嘴31。 As long as the number of nozzles 31 can be set according to the size of the discharge pattern and substrate 7, in the present embodiment, for example, is formed on a nozzle plate 30 has two aligned nozzle 31, the columns are disposed 15 nozzles 31.

[0154] 图2(b)是表示滑架的示意侧视图。 [0154] FIG. 2 (b) is a schematic side view of the carriage. 是从Y方向观察图2(a)所示的滑架的图。 It is a view 2 (a) view of a carriage from the Y direction shown in FIG. 如图2(b)所示,滑架12备有底板32。 As shown in FIG 2 (b), the carriage 12 with the bottom plate 32. 底板32的上侧配置有移动机构33,收纳有滑架12沿导向轨11移动用的机构。 The upper plate 32 of the moving mechanism 33 is disposed, the carriage 12 is accommodated along a guide rail 11 by the moving mechanism.

[0155] 底板32的下侧隔着支撑部34而配置有驱动电路基板35。 A lower side [0155] the bottom plate 32 of the support portion 34 via the drive circuit substrate 35 is disposed. 然后,驱动电路基板35 的下侧配置有喷头驱动电路36。 Then, the lower-side drive circuit board 35 of the head driving circuit 36 ​​is disposed. 进而,底板32上隔着支撑部37而配置有喷头安装板38, 喷头安装板38的下表面配置有液滴喷出头14。 Further, the base plate 32 via the support portions 37 and head mounting plate 38 is disposed, the lower surface of the nozzle mounting plate 38 of the droplet discharge head 14 is disposed. 通过未图示的电缆来连接喷头驱动电路36 与液滴喷出头14,喷头驱动电路36输出的驱动信号被输入液滴喷出头14。 The head driving circuit 36 ​​is connected to the droplet ejection head 14 through a cable (not shown), the drive signal output from head drive circuit 36 ​​is input to the droplet ejection head 14.

[0156] 底板32的下侧配置供给装置39,收纳容器10与供给装置39之间以及供给装置39与液滴喷出头14之间通过未图示的管道来连接。 A lower side [0156] the bottom plate 32 of the feeding device 39 arranged, with the housing 10 between the container 39 and the supply means supplying means 39 and the droplet ejection head 14 are connected between the (not shown) through a pipe. 然后,从收纳容器10提供的功能液由供给装置39提供给液滴喷出头14。 Then, the functional liquid supplied from the container 10 by the supply means 39 provided to the droplet ejection head 14.

[0157] 图2(c)是用于说明液滴喷出头的结构的主要部分示意剖视图。 [0157] FIG. 2 (c) is the main part of the liquid droplet ejection head for explaining a schematic configuration of a cross-sectional view. 如图2(c)所示, 液滴喷出头14具备喷嘴板30,喷嘴板30上形成有喷嘴31。 As shown in FIG 2 (c), the liquid droplet ejection head 14 includes a nozzle plate 30, a nozzle 31 on nozzle plate 30 is formed. 在喷嘴板30的上侧、即与喷嘴31相对的位置上形成有与喷嘴31连通的空腔40。 On the side of the nozzle plate 30, that is formed with a cavity 40 communicating with the nozzle 31 on the opposite position of the nozzle 31. 然后,向液滴喷出头14的空腔40提供作为贮留于收纳容器10内的液状体的功能液41。 Then, the droplet ejection head 14 provided as a storing cavity 40 in the housing 10 of the liquid container of the functional fluid 41.

[0158] 空腔40的上侧配设有:在上下方向(Z方向)振动,并对空腔40内的容积进行放大缩小的振动板42 ;在上下方向伸缩,并使振动板42振动的压电元件43。 Upper [0158] The cavity 40 is provided with: a vibration in the vertical direction (Z direction), the vibration plate 42 and the zoom volume of the cavity 40; stretching in the vertical direction, and the vibration of the vibrating plate 42 The piezoelectric element 43. 压电元件43在上下方向伸缩,对振动板42进行加压使之振动,振动板42对空腔40内的容积进行放大缩小,对空腔40进行加压。 The piezoelectric element 43 in the vertical direction, stretching, pressing the vibrating plate 42 so that the vibration, the volume within the cavity 40 of the vibrating plate 42 to zoom, of the cavity 40 is pressurized. 由此,空腔40内的压力变动,提供给空腔40内的功能液41通过喷嘴31而被喷出。 Accordingly, the pressure change in the cavity 40, the functional fluid supplied to the cavity 4041 through the nozzle 31 is ejected. [0159] 然后,若液滴喷出头14接受用于控制驱动压电元件43的喷嘴驱动信号,则压电元件43伸长,振动板42缩小空腔40内的容积。 Nozzle [0159] Then, when the liquid droplet ejection head 14 for controlling the drive receiving element 43 of the piezoelectric drive signal, the piezoelectric element 43 is elongated, the vibrating plate 42 in the cavity 40 contracts in volume. 结果,缩小的容积份的功能液41被作为液滴而从液滴喷出头14的喷嘴31喷出。 As a result, the reduced volume of the functional parts of the liquid 41 is ejected as a droplet from the droplet ejection head 14 of the nozzle 31. 在从喷嘴31喷出液滴44时,为了喷出液滴44,施加给液滴喷出头14的能量的一部分转换为热。 When converting a portion of droplet 44 discharged from the nozzles 31, 44 for ejecting the droplets, energy is applied to the droplet discharge head 14 into heat. 然后,液滴喷出头14被加热,温度上升。 Then, the droplet discharge head 14 is heated, the temperature rises.

[0160] 图3是液滴喷出装置的电气控制框图。 [0160] FIG. 3 is an electrical control block diagram of the droplet ejection apparatus. 在图3中,液滴喷出装置1具有:作为处理器而进行各种运算处理的CPU(运算处理装置)48 ;存储各种信息的存储器49。 In Figure 3, the droplet discharge device 1 includes: a process of performing various kinds of arithmetic processors as CPU (arithmetic processing means) 48; a memory 49 storing various information.

[0161] 主扫描驱动装置50、副扫描驱动装置51、主扫描位置检测装置5、副扫描位置检测装置13、驱动液滴喷出头14的喷头驱动电路36经由输入输出接口52及数据总线53而与CPU48连接。 [0161] the main scanning driving device 50, the sub-scanning driving device 51, the main scanning position detecting means 5, the sub-scanning position detecting means 13, the drive head 14 of the droplet discharge head drive circuit 3653 via an input-output interface 52 and a data bus connected to the CPU48. 进而,输入装置M、显示器装置55、重量测量装置21、第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20也经由输入输出接口52及数据总线53而与CPU48连接。 Further, the input device M, a display device 55, the weight measuring device 21, a first rinse section 17, a second flushing unit 18, capping unit 19, the wiping unit 20 is also connected to the CPU48 via the input interface 52 and data bus 53. 同样,在清洗单元15中,驱动维修台面16的维修台面驱动装置56以及检测维修台面16的位置的维修台面位置检测装置57也经由输入输出接口52及数据总线53而与CPU48 连接。 Also, the cleaning unit 15, the table 16 driven repair service table drive apparatus 56 and a service table position detecting means 16 for detecting the position of the table 57 also maintenance and input and output interface 52 via data bus 53 is connected to the CPU48.

[0162] 主扫描驱动装置50是控制台面4的移动的装置,副扫描驱动装置51是控制滑架12的移动的装置。 [0162] the main scanning driving device 50 is a means for moving the console surface 4, the sub-scanning driving device 51 is a means for controlling the movement of the carriage 12. 主扫描位置检测装置5识别台面4的位置,主扫描驱动装置50通过控制台面4的移动,从而能够将台面4移动并停止在所希望的位置上。 The main scanning position detecting device 5 recognizes the table 4, the main scanning driving device 50 moves through the console surface 4, so that the table 4 can be moved and stopped at a desired position. 同样,副扫描位置检测装置13识别滑架12的位置,副扫描驱动装置51通过控制滑架12的移动,从而能够将滑架12移动并停止在所希望的位置上。 Similarly, the sub scanning position detecting means 13 recognizes the position of the carriage 12, the sub-scanning driving device 51 by controlling the movement of the carriage 12, thereby moving the carriage 12 and is stopped at a desired position.

[0163] 输入装置M是输入喷出液滴44的各种加工条件的装置,例如是从未图示的外部装置接收并输入向基板7喷出液滴44的坐标的装置。 [0163] M is the input means of various processing conditions droplet discharge device 44 inputs, for example, an external device (not shown) to receive and coordinate input device to the discharge droplet 44 of the substrate 7. 显示器装置55是显示加工条件或作业状况的装置,操作者以显示器装置55所显示的信息为基础,利用输入装置M进行操作。 The display device 55 is a display processing conditions or working conditions of the apparatus, an operator to an information display device 55 displays, based on M using the input device operates.

[0164] 重量测量装置21具备电子天平和接受器皿,是测量液滴喷出头14喷出的液滴44、 和接受液滴44的接受器皿的重量的装置。 [0164] the weight measuring apparatus 21 and the receiving plate is provided with an electronic balance, is a measure of the droplet discharge head 14 discharge droplets 44, and the weight of the device 44 to accept the receiving vessel drops. 测量喷出液滴44前后的接受器皿的重量,并将测量值发送到CPU48。 Measuring the weight of the discharge vessel before and after receiving the droplets 44, and transmits the measured value to the CPU48.

[0165] 维修台面驱动装置56是从第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20、重量测量装置21中选择一个装置使其位于与液滴喷出头14对置的场所的方式移动维修台面16的装置。 [0165] service from the table drive apparatus 56 is first rinsing unit 17, a second flushing unit 18, capping unit 19, the wiping unit 20, the weight measuring apparatus 21 selects a device to be located and the droplet ejection head 14 pairs opposed manner places the table 16 moves the maintenance device. 然后,维修台面位置检测装置57检测出维修台面16的位置后,维修台面驱动装置56移动维修台面16,从而所希望的装置或单元能够可靠地移动到与液滴喷出头14对置的场所。 Then, the maintenance table position detecting means 57 detects the service position of the table 16, the table drive apparatus 56 moves the maintenance service table 16, so that the desired device or unit can be reliably moved to place the droplet ejection head 14 facing the .

[0166] 存储器49是包含RAM、R0M等所谓的半导体存储器、或硬盘、⑶-ROM等所谓的外部存储装置的概念。 [0166] The memory 49 is a concept including RAM, R0M so-called semiconductor memory, or a hard disk, ⑶-ROM so-called external storage device. 在功能上来说,设定存储描述液滴喷出装置1中的动作的控制顺序的程序软件58的存储区域。 Functionally, the setting storage control sequence described droplet discharge operation of the apparatus 1 in the software storage area 58. 进而,也设定用于存储喷出位置数据59、即基板7内的喷出位置的坐标数据的存储区域。 Further, the discharge is also set for storing position data 59, i.e., the coordinate data storage area of ​​the substrate position in the discharge 7.

[0167] 另外,在液滴喷出头14的暖机驱动中,设定驱动次数数据等暖机驱动数据60。 [0167] Further, in the droplet ejection head 14 in the warm-up drive, the drive frequency setting data 60 and other warm-drive data. 再有,在测量从喷嘴31喷出的液滴44的重量时,设定用于存储驱动压电元件43的测量用驱动数据61的存储区域。 Furthermore, when measuring the weight of the droplets 31 ejected from the nozzle 44 is set for the measurement store to drive the piezoelectric element 43 is driven with the data storage area 61.

[0168] 进而,设定用于存储使基板7向主扫描方向(Y方向)移动的主扫描移动量、和使滑架12向副扫描方向(X方向)移动的副扫描移动量的存储区域;或CPU48用的工作区域或作为临时文件等起作用的存储区域或者其他各种存储区域。 [0168] Further, the substrate 7 for storing the setting in the main scanning direction (Y direction) of the main scanning moving amount, and the sub-scanning carriage 12 moves the movement amount in the sub-scanning direction (X direction) of the memory area ; or storage area functioning as a work area or a temporary files CPU48 or various other storage areas. [0169] CPU48根据存储于存储器49内的程序软件58,进行使功能液成为液滴44后喷向基板7的表面的规定位置用的控制。 [0169] CPU48 controls sprayed surface of the substrate 7 becomes the predetermined positions after the droplet 44 is stored in memory 49 is software 58, performed in accordance with the functional fluid. 作为具体的功能实现部分,具有进行用于实现重量测量的运算的重量测量运算部62。 As a specific function realization section, having a weight measuring section 62 performs arithmetic operation for realizing weight measurement. 还包括:运算清洗液滴喷出头14的定时的清洗运算部63 ; 或在对液滴喷出头14进行暖机驱动时,进行暖机驱动的液滴喷出头14的选择或暖机驱动时间的控制的暖机控制运算部64。 Further comprising: a droplet ejection timing of the cleaning operation of the cleaning unit 63 of the head 14; or when droplet ejection head 14 is driven warm, warm-droplet discharge head is driven to select or warm 14 control of driving time calculation unit 64 warm-up control.

[0170] 另外,具有进行由液滴喷出头14喷出液滴44的运算用的喷出运算部65等。 [0170] Furthermore, having performed the ejection operation portion 14 by the droplet discharge head discharging droplets 44 by the operator 65 and the like. 若详细分割运算部65,则具有用于向液滴喷出用的初始位置设置液滴喷出头14的喷出开始位置运算部66。 If the dividing calculating unit 65 in detail, it has a droplet ejection to set the initial position of the droplet discharge head 14 discharge start position calculating section 66. 进而,喷出运算部65具有主扫描控制运算部67,其对使基板7以规定的速度向主扫描方向(Y方向)扫描移动用的控制进行运算。 Further, the discharge operation portion 65 includes a main scanning control operation unit 67, which performs scanning control operation for moving the main scanning direction (Y-direction) of the substrate 7 at a predetermined speed. 进而,喷出运算部65具有副扫描控制运算部68,其对使液滴喷出头14以规定的副扫描量向副扫描方向(X方向)移动用的控制进行运算。 Further, the discharge operation portion 65 has a sub-scan control arithmetic unit 68, sub-scanning amount of the droplet discharge head 14 to a predetermined sub-scanning direction (X direction) for moving the control operation is performed. 再有,喷出运算部65具有喷嘴喷出控制运算部69等所谓的各种功能运算部, 其进行用于控制使液滴喷出头14内的多个喷嘴中的哪一个喷嘴喷出功能液的运算。 Further, the discharge nozzle 65 has a computing unit 69 controls the various functions of the so-called calculation unit calculating unit that performs control for the droplet discharge heads in which a plurality of nozzles within a nozzle 14 discharging the function operation fluid.

[0171](喷出方法) [0171] (ejection method)

[0172] 接着,用图4〜图9,对使用上述的液滴喷出装置1向基板7喷出功能液并进行涂覆的喷出方法进行说明。 [0172] Next, using FIG. 4 ~ 9, the above-described liquid droplet ejection apparatus 1 of the discharged functional liquid is ejected to the substrate 7 and coating method will be described. 图4是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 FIG 4 is a flowchart discharging droplets onto a substrate and the manufacturing process be coated. 图5〜图9是说明利用液滴喷出装置的喷出方法的图。 FIG -5 to FIG. 9 is an explanatory view of an ejection method using the liquid droplet ejecting apparatus.

[0173] 步骤Sl相当于调整顺序设定工序,是设定对液滴喷出头的喷出量进行调整的顺序的工序。 [0173] Step Sl is equivalent to adjustment order setting step for setting a discharge amount of the droplet discharge head adjustment process sequence. 接着,移至步骤S2。 Next, the processing proceeds to step S2. 步骤S2相当于喷出前待机工序,是对液滴喷出头进行暖机驱动的工序。 Step S2 corresponds to the standby before discharging step, the droplet discharge head is driven warming step. 接着,移至步骤S3。 Next, the processing proceeds to step S3. 步骤S3相当于移动工序,是使液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S3 corresponds to a shift step, the droplet discharge head is moved to the place of the step opposite to the weight measurement apparatus. 接着,移至步骤S4。 Next, the processing proceeds to step S4. 步骤S4相当于测量用喷出工序,是从喷嘴向重量测量装置的接受器皿进行规定次数的喷出的工序。 Step S4 corresponds to the step of measuring the discharge, the step is discharged from the nozzle to a predetermined number of times receiving vessel weight measuring apparatus. 接下来移至步骤S5。 Subsequently to step S5. 步骤S5 相当于测量工序,计量重量测量装置的接受器皿的重量。 Step S5 corresponds to the measurement step, measuring the weight of the vessel to accept the weight measurement apparatus. 然后,是运算每一次喷出的喷出量的工序。 Then, every time the discharge amount calculating step discharged. 由步骤S2〜步骤S5的步骤构成步骤S21的第一测量工序。 Step S2~ constituted by a first measuring step S5 process of Step S21. 接着,移至步骤S6。 Next, the processing proceeds to step S6.

[0174] 步骤S6相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S5中测出的喷出量和作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否比规定值小的工序。 [0174] Step S6 is determined corresponding to the discharge amount has reached the target discharge amount of the step, the discharge amount of the step S5 and the measured discharge amount adjustment target as the target, and determines a target discharge amount the difference between the discharge amount of the step is smaller than a predetermined value. 在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S7。 When the difference between the discharge amount and the discharge amount of the target is larger than a predetermined value (when NO), the process proceeds to step S7. 在步骤S6中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S8。 In step S6, the difference between the discharge amount and the discharge amount of the target is smaller than a predetermined value (a time), the process proceeds to step S8. 步骤S7相当于第一调整工序,对从液滴喷出头喷出的喷出量进行调整的工序。 Step S7 corresponds to the first adjusting step, the amount of discharge from the droplet discharge head discharging the step of adjusting. 接着移至步骤S4。 Subsequently to step S4.

[0175] 步骤S8相当于判断是否对调整预定的喷头一起进行调整的工序,是在步骤Sl中设定为进行调整的液滴喷出头中判断是否一起进行了调整的工序。 [0175] Step S8 is equivalent to determining whether a predetermined adjustment of the nozzle with adjusting step is set to adjust the droplet ejection head is determined whether the adjustment step together in step Sl. 在调整的预定液滴喷出头中,存在未调整喷出量的液滴喷出头时(否的时候),移至步骤S3。 Adjustment of a predetermined droplet discharge heads, there is not adjusted when the droplet discharge quantity discharge head (when NO), the process proceeds to step S3. 在步骤S8中,对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S9。 In step S8, when the entire amount of the droplet discharge head discharging the adjusted predetermined droplet discharge head is adjusted (a time), the process proceeds to step S9. 由步骤S2〜步骤S8的步骤构成步骤S22的第一喷出量调整工序。 The discharge amount of the first step is constituted by step S8, step S22 step S2~ adjusting step.

[0176] 步骤S9相当于移动工序,是使液滴喷出头从与第二冲洗单元及重量测量装置对置的场所向与第一冲洗单元对置的场所移动的工序。 [0176] Step S9 corresponds to the step movement, a droplet discharge head unit and a rinsing step and a second weight measuring means for moving the first place to the flush unit facing opposite from a venue. 接着,移至步骤S10。 Next, the processing proceeds to step S10. 步骤SlO相当于喷出前待机工序,使对液滴喷出头进行暖机驱动的工序。 Step SlO corresponds the standby step before discharging the droplet discharge head is driven warming step. 接着移至步骤S11。 Subsequently to step S11. 步骤Sll相当于移动工序,是将液滴喷出头移动到与重量测量装置对置的场所的工序。 Step Sll is equivalent to moving step, the droplet discharge head is moved to the place of the step opposite to the weight measurement apparatus. 接下来移至步骤S12。 Next moves to step S12. 步骤S12相当于测量用喷出工序,是从喷嘴向重量测量装置的接受器皿进行规定次数的喷出的工序。 Step S12 corresponds to the step of measuring the discharge, a predetermined number of times from the nozzle to the receiving vessel by weight measuring means in the discharge process. 接着移至步骤S13。 Subsequently to step S13. 步骤S13相当于测量工序,计量重量测量装置的接受器皿的重量。 Step S13 corresponds to the step of measuring, measuring the weight of the vessel to accept the weight measuring apparatus. 然后,是运算每次喷出的喷出量。 Then, the discharge amount per discharge operation of. 由步骤SlO〜步骤S13的步骤构成步骤S23的第二测量工序。 Step S13 is a step SlO~ step constituting a second measuring step of step S23. 接着,移至步骤S14。 Next, the processing proceeds to step S14.

[0177] 步骤S14相当于判断喷出量是否达到目标喷出量的工序,是对步骤S13中测出的喷出量和作为所调整的目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。 [0177] Step S14 corresponds to the amount of discharge is determined whether the target discharge amount of the step, the target discharge amount is measured in step S13 and the discharge amount of the adjusted target as compared with the discharge amount determination the difference between the discharge amount of the target value is smaller than a predetermined step. 在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S15。 When the difference between the discharge amount and the discharge amount of the target is larger than a predetermined value (when NO), the process proceeds to step S15. 在步骤S14中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S16。 In step S14, the difference between the discharge amount and the discharge amount of the target is smaller than a predetermined value (a time), the process proceeds to step S16. 步骤S15相当于第二调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。 Step S15 corresponds to the second adjustment step is a step of discharging the amount discharged from the droplet discharge head adjusting. 接着,移至步骤S12。 Next, the processing proceeds to step S12.

[0178] 步骤S16相当于判断是否对调整预定的喷头一起进行调整的工序,是判断步骤Sl 中设定为调整的液滴喷出头中是否一起进行调整的工序。 [0178] Step S16 corresponds to the step of determining whether adjustment for adjusting a predetermined head together, is determined in step Sl is set to adjust the droplet ejection head adjusting step whether or together. 在所调整的预定液滴喷出头中, 存在未调整喷出量的液滴喷出头时(否的时候),移至步骤S11。 Adjusted in a predetermined droplet ejection head, there is not adjusted when the droplet discharge quantity discharge head (when NO), the process proceeds to step S11. 在步骤S16中,对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S17。 In step S16, the entire amount of the discharged liquid droplet ejection head of the droplet ejection head adjusted in a predetermined adjusted (a time), the process proceeds to step S17. 由步骤SlO〜步骤S16的步骤构成步骤S24的第二喷出量调整工序。 An amount of a second discharge step of step SlO~ step S16 step S24 constitute an adjustment step.

[0179] 步骤S17相当于涂覆工序,是向基板喷出并涂覆液滴的工序。 [0179] Step S17 corresponds to the step of coating, the substrate is discharged to the coating step and the droplets. 如上所述,结束向基板喷出并涂覆功能液的制造工序。 As described above, the discharge end of the manufacturing process and the functional liquid coating to the substrate.

[0180] 接着,利用图5〜图9,对与图4所示的步骤对应,精度优良地调整从液滴喷出头喷出的喷出量,在工件上进行涂覆的制造方法进行详细说明。 [0180] Next, using FIG -5 to FIG. 9, step shown in FIG. 4 corresponds with good accuracy adjustment amount discharged from the droplet discharge head discharged, a method of manufacturing a coating on a workpiece in detail instructions.

[0181] 图5是与步骤Sl对应的图,是用于说明对液滴喷出头的喷出量进行调整的顺序进行说明的图。 [0181] FIG. 5 is a step corresponding to FIG Sl is a view for explaining the amount of discharged liquid droplet ejection head will be sequentially adjusted. FIG. 然后,如图5(a)所示,滑架12由第一滑架1¾〜第六滑架12f等六个滑架构成。 Then, as shown in FIG 5 (a), the carriage 12 by the first carriage 1¾~ six sixth carriage 12f into the slide. 然后,第一滑架1¾具备第一喷头列71及第二喷头列72。 Then, the first carriage 1¾ head includes a first row 71 and second row 72 head. 然后,第一喷头列71及第二喷头列72是各3个液滴喷出头14相对于Y方向倾斜排列配置而成。 Then, the first head and the second nozzle row 71 of each column 72 is a three droplet discharge head 14 is inclined with respect to the Y-direction are arranged together.

[0182] 同样,第二滑架12b具备第三喷头列73及第四喷头列74,第三滑架12c具备第五喷头列75及第六喷头列76。 [0182] Similarly, the second carriage 12b includes a third head and the fourth head row 73 column 74, a third carriage 12c is provided with a fifth and a sixth nozzle head row 75 column 76. 然后,第四滑架12d具备第七喷头列77及第八喷头列78,第五滑架1¾具备第九喷头列79及第十喷头列80。 Then, a fourth carriage 12d includes a seventh and eighth nozzle head row 77 column 78, a fifth 1¾ carriage 79 is provided with a ninth and a tenth head row 80 column nozzle. 同样,第六滑架12f具备第十一喷头列81及第十二喷头列82。 Similarly, the sixth carriage 12f includes the eleventh and twelfth nozzle head row 81 column 82. 然后,第三喷头列73〜第十二喷头列82与第一喷头列71同样,是各3个液滴喷出头14相对于Y方向倾斜排列配置而成。 Then, the third head row 73~ twelfth head row 82 column 71 similarly to the first head, a droplet discharge heads each of three 14 inclined with respect to the Y-direction are arranged together. 该第一喷头列71〜第十二喷头列82各自成为液滴喷头列。 71~ twelfth row of the first head each head row 82 column nozzle into droplets.

[0183] 在步骤S22的第一喷出量调整工序中,将滑架12分为3组进行调整。 [0183] In a first step S22, the discharge amount adjusting step, the carriage 12 is adjusted into three groups. 第一,组合第一滑架1¾与第二滑架12b后设定为第一组83,第二,组合第三滑架12c与第四滑架12d 后设定为第二组84。 First, the combination of the first carriage and the second carriage 12b 1¾ set to the first group 83, a second, a third combination of the carriage 12c and the fourth carriage 84 is set to the second set 12d. 然后,第三,组合第五滑架1¾与第六滑架12f后设定为第三组85。 Then, the third, the combination of the sixth and fifth carriage 1¾ carriage 12f is set to a third set 85.

[0184] 在第一组83中,调整第一喷头列71〜第三喷头列73中的液滴喷出头14的喷出量。 [0184] In the first group 83, the adjustment of the first head of the column 71~ third droplet 73 discharged from the discharge amount of the nozzle row 14 of the head. 然后,在第二组84中,调整第六喷头列76及第七喷头列77中的液滴喷出头14的喷出量。 Then, in a second group 84, the adjusting head row 76 and the sixth row seventh head 77 of the droplet discharge head 14 of the discharge amount. 在第三组85中,调整第十喷头列80〜第十二喷头列82中的液滴喷出头14的喷出量。 In a third group 85, adjusting the tenth column head 82 80~ twelfth droplet discharge head row 14 of the discharge amount of the head.

[0185] 图5(b)是用于说明步骤S24的第二喷出量调整工序中的调整液滴喷出头的喷出量的顺序的图。 [0185] FIG. 5 (b) are diagrams for explaining a second adjustment of the discharge amount adjusting step S24 of the droplet ejection step in the sequence of FIG discharge amount of the head. 如图5(b)所示,在步骤S24的第二喷出量调整工序中,将滑架12分为2组进行调整。 FIG. 5 (b), in the second discharge amount adjusting step of step S24, the carriage 12 is adjusted into 2 groups. 第一,组合第二滑架12b与第三滑架12c后设定为第四组86,第二,组合第四滑架12d与第五滑架1¾后设定为第五组87。 First, the combination of the second carriage 12b 12c is set after the third carriage 86 to the fourth group, the second, the fourth carriage a combination of the fifth carriage 12d is set to a fifth set 87 after 1¾.

[0186] 在第四组86中,调整第四喷头列74及第五喷头列75中的液滴喷出头14的喷出量。 [0186] In a fourth group 86, the fourth adjustment head 74 in the droplet 75 and the fifth nozzle array discharging head 14 of the discharge amount. 然后,在第五组87中,调整第八喷头列78及第九喷头列79中的液滴喷出头14的喷出量。 Then, in the fifth group 87, to adjust the head row 78 and the eighth head row 79 in the ninth droplet discharge head 14 discharge amount.

[0187] 在以上的设定中,通过进行步骤S22及步骤S24,从而可以测量第一喷头列71〜第十二喷头列82的全部喷头列中的液滴喷出头14的喷出量。 [0187] In the above setting, by performing step S22 and step S24, the first head can be measured 71~ twelfth column head row 82 column head all the droplet in the discharge amount of the discharge head 14.

[0188] 图6(a)是与步骤S2对应的图。 [0188] FIG. 6 (a) is corresponding to step S2 in FIG. 如图6(a)所示,将第一滑架12a〜第六滑架12f 移动到与第一冲洗单元17对置的场所。 FIG 6 (a), the first carriage 12a~ 12f sixth carriage is moved to the flushing unit 17 opposing the first place. 然后,通过将非喷出驱动波形90输入到第一喷头列71〜第十二喷头列82的液滴喷出头14,从而将压电元件43驱动到从第一喷头列71〜 第十二喷头列82的液滴喷出头14不喷出液滴的程度。 Then, the piezoelectric element 43 so as to drive the first head 71~ twelfth column by the non-ejection driving waveform is inputted to the first head 90 71~ twelfth column head row 82 of the droplet ejection head 14, the head row droplet ejection head 82 does not eject liquid droplets 14 degrees. 然后,通过驱动压电元件43,从而进行使液滴喷出头14暖机的暖机驱动。 Then, by driving the piezoelectric element 43 so as to perform the droplet ejection head 14 driven warm-warm. 然后,第一喷头列71〜第十二喷头列82的液滴喷出头14由于被加热,故液滴喷出头14的温度上升。 Then, the first head 71~ twelfth column head row 82 because of the droplet discharge head 14 is heated, so that the temperature of the droplet discharge head 14 is increased. 另外,待机的液滴喷出头14以规定的间隔进行将液滴44喷出到第一冲洗单元17的冲洗,从而可以防止喷嘴31干燥。 Further, the droplet discharge head 14 on standby at a predetermined interval to the first droplet 44 ejection flushing flushing unit 17, the nozzle 31 can be prevented from drying.

[0189] 图6(b)是与步骤S3对应的图。 [0189] FIG. 6 (b) is corresponding to step S3 in FIG. 如图6(b)所示,将第一滑架1¾及第二滑架12b 移动到与重量测量装置21对置的场所。 FIG 6 (b), the first carriage and the second carriage 12b 1¾ moved to place the weight measuring apparatus 21 pairs of opposing. 然后第一喷头列71〜第四喷头列74的液滴喷出头14位于与重量测量装置21对置的场所。 Then 71~ first head row 74 a fourth droplet ejection head column head 14 is located opposite to the spaces 21 pairs weight measuring device. 此时,第三滑架12c〜第六滑架12f所搭载的第五喷头列75〜第十二喷头列82的液滴喷出头14 一边在与第一冲洗单元17对置的场所待机,一边进行暖机驱动与冲洗。 At this time, the third carriage 12c~ sixth carriage 12f fifth head mounted on the head row twelfth column 75~ 82 places standby droplet ejection head 14 with the first side facing the flushing unit 17, while warming up and drive flush.

[0190] 图6(c)〜图7(c)是与步骤S4对应的图。 [0190] FIG. 6 (c) ~ FIG. 7 (c) is a step S4 corresponding to FIG. 如图6 (c)所示,通过向第一喷头列71〜 第四喷头列74的液滴喷出头14输入喷出驱动波形91,从而从喷嘴31向重量测量装置21 喷出液滴44。 FIG 6 (c), by the first column to the fourth head column head 71~ 74 droplet ejection head 14 the ejection drive waveform input 91, thereby discharging the droplet 21 from the weight measuring device 44 of the nozzle 31 .

[0191] 图7(a)及图7(b)是表示液滴喷出头的驱动波形的时间图。 [0191] FIG. 7 (a) and FIG. 7 (b) is a timing chart showing driving waveforms of the discharge head of the droplet. 图7 (a)是从液滴喷出头14连续喷出液滴44时的一例,显示喷头驱动电路36驱动压电元件43的3个喷出驱动波形91。 FIG. 7 (a) from the droplet discharge head 14 is continuously discharged droplets example 44, the head driving circuit 36 ​​drives the display piezoelectric element 3 of the ejection drive waveform 9143. 图中的横轴表示时间92的经过,纵轴表示驱动电压93的变化。 FIG 92 is horizontal axis represents time elapsed, and the vertical axis represents the change in the driving voltage of 93. 喷出驱动波形91形成为大致梯形的波形形状,作为喷出时的驱动电压的峰值的喷出电压94及喷出脉冲宽度95被设定为规定的电压及时间。 Ejection drive waveform 91 is formed as a substantially trapezoidal wave shape as the voltage peak ejection driving voltage and the discharge time of the discharge pulse width 94 is set to a voltage 95 and the predetermined time. 然后,作为喷出驱动波形91的周期的喷出波形周期96也以规定的时间间隔形成。 Then, as a discharge cycle of the drive waveform of the discharge waveform 91 cycles 96 also form a predetermined time interval. 喷出电压94、喷出脉冲宽度95及喷出波形周期96需要根据压电元件43或振动板42的动特性来设定。 94 the discharge voltage, discharge pulse width 95 and the discharge waveform cycle 96 needs to be set in accordance with dynamic characteristics of the piezoelectric element 43, or the vibration plate 42. 因此,希望实施实际喷出的预备试验,导出最佳的喷出条件。 Accordingly, it is desirable embodiment actually sprayed preliminary experiment, the derived optimal ejection conditions.

[0192] 图7(b)表示3个非喷出驱动波形90,即通过以从液滴喷出头14不喷出液滴44的方式进行驱动,从而进行暖机驱动时的一例。 [0192] FIG. 7 (b) represents three non-ejection driving waveform 90, i.e. in a manner driven by a droplet discharge head 14 is not discharged from the droplet 44, thereby performing warm-up drive when the one case. 非喷出驱动波形90形成为大致梯形的波形形状,作为非喷出时的驱动电压的峰值的非喷出电压97在不喷出液滴44的范围内使压电元件43大幅度振动为佳。 The non-ejection drive waveform 90 is formed in a substantially trapezoidal wave shape as the non-ejection driving voltage peak voltage during a non-discharge 97 without discharging the droplets within the range of the piezoelectric element 44 the vibration preferably substantially 43 . 在本实施方式中,例如,非喷出电压97采用喷出电压94的大约三分之一左右的电压。 In the present embodiment, for example, non-discharging voltages using a voltage of about 97 to 94 about a third discharge voltage. 作为非喷出时的脉冲宽度的非喷出脉冲宽度98采用与喷出脉冲宽度95相同的值。 As a non-ejection pulse width of the pulse width of non-discharge of the discharge 98 with the same value of the pulse width 95. 然后,作为非喷出驱动波形90的波形周期的非喷出波形周期99设定为压电元件43振动的间隔。 Then, as the non-ejection driving waveforms of the non-ejection period 90 of waveform 99 is set periodic intervals vibration of the piezoelectric element 43. 非喷出波形周期99在本实施方式中例如采用与喷出波形周期96同样的时间间隔。 The non-ejection waveform cycle 99 in the present embodiment example, using the same time interval of 96 discharge waveform cycles.

[0193] 图7(c)是表示连续驱动液滴喷出头时的驱动喷出次数和喷头温度的关系的曲线图。 [0193] FIG. 7 (c) is a graph showing the relationship of the discharge driving frequency and the head temperature during continuous driving droplet discharge head. 在图7(c)中,横轴表示喷出液滴44的次数、即喷出次数100的经过,纵轴表示喷头温度101的变化。 In FIG. 7 (c), the horizontal axis represents the number of droplets 44 discharged, i.e. discharge 100 of the number of passes, the vertical axis represents the head temperature change of 101. 在外喷头温度曲线102及内喷头温度曲线103表示连续驱动压电元件43 并喷出液滴44时的喷头温度101相对于喷出次数100的经过的推移。 An outer nozzle and an inner nozzle temperature curve 102 represents the temperature curve 103 to drive the piezoelectric element 43 and the continuous discharge nozzle 44 when the temperature drops to 101 after 100 times of the discharge passage. 外喷头温度曲线102 是图6(c)中的第一喷头列71及第四喷头列74的液滴喷出头14的温度,内喷头温度曲线103是第二喷头列72及第三喷头列73的液滴喷出头14的温度。 An outer head 102 is a temperature profile of FIG. 6 (c) of the first head 71, and the fourth column of the head row 74 of the droplet discharge head temperature of 14, temperature profile inside the nozzle head 103 is a second row 72, and the third nozzle row 73 droplet ejection head 14 temperature.

[0194] 开始喷出时的喷出开始点10¾中的外喷头温度曲线102伴随于喷出次数100的经过,喷头温度101上升。 [0194] outer nozzle discharge temperature 10¾ start point at the start of the discharge curve 102 accompanied with elapsed times 100 of the head 101 discharge temperature rises. 在温度上升区域102b的期间内,伴随喷出次数100的经过,喷头温度101上升。 During the temperature rise in the region 102b, with the number of ejections through 100, head temperature 101 rises.

[0195] 然后,移至即使喷出次数100经过喷头温度101也不会上升的温度平衡区域102c。 [0195] Then, even if the discharge frequency and move the head 100 through 101 does not increase the temperature of the temperature balancing area 102c. 在温度平衡区域102c内,成为液晶喷出头14释放出的热能与因喷出而产生的热能相等的平衡状态。 In a temperature balancing area 102c, the liquid crystal becomes the discharge head 14 and the thermal energy released is equal to the equilibrium state due to heat generated by the discharge. 若喷头温度101上升,则喷头温度101和包围液滴喷出头14周边的气体(以下称为周边气体)的温度差增大。 When the head temperature 101 rises, the temperature of the showerhead 101 and the temperature of the droplet discharge head 14 surrounding the periphery of the gas (hereinafter, referred to as the surrounding gas) difference increases. 喷头温度101与周边气体的温度之差越大,则从液滴喷出头14释放出的热能越增大。 The temperature of the showerhead 101 and the greater the difference between the temperature of the surrounding gas 14 from the heat released increases as droplet discharge head. 因此,喷头温度101不会上升,在某一喷头温度101处稳定。 Accordingly, the temperature of the nozzle 101 does not rise, the head 101 stable at a certain temperature. 将该温度设为平衡喷头温度102d。 The equilibrium temperature is the temperature of the nozzle 102d.

[0196] 同样,即使在内喷头温度曲线103中,在温度上升区域10¾的期间内,随着喷出次数100从喷出开始点103a开始增加,喷头温度101上升。 [0196] Similarly, even if the temperature profile in the inner head 103, during the temperature rise 10¾ region, with 100 discharge times increases from ejection start point 103a, the temperature of the head 101 rises. 然后,在温度平衡区域103c中, 喷头温度101在平衡喷头温度103d处稳定。 Then, the temperature balancing area 103c, the temperature of the showerhead nozzle 101 stable equilibrium at the temperature 103d.

[0197] 第二喷头列72及第三喷头列73的液滴喷出头14因为被第一喷头列71及第四喷头列74夹持,故难以向周边气体释放热量。 [0197] The second column 72 and the head 73 of the third droplet ejection head 14 as the head row is a first row head 71 and the head row 74 a fourth nip, it is difficult to release the heat to the surrounding gas. 因此,内喷头温度曲线103推移到比外喷头温度曲线102高的喷头温度101。 Thus, a high temperature profile within the nozzle passage 103 to the temperature profile of the head 102 than the outer head 101 temperature. 然后,平衡喷头温度103d在高于平衡喷头温度102d的温度处稳定。 Then, the temperature of the head 103d equilibrium stable equilibrium head temperature above a temperature at 102d.

[0198] 在步骤S5中,测量第一喷头列71〜第三喷头列73的液滴喷出头14中的喷出量。 The discharge amount of 14 [0198] In step S5, the first head column measuring head row 73 71~ third droplet ejection head. 第一喷头列71在步骤S17中位于外侧的列进行喷出,因此在步骤S4中,以与步骤S17大致相同的配置条件进行喷出。 A first nozzle row 71 is located outside the column in step S17 for discharging, so in step S4, disposed at substantially the same conditions of step S17 and discharge. 同样,第二喷头列72及第三喷头列73在步骤S17中位于内侧的列,被第一喷头列71及第四喷头列74夹持并进行喷出。 Similarly, the second head and the third head row 72 column 73 is located inside the column in step S17, the fourth column of the first head 71 and the head row 74 and the discharge nip. 也就是说,第一喷头列71〜第三喷头列73的液滴喷出头14在步骤S4中,以与步骤S17大致相同的配置条件进行喷出。 That is, the first head of the third column of the head row 73 71~ droplet ejection head 14 in step S4 to S17 arranged substantially the same conditions as the ejection step. 另一方面,第四喷头列74在步骤S17中因为位于内侧的列后进行喷出,故在步骤S4中,以不同于步骤S17的配置条件进行喷出。 On the other hand, because the fourth head 74 column after the column is located inside the discharge in step S17, it is in step S4, the layout condition different from the step S17 will be discharged. 然后,在步骤S4与步骤S17中,测量以大致相同的配置条件喷出的第一喷头列71〜第三喷头列73的液滴喷出头14中的喷出量。 Then, in step S4 and step S17, a first measurement head configuration substantially the same conditions 71~ third droplet ejection head of the column 73 is a column discharge in the discharge amount of 14.

[0199] 喷出量的测量是以所喷出的次数除以步骤S4中喷出的液滴44的重量后进行计算的。 [0199] Measurement of discharge amount is calculated by weight of the discharged liquid droplets 44 divided by the number of times in step S4 discharged. 进行喷出的次数只要是对每次的喷出量的偏差进行平均化后能计量的次数即可,例如在本实施方式中,采用100次。 As long as the number of times the discharge frequency deviation to each of the discharge amount can be obtained by averaging measured, for example, in the present embodiment, the use of 100 times. 然后,按照每个液滴喷出头14测量喷出量。 Then, for each of the droplet discharge head 14 discharge amount measurement.

[0200] 图7(d)是对应于步骤S7的图,是表示驱动液滴喷出头时的驱动电压与喷出量的关系的曲线图。 [0200] FIG. 7 (d) corresponds to step S7 in FIG, is a graph showing the relationship between the driving voltage and the discharge amount when a droplet ejection head drive. 在图7(d)中,横轴表示驱动电压93,右侧为比左侧高的电压。 In FIG. 7 (d), the horizontal axis represents the drive voltage 93, the left side than the right side high voltage. 然后,纵轴表示液滴喷出头喷出的喷出量104,上侧表示比下侧大的量。 Then, the vertical axis represents liquid droplet discharge head discharging amount discharged 104, the upper side represents an amount larger than the lower side. 然后,电压喷出量曲线105表示在改变驱动电压93时喷出量104变化的关系。 Then, the voltage curve 105 represents the relationship between the discharge amount of the discharge amount at the time of changing the drive voltage 104 93 changes.

[0201] 如电压喷出量曲线105所示,若增大驱动电压93,则喷出量104增大。 [0201] As shown in curve 105 the amount of discharge voltage, when the driving voltage 93 is increased, the discharge amount is increased 104. 并且,在使驱动电压93变化时,将喷出量104变化的电压范围作为驱动电压范围105a,以喷出电压94 进入该范围的方式设计液滴喷出头14。 Further, the drive voltage 93 changes, the discharge amount of the change in the voltage range of 104 as a driving voltage ranges 105a, so as to discharge the voltage range of 94 to enter the droplet discharge head 14 design. 该电压喷出量曲线105是一例,通过使喷头温度101 变动,从而电压喷出量曲线105也变动。 The amount of discharge voltage curve 105 is an example, the temperature change by making the nozzle 101, so that the voltage curve 105 also changes the amount of discharge.

[0202] 在步骤S7中,对被设为目标的喷出量104、即目标喷出量106和步骤S5中测出的喷出量104进行比较。 [0202] In step S7, the target is set to 104 the amount of discharge, i.e., the target 106 and the discharge amount measured in step S5 is compared 104 discharge amount. 然后,计算相当于目标喷出量106与所测出的喷出量104之差的驱动电压93的差。 Then, it calculates the driving voltage corresponding to the measured discharge amount difference between a target discharge quantity of 106 104 difference 93. 然后,在所测出的喷出量104比目标喷出量106小的时候,将喷出电压94提 Then, the measured discharge amount is smaller than 104 106, when the target discharge amount, the discharge voltage 94 mentioning

24高相当于驱动电压93的差的电压量。 24 a high voltage corresponding to the difference between the amount of driving voltage 93. 另一方面,在所测出的喷出量104比目标喷出量106 大时,将喷出电压94降低相当于驱动电压93的差的电压量。 On the other hand, in the discharge amount measured 104 than the target discharge amount of 106 large, the discharge voltage is 94 to reduce the voltage difference corresponds to the amount of driving voltage 93.

[0203] 然后,通过反复进行步骤S4〜步骤S7,从而使得喷出量104接近目标喷出量106。 [0203] Then, by repeating the step S4~ step S7, so that the discharge amount close to the target discharge amount 104 106. 在步骤S6中,在目标喷出量106与所测出的喷出量104之差与规定值相比变小时,结束第一喷头列71〜第四喷头列74的液滴喷出头14中的喷出量104的调整。 In step S6, the target discharge amount of 106 compared to the amount of the difference between the measured discharge with a predetermined value 104 becomes small, the first head end of the head row 74 column 71~ fourth droplet ejection head 14 in adjustment of the discharge amount of 104.

[0204] 图8 (a)及图8(b)是对应于步骤S22的图。 [0204] FIG. 8 (a) and FIG. 8 (b) corresponds to step S22 of FIG. 如图8(a)所示,在步骤S3中,将第一滑架1¾及第二滑架12b从与重量测量装置21对置的场所开始向与第二冲洗单元18对置的场所移动。 FIG place 8 (a), in step S3, the first carriage and the second carriage 12b 1¾ from the weight measuring device 21 begins to move toward the opposing spaces 18 of the second unit facing the flushing. 然后,将第三滑架12c及第四滑架12d从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。 Then, the third and fourth carriage 12c 12d from the carriage unit 17 places the first rinsing opposed to the weight measuring apparatus 21 pairs of opposed moving properties. 第五滑架1¾及第六滑架12f在与第一冲洗单元17 对置的场所待机。 The fifth and sixth carriage 1¾ carriage 12f in the first place the standby unit 17 facing the flushing.

[0205] 在步骤S4中,向第一喷头列71〜第四喷头列74及第九喷头列79〜第十二喷头列82的液滴喷出头14输入非喷出驱动波形90后进行暖机驱动。 [0205] In step S4, a fourth column head row 71~ 74 79~ twelfth columns and the ninth nozzle head row 82 of the droplet discharge head 14 is input to the non-ejection driving of the head of the first waveform 90 Warm machine drive. 然后,从第一喷头列71〜 第四喷头列74的液滴喷出头14向第二冲洗单元18喷出液滴44后,进行冲洗动作。 Then, the column head a first droplet from the head row 74 71~ fourth ejection head 14 to eject the second droplet 18 after the flushing unit 44 performs the flushing operation. 同样, 从第九喷头列79〜第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44后, 进行冲洗动作。 Similarly, the ninth column from the twelfth nozzle head row 79~ droplet ejection head 82 ejects liquid droplets 44 to 14 after first rinsing unit 17 performs the flushing operation.

[0206] 向第五喷头列75〜第八喷头列78的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出规定次数份的液滴44。 [0206] The eighth column head row 75~ 78 droplet ejection head 14 is input to the ejection drive waveform fifth head 91, the weight measuring device 21 to discharge a predetermined number of droplets 44 parts. 然后,在步骤S5中,测量所喷出的液滴44的重量。 Then, in step S5, the measured weight of discharged droplets 44. 此时,测量从被第五喷头列75与第八喷头列78夹持的第六喷头列76及第七喷头列77的液滴喷出头14喷出的液滴44的重量。 In this case, the droplet 76 and the seventh column measuring head row 77 of the droplet discharge head weight 44 14 ejected from the sixth row fifth head is the head 75 of the eighth row of the head holder 78.

[0207] 然后,以所喷出的次数进行除法运算,计算喷出量。 [0207] Then, the number of the division operation is discharged, the discharge amount is calculated. 接着,在步骤S7中进行调整。 Next, the adjustment in step S7. 反复进行步骤S4〜步骤S7,在目标喷出量106与所测出的喷出量104之差小于规定值时, 结束第六喷头列76及第七喷头列77的液滴喷出头14中的喷出量的调整。 Repeating step S4~ step S7, the target discharge amount of the discharge 106 and the measured difference is less than a predetermined value is 104, the head end of the sixth and seventh columns of the 76 column nozzle 77 of the droplet ejection head 14 in adjustment of the amount of discharge.

[0208] 接着,如图8(b)所示,在步骤S3中,将第三滑架12c及第四滑架12d从与重量测量装置21对置的场所向与第二冲洗单元18对置的场所移动。 [0208] Next, as shown in FIG 8 (b), in step S3, the third and fourth carriage 12c 12d of the carriage 21 from a place opposed to the second weight measuring device and the flushing unit 18 pairs of opposed the move places. 然后,将第五滑架1¾及第六滑架12f从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。 Then, the fifth and sixth carriage 1¾ 12f from the carriage unit 17 places the first rinsing opposed to measure the weight of the spaces 21 pairs of opposed mobile device. 第一滑架1¾及第二滑架12b在与第二冲洗单元18对置的场所继续待机。 1¾ first carriage and the second carriage 12b with the second flushing unit 18 continues to stand opposite places.

[0209] 在步骤S4中,向第一喷头列71〜第八喷头列78的液滴喷出头14输入非喷出驱动波形90,进行暖机驱动。 [0209] In step S4, the first column to the column head 71~ eighth head 78 of the droplet discharge head 14 enter the non-ejection driving waveform 90, to warm up the drive. 然后,定期地从第一喷头列71〜第八喷头列78的液滴喷出头14向第二冲洗单元18喷出液滴44,进行冲洗动作。 Then, periodically the column from the first column head 71~ eighth head 78 of the droplet ejection head 14 to eject droplets 44 second rinsing unit 18 performs the flushing operation.

[0210] 向第九喷头列79〜第十二喷头列82的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出液滴44规定次数份。 [0210] The ninth column to the twelfth nozzle head row 79~ 82 droplet ejection head 14 the ejection drive waveform input 91, the weight measuring device 21 a predetermined number of parts 44 discharge droplets. 然后,在步骤S5中,测量所喷出的液滴44的重量。 Then, in step S5, the measured weight of discharged droplets 44. 此时,测量从被第九喷头列79与第十二喷头列82夹持的第十喷头列80及第十一喷头列81的液滴喷出头14喷出的液滴44的重量。 In this case, the droplet 80 and the eleventh column measuring head row 81 of the droplet discharge head weight 44 14 ejected from the spray head is a ninth tenth and twelfth nozzle head row 79 column 82 sandwiched. 进而,测量从右端的第十二喷头列82的液滴喷出头14喷出的液滴44的重量。 Further, the weight column measuring head 14 ejecting the droplets 82 of liquid droplets 44 discharged from the right end of the twelfth head.

[0211] 然后,以所喷出的次数进行除法运算,计算喷出量。 [0211] Then, the number of the division operation is discharged, the discharge amount is calculated. 接着,在步骤S7中进行调整。 Next, the adjustment in step S7. 反复进行步骤S4〜步骤S7,在目标喷出量106与所测出的喷出量104之差小于规定值时, 结束第十喷头列80〜第十二喷头列82的液滴喷出头14中的喷出量的调整。 Repeating step S4~ step S7, the target discharge amount of the discharge 106 and the measured difference is less than a predetermined value is 104, the head end of the tenth column 80~ twelfth head row 82 droplet ejection head 14 the adjustment of the discharge amount.

[0212] 图8(c)是对应于步骤S9及步骤SlO的图。 [0212] FIG. 8 (c) is a step corresponding to step S9 and SlO in FIG. 如图8(c)所示,将第五滑架1¾及第六滑架12f从与重量测量装置21对置的场所向与第一冲洗单元17对置的场所移动。 FIG place 8 (c), the fifth and sixth carriage 1¾ carriage 12f from the weight measuring device 21 is moved in the opposite first rinsing unit 17 places the opposite. 然后,将第一滑架1¾〜第四滑架12d从与第二冲洗单元18对置的场所向与第一冲洗单元17对置的场所移动。 Then, the first carriage 1¾~ fourth carriage 12d moves from the second place to the flushing unit 18 opposed to the first rinsing unit 17 places the opposite.

[0213] 接着,在步骤SlO中,向第一喷头列71〜第十二喷头列82的液滴喷出头14输入非喷出驱动波形90,进行暖机驱动。 [0213] Next, in step SlO, the column head to the first head 71~ twelfth column droplet ejection head 14 input 82 of the non-ejection driving waveform 90, to warm up the drive. 然后,定期地从第一喷头列71〜第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44,进行冲洗动作。 Then, periodically the column from the first column head twelfth head 71~ droplet ejection head 14 82 44 droplet discharge unit 17 to the first rinsing, rinsing operation.

[0214] 图9(a)及图9(b)是对应于步骤SM的图。 [0214] FIG. 9 (a) and FIG. 9 (b) is the step corresponding to FIG SM. 如图9(a)所示,在步骤Sll中,将第一滑架1¾从与第一冲洗单元17对置的场所开始向与第二冲洗单元18对置的场所移动。 FIG 9 (a), in step Sll, the first carriage 17 and starts to move from 1¾ place opposite to the first rinsing means and the second rinsing means 18 places opposite. 然后,将第二滑架12b及第三滑架12c从与第一冲洗单元17对置的场所向与重量测量装置21 对置的场所移动。 Then, the second carriage and the third carriage 12b and 12c from the first rinsing unit 17 places opposite to the weight measuring spaces 21 pairs of opposed mobile device. 第四滑架12d〜第六滑架12f在与第一冲洗单元17对置的场所待机。 The fourth carriage 12d~ sixth carriage 12f in the first place the standby unit 17 facing the flushing.

[0215] 在步骤S12中,向第一喷头列71、第二喷头列72及第七喷头列77〜第十二喷头列82的液滴喷出头14输入非喷出驱动波形90后进行暖机驱动。 [0215] In step S12, the column 71 to the first head, the second head 72 and the seventh column head row 82 77~ twelfth head row droplet ejection head 14 enter the non-ejection driving waveform warm up after 90 machine drive. 然后,定期地从第一喷头列71、第二喷头列72的液滴喷出头14向第二冲洗单元18喷出液滴44后,进行冲洗动作。 Then, periodically the column 71 from the first head, the second head 72 column droplet ejection head 14 to eject the second droplet 18 after the flushing unit 44 performs the flushing operation. 同样,定期地从第七喷头列77〜第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44后,进行冲洗动作。 Similarly, the seventh column from the head periodically twelfth head column 82 77~ droplet ejection head 14 to eject a first droplet 17 after the rinsing unit 44 performs the flushing operation.

[0216] 向第三喷头列73〜第六喷头列76的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出规定次数份的液滴44。 [0216] The sixth column 73~ head row 76 droplet ejection head 14 is input to the third drive waveform ejection head 91, the weight measuring apparatus 21 discharge a predetermined number of droplets 44 parts. 然后,在步骤S13中,测量所喷出的液滴44的重量。 Then, in step S13, the weight measurement of the liquid droplets 44. 此时,测量从被第三喷头列73与第六喷头列76夹持的第四喷头列74及第五喷头列75的液滴喷出头14喷出的液滴44的重量。 In this case, the droplet 74 and the fifth column measuring head row 75 wt droplet ejection head 44 ejected from the fourth nozzle 14 is 73 and the sixth column of the third head 76 sandwiched between the head row.

[0217] 然后,以所喷出的次数进行除法运算,计算喷出量。 [0217] Then, the number of the division operation is discharged, the discharge amount is calculated. 接着,在步骤S15中进行调整。 Next, in step S15 adjustment. 反复进行步骤S12〜步骤S15,在目标喷出量106与所测出的喷出量104之差小于规定值时,结束第四喷头列74及第五喷头列75的液滴喷出头14中的喷出量的调整。 Repeating step S12~ step S15, when the difference between the target 106 and the discharge amount of the measured discharge amount is less than a predetermined value 104, the end of the fourth droplet head row 74 and fifth row 75 of ejection nozzle head 14 in adjustment of the amount of discharge.

[0218] 接着,如图9 (b)所示,在步骤Sl 1中,将第二滑架12b及第三滑架12c从与重量测量装置21对置的场所向与第二冲洗单元18对置的场所移动。 Properties [0218] Next, FIG. 9 (b), in step Sl 1, the second carriage and the third carriage 12b 12c from the weight measuring device 21 opposite to the second rinsing unit 18 mobile home places. 然后,将第四滑架12d及第五滑架1¾从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。 Then, the fourth and fifth carriage 12d 1¾ from the carriage unit 17 places the first rinsing opposed to the weight measuring apparatus 21 pairs of opposed moving properties. 第一滑架1¾在与第二冲洗单元18对置的场所待机,第六滑架12f在与第一冲洗单元17对置的场所待机。 1¾ first carriage 18 in place flush unit and the second standby opposite, the sixth carriage 12f in the first place the standby unit 17 facing the flushing.

[0219] 在步骤S12中,向第一喷头列71〜第六喷头列76、第十一喷头列81及第十二喷头列82的液滴喷出头14输入非喷出驱动波形90,进行暖机驱动。 [0219] In step S12, the sixth column to the first head 71~ head row 76, the eleventh and the twelfth nozzle head row 81 column 82 of the droplet ejection head 14 enter the non-ejection driving waveform 90, for warm-up drive. 然后,定期地从第一喷头列71〜第六喷头列76的液滴喷出头14向第二冲洗单元18喷出液滴44,进行冲洗动作。 Then, periodically the sixth row from the first head 71~ head row 76 of droplets 14 discharged liquid droplet ejection head 44 to the second rinsing means 18 performs the flushing operation. 同样,定期地从第十一喷头列81及第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44后,进行冲洗动作。 Similarly, the head periodically eleventh column from the column head 81 and the droplet 82 twelfth ejection head 14 to eject a first droplet 17 after the rinsing unit 44 performs the flushing operation.

[0220] 向第七喷头列77〜第十喷头列80的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出液滴44规定次数份。 [0220] The seventh column to the nozzle head row 80 77~ tenth droplet discharge head 14 discharge driving input waveform 91, the weight measuring device 21 a predetermined number of parts 44 discharge droplets. 然后,在步骤S13中,测量所喷出的液滴44的重量。 Then, in step S13, the weight measurement of the liquid droplets 44. 此时,测量从被第七喷头列77与第十喷头列80夹持的第八喷头列78及第九喷头列79的液滴喷出头14喷出的液滴44的重量。 At this time, the eighth column from the measurement head the head row 77 is the seventh to the tenth columns 80 holding the head 78 of the head row and the ninth droplet ejection head 79 droplets 44 ejected by weight 14.

[0221] 然后,以所喷出的次数进行除法运算,计算喷出量。 [0221] Then, the number of the division operation is discharged, the discharge amount is calculated. 接着,在步骤S15中进行调整。 Next, in step S15 adjustment. 反复进行步骤S12〜步骤S15,在目标喷出量106与所测出的喷出量104之差小于规定值时,结束第八喷头列78及第九喷头列79的液滴喷出头14中的喷出量的调整。 Repeating step S12~ step S15, when the difference between the target 106 and the discharge amount of the measured discharge amount is less than a predetermined value 104, the head end of the eighth and ninth columns of the head 78 of the column 79 in the droplet discharge head 14 adjustment of the amount of discharge.

[0222] 通过以上工序,第二喷头列72〜第十一喷头列81的液滴喷出头14在被相邻的液滴喷出头14夹持的状态下,测量了喷出液滴44时的喷出量后,进行喷出量的调整。 Under [0222] Through the above steps, the second head of the eleventh column head row 81 72~ droplet discharge head 14 discharge gripper head 14 adjacent drops being measured in a state of the droplet discharge 44 after the discharge amount, the discharge amount for adjustment. 这成为与步骤S17中进行喷出时的液滴喷出头14的形态相同的形态。 This step S17 becomes a liquid droplet discharged from the discharge time of the same form of the head 14 form. 然后,第一喷头列71及第十二喷头列82的液滴喷出头14在未被液滴喷出头14夹持的状态下测量了喷出液滴44时的喷出量后,进行喷出量的调整。 Then, the first head 71 and the twelfth column head row measured discharge amount discharged liquid droplet 44 in a state of discharge head 14 is not in the droplet 14 gripped in the droplet ejection head 82, for adjusting the discharge amount. 这也成为与步骤S17中进行喷出时的液滴喷出头14的形态相同的形态。 It has also become the same morphology form of the droplet ejection head 14 when ejection is performed as in step S17. 也就是说,在与步骤S17中进行喷出时的液滴喷出头14的形态相同的形态下,进行喷出量的调整。 That is, in the same form at the time of discharging droplets in the discharge head 14 in step S17 of the form, for adjusting the amount of discharge.

[0223] 图9(c)是对应于步骤S17的图。 [0223] FIG. 9 (c) corresponds to step S17 of FIG. 如图9(c)所示,移动滑架12及台面4,以液滴喷出头14与基板7对置的方式移动液滴喷出头14与基板7。 FIG. 9 (c), the mobile carriage 12 and the table 4, a droplet ejection head 14 and the counter substrate 7 moves manner droplet discharge head 14 and the substrate 7. 接着,根据规定的描绘图案,喷出液滴44,并涂覆在基板7上。 Next, drawing a predetermined pattern by discharging droplets of 44, and coated on the substrate 7. 涂覆预定的描绘图案,结束步骤S17,结束向基板7喷出液滴并进行涂覆的制造工序。 Drawing a predetermined pattern is applied, the end of step S17, the end of the discharge droplets onto the substrate 7 and coating the manufacturing process.

[0224] 如上所述,根据本实施方式,具有以下效果。 [0224] As described above, according to the present embodiment has the following effects.

[0225] (1)根据本实施方式,将喷出量的测量分为步骤S21的第一测量工序和步骤S23的第二测量工序后进行测量。 [0225] (1) According to the present embodiment, the discharge amount of the measurement into a second measurement after the measurement of the first measurement process of Step S21 and step S23 step. 然后,在步骤S21中,测量从属于被其他液滴喷出头列夹持的状态下的液滴喷出头列的液滴喷出头14喷出时的喷出量。 Then, in step S21, the measured discharge amount is dependent on the liquid droplet discharge head discharging a column holding the state of other droplet ejection head of the droplet discharge head 14 column. 也就是说,测量从属于第二喷头列72、第三喷头列73、第六喷头列76、第七喷头列77、第十喷头列80、第十一喷头列81的液滴喷出头14喷出时的喷出量。 That is to say, belonging to the second measuring head row 72, the third nozzle row 73, nozzle row 76 the sixth, seventh head row 77, nozzle row 80 the tenth, eleventh column head a droplet ejection head 14 81 the discharge amount of discharge.

[0226] 然后,在步骤S23中,用其他液滴喷出头列夹持在步骤S21中未被其他液滴喷出头列夹持的液滴喷出头列,并喷出液状体后,测量喷出量。 [0226] Then, in step S23, the other droplet discharge head is not holding a column other droplet ejection head of the droplet ejection head column holding column in step S21, and the liquid discharge, measuring the amount of discharge. 然后,测量从属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14喷出时的喷出量。 Then, a column measuring head 74 belonging to the fourth, fifth head row 75, the eighth head row 78, the ninth nozzle array discharging amount of the droplet discharge head 14 discharge 79. 也就是说, 在步骤S21及步骤S23中,测量从属于被其他液滴喷出头列夹持的状态下的液滴喷出头列的液滴喷出头14喷出时的喷出量。 That is, in step S21 and step S23, the measured discharge amount is dependent on the liquid droplet discharge head discharging a column holding the state of other droplet ejection head of the droplet discharge head 14 column. 因此,第二喷头列72〜第—^一喷头列81的液滴喷出头14可以测量大致相同温度下的喷出量。 Accordingly, the second head of the column 72~ - ^ a head row 81 of the droplet discharge head 14 may measure the amount of discharged at substantially the same temperature. 结果,可以精度优良地测量喷出量。 As a result, the measurement accuracy can be excellently discharged amount.

[0227] (2)根据本实施方式,在步骤S2及步骤SlO的喷出前待机工序中,液滴喷出头通过进行暖机驱动,从而使得液滴喷出头14的温度上升。 [0227] (2) According to the present embodiment, the discharge step S2 and the step before the standby step SlO, the droplet ejection head driven by warm, so that the temperature of the droplet discharge head 14 is increased. 然后,测量液滴喷出头的温度高的状态下的喷出量。 Then, measurement of the amount of discharge of the droplet discharge head of a high temperature state. 在向基板7喷出液滴44时,液滴喷出头14喷出液滴44,因此液滴喷出头14的温度上升。 When the droplet 44 is ejected toward the substrate 7, the droplet ejection head 14 ejects liquid droplets 44, the temperature of the droplet discharge head 14 is increased. 也就是说,液滴喷出头14通过进行暖机驱动,从而可以测量与向基板7喷出液滴44时大致相同的温度下的喷出量。 That is, the droplet ejection head 14 driven by warm, so that the discharge amount can be measured with the discharge 44 at substantially the same temperature of the substrate 7 drops. 因此,可以精度优良地测量向基板7喷出液滴44时的喷出量。 Thus, the measurement accuracy can be excellently discharged droplet discharge amount of 44 7 to the substrate.

[0228] (3)根据本实施方式,暖机驱动到从液滴喷出头14的喷嘴31不喷出液滴44的程度为止。 [0228] (3) According to this embodiment, the warm-up drive 14 from the liquid droplet ejection nozzle head 31 is not discharged until the level of liquid droplets 44. 因此,因为液滴44不会被浪费地喷出,故可以成为节省资源的喷出量测量方法。 Accordingly, since the liquid droplets are not discharged wastefully 44, it can be a method of measuring the discharge amount of resource saving.

[0229] (4)根据本实施方式,在步骤S7的第一调整工序中对步骤S21的第一测量工序中测量的液滴喷出头14进行了调整后,在步骤S15的第二调整工序中对步骤S23的第二测量工序中测量的液滴喷出头14进行调整。 After [0229] (4) According to the present embodiment, the adjustment has been adjusted at step S7 a first step of measuring the first discharge head 14 in the measurement process of Step S21 droplets, in a second step of adjusting in step S15 a second ejecting head in the measurement step of step S23 measured droplet 14 is adjusted. 然后,根据步骤S21及步骤S23中精度优良地对喷出量进行测量的测量结果,在步骤S7及步骤S15中,调整喷出量。 Then, the discharge amount of the fine measurement result based on the accuracy of the step S21 and step S23, in step S7 and step S15, the adjustment of the discharge amount. 因此,在步骤S7及步骤S 15中,可以精度优良地调整喷出量。 Thus, at step 15, and step S7 S, can be adjusted with good accuracy the amount of discharge.

[0230] (5)根据本实施方式,具有步骤S22的第一喷出量调整工序与步骤SM的第二喷出量调整工序。 [0230] (5) According to the present embodiment, a first step S22, the discharge amount adjusting step and the second step SM discharge amount adjusting step. 并且,在步骤S22中,根据步骤S21的第一测量工序中测出的喷出量的测量结果,在步骤S7的第一调整工序中进行喷出量的调整。 Then, in step S22, the measurement result of the discharge amount of the first measurement step in step S21 is measured, a discharge amount adjusting step of adjusting a first step S7. 接着,通过反复进行步骤S21与步骤S7,从而使得喷出量接近目标喷出量。 Subsequently, by repeating the steps S21 to step S7, so that the discharge amount close to the target discharge amount. 因此,与仅进行一次步骤S7的方法相比,可以精度优良地调整喷出量。 Thus, compared with the method only once step S7, can be adjusted with good accuracy the amount of discharge.

[0231] 而且,即使在步骤S24中,由于同样地进行,故与仅进行一次步骤S15的第二调整工序的方法相比,可以精度优良地调整喷出量。 [0231] Further, even in step S24, since the same manner, as compared with a method of adjusting only the second step of step S15, the adjustment accuracy can be excellently discharged amount. 结果,可以成为能够精度优良地对喷出量进行调整的方法。 As a result, good accuracy can be possible to adjust the amount of discharge method.

[0232](第二实施方式) [0232] (Second Embodiment)

[0233] 在本实施方式中,利用图4及图5,说明对液滴喷出装置的喷出量进行调整的特征性调整方法的一个实施方式。 [0233] In the present embodiment, using FIG. 4 and FIG. 5, illustrating an embodiment of a method of adjusting a characteristic of the discharge amount of the droplet discharge means for adjusting.

[0234] 该实施方式与第一实施方式的不同之处在于:在第一喷出量调整工序中调整全部液滴喷出头14的喷出量。 [0234] This embodiment differs from the first embodiment: adjusting the amount of discharge of all the droplet discharge head 14 in the first discharge amount adjusting step.

[0235] S卩,在图4中,除了步骤S22的步骤S7及步骤S24中的步骤S15以外,均与第一实施方式相同,省略说明。 [0235] S Jie, in FIG. 4, Step S22 in addition to step S7 and S15 to step S24, are the same as in the first embodiment, description thereof will be omitted. 而且,在步骤S7中,对属于图5所示的第一喷头列71〜第十二喷头列82的液滴喷出头14的喷出量进行调整。 Further, in step S7, the head of the first column of FIG. 5 belonging discharge amount of the discharge head 14 of the head row 82 71~ twelfth droplets is adjusted.

[0236] 因此,属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14在未被其他液滴喷出头列夹持的状态下进行喷出后,利用测量的喷出量,通过与目标喷出量106吻合而对喷出量进行调整。 [0236] Thus, the head row 74 belonging to the fourth, fifth head row 75, the eighth head row 78, the ninth row in the head 79 with the droplet ejection head other droplet ejection head 14 is not sandwiched between column after the ejection performed by measuring the amount of discharge, the discharge amount is adjusted to coincide with the target discharge amount by 106.

[0237] 在步骤S15中,进行与第一实施方式同样的调整。 [0237] In step S15, the same adjustment in the first embodiment. 因此,属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14在步骤S7及步骤S15等两个步骤中被进行喷出量的调整。 Thus, the head row 74 belonging to the fourth, fifth head row 75, the eighth head row 78, the ninth column head 79 droplet ejection head 14 is performed in two steps, the amount of discharge step S7 and step S15, and the like Adjustment.

[0238] 在步骤S24中,在反复进行喷出与调整时,属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14在步骤S22中被进行一次调整,因此有时可以以少的反复次数完成调整。 [0238] In step S24, when the discharging is repeated with the adjustment, the head row 74 belonging to the fourth, fifth head row 75, the eighth head row 78, column 79 of the ninth nozzle droplet discharge head 14 at step S22 are once adjusted, it is sometimes possible to complete the adjustment of a small number of iterations. 然后,在进行了调整后,在步骤S17中,根据规定的描绘图案,喷出液滴44并涂覆在基板7上。 Then, after performing the adjustment, in step S17, a drawing pattern according to a predetermined discharge droplet 44 and the substrate 7 is coated. 涂覆预定的描绘图案后结束步骤S17,结束向基板7喷出液滴并进行涂覆的制造工序。 After coating the end of a predetermined pattern drawing step S17, the end of the discharge droplets onto the substrate 7 and coating the manufacturing process.

[0239] 如上所述,根据本实施方式,除了第一实施方式中的效果⑴〜(5)以外,还具有以下效果。 [0239] As described above, according to this embodiment, in addition to the effect of the first embodiment ⑴~ (5), it has the following effects.

[0240] (1)根据本实施方式,在步骤S21的第一测量工序中,属于未被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头14在步骤S22的第一喷出量调整工序中,进行一次喷出量的调整。 [0240] (1) According to this embodiment, in a first measurement process of Step S21, the liquid droplet ejection heads belonging to the other column not sandwiched droplet ejection head row droplet ejection head 14 at step S22 a first step of adjusting the discharge amount, the discharge amount of a correction. 因此,该液滴喷出头14的喷出量被调整为接近目标喷出量,故在步骤S24的第二喷出量调整工序中,液滴喷出头14的温度即使上升得比步骤S22的温度还要高,也可以以较少的反复次数进行调整。 Therefore, the discharge amount of the liquid droplet discharge head 14 is adjusted to be close to the target discharge amount, so the adjusting step process, the temperature of the droplet discharge head 14 rises faster than even the amount of S22 in the second discharge step S24 the temperature even higher, can also be adjusted with a small number of iterations. 结果,可以成为生产率较佳的调整方法。 As a result, the productivity can be a preferred method of adjustment.

[0241](第三实施方式) [0241] (Third Embodiment)

[0242] 在本实施方式中,利用图10对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0242] In the present embodiment, FIG. 10 the adjustment amount of the liquid droplet ejection apparatus according to an embodiment of the method of adjusting the discharge characteristic will be described. 图10是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 FIG 10 is a flowchart discharging droplets onto a substrate and the manufacturing process be coated.

[0243] 该实施方式与第一实施方式的不同之处在于,在第一喷出量调整工序与第二喷出量调整工序中分为粗调整与微调整后对喷出量进行调整。 [0243] This embodiment differs from the first embodiment in that, the discharge amount adjusting step of adjusting the second and divided into rough adjustment and fine adjustment of the discharge amount adjusting step in the first discharge amount.

[0244] 在图10中,步骤S31〜步骤S33是与图4所示的步骤Sl〜步骤S3对应的步骤, 省略说明。 [0244] In FIG. 10, step S33 is a step of the step S31~ step Sl~ step shown in FIG. 4 S3 corresponding description is omitted. 步骤S34相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。 Step S34 corresponds to the step of measuring the discharge, a predetermined number of times of discharge from the nozzle toward the receiving plate of the weight measuring apparatus. 例如,进行100次的喷出。 For example, the discharge 100 times. 然后计量重量测量装置的接受器皿的重量。 Then accept the metering vessel weight measuring device weight. 而且, 是运算每次喷出的喷出量的工序。 Further, a discharge amount discharged per operation step. 接着移至步骤S35。 Subsequently to step S35. 步骤S35相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S34中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。 Step S35 corresponds to the amount of discharge is determined whether the target discharge amount of the step, the discharge amount is measured in step S34 with the adjustment target as the target discharge amount, and determines a target discharge amount and discharge amount the difference is smaller than a predetermined step value. 在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S36。 When the difference between the discharge amount and the discharge amount of the target is larger than a predetermined value (when NO), the process proceeds to step S36. 在步骤S35中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S37。 In step S35, the difference between the discharge amount and the discharge amount of the target is smaller than a predetermined value (a time), the process proceeds to step S37. 步骤S36相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。 Step S36 corresponds to the adjusting step, a step of discharging the amount discharged from the droplet discharge head adjusting. 接着移至步骤S34。 Then moves to step S34. 由步骤S34〜步骤S36的步骤构成步骤S61的粗调整工序。 Step S61 a coarse adjustment step consists Step S34~ step S36.

[0245] 步骤S37相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。 [0245] Step S37 corresponds to the step of measuring the discharge, a predetermined number of times of discharge from the nozzle toward the receiving plate of the weight measuring apparatus. 在该步骤中,进行比步骤S34中的喷出次数多的喷出。 In this step, more than the number of times of discharging the discharge step S34. 例如进行1000次的喷出。 For example, the discharge of 1000 times. 因此,该步骤中的喷出量进行比步骤S34中的喷出量多的喷出。 Thus, the amount of discharge of the procedures in step S34 than the discharge amount of a plurality of ejection. 然后,计量重量测量装置的接受器皿的重量。 Then, the weight of the weight of the receiving plate metering measuring device. 而且,是对每次喷出的喷出量进行运算的工序。 Further, the amount of discharge step is performed each time the discharge operation. 然后移至步骤S38。 Then moves to step S38. 步骤S38相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S37中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。 Step S38 corresponds to the amount of discharge is determined whether the target discharge amount of the step, the amount of discharge is detected in step S37 as an adjustment target and the target discharge amount, and determines a target discharge amount and discharge amount the difference is smaller than a predetermined step value. 该规定值设定为比步骤S35中的规定值窄的范围。 The predetermined value is set to be narrower than the predetermined range of values ​​in step S35. 而且,在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S39。 Further, in (when NO) the difference between the discharge amount and the discharge amount of the target is larger than a predetermined value, the process proceeds to step S39. 在步骤S38中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S40。 In step S38, the difference between the discharge amount and the discharge amount of the target is smaller than a predetermined value (a time), the process proceeds to step S40. 步骤S39相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。 Step S39 corresponds to the adjusting step, a step of discharging the amount discharged from the droplet discharge head adjusting. 在该工序中调整的喷出量的变化量设定为比步骤S36中的调整的变化量小的值。 The step of adjusting the amount of change in the discharge amount is set in step S36 to adjust the ratio of a small amount of change value. 接着移至步骤S37。 Then moves to step S37. 由步骤S37〜步骤S39的步骤构成步骤S62的微调整工序。 S37~ step consists of step S39 step S62 step of the fine adjustment step.

[0246] 步骤S40相当于判断是否为调整预定的喷头全部进行了调整的工序,是在步骤S31中设定为进行调整的液滴喷出头中判断是否全部进行了调整的工序。 [0246] Step S40 corresponds to determining whether to adjust all of the predetermined head adjustment step is set to be discharged is adjusted in step S31 determines whether all the droplet head adjusted step. 在所调整的预定液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S34。 No discharge droplet amount of adjustment when the discharge head (when NO), the process proceeds to step S34 in the presence of a predetermined droplet ejection head adjusted. 在步骤S40中,在对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S41。 In step S40, a predetermined amount of discharge of droplets discharged all adjusted droplet ejection head head is adjusted (a time), the process proceeds to step S41. 由步骤S32〜步骤S40的步骤构成步骤S63的第一喷出量调整工序。 The first step consists of an amount of discharged S32~ step S40 step S63 step adjusting step.

[0247] 步骤S41相当于移动工序,是使液滴喷出头从与第二冲洗单元及重量测量装置对置的场所向与第一冲洗单元对置的场所移动的工序。 [0247] Step S41 corresponds to the step movement, is to make the liquid discharge head unit and a rinsing step and a second weight measuring means for moving the first place to the flush unit facing opposite from a venue. 接着,移至步骤S42。 Next, the processing proceeds to step S42. 步骤S42相当于喷出前待机工序,是对液滴喷出头进行暖机驱动的工序。 Step S42 corresponds to the discharging standby step before, the droplet discharge head is driven warming step. 接着移至步骤S43。 Then moves to step S43. 步骤S43相当于移动工序,是将液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S43 corresponds to a shift step, the droplet discharge head is moved to the place of the step opposite to the weight measurement apparatus. 接下来移至步骤S44。 Next moves to step S44. 步骤S44相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。 Step S44 corresponds to the step of measuring the discharge, a predetermined number of times of discharge from the nozzle toward the receiving plate of the weight measuring apparatus. 例如进行100次的喷出。 For example, the discharge 100 times. 然后计量重量测量装置的接受器皿的重量。 Then accept the metering vessel weight measuring device weight. 而且,是对每次喷出的喷出量进行运算的工序。 Further, the amount of discharge step is performed each time the discharge operation. 接着移至步骤S45。 Subsequently to step S45. 步骤S45相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S44中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。 Step S45 corresponds to the amount of discharge is determined whether the target discharge amount of the step, the discharge amount is measured in step S44 with the adjustment target as the target discharge amount, and determines a target discharge amount and discharge amount the difference is smaller than a predetermined step value. 在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S46。 When the difference between the discharge amount and the discharge amount of the target is larger than a predetermined value (when NO), the process proceeds to step S46. 在步骤S45中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S47。 In step S45, the difference between the discharge amount and the discharge amount of the target is smaller than a predetermined value (a time), the process proceeds to step S47. 步骤S46相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。 Step S46 corresponds to the adjusting step, a step of discharging the amount discharged from the droplet discharge head adjusting. 接着移至步骤S44。 Subsequently to step S44. 由步骤S44〜步骤S46的步骤构成步骤S64的粗调整工序。 Step S44~ a step S46 constituting the coarse adjustment step of step S64.

[0248] 步骤S47相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。 [0248] Step S47 corresponds to the step of measuring the discharge, a predetermined number of times of discharge from the nozzle toward the receiving plate of the weight measuring apparatus. 在该步骤中,进行比步骤S44中的喷出次数多的喷出。 In this step, more than the number of times of discharging the discharge step S44. 例如进行1000次的喷出。 For example, the discharge of 1000 times. 因此,该步骤中的喷出量进行比步骤S44中的喷出量多的喷出。 Thus, the amount of discharge of the procedures in step S44 than the discharge amount of a plurality of ejection. 然后计量重量测量装置的接受器皿的重量。 Then accept the metering vessel weight measuring device weight. 而且,是对每次喷出的喷出量进行运算的工序。 Further, the amount of discharge step is performed each time the discharge operation. 然后移至步骤S48。 Then moves to step S48. 步骤S48相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S47中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。 Step S48 corresponds to the amount of discharge is determined whether the target discharge amount of the step, the amount of discharge is detected in step S47 as an adjustment target and the target discharge amount, and determines a target discharge amount and discharge amount the difference is smaller than a predetermined step value. 该规定值设定为比步骤S45中的规定值窄的范围。 The predetermined value is set to be narrower than the predetermined value in step S45 range. 而且,在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S49。 Further, in (when NO) the difference between the discharge amount and the discharge amount of the target is larger than a predetermined value, the process proceeds to step S49. 在步骤S48中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S50。 In step S48, the difference between the discharge amount and the discharge amount of the target is smaller than a predetermined value (a time), the process proceeds to step S50. 步骤S49相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。 Step S49 corresponds to the adjusting step is a step of discharging the amount discharged from the droplet discharge head adjusting. 在该工序中调整的喷出量的变化量设定为比步骤S46中的调整的变化量小的值。 The step of adjusting the amount of change in the discharge amount is set in step S46 to adjust the ratio of a small amount of change value. 接着移至步骤S47。 Subsequently to step S47. 由步骤S47〜步骤S49的步骤构成步骤S65的微调整工序。 S47~ step consists of step S49 step S65 step of the fine adjustment step.

[0249] 步骤S50相当于判断是否为调整预定的喷头全部进行了调整的工序,是在步骤S31中设定为进行调整的液滴喷出头中判断是否全部进行了调整的工序。 [0249] Step S50 corresponds to determining whether to adjust all of the predetermined head adjustment step is set to be discharged is adjusted in step S31 determines whether all the droplet head adjusted step. 在所调整的预定液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S44。 No discharge droplet amount of adjustment when the discharge head (when NO), the process proceeds to step S44 in the presence of a predetermined droplet ejection head adjusted. 在步骤S40中,在对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S51。 In step S40, a predetermined amount of discharge of droplets discharged all adjusted droplet ejection head head is adjusted (a time), the process proceeds to step S51. 由步骤S42〜步骤S50的步骤构成步骤S66的第二喷出量调整工序。 The amount of the second discharge step S42~ step S50 step S66 step constituting the adjusting step.

[0250] 步骤S51相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。 [0250] Step S51 corresponds to the step of coating, a droplet is discharged toward the substrate and coating step. 如上所述,结束向基板喷出功能液并进行涂覆的制造工序。 As described above, the end of the functional liquid is discharged to the manufacturing process of the substrate and coating.

[0251] 如上所述,根据本实施方式,除了第一实施方式的效果⑴〜(5)以外,还具有以下的效果。 [0251] As described above, according to the present embodiment, in addition to the effects ⑴~ (5) of the first embodiment, it has the following effects.

[0252] (1)根据本实施方式,进行步骤S61及步骤S64中的粗调整工序、步骤S62及步骤S65中的微调整工序。 [0252] (1) According to the present embodiment, a coarse adjustment step and step S61 in step S64, step S62, and a fine adjustment step in step S65. 此时,与反复进行微调整,每次少量调整喷出量的情况相比,组合通过粗调整使得喷出量大幅度变化的工序和微调整工序来进行的方法可以以较少的次数,调整为作为目标的喷出量。 At this time, with repeated fine adjustment, where the adjustment in small amount compared to the discharge, by a combination of coarse adjustment and fine adjustment step such that the method steps carried out can be a significant change in the discharge amount with a small number of times, the adjustment as for the discharge amount of goals. 因此,可以生产率良好地进行调整。 Therefore, the productivity can be adjusted well.

[0253] (2)根据本实施方式,在步骤S61及步骤S64的粗调整工序中,与步骤S62及步骤S65中的微调整工序相比,以较少的喷出量进行喷出量的测量。 [0253] (2) According to the present embodiment, in step S61, and step S64 in the coarse adjustment step, compared to the step S62 and in step S65 the fine adjustment process, the discharge amount with a small discharge amount measurement . 因此,可以减少所喷出的液状体的消耗量。 Thus, it is possible to reduce the consumption amount of the liquid discharged. 结果,可以作为节省资源的调整方法。 The results can be saved as a method of adjusting resources.

[0254](第四实施方式) [0254] (Fourth Embodiment)

[0255] 在本实施方式中,利用图10对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0255] In the present embodiment, FIG. 10 the adjustment amount of the liquid droplet ejection apparatus according to an embodiment of the method of adjusting the discharge characteristic will be described. 该实施方式与第三实施方式的不同之处在于,在粗调整工序与微调整工序中使单位时间内喷出的次数为不同的次数。 This embodiment differs from the third embodiment is characterized in that the fine adjustment of the discharge frequency per unit time of the coarse adjustment step step manipulation for different times.

[0256] S卩,在图10中,在步骤S34、步骤S37、步骤S44、步骤S47的各喷出测量工序中,将所喷出的喷出次数设为相同的次数,例如设为100次。 [0256] S Jie, in FIG. 10, the same number of times in step S34, step S37, the step S44, step S47, step measure each discharge, the discharge is set to the number of discharge, for example, to 100 . 而且,在步骤S51中,例如在1秒内喷出5次,涂覆功能液41时,在属于微调整工序的步骤S37及步骤S47中,1秒内喷出5次。 Further, in step S51, for example, five times the discharge in one second, when the functional liquid coating 41, in step S37 belongs and a fine adjustment step in step S47, discharge 5 times within one second. 接着,在属于粗调整工序的步骤S34及步骤S44中,例如1秒内喷出10次,进行测量。 Next, in step S34 are rough adjusting step and step S44, for example, one second discharge 10 times, was measured. 也就是说,在粗调整工序中与微调整工序相比,增多每单位时间内的喷出次数,在短时间内进行喷出。 That is, compared with the fine adjustment step in the coarse adjustment step, the increase in the number of ejection per unit time, for discharging in a short time.

[0257] 如上所述,根据本实施方式,除了第一实施方式中的效果(1)〜(5)及第三实施方式中的效果(1)以外,具有以下的效果。 [0257] As described above, according to the present embodiment, in addition to the effects (1) Effects (1) to (5) of the first embodiment and the third embodiment has the following effects. [0258] (1)根据本实施方式,在属于粗调整工序的步骤S34及步骤S44中,与微调整工序相比,增多单位时间内喷出的次数。 [0258] (1) According to the present embodiment, at step S34 are rough adjusting step and the step S44, the fine adjustment as compared with step increase in the number of ejection per unit time. 在粗调整工序及微调整工序中,进行相同次数的喷出, 在对喷出量进行测量时,粗调整工序在短时间内可以进行喷出。 In the coarse adjustment step, and fine adjustment step, the same number of discharge, the discharge amount at the time of measurement, discharging coarse adjustment step may be performed in a short time. 因此,可以生产率优良地进行调整。 Therefore, the productivity can be excellently adjusted.

[0259](第五实施方式) [0259] (Fifth Embodiment)

[0260] 在本实施方式中,利用图4及图5对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0260] In the present embodiment, FIGS. 4 and 5 using the adjustment amount of the discharge liquid droplet discharge apparatus according to an embodiment of the method of characteristics adjustment will be described. 该实施方式与第二实施方式的不同之处在于,在第一喷出量调整工序中,以使未被夹持的喷头列的喷出量小于被夹持的喷头列的喷出量的方式对喷出量进行调整。 This embodiment differs from the second embodiment in that, in a first step of adjusting the amount of discharge, the discharge is not held so that the amount less than the amount of the head row clamped discharge head row in a manner adjust the amount of discharge.

[0261] S卩,在图4所示的步骤S6中,进行喷出量与目标喷出量的比较。 [0261] S Jie, in step S6 shown in FIG. 4, the ejection amount is compared with a target discharge amount. 此时,在图5(a) 所示的第一组83中,第一喷头列71、第二喷头列72、第三喷头列73的目标喷出量设为在步骤S17中进行喷出时的目标喷出量。 In this case the target discharge amount, in FIG. 5 (a) shown in the first group 83, a first nozzle row 71, a second nozzle row 72, column 73 of the third head is set in step S17 for discharging the target discharge amount. 而且,第四喷头列74的目标喷出量设定为比步骤S17 中进行喷出时的目标喷出量少。 Further, the target discharge amount of the fourth head of the column 74 will be set as the target when the discharge is less than the discharge step S17. 然后,在步骤S7中以成为各目标喷出量的方式对喷出量进行调整。 Then, at step S7 to become the target discharge amount of the discharge amount adjustment manner.

[0262] 同样,在第二组84中,第六喷头列76及第七喷头列77的目标喷出量设为步骤S17 中进行喷出时的目标喷出量。 [0262] Also in the second group 84, sixth and seventh nozzle head row 76 column 77 is set to the target discharge amount of the target discharge amount at the step S17, for discharge. 然后,第五喷头列75及第八喷头列78的目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少。 Then, the fifth target discharge amount of the head row 75 and the eighth head column 78 is set as the target when the discharge is less than the discharge step S17. 在第三组85中,第十喷头列80、第十一喷头列81、第十二喷头列82的目标喷出量设为在步骤S17中进行喷出时的目标喷出量。 In the third group 85 in the head row 80 the tenth, eleventh head row 81, the target discharge amount is set to a twelfth head row 82 for discharge when the discharge amount of the target in step S17. 而且,第九喷头列79的目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少。 Further, the amount of the ninth row target discharge nozzle 79 is set as the target when performing the discharge is less than the discharge step S17.

[0263] 接着,在步骤S14中进行喷出量与目标喷出量的比较。 [0263] Next, compared with the discharge amount of the discharge amount of the target in step S14. 此时,在图5(b)所示的第四组86中,第四喷头列74及第五喷头列75被第三喷头列73及第六喷头列76夹持,因此液滴喷出头14的温度上升,与步骤S4中的喷出量相比增加。 In this case, in FIG. 5 (b) shown in the fourth group 86, the fourth head and a fifth head row 74 column 75 is the third head row 73 and the sixth column the head holder 76, and therefore the droplet ejection heads 14 temperature rises, the discharge amount is increased as compared to the step S4. 但是,在步骤S6中,将目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少,因此在步骤S14中,喷出量大多成为与步骤S17中进行喷出时的目标喷出量接近的喷出量。 However, in step S6, the target discharge amount is set to be a target when the discharge is less than the discharge step S17, Therefore, in step S14, the discharge amount becomes most of the step S17 is performed in the discharge target discharge amount of the discharge amount close. 同样,即使在第五组87中,第八喷头列78及第九喷头列79的喷出量大多为与步骤S17中进行喷出时的目标喷出量接近的喷出量。 Also, even in the fifth group 87, the eighth 78 and the ninth column nozzle array discharging amount of the nozzle 79 with the most amount of discharge step when the target discharge amount for the ejected S17 in proximity. 因此,可以减少反复步骤S12〜步骤S15的次数。 Thus, the number of repeated steps S12~ step S15 can be reduced.

[0264] 如上所述,根据本实施方式,除了第一实施方式中的效果⑴〜(5)以外,具有以下的效果。 [0264] As described above, according to this embodiment, in addition to the effect of the first embodiment ⑴~ (5), it has the following effects.

[0265] (1)根据本实施方式,在步骤S7中,以从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量比步骤S17中喷出的目标喷出量少的方式进行调整。 [0265] (1) According to this embodiment, in step S7, the droplet discharge head to the column never sandwiched droplet discharge head discharging the liquid material than the discharge step S17 discharged target discharge less a way to adjust. 因此,在被其他液滴喷出头夹持对喷出量进行测量时,可以从使喷出量与步骤S17中喷出的喷出量的目标接近的喷出量开始进行调整。 Thus, when other droplet ejection head holds the discharge amount of the measurement can be started from the discharge amount adjusting step S17, a target discharge amount discharged near the discharge amount. 结果,因为可以以较少的调整次数进行调整,故可以生产率良好地进行调整。 As a result, since the adjustment can be performed with less number of adjustments, it is possible to adjust with good productivity.

[0266](第六实施方式) [0266] (Sixth Embodiment)

[0267] 在本实施方式中,利用图4及图5对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0267] In the present embodiment, FIGS. 4 and 5 using the adjustment amount of the discharge liquid droplet discharge apparatus according to an embodiment of the method of characteristics adjustment will be described. 该实施方式与第二实施方式的不同之处在于,在第一喷出量调整工序中,在第二喷出量调整工序的测量用喷出工序点进行将未被夹持的喷头列的喷出量设定为小于被夹持的喷头列的喷出量的工序。 This embodiment differs from the second embodiment in that, in the first discharge amount adjusting step, the adjustment step in a second discharge step of discharging the amount of measurement point with the spray nozzle column undamped the amount is set smaller than the discharge amount of the head row clamped step.

[0268] S卩,图4所示的步骤Sl〜步骤Sll与第二实施方式同样地实施。 [0268] S Jie, step Sl~ steps shown in FIG. 4 Sll the same manner as the second embodiment. 然后,在步骤S12中,相对于步骤S7中调整后的喷出量,变更喷出量。 Then, in step S12, with respect to the discharge amount after adjustment in step S7, the discharge amount is changed. 详细内容为,以比步骤S22中设定的喷出量少的喷出量进行喷出的方式对图5所示的第四组86的第四喷头列74及第五喷头列75 的喷出量进行设定变更后进行喷出。 For details, for the fourth head of the fourth group 86 of FIG. 5 way discharge amount discharged to less than the discharge set in step S22 and the fifth column of the discharge nozzle 74 of row 75 They were ejected after setting the amount of change.

[0269] 第四喷头列74及第五喷头列75因为被第三喷头列73及第六喷头列76夹持,故液滴喷出头14的温度上升,比步骤S22中的喷出量增加。 [0269] The fourth and fifth nozzle head row 74 column 75 is listed as the third head 73 and the head 76 clamping the sixth column, so that the temperature of the droplet discharge head 14 is increased, an increase of the discharge amount in step S22 . 但是,在步骤S12中,由于将喷出量设定为小于步骤S22中进行喷出时的目标喷出量,故喷出量大多成为与步骤S17中进行喷出时的目标喷出量接近的喷出量。 However, in step S12, since the discharge amount is set to be smaller than the target discharge amount at the step S22, discharge proceed, the discharge amount often becomes a target amount of discharge when the discharge is performed in step S17 and the closest discharge amount. 因此,可以减少反复步骤S12〜步骤S15的次数。 Thus, the number of repeated steps S12~ step S15 can be reduced.

[0270] 同样,在第五组87中,也将第八喷头列78及第九喷头列79的喷出量在步骤S12 中以比步骤S22中设定的喷出量少的喷出量进行喷出的方式变更设定后进行喷出。 [0270] Similarly, in the fifth group 87, the head row 78 will be the eighth and ninth columns of the discharge amount of the discharge nozzle discharge amount of less than 79 is set in step S22, step S12 is performed ejected after ejection way to change the setting. 结果, 可以减少反复步骤S12〜步骤S15的次数。 As a result, the number of repeating step S15 can be reduced S12~ step.

[0271] 如上所述,根据本实施方式,除了第一实施方式的效果⑴〜(5)以外,具有以下的效果。 [0271] As described above, according to the present embodiment, in addition to the effects ⑴~ (5) of the first embodiment has the following effects.

[0272] (1)根据本实施方式,在步骤S22中,未被液滴喷出头列夹持的液滴喷出头14以在步骤S12中减少喷出量的方式进行调整。 [0272] (1) According to this embodiment, in step S22, the droplet discharge head is not clamped column droplet discharge head 14 in order to reduce the discharge amount was adjusted in step S12. 因此,在步骤S12中被其他液滴喷出头夹持对喷出量进行测量时,可以从使喷出量与步骤S17中进行喷出的喷出量的目标接近的喷出量开始进行调整。 Thus, in step S12, when the other droplet ejection head holds the discharge amount of the measurement can be started from the target closest to adjust the discharge amount and the discharge amount of the discharge step S17 for ejection amount . 结果,因为可以以较少的调整次数进行调整,故可以生产率良好地进行调整。 As a result, since the adjustment can be performed with less number of adjustments, it is possible to adjust with good productivity.

[0273](第七实施方式) [0273] (Seventh Embodiment)

[0274] 在本实施方式中,利用图11及图12对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0274] In the present embodiment, FIG. 11 and FIG discharge amount of the device according to an embodiment of the characteristic adjustment method of adjusting the droplet discharge 12 pairs will be described. 图11是表示液滴喷出装置的构成的概略立体图,图12是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 FIG 11 is a schematic perspective view of a droplet discharge device, FIG. 12 is a flowchart discharging droplets onto a substrate and the manufacturing process be coated. 该实施方式与第二实施方式的不同之处在于:在液滴喷出头的排列中的行数比重量测量装置多时,对同一滑架内的液滴喷出头的喷出量进行测量后,测量其他滑架内的液滴喷出头的喷出量。 This embodiment differs from the second embodiment in that: the number of rows are arranged in the droplet discharge head is larger than the weight measuring device, the amount of discharge of the droplet discharge head carriage in the same measured after measured in other droplet ejection head carriage discharge amount.

[0275] S卩,如图11所示,液滴喷出装置108中,重量测量装置109在X方向上4个配置为1行。 [0275] S Jie, shown in Figure 11, the droplet discharge apparatus 108 109 4 weight measuring device arranged in the X direction one line. 而且,如图5所示,第一滑架12a〜第六滑架12f中,在作为行的第一喷头行110、第二喷头行111、第三喷头行112的3行配置有液滴喷出头14。 Further, as shown in FIG. 5, the first carriage 12a~ 12f sixth carriage, the head row as the first row 110, second nozzle row 111, third row 112 of nozzle row 3 are disposed liquid droplets 14-something. 也就是说,说明相对于重量测量装置109 —次能测量的液滴喷出头14的行数而言滑架12搭载的液滴喷出头14的行数较多时的调整顺序。 That is, the weight measuring apparatus described with respect to the 109 - adjustment times can be measured droplets of the order a few more rows 12 mounted on the carriage droplet discharge head 14 of the number of lines in terms of ejection head 14.

[0276] 在图12的流程图中,步骤S71相当于调整顺序设定工序,是设定对液滴喷出头的喷出量进行调整的顺序的工序。 [0276] In the flowchart of FIG. 12, step S71 corresponds to the adjustment order setting step for setting a discharge amount of the droplet discharge head adjustment process sequence. 接着移至步骤S72。 Subsequently to step S72. 步骤S72相当于移动工序,是移动滑架,将要测量的液滴喷出头向与重量测量装置对置的场所移动的工序。 Step S72 corresponds to the step movement, the carriage is moved, the droplet discharge head to be measured is moved to place the weight measuring apparatus facing step. 接着,移至步骤S73。 Next, the processing proceeds to step S73. 步骤S73相当于第一喷出量调整工序,是从1行液滴喷出头喷出功能液后测量喷出量,调整喷出量的工序。 Step S73 corresponds to a first discharge amount adjusting step, the amount of discharge is measured after the functional liquid is discharged from the first discharge line 1 drops, the discharge amount adjusting step. 接着移至步骤S74。 Subsequently to step S74.

[0277] 步骤S74相当于判断在同一滑架内是否对调整预定的喷头全部进行了调整的工序,是判断是否对3行所有的液滴喷出头的喷出量进行了调整的工序。 [0277] Step S74 corresponds to determining whether the carriage in the same predetermined adjustment head to adjust all of the steps, the amount of discharge is determined whether the discharge head 3 of a row of all the droplets of the adjustment step. 在存在未进行调整的行时(否的时候),移至步骤S72。 No adjustment in the presence of a row (when NO), the process proceeds to step S72. 在步骤S74中,对3行所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S75。 In step S74, the amount of discharge of the discharge head 3 drops all lines have been adjusted (a time), the process proceeds to step S75. 步骤S75相当于判断是否对调整预定的喷头全部进行了调整的工序,是在步骤S71中设定为调整的液滴喷出头中判断是否全部进行了调整的工序。 Step S75 corresponds to determining whether a predetermined adjustment head to adjust all of the steps set in the step S71 is to adjust the liquid droplet ejection head is determined whether all of the adjustment step. 在调整的预定液滴喷出头中,存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S72。 Adjustment of a predetermined droplet ejection head, is not present on the droplet to adjust the amount of discharge when the discharge head (when NO), the process proceeds to step S72. 在步骤S75中,在对调整预定的液滴喷出头中所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S76。 In step S75, when the predetermined discharge amount adjusting all the droplet discharge head of the droplet ejection head has been adjusted (a time), to step S76.

[0278] 步骤S76相当于移动工序,是移动滑架,将要测量的液滴喷出头向与重量测量装置对置的场所移动的工序。 [0278] Step S76 corresponds to the step movement, the carriage is moved, the droplet discharge head to be measured is moved to place the weight measuring apparatus facing step. 接着,移至步骤S77。 Next, the processing proceeds to step S77. 步骤S77相当于第二喷出量调整工序,是在设为与步骤S73中不同的喷头列的配置后,从1行液滴喷出头喷出功能液,测量喷出量, 对喷出量进行调整的工序。 Step S77 corresponds to a second discharge amount adjusting step, after different in configuration to the step S73 in the head row, from row 1 functional liquid droplet discharge head discharging, measuring the amount of discharge, the discharge amount of a step of adjusting. 接着移至步骤S78。 Subsequently to step S78. 步骤S78相当于判断是否对同一滑架内调整预定的喷头全部进行了调整的工序,是判断是否对3行所有的液滴喷出头的喷出量进行了调整的工序。 Step S78 corresponds to predetermined adjustment is determined whether the same head carriage all of the adjustment step, the amount of discharge is determined whether the discharge head 3 rows all droplets of the adjustment step. 在存在未进行调整的行时(否的时候),移至步骤S76。 No adjustment in the presence of a row (when NO), the process proceeds to step S76. 在步骤S78中,在对3行所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S79。 In step S78, when the discharge amount of 3 rows droplet ejection head all it has been adjusted (a time), to step S79. 步骤S79是判断是否对调整预定的喷头全部进行了调整的工序,是在步骤S71中设定为调整的液滴喷出头中判断是否全部进行了调整的工序,在调整预定的液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S76。 Step S79 is to determine whether a predetermined adjustment head to adjust all of the step is set to adjust the liquid droplet ejection head is determined whether all of the adjustment process in step S71, the droplets ejected in a predetermined adjustment not present in the head of the droplet discharge amount when the discharge head is adjusted (when NO), the process proceeds to step S76. 在步骤S79中,在对调整预定的液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S80。 In step S79, when the entire amount of discharged liquid droplet discharge head is adjusted in a predetermined droplet ejection head is adjusted (a time), the process proceeds to step S80. 步骤S80相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。 Step S80 corresponds to the step of coating, a droplet is discharged toward the substrate and coating step. 如上所述,结束向基板喷出功能液并进行涂覆的制造工序。 As described above, the end of the functional liquid is discharged to the manufacturing process of the substrate and coating.

[0279] 接着,利用图5,详细说明与图12所示的步骤对应,且精度优良地对液滴喷出头喷出的喷出量进行调整,并向工件涂覆的制造方法。 [0279] Next, FIG. 5, described in detail correspond to the steps shown in FIG. 12, and with good accuracy the amount of discharged discharge liquid droplet discharge head is adjusted, and a method for manufacturing a coated workpiece. 步骤S71与图4所示的步骤Sl同样,省略说明。 Step S71 and step shown in FIG. 4 Sl Similarly, description thereof will be omitted. 在步骤S72中,将第一组83的第一喷头行110的液滴喷出头14向与重量测量装置21对置的场所移动。 In step S72, the first head of the first group 83 of rows 14 droplet ejection head 110 is moved to place the counter 21 of the weight measuring apparatus. 然后在步骤S73中,对从第一组83的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the discharge amount of the functional liquid in step S73, the head of the first liquid droplet from a first group 83 of discharge line 14 110 ejection head 41 can be adjusted. 而且,在步骤S74及步骤S72中,将第一组73 的第二喷头行111向与重量测量装置21对置的场所移动。 Further, in the moving step S74 and step S72 place, the first line of the second head 73 is set to 111 and the weight measuring device 21 opposite. 然后,在步骤S73中,对从第一组83的第二喷头行111的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then, in step S73, the droplets of the first line 111 from the second head group 83 of discharge head 14 discharge amount of the functional liquid discharged 41 can be adjusted. 经过同样的步骤,对从第一组83的第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。 After the same procedure, the discharge amount of the functional liquid droplet ejected from the first group of the third row 83 of the head 112 of the head 14 of the discharge 41 can be adjusted.

[0280] 接着,在步骤S75及步骤S72中,将第二组84的第一喷头行110向与重量测量装置21对置的场所移动。 [0280] Next, in a step S75 and step S72, the second group of the first head 84 is moved to place the line 110 and the 21 pairs of opposing the weight measuring apparatus. 然后在步骤S73中,对从第二组84的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the discharge amount of the functional liquid in step S73, the first liquid droplet from the head 84 of the second set of rows 110 of the discharge head 14 discharge 41 is adjusted. 而且,通过反复步骤S72〜步骤S74,从而对从第二组84的第二喷头行111及第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。 Further, by repeating the step of adjusting S72~ step S74, the second set so that the second droplet from the nozzle row 84 of the third head 111 and 112 of the discharge line of the discharge amount of the functional fluid 14 discharged head 41. 接着,经过同样的步骤,对从第三组85的第一喷头行110〜第三喷头行112 的液滴喷出头14喷出的功能液41的喷出量进行调整。 Subsequently, through the same step, the third set of droplets from the first head of the line head 85 of the third row 112 110~ ejection head 14 function of the amount of discharge liquid discharged 41 can be adjusted.

[0281] 接下来,在步骤S76中,将第四组86的第一喷头行110向与重量测量装置21对置的场所移动。 [0281] Next, in step S76, the fourth set of the first head 86 is moved to place the line 110 and the 21 pairs of opposing the weight measuring apparatus. 然后,在步骤S77中,对从第四组86的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then, in step S77, the function of the discharge amount from the droplet discharge head 110 in the first head row 86 a fourth group 14 of the discharge 41 can be adjusted. 此时,对第四喷头列74及第五喷头列75的液滴喷出头14 中的喷出量进行调整。 At this time, the fourth column of the discharge amount of the nozzle 74 and the fifth droplet ejection head row 75 head 14 is adjusted. 而且,通过反复步骤S76〜步骤S78,从而可以对从第四组86的第二喷头行111及第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。 Further, by repeating Steps S78 S76~, can be adjusted so that the discharge amount of the functional liquid from the droplet discharge head of the fourth row 86 of the second head group 111 and third row 112 of the head 41 of the discharge 14. 接着,经过同样的步骤,对从第五组87的第一喷头行110〜第三喷头行112的液滴喷出头14 喷出的功能液41的喷出量进行调整。 Subsequently, through the same step, the droplets of the first head group from the fifth row of the third nozzle row 87 110~ 112 ejection head 14 function of the discharge amount discharged liquid 41 is adjusted.

[0282] 而且,在进行了调整后,在步骤S80中,根据规定的描绘图案,喷出液滴44,并涂覆在基板7上。 After [0282] Moreover, the adjustment is performed, in step S80, a drawing pattern according to a predetermined discharge droplet 44, and coated on the substrate 7. 涂覆预定的描绘图案,结束步骤S80,结束向基板7喷出液滴并进行涂覆的制造工序。 Drawing a predetermined pattern is applied, the end of step S80, the end of the discharge droplets onto the substrate 7 and coating the manufacturing process. [0283] 如上所述,根据本实施方式,除了第一实施方式的效果⑴〜(5)以外,具有以下的效果。 [0283] As described above, according to the present embodiment, in addition to the effects ⑴~ (5) of the first embodiment has the following effects.

[0284] (1)根据本实施方式,对一个滑架12所搭载的液滴喷出头14中的喷出量全部进行测量后,顺次改变滑架12,对各滑架12所搭载的上述液滴喷出头14中的喷出量进行测量及调整。 After [0284] (1) According to the present embodiment, droplets 12 of a carriage mounted on the discharge amount of discharge of all of the measurement head 14, the carriage 12 is sequentially changed, 12 mounted to each carriage 14 in the discharge amount of the droplet ejection head is measured and adjusted. 因此,可以减少滑架12的移动量,进行测量及调整。 Thus, it is possible to reduce the amount of movement of the carriage 12, the measurement and adjustment. 结果,可以成为节省资源的测量方法及调整方法。 As a result, it can be the measurement and adjustment method saves resources.

[0285](第八实施方式) [0285] (Eighth Embodiment)

[0286] 在本实施方式中,利用图5及图13对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0286] In the present embodiment, FIG. 5 and FIG discharge amount of the device according to an embodiment of the characteristic adjustment method of adjusting the droplet discharge 13 pairs will be described. 图13是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 13 is a flowchart discharging droplets onto a substrate and the manufacturing process be coated. 该实施方式与第七实施方式的不同之处在于:按照液滴喷出头组的每一行进行调整。 This embodiment differs from the seventh embodiment in that: in each row according to the droplet discharge head groups is adjusted.

[0287] 在图13的流程图中,步骤S91相当于调整顺序设定工序,是对调整液滴喷出头的喷出量的顺序进行设定的工序。 [0287] In the flowchart of FIG. 13, step S91 corresponds to the adjustment order setting step is a step of adjusting the amount of discharge liquid droplet ejection head order is set. 接着移至步骤S92。 Subsequently to step S92. 步骤S9相当于移动工序,是移动滑架, 将要测量的液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S9 corresponds to the step movement, a movement of the carriage, to be measured is a step to move the droplet discharge head is opposed to the place of the weight measuring apparatus. 接下来移至步骤S93。 Next moves to step S93. 步骤S93相当于第一喷出量调整工序,是从一行液滴喷出头喷出功能液,测量喷出量,对喷出量进行调整的工序。 Step S93 corresponds to a first discharge amount adjusting step, the functional liquid is discharged from the first discharge line of drops, measuring the amount of discharge, the step of adjusting the discharge amount. 接着移至步骤S94。 Subsequently to step S94. 步骤S94相当于移动工序,是移动滑架,将所测量的液滴喷出头移动到与重量测量装置对置的场所。 Step S94 corresponds to the step movement, the carriage is moved, the measured droplet discharge head is moved to place the weight measuring apparatus facing. 接着移至步骤S95。 Subsequently to step S95. 步骤S95相当于第二喷出量调整工序,是在成为与步骤S93不同的喷头列的配置之后,从1行液滴喷出头喷出功能液并测量喷出量,对喷出量进行调整的工序。 After the step S95 corresponds to a second discharge amount adjusting step S93 becomes different in configuration steps nozzle column, line 1 from the droplet discharge head discharging the functional liquid and measuring the amount of discharge, the discharge amount of the adjustment process. 接着移至步骤S96。 Subsequently to step S96.

[0288] 步骤S96相当于判断在同一行内是否对调整预定的喷头全部进行了调整的工序, 是判断是否对12列的全部液滴喷出头的喷出量进行了调整的工序。 [0288] In the step S96 corresponds to the same line is determined whether all of the nozzle to adjust a predetermined adjustment step is to determine whether or not all of the discharge amount of the droplet ejection head 12 is a step of adjusting. 在存在未调整的列时(否的时候),移至步骤S92。 In the presence of unadjusted column (when NO), the process proceeds to step S92. 在步骤S96中,在对12列的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S97。 In step S96, when the entire amount of the discharged liquid droplet ejection head 12 are adjusted (a time), to step S97. 步骤S97相当于判断是否对调整预定的喷头全部进行了调整的工序,是在步骤S91中设定为调整的全部行的液滴喷出头判断是否进行了调整的工序。 Step S97 corresponds to determining whether a predetermined adjustment head to adjust all of the step is set to adjust the droplet ejection head row determines whether all adjustment process in step S91. 在调整预定的液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候), 移至步骤S92。 No discharge droplet amount of adjustment when the discharge head (when NO), proceeds to step S92 in the presence of a predetermined liquid droplet ejection head adjustment. 在步骤S97中,在对调整预定的液滴喷出头中所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S98。 In step S97, when a predetermined adjustment amounts of all the droplet discharge head discharging a droplet ejection head adjusted (a time), to step S98. 步骤S98相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。 Step S98 corresponds to the step of coating, a droplet is discharged toward the substrate and coating step. 如上所述,结束向基板喷出功能液并进行涂覆的制造工序。 As described above, the end of the functional liquid is discharged to the manufacturing process of the substrate and coating.

[0289] 接着,利用图5,详细说明与图13所示的步骤对应,精度优良地对从液滴喷出头喷出的喷出量进行调整并涂覆在工件上的制造方法。 [0289] Next, FIG. 5, described in detail correspond to the steps shown in FIG. 13, with good accuracy the amount of discharged liquid droplet discharged from the discharge head is adjusted on the workpiece and a method for producing a coating. 步骤S91与图4所示的步骤Sl同样,省略说明。 Step S91 and step shown in FIG. 4 Sl Similarly, description thereof will be omitted. 在步骤S92中,将第一组83的第一喷头行110移动到与重量测量装置21对置的场所。 In step S92, the first head of the first group 83 of rows 21 pairs 110 is moved to a place opposite to the weight measurement apparatus. 而且,在步骤S93中,对从第一组83的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Further, in step S93, the head of the first liquid droplet from a first group 83 of discharge line 110 of the head 14 of the discharge amount of the discharged functional liquid 41 is adjusted. 然后在步骤S94中,将第四组86的第一喷头行110移动到与重量测量装置21对置的场所。 Then, in step S94, the fourth set of the first head 86 is moved to line 110 measuring the weight means 21 pairs of opposed places. 然后在步骤S95中,对从第四组86的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 The amount of the functional liquid discharged in the step S95, and then, the first liquid droplet from the head 86 of the fourth set 110 of ejection head for ejecting rows 14 41 can be adjusted. 此时,对第四喷头列74及第五喷头列75 的液滴喷出头14的喷出量进行调整。 In this case, the amount of discharge of the fourth column of the head 14 of the droplet ejection head 74 and the fifth head column 75 can be adjusted.

[0290] 接着,在步骤S96及步骤S92中,将第二组84的第一喷头行110移动到与重量测量装置21对置的场所。 [0290] Next, in step S96 and step S92, the head of the first row of the second group 84 is moved to measure the weight 110 places opposing means 21 pairs. 然后在步骤S93〜步骤S95中,对从第二组84及第五组87的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of functional liquid discharged in step S93~ step S95, the first liquid droplet from the head 84 and the fifth group of the second group 87 of discharge line 14 110 ejection head 41 can be adjusted.

[0291] 接下来,在步骤S96及步骤S92中,将第三组85的第一喷头行110移动到与重量测量装置21对置的场所。 [0291] Next, in step S96 and step S92, the third set of the first head 85 is moved to line 110 measuring the weight means 21 pairs of opposed places. 然后在步骤S92中,对从第三组85的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 The amount of the functional liquid discharged in the step S92 and then, the first liquid droplet from the head 110 of the third group 85 of rows 14 is discharged discharge head 41 can be adjusted. 然后在步骤S94及步骤S95中,由于没有需要进行调整的液滴喷出头14,故省略步骤,移至步骤S97。 Then, in step S94 and step S95, the adjustment is required because there is no droplet discharge head 14 is omitted the step proceeds to step S97. 通过以上的步骤,对从第一喷头列71〜第十二喷头列82的第一喷头行110中的液滴喷出头14喷出的功能液41的喷出量进行调整。 By the above step, the head of the column from the first column 71~ twelfth ejection head 14 function of the amount of liquid discharge head 41 of the first row in the 11,082 droplet discharge head is adjusted.

[0292] 接着,在步骤S97中,确认对第一喷头行110的液滴喷出头14全部进行了调整,判断是否移至第二喷头行111的液滴喷出头14的调整。 [0292] Next, in step S97, confirmation droplet discharge head 110 of the first line head 14 adjusted all, determines whether to move the second droplet ejection head row 111 of the adjustment head 14. 然后在步骤S92中,将第一组83的第二喷头行111的液滴喷出头14移动到与重量测量装置21对置的场所。 Then, in step S92, the head of the second row of the first group 83 of the droplet discharge head 111 of the weight 14 is moved to place the measuring device 21 is opposed pairs. 然后,反复进行步骤S92〜步骤S97,进行第二喷头行111的液滴喷出头14的调整。 Then, repeating step S92~ step S97, the adjusted second line head 111 droplet ejection head 14. 此时,按照第一组83、 第四组86、第二组84、第五组87、第三组85的顺序进行液滴喷出头14的调整。 At this time, according to the first group 83, the order of the fourth group 86, a second group 84, a fifth group 87, the third group 85 is adjusted droplet discharge head 14. 接着,移至第三喷头行112,按照同样的顺序进行从液滴喷出头14喷出的功能液41的喷出量的调整。 Next, line head 112 moved to a third, a function of adjusting the amount of discharge liquid discharged from the droplet discharge head 41 of the 14 in the same order.

[0293] 并且,调整之后在步骤S98中,根据规定的描绘图案,喷出液滴44,并涂覆在基板7 上。 [0293] Further, after the adjustment in step S98, the drawing in accordance with a predetermined pattern by discharging droplets of 44, and coated on the substrate 7. 涂覆预定的描绘图案,结束步骤S98,结束向基板7喷出液滴并进行涂覆的制造工序。 Drawing a predetermined pattern is applied, the end of step S98, the end of the discharge droplets onto the substrate 7 and coating the manufacturing process.

[0294] 如上所述,根据本实施方式,除了第一实施方式的效果⑴〜(5)以外,具有以下的效果。 [0294] As described above, according to the present embodiment, in addition to the effects ⑴~ (5) of the first embodiment has the following effects.

[0295] (1)根据本实施方式,在调整了1个液滴喷出头14的喷出量之后,对位于该调整后的液滴喷出头14附近的液滴喷出头的喷出量进行调整。 After [0295] (1) According to the present embodiment, an adjustment of the droplet discharge head 14 discharge amount, the liquid droplet discharge head discharging droplets located in the vicinity of the ejection head 14 adjusted the amount to be adjusted. 因此,即使在周围的温度变化时, 在同一行中较近位置的液滴喷出头14也可以利用大致相同温度的影响所产生的误差来调 Accordingly, even when the ambient temperature changes, the position in the same row near the droplet discharge head 14 may be adjusted to affect substantially the same temperature using an error generated by the

整喷出量。 The entire discharge amount.

[0296] (2)根据本实施方式,因为同一行的相邻位置的液滴喷出头14可以利用大致相同温度的影响所产生的误差来调整喷出量,故可以调整为大致相同的喷出量。 [0296] (2) According to the present embodiment, since the same row position adjacent to the droplet ejection head 14 can affect substantially the same temperature using an error generated by the discharge amount is adjusted, it can be adjusted to substantially the same spray the amount. 结果,在液滴喷出头14的扫描方向(图5的Y方向)上可以进行涂覆,而不会形成纵线。 As a result, in the liquid discharge head 14 in the scanning direction (Y direction in FIG. 5) may be coated, without forming a vertical line.

[0297](第九实施方式) [0297] (Ninth Embodiment)

[0298] 在本实施方式中,利用图5及图14对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 [0298] In the present embodiment, FIG. 5 and FIG embodiment of the method a characteristic adjustment apparatus 14 of the discharge amount adjustment droplet discharge will be described. 图14是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 FIG 14 is a flowchart showing discharged droplets onto a substrate and the manufacturing process be coated. 该实施方式与第八实施方式的不同之处在于:在同一行内,在全部进行了第一喷出工序后,进行第二喷出工序,按照液滴喷出头组的每一行进行调整。 This embodiment differs from the eighth embodiment in that: in the same row, after all of the first discharging step, second discharging step, adjusted in accordance with each line of the droplet discharge head group.

[0299] 在图14的流程图中,步骤SlOl相当于调整顺序设定工序,是对调整液滴喷出头的喷出量进行调整的顺序进行设定的工序。 [0299] In the flowchart of FIG. 14, corresponds to the adjusting step SlOl order setting step, is to adjust the discharge amount of the droplet ejection head adjustment step of sequentially setting. 接着移至步骤S102。 Subsequently to step S102. 步骤S102相当于移动工序, 是移动滑架,将所测量的液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S102 corresponds to the step movement, the carriage is moved, the measured droplet discharge head moves to step opposed to the place of the weight measuring apparatus. 接着移至步骤S103。 Subsequently to step S103. 步骤S103相当于第一喷出量调整工序,是从一行的液滴喷出头喷出功能液并测量喷出量,对喷出量进行调整的工序。 Step S103 corresponds to a first discharge amount adjusting step, the head is ejected from the functional liquid droplet discharge line and measuring the amount of discharge, the step of adjusting the discharge amount. 接着移至步骤S104。 Subsequently to step S104. 步骤S104相当于判断在同一行内是否对调整预定的喷头全部进行了调整的工序,是判断是否对第一组、第二组、第三组的所有液滴喷出头的喷出量进行了调整的工序。 Step S104 corresponds to the same line is determined whether all of the nozzle to adjust a predetermined adjustment step, determining whether the first group, second group, the amount of discharge liquid droplet ejection head of the third group were all adjusted process. 在存在未进行调整的液滴喷出头组时(否的时候),移至步骤S102。 In the presence of the droplet ejection head no adjustment group (when NO), the process proceeds to step S102. 在步骤S104中,对第一组、第二组、第三组的所有液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S105。 In step S104, the first group, second group, all the amount of discharge liquid droplet ejection head of the third group have been adjusted (a time), the process proceeds to step S105. 步骤S105相当于移动工序,是移动滑架, 将测量的液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S105 corresponds to the step movement, the carriage is moved, the measured droplet discharge head moves to step opposed to the place of the weight measuring apparatus. 接着移至步骤S106。 Subsequently to step S106. 步骤S106相当于第二喷出量调整工序,是对第四组及第五组的所有液滴喷出头的喷出量进行调整的工序。 Step S106 corresponds to a second discharge amount adjusting step, a step of discharging the amount of liquid droplet discharge heads all of the fourth group and the fifth group of adjusting. 接着移至步骤S107。 Subsequently to step S107. [0300] 步骤S107相当于判断同一行内是否对调整预定的喷头全部进行了调整的工序, 是判断是否对第四组及第五组的同一行内的液滴喷出头的喷出量全部进行了调整的工序。 [0300] Step S107 corresponds to predetermined adjustment is determined whether all of the nozzles within the same row adjustment step is to determine whether a droplet in the same row of the fourth group and the fifth group of the amount of discharge of all of the discharge head process adjustment. 在存在未进行调整的液滴喷出头组时(否的时候),移至步骤S105。 In the presence of the droplet ejection head no adjustment group (when NO), the process proceeds to step S105. 在步骤S107中,在对第四组及第五组的同一行内的所有液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S108。 In step S107, when the discharge amount of the liquid droplet discharge head all the same row of the fourth group and the fifth group have been adjusted (a time), the process proceeds to step S108. 步骤S108相当于判断是否对调整预定的喷头全部进行了调整的工序,是判断在步骤SlOl中设定为调整的全部行的液滴喷出头中是否进行了调整的工序。 Step S108 corresponds to the determination of whether to adjust all of the predetermined head adjustment step is to adjust the set is determined of all the droplet ejection head row whether the adjustment process in step SlOl. 在调整预定的液滴喷出头中,存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S102。 Adjusting a predetermined droplet discharge heads, there are (when NO) the droplet is not to adjust the amount of discharge when the discharge head, the process proceeds to step S102. 在步骤S108中,在对调整预定的液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S109。 In step S108, when the entire amount of discharged liquid droplet discharge head is adjusted in a predetermined droplet ejection head is adjusted (a time), the process proceeds to step S109. 步骤S109相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。 Step S109 corresponds to the step of coating, a droplet is discharged toward the substrate and coating step. 如上所述,结束向基板喷出功能液并进行涂覆的制造工序。 As described above, the end of the functional liquid is discharged to the manufacturing process of the substrate and coating.

[0301 ] 接着,利用图5详细说明以下制造方法,即与图14所示的步骤对应,精度优良地对从液滴喷出头喷出的喷出量进行调整并在工件上进行涂覆的制造方法。 [0301] Next, FIG 5 the following detailed description of manufacturing methods, i.e., corresponding to the step shown in FIG. 14, with good accuracy the amount of discharged liquid droplet discharged from the discharge head is adjusted, and coated on the workpiece Production method. 步骤SlOl与图4 所示的步骤Sl同样,故省略说明。 Step SlOl in the step shown in FIG. 4 Sl same explanation is omitted. 在步骤S102中,将第一组83的第一喷头行110移动到与重量测量装置21对置的场所。 In step S102, the first head of the first group 83 of rows 21 pairs 110 is moved to a place opposite to the weight measurement apparatus. 然后在步骤S103中,对从第一组83的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in the step S103, the head of the first liquid droplet from a first group 83 of discharge line 14 110 ejection head 41 can be adjusted.

[0302] 然后在步骤S104中,将第二组84设定为接下来要调整的液滴喷出头组。 [0302] Then, in step S104, the second group of ejection heads 84 is set to be adjusted for the next group of droplets. 接着在步骤S102中,将第二组84的第一喷头行110移动到与重量测量装置21对置的场所。 Next, in step S102, the first head 84 of the second set of rows 110 is moved to place the measurement of the weight 21 pairs of opposing apparatus. 然后在步骤S103中,对从第二组84的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S103, the first liquid droplet from the head 84 of the second set of rows 110 of the discharge head 14 discharge 41 is adjusted. 然后在步骤S104中将第三组85设定为接下来要调整的液滴喷出头组。 Then in a step S104, a third group of ejection heads 85 is set to be adjusted for the next group of droplets. 然后在步骤S102及步骤S103中,对从第三组85的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S102 and step S103, the first liquid droplet from the head 110 of the third group 85 of rows 14 is discharged discharge head 41 can be adjusted. 在接下来的步骤S104中,确认第一组83、第二组84、第三组85的第一喷头行110的调整已经结束。 In the next step S104, it is confirmed first group 83, a second group 84, group 85 of the first row of the third head 110 has ended adjustment.

[0303] 接着在步骤S105中,将第四组86的第一喷头行110移动到与重量测量装置21对置的场所。 [0303] Next, at step S105, the first head 86 of the fourth set of line 110 is moved to place the weight measuring apparatus 21 pairs of opposing. 然后在步骤S106中,对从第四组86的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S106, the first liquid droplet from the head 86 of the fourth set of rows 110 of the discharge head 14 discharge 41 is adjusted. 接着在步骤S107中,将第五组87设定为接着要调整的液滴喷出头组。 Next, at step S107, the fifth group 87 to be adjusted and then set to the droplet discharge head group. 在步骤S105中,将第五组87的第一喷头行110移动到与重量测量装置21对置的场所。 In step S105, the first head 87 of the fifth row group 110 is moved to place the measurement of the weight 21 pairs of opposing apparatus. 然后在步骤S106中,对从第五组87的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S106, the first liquid droplet from the head 87 of the fifth set of 110 rows of discharge head 14 discharge 41 is adjusted. 接着在步骤S107中确认第四组86及第五组87的调整已经结束ο Next step S107 is confirmed in the fourth group 86 and group 87 of the fifth adjustment has ended ο

[0304] 接着在步骤S108中,确认第一喷头行110的液滴喷出头14的调整已经全部进行, 判断是否移至第二喷头行111的液滴喷出头14的调整。 [0304] Next, at step S108, a first acknowledgment droplet ejection head row 110 of the adjustment head 14 has been fully carried out, it is determined whether to move the second droplet ejection head row 111 of the adjustment head 14. 而且,反复进行步骤S102〜步骤S108,进行第二喷头行111的液滴喷出头14的调整。 Further, repeating step S102~ step S108, the head line of the second liquid droplet ejection head 111 is adjusted to 14. 此时,按照第一组83、第二组84、第三组85、第四组86、第五组87的顺序进行液滴喷出头14的调整。 At this time, according to the first group 83, a second group 84, a third group 85, the fourth group 86, a fifth sequence group is 87 to adjust the droplet discharge head 14. 接着,移至第三喷头行112, 按照同样的顺序进行从液滴喷出头14喷出的功能液41的喷出量的调整。 Next, line head 112 moved to a third, a function of adjusting the amount of discharge liquid discharged from the droplet discharge head 41 of the 14 in the same order.

[0305] 而且在调整后,在步骤S109中,根据规定的描绘图案,喷出液滴44,在基板7上进行涂覆。 [0305] Further, after the adjustment, in step S109, in accordance with the drawing pattern by discharging droplets of 44, is coated on the substrate 7. 涂覆预定的描绘图案,结束步骤S109,结束向基板7喷出液滴并进行涂覆的制造工序。 Drawing a predetermined pattern is applied, the end of step S109, the end of the discharge droplets onto the substrate 7 and coating the manufacturing process.

[0306] 如上所述,根据本实施方式,除了第一实施方式的效果⑴〜(5)以外,具有以下的效果。 [0306] As described above, according to the present embodiment, in addition to the effects ⑴~ (5) of the first embodiment has the following effects. [0307] (1)根据本实施方式,在属于同一行的液滴喷出头14中,在测量了位于邻近场所的液滴喷出头14的喷出量后,顺次改变行进行测量。 After [0307] (1) According to the present embodiment, the droplet ejection head 14 belonging to the same row, the discharge amount was measured in places located adjacent the droplet ejection head 14, sequentially changing the measurement line. 在测量液滴喷出头14的喷出量时,在温度被管理的环境内测量液滴喷出头14。 When the discharge head 14 in measuring the amount of discharged droplets, measured in the temperature environment managed droplet discharge head 14. 此时,温度大多以大的周期变动。 At this point, most of the temperature change in a big cycle. 此时,继续对某一液滴喷出头的行内且位于附近的液滴喷出头的喷出量进行调整。 At this time, a certain row continued droplet discharge head and is located near the discharge amount of the droplet ejection head can be adjusted. 因此,同一行内邻近的液滴喷出头14可以利用大致相同温度的影响所产生的误差来调整喷出量。 Thus, in the same row adjacent to the droplet discharge head 14 can affect substantially the same temperature using an error generated by the discharge amount is adjusted.

[0308] (2)根据本实施方式,因为同一行的相邻位置的液滴喷出头14可以利用大致相同温度的影响所产生的误差来调整喷出量,故可以调整为大致相同的喷出量。 [0308] (2) According to the present embodiment, since the same row position adjacent to the droplet ejection head 14 can affect substantially the same temperature using an error generated by the discharge amount is adjusted, it can be adjusted to substantially the same spray the amount. 结果,在液滴喷出头14的扫描方向上可以进行涂覆,而不会形成纵线。 As a result, the scanning direction of the droplet discharge head 14 may be coated, without forming a vertical line.

[0309] (3)根据本实施方式,在步骤S103中在对第一组83的液滴喷出头14的喷出量进行调整时,第二组84的液滴喷出头14与接下来要调整的滑架12并列配置。 [0309] (3) According to the present embodiment, when the step S103 is adjusted in the amount of discharge liquid droplet discharging head 83 of the first group 14, group 84 of the second droplet ejection head 14 and the next to adjust the carriage 12 are arranged in parallel. 而且,接下来要测量的第五喷头列75〜第八喷头列78以与测量时同样的顺序排列待机。 Moreover, the next head to be measured according to a fifth column 75~ eighth head row 78 are arranged to stand with the same measurement sequence. 此时,第六喷头列76及第七喷头列77即使在待机时也被第五喷头列75及第八喷头列78夹持。 In this case, the sixth and seventh nozzle head row 76 column 77 even in the standby fifth head is also listed eighth head column 75 and holder 78. 因此, 第六喷头列76及第七喷头列77可以以温度变化少的方式从待机状态移至调整工序。 Thus, the sixth and seventh nozzle head row 76 column 77 may be a small change in temperature adjustment step manner to move from the standby state. 结果,液滴喷出头14可以在温度变化少的状态下进行调整,因此可以精度优良地进行调整。 As a result, the droplet discharge head 14 can be adjusted in a low temperature state, the accuracy can be excellently adjusted.

[0310](第十实施方式) [0310] (Tenth Embodiment)

[0311] 接着,利用图15对应用上述记载的喷出方法来制造液晶显示装置的一个实施方式进行说明。 [0311] Next, FIG. 15 applying the above described method of discharging the produced liquid crystal display device according to an embodiment will be described.

[0312] 首先,对作为具备滤色器的电光装置的一种的液晶显示装置进行说明。 [0312] First, the liquid crystal electro-optical device is provided as a kind of color filter of a display device will be described. 图15是表示液晶显示装置的结构的概略分解立体图。 FIG 15 is a schematic exploded perspective view showing the structure of the liquid crystal display device.

[0313] 如图15所示,作为电光装置的液晶显示装置120具备透过型的液晶显示面板121、 对液晶显示面板121进行照明的照明装置123。 [0313] As shown in FIG. 15, the liquid crystal electro-optical device as a display apparatus 120 includes a transmission type liquid crystal display panel 121, the liquid crystal panel 121 of the illumination device for illuminating the display 123. 液晶显示面板121配置为以作为第一基板的元件基板1¾与作为第二基板的对置基板125夹持液晶122。 The liquid crystal display panel 121 is configured to 1¾ an element substrate as the first substrate and the second substrate, the counter substrate 125 of the liquid crystal 122 sandwiched. 而且,元件基板IM中的下侧表面上配置由下偏振片126,在对置基板125中的上侧表面上配置有上偏振片127。 Further, the lower member arranged on the side surface of the substrate by the IM polarizer 126, the polarizing plate 127 is disposed on an upper side surface of the counter substrate 125.

[0314] 元件基板IM具备由具有光透过性的材料构成的基板128,基板1¾的上侧形成有绝缘膜129。 [0314] IM device substrate includes a substrate made of a material having light transmission properties 128, the upper substrate 1¾ insulating film 129 is formed. 在绝缘膜1¾上,作为电极的像素电极130形成为矩阵状,各像素电极130上形成有作为具有开关功能的半导体的TFT (Thin Film Transistor)元件131。 1¾ on the insulating film, the pixel electrode 130 are formed in a matrix shape, and a TFT (Thin Film Transistor) serving as a semiconductor element having a switching function 131 of each pixel electrode 130. 而且,TFT元件131的漏极端子连接有像素电极130。 Further, the drain terminal of the TFT element 131 is connected to the pixel electrode 130.

[0315] 包围各像素电极130及TFT元件131且作为布线的扫描线132及作为布线的数据线133形成为格子状。 [0315] surround each pixel electrode 130 and the TFT elements 131 and scanning lines 132 and the wiring line of the data lines 133 formed in a lattice shape. 而且,扫描线132与TFT元件131的栅极端子连接,数据线133与TFT元件131的源极端子连接。 Further, the scanning line 132 is connected to the gate terminal of the TFT element 131, the data line 133 connected to the source terminal of the TFT element 131.

[0316] 而且,在由像素电极130、TFT元件131、扫描线132、数据线133等构成的元件层134的液晶122侧形成有取向膜135。 [0316] Further, an alignment film 135 is formed on the liquid crystal layer 122 side of the element by the pixel electrode 130, TFT elements 131, scan line 132, data line 133 or the like 134.

[0317] 对置基板125具备由具有光透过性的材料构成的基板137。 [0317] The counter substrate 125 includes a substrate made of a material having light transmission properties 137. 在基板137的下侧,由具有遮光性的材料构成的下层围堰138形成为格子状,下层围堰138的下侧形成有由有机化合物等构成的上层围堰139。 In the lower substrate 137, a lower layer made of a material having a light shielding property cofferdam cofferdam 138 is formed by the upper layer composed of an organic compound 139 is formed like a lattice shape under the lower side 138 of the cofferdam. 而且,由下层围堰138及下层围堰139构成隔壁部分140。 Further, the lower layer 138 and the lower cofferdam cofferdam 139 constituting the partition wall portion 140.

[0318] 在被隔壁部分140划分为矩阵状的凹部中,作为着色层141,形成有红(R)、绿(G)、 蓝(B)的滤色器141R、141G、141B。 [0318] In the recess is divided into a partition wall portion 140 in a matrix, a colored layer 141, formed of red (R), green (G), blue (B) color filters 141R, 141G, 141B. 而且,形成有作为覆盖隔壁部分140和滤色器141R、 141GU41B的平坦化层的外涂层142。 Further, as the cover is formed with a partition wall portion 140 and the color filter 141R, the planarization layer 142 141GU41B an outer coating. 以覆盖该外涂层142的方式形成有由ITOQndium Tin Oxide)等透明导电膜构成且作为电极的对置电极143。 To cover the overcoat layer 142 is formed with a counter electrode composed ITOQndium Tin Oxide) transparent conductive film and an electrode 143. 进而在对置电极143的液晶122侧形成有取向膜144。 Further alignment film 144 is formed on the counter electrode 122 side of the liquid crystal 143. 在取向膜144与取向膜135上,沟槽状的凹凸排列形成,液晶122沿凹凸排列形成。 On the alignment film 144 and the alignment film 135, arranged in groove-shaped irregularities are formed, the liquid crystal 122 are arranged along the irregularities formed.

[0319] 液晶122具有以下性质,即在夹持该液晶122的像素电极130与对置电极143上施加电压,则液晶122的倾斜角度变化,通过TFT元件131的开关动作,控制施加在液晶122 上的电压,控制液晶122的倾斜角度,按照每个像素进行使光透过或遮断光的动作。 [0319] The liquid crystal 122 has the following properties, i.e., the pixel electrode 122 sandwich the liquid crystal 130 and applying a voltage to the opposing electrode 143, the inclination angle of the liquid crystal 122 changes, through the switching operation of the TFT element 131, the control is applied to the liquid crystal 122 voltage controls the tilt angle of the liquid crystal 122, the light transmitted through or operated blocking of light for each pixel. 这样, 通过TFT的开关动作,通过使液晶122作为快门动作,从而按照每个像素控制光的透过,通过使像素亮灭,从而可以显示视频。 Thus, by the switching operation of the TFT, the liquid crystal 122 by a shutter operation, thereby controlling the light transmitted through each pixel, pixel by blinking, so that the video can be displayed.

[0320] 像素电极130与TFT元件131的漏极端子电连接,通过使TFT仅在一定期间内为导通状态,从而从数据线133供给的像素信号以规定的定时被提供给各像素电极130。 [0320] The pixel electrode 130 is electrically connected to the drain terminal of the TFT element 131 through the TFT to a conducting state only within a certain period, so that the pixel signals supplied from the data line 133 is supplied to each pixel electrode 130 at a predetermined timing . 这样, 提供给像素电极130的规定强度的像素信号的电压电平在对置基板125的对置电极143与像素电极130之间被维持,根据像素信号的电压电平,液晶122的光透过量变化。 Thus, the voltage level supplied to the pixel signal of the predetermined intensity of the pixel electrode 130 is maintained between the counter electrode 143 pixel electrode 125 counter substrate 130, according to the light level of the pixel signal voltage, the liquid crystal 122 through the amount Variety.

[0321] 照明装置123具备光源,备有可以向液晶显示面板121射出来自该光源的光的导光板或扩散板、反射板等。 [0321] The lighting device 123 includes a light source, with the liquid crystal display panel 121 can be emitted from the light guide plate or the diffusion plate, a reflection plate light from the light source and the like. 光源可以采用白色的LED、EL、冷阴极射线管等,在本实施方式中采用冷阴极射线管。 The light source may be used white LED, EL, cold cathode ray tube, cold cathode ray tube according to the present embodiment.

[0322] 再有,下偏振片1¾及上偏振片127也可以组合用于改善视角依存性等的相位差薄膜等光学功能性薄膜。 [0322] Further, the polarizer and the lower polarizer 127 1¾ may be combined for improving the viewing angle dependence of the retardation film and the like and other optical functional film. 液晶显示面板121,作为有源元件并未限于TFT元件,也可以具有TFD(Thin Film Diode)元件,也可以是配置为构成像素的电极互相交叉的无源型的液晶显 The liquid crystal display panel 121, elements are not limited to the TFT as an active element may have a TFD (Thin Film Diode) element, it may be configured as a pixel electrode constituting the interdigitated passive type liquid crystal display

示装置。 Display device.

[0323] 在形成对置基板125的滤色器141R、141G、141B的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0323] In the color filter 141R is formed on the counter substrate 125, 141G, 141B in the step, using a first discharging method of the ninth embodiment to the embodiment described. 具体是,在基板137上形成下层围堰138及上层围堰139,形成隔壁部分140。 Specifically, the lower layer is formed on the substrate 138 and the upper layer banks 137 cofferdam 139, the partition wall portion 140 is formed. 隔壁部分140的形成方法是公知的,故省略说明。 The method of forming the partition wall portion 140 are well known, description thereof is omitted. 而且,通过将滤色器141R、 141GU41B的材料溶解在溶剂中或分散在分散剂中,从而制造各种颜色的彩墨。 Further, the color filters 141R, 141GU41B material dissolved in a solvent or dispersed in a dispersant, to produce a variety of colors of color ink. 接着,利用液晶喷出装置1或液滴喷出装置108,向被隔壁部分140包围的凹部喷出该彩墨并进行涂覆。 Next, the discharge device 1 or the liquid crystal droplet ejection apparatus 108, the color ink is ejected to a recessed portion surrounded by the partition wall portion 140 and coating.

[0324] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行彩墨的喷出并进行涂覆。 [0324] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging color ink and coating. 然后,通过加热干燥所涂覆的彩墨并使之固化,从而形成滤色器141R、141G、141B。 Then, by heating the dried color ink coated and cured, thereby forming the color filters 141R, 141G, 141B.

[0325] 进而,在对置基板125中,在外涂层142的下侧形成对置电极143的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0325] Further, the step counter electrode 143 is formed on the counter substrate 125, the lower side of the outer coating layer 142, a discharging method using the first embodiment to the ninth embodiment. 具体是,通过将对置电极143的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, the counter electrode 143 by the material dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向外涂层142的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, outer surface 142 of the coating of the discharge electrode film and the liquid coating material.

[0326] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0326] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成对置电极143。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the counter electrode 143.

[0327] 然后,在对置基板125中,在对置电极143的下侧形成取向膜144的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Discharging the first embodiment to the ninth embodiment of the method of the step [0327] Then, the counter substrate 125, the alignment film is formed on the lower side 143 of the counter electrode 144 employed. 具体是,通过将取向膜144的材料溶解在溶剂中或分散在分散剂中,从而制造取向膜的材料液体。 Specifically, the alignment film 144 by a material dissolved in a solvent or dispersed in a dispersant, to produce a liquid alignment film material. 接着,利用液滴喷出装置1或液滴喷出装置108,向对置电极143的下侧喷出该取向膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the orientation of discharge to the lower side of the counter electrode film 143 and the liquid material is coated. 以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行取向膜的材料液体的喷出并进行涂覆。 After a first discharge amount of the first embodiment to the ninth embodiment and a second step of adjusting the discharge amount adjusting step of the same step, the amount of discharge of the droplet discharge head 14 is adjusted, alignment film the discharged liquid material and coated. 然后,通过加热干燥所涂覆的取向膜的材料液体并使之固化,从而形成取向膜144。 Then, the liquid material is dried by heating the coated alignment film and cured, thereby forming the alignment film 144.

[0329] 还有,在元件基板124的元件层134上形成扫描线132及数据线133的布线的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0329] Further, the wiring step of scanning lines 132 and the data line 133 is formed on the element layer 134 in the element substrate 124, using the method of discharging the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成布线的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, so that the wiring spaces formed a concave portion. 而且,通过将布线的材料溶解在溶剂中或分散在分散剂中,从而制造布线的材料液体。 Further, the wiring material is dissolved in a solvent or dispersed in a dispersant to produce a liquid wiring material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该布线的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material is ejected to the recessed portion of the wiring is formed between the coating and the cofferdam.

[0330] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行布线的材料液体的喷出并进行涂覆。 [0330] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the wiring for discharging a liquid material and coated. 然后,通过加热干燥所涂覆的布线的材料液体并使之固化,从而形成扫描线132及数据线133。 Then, by heating and drying the applied liquid material of the wiring and cured, thereby forming the scanning lines 132 and the data line 133.

[0331] 进而,在元件基板124中,在元件层1;34上形成TFT元件131的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0331] Further, in the element substrate 124, the element layer 1; step 131 is formed on the TFT element 34, the discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成TFT元件131 的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, TFT elements formed a concave portion 131 in place. 而且通过将硅等TFT元件的材料溶解在溶剂中或分散在分散剂中,从而制造TFT元件的材料液体。 And passing the material such as silicon TFT element is dissolved or dispersed in a solvent in the dispersant, thereby constituting the TFT element of the liquid material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该TFT元件的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the discharge of the TFT element is formed in the concave portion between the dam material and the coating liquid.

[0332] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行TFT元件的材料液体的喷出并进行涂覆。 [0332] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the TFT element is coated. 然后,加热干燥所涂覆的TFT元件的材料液体并使之固化、结晶化。 Then, heating and drying the applied liquid material of the TFT element and cured, crystallized. 然后在离子掺杂后通过形成绝缘膜及端子,从而形成TFT元件131。 Then, after the ion doping terminal insulating film is formed, thereby forming a TFT element 131.

[0333] 再有,在元件基板124中,在元件层134的表面形成像素电极130的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0333] Further, in the element substrate 124, the step of forming the pixel electrode 130 in the surface of the element layer 134, using the method of discharging the first embodiment to the ninth embodiment. 具体是,通过将像素电极130的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, by the material of the pixel electrode 130 is dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向元件层134的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film is discharged to the surface of the element layer 134 and the liquid material is coated.

[0334] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0334] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成像素电极130。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the pixel electrode 130.

[0335] 然后,在元件基板124中,在元件层134的上侧形成取向膜135的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Discharging the first embodiment to the ninth embodiment of the method employed in Step [0335] Then, the element substrate 124, the alignment film 135 is formed on the element layer 134 side. 具体是,通过将取向膜135的材料溶解在溶剂中或分散在分散剂中,从而制造取向膜的材料液体。 Specifically, the alignment film 135 by a material dissolved in a solvent or dispersed in a dispersant to produce a liquid alignment film material. 接着,利用液滴喷出装置1或液滴喷出装置108,向元件层134的上侧喷出该取向膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the discharge side of the element layer 134 onto the alignment film and the liquid coating material.

[0336] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行取向膜的材料液体的喷出并进行涂覆。 [0336] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging the liquid material and the alignment film coating. 然后,通过加热干燥所涂覆的取向膜的材料液体并使之固化,从而形成取向膜1;35。 Then, the liquid material is dried by heating the coated alignment film and cured to form an alignment film 1; 35.

[0337] 进而,为了使元件基板124与对置基板125夹持液晶122,在元件基板IM上涂覆液晶122的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0337] Further, in order to make the element substrate 124 and the counter substrate 125 sandwiching the liquid crystal 122, the liquid crystal element is coated on the substrate IM in step 122, using the discharge method of the first embodiment to ninth embodiment. 具体是,利用液滴喷出装置1或液滴喷出装置108,向取向膜135的上侧喷出该液晶的材料液体并进行涂覆。 Specifically, using a liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharged to the upper side of the liquid crystal alignment film 135 and coated.

[0338] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行液晶的材料液体的喷出并进行涂覆。 [0338] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging a liquid crystal material and coated.

[0339] 如上所述,根据本实施方式,具有以下效果。 [0339] As described above, according to the present embodiment has the following effects.

[0340] (1)根据本实施方式,在制造滤色器141R、141G、141B的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使彩墨的喷出量精度优良的方式进行喷出、涂覆。 [0340] (1) According to the present embodiment, in the manufacture of color filters 141R, 141G, 141B of the step, the discharge method by the embodiment to ninth embodiment employs the first embodiment, so as to make the color ink jet the amount of excellent discharge precision manner, coating. 因此,可以制造以使彩墨的涂覆量精度优良的方式被涂覆的滤色器141R、141G、 141B。 Thus, a color filter can be manufactured so that the accuracy of color ink coating amount in an excellent manner coated 141R, 141G, 141B.

[0341] (2)根据本实施方式,在制造取向膜135、144的工序中,通过采用第一实施方式〜 第九实施方式中的喷出方法,从而可以以使取向膜的材料的喷出量精度优良的方式进行喷出、涂覆。 Discharging [0341] (2) According to the present embodiment, in the step of manufacturing the alignment films 135,144 through the ejection method to ninth embodiment employs the first embodiment, so that the alignment film may be a material excellent accuracy way discharge amount coated. 因此,可以制造以使取向膜的材料的涂覆量精度优良的方式被涂覆的取向膜135、 144。 Therefore, accuracy can be manufactured in a coating amount of the alignment film material coated in an excellent manner alignment film 135, 144.

[0342] (3)根据本实施方式,在涂覆液晶的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使液晶的喷出量精度优良的方式进行喷出、涂覆。 [0342] (3) According to the present embodiment, in the step of coating the liquid crystal, the method by discharging the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be excellent in the accuracy of the liquid crystal way discharge coating. 因此,可以制造以使液晶的涂覆量精度优良的方式被涂覆的液晶显示装置120。 Accordingly, the coated amount can be manufactured in an excellent manner the accuracy of the liquid crystal coated liquid crystal display device 120.

[0343] (4)根据本实施方式,在制造像素电极130及对置电极143的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 [0343] (4) According to this embodiment, in the manufacturing step and the pixel electrode 130 pairs of opposing electrode 143 by the discharge method to ninth embodiment employs the first embodiment, thereby to make the electrode material ejection the amount of excellent discharge precision manner, coating. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的像素电极130及对置电极143。 Thus, can be manufactured such that the coating amount of the electrode material excellent in accuracy pixel electrode 130 is coated and the counter electrode 143.

[0344] (5)根据本实施方式,在制造扫描线132及数据线133的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使布线材料的喷出量精度优良的方式进行喷出、涂覆。 [0344] (5) According to the present embodiment, in the step for producing the scan line 132 and data line 133, a discharge method by the embodiment to ninth embodiment employs the first embodiment, thereby to cause the ejection of the wire material excellent accuracy way discharge amount coated. 因此,可以制造以使布线材料的涂覆量精度优良的方式被涂覆的扫描线132 及数据线133。 Thus, the wiring can be manufactured with good accuracy the amount of coating material is coated manner scan lines 132 and data lines 133.

[0345] (6)根据本实施方式,在制造TFT元件131的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使半导体材料的喷出量精度优良的方式进行喷出、 涂覆。 [0345] (6) According to the present embodiment, in the step of manufacturing the TFT element 131, the discharge method by the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be a semiconductor material having excellent accuracy way discharge, coating. 因此,可以制造以使半导体材料的涂覆量精度优良的方式被涂覆的TFT元件131。 Thus, it can be manufactured such that the coating amount of the semiconductor material excellent in accuracy of the TFT element 131 are coated.

[0346](第十一实施方式) [0346] (Eleventh Embodiment)

[0347] 接着,利用图16,对应用上述记载的喷出方法制造有机EL装置的一个实施方式进行说明。 [0347] Next, FIG. 16, for applying the method of discharging according to an embodiment of manufacturing the organic EL device will be described.

[0348] 首先,对作为电光装置的一种的有机EL装置进行说明。 [0348] First, an organic EL device as an electro-optical device will be described. 图16是表示有机EL装置的结构的概略分解立体图。 FIG 16 is a schematic exploded perspective view showing the structure of the organic EL device.

[0349] 如图16所示,作为电光装置的有机EL装置147具备基板148。 [0349] As shown in FIG. 16, the organic EL device as electro-optical device 147 includes a substrate 148. 基板148的上侧形成有绝缘膜149。 Upper substrate 148 is an insulating film 149 is formed. 在绝缘膜149上,接触电极150形成为矩阵状,在与各接触电极150邻接的场所,形成有作为具有开关功能的半导体的TFT元件151。 On the insulating film 149, the contact electrode 150 is formed in a matrix shape, with each of the contact places adjoining electrodes 150, 151 are formed with a TFT as a semiconductor element having a switching function. 而且,TFT元件151的漏极端子上连接有接触电极150。 Further, the contact electrode 150 is connected to the drain terminal of the TFT element 151.

[0350] 作为布线的扫描线152及作为布线的数据线153以包围各接触电极150及TFT元件151的方式形成为格子状。 [0350] As the scanning wiring lines 152 and the data line 153 as a wiring electrode to surround the contact element 150 and TFT 151 are formed in a lattice shape. 而且,扫描线152与TFT元件151的栅极端子连接,数据线153与TFT元件151的源极端子连接。 Further, the scanning line 152 is connected to the gate terminal of the TFT element 151, the data line 153 connected to the source terminal of the TFT element 151.

[0351] 并且,形成有由接触电极150、TFT元件151、扫描线152、数据线153等构成的元件层154。 [0351] Further, there is a contact electrode element layer 150, TFT elements 151, 152 scan lines, the data lines 153 and the like 154 is formed. 元件层154的上侧形成绝缘膜155,在绝缘膜155的上侧,围堰156形成为格子状。 The upper layer member 154 is formed of an insulating film 155, the insulating film 155 on the side of the cofferdam 156 is formed in a lattice shape.

[0352] 在由围堰156形成的凹状区域的各底部,形成作为电极的像素电极157,像素电极157与接触电极150电连接。 [0352] in the bottom of the concave region is formed by a cofferdam 156, is formed as the pixel electrode 157, the pixel electrode 157 is electrically connected to the contact electrode 150. 在像素电极157的上表面形成作为发光元件的空穴输送层158,在空穴输送层158的上面形成有作为发光元件的发光层159R、159G、159B。 It is formed on the surface of the pixel electrode 157 as a hole transporting layer, the light emitting element 158, light emitting layer 159R is formed as a light emitting element in the above hole transport layer 158, 159G, 159B. 而且,由空穴输送层158与发光层159R、159G、159B形成作为发光元件的功能层160。 Further, a hole transport layer 158 and the light emitting layer 159R, 159G, 159B function as a light emitting element layer 160 is formed.

[0353] 发光层159R是由发出红色光的有机发光材料等构成的发光层,作为发光元件的发光层159G是由发出绿色光的有机发光材料等构成的发光层。 [0353] emitting layer 159R is formed of a light-emitting layer that emits red light, an organic light emitting material, the light emitting layer as a light emitting element 159G is a light emitting layer of an organic light emitting material which emits green light configuration. 同样,作为发光元件的发光层159B是由发出蓝色光的有机发光材料构成的发光层。 Similarly, the light-emitting layer of the light emitting element 159B is formed of a light-emitting layer emits blue light of the organic light emitting material.

[0354] 在功能层160及围堰156上侧的整个面上,形成有由具有光透过性的导电性材料等构成且作为电极的阴极161。 [0354] In 160 and 156 on the entire surface side of the cofferdam functional layer is formed made of a conductive material having optical transparency and a cathode 161 as an electrode. 在本实施方式中,阴极161例如采用ΙΤ0。 In the present embodiment, the cathode 161 uses e.g. ΙΤ0.

[0355] 在阴极161的上表面上,形成由具有光透过性的材料等构成的密封膜162,防止阴极161及功能层160被空气中的氧气氧化。 [0355] On the upper surface of the cathode 161, is formed by a sealing film 162 made of material having light transmission properties, preventing oxygen oxidation of the cathode 161 and the functional layer 160 is air.

[0356] 在像素电极157与阴极161之间施加电压时,空穴输送层158仅流动空穴。 [0356] When a voltage is applied between the pixel electrode 157 and the cathode 161, a hole transport layer 158 is only the flow of holes. 而且, 发光层159R、159G、159B具有利用从空穴输送层158供给的空穴和从阴极161供给的电子结合时的能量发光的性质。 Further, the light emitting layers 159R, 159G, 159B has a property of binding energy utilization holes supplied from the hole transport layer 158 and an electron supplied from the cathode 161 to emit light. TFT元件151进行开关动作,控制施加在功能层160上的电压, 从而控制发光层159R、159G、159B发出的光量。 TFT element 151 for switching operation, the control voltage applied to the functional layer 160 so as to control the light emitting layers 159R, 159G, 159B amount of light emitted. 这样,通过控制发光层159R、159G、159B发出的光量,从而可以按照每个像素来控制光量,通过使像素亮灭,从而可以显示视频。 Thus, by controlling the light emitting layers 159R, 159G, 159B amount of light emitted can be controlled so that the amount of light for each pixel, by blinking the pixel, the video can be displayed.

[0357] 像素电极157与TFT元件151的漏极端子电连接,通过使TFT仅在一定期间为导通状态,从而从数据线153供给的像素信号以规定的定时向各像素电极157提供。 [0357] The pixel electrode 157 is electrically connected to the drain terminal of the TFT element 151, the timing of each pixel electrode through the TFT for a predetermined period of conductive state, so that the pixel signals supplied from the data line 153 to provide a predetermined 157. 这样,提供给像素电极157的规定强度的像素信号的电压电平在阴极161与像素电极157之间被维持,根据像素信号的电压电平,发光层159R、159G、159B发出的光量变化。 Thus, the voltage level supplied to the pixel signal of the predetermined intensity of the pixel electrode 157 is maintained between the cathode electrode 161 and the pixel 157, the pixel signal voltage levels, a light emitting layer 159R, 159G, 159B changes the amount of light emitted.

[0358] 在元件层巧4上形成扫描线152及数据线153的布线的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0358] wiring lines 152 and the step of scanning the data line 153 is formed on the element layer 4 Qiao, the discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成布线的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, so that the wiring spaces formed a concave portion. 而且通过将布线的材料溶解在溶剂中或分散在分散剂中,从而制造布线的材料液体。 But also through the wiring material is dissolved in a solvent or dispersed in a dispersant to produce a liquid wiring material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该布线的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material is ejected to the recessed portion of the wiring is formed between the coating and the cofferdam.

[0359] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行布线的材料液体的喷出并进行涂覆。 [0359] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the wiring for discharging a liquid material and coated. 然后,通过加热干燥所涂覆的布线的材料液体并使之固化,从而形成扫描线152及数据线153。 Then, by heating and drying the applied liquid material of the wiring and cured, thereby forming the scanning lines 152 and the data line 153.

[0360] 进而,在元件层巧4上形成TFT元件151的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0360] Further, formed on the TFT element layer Qiao element 4 step 151, using the method of discharging a first embodiment to the ninth embodiment of. 具体是,用绝缘膜形成围堰,使形成TFT元件151的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, TFT elements formed a concave portion 151 in place. 而且通过将硅等TFT元件的材料溶解在溶剂中或分散在分散剂中,从而制造TFT元件的材料液体。 And passing the material such as silicon TFT element is dissolved or dispersed in a solvent in the dispersant, thereby constituting the TFT element of the liquid material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该TFT元件的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the discharge of the TFT element is formed in the concave portion between the dam material and the coating liquid.

[0361] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行TFT元件的材料液体的喷出并进行涂覆。 [0361] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the TFT element is coated. 然后,加热干燥所涂覆的TFT元件的材料液体并使之固化、结晶化。 Then, heating and drying the applied liquid material of the TFT element and cured, crystallized. 然后在离子掺杂后通过形成绝缘膜及端子,从而形成TFT元件151。 Then, after the ion doping terminal insulating film is formed, thereby forming a TFT element 151.

[0362] 再有,在绝缘膜155的表面形成像素电极157的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0362] Further, the pixel electrode 157 is formed in the step surface of the insulating film 155, using the method of discharging the first embodiment to the ninth embodiment. 具体是,通过将像素电极157的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, the material of the pixel electrode 157 is dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向绝缘膜155的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film is discharged to the surface of the insulating film 155 and the liquid material is coated.

[0363] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0363] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成像素电极157。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the pixel electrode 157.

[0364] 然后,在像素电极157的表面形成空穴输送层158的工序中采用第一实施方式〜 第九实施方式中的喷出方法。 [0364] Then, the pixel electrode 157 is formed on the surface of the discharging method of the first embodiment to the ninth embodiment of the step 158 using the hole transport layer. 具体是,通过将作为发光元件形成材料的空穴输送层158的材料溶解在溶剂中或分散在分散剂中,从而制造空穴输送层的材料液体。 Specifically, the material of the hole transport layer material 158 is formed as a light emitting element is dissolved in a solvent or dispersed in a dispersant to produce a liquid material, the hole transport layer. 接着,利用液滴喷出装置1或液滴喷出装置108,向像素电极157的表面喷出该空穴输送层的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharge hole transport layer to the surface of the pixel electrode 157 and coated.

[0365] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行空穴输送层的材料液体的喷出并进行涂覆。 [0365] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging the liquid material and the hole transport layer is coated. 然后,通过加热干燥所涂覆的空穴输送层的材料液体并使之固化,从而形成空穴输送层158。 Then, the liquid material is dried by heating the coated hole transport layer and cured to form a hole transport layer 158.

[0366] 进而,在空穴输送层158的表面形成发光层159R、159G、159B的工序中采用第一实施方式〜第九实施方式中的喷出方法。 [0366] Further, the light emitting layer 159R is formed on the surface of the hole transport layer 158, 159G, discharge method in the first embodiment to ninth embodiment employed in step 159B. 具体是,通过将作为发光元件形成材料的发光层159R、159G、159B的材料溶解在溶剂中或分散在分散剂中,从而制造发光层的材料液体。 Specifically, the light emitting layer 159R is formed as a light emitting material, the elements, materials, 159G, 159B is dissolved in a solvent or dispersed in a dispersant, a liquid material to produce the light emitting layer. 接着,利用液滴喷出装置1或液滴喷出装置108,向空穴输送层158的表面喷出该发光层的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharged to the surface of the light emitting layer and the hole transport layer 158 is coated.

[0367] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行发光层的材料液体的喷出并进行涂覆。 [0367] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging a liquid material and a light-emitting layer is coated. 然后,通过加热干燥所涂覆的发光层的材料液体并使之固化,从而形成发光层159R、159G、159B。 Then, the liquid material by heating the light-emitting layer and drying the coated cured, thereby forming the light emitting layers 159R, 159G, 159B.

[0368] 再有,在功能层160及围堰156的上表面形成阴极161的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0368] Further, the step of forming a cathode 161 on the surface of the functional layer 160 and the cofferdam 156, the discharging method using the first embodiment to the ninth embodiment. 具体是,通过将阴极161的材料溶解在溶剂中或分散在分散剂中,从而制造阴极的材料液体。 Specifically, the cathode 161 material was dissolved in a solvent or dispersed in a dispersant to produce a liquid cathode material. 接着,利用液滴喷出装置1或液滴喷出装置108,向功能层160及围堰156的上表面喷出该阴极的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection device 108, is ejected onto the surface of the cathode functional layer 160 and the cofferdam 156 and the liquid material is coated.

[0369] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行阴极的材料液体的喷出并进行涂覆。 [0369] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging a liquid material and a cathode coated. 然后,通过加热干燥所涂覆的阴极的材料液体并使之固化,从而形成阴极161。 Then, by heating and drying the applied liquid cathode material and cured, to form a cathode 161.

[0370] 如上所述,根据本实施方式,具有以下效果。 [0370] As described above, according to the present embodiment has the following effects.

[0371] (1)根据本实施方式,在制造扫描线152及数据线153的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使布线材料的喷出量精度优良的方式进行喷出、涂覆。 [0371] (1) According to the present embodiment, in the step for producing the scan line 152 and data line 153 by ejection method to ninth embodiment employs the first embodiment, thereby to cause the ejection of the wire material excellent accuracy way discharge amount coated. 因此,可以制造以使布线材料的涂覆量精度优良的方式被涂覆的扫描线152 及数据线153。 Thus, the wiring can be manufactured with good accuracy the amount of coating material is coated manner scan lines 152 and data lines 153.

[0372] (2)根据本实施方式,在制造TFT元件151的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使半导体材料的喷出量精度优良的方式进行喷出、 涂覆。 [0372] (2) According to the present embodiment, in the step of manufacturing the TFT element 151, the discharge method by the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be a semiconductor material having excellent accuracy way discharge, coating. 因此,可以制造以使半导体材料的涂覆量精度优良的方式被涂覆的TFT元件151。 Thus, it can be manufactured such that the coating amount of the semiconductor material excellent in accuracy of the TFT element 151 is coated.

[0373] (3)根据本实施方式,在制造像素电极157及阴极161的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 [0373] (3) According to the present embodiment, in the manufacturing step of the pixel electrode 157 and the cathode 161, by ejecting method embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be an electrode material excellent discharge accuracy way, coating. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的像素电极157及阴极161。 Thus, it can be manufactured such that the coating amount of the electrode material excellent in accuracy pixel electrode 157 and a cathode coated 161.

[0374] (4)根据本实施方式,在制造功能层160的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使发光元件形成材料的喷出量精度优良的方式进行喷出、涂覆。 [0374] (4) According to this embodiment, in the step of producing the functional layer 160 by discharging a method to ninth embodiment employs the first embodiment, the light emitting element can be formed so that the accuracy of the amount of material discharged excellent discharging way, coating. 因此,可以制造以使发光元件形成材料的涂覆量精度优良的方式被涂覆的功能层160。 Thus, the light emitting element may be manufactured such that the functional layer 160 is formed accuracy of the amount of coating material coated in an excellent manner.

[0375](第十二实施方式) [0375] (Twelfth Embodiment)

[0376] 接着,利用图17对应用上述记载的喷出方法制造表面电场显示装置的一个实施方式进行说明。 [0376] Next, using the above described method of FIG ejection of manufacturing the RESURF 17 illustrates an embodiment of the apparatus will be described.

[0377] 首先,对作为电光装置的一种的表面电场显示装置进行说明。 [0377] First, the surface of the electrical field of the electro-optical device as a display device will be described. 图17是表示表面电场显示装置的结构的概略分解立体图。 FIG 17 is a schematic exploded perspective view showing the structure of the surface electric field display device.

[0378] 如图17所示,作为电光装置的表面电场显示装置163主要由元件基板164与对置基板165构成。 As shown in [0378] 17, as a display surface electric field of the electro-optical device 163 is mainly constituted by the element substrate and the counter substrate 164 pairs 165. 而且,元件基板164具备基板166。 Further, the substrate 164 includes a substrate element 166. 基板166之上形成有绝缘膜167。 167 is formed over the substrate 166 with an insulating film. 在绝缘膜167上,成对的大致圆形且作为电极的电子发射元件168形成为矩阵状,在一方电子发射元件168不起作用时,另一方电子发射元件168动作。 On the insulating film 167, and a pair of substantially circular shape as an electrode when the electron emission element 168 is formed in a matrix shape, one electron emitting element 168 does not work, the other of the electron-emitting element 168 operation. 作为布线的扫描线169及作为布线的数据线170以包围各电子发射元件168的对的方式形成为格子状。 Scanning lines 169 and the wiring line of the data lines 170 so as to surround each of the electronic emission element 168 is formed in a lattice shape. 一对数据线170配置于电子发射元件168的对之间。 Pair of data lines 170 arranged between the electron-emitting element 168.

[0379] 电子发射元件168被通过中心的线一分为二,电子发射元件168的一方与扫描线169连接。 [0379] electron-emitting element 168 is through the center line into two, one of the electron emitting element 168 is connected to the scanning line 169. 而且,电子发射元件168的另一方与数据线170连接。 Further, the electron-emitting element 168 and the other of the data line 170 is connected. 由该电子发射元件168、 扫描线169、数据线170等构成元件层171。 Emitting element 168, the scanning lines 169, data lines 170 and the like by the electronic element layer 171.

[0380] 对置基板165具备由光透过性材料构成的基板172。 [0380] includes a substrate 172 made of a light transmissive material 165 on the counter substrate. 而且,在基板172的下侧,形成有由光透过性材料构成且作为电极的阳极173。 Further, the lower substrate 172 is formed of a light transmissive material and configured as an anode electrode 173. 阳极173的下表面形成有作为发光元件的彩色荧光膜174,以覆盖彩色荧光膜174与阳极173的方式形成有保护膜175。 The lower surface of the anode 173 is a color fluorescent film is formed as a light emitting element 174, so as to cover the colored fluorescent film 174 and the anode 173 is formed on the protective film 175.

[0381] 元件基板164与对置基板165隔着未图示的衬垫接合,元件基板164与对置基板165之间被脱气而成为大致真空的状态。 [0381] The element substrate 164 and the counter substrate 165 via a spacer (not shown) engaging the element substrate 164 and the counter substrate is degassed 165 becomes substantially vacuum state.

[0382] 在电极被一分为二的电子发射元件168中,在两个电极间施加电压时,由于电极间的间隙变窄,故微小的电子通过两个电极间。 [0382] is divided into two electrodes in the electron emitting element 168, when a voltage is applied between two electrodes, the gap between the electrodes is narrowed, so that electrons pass through the minute between two electrodes. 而且,通过在电子发射元件168与阳极173 之间施加电压,从而在形成电场时,电磁力对通过两个电极间的电子起作用,从而电子向阳极173移动。 Further, by applying the electron emission element 168 and the voltage between the anode 173, thereby forming an electric field, an electromagnetic force between the two electrodes by an electronic function, such that movement of electrons toward the anode 173.

[0383] 向阳极173移动的电子的一部分与彩色荧光膜174碰撞。 [0383] portion 173 to the anode the electrons collide with the movement of the color fluorescent film 174. 彩色荧光膜174因为将电子的碰撞产生的能量转换为光而发光。 Color because the fluorescent film 174 to convert collision energy electrons generated light to emit light. 表面电场显示装置163具备未图示的数据电压驱动电路与扫描电压驱动电路,数据电压驱动电路及扫描电压驱动电路控制施加在电子发射元件168上的电压。 The display device 163 includes a surface electric field (not shown) of the data voltage driver circuit and the scan voltage driving circuit, a data voltage driver circuit and the scan voltage control circuit driving voltage is applied to the electron emission element 168. 由于施加在电子发射元件168上的电压和彩色荧光膜174发出的光量存在正的相关,故数据电压驱动电路及扫描电压驱动电路能控制彩色荧光膜174发出的光量。 In the electron emission due to the application of a positive voltage and a related quantity of light color fluorescent film 174 on the element 168 is emitted, so the data voltage driver circuit and the scan voltage drive circuit can control the amount of light emitted by color fluorescent film 174.

[0384] 而且,数据电压驱动电路及扫描电压驱动电路通过按照每个像素控制光量,使像素亮灭,从而可以显示视频。 [0384] Further, the data voltage driver circuit and the scan voltage drive circuit by controlling the amount of light for each pixel, the pixel blinking, so that the video can be displayed. 彩色荧光膜174中配置有发出红色、蓝色、绿色各种颜色光的各种颜色荧光膜,数据电压驱动电路及扫描电压驱动电路通过选择并控制所发出的光的颜色,从而可以显示彩色图像。 Colored fluorescent film 174 is arranged to emit red, blue, green fluorescent film of various colors of light of various colors, the data voltage driver circuit and the scan driving voltage and the control circuit by selecting the color of light emitted, thereby displaying a color image .

[0385] 在元件层171上形成扫描线169及数据线170的布线的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 [0385] wiring lines 169 and the step of scanning the data line 170 is formed on the element layer 171, a discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成布线的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, so that the wiring spaces formed a concave portion. 而且通过将布线的材料溶解在溶剂中或分散在分散剂中,从而制造布线的材料液体。 But also through the wiring material is dissolved in a solvent or dispersed in a dispersant to produce a liquid wiring material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该布线的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material is ejected to the recessed portion of the wiring is formed between the coating and the cofferdam.

[0386] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行布线的材料液体的喷出并进行涂覆。 [0386] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the wiring for discharging a liquid material and coated. 然后,通过加热干燥所涂覆的布线的材料液体并使之固化,从而形成扫描线169及数据线170。 Then, by heating and drying the applied liquid material of the wiring and cured, thereby forming the scanning lines 169 and the data line 170.

[0387] 进而,在元件层171上形成电子发射元件168的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Step 168 [0387] Further, the electron emission element formed on the element layer 171, a discharging method using the first embodiment to the ninth embodiment. 具体是,通过将电子发射元件168中的电极的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, the electrode material of the electron emission element 168 by dissolving in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向绝缘膜167的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film is discharged to the surface of the insulating film 167 and the liquid material is coated.

[0388] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0388] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成电子发射元件168中的电极。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the electron emission electrode element 168.

[0389] 然后,在基板172的表面形成阳极173的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Discharging the first embodiment to the ninth embodiment of the method of the step [0389] Then, an anode 173 is formed in the surface of the substrate 172 employed. 具体是,通过将阳极173中的电极的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, by the material of the anode electrode 173 is dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向基板172的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film 172 is discharged to the surface of the substrate material and the coating liquid.

[0390] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0390] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成阳极173。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the anode 173.

[0391] 进而,在阳极173的表面形成彩色荧光膜174的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Discharging the first embodiment to the ninth embodiment of the method employed in the step [0391] Further, the color fluorescent film 174 is formed in the surface of the anode 173. 具体是,通过将作为发光元件形成材料的彩色荧光膜的材料溶解在溶剂中或分散在分散剂中,从而制造彩色荧光膜的材料液体。 Specifically, the material of the color fluorescent film is formed as a light emitting element material is dissolved in a solvent or dispersed in a dispersant, thereby producing a color fluorescent film material liquid. 接着,利用液滴喷出装置1 或液滴喷出装置108,向阳极173的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film 173 is discharged to the surface of the anode material and the coating liquid.

[0392] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行彩色荧光膜的材料液体的喷出并进行涂覆。 [0392] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging a liquid material and a color fluorescent film coated. 然后,通过加热干燥所涂覆的彩色荧光膜的材料液体并使之固化,从而形成彩色荧光膜174。 Then, the liquid material is heated and dried by the applied color fluorescent film and cured, thereby forming a color fluorescent film 174.

[0393] 如上所述,根据本实施方式,具有以下效果。 [0393] As described above, according to the present embodiment has the following effects.

[0394] (1)根据本实施方式,在制造扫描线169及数据线170的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使布线材料的喷出量精度优良的方式进行喷出、涂覆。 [0394] (1) According to the present embodiment, in the step for producing the scan line 169 and data line 170, by ejecting method embodiment to ninth embodiment employs the first embodiment, so that the wiring material can be discharged excellent accuracy way discharge amount coated. 因此,可以制造以使布线材料的涂覆量精度优良的方式被涂覆的扫描线169 及数据线170。 Accordingly, the coated amount can be manufactured in good precision of the wiring material coated way scanning lines 169 and the data line 170.

[0395] (2)根据本实施方式,在制造电子发射元件168及阳极173的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 [0395] (2) According to the present embodiment, in the process of manufacturing an electron-emitting element 168 and the anode 173 by ejection method to ninth embodiment employs the first embodiment, thereby to cause the ejection electrode material excellent accuracy way discharge amount coated. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的电子发射元件168及阳极173。 Thus, the electrode can be manufactured with good accuracy the amount of coating material coated way the electron emitting element 168 and the anode 173.

[0396] (3)根据本实施方式,在制造彩色荧光膜174的工序中,通过采用第一实施方式〜 第九实施方式中的喷出方法,从而可以以使彩色荧光膜形成材料的喷出量精度优良的方式进行喷出、涂覆。 [0396] (3) According to the present embodiment, in the step of manufacturing a color fluorescent film 174 by discharging a method to ninth embodiment employs the first embodiment, so that the color fluorescent film can be formed of material discharged excellent accuracy way discharge amount coated. 因此,可以制造以使彩色荧光膜形成材料的涂覆量精度优良的方式被涂覆的彩色荧光膜174。 Thus, it is possible to manufacture the color fluorescent film 174 to form a color film coating amount of the fluorescent material excellent precision coating manner.

[0397](第十三实施方式) [0397] (Thirteenth Embodiment)

[0398] 接着,利用图18对采用上述记载的喷出方法制造等离子显示装置的一个实施方式进行说明。 [0398] Next, FIG. 18 described using the discharge method of manufacturing the plasma display device according to an embodiment will be described.

[0399] 首先,对作为电光装置的一种的等离子显示装置进行说明。 [0399] First, as an electro-optical device of a plasma display device will be described. 图18是表示等离子显示装置的结构的概略分解立体图。 18 is a schematic exploded perspective view showing the structure and the like of the plasma display device.

[0400] 如图18所示,作为电光装置的等离子显示装置178主要由背面板179与前面板180构成。 [0400] 18, an electro-optical device is a plasma display device 178 is mainly composed of the back plate 179 and front panel 180. 背面板179备有基板181。 Rear plate 179 with the substrate 181. 基板181的上表面形成有绝缘膜182,在绝缘膜182 的上表面上,作为电极的地址电极183与绝缘膜184形成为条纹状。 Upper surface of the substrate 181 is an insulating film 182 is formed on the upper surface of the insulating film 182, the electrode 183 as the address electrode and the insulating film 184 is formed in stripes.

[0401] 而且,地址电极183及绝缘膜184的上表面形成有电介质层185。 [0401] Further, the address electrode 183 and the upper surface of the insulating film 184 is formed with a dielectric layer 185 electrically. 电介质层185的上表面形成有格子状的棱186,在被棱186包围而形成的凹状区域的各底部,形成有由荧光体等形成的红色(R)、绿色(G)、蓝色(B)的作为发光元件的发光层187R、187G、187B。 Upper surface of the dielectric layer 185 is formed 186, the bottom of each lattice-shaped rib recessed area being surrounded by ridge 186 is formed, it is formed with red formed by the fluorescent material (R), green (G), and blue (B ) as the light emitting element emitting layers 187R, 187G, 187B. 而且, 该发光层187R、187G、187B形成于与地址电极183对置的场所。 Further, the light emitting layers 187R, 187G, 187B and the address electrode 183 is formed on the opposite place.

[0402] 前面板180具备由光透过性材料构成的基板188,基板188的下表面形成有绝缘膜189。 [0402] The front panel 180 includes a lower surface of the light transmissive material configuring the substrate 188, the substrate 188 is an insulating film 189. 并且,绝缘膜189的下表面,在与地址电极183延伸存在的方向正交的方向上,形成有作为电极的总线电极190。 Further, the lower surface of the insulating film 189, in a direction extending perpendicular to the address electrode 183 is present, the bus electrode 190 is formed as an electrode. 在与总线电极190相邻且与发光层187R、187G、187B对置的场所中,形成由光透过性材料构成、矩形的作为电极的维持电极191,总线电极190与维持电极191电连接。 Adjacent to the bus electrode 190 and the light-emitting layers 187R, 187G, 187B in opposite places on the form is made of light-transmissive material, a sustain electrode, electrode 191, electrode 190 and the sustain bus electrode 191 is electrically connected to rectangular.

[0403] 维持电极191的下表面形成电介质层192,总线电极190的下表面形成由非光透过性绝缘材料构成的绝缘膜193。 [0403] 192 formed in the lower surface of the dielectric layer sustain electrode 191, the lower surface of the bus electrode 190 is formed of a non-insulating film 193 is made of light-permeable insulating material. 而且,接合背面板179与前面板180,在背面板179与前面板180之间被脱气而成为大致真空状态后,封入氙气等气体。 Further, the back plate 179 engages with the front panel 180, rear plate 179 between the front panel 180 is substantially the degassing vacuum state, a gas such as xenon gas.

[0404] 在地址电极183与维持电极191之间施加脉冲电压时,在电介质层185与电介质层192之间产生等离子体。 When [0404] the address pulse voltage is applied between the electrode 183 and the sustain electrode 191 to generate plasma between the electrical dielectric layer 185 a dielectric layer 192. 等离子体发出紫外线,所发出的紫外线激励发光层187R、187G、 187B所包含的荧光体,从而发出红色、绿色、蓝色的可见光。 The plasma emits ultraviolet light, ultraviolet rays emitted from the excitation light emitting layer 187R, the phosphor 187G, 187B included, so as to emit red, green and blue visible light.

[0405] 等离子显示装置178备有对施加在地址电极183与维持电极191之间的脉冲电压进行控制的驱动电路。 [0405] A plasma display apparatus 178 provided with a driving circuit for controlling the pulse voltage is applied between the address electrode 183 and the sustain electrode 191. 该驱动电路通过控制脉冲电压的电压值与定时,从而控制每个像素发出的光量,通过使像素亮灭,从而可以显示视频。 The driving circuit and the timing control voltage value of the pulse voltage, thereby controlling the amount of light emitted from each pixel, through the pixel blinking, so that the video can be displayed.

[0406] 在背面板179的绝缘膜182的表面形成地址电极183的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Step 183 [0406] Address electrodes on a surface of the back panel 179 of the insulating film 182, a discharging method using the first embodiment to the ninth embodiment. 具体是,在绝缘膜182上形成围堰状的绝缘膜184。 Specifically, the film-like insulating cofferdam formed in the insulating film 184 182. 接着通过将地址电极183的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Then the address electrode 183 of a material by dissolving in a solvent or dispersed in a dispersant to produce a liquid material of the electrode film. 接着,利用液滴喷出装置1或液滴喷出装置108,向由绝缘膜184形成的凹部喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film to the discharge recess formed in the insulating film 184 and the liquid material is coated.

[0407] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0407] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成地址电极183。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the address electrode 183.

[0408] 在前面板180的绝缘膜189的表面形成总线电极190及维持电极191的工序中, 采用第一实施方式〜第九实施方式中的喷出方法。 [0408] surface of the front panel to form a bus electrode 180. The insulating film 189 in the step 190 and the sustain electrode 191, using a first discharging method of the ninth embodiment to the embodiment. FIG. 具体是,在绝缘膜189上形成围堰状的绝缘膜193。 Specifically, the film-like insulating cofferdam formed in the insulating film 193 189. 接着通过将总线电极190及维持电极191的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Then the bus electrode 190 and the sustain electrode 191 by a material dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向由绝缘膜193形成的凹部喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film to the discharge recess formed in the insulating film 193 and the liquid material is coated.

[0409] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 [0409] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after adjustment, the liquid material is discharged, and the electrode film coated. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成总线电极190及维持电极191。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the bus electrodes 190 and sustain electrodes 191.

[0410] 进而,在电介质层185的表面形成发光层187R、187G、187B的工序中采用第一实施方式〜第九实施方式中的喷出方法。 [0410] Further, the light emitting layer 187R is formed on the surface of the dielectric layer 185, 187g, discharge method in the first embodiment to ninth embodiment employed in step 187B. 具体是,通过将作为发光元件形成材料的发光层187R、 187GU87B的材料溶解在溶剂中或分散在分散剂中,从而制造发光层的材料液体。 Specifically, the light emitting layer 187R is formed as a light emitting material, the elements, materials 187GU87B dissolved in a solvent or dispersed in a dispersant, a liquid material to produce the light emitting layer. 接着,利用液滴喷出装置1或液滴喷出装置108,向电介质层185的表面喷出该发光层的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharged to the surface of the light emitting layer and the dielectric layer 185 is coated.

[0411] 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行发光层的材料液体的喷出并进行涂覆。 [0411] In this case, to adjust the discharge amount of a first embodiment of the first embodiment to ninth embodiment of the discharge amount adjusting step and the second step of the same step, the amount of discharge of the droplet discharge head 14 is after the adjustment, for discharging a liquid material and a light-emitting layer is coated. 然后,通过加热干燥所涂覆的发光层的材料液体并使之固化,从而形成发光层187R、187G、187B。 Then, the liquid material by heating the light-emitting layer and drying the coated cured, thereby forming the light emitting layers 187R, 187G, 187B.

[0412] 如上所述,根据本实施方式,具有以下效果。 [0412] As described above, according to the present embodiment has the following effects.

[0413] (1)根据本实施方式,在制造地址电极183、总线电极190及维持电极191的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 [0413] (1) According to the present embodiment, in 183, the bus electrode 190 and the sustain electrode 191 Step address electrodes manufactured by the method for discharging to ninth embodiment employs the first embodiment, so that the electrode can be precision of discharged material discharged excellent manner, coating. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的地址电极183、总线电极190及维持电极191。 Thus, it can be manufactured such that the coating amount of the electrode material excellent in accuracy Address coated electrode 183, the bus electrodes 190 and sustain electrodes 191.

[0414] (2)根据本实施方式,在制造发光层187R、187G、187B的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使发光元件形成材料的喷出量精度优良的方式进行喷出、涂覆。 [0414] (2) According to this embodiment, in manufacturing the light emitting layer 187R, step 187G, 187B, a discharge method by the embodiment to ninth embodiment employs the first embodiment, so that the light emitting element may be formed of a material the discharge amount of the high degree of precision manner ejected coating. 因此,可以制造以使发光层材料的涂覆量精度优良的方式被涂覆的发光层187R、187G、187B。 Thus, can be manufactured such that the coating amount accuracy luminescent material layer excellent in light-emitting layers 187R coated, 187G, 187B.

[0415] 再有,实施方式并未限于上述的实施方式,也能增加各种变更或改良。 [0415] Further, the embodiment is not limited to the above embodiments, and various modifications and improvements can be increased. 以下描述变形例。 The following description of modified embodiments.

46[0416](变形例1) 46 [0416] (Modification Example 1)

[0417] 在上述第一实施方式中,液滴喷出装置1或液滴喷出装置108中配置有6个滑架12,各滑架12中配置有2列的6个液滴喷出头14。 [0417] In the first embodiment, the droplet ejection apparatus 1 or the droplet ejection apparatus 108 is configured with six carriages 12, 12 in each of the carriage 6 is disposed the droplet ejection head 2 14. 也可以根据装置的形态来设定滑架12 的个数以及各滑架12所搭载的液滴喷出头14的个数。 May be set the number of droplets of the carriage 12 and the carriage 12 mounted on each of the ejection head 14 according to the number of the means.

[0418](变形例2) [0418] (Modification Example 2)

[0419] 在上述第一实施方式中,对空腔40进行加压的加压机构采用压电元件43,但也可以是其他方法。 [0419] In the above-described first embodiment, the cavity 40 of the pressurizing mechanism pressurizing piezoelectric element 43, but may be other methods. 例如,也可以利用线圈与磁铁,使得振动板42变形,进行加压。 For example, the magnet coils may also be utilized, such that the vibration plate 42 deform pressurized. 另外,也可以在空腔40内配置加热布线,使功能液41所包含的气体膨胀后进行加压。 Further, the wiring may be arranged within the cavity 40 is heated, after the functional fluid 41 is pressurized gas contained in the expansion. 此外,还可利用静电的引力和排斥力使振动板42变形进行加压。 In addition, also using electrostatic attractive force and repulsive force of deformation of the vibration plate 42 is pressurized. 无论在哪种情况下,通过对属于被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头14所喷出的液滴44进行测量并进行调整, 从而可以得到与上述第一实施方式同样的效果。 In either case, by the other droplet ejection heads belonging to the column clamped droplet ejection head of the droplet ejection head 14 columns of liquid droplets 44 measured and adjusted to be obtained the same effects as those of the first embodiment.

[0420](变形例3) [0420] (Modification Example 3)

[0421] 在上述第一实施方式中,测量从喷嘴31喷出的液滴44的重量,并计算喷出量,但也可以测量喷出量的体积,从而测量喷出量。 [0421] In the above-described first embodiment, the measured weight of the droplets 31 ejected from the nozzle 44, and calculates the amount of discharge, but can also measure the volume of the discharge amount, thereby measuring the amount of discharge. 例如,也可以通过在横截面积恒定的管内存留所喷出的液滴44,通过测量管内的液体的长度,从而可以计量体积,推测喷出量。 For example, it is possible by constant cross-sectional area of ​​the tube leaving liquid droplets memory 44, through the length of the liquid in the measuring tube, can be metered volume, estimated discharge amount. 在为挥发性高的液体的情况下,可以在难以挥发的状态下进行计量。 In the case of highly volatile liquid can be metered at a less volatile state.

[0422](变形例4) [0422] (Modification Example 4)

[0423] 在上述第一实施方式中,液滴喷出装置1具备12个重量测量装置21,对从液滴喷出头14喷出的液滴44的喷出量进行测量。 [0423] In the first embodiment, the droplet ejection apparatus 1 12 includes a weight measuring device 21, the discharge amount of the liquid droplet 44 discharged from the droplet ejection head 14 is measured. 重量测量装置21的个数并未限于12个,也可以少于12个,也可以为12个以上。 The number of the weight measuring apparatus 21 is not limited to 12, it may be less than 12, may be less than 12. 由于重量测量装置21的个数多,能够同时测量的液滴喷出头14的个数增多,故可以生产率良好地测量喷出量。 Since the number of weight measuring device 21 is large, can measure the number of the droplet discharge head 14 is increased, it is possible to measure the discharged amount of good productivity.

[0424](变形例5) [0424] (Modification Example 5)

[0425] 在上述第一实施方式中,在步骤S2及步骤SlO的喷出前待机工序中,将压电元件43驱动到不喷出液滴44的程度为止,从而进行暖机驱动,但也可以喷出液滴44后进行暖机驱动。 [0425] In the above-described first embodiment, the discharge step S2, and step before the standby in step SlO, the piezoelectric element 43 is not driven to discharge liquid droplet 44 until the degree of warm-up drive to perform, but also after warming up drive 44 can discharge droplets. 与不喷出液滴44时相比,喷出液滴44的方法可以在压电元件43上施加大的能量, 因此可以在短时间内进行暖机驱动。 Compared to when not discharged droplet 44, the droplet discharge method 44 may be applied on a large energy in the piezoelectric element 43, can be driven in a short time to warm up.

[0426](变形例6) [0426] (Modification Example 6)

[0427] 在上述第一实施方式中,在步骤S22的第一喷出量调整工序与步骤S24的第二喷出量调整工序这两次调整工序中,对喷出量进行了调整,但也可以以在3次以上的调整工序中进行的方式分割喷头组后进行调整。 [0427] In the first embodiment, the adjustment amount in a first discharge step of discharging an amount of a second step S22 and step S24 is a step that the two adjusting step of adjusting the discharge amount of the adjustment, but also after the adjustment head group may be divided in a manner three times in the above adjusting step. 也可以根据液滴喷出装置1所具备的重量测量装置21的个数来设计工序。 The number of weight measuring device 21 includes a device to design the step may be discharged to the drop.

[0428](变形例7) [0428] (Modification Example 7)

[0429] 在上述第一实施方式中,1个滑架12配置6个液滴喷出头14。 [0429] In the above-described first embodiment, a carriage 12 arranged six droplet discharge head 14. 不限于此,也可以在1个滑架12中搭载小于6个和6个以上的液滴喷出头14。 Not limited thereto, may be mounted on less than 12 6 or more and 6 of the droplet ejection head 14 in a carriage. 若所搭载的液滴喷出头14的个数多,则可以使一次能喷出的功能液41的量增加,因此可以生产率良好地进行涂敷。 If the number of the mounted droplet discharge head 14 is large, the functional fluid can be discharged one can increase the amount of 41, it can be coated with high productivity. 而且,可以根据生产形态进行设定。 Further, according to the production aspect may be set.

[0430](变形例8) [0430] (Modification Example 8)

[0431] 在上述第三实施方式中,在步骤S34及步骤S44中,将喷出次数设为100次,在步骤S37及步骤S47中将喷出次数设为1000次。 [0431] In the above-described third embodiment, in step S34 and step S44, the number of discharge times is 100, the discharge step S47 and in step S37 the number of times to 1000 times. 喷出次数不限于此,也可以设定为能够精确地进行测量的次数。 The discharge times is not limited thereto, it may be set to the number of times capable of accurately measuring. 而且,由于在步骤S37及步骤S47中进行微调整,故若次数比步骤S34 及步骤S44中的喷出次数多,则能精确地进行测量,因此是优选的。 Further, since the fine adjustment in step S37 and step S47, the number of times when it is more than the number of step S34 and step S44 in the discharge, the measurement can be performed accurately, which is preferable.

[0432](变形例9) [0432] (Modification Example 9)

[0433] 在上述第十实施方式中,液晶显示面板121内部备有滤色器141R、141G、141B。 [0433] In the tenth embodiment, the liquid crystal inside the display panel 121 includes a color filter 141R, 141G, 141B. 滤色器141R、141G、141B也可以不包括在液晶显示面板121内部,而作为不同于液晶显示面板121的零件来具备。 Color filters 141R, 141G, 141B may not include the liquid crystal inside the display panel 121, and the display part 121 as different from the liquid crystal panel to have. 通过组合在检查工序中选择出的液晶显示面板121的合格品和同样在检查工序中选择出的具备滤色器的零件的合格品,从而可以提高液晶显示装置120的成品率。 By a combination selected in the inspection process of the liquid crystal display panel 121 and the same quality products selected in the inspection process includes a color filter-defective part, thereby improving the yield of the liquid crystal display device 120.

Claims (30)

1 一种喷出量测量方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、所述液滴喷出头喷出的液状体的喷出量进行测量,该喷出量测量方法包括:第一测量工序,排列多个所述液滴喷出头列,从所述液滴喷出头喷出所述液状体,对从多个所述液滴喷出头列中的、处于被其他的所述液滴喷出头列夹持的状态的所述液滴喷出头列的所述液滴喷出头喷出的所述液状体的喷出量进行测量;和第二测量工序,在所述第一测量工序之后进行,通过排列多个所述液滴喷出头列,使所述第一测量工序中处于未被其他的所述液滴喷出头列夹持的状态的所述液滴喷出头列成为被其他的所述液滴喷出头列夹持的状态,并使其喷出所述液状体后,对从所述液滴喷出头喷出的所述液状体的喷出量进行测量。 A discharge quantity measuring method, from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the liquid discharge head discharging a liquid material measuring the discharge amount, the discharge amount measuring method comprising: a first measurement step, the liquid droplet ejection heads are arranged a plurality of columns, the ejection head ejects the liquid from the droplets from a plurality of the droplets of the liquid of the droplets of the liquid discharge head of the column, the state of being of the other droplet ejection head columns clamped ejection head row ejected ejection head the discharge amount thereof was measured; and a second measurement step of measuring is performed after the first step, by arranging the plurality of droplet discharge heads column, the first step in the measurement of other non- the liquid discharge head of the column clamped state column becomes the droplet discharge head discharging droplets of the other column head a clamped state, and after it the liquid material discharged on the discharge amount of the liquid material is discharged from the liquid discharge head is measured.
2.根据权利要求1所述的喷出量测量方法,其特征在于, 所述第一测量工序及所述第二测量工序包括:测量所述喷出量的预定的所述液滴喷出头待机的喷出前待机工序; 喷出所述液状体的测量用喷出工序;和对所喷出的所述液状体的喷出量进行测量的测量工序; 在所述喷出前待机工序中,对所述液滴喷出头进行暖机驱动。 The discharge amount measuring method according to claim 1, wherein said first step and said second measuring step of measuring comprises: measuring a predetermined amount of discharge of the droplet ejection head standby before discharging standby step; measured by discharging the liquid material discharge step; and a measurement step of measuring an amount of discharge of the liquid material being discharged; before the ejection step in the standby discharge head to drive the warm droplet.
3.根据权利要求2所述的喷出量测量方法,其特征在于,在所述暖机驱动中,驱动到从所述液滴喷出头不喷出所述液状体的程度。 3. The method of measuring the discharge amount according to claim 2, characterized in that, in the warm-up drive, the drive to the extent that no liquid droplet from the discharge head discharging the liquid material.
4.根据权利要求2所述的喷出量测量方法,其特征在于,所述暖机驱动是在与所述测量用喷出工序中喷出所述液状体的场所大致相同的场所进行暖机驱动。 4. The discharge amount measuring method according to claim 2, characterized in that the drive is warm in the warm-discharge properties measurement step of ejecting the liquid material in substantially the same place drive.
5.根据权利要求1所述的喷出量测量方法,其特征在于,在所述第一测量工序中,对所述多个滑架之中的一个滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行了测量后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行测量, 从而顺次对各所述滑架所搭载的预定测量的全部所述液滴喷出头的喷出量进行测量,在所述第二测量工序中,对所述多个滑架之中的一个滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行了测量后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行测量, 从而顺次对各所述滑架所搭载的预定测量的全部所述液滴喷出头的喷出量进行测量。 The discharge amount measuring method according to claim 1, wherein, in the first measurement step, the drop of a carriage among the plurality of carriages mounted on the discharge after all of the discharge amount of the liquid droplet ejection heads in the head, a predetermined measurement were measured, the other carriage droplets among the plurality of carriages mounted on the ejection head, the total amount of the liquid droplet discharge head discharging a predetermined measurement is measured, so that the droplets sequentially for all predetermined measurement carriage mounted on each of said discharge head discharge amount is measured, at the were all of the amount of said liquid droplet discharge head discharging a second measurement step, the drop of a carriage among the plurality of carriages mounted on the ejection head, a predetermined measurement after the measurement, the carriage of the other among the plurality of carriages mounted on the liquid discharge head, all of the predetermined liquid droplet ejection head measured discharge amount is measured, thereby sequentially discharge all of the droplets of the predetermined amount of each of the measuring carriage mounted ejection head is measured.
6.根据权利要求1所述的喷出量测量方法,其特征在于,由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行, 在所述第一测量工序中,对所述多个滑架之中的一个滑架所搭载的预定测量的所述液滴喷出头中的、一部分所述液滴喷出头的喷出量进行了测量后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的属于已经测量了喷出量的所述液滴喷出头的行的所述液滴喷出头、即位于与已经进行过测量的所述液滴喷出头接近的场所的所述液滴喷出头的喷出量进行测量,从而顺次对各所述滑架所搭载的预定测量的所述液滴喷出头的喷出量进行测量,在所述第二测量工序中,对所述多个滑架之中的一个滑架所搭载的预定测量的所述液滴喷出头中的、一部分所述液滴喷出头的喷出量进行了测量后,对所述多个滑架之中的其他滑 The discharge amount measuring method according to claim 1, wherein a plurality of said droplets of said plurality of carriages mounted on the ejection head row forming a plurality of rows of droplet ejection heads in the first measuring step, a carriage among the plurality of carriages mounted on said measured predetermined droplet ejection head, the ejection head portion of the droplet ejection the discharge quantity after the first row was measured, among other carriage of the plurality of carriages mounted on the liquid discharge head has been measured belongs to an amount of discharge of the droplet the amount of said discharged liquid droplet ejection head, which is located close to the first place of the droplet has been subjected to the measurement of the discharged liquid droplet ejection head is measured, thereby sequentially by each of the carriages the amount of discharged droplets is mounted predetermined measuring ejection head measured in the second measurement step, the liquid for a predetermined measurement among the plurality of carriages mounted on the carriage after the drop discharge amount of the droplet ejection head portion of the ejection head was measured, among the plurality of the other slide carriage 架所搭载的所述液滴喷出头中的属于已经测量了喷出量的所述液滴喷出头的行的所述液滴喷出头、即位于与已经进行过测量的所述液滴喷出头接近的场所的所述液滴喷出头的喷出量进行测量,从而顺次对各所述滑架所搭载的预定测量的所述液滴喷出头的喷出量进行测量,反复进行所述第一测量工序与所述第二测量工序,对预定测量的全部行中的所述液滴喷出头的喷出量进行测量。 The frame is mounted the droplet discharge head have been measured belongs to the liquid discharge head of the liquid discharge amount rows ejection head, i.e. has been located in the measurement liquid droplet discharge amount of the discharge amount of the discharge head close to the place of the liquid discharge head is measured, whereby the liquid droplet ejection head sequentially measured for each of the predetermined mounted on the carriage is measured repeatedly performing the first measurement step and the second measurement step, the amount of discharge of the droplets measured in all rows of a predetermined ejection head is measured.
7.根据权利要求1所述的喷出量测量方法,其特征在于,由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行, 在所述第一测量工序中,对一个滑架所搭载的预定测量的所述液滴喷出头中的、一部分所述液滴喷出头的喷出量进行测量,在所述第二测量工序中,对位于所述第一测量工序中测量过的所述液滴喷出头附近且属于所述液滴喷出头的行的所述液滴喷出头的喷出量进行测量,反复进行所述第一测量工序与所述第二测量工序,对属于规定行的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行测量,切换到未测量的所述液滴喷出头所属的行,反复进行所述第一测量工序与所述第二测量工序,对所述液滴喷出头的喷出量进行测量。 The discharge amount measuring method according to claim 1, wherein a plurality of said droplets of said plurality of carriages mounted on the ejection head row forming a plurality of rows of droplet ejection heads in the first measurement step, the liquid droplet of a predetermined measurement carriage mounted on the discharge, the discharge amount of the droplet ejection head portion of the head is measured, the second measurement step, the liquid droplet in the first measuring step of measuring through and around the head part of the discharge amount of the discharged liquid droplet discharge head discharging droplets of the line head is measured, repeating the first measurement step and second measurement step, the amount of discharge of the droplet ejection heads belonging to a predetermined row in the predetermined measuring all of the liquid discharge head is measured, the switching the liquid droplet ejection head to unmeasured belongs row, repeating the first step of measuring the second measurement step, the amount of discharge of the droplet discharge head is measured.
8. 一种喷出量调整方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、所述液滴喷出头喷出的液状体的喷出量进行调整,该喷出量调整方法包括:第一测量工序,排列多个所述液滴喷出头列,从所述液滴喷出头喷出所述液状体,对从多个所述液滴喷出头列中的、处于被其他的所述液滴喷出头列夹持的状态的所述液滴喷出头列的所述液滴喷出头喷出的所述液状体的喷出量进行测量;第一调整工序,对所述第一测量工序测出的所述液滴喷出头的喷出量进行调整; 第二测量工序,在所述第一调整工序之后进行,通过排列多个所述液滴喷出头列,使所述第一测量工序中处于未被其他的所述液滴喷出头列夹持的状态的所述液滴喷出头列成为被其他的所述液滴喷出头列夹持的状态,并使其喷出所述液状体后,对从所述液滴喷出头喷出的所 A method for adjusting the amount of discharge, from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the liquid discharge head discharging the liquid in the adjust the amount of discharge, the discharge amount adjusting method comprising: a first measurement step, the liquid droplet ejection heads are arranged a plurality of columns, the ejection head ejects the liquid from the droplets from the plurality of said droplets of said liquid discharge head of the column, the state of being of the other droplet ejection head of the column holding a column of the ejection head ejecting the droplet ejection head the discharge amount of the liquid is measured; a first adjusting step, the amount of discharge of the droplet ejection head of the first measurement step of adjusting the measured; a second step of measuring, in the first adjustment step after ejection head by arranging a plurality of columns of the droplets, the first step is not measuring the droplet ejection head other state holding column of the liquid discharge head of the column after the state of being of the other droplet ejection head of the column clamp, and allowed to discharge the liquid material, ejected from the liquid droplet of the ejection head 述液状体的喷出量进行测量;和第二调整工序,对在所述第二测量工序中测出的所述液滴喷出头的喷出量进行调整。 Discharging said measured amount of liquid material; and a second adjusting step, the amount of discharge of the droplets measured in said second measurement step of adjusting the discharge head.
9.根据权利要求8所述的喷出量调整方法,其特征在于, 还包括:第一喷出量调整工序,反复进行所述第一测量工序与所述第一调整工序,以使所述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行所述第二测量工序与所述第二调整工序,以使所述喷出量接近目标喷出量。 9. The method of adjusting the discharge amount according to claim 8, characterized in that, further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the close to the target discharge amount of the discharge amount; and a second discharge amount adjusting step, the second measuring step are repeated with the second adjustment step, so that the discharge amount close to the target discharge amount.
10.根据权利要求8所述的喷出量调整方法,其特征在于, 所述第一测量工序及所述第二测量工序包括:测量所述喷出量的预定的所述液滴喷出头待机的喷出前待机工序; 喷出所述液状体的测量用喷出工序;和对所喷出的所述液状体的喷出量进行测量的测量工序;在所述喷出前待机工序中,对所述液滴喷出头进行暖机驱动。 10. A method of adjusting the discharge amount according to claim 8, wherein said first step and said second measuring step of measuring comprises: measuring a predetermined amount of discharge of the droplet ejection head standby before discharging standby step; measured by discharging the liquid material discharge step; and a measurement step of measuring an amount of discharge of the liquid material being discharged; before the ejection step in the standby discharge head to drive the warm droplet.
11.根据权利要求10所述的喷出量调整方法,其特征在于,在所述暖机驱动中,驱动到从所述液滴喷出头不喷出所述液状体的程度。 11. A method of adjusting the discharge amount according to claim 10, wherein, in the warm-up drive, the drive to the extent that no liquid droplet from the discharge head discharging the liquid material.
12.根据权利要求10所述的喷出量调整方法,其特征在于,所述暖机驱动是在与所述测量用喷出工序中喷出所述液状体的场所大致相同的场所进行暖机驱动。 12. The method of adjusting the discharge amount according to claim 10, characterized in that, in the warm-up drive is warmed up to the measurement step of substantially the same properties of the liquid material discharged by the discharge place drive.
13.根据权利要求9所述的喷出量调整方法,其特征在于,在所述第一喷出量调整工序中,对属于被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头、和属于未被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头所喷出的所述液状体的喷出量进行调整。 13. A method of adjusting the discharge amount according to claim 9, wherein, in said first discharge amount adjusting step, the liquid droplet ejection heads belonging to the column by the sandwiched droplet ejection the said liquid droplet ejection head of the column head, and not belonging to the liquid discharge head of the droplet ejection head of the column holding a column of the liquid discharge head discharged adjusting an amount of discharged body.
14.根据权利要求8所述的喷出量调整方法,其特征在于,在由所述第一测量工序及所述第一调整工序构成的工序、和由所述第二测量工序及所述第二调整工序构成的工序中的至少一个工序中,多次进行测量工序及调整工序,所述调整工序包括粗调整工序与微调整工序。 14. A method of adjusting the discharge amount according to claim 8, wherein the step formed by the first measurement step and the first adjusting step, and the second step and by the second measurement at least one process step is constituted of two adjustment step, measurement step and repeatedly adjusting step, the adjusting step includes a coarse adjustment step and fine adjustment step.
15.根据权利要求14所述的喷出量调整方法,其特征在于,在所述粗调整工序之前进行的测量工序中喷出的所述液状体的量,比在所述微调整工序之前进行的测量工序中喷出的所述液状体的量少。 15. A method of adjusting the discharge amount according to claim 14, wherein the amount of the liquid material measuring step is performed prior to the step of rough adjustment discharged, the ratio of the fine adjustment performed before step the small amount of liquid material is discharged in the measuring step.
16.根据权利要求14所述的喷出量调整方法,其特征在于,在所述粗调整工序之前进行的测量工序中单位时间内从所述液滴喷出头喷出所述液状体的次数,比在所述微调整工序之前进行的测量工序中单位时间内从所述液滴喷出头喷出所述液状体的次数多。 16. A method of adjusting the discharge amount according to claim 14, wherein the number of the measuring step is performed prior to the step of rough adjustment unit time from the liquid droplet discharge head discharging the liquid material , more than the number of the measuring step is performed prior to said step of fine adjustment unit time from the liquid droplet discharge head discharging the liquid material.
17.根据权利要求8所述的喷出量调整方法,其特征在于,在所述第一调整工序中,对所述多个滑架之中的一个滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行了调整后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行调整, 从而顺次对各所述滑架所搭载的预定调整的全部所述液滴喷出头的喷出量进行调整,在所述第二调整工序中,对所述多个滑架之中的一个滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行了调整后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行调整, 从而顺次对各所述滑架所搭载的预定调整的全部所述液滴喷出头的喷出量进行调整。 17. A method of adjusting the discharge amount according to claim 8, wherein, in the first adjustment step, the drop of a carriage among the plurality of carriages mounted on the discharge after the head, the entire amount of the liquid discharge head discharging a predetermined adjustment has been adjusted, the other carriage droplets among the plurality of carriages mounted on the ejection head, the total amount of the liquid droplet discharge head discharging a predetermined adjustment is adjusted so as to sequentially adjust the predetermined carriage mounted on the entire amount of the discharged droplet ejection head adjustment in the said second adjusting step, the drop of a carriage among the plurality of carriages mounted on the discharge, the discharge amount of all of the droplet ejection head in a predetermined head were adjusted after adjustment, the other carriage droplets among the plurality of carriages mounted on the discharge, a predetermined amount of adjustment of all of the discharge liquid droplet discharge head is the adjustment head, thereby sequentially all of the droplet discharge amount of each of the predetermined adjustment of the carriage mounted on the ejection head can be adjusted.
18.根据权利要求8所述的喷出量调整方法,其特征在于,由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行,在所述第一调整工序中,对所述多个滑架之中的一个滑架所搭载的预定调整的所述液滴喷出头中的、一部分所述液滴喷出头的喷出量进行了调整后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的、属于已经调整了喷出量的所述液滴喷出头的行的一部分所述液滴喷出头的喷出量进行调整,从而顺次对各所述滑架所搭载的预定调整的所述液滴喷出头的喷出量进行调整,在所述第二调整工序中,对所述多个滑架之中的一个滑架所搭载的预定调整的所述液滴喷出头中的、一部分所述液滴喷出头的喷出量进行了调整后,对所述多个滑架之中的其他滑架所搭载的所述液滴喷出头中的、属于已经调整了喷出量的所述液 18. The method of adjusting the discharge amount according to claim 8, wherein a plurality of said droplets ejected by a plurality of carriages mounted on the head of the column forming a plurality of rows of the liquid droplet ejection head in the first adjustment step, the droplets of the predetermined adjustment among the plurality of carriages mounted on a carriage ejection head, the ejection head portion of the droplet ejection after adjustment of the amount of the other carriage among the plurality of carriages mounted on the liquid discharge head, belonging to the row has been adjusted amount of the liquid discharge head to discharge the portion of the discharge amount of the liquid droplet discharge head is adjusted so as to sequentially discharge amount of the liquid droplet ejection head of each of said predetermined adjustment carriage mounted is adjusted in the second adjustment after the step, the droplets of a predetermined adjustment in the carriage frame mounted on said carriage plurality of discharge head, the discharge amount of the droplet ejection head portion has been adjusted, to among the plurality of carriages mounted on the other of the carriage of the droplet ejection head, a part of the fluid discharge has been adjusted amount 滴喷出头的行的一部分所述液滴喷出头的喷出量进行调整,从而顺次对各所述滑架所搭载的预定调整的所述液滴喷出头的喷出量进行调整,反复进行所述第一调整工序与所述第二调整工序,从而对预定调整的全部行中的所述液滴喷出头的喷出量进行调整。 The amount of discharged droplet ejection head of the line portion of the droplet ejection head is adjusted so as to sequentially discharge amount of the liquid droplet ejection head of each of said predetermined adjustment carriage mounted adjust , repeating the first adjusting step and the second adjusting step, thereby adjusting the amount of discharge of the droplet to adjust all the lines in a predetermined ejection head.
19.根据权利要求8所述的喷出量调整方法,其特征在于,由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行, 在所述第一调整工序中,对一个滑架所搭载的预定调整的所述液滴喷出头中的、一部分所述液滴喷出头的喷出量进行调整,在所述第二调整工序中,对位于所述第一调整工序中调整过的所述液滴喷出头附近且属于所述液滴喷出头的行的所述液滴喷出头的喷出量进行调整,反复进行所述第一调整工序与所述第二调整工序,对属于规定行的所述液滴喷出头的喷出量进行调整,切换到未调整的所述液滴喷出头所属的行,反复进行所述第一调整工序与所述第二调整工序,对所述液滴喷出头的喷出量进行调整。 19. The method of adjusting the discharge amount according to claim 8, wherein a plurality of said droplets ejected by a plurality of carriages mounted on the head of the column forming a plurality of rows of the liquid droplet ejection head in the first adjustment step, the adjustment of a predetermined droplet carriage mounted on the ejection head, the ejection amount of the droplet ejection head portion of the adjustment, the second adjusting step, the adjusted in the first adjustment step in the vicinity of the liquid discharge head and belongs to the amount of discharge of the droplet discharge head discharging droplets of the line head is adjusted, repeating the first adjusting step and the second adjusting step, the amount of discharge of the droplet ejection heads belonging to a predetermined line is adjusted to the unadjusted switching the droplet ejection heads belonging to the line , repeating the first adjusting step and the second adjusting step, the amount of discharge of the droplet ejection head can be adjusted.
20.根据权利要求8所述的喷出量调整方法,其特征在于, 还包括:第一喷出量调整工序,反复进行所述第一测量工序与所述第一调整工序,以使所述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行所述第二测量工序与所述第二调整工序,以使所述喷出量接近目标喷出量;在所述第一喷出量调整工序中,除了属于被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头以外,还对属于未被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头所喷出的所述液状体的喷出量进行粗调整。 20. A method of adjusting the discharge amount according to claim 8, characterized in that, further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the close to the target discharge amount of the discharge amount; and a second discharge amount adjusting step, the second measuring step are repeated with the second adjustment step, so that the discharge amount close to the target discharge amount; the the first discharge amount adjusting step, in addition to being ejected by the liquid droplet of the droplet ejection head row holding the droplet ejection head other than the head of the column, also not belonging to the droplets an amount of discharge of the droplets of the liquid material in the liquid discharge head discharging a column holding the head row of the ejected ejection head coarsely adjusted.
21.根据权利要求20所述的喷出量调整方法,其特征在于,在所述第一喷出量调整工序中调整为:未被所述液滴喷出头列夹持的所述液滴喷出头所喷出的所述液状体的喷出量,比被所述液滴喷出头列夹持的所述液滴喷出头所喷出的所述液状体的喷出量少。 21. A method of adjusting the amount of discharge as claimed in claim 20, wherein said first adjusting step for adjusting the amount of discharge: not the liquid discharge head of the column sandwiched droplet the liquid material discharge less discharge amount of the liquid material is discharged discharge head, the liquid discharge head than is the column holding the ejected droplet discharge head.
22.根据权利要求20所述的喷出量调整方法,其特征在于,在所述第二测量工序中,以从被所述液滴喷出头列夹持的所述液滴喷出头喷出的所述液状体的喷出量比所述第一喷出量调整工序中设定的喷出量少的方式变更了设定后,喷出所述液状体,在所述第二调整工序中,对喷出量进行调整。 22. A method of adjusting the amount of discharge as claimed in claim 20, wherein, in the second measurement step, to the liquid discharge head of the column from the droplet ejection head clamped discharge after the discharge of the liquid material than the first set discharge amount adjusting step of discharging a small amount setting mode change, the liquid material is ejected, the second adjustment step , the adjustment of the discharge amount.
23. 一种液状体的喷出方法,从液滴喷出头向工件喷出液状体, 该液状体的喷出方法包括:对喷出量进行调整的喷出量调整工序;和向所述工件喷出液滴的涂敷工序;在所述喷出量调整工序中,采用权利要求8〜22中任一项所述的喷出量调整方法进行调整。 23. A method of discharging the liquid from the liquid droplet discharge head discharging the workpiece, the method of discharging a liquid material comprising: a discharge amount of the discharge amount adjusting step of adjusting; and to the discharging droplets of the coating process the workpiece; said discharge amount adjusting step, the use of the discharge amount adjustment method as claimed in claim any one of 8~22 adjusted.
24. 一种滤色器的制造方法,包括在基板上涂敷彩墨而形成滤色器的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述彩墨。 24. A method of manufacturing a color filter, comprising the step of color ink applied to a substrate and forming a color filter using the liquid discharging method according to claim 23, discharge coating to the substrate and the color ink.
25. 一种液晶显示装置的制造方法,包括以下工序,即在第一基板与第二基板上形成取向膜,将液晶夹持在所述第一基板与所述第二基板之间而形成所述液晶显示装置,采用权利要求23所述的液状体的喷出方法,向所述第一基板与所述第二基板中的至少一方喷出并涂敷所述取向膜的材料后,使其固化来形成所述取向膜。 25. A method of manufacturing a liquid crystal display device, comprising the following steps, i.e., an alignment film is formed on the first substrate and the second substrate, a liquid crystal sandwiched between the first substrate and the second substrate is formed by the liquid crystal display device will be described later, using the method of discharging a liquid material as claimed in claim 23, the discharge of the coating material and the alignment film and the least one of the second substrate to the first substrate, so that curing the alignment film is formed.
26. 一种液晶显示装置的制造方法,包括以下工序,即在第一基板上涂敷液晶后,将所述液晶夹持在所述第一基板与第二基板之间而形成所述液晶显示装置,采用权利要求23所述的液状体的喷出方法,向所述第一基板喷出并涂敷所述液晶。 26. A method of manufacturing a liquid crystal display device, comprising the following steps, i.e., after coating the liquid crystal, the first substrate on the liquid crystal sandwiched between the first and second substrates forming the liquid crystal display means using the liquid discharging method according to claim 23, discharge is applied to the first substrate and the liquid crystal.
27. 一种电光装置的制造方法,具有在基板上涂敷发光元件形成材料后通过使其固化而形成发光元件的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述发光元件形成材料。 27. A method for manufacturing an electro-optical device having a light emitting element after the step of applying a material forming a light emitting element formed on a substrate and cured by using a method as claimed in claim discharging the liquid material 23 to the substrate discharging and applying the light-emitting element-forming material.
28. 一种电光装置的制造方法,具有在基板上涂敷液状体的电极材料后通过使其固化而形成电极的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述液状体的所述电极材料。 28. A method of producing the step of electro-optical device, an electrode material having the liquid applied on a substrate and cured to form an electrode by using a method as claimed in claim discharging the liquid material 23 to the substrate discharging said electrode material and applying the liquid material.
29. 一种电光装置的制造方法,具有在基板上涂敷液状体的布线材料后通过使其固化而形成布线的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述液状体的所述布线材料。 29. A method for manufacturing an electro-optical device having a wiring step after coating the liquid material on a substrate to form a wiring cured by using a method as claimed in claim discharging the liquid material 23 to the substrate discharging and applying the liquid material of the wiring material.
30. 一种电光装置的制造方法,具有以下工序,即在基板上涂敷液状体的半导体材料并使其固化后,通过进行加热来形成半导体,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述液状体的所述半导体材料。 30. A method for manufacturing an electro-optical device, comprising the steps, i.e., the coating liquid material is a semiconductor material on a substrate and after curing it, by heating the semiconductor formed using the liquid material discharged as claimed in claim 23 the method of ejecting the coating to the substrate and the semiconductor material of the liquid.
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