CN101254692A - Ejection rate measurement method, ejection rate adjustment method, liquid ejection method, method of manufacturing color filter - Google Patents

Ejection rate measurement method, ejection rate adjustment method, liquid ejection method, method of manufacturing color filter Download PDF

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CN101254692A
CN101254692A CN 200810081454 CN200810081454A CN101254692A CN 101254692 A CN101254692 A CN 101254692A CN 200810081454 CN200810081454 CN 200810081454 CN 200810081454 A CN200810081454 A CN 200810081454A CN 101254692 A CN101254692 A CN 101254692A
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discharge
step
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CN 200810081454
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CN101254692B (en
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小岛健嗣
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精工爱普生株式会社
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Priority to JP2007-157117 priority
Priority to JP2007157117A priority patent/JP4479751B2/en
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Abstract

The invention provides an ejection rate measurement method, an ejection rate adjusting method, a liquid ejection method, a color filter manufacturing method, a manufacture method of the liquid display device and a manufacture method of the electric lighting device. The ejection rate measurement method for a device having a plurality of droplet ejection head columns mounted on a plurality of carriages includes the steps of (a) measuring an ejection rate of a liquid ejected from a droplet ejection head included in one of the plurality of droplet ejection head columns sandwiched between other two of the plurality of droplet ejection head columns, (b) sandwiching, after step (a), one of the plurality of droplet ejection head columns, which has not been sandwiched between other two of the plurality of droplet ejection head columns in step (a), between other two of the plurality of droplet ejection head columns, and measuring an ejection rate of a liquid ejected from a droplet ejection head included in one of the plurality of droplet ejection head columns sandwiched between other two of the plurality of droplet ejection head columns.

Description

喷出量测量和调整方法、液状体喷出方法、滤色器的制法技术领域本发明涉及喷出量测量方法、喷出量调整方法、液状体的喷出方法、 滤色器的制造方法、液晶显示装置的制造方法及电光装置的制造方法,尤其涉及可以精度优良地测量从液滴喷出头喷出的液滴的喷出量的方法。 The method of measuring and adjusting the discharge amount, the liquid discharging method, a color filter manufacturing method Technical Field The present invention relates to a method of measuring the amount of discharge, the discharge amount adjustment method, a liquid material discharging method, a method of manufacturing a color filter method of manufacturing an electro-optical apparatus and a method for manufacturing a liquid crystal display device, and more particularly the measurement accuracy can be excellently discharged from the droplet discharge head-droplet discharge amount. 背景技术以往,作为对工件喷出液滴的方法,公知利用喷墨式液滴喷出装置进行喷出的方法。 BACKGROUND ART Conventionally, as a method of discharging droplets of a workpiece, using a well-known ink jet method of discharging liquid droplet ejection apparatus of. 液滴喷出装置包括:工作台,其载置基板等工件,并使工件沿一个方向移动;和滑架,其沿配置在与工作台移动方向正交的方向上的导轨移动。 The droplet ejection apparatus comprising: a work table, which mounting substrate or the like, and the workpiece is moved in one direction; and a carriage which moves along the rail in a direction perpendicular to the moving direction of the stage configuration. 滑架配置喷墨头(以下称为液滴喷出头),对工件喷出液滴, 然后进行涂覆。 Configuring the ink jet head carriage (hereinafter referred to as liquid droplet ejection head) for ejecting droplets of the workpiece, and then coated. 使功能液成为液滴后通过向工件喷出液滴,从而所涂覆的功能液可以采用各种材料。 After the functional liquid into droplets by ejecting the droplets to the workpiece, so that the functional liquid can be coated by various materials. 功能液大多因为温度的变化而导致粘度发生变化,粘度发生变化也会导致流体电阻发生变化。 Most of the functional fluid as the temperature changes cause changes in viscosity, fluid viscosity changes will lead to the occurrence of a change in resistance. 流体电阻发生变化,从而流经液滴喷出头内的流路的功能液的流速也发生变化。 Fluid resistance changes, so that the flow rate of the functional liquid droplet discharging flows through a flow passage in the head also changes. 因为功能液的流速变化,故每个墨点的喷出量变动,难以精度优良地测量喷出量。 Because the change in the flow rate of the functional liquid, so that the discharge amount per dot changes, it is difficult to measure with good accuracy the amount of discharge. 为了解决该问题,在专利文献l中,公幵了一种精度优良地测量每个墨点的喷出量的方法。 To solve this problem, Patent Document l, well Jian a method of measurement with good accuracy the amount of each ink discharge point. 根据该方法,在腔室内设置了液滴喷出装置后,通过调整腔室内的温度与湿度,从而控制液滴喷出装置的环境,测量喷出量。 After According to this method, a chamber is provided in the liquid droplet ejection apparatus, the temperature and humidity control chamber, thereby controlling the droplet ejection apparatus environment, measuring the amount of discharge. 【专利文献1】特开2004-209429号公报在利用压电元件对液滴喷出头的空腔(cavity)加压时,因压电元件的动作而增加的能量的一部分转换为热,成为使得液滴喷出头的温度上升的主要原因。 Converting a portion of Patent Document 1] Laid-Open Patent Publication No. 2004-209429 by the piezoelectric element when the liquid droplet discharge head cavity (cavity) pressurized by the operation of the piezoelectric element increases the energy into heat, becomes the main reason that the temperature of the droplet discharge head rises. 再有,在未驱动压电元件时,压电元件不会发热,液滴喷出头散热,因此成为液滴喷出头的温度变动的主要原因。 Further, when the piezoelectric element is not driven, the piezoelectric element does not generate heat, heat droplet discharge head, a droplet discharge head becomes a factor of the temperature variation. 在测量喷出量时,由于喷出量受到温度的影响,故测量时的喷头温度在每次测量的时候不能以大致相同的温度条件进行测量,存在测量精度下降的问题。 When measuring the amount of discharge, since the discharge amount affected by temperature, so that the head temperature measurement can not be measured at substantially the same temperature conditions in each measurement time, there is a problem of measurement accuracy is deteriorated. 发明内容本发明是为了解决上述问题的至少一部分而进行的,能作为以下的形态或应用例来实现。 The present invention is made to solve the above problems and perform at least a part, it can be implemented as the following forms or application examples. [应用例1〗本应用例涉及的喷出量测量方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、上述液滴喷出头喷出的液状体的喷出量进行测量,其特征在于,该喷出量测量方法包括:第一测量工序,排列多个上述液滴喷出头列,从上述液滴喷出头喷出上述液状体,对从上述液滴喷出头列中的、被上述液滴喷出头列夹持的上述液滴喷出头喷出的上述液状体的喷出量进行测量;和第二测量工序,在上述第一测量工序之后进行,用其他的上述液滴喷出头列夹持在上述第一测量工序中未被其他的上述液滴喷出头列夹持的上述液滴喷出头,并使上述液滴喷出头喷出上述液状体后,对从上述液滴喷出头喷出的上述液状体的喷出量进行测量。 [Method for measuring the discharge〗 Application Example 1 This application example, from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the droplet ejection head the discharge amount of the discharged liquid material is measured, characterized in that the discharge amount measuring method comprising: a first measuring step of arranging a plurality of the droplet ejection head row, from the droplet ejection head ejecting the liquid material, the amount of discharge of the liquid material from the droplet discharge head of the column, the droplet ejection head is sandwiched between the droplet ejection head for ejecting the column was measured; and a second step of measuring , after the first measurement step is carried out, the ejection head of the droplet with the other columns not holding the other droplet ejection head row holding the droplet ejection head in the first measurement step, and after the droplet ejection head for ejecting the liquid material, the discharge amount of the liquid material is discharged from the droplet discharge head is measured. 根据该喷出量测量方法,可以将喷出量的测量分为第一测量工序与第二测量工序来进行。 The measuring method according to the discharge amount, the discharge amount may be divided into a first measuring step of measuring the second measurement step is performed. 在使液状体作为液滴从喷嘴喷出时,对液状体进行加压。 In that the liquid material is ejected as droplets from the nozzle, the pressure of the liquid material. 通过对液状体进行加压,从而液状体的压力升高。 By pressurizing the liquid material, whereby the liquid pressure rises. 此时,在喷嘴中,成为液状体与气体接触的状态。 At this time, in the nozzle, a state of the liquid contact with the gas. 而且,液状体的压力高于气体的气压,因此液状体的一部分成为液滴,被喷出到气体中。 Further, the liquid pressure is higher than the gas pressure, and therefore becomes a part of the liquid droplets are ejected into the gas. 在对液状体进行加压时,所加压的能量的一部分被转换为热。 When the pressure of the liquid material, the pressurized part of the energy is converted into heat. 而且, 液滴喷出头的温度上升。 Further, the droplet discharge head temperature rise. 液状体若温度上升,则构成液状体的分子的动能增加,因此大多粘度降低。 If the liquid temperature rises, increasing the kinetic energy of molecules constituting the liquid, and therefore most of the viscosity reduction. 若液状体的粘度变化,则通过喷嘴等流路时的流体电阻变化。 If the viscosity of the liquid changes, the resistance change of the fluid flow path through the nozzle or the like. 并且,从喷嘴喷出的液状体的喷出量变化。 And, from a change in the discharge amount of the liquid ejected from the nozzle. 在第一测量工序中,排列多个液滴喷出头列后喷出液状体。 In a first measurement step, the liquid droplet ejection heads are arranged a plurality of discharging the liquid column. 此时,液滴喷出头列存在被其他液滴喷出头列夹持的状态的液滴喷出头和未被其他液滴喷出头列夹持的状态的液滴喷出头。 In this case, the presence status is discharged liquid droplet ejection head other droplets clamped column head row of other droplet ejection head and liquid discharge head is not clamped state column droplet discharge head. 而且,各液滴喷出头因为进行喷出时温度上升,因此进行喷出的液滴喷出头全部温度上升。 Further, since each of the droplet ejection head for discharging when the temperature rises, so the droplet discharge head for discharging all of the temperature rise. 未被其他液滴喷出头列夹持的状态的液滴喷出头的一面与空气流相接触,容易释放热量,因此温度难以上升。 Other column droplet discharge head is not clamped state droplet ejection head side in contact with the air flow, is easy to release heat, the temperature rise is difficult. 另一方面,被其他液滴喷出头列夹持的状态的液滴喷出头列因为温度上升,变得难以散热,故温度容易上升。 On the other hand, the droplet ejection head is sandwiched state of the other columns droplet ejection head column temperature increase, it becomes difficult to heat, and therefore the temperature tends to increase. 也就是说,属于被其他液滴喷出头列夹持的状态的液滴喷出头列的液滴喷出头与属于未被其他液滴喷出头列夹持的状态的液滴喷出头列的液滴喷出头相比,温度容易上升。 That is, belongs to the state of the other droplet ejection head columns sandwiched droplet ejection head of the droplet discharge head and the column not belonging to other columns droplet discharge head discharging droplets of a clamped state droplet ejection head as compared to heads column, the temperature is likely to rise. 在该测量方法中,在第一测量工序中对从属于被其他液滴喷出头列夹持的状态的液滴喷出头列的液滴喷出头喷出时的喷出量进行测量。 In this measurement method, the first step in the measurement of the droplet discharge head row belonging to other droplet ejection head state holding column of the discharge amount of the discharge liquid droplet ejection head is measured. 然后, 在第二测量工序中,用其他液滴喷出头列夹持第一测量工序中未被其他液滴喷出头列夹持的液滴喷出头列,在喷出液状体后对喷出量进行测量。 Then, in a second measurement step, the column with the other droplet ejection head is not holding a first measuring step in the other droplet ejection head of the droplet ejection head column holding a column, after the discharge of the liquid discharge amount measurement. 也就是说,在第一测量工序与第二测量工序中,测量从属于被其他液滴喷出头列夹持的状态下的液滴喷出头列的液滴喷出头喷出时的喷出量。 When the spray That is, in the first measurement step and second measurement step, the measurement is dependent on a droplet discharged at the other head of the column clamped state ejection head ejecting liquid droplet ejection heads column the amount. 因此, 液滴喷出头可以对基本相同的温度下的喷出量进行测量。 Thus, the droplet discharge head may be measured at substantially the same amount of discharge temperature. 结果,可以精确[应用例2]在上述应用例涉及的喷出量测量方法中,其特征在于,上述第一测量工序及上述第二测量工序包括:测量上述喷出量的预定的上述液滴喷出头待机的喷出前待机工序;喷出上述液状体的测量用喷出工序;和对所喷出的上述液状体的喷出量进行测量的测量工序;在上述喷出前待机工序中, 对上述液滴喷出头进行暖机驱动。 As a result, precise [Application Example 2] In the discharge amount measuring method according to the above application example, wherein the first measuring step and said second measuring step comprising: a predetermined amount of the discharge of the droplet is measured ejection head standby before discharging standby step; discharging the liquid material by measuring the discharge step; and a discharge amount of the liquid material being discharged measurement step of measuring; standby in the discharge step before , driving of the above-described droplet discharge head warm. 根据该喷出量测量方法,在喷出前待机工序中,液滴喷出头通过进行暖机驱动,从而使得液滴喷出头的温度上升。 The measuring method according to the discharge amount, the discharge step before the standby, the droplet ejection head driven by warm, so that the temperature of the droplet discharge head rises. 而且,测量液滴喷出头的温度高的状态下的喷出量。 Further, measuring the amount of discharge of the droplet discharge head of a high temperature state. 在向工件喷出液状体时,因为液滴喷出头喷出液滴,故液滴喷出头的温度上升。 When discharging the liquid material to the workpiece, because the droplet discharge head discharging droplets, so the temperature of the droplet discharge head is increased. 也就是说,液滴喷出头通过进行暖机驱动, 从而可以测量与向工件喷出液状体时大致相同的温度下的喷出量。 That is, the droplet discharge head is driven by a warm up, so that the discharge amount of discharge may be measured at substantially the same temperature when the liquid material to the workpiece. 因此, 可以精确地测量向工件喷出液状体时的喷出量。 Accordingly, the discharge can be accurately measured amount of liquid material discharged to the workpiece. [应用例3]在上述应用例涉及的喷出量测量方法中,其特征在于,上述暖机驱动是在驱动到从上述液滴喷出头不喷出上述液状体的程度后进行暖机驱动。 [Application Example 3] In the discharge amount measuring method according to the above application example, wherein the warm-up drive is warm to the extent of driving after the driving of the droplet discharge head discharging the liquid material is not . 根据该喷出量测量方法,暖机驱动到从喷嘴不喷出液滴的程度。 Based on the discharge amount measuring method, the warm-up drive to the extent not discharging liquid droplets from the nozzle. 因此,因为液滴不会浪费地喷出,故可以成为节省资源的喷出量测量方法。 Therefore, since the droplets being ejected wastefully, so that the discharge can be a method of measuring the amount of resource saving. [应用例4〗在上述应用例涉及的喷出量测量方法中,其特征在于,上述暖机驱动是在与上述测量用喷出工序中喷出上述液状体的场所大致相同的场所进行暖机驱动。 [Application Example 4〗 the discharge amount measuring method in the application example, wherein the warm-drive the liquid material is discharged in the discharge step of the measurement place with substantially the same places warm drive. 根据该喷出量测量方法,因为液滴喷出头为了进行测量而喷出液状体的场所和进行暖机驱动的场所是基本相同的场所,故在液滴喷出头进行暖机驱动后,无需为了进行测量而向喷出液状体的场所移动。 Based on the discharge amount measuring method, since the droplet ejection head for discharging the measured properties of the liquid and warm-driving condition is substantially the same place, so that the liquid droplet ejection head driven after warm up, for the measurement is moved without discharging the liquid material properties. 因此,在移动液滴喷出头的期间内无需冷却液滴喷出头即可进行喷出,故可以减小液滴喷出头的温度中的分散,可以测量喷出量。 Thus, during the movement of the droplet discharge head without cooling can be ejected droplet ejection head, it is possible to reduce the dispersion of the droplet ejection head temperature, the discharge amount can be measured. 结果,可以精确地测量喷出量。 As a result, the amount of discharge can be accurately measured. [应用例5]在上述应用例涉及的喷出量测量方法中,其特征在于,在上述第一测量工序中,对一个滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量后,对其他上述滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的全部上述液滴喷出头的喷出量进行测量,在上述第二测量工序中,对一个滑架所搭载的上述液滴喷出头中的、 预定测量的全部上述液滴喷出头的喷出量进行测量后,对其他上述滑架所搭载的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的全部上述液滴喷出头的喷出量进行测量。 [Application Example 5] In the discharge amount measuring method according to the above application example, wherein, in the first measurement step, the droplet on a carriage mounted on all the discharge head, a predetermined measurement after the droplet discharge head discharged amount was measured, the droplet of the other of the carriage mounted on the discharge, a predetermined amount of discharge of all of the above measurement is measured droplet ejection heads in the head, so that cis the amount of each of the secondary ejection carriage mounted on all of the droplet ejection head a predetermined measurement measured in said second measurement step, the droplet on a carriage mounted on the ejection head, after a predetermined amount of discharge of all the droplet discharge head is measured by measuring the droplet to the other of the carriage mounted on the discharge, a predetermined amount of all of the above measurement of the droplet ejection head performs ejection head measurement, thereby sequentially discharging amount of each of the carriage mounted on all of the droplet ejection head measuring a predetermined measurement. 根据该喷出量测量方法,在对一个滑架所搭载的液滴喷出头的喷出量全部进行测量后,顺次改变滑架,对各滑架所装置的上述液滴喷出头的喷出量进行测量。 The measuring method according to the discharge amount, the discharge amount of the discharge head is mounted on a carriage full of droplets is measured sequentially changing the carriage, each of the droplet ejection head of the apparatus of the carriage discharge amount measurement. 因此,可以利用滑架的移动量较少的方法进行测量。 Thus, measurements can be made with a smaller amount of movement of the carriage way. 结果, 因为可以减少使滑架移动的能量,故可以成为节省资源的测量方法。 As a result, energy can be reduced because the movement of the carriage, so that measurement can be saved resources. [应用例6〗在上述应用例涉及的喷出量测量方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一测量工序中,对一个滑架所搭载的预定测量的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行测量后,对其他上述滑架所搭载的上述液滴喷出头中的、属于己经测量了喷出量的上述液滴喷出头的行的上述液滴喷出头,即位于与已经进行过测量的上述液滴喷出头接近的场所的上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的上述液滴喷出头的喷出量进行测量,在上述第二测量工序中,对一个滑架所搭载的预定测量的上述液滴喷出头中的、 一部分上述液滴喷出头的喷出量进行测量后,对其他上述滑架所搭载的上述液滴喷出头中的、属于己经测量了喷出量的上述 [Application Example 6〗 the discharge amount measuring method in the application example, wherein the plurality of the droplet by a plurality of carriages mounted on columns form rows ejection head of the droplet ejection head after the measurement in the first step, a carriage mounted on predetermined measurements of the droplet ejection head, a part of the discharge amount of the droplet ejection head is measured, the other is mounted on the carriage the droplet discharge head, a droplet ejection head above the row belongs has measured the discharge amount of the discharge head, which is located close to the head of the droplet ejection have been measured the discharge amount of the droplet ejection head locations is measured, whereby the droplet sequentially on each of the predetermined measurement carriage mounted on the discharge amount of the discharge head is measured in the second measuring step , mounted on a carriage of a predetermined measurement of the droplet ejection head, the amount of discharge after a portion of the droplet ejection heads is measured, the droplet other mounted on the carriage ejection head belonging to have measured the discharge amount of the above 滴喷出头的行的上述液滴喷出头,即位于与已经进行过测量的上述液滴喷出头接近的场所的上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定测量的上述液滴喷出头的喷出量进行测量,反复进行上述第一测量工序与上述第二测量工序,从而对预定测量的全部行中的上述液滴喷出头的喷出量进行测量。 Droplet ejection head line of the droplet ejection head, which is located above the discharge amount of the droplet has been subjected to the measurement head close to the place of discharge of the droplet ejection heads is measured, so that each successively the discharge amount of the carriage mounted on a predetermined measurement of the droplet ejection head is measured, repeating the first step and the second measuring step of measuring, so that the discharge of all the lines in a predetermined measuring droplet the amount of discharge head is measured. 根据该喷出量测量方法,在属于相同行的液滴喷出头中,测量了位于较近场所的液滴喷出头的喷出量后,顺次改变行进行测量。 After discharge amount based on the measuring method, belonging to the same line of the droplet ejection head, the amount of discharge is located close to the measured properties of the liquid droplet ejection head, is measured sequentially changing the row. 在测量液滴喷出头的喷出量时,液滴喷出头在温度被管理的环境内被进行测量。 When measuring the amount of discharged liquid droplet discharge head, a droplet discharge head is measured at a temperature in a managed environment. 此时, 温度大多以大的周期变化。 At this time, most of the temperature change with a large period. 此时,接着测量液滴喷出头的某一行内邻近的液滴喷出头的喷出量。 In this case, the amount of discharge within a discharge head of the droplet ejection head row adjacent droplets then measured. 因此,在同一行中较近的喷头可以利用大致相同温度的影响所产生的误差对喷出量进行测量。 Thus, in the same row close to the discharge head can be measured using the amount of errors on substantially the same temperature generated. [应用例7]在上述应用例涉及的喷出量测量方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一测量工序中,对一个滑架所搭载的预定测量的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行测量,在上述第二测量工序中对位于上述第一测量工序测量过的上述液滴喷出头附近且属于上述液滴喷出头的行的上述液滴喷出头的喷出量进行测量,反复进行上述第一测量工序与上述第二测量工序,从而对属于规定行的上述液滴喷出头中的、预定测量的全部上述液滴喷出头的喷出量进行测量,切换到未进行测量的上述液滴喷出头所属的行,反复进行上述第一测量工序与上述第二测量工序,从而对上述液滴喷出头的喷出量进行测量。 [Application Example 7] In the discharge amount measuring method according to the above application example, wherein the plurality of the droplet by a plurality of carriages mounted on columns form rows ejection head of the droplet ejection head in the first measuring step, a carriage mounted on predetermined measurements of the droplet ejection head, a part of the discharge amount of the droplet ejection head measured in the second measurement of step the droplet discharge amount of the droplet positioned in the first measuring step of measuring through and around the head belonging to the discharge line of the liquid droplet ejection head ejection head is measured, repeating the first step and the first measurement two measuring step, whereby the droplet of row belonging to a predetermined discharge, a predetermined amount of discharge of all of the above measurement of droplet ejection heads in the head is measured, is switched to the measurement of the droplet ejection head not belong row, repeating the above-described first measurement step and the second measuring step, whereby the amount of discharge of the droplet discharge head is measured. 根据该喷出量测量方法,在对一个液滴喷出头的喷出量进行测量后, 对位于该测量过的液滴喷出头附近的液滴喷出头的喷出量进行测量。 Based on the discharge amount measuring method, after measuring the amount of a discharged liquid droplet ejection head, located on the discharge amount of the droplet through the measurement of discharge droplet discharge head near the head measurements. 因此,即使在周围的温度变化时,在同一行中邻近位置的喷头也可以利用大致相同温度的影响所产生的误差来测量喷出量。 Accordingly, even when the ambient temperature changes, in the same row position adjacent to the head may be measured using a discharge amount error on substantially the same temperature generated. [应用例8]本应用例涉及的喷出量调整方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、上述液滴喷出头喷出的液状体的喷出量进行调整,其特征在于,该喷出量调整方法包括:第一测量工序,排列多个上述液滴喷出头列,从上述液滴喷出头喷出上述液状体,对从上述液滴喷出头列中的、被上述液滴喷出头列夹持的上述液滴喷出头喷出的上述液状体的喷出量进行测量;第一调整工序,对上述第一测量工序测出的上述液滴喷出头的喷出量进行调整;第二测量工序,在上述第一调整工序之后进行,用其他的上述液滴喷出头列夹持在上述第一测量工序中未被其他的上述液滴喷出头列夹持的上述液滴喷出头,并使上述液滴喷出头喷出上述液状体后,对从上述液滴喷出头喷出的上述液状体的喷出量进行测量;和第二调整工序,对在上述 [Application Example 8] discharge amount adjusting process according to the application example, from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the droplet ejection head the discharge amount of the discharged liquid material is adjusted, characterized in that, the discharge amount adjusting method comprising: measuring a first step, the plurality of the droplet ejection heads are arranged column from the droplet ejection head ejecting the liquid material, the amount of discharge of the liquid material from the droplet discharge head of the column, the droplet ejection head is sandwiched between the droplet ejection head for ejecting the column was measured; a first adjustment step, the amount of discharge of the first measuring step measure the droplet ejection head can be adjusted; second measurement step, performed after said first adjustment step, the other discharge head sandwiched droplet column in the above a first measurement step is not the other droplet ejection head row holding the droplet ejection head, and after the droplet ejection head for ejecting the liquid material, ejected from the droplet to the ejection head the discharge amount of the liquid material is measured out; and a second adjustment step, for the above 二测量工序中测出的上述液滴喷出头的喷出量进行调整。 Two discharge amount measured in the measuring step of the droplet ejection head can be adjusted. 根据该喷出量调整方法,在第一调整工序中对第一测量工序测量的液滴喷出头进行调整后,在第二调整工序中对第二测量工序测量的液滴喷出头进行调整。 According to the method for adjusting the amount of discharge, after a first adjustment step of adjusting a first ejection head measured by the measuring step and droplets, and a second adjusting step to adjust the ejection head of a second measuring step of measuring drops . 而且,根据第一测量工序及第二测量工序中精确地测量了喷出量的测量结果,在第一调整工序及第二调整工序中可以精确地调整喷出[应用例9〗在上述应用例涉及的喷出量调整方法中,其特征在于,还包括:第一喷出量调整工序,反复进行上述第一测量工序与上述第一调整工序,以使上述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行上述第二测量工序与上述第二调整工序,以使上述喷出量接近目标喷出量。 Further, according to the first measurement step and second measurement step of a measurement result precisely measure the amount of discharge can be precisely adjusted in the first adjustment step and a second step of adjusting the discharge [Application Example 9 Application Example In the above-〗 according to the discharge amount adjusting process, characterized by further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the discharge amount close to the target discharge quantity; and a second discharge amount adjusting step, the second measuring step is repeated and the second adjusting step, so that the discharge amount close to the target discharge amount. 根据该喷出量调整方法,具有第一喷出量调整工序与第二喷出量调整工序。 According to the method for adjusting the amount of discharge, the discharge amount adjusting step of having a first and a second discharge amount adjusting step. 而且,在第一喷出量调整工序中,根据第一测量工序测出的喷出量的测量结果,在第一调整工序中进行喷出量的调整。 Further, in a first step of adjusting the discharge amount, the discharge amount of the measurement result of the first measurement step is measured, for adjusting the discharge amount of the first adjustment step. 接着,通过反复进行第一测量工序与第一调整工序,从而使得喷出量接近目标喷出量。 Subsequently, by repeatedly adjusting a first measurement step and the first step, so that the discharge amount close to the target discharge amount. 因此, 与仅进行一次调整工序的方法相比,可以精确地调整喷出量。 Thus, compared with the method for adjusting step only once, the amount of discharge can be precisely adjusted. 而且,即使在第二喷出量调整中也同样地进行,因此与仅进行一次调整工序的方法相比,可以精确调整喷出量。 Further, similarly performed even in the second discharge amount adjustment, as compared with the method of adjusting only one step, the amount of discharge can be precisely adjusted. 结果,可以成为能精确地调整喷出量的方法。 As a result, the method can be accurately adjust the discharge amount. [应用例10]在上述应用例涉及的喷出量调整方法中,其特征在于,上述第一测量工序及上述第二测量工序包括:测量上述喷出量的预定的上述液滴喷出头待机的喷出前待机工序;喷出上述液状体的测量用喷出工序;和对所喷出的上述液状体的喷出量进行测量的测量工序;在上述喷出前待机工序中,上述液滴喷出头进行暖机驱动。 [Application Example 10] In the method for adjusting the discharge amount of the above application example, wherein the first measuring step and said second measuring step comprises: measuring a predetermined amount of the discharge of the droplet ejection head standby before discharging standby step; discharging the liquid material by measuring the discharge step; and a discharge amount of the liquid material being discharged measurement step of measuring; standby in the discharge step before the droplet warm-driven ejection head. 根据该喷出量调整方法,在喷出前待机工序中液滴喷出头通过进行暖机驱动,从而使液滴喷出头的温度上升。 According to the method for adjusting the amount of discharge, the discharging standby step before the droplet ejection head driven by warm, so that the temperature of the droplet discharge head rises. 而且,对液滴喷出头的温度高的状态下的喷出量进行测量。 Further, the amount of discharge at a high temperature state droplet ejection head is measured. 在向工件喷出液状体时,因为液滴喷出头喷出液状体,故液滴喷出头的温度上升。 When discharging the liquid material to the workpiece, because the liquid discharge head discharging the liquid, so the temperature rise of the droplet ejection head. 也就是说,液滴喷出头通过进行暖机驱动,从而对与向工件喷出液状体时大致相同的温度下的喷出量进行测量后,调整喷出量。 That is, the droplet ejection head driven by warming, thereby the discharge amount of the liquid material discharged when the workpiece is substantially the same as the temperature measured after adjusting the discharge amount. 因此,可以精确地调整向工件喷出液状体时的喷出量。 Thus, it is possible to precisely adjust the discharge amount of the discharged liquid material to the workpiece. [应用例11]在上述应用例涉及的喷出量调整方法中,其特征在于,上述暖机驱动是在驱动到从上述液滴喷出头不喷出上述液状体的程度后进行暖机驱动。 [Application Example 11] In the method for adjusting the discharge amount of the above application example, wherein the warm-up drive is warm to the extent of driving after the driving of the droplet discharge head discharging the liquid material is not . 根据该喷出量调整方法,可以暖机驱动到从喷嘴不喷出液滴的程度。 According to the method for adjusting the amount of discharge, warm-up can be driven to an extent not discharging liquid droplets from the nozzle. 因此,因为不会浪费地喷出液滴,故可以成为节省资源的喷出量调整方法。 Thus, since the ejected liquid droplets it is not wasted, so that the discharge amount can be a method for adjusting resource savings. [应用例12]在上述应用例涉及的喷出量调整方法中,其特征在于,上述暖机驱动是在与上述测量用喷出工序中喷出上述液状体的场所大致相同的场所进行暖机驱动。 [Application Example 12] In the method for adjusting the discharge amount of the above application example, wherein the warm-up drive is substantially the same in warm ejecting the liquid material by discharging the above-described measuring step places place drive. 根据该喷出量调整方法,因为液滴喷出头为了进行测量而喷出液状体的场所和进行暖机驱动的场所为大致相同的场所,故在液滴喷出头进行暖机驱动后,无需为了测量而向喷出液状体的场所移动。 According to the method for adjusting the amount of discharge, because the droplet ejection head for discharging the measured properties of the liquid and warm-driving condition is substantially the same place, so that the liquid droplet ejection head driven after warm up, to measure moved without discharging the liquid material properties. 因此,在移动液滴喷出头的期间内无需冷却液滴喷出头即可进行喷出,故可以减小液滴喷出头的温度中的分散,可以测量喷出量。 Thus, during the movement of the droplet discharge head without cooling can be ejected droplet ejection head, it is possible to reduce the dispersion of the droplet ejection head temperature, the discharge amount can be measured. 结果,可以精确地测量喷出量。 As a result, the amount of discharge can be accurately measured. [应用例13]在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第一喷出量调整工序中,对属于被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头、和属于未被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头所喷出的上述液状体的喷出量进行调整。 [Application Example 13] In the method for adjusting the discharge amount of the above application example, wherein, in the first discharge amount adjusting step, the columns belonging to the droplet ejection head is sandwiched the droplet ejection the droplet ejection head of the column head, and not belonging to the discharge amount of the liquid droplet ejection head of the droplet ejection head of the column holding a column of the droplet ejection head of the liquid material ejected to adjust. 根据该喷出量调整方法,在第一测量工序中,属于未被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头在第一喷出量调整工序与第二喷出量调整工序这两个工序中可以被调整喷出量。 According to the method for adjusting the amount of discharge, in a first measurement step, the liquid droplet ejection heads belonging to the other column not sandwiched droplet ejection head row droplet ejection head in a first adjustment step and the second discharge amount two discharge amount adjusting step of the two step discharge amount can be adjusted. 在第一测量工序中,属于未被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头在第一喷出量调整工序中进行喷出量的调整。 In a first measurement step, the liquid droplet ejection heads belonging to the other column not sandwiched droplet ejection head row droplet discharge head discharging a first amount of adjustment of the discharge amount adjusting step. 而且,该液滴喷出头的喷出量在调整为接近目标喷出量后,在第二喷出量调整工序中, 再次调整喷出量。 Further, the amount of discharge of the droplet ejection head was adjusted to close to the target discharge amount, the discharge amount adjusting step, the second, again adjusting the discharge amount. 在第二喷出量调整工序中,液滴喷出头的温度比第一喷出量调整工序中的温度还要上升。 In the second discharge amount adjusting step, the droplet discharge head temperature than the first discharge amount adjusting step is even temperature rise. 而且,液滴喷出头与在第一喷出量调整工序中未进行调整的情况相比,可以利用较少的反复次数进行调整。 Further case, the droplet discharge head and is not performed in a first adjustment step of adjusting the discharge amount in comparison, can be adjusted with a smaller number of iterations. 结果, 可以成为生产率较佳的调整方法。 As a result, the productivity can be a preferred method of adjustment. [应用例14]在上述应用例涉及的喷出量调整方法中,其特征在于,在由上述第一测量工序及上述第一调整工序构成的工序和由上述第二测量工序及上述第二调整工序构成的工序的至少一个工序中,多次进行测量工序及调整工序,上述调整工序包括粗调整工序与微调整工序。 [Application Example 14] In the method for adjusting the discharge amount of the above application example, wherein the step consisting of the first measurement step and the first adjusting step and said second measuring step and said second adjustment made in at least one process step in the step configuration, multiple measurement step and adjusting step, the adjusting step includes a coarse adjustment step and fine adjustment step. 在此,粗调整工序与微调整工序的区别在于,进行调整时的喷出量的大小。 Here, the difference between the coarse and fine adjustment step of adjusting step that the discharge amount when resizing. 而且,在粗调整工序中,与微调整工序相比,可以大幅度改变喷出量后进行调整。 In the coarse adjustment step, compared with the fine adjustment step may be adjusted to change the substantial discharge amount. 根据该喷出量调整方法,进行粗调整与微调整。 According to this method the discharge amount adjustment, coarse adjustment and fine adjustment. 此时,与反复进行微调整,每次少量地调整喷出量的情况相比,组合通过粗调整使得喷出量大幅度变化的工序和微调整工序后进行的方法,可以以较少的次数调整为作为目标的喷出量。 In this case, as compared with the case where the fine adjustment is repeated, each time a small amount to adjust the discharge amount, so that the combination of coarse adjustment and a step carried out after the method step of adjusting the micro-ejection amount changes greatly, with less number of times can be as the discharge amount is adjusted to the target. 因此,可以生产率良好地进行调整。 Therefore, the productivity can be adjusted well. [应用例15]在上述应用例涉及的喷出量调整方法中,其特征在于,在上述粗调整工序之前进行的测量工序中喷出的上述液状体的量,比在上述微调整工序之前进行的测量工序中喷出的上述液状体的量少。 [Application Example 15] In the method for adjusting the discharge amount of the above application example, wherein the amount of the liquid material measuring step is performed before said discharged coarse adjustment step, the ratio before said fine adjustment step a small amount of the liquid material discharged in step measurement. 根据该喷出量调整方法,在粗调整工序中,与微调整工序相比,可以以较少的喷出量迸行喷出量的测量。 According to the method for adjusting the amount of discharge, the coarse adjustment step, compared with the fine adjustment step, the discharge amount can be measured with less discharge amount into line. 因此,可以减少所喷出的液状体的消耗量。 Thus, it is possible to reduce the consumption amount of the liquid discharged. 结果,可以成为节省资源的调整方法。 As a result, adjustments could be ways to save resources. [应用例16]在上述应用例涉及的喷出量调整方法中,其特征在于,在上述粗调整工序之前进行的测量工序中单位时间内从上述液滴喷出头喷出上述液状体的次数,比在上述微调整工序之前进行的测量工序中单位时间内从上述液滴喷出头喷出上述液状体的次数多。 [Application Example 16] In the method for adjusting the discharge amount of the above application example, wherein the number of the measuring step is performed before said step of rough adjustment unit time from the droplet discharge head discharging the liquid material is , more than the number of times of the measurement step is performed before said step of fine adjustment unit time from the droplet ejection head ejecting the liquid material. 根据该喷出量调整方法,在粗调整工序中,与微调整工序相比,增多单位时间内喷出的次数。 According to the method for adjusting the amount of discharge, the coarse adjustment step, as compared with the fine adjustment step of increasing the number of ejection per unit time. 在粗调整工序以及微调整工序中,进行大致相同次数的喷出,测量喷出量时,粗调整工序可以在短时间内进行喷出。 In the coarse adjustment and the fine adjustment step of the step, performed substantially the same number of the ejection, measurement of the amount of discharge, the discharge coarse adjustment step may be performed in a short time. 因此可以生产率良好地进行调整。 It can be adjusted with high productivity. [应用例17]在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第一调整工序中,对一个滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行了调整后,对其他上述滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行调整,顺次对各上述滑架所搭载的预定调整的全部上述液滴喷出头的喷出量进行调整, 在上述第二调整工序中,对一个滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行调整后,对其他上述滑架所搭载的上述液滴喷出头中的、预定调整的全部上述液滴喷出头的喷出量进行调整,顺次对各上述滑架所搭载的预定调整的全部上述液滴喷出头的喷出量进行调整。 [Application Example 17] In the method for adjusting the discharge amount of the above application example, wherein, in the first adjustment step, a droplet of the ejection carriage mounted on the entire head, a predetermined adjustment after the amount of the droplet ejection discharge head is adjusted, the droplet of the other of the carriage mounted on the discharge, a predetermined amount of adjustment of the discharge of all the droplet ejection heads in the head is adjusted cis times the amount of all of the above liquid droplet ejection head ejecting predetermined adjustment each mounted on the carriage is adjusted, in the second step of adjusting the droplet on a carriage mounted on the ejection head, after a predetermined amount of discharge of all the droplet ejection head adjusted to adjust the droplet to the other of the carriage mounted on the discharge, a predetermined amount of adjustment of the discharge of all the droplet ejection heads in the head is adjusting the amount of discharged sequentially all of the droplet ejection head of each of the predetermined adjustments mounted on the carriage is adjusted. 根据该喷出量调整方法,在对一个滑架所搭载的液滴喷出头的喷出量全部进行调整后,顺次改变滑架,对各滑架所装置的上述液滴喷出头的喷出量进行调整。 According to the method for adjusting the amount of discharge, the droplet after a carriage mounted on all of the adjustment amount discharged from the discharge head sequentially changing the carriage, each of the droplet ejection head of the apparatus of the carriage adjusting the discharge amount. 因此,可以利用滑架的移动量较少的方法进行调整。 Thus, it can be adjusted with a smaller amount of movement of the carriage way. 结果, 因为可以减少使滑架移动的能量,故可以成为节省资源的调整方法。 As a result, energy can be reduced because the movement of the carriage, it can be a method for adjusting resource savings. [应用例18]在上述应用例涉及的喷出量调整方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一调整工序中,对一个滑架所搭载的预定调整的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行调整后,对其他上述滑架所搭载的上述液滴喷出头中的、属于已经调整了喷出量的上述液滴喷出头的行的一部分上述液滴喷出头的喷出量进行测量,从而顺次对各上述滑架所搭载的预定调整的上述液滴喷出头的喷出量进行调整,在上述第二调整工序中,对一个滑架所搭载的预定调整的上述液滴喷出头中的、 一部分上述液滴喷出头的喷出量进行调整后,对其他上述滑架所搭载的上述液滴喷出头中的、属于己经调整了喷出量的上述液滴喷出头的行的一部分上述液滴喷出头的喷出量进行调整,顺次对 [Application Example 18] In the method for adjusting the discharge amount of the above application example, wherein the plurality of the droplet by a plurality of the carriage mounted on a column forming the droplet ejection head ejecting a plurality of rows of heads after, in the first adjustment step, the adjustment of the droplet to a predetermined carriage mounted on the ejection head, a part of the discharge amount of the droplet ejection head can be adjusted, the other is mounted on the carriage the droplet discharge head, the discharge amount has been adjusted belonging to a part of the liquid droplet ejection head of the droplet discharge amount of the row ejection head measured sequentially so that each of the carriage the droplet discharge amount adjusting mounted predetermined discharge head is adjusted in the second adjustment step, the adjustment of a predetermined droplet carriage mounted on the ejection head portion of the droplet ejection after adjusting the amount of discharge head, the droplet of the other of the carriage mounted in the discharge head, a droplet discharge head portion of the line belonging to the already adjusted ejection amount ejection the discharge amount of the head is adjusted to sequentially 上述滑架所搭载的预定调整的上述液滴喷出头的喷出量进行调整,反复进行上述第一调整工序与上述第二调整工序,从而对预定调整的全部行中的上述液滴喷出头的喷出量进行调整。 Discharging a predetermined amount of the adjustment carriage mounted on the droplet discharge head is adjusted, repeating the first adjusting step and the second adjusting step, thereby adjusting the discharge of all the lines in a predetermined droplet the amount of discharge head is adjusted. 根据该喷出量调整方法,在属于相同行的液滴喷出头中,调整了位于较近场所的液滴喷出头的喷出量后,顺次改变行进行调整。 After the adjustment method based on the discharge amount, belonging to the same row of the droplet ejection head, the ejection amount adjustment places located close droplet ejection head sequentially changing the row to be adjusted. 在调整液滴喷出头的喷出量时,液滴喷出头在温度被管理的环境内被进行调整。 When adjusting the amount of discharge of the droplet discharge head, a droplet discharge head is adjusted in a temperature-managed environment. 此时, 温度大多以大的周期变化。 At this time, most of the temperature change with a large period. 此时,接着调整液滴喷出头的某一行内邻近的液滴喷出头的喷出量。 At this time, a row then adjusts the droplet discharge head adjacent the discharge amount of the droplet discharge head. 因此,在同一行中较近的喷头可以利用大致相同温度的影响所产生的误差对喷出量进行调整。 Thus, in the same row close to the discharge head can be adjusted by the amount of errors on substantially the same temperature generated. [应用例19]在上述应用例涉及的喷出量调整方法中,其特征在于,由多个上述滑架所搭载的多个上述液滴喷出头列形成上述液滴喷出头的多行,在上述第一调整工序中,对一个滑架所搭载的预定调整的上述液滴喷出头中的、一部分上述液滴喷出头的喷出量进行调整,在上述第二调整工序中对位于上述第一调整工序调整过的上述液滴喷出头附近且属于上述液滴喷出头的行的上述液滴喷出头的喷出量进行调整,反复进行上述第一调整工序与上述第二调整工序,从而对属于规定行的上述液滴喷出头的喷出量进行调整,切换到未进行调整的上述液滴喷出头所属的行,反复进行上述第一调整工序与上述第二调整工序,从而对上述液滴喷出头的喷出量进行调整。 [Application Example 19] In the method for adjusting the discharge amount of the above application example, wherein the plurality of the droplet by a plurality of the carriage mounted on a column forming the droplet ejection head ejecting a plurality of rows of heads in the first step of adjusting the droplet for a predetermined adjustment of the carriage mounted on the ejection head, a part of the discharge amount of the droplet ejection head is adjusted to the adjustment in the second step the droplet discharge amount of the droplet positioned in the first step of adjusting the adjusted around the head and belonging to the discharge line of the droplet discharge head discharge head is adjusted, repeating the first step and the first adjusting two adjusting step, whereby the above-described droplet discharge line belonging to a predetermined amount of discharge head is adjusted, is not switched to the droplet ejection adjusting the line head belongs, repeating the first step and the second adjusting adjusting step, thereby the discharge amount of the droplet ejection head can be adjusted. 根据该喷出量调整方法,在对一个液滴喷出头的喷出量进行调整后, 对位于该调整过的液滴喷出头附近的液滴喷出头的喷出量进行调整。 According to the method for adjusting the amount of discharge, in the discharge amount of a liquid droplet discharge head is adjusted, the amount of discharge of the droplet discharge head located in the vicinity of the droplet ejection head adjusted to adjust. 因此,即使在周围的温度变化时,在同一行中邻近位置的喷头也可以利用大致相同温度的影响所产生的误差来调整喷出量。 Accordingly, even when the ambient temperature changes, in the same row position adjacent to the head may affect substantially the same temperature using an error generated by the discharge amount is adjusted. [应用例20]本应用例涉及的喷出量调整方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、上述液滴喷出头喷出的液状体的喷出量进行调整,其特征在于,该喷出量调整方法包括:第一测量工序,排列多个上述液滴喷出头列,从上述液滴喷出头喷出上述液状体,对从上述液滴喷出头列中的、被上述液滴喷出头列夹持的上述液滴喷出头喷出的上述液状体的喷出量进行测量;第一调整工序,对上述第一测量工序测出的上述液滴喷出头的喷出量进行调整;第二测量工序,在上述第一调整工序之后进行,用其他的上述液滴喷出头列夹持在上述第一测量工序中未被其他的上述液滴喷出头列夹持的上述液滴喷出头,并使上述液滴喷出头喷出上述液状体后,对从上述液滴喷出头喷出的上述液状体的喷出量进行测量;和第二调整工序,对在上述 [Application Example 20] discharge amount adjusting process according to the application example, from a plurality of carriages are arranged and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the droplet ejection head the discharge amount of the discharged liquid material is adjusted, characterized in that, the discharge amount adjusting method comprising: measuring a first step, the plurality of the droplet ejection heads are arranged column from the droplet ejection head ejecting the liquid material, the amount of discharge of the liquid material from the droplet discharge head of the column, the droplet ejection head is sandwiched between the droplet ejection head for ejecting the column was measured; a first adjustment step, the amount of discharge of the first measuring step measure the droplet ejection head can be adjusted; second measurement step, performed after said first adjustment step, the other discharge head sandwiched droplet column in the above a first measurement step is not the other droplet ejection head row holding the droplet ejection head, and after the droplet ejection head for ejecting the liquid material, ejected from the droplet to the ejection head the discharge amount of the liquid material is measured out; and a second adjustment step, for the above 第二测量工序中测出的上述液滴喷出头的喷出量进行调整;还包括:第一喷出量调整工序,反复进行上述第一测量工序与上述第一调整工序,以使上述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行上述第二测量工序与上述第二调整工序,以使上述喷出量接近目标喷出量;在上述第一喷出量调整工序中,除了属于被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头以外,还对从属于未被上述液滴喷出头列夹持的上述液滴喷出头列的上述液滴喷出头喷出的上述液状体的喷出量进行粗调整。 Measuring the amount of the second discharge step is measured the droplet discharge head is adjusted; further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the ejection the amount close to the target discharge amount; and a second discharge amount adjusting step, the second measuring step is repeated and the second adjusting step, so that the discharge amount close to the target discharge amount; the amount of the first discharge adjustment step, in addition to being the droplet ejection head is sandwiched between the droplet ejecting the column head row of droplet ejection heads, it also is not subordinate to the droplet ejection head row holding the the amount of the liquid material is discharged droplet ejection head of the droplet ejection head of the column discharged coarse adjustment. 根据该喷出量调整方法,与在第一喷出量调整工序中未进行调整的情况相比,可以以较少的反复次数进行调整。 According to the method for adjusting the amount of discharge, compared with the case where no adjustment of the discharge amount adjustment in the first step, can be adjusted with a small number of iterations. 结果,可以成为生产率优良的调整方法。 As a result, productivity can be a good adjustment method. [应用例21]在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第一喷出量调整工序中,调整为:从未被上述液滴喷出头列夹持的上述液滴喷出头喷出的上述液状体的喷出量比从被上述液滴喷出头列夹持的上述液滴喷出头喷出上述液状体的喷出量少。 [Application Example 21] In the method for adjusting the discharge amount of the above application example, wherein, in the first discharge amount adjusting step of adjusting: the droplet ejection head are never sandwiched the column discharging the liquid material than the droplet ejection head for ejecting ejection head ejecting a small amount of the liquid material ejected from the droplet ejection head is sandwiched between the droplet column. 根据该喷出量调整方法,调整为从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量减少。 The reduction of the discharge amount of the discharge amount adjustment method, the adjustment is never sandwiched droplet ejection head row droplet discharge head discharging the liquid material. 未被液滴喷出头列夹持的液滴喷出头由于受到风的影响,温度降低。 Column droplet discharge head is not clamped droplet ejection head due to the influence of wind, temperature decreases. 而且,在温度降低时,喷出量减少。 Further, when the temperature decreases, the discharge amount is reduced. 在调整为喷出作为目标的喷出量的液状体后,在用其他液滴喷出头夹持并测量喷出量时,由于液滴喷出头的温度升高,故喷出量会超过作为目标的喷出量。 After adjusting the discharge amount of the liquid material is discharged as a target, while the other droplet ejection head holder and measuring the amount of discharge, since the temperature of the droplet discharge head is increased, so that the discharge amount exceeds as the discharge amount of goals. 在此,调整为从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量比目标喷出量少。 Here, the adjustment is never discharged less than the target discharged liquid droplet ejection head of the droplet ejection head column holding the liquid is discharged. 因此,在用其他液滴喷出头夹持并测量喷出量时, 可以从与目标喷出量接近的喷出量开始对喷出量进行调整。 Thus, when the liquid droplet ejection head other gripping and measuring the amount of discharge, the discharge amount can be started from the closest to the target discharge amount of the discharge amount is adjusted. 结果,因为可以以极少的调整次数进行调整,故可以生产率良好地进行调整。 As a result, since the number of times may be adjusted to adjust the minimal, it is possible to adjust with good productivity. [应用例22]在上述应用例涉及的喷出量调整方法中,其特征在于,在上述第二测量工序中,以从被上述液滴喷出头列夹持的上述液滴喷出头喷出上述液状体的喷出量比上述第一喷出量调整工序中设定的喷出量少的方式变更设定后,喷出上述液状体,在上述第二调整工序中,对喷出量进行调整。 [Application Example 22] In the method for adjusting the discharge amount of the above application example, wherein, in the second measuring step, to be ejected from the droplet ejection head of the droplet ejection head of the column clamp after the above-mentioned first discharge than the liquid material discharge amount adjusting step of setting a manner of discharging a small amount of change is set, the liquid material discharged, in the second step of adjusting the discharge volume to adjust. 根据该喷出量调整方法,调整为从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量比目标喷出量少。 The discharge is less than the target discharge amount adjusting method of the discharge, the discharge head is adjusted never been clamped column droplet discharge head discharging droplets of the liquid material. 因此,在用其他液滴喷出头夹持并测量喷出量时,可以从与目标喷出量接近的喷出量开始对喷出量进行调整。 Thus, when the liquid droplet ejection head other gripping and measuring the amount of discharge, the discharge amount can be started from the closest to the target discharge amount of the discharge amount is adjusted. 结果,因为可以以极少的调整次数进行调整,故可以生产率良好地进行调整。 As a result, since the number of times may be adjusted to adjust the minimal, it is possible to adjust with good productivity. [应用例23]本应用例涉及的液状体的喷出方法,从液滴喷出头向工件喷出液状体,其特征在于,该液状体的喷出方法包括:对喷出量进行调整的喷出量调整工序;和向上述工件喷出液滴的涂敷工序;在上述喷出量调整工序中采用上述应用例记载的喷出量调整方法进行调整。 [Application Example 23] A method for discharging liquid according to the present application example, the liquid droplet discharge head discharging the liquid material from the workpiece, characterized in that the liquid material discharging method comprising: adjusting an amount of discharge the discharge amount adjusting step; and a discharging step of applying droplets to the workpiece; discharge amount using the application example described in the above-described step of adjusting the discharge amount adjusting method for adjusting. 根据该液状体的喷出方法,在测量了喷出量后通过对喷出量进行调整,从而使得喷出量成为所希望的喷出量,并向工件喷出。 The liquid material discharge method, after the measurement of the amount discharged by the discharge amount adjustment, so that the discharge amount becomes the desired amount of discharge, and discharge the workpiece. 而且,因为以精确地测量了喷出量的测量值为基础,对喷出量进行调整,故向工件喷出的喷出量可以进行精确地调整过的喷出量的喷出。 Further, since the measurement to accurately measure the amount of discharge based on the values ​​of the discharge amount is adjusted, so that the amount of the discharged workpiece may be discharged through the discharge precisely adjusted ejection amount. 结果,可以使喷出量精确地向工件进行喷出。 As a result, the discharge amount can be accurately discharged to the workpiece. [应用例24]本应用例涉及的滤色器的制造方法,具有在基板上涂敷彩墨而形成滤色器的工序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述彩墨。 [Application Example 24] A method for producing a color filter according to the present application example, a step of applying the color ink on a substrate to form a color filter, which is characterized in that a liquid material discharging method described in the application example, and discharging color ink described above was applied to the substrate. 根据该滤色器的制造方法,由于可以以使彩墨的喷出量精确的方式喷出并进行涂敷,故可以成为以使彩墨的涂敷量精确的方式被涂敷的滤色器的制造方法。 The method of manufacturing the color filter, and since the discharge is applied to the discharging amount of color ink in a precise manner, it can be applied so that the amount of color ink is applied in a precise manner the filter the manufacturing methods. [应用例25]本应用例涉及的液晶显示装置的制造方法,具有以下工序,即在第一基板与第二基板上形成取向膜,在上述第一基板与上述第二基板之间夹持液晶而形成液晶显示装置,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述第一基板与上述第二基板中的至少一方喷出并涂敷上述取向膜的材料后,通过使其固化,从而形成上述取向膜。 [Application Example 25] A method for manufacturing a liquid crystal display according to the present application example, it includes the steps, i.e., an alignment film is formed on the first substrate and the second substrate, a liquid crystal sandwiched between the first substrate and the second substrate after forming the liquid crystal display device, characterized in that a liquid material discharging method described in the application example, the above-mentioned discharge and coated with the alignment film material is at least one of said second substrate to said first substrate by cured, thereby forming the alignment film. 根据该液晶显示装置的制造方法,由于可以以使取向膜材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使取向膜材料的涂敷量精确的方式被涂敷的液晶显示装置的制造方法。 The method of manufacturing the liquid crystal display apparatus, since the discharge amount in the alignment film material in a precise manner and applying the discharge, so that it can become a liquid crystal alignment film material is applied in an amount to be applied in a precise manner the method of manufacturing a display device. [应用例26]本应用例涉及的液晶显示装置的制造方法,具有以下工序,即在第一基板上涂敷液晶后,在上述第一基板与第二基板之间夹持上述液晶而形成液晶显示装置,其特征在于,采用上述应用例记载的液状体的喷出方法, 向上述第一基板喷出并涂敷上述液晶。 [Application Example 26] A method for manufacturing a liquid crystal display according to the present application example, the following step, i.e., after coating the liquid crystal, between the first and second substrates sandwiching the liquid crystal is formed on the first substrate display apparatus, wherein, using the liquid discharging method described in the application example, the discharge is applied to the first substrate and the liquid crystal. 根据该液晶显示装置的制造方法,由于可以以使液晶的喷出量精确的方式喷出并进行涂敷,故可以成为以使液晶的涂敷量精确的方式被涂敷的液晶显示装置的制造方法。 The method of manufacturing the liquid crystal display apparatus, since the discharge and the discharge amount is applied to the liquid crystal in a precise manner, it is possible that the coating amount of the liquid crystal into a precise manner is applied a liquid crystal display device manufacturing method. [应用例27]本应用例涉及的电光装置的制造方法,具有在基板上涂敷发光元件形成材料后通过使其固化而形成发光元件的工序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述发光元件形成材料。 [Application Example 27] A method for manufacturing an electro-optical device according to the present application example, the light emitting device having a step of applying the material forming the light emitting element is formed by curing on a substrate, wherein the liquid material to the application using the embodiment described的喷出方法,向上述基板喷出并涂敷上述发光元件形成材料。根据该电光装置的制造方法,由于可以以使发光元件形成材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使发光元件形成材料的涂敷量精确的方式被涂敷的电光装置的制造方法。 [应用例28]本应用例涉及的电光装置的制造方法,具有在基板上涂敷液状体的电极材料后通过使其固化而形成电极的工序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述液状体的上述电极材料。根据该电光装置的制造方法,由于可以以使液状体的电极材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使电极材料的涂敷量精确的方式被涂敷,从而形成电极的电光装置的制造方法。 [应用例29]本应用例涉及的电光装置的制造方法,具有在基板上涂敷液状体的布线材料后通过使其固化而形成布线的工序,其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述液状体的上述布线材料。根据该电光装置的制造方法,由于可以以使液状体的布线材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使布线材料的涂敷量精确的方式被涂敷,从而形成布线的电光装置的制造方法。 [应用例30]本应用例涉及的电光装置的制造方法,具有以下工序,即在基板上涂敷液状体的半导体材料并使其固化后,通过进行加热,从而形成半导体, 其特征在于,采用上述应用例记载的液状体的喷出方法,向上述基板喷出并涂敷上述液状体的上述半导体材料。根据该电光装置的制造方法,由于可以以使液状体的半导体材料的喷出量精确的方式喷出并进行涂敷,故可以成为以使半导体材料的涂敷量精确的方式被涂敷,从而形成半导体的电光装置的制造方法。附图说明图1是表示第一实施方式涉及的液滴喷出装置的构成的概略立体图。图2 (a)是滑架的示意俯视图,(b)是用于说明滑架的结构的示意侧视图,(c)是用于说明液滴喷出头的结构的主要部分示意剖视图。图3是液滴喷出装置的电气控制框图。图4是表示向基板喷出液滴并进行涂覆的制造工序的流程图。图5是用于说明调整液滴喷出头的喷出量的顺序的图。图6是说明利用了液滴喷出装置的喷出方法的图。图7 (a)及(b)是表示液滴喷出头的驱动波形的时间图,(c)是表示驱动喷出次数与喷嘴温度的关系的曲线图,(d)是表示驱动电压与喷出量的关系的曲线图。图8是说明利用了液滴喷出装置的喷出方法的图。图9是说明利用了液滴喷出装置的喷出方法的图。图10是表示第三实施方式涉及的向基板喷出液滴并进行涂覆的制造工序的流程图。图11是表示第七实施方式涉及的液滴喷出装置的构成的概略立体图。图12是表示向基板喷出液滴并进行涂覆的制造工序的流程图。图13是表示第八实施方式涉及的向基板喷出液滴并进行涂覆的制造工序的流程图。图14是表示第九实施方式涉及的向基板喷出液滴并进行涂覆的制造工序的流程图。图15是表示第十实施方式涉及的液晶显示装置的结构的概略分解立体图。图16是表示第十一实施方式涉及的有机EL装置的结构的概略分解立体图。图17是表示第十二实施方式涉及的表面电场显示装置的概略分解立体图。图18是表示第十三实施方式涉及的等离子显示装置的结构的概略分解立体图。图中:7—作为工件的基板,12 —滑架,12a—第一滑架,12b—第二滑架,12c—第三滑架,12d—第四滑架,12e—第五滑架,12f—第六滑架, 14一液滴喷出头,41一作为液状体的功能液,44一液滴,71 —作为液滴喷出头列的第一喷头列,72 —作为液滴喷出头列的第二喷头列,73 —作为液滴喷出头列的第三喷头列,74-作为液滴喷出头列的第四喷头列,75 —作为液滴喷出头列的第五喷头列,76 —作为液滴喷出头列的第六喷头列,77 一作为液滴喷出头列的第七喷头列,78 —作为液滴喷出头列的第八喷头列,79 —作为液滴喷出头列的第九喷头列,80 —作为液滴喷出头列的第十喷头列,81—作为液滴喷出头列的第十一喷头列,82 —作为液滴喷出头列的第十二喷头列,104 —喷出量,IIO —作为行的第一喷头行,lll一作为行的第二喷头行,112 —作为行的第三喷头行,120 作为电光装置的液晶显示装置,122 —液晶,124 —作为第一基板的元件基板,125 —作为第二基板的对置基板,130、 157—作为电极的像素电极,131、 151—作为半导体的TFT元件,132、 152、 169 —作为布线的扫描线,133、 153、 170—作为布线的数据线,135、 144一取向膜,141B、 141G、 141R—滤色器,143 一作为电极的对置电极,147—作为电光装置的有机EL装置,148、 166、 172、 181、 188 —基板,158 —作为发光元件的空穴输送层,159B、 159G、 159R—作为发光元件的发光层,160 —作为发光元件的功能层,161 —作为电极的阴极,163 —作为电光装置的表面电场显示装置,168 —作为电极的电子发射元件,173 —作为电极的阳极,178 —作为电光装置的等离子显示装置,183 —作为电极的地址电极,l卯一作为电极的总线电极,191一作为电极的维持电极。具体实施方式以下,根据附图对实施方式进行说明。其中,为了使各附图中的各部件为在各附图上能识别的程度的大小, 故以每个部件的縮小比例不同的方式进行图示。 (第一实施方式)在本实施方式中,根据图1〜图9,对液滴喷出装置、利用该液滴喷出装置使液状体成为液滴并喷出时的特征性例子进行说明。 (液滴喷出装置)首先,根据图1〜图3,说明向工件喷出液滴并进行涂覆的液滴喷出装置l。关于液滴喷出装置,虽然存在各种各样的装置,但优选采用喷墨法的装置。喷墨法能进行微小液滴的喷出,因此适用于微细加工。图1是表示液滴喷出装置的构成的概略立体图。由液滴喷出装置1喷出功能液并进行涂覆。如图1所示,液滴喷出装置1包括形成为长方体形状的基台2。在本实施方式中,将该基台2的长边方向设为Y方向,将与该Y方向正交的方向设为X方向。在基台2的上表面2a上,沿Y方向延伸的一对导向轨3a、 3b突设于该Y方向的整个宽度上。在该基台2的上侧,安装有作为工作台的台面4, 其构成具备与导向轨3a、 3b对应的未图示的直动机构的扫描装置。该台面4的直动机构例如为螺纹式直动机构,其具备:沿着导向轨3a、 3b沿Y 方向延伸的螺纹轴(驱动轴);与该螺纹轴螺合的球状螺母(ballrmt), 该驱动轴与Y轴电动机(未图示)连接,该Y轴电动机接受规定的脉冲信号,以梯级(step)为单位正转反转。然后, 一旦与规定的梯级数对应的驱动信号被输入Y轴电动机,则Y轴电动机正转或反转,台面4沿Y 方向以规定的速度往动或复动(沿Y方向扫描)与该梯级数相当的量。进而,基台2的上表面2a上,与导向轨3a、 3b平行地配置有主扫描位置检测装置5,可以计量台面4的位置。该台面4的上表面上形成有载置面6,该载置面6上设有未图示的吸引式基板卡盘(chuck)机构。然后,若载置面6上载置作为工件的基板7, 则由基板卡盘机构将该基板7定位固定在载置面6的规定位置上。基台2的X方向两侧立设一对支撑台8a、 8b,这一对支撑台8a、 8b 上架设有沿X方向延伸的导向部件9。导向部件9的上侧配设有以能供给的方式收纳所喷出的液体的收纳容器10。另一方面,该导向部件9的下侧,沿X方向延伸的导向轨11突设于X方向的整个宽度上。配置为能沿导向轨11移动的滑架12由第一滑架12a〜第六滑架12f 这六个滑架构成,各滑架12a〜12f形成为底面大致是平行四边形的角柱形状。该各滑架12a〜12f具备直动机构,各滑架12a〜12f分别独立移动。该直动机构例如是具备沿着导向轨11沿X方向延伸的螺纹轴(驱动轴)、 和与该螺纹轴螺合的球状螺母的螺纹式直动机构,该驱动轴与X轴电动机(未图示)连接,该X轴电动机接受规定的脉冲信号,以梯级为单位正转反转。然后, 一旦与规定的梯级数对应的驱动信号被输入X轴电动机,则X轴电动机正转或反转,滑架12沿X方向往动或复动(沿X方向扫描) 与该梯级数相当的量。导向部件9与滑架12之间配置有副扫描位置检测装置13,可以计量各滑架12a〜12f的位置。然后,滑架12的下表面(台面4一侧的面)突设有液滴喷出头14。基台2的上侧、即台面4的单侧的一方(图中Y方向的相反方向)上配置有清洗单元15。清洗单元15由维修台面16、配置于维修台面16上的第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20、重量测量装置21等构成。维修台面16位于导向轨3a、 3b上,具备与台面4同样的直动机构。然后,通过利用未图示的维修台面位置检测装置来检测位置,并用直动机构进行移动,从而能够移动到所希望的场所后停止。然后,维修台面16 沿导向轨3a、 3b移动,从而第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20、重量测量装置21的其中一个装置配置在与液滴喷出头14对置的场所。第一冲洗单元17及第二冲洗单元18在清洗液滴喷出头14内的流路时作为接受从液滴喷出头14喷出的液滴的装置。在液滴喷出头14内的功能液挥发时,由于功能液的粘度升高,故难以喷出。该情况下,由于从液滴喷出头14中排除粘度升高的功能液,故从液滴喷出头14喷出液滴并进行清洗。第一冲洗单元17及第二冲洗单元18进行该接受液滴的功能。压盖单元19是具有对液滴喷出头14加盖的功能、和吸引液滴喷出头14的功能液的功能的装置。从液滴喷出头14喷出的液滴有时具有挥发性, 若存在于液滴喷出头14内的功能液的溶剂从喷嘴挥发,则功能液的粘度变化,喷嘴堵塞。压盖单元19通过对液滴喷出头14加盖,从而防止喷嘴堵塞。进而,在液滴喷出头14的内部混入固态物体而无法喷出液滴时,吸引并除去液滴喷出头14内部的功能液和固态物体。然后,可以解除喷嘴的堵塞。擦拭单元20是对配置有液滴喷出头14的喷嘴的喷嘴板进行擦拭的装置。喷嘴板是在液滴喷出头14中配置于与基板7对置一侧的面上的部件。在液滴附着于喷嘴板时,附着于喷嘴板上的液滴和基板7接触,在基板7 中,液滴附着于预定外的场所。进而,在液滴附着于喷嘴周边时,附着于喷嘴板上的液滴和喷出的液滴接触,喷出的液滴的轨道弯曲。因此,所涂覆的场所和要涂覆的预定场所不同。擦拭单元20通过擦拭喷嘴板,从而在基板7中防止液滴附着于预定外的场所。重量测量装置21中设置有12台电子天平,各电子天平中配置有接受器皿。 3个电子天平排列为1列,形成于大致Y方向上,该电子天平列配置有4歹i」。然后,液滴从液滴喷出头14被喷向接受器皿,电子天平测量液滴的重量。接受器皿具备海绵状的吸引体,所喷出的液滴不会跳到接受器皿之外。该电子天平在液滴喷出头14喷出液滴前后测量接受器皿的重量。然后,通过运算喷出前后接受器皿的重量的差分,从而能够测量所喷出的液滴的重量。重量测量装置21两侧配置有第一冲洗单元17与第二冲洗单元18。然后,在测量从一部分液滴喷出头14喷出的喷出量的期间内,其他液滴喷出头14位于与第一冲洗单元17或第二冲洗单元18对置的场所,能够喷出液滴。液滴喷出装置1的四角具备支柱22,在上部(图中上侧)具有空气控制装置23。空气控制装置23具备风扇、过滤器、冷暖风装置、湿度调整装置等。风扇(送风机)取入工厂内的空气,通过过滤器,从而除去空气内的尘埃,提供净化后的空气。冷暖风装置是以将液滴喷出装置1的气氛温度保持规定的温度范围的方式对所提供的空气的湿度进行控制的装置。湿度调整装置是以将液滴喷出装置1的气氛湿度保持规定的湿度范围的方式对空气进行除湿、或加湿, 控制所提供的空气的湿度的装置。 4根支柱22之间配置薄片24,以便切断空气的流通。从空气控制装置23供给的空气从空气控制装置23流向地面25 (图中Z方向的相反方向),被薄片24包围的空间内的尘埃向地面25流动。由此,基板7上不易附着尘埃。进而,薄片24通过限制空气的流通,从而被薄片24包围的空间内的温度与湿度难以受到薄片24外部的影响。然后,空气控制装置23容易控制被薄片24包围的空间内的温度与湿度。图2 (a)是表示滑架的示意俯视图。如图2 (a)所示,1个滑架12 上,3个液滴喷出头14排列为1列,形成于大致Y方向上,该液滴喷出头列配置有2列。然后,在液滴喷出头14的表面上,配置有喷嘴板30,喷嘴板30上形成有多个喷嘴31。喷嘴31的个数只要根据所喷出的图案和基板7的大小进行设定即可,在本实施方式中,例如在1个喷嘴板30上形成有2列喷嘴31的排列,各列配置有15个喷嘴31。图2 (b)是表示滑架的示意侧视图。是从Y方向观察图2 (a)所示的滑架的图。如图2 (b)所示,滑架12备有底板32。底板32的上侧配置有移动机构33,收纳有滑架12沿导向轨11移动用的机构。底板32的下侧隔着支撑部34而配置有驱动电路基板35。然后,驱动电路基板35的下侧配置有喷头驱动电路36。进而,底板32上隔着支撑部37而配置有喷头安装板38,喷头安装板38的下表面配置有液滴喷出头14。通过未图示的电缆来连接喷头驱动电路36与液滴喷出头14,喷头驱动电路36输出的驱动信号被输入液滴喷出头14。底板32的下侧配置供给装置39,收纳容器10与供给装置39之间以及供给装置39与液滴喷出头14之间通过未图示的管道来连接。然后,从收纳容器10提供的功能液由供给装置39提供给液滴喷出头14。图2 (c)是用于说明液滴喷出头的结构的主要部分示意剖视图。如图2 (c)所示,液滴喷出头14具备喷嘴板30,喷嘴板30上形成有喷嘴31。在喷嘴板30的上侧、即与喷嘴31相对的位置上形成有与喷嘴31连通的空腔40。然后,向液滴喷出头14的空腔40提供作为贮留于收纳容器10 内的液状体的功能液41。空腔40的上侧配设有:在上下方向(Z方向)振动,并对空腔40内的容积进行放大縮小的振动板42;在上下方向伸縮,并使振动板42振动的压电元件43。压电元件43在上下方向伸縮,对振动板42进行加压使之振动,振动板42对空腔40内的容积进行放大縮小,对空腔40进行加压。由此,空腔40内的压力变动,提供给空腔40内的功能液41通过喷嘴31 而被喷出。然后,若液滴喷出头14接受用于控制驱动压电元件43的喷嘴驱动信号,则压电元件43伸长,振动板42縮小空腔40内的容积。结果,縮小的容积份的功能液41被作为液滴而从液滴喷出头14的喷嘴31喷出。在从喷嘴31喷出液滴44时,为了喷出液滴44,施加给液滴喷出头14的能量的一部分转换为热。然后,液滴喷出头14被加热,温度上升。图3是液滴喷出装置的电气控制框图。在图3中,液滴喷出装置1具有:作为处理器而进行各种运算处理的CPU (运算处理装置)48;存储各种信息的存储器49。主扫描驱动装置50、副扫描驱动装置51、主扫描位置检测装置5、副扫描位置检测装置13、驱动液滴喷出头14的喷头驱动电路36经由输入输出接口52及数据总线53而与CPU48连接。进而,输入装置54、显示器装置55、重量测量装置21、第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20也经由输入输出接口52及数据总线53而与CPU48连接。同样,在清洗单元15中,驱动维修台面16的维修台面驱动装置56 以及检测维修台面16的位置的维修台面位置检测装置57也经由输入输出接口52及数据总线53而与CPU48连接。主扫描驱动装置50是控制台面4的移动的装置,副扫描驱动装置51 是控制滑架12的移动的装置。主扫描位置检测装置5识别台面4的位置, 主扫描驱动装置50通过控制台面4的移动,从而能够将台面4移动并停止在所希望的位置上。同样,副扫描位置检测装置13识别滑架12的位置, 副扫描驱动装置51通过控制滑架12的移动,从而能够将滑架12移动并停止在所希望的位置上。输入装置54是输入喷出液滴44的各种加工条件的装置,例如是从未图示的外部装置接收并输入向基板7喷出液滴44的坐标的装置。显示器装置55是显示加工条件或作业状况的装置,操作者以显示器装置55所显示的信息为基础,利用输入装置54进行操作。重量测量装置21具备电子天平和接受器皿,是测量液滴喷出头14喷出的液滴44、和接受液滴44的接受器皿的重量的装置。测量喷出液滴44 前后的接受器皿的重量,并将测量值发送到CPU48。维修台面驱动装置56是从第一冲洗单元17、第二冲洗单元18、压盖单元19、擦拭单元20、重量测量装置21中选择一个装置使其位于与液滴喷出头14对置的场所的方式移动维修台面16的装置。然后,维修台面位置检测装置57检测出维修台面16的位置后,维修台面驱动装置56移动维修台面16,从而所希望的装置或单元能够可靠地移动到与液滴喷出头14对置的场所。存储器49是包含RAM、 ROM等所谓的半导体存储器、或硬盘、CD —ROM等所谓的外部存储装置的概念。在功能上来说,设定存储描述液滴喷出装置1中的动作的控制顺序的程序软件58的存储区域。进而,也设定用于存储喷出位置数据59、即基板7内的喷出位置的坐标数据的存储区域。另外,在液滴喷出头14的暖机驱动中,设定驱动次数数据等暖机驱动数据60。再有,在测量从喷嘴31喷出的液滴44的重量时,设定用于存储驱动压电元件43的测量用驱动数据61的存储区域。进而,设定用于存储使基板7向主扫描方向(Y方向)移动的主扫描移动量、和使滑架12向副扫描方向(X方向)移动的副扫描移动量的存储区域;或CPU48用的工作区域或作为临时文件等起作用的存储区域或者其他各种存储区域。 CPU48根据存储于存储器49内的程序软件58,进行使功能液成为液滴44后喷向基板7的表面的规定位置用的控制。作为具体的功能实现部分,具有进行用于实现重量测量的运算的重量测量运算部62。还包括:运算清洗液滴喷出头14的定时的清洗运算部63;或在对液滴喷出头14进行暖机驱动时,进行暖机驱动的液滴喷出头14的选择或暖机驱动时间的控制的暖机控制运算部64。另外,具有进行由液滴喷出头14喷出液滴44的运算用的喷出运算部65等。若详细分割运算部65,则具有用于向液滴喷出用的初始位置设置液滴喷出头14的喷出开始位置运算部66。进而,喷出运算部65具有主扫描控制运算部67,其对使基板7以规走的速度向主扫描方向(Y方向)扫描移动用的控制进行运算。进而,喷出运算部65具有副扫描控制运算部68,其对使液滴喷出头14以规定的副扫描量向副扫描方向(X方向)移动用的控制进行运算。再有,喷出运算部65具有喷嘴喷出控制运算部69 等所谓的各种功能运算部,其进行用于控制使液滴喷出头14内的多个喷嘴中的哪一个喷嘴喷出功能液的运算。 (喷出方法)接着,用图4〜图9,对使用上述的液滴喷出装置1向基板7喷出功能液并进行涂覆的喷出方法进行说明。图4是表示向基板喷出液滴并进行涂覆的制造工序的流程图。图5〜图9是说明利用液滴喷出装置的喷出方法的图。步骤Sl相当于调整顺序设定工序,是设定对液滴喷出头的喷出量进行调整的顺序的工序。接着,移至步骤S2。步骤S2相当于喷出前待机工序,是对液滴喷出头进行暖机驱动的工序。接着,移至步骤S3。步骤S3 相当于移动工序,是使液滴喷出头移动到与重量测量装置对置的场所的工序。接着,移至步骤S4。步骤S4相当于测量用喷出工序,是从喷嘴向重量测量装置的接受器皿进行规定次数的喷出的工序。接下来移至步骤S5。步骤S5相当于测量工序,计量重量测量装置的接受器皿的重量。然后, 是运算每一次喷出的喷出量的工序。由步骤S2〜步骤S5的步骤构成步骤S21的第一测量工序。接着,移至步骤S6。步骤S6相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S5中测出的喷出量和作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否比规定值小的工序。在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S7。在步骤S6中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S8。步骤S7相当于第一调整工序,对从液滴喷出头喷出的喷出量进行调整的工序。接着移至步骤S4。步骤S8相当于判断是否对调整预定的喷头一起进行调整的工序,是在步骤Sl中设定为进行调整的液滴喷出头中判断是否一起进行了调整的工序。在调整的预定液滴喷出头中,存在未调整喷出量的液滴喷出头时(否的时候),移至步骤S3。在步骤S8中,对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S9。由步骤S2〜步骤S8的步骤构成步骤S22的第一喷出量调整工序。步骤S9相当于移动工序,是使液滴喷出头从与第二冲洗单元及重量测量装置对置的场所向与第一冲洗单元对置的场所移动的工序。接着,移至步骤SIO。步骤S10相当于喷出前待机工序,使对液滴喷出头进行暖机驱动的工序。接着移至步骤Sll。步骤S11相当于移动工序,是将液滴喷出头移动到与重量测量装置对置的场所的工序。接下来移至步骤S12。步骤S12相当于测量用喷出工序,是从喷嘴向重量测量装置的接受器皿进行规定次数的喷出的工序。接着移至步骤S13。步骤S13相当于测量工序, 计量重量测量装置的接受器皿的重量。然后,是运算每次喷出的喷出量。由步骤S10〜步骤S13的步骤构成步骤S23的第二测量工序。接着,移至步骤S14。步骤S14相当于判断喷出量是否达到目标喷出量的工序,是对步骤S13中测出的喷出量和作为所调整的目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S15。在步骤S14中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S16。步骤S15 相当于第二调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。接着,移至步骤S12。步骤S16相当于判断是否对调整预定的喷头一起进行调整的工序,是判断步骤Sl中设定为调整的液滴喷出头中是否一起进行调整的工序。在所调整的预定液滴喷出头中,存在未调整喷出量的液滴喷出头时(否的时候),移至步骤Sll。在步骤S16中,对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S17。由步骤S10〜步骤S16的步骤构成步骤S24的第二喷出量调整工序。步骤S17相当于涂覆工序,是向基板喷出并涂覆液滴的工序。如上所述,结束向基板喷出并涂覆功能液的制造工序。接着,利用图5〜图9,对与图4所示的步骤对应,精度优良地调整从液滴喷出头喷出的喷出量,在工件上进行涂覆的制造方法进行详细说明。图5是与步骤Sl对应的图,是用于说明对液滴喷出头的喷出量进行调整的顺序进行说明的图。然后,如图5 (a)所示,滑架12由第一滑架12a〜第六滑架12f等六个滑架构成。然后,第一滑架12a具备第一喷头列71及第二喷头列72。然后,第一喷头列71及第二喷头列72是各3个液滴喷出头14相对于Y方向倾斜排列配置而成。同样,第二滑架12b具备第三喷头列73及第四喷头列74,第三滑架12c具备第五喷头列75及第六喷头列76。然后,第四滑架12d具备第七喷头列77及第八喷头列78,第五滑架12e具备第九喷头列79及第十喷头列80。同样,第六滑架12f具备第十一喷头列81及第十二喷头列82。然后,第三喷头列73〜第十二喷头列82与第一喷头列71同样,是各3个液滴喷出头14相对于Y方向倾斜排列配置而成。该第一喷头列71〜第十二喷头列82各自成为液滴喷头列。在步骤S22的第一喷出量调整工序中,将滑架12分为3组进行调整。第一,组合第一滑架12a与第二滑架12b后设定为第一组83,第二,组合第三滑架12c与第四滑架12d后设定为第二组84。然后,第三,组合第五滑架12e与第六滑架12f后设定为第三组85。在第一组83中,调整第一喷头列71〜第三喷头列73中的液滴喷出头14的喷出量。然后,在第二组84中,调整第六喷头列76及第七喷头列77中的液滴喷出头14的喷出量。在第三组85中,调整第十喷头列80〜 第十二喷头列82中的液滴喷出头14的喷出量。图5 (b)是用于说明步骤S24的第二喷出量调整工序中的调整液滴喷出头的喷出量的顺序的图。如图5 (b)所示,在步骤S24的第二喷出量调整工序中,将滑架12分为2组进行调整。第一,组合第二滑架12b与第三滑架12c后设定为第四组86,第二,组合第四滑架12d与第五滑架12e 后设定为第五组87。在第四组86中,调整第四喷头列74及第五喷头列75中的液滴喷出头14的喷出量。然后,在第五组87中,调整第八喷头列78及第九喷头列79中的液滴喷出头14的喷出量。在以上的设定中,通过进行步骤S22及步骤S24,从而可以测量第一喷头列71〜第十二喷头列82的全部喷头列中的液滴喷出头14的喷出量。图6 (a)是与步骤S2对应的图。如图6(a)所示,将第一滑架12a〜 第六滑架12f移动到与第一冲洗单元17对置的场所。然后,通过将非喷出驱动波形90输入到第一喷头列71〜第十二喷头列82的液滴喷出头l4, 从而将压电元件43驱动到从第一喷头列71〜第十二喷头列82的液滴喷出头14不喷出液滴的程度。然后,通过驱动压电元件43,从而进行使液滴喷出头14暖机的暖机驱动。然后,第一喷头列71〜第十二喷头列82的液滴喷出头14由于被加热,故液滴喷出头14的温度上升。另外,待机的液滴喷出头14以规定的间隔进行将液滴44喷出到第一冲洗单元17的冲洗,从而可以防止喷嘴31干燥。图6 (b)是与步骤S3对应的图。如图6 (b)所示,将第一滑架12a 及第二滑架12b移动到与重量测量装置21对置的场所。然后第一喷头列71〜第四喷头列74的液滴喷出头14位于与重量测量装置21对置的场所。此时,第三滑架12c〜第六滑架12f所搭载的第五喷头列75〜第十二喷头列82的液滴喷出头14 一边在与第一冲洗单元17对置的场所待机, 一边进行暖机驱动与冲洗。图6 (c)〜图7 (c)是与步骤S4对应的图。如图6 (c)所示,通过向第一喷头列71〜第四喷头列74的液滴喷出头14输入喷出驱动波形91, 从而从喷嘴31向重量测量装置21喷出液滴44。图7 (a)及图7 (b)是表示液滴喷出头的驱动波形的时间图。图7 (a)是从液滴喷出头14连续喷出液滴44时的一例,显示喷头驱动电路36驱动压电元件43的3个喷出驱动波形91。图中的横轴表示时间92的经过,纵轴表示驱动电压93的变化。喷出驱动波形91形成为大致梯形的波形形状,作为喷出时的驱动电压的峰值的喷出电压94及喷出脉冲宽度95被设定为规定的电压及时间。然后,作为喷出驱动波形91的周期的喷出波形周期96也以规定的时间间隔形成。喷出电压94、喷出脉冲宽度95 及喷出波形周期96需要根据压电元件43或振动板42的动特性来设定。因此,希望实施实际喷出的预备试验,导出最佳的喷出条件。图7 (b)表示3个非喷出驱动波形90,即通过以从液滴喷出头14不喷出液滴44的方式进行驱动,从而进行暖机驱动时的一例。非喷出驱动波形90形成为大致梯形的波形形状,作为非喷出时的驱动电压的峰值的非喷出电压97在不喷出液滴44的范围内使压电元件43大幅度振动为佳。在本实施方式中,例如,非喷出电压97采用喷出电压94的大约三分之一左右的电压。作为非喷出时的脉冲宽度的非喷出脉冲宽度98采用与喷出脉冲宽度95相同的值。然后,作为非喷出驱动波形90的波形周期的非喷出波形周期99设定为压电元件43振动的间隔。非喷出波形周期99在本实施方式中例如采用与喷出波形周期96同样的时间间隔。图7 (c)是表示连续驱动液滴喷出头时的驱动喷出次数和喷头温度的C)中,横轴表示喷出液滴44的次数、即喷出次数100的经过,纵轴表示喷头温度101的变化。在外喷头温度曲线102及内喷头温度曲线103表示连续驱动压电元件43并喷出液滴44时的喷头温度101相对于喷出次数100的经过的推移。外喷头温度曲线102是图6(c) 中的第一喷头列71及第四喷头列74的液滴喷出头14的温度,内喷头温度曲线103是第二喷头列72及第三喷头列73的液滴喷出头14的温度。开始喷出时的喷出开始点102a中的外喷头温度曲线102伴随于喷出次数100的经过,喷头温度101上升。在温度上升区域102b的期间内, 伴随喷出次数100的经过,喷头温度101上升。然后,移至即使喷出次数IOO经过喷头温度101也不会上升的温度平衡区域102c。在温度平衡区域102c内,成为液晶喷出头14释放出的热能与因喷出而产生的热能相等的平衡状态。若喷头温度101上升,则喷头温度101和包围液滴喷出头14周边的气体(以下称为周边气体)的温度差增大。喷头温度IOI与周边气体的温度之差越大,则从液滴喷出头14释放出的热能越增大。因此,喷头温度101不会上升,在某一喷头温度IOI 处稳定。将该温度设为平衡喷头温度102d。同样,即使在内喷头温度曲线103中,在温度上升区域103b的期间内,随着喷出次数IOO从喷出开始点103a开始增加,喷头温度101上升。然后,在温度平衡区域103c中,喷头温度101在平衡喷头温度103d处稳定。第二喷头列72及第三喷头列73的液滴喷出头14因为被第一喷头列71及第四喷头列74夹持,故难以向周边气体释放热量。因此,内喷头温度曲线103推移到比外喷头温度曲线102高的喷头温度101。然后,平衡喷头温度103d在高于平衡喷头温度102d的温度处稳定。在步骤S5中,测量第一喷头列71〜第三喷头列73的液滴喷出头14 中的喷出量。第一喷头列71在步骤S17中位于外侧的列进行喷出,因此在步骤S4中,以与步骤S17大致相同的配置条件进行喷出。同样,第二喷头列72及第三喷头列73在步骤S17中位于内侧的列,被第一喷头列71 及第四喷头列74夹持并进行喷出。也就是说,第一喷头列71〜第三喷头列73的液滴喷出头14在步骤S4中,以与步骤S17大致相同的配置条件进行喷出。另一方面,第四喷头列74在步骤S17中因为位于内侧的列后进行喷出,故在步骤S4中,以不同于步骤S17的配置条件进行喷出。然后,在步骤S4与步骤S17中,测量以大致相同的配置条件喷出的第一喷头列71〜第三喷头列73的液滴喷出头14中的喷出量。喷出量的测量是以所喷出的次数除以步骤S4中喷出的液滴44的重量后进行计算的。进行喷出的次数只要是对每次的喷出量的偏差进行平均化后能计量的次数即可,例如在本实施方式中,采用100次。然后,按照每个液滴喷出头14测量喷出量。图7 (d)是对应于步骤S7的图,是表示驱动液滴喷出头时的驱动电压与喷出量的关系的曲线图。在图7 (d)中,横轴表示驱动电压93,右侧为比左侧高的电压。然后,纵轴表示液滴喷出头喷出的喷出量104,上侧表示比下侧大的量。然后,电压喷出量曲线105表示在改变驱动电压93 时喷出量104变化的关系。如电压喷出量曲线105所示,若增大驱动电压93,则喷出量104增大。并且,在使驱动电压93变化时,将喷出量104变化的电压范围作为驱动电压范围105a,以喷出电压94进入该范围的方式设计液滴喷出头14。该电压喷出量曲线105是一例,通过使喷头温度101变动,从而电压喷出量曲线105也变动。在步骤S7中,对被设为目标的喷出量104、即目标喷出量106和步骤S5中测出的喷出量104进行比较。然后,计算相当于目标喷出量106与所测出的喷出量104之差的驱动电压93的差。然后,在所测出的喷出量104 比目标喷出量106小的时候,将喷出电压94提高相当于驱动电压93的差的电压量。另一方面,在所测出的喷出量104比目标喷出量106大时,将喷出电压94降低相当于驱动电压93的差的电压量。然后,通过反复进行步骤S4〜步骤S7,从而使得喷出量104接近目标喷出量106。在步骤S6中,在目标喷出量106与所测出的喷出量104 之差与规定值相比变小时,结束第一喷头列71〜第四喷头列74的液滴喷出头14中的喷出量104的调整。图8 (a)及图8 (b)是对应于步骤S22的图。如图8 (a)所示,在步骤S3中,将第一滑架12a及第二滑架12b从与重量测量装置21对置的场所开始向与第二冲洗单元18对置的场所移动。然后,将第三滑架12c及第四滑架12d从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。第五滑架12e及第六滑架12f在与第一冲洗单元17对置的场所待机。在步骤S4中,向第一喷头列71〜第四喷头列74及第九喷头列79〜 第十二喷头列82的液滴喷出头14输入非喷出驱动波形90后进行暖机驱动。然后,从第一喷头列71〜第四喷头列74的液滴喷出头14向第二冲洗单元18喷出液滴44后,进行冲洗动作。同样,从第九喷头列79〜第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44后,进行冲洗动作。向第五喷头列75〜第八喷头列78的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出规定次数份的液滴44。然后,在步骤S5中, 测量所喷出的液滴44的重量。此时,测量从被第五喷头列75与第八喷头列78夹持的第六喷头列76及第七喷头列77的液滴喷出头14喷出的液滴44的重量。然后,以所喷出的次数进行除法运算,计算喷出量。接着,在步骤S7 中进行调整。反复进行步骤S4〜步骤S7,在目标喷出量106与所测出的喷出量104之差小于规定值时,结束第六喷头列76及第七喷头列77的液滴喷出头14中的喷出量的调整。接着,如图8 (b)所示,在步骤S3中,将第三滑架12c及第四滑架12d从与重量测量装置21对置的场所向与第二冲洗单元18对置的场所移动。然后,将第五滑架12e及第六滑架12f从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。第一滑架12a及第二滑架12b 在与第二冲洗单元18对置的场所继续待机。在步骤S4中,向第一喷头列71〜第八喷头列78的液滴喷出头14输入非喷出驱动波形90,进行暖机驱动。然后,定期地从第一喷头列71〜 第八喷头列78的液滴喷出头14向第二冲洗单元18喷出液滴44,进行冲洗动作。向第九喷头列79〜第十二喷头列82的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出液滴44规定次数份。然后,在步骤S5中,测量所喷出的液滴44的重量。此时,测量从被第九喷头列79与第十二喷头列82夹持的第十喷头列80及第十一喷头列81的液滴喷出头14喷出的液滴44的重量。进而,测量从右端的第十二喷头列82的液滴喷出头14 喷出的液滴44的重量。然后,以所喷出的次数进行除法运算,计算喷出量。接着,在步骤S7 中进行调整。反复进行步骤S4〜步骤S7,在目标喷出量106与所测出的喷出量104之差小于规定值时,结束第十喷头列80〜第十二喷头列82的液滴喷出头14中的喷出量的调整。图8 (c)是对应于步骤S9及步骤S10的图。如图8 (c)所示,将第五滑架12e及第六滑架12f从与重量测量装置21对置的场所向与第一冲洗单元17对置的场所移动。然后,将第一滑架12a〜第四滑架12d从与第二冲洗单元18对置的场所向与第一冲洗单元17对置的场所移动。接着,在步骤S10中,向第一喷头列71〜第十二喷头列82的液滴喷出头14输入非喷出驱动波形90,进行暖机驱动。然后,定期地从第一喷头列71〜第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44,进行冲洗动作。图9 (a)及图9 (b)是对应于步骤S24的图。如图9 (a)所示,在步骤Sll中,将第一滑架12a从与第一冲洗单元17对置的场所开始向与第二冲洗单元18对置的场所移动。然后,将第二滑架12b及第三滑架12c 从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。第四滑架12d〜第六滑架12f在与第一冲洗单元17对置的场所待机。在步骤S12中,向第一喷头列71、第二喷头列72及第七喷头列77〜 第十二喷头列82的液滴喷出头14输入非喷出驱动波形90后进行暖机驱动。然后,定期地从第一喷头列71、第二喷头列72的液滴喷出头14向第二冲洗单元18喷出液滴44后,进行冲洗动作。同样,定期地从第七喷头列77〜第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44后,进行冲洗动作。向第三喷头列73〜第六喷头列76的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出规定次数份的液滴44。然后,在步骤S13中, 测量所喷出的液滴44的重量。此时,测量从被第三喷头列73与第六喷头列76夹持的第四喷头列74及第五喷头列75的液滴喷出头14喷出的液滴44的重量。然后,以所喷出的次数进行除法运算,计算喷出量。接着,在步骤S15 中进行调整。反复进行步骤S12〜步骤S15,在目标喷出量106与所测出的喷出量104之差小于规定值时,结束第四喷头列74及第五喷头列75的液滴喷出头14中的喷出量的调整。接着,如图9 (b)所示,在步骤Sll中,将第二滑架12b及第三滑架12c从与重量测量装置21对置的场所向与第二冲洗单元18对置的场所移动。然后,将第四滑架12d及第五滑架12e从与第一冲洗单元17对置的场所向与重量测量装置21对置的场所移动。第一滑架12a在与第二冲洗单元18对置的场所待机,第六滑架12f在与第一冲洗单元17对置的场所待机。在步骤S12中,向第一喷头列71〜第六喷头列76、第十一喷头列81 及第十二喷头列82的液滴喷出头14输入非喷出驱动波形90,进行暖机驱动。然后,定期地从第一喷头列71〜第六喷头列76的液滴喷出头14向第二冲洗单元18喷出液滴44,进行冲洗动作。同样,定期地从第十一喷头列81及第十二喷头列82的液滴喷出头14向第一冲洗单元17喷出液滴44 后,进行冲洗动作。向第七喷头列77〜第十喷头列80的液滴喷出头14输入喷出驱动波形91,向重量测量装置21喷出液滴44规定次数份。然后,在步骤S13中, 测量所喷出的液滴44的重量。此时,测量从被第七喷头列77与第十喷头列80夹持的第八喷头列78及第九喷头列79的液滴喷出头14喷出的液滴44的重量。然后,以所喷出的次数进行除法运算,计算喷出量。接着,在步骤S15 中进行调整。反复进行步骤S12〜步骤S15,在目标喷出量106与所测出的喷出量104之差小于规定值时,结束第八喷头列78及第九喷头列79的液滴喷出头14中的喷出量的调整。通过以上工序,第二喷头列72〜第十一喷头列81的液滴喷出头14 在被相邻的液滴喷出头14夹持的状态下,测量了喷出液滴44时的喷出量后,进行喷出量的调整。这成为与步骤S17中进行喷出时的液滴喷出头14的形态相同的形态。然后,第一喷头列71及第十二喷头列82的液滴喷出头14在未被液滴喷出头14夹持的状态下测量了喷出液滴44时的喷出量后,进行喷出量的调整。这也成为与步骤S17中进行喷出时的液滴喷出头14的形态相同的形态。也就是说,在与步骤S17中进行喷出时的液滴喷出头14的形态相同的形态下,进行喷出量的调整。图9 (c)是对应于步骤S17的图。如图9 (c)所示,移动滑架12及台面4,以液滴喷出头14与基板7对置的方式移动液滴喷出头14与基板7。接着,根据规定的描绘图案,喷出液滴44,并涂覆在基板7上。涂覆预定的描绘图案,结束步骤S17,结束向基板7喷出液滴并进行涂覆的制造工序。如上所述,根据本实施方式,具有以下效果。 (1) 根据本实施方式,将喷出量的测量分为步骤S21的第一测量工序和步骤S23的第二测量工序后进行测量。然后,在步骤S21中,测量从属于被其他液滴喷出头列夹持的状态下的液滴喷出头列的液滴喷出头14 喷出时的喷出量。也就是说,测量从属于第二喷头列72、第三喷头列73、 第六喷头列76、第七喷头列77、第十喷头列80、第十一喷头列81的液滴喷出头14喷出时的喷出量。然后,在步骤S23中,用其他液滴喷出头列夹持在步骤S21中未被其他液滴喷出头列夹持的液滴喷出头列,并喷出液状体后,测量喷出量。然后,测量从属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14喷出时的喷出量。也就是说,在步骤S21及步骤S23中,测量从属于被其他液滴喷出头列夹持的状态下的液滴喷出头列的液滴喷出头14喷出时的喷出量。因此,第二喷头列72〜第十一喷头列81 的液滴喷出头14可以测量大致相同温度下的喷出量。结果,可以精度优(2) 根据本实施方式,在步骤S2及步骤S10的喷出前待机工序中, 液滴喷出头通过进行暖机驱动,从而使得液滴喷出头14的温度上升。然后,测量液滴喷出头的温度高的状态下的喷出量。在向基板7喷出液滴44 时,液滴喷出头M喷出液滴44,因此液滴喷出头14的温度上升。也就是说,液滴喷出头14通过进行暖机驱动,从而可以测量与向基板7喷出液滴44时大致相同的温度下的喷出量。因此,可以精度优良地测量向基板7喷出液滴44时的喷出量。 (3) 根据本实施方式,暖机驱动到从液滴喷出头14的喷嘴31不喷出液滴44的程度为止。因此,因为液滴44不会被浪费地喷出,故可以成为节省资源的喷出量测量方法。 (4) 根据本实施方式,在步骤S7的第一调整工序中对步骤S21的第一测量工序中测量的液滴喷出头14进行了调整后,在步骤S15的第二调整工序中对步骤S23的第二测量工序中测量的液滴喷出头14进行调整。然后,根据步骤S21及步骤S23中精度优良地对喷出量进行测量的测量结果,在步骤S7及步骤S15中,调整喷出量。因此,在步骤S7及步骤S15 中,可以精度优良地调整喷出量。 (5) 根据本实施方式,具有步骤S22的第一喷出量调整工序与步骤S24的第二喷出量调整工序。并且,在步骤S22中,根据步骤S21的第一测量工序中测出的喷出量的测量结果,在步骤S7的第一调整工序中进行喷出量的调整。接着,通过反复进行步骤S21与步骤S7,从而使得喷出量接近目标喷出量。因此,与仅进行一次步骤S7的方法相比,可以精度优良地调整喷出量。而且,即使在步骤S24中,由于同样地进行,故与仅进行一次步骤S15的第二调整工序的方法相比,可以精度优良地调整喷出量。结果,可以成为能够精度优良地对喷出量进行调整的方法。 (第二实施方式)在本实施方式中,利用图4及图5,说明对液滴喷出装置的喷出量进行调整的特征性调整方法的一个实施方式。该实施方式与第一实施方式的不同之处在于:在第一喷出量调整工序中调整全部液滴喷出头14的喷出量。艮P,在图4中,除了步骤S22的步骤S7及步骤S24中的步骤S15以外,均与第一实施方式相同,省略说明。而且,在步骤S7中,对属于图5 所示的第一喷头列71〜第十二喷头列82的液滴喷出头14的喷出量进行调整。因此,属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14在未被其他液滴喷出头列夹持的状态下进行喷出后,利用测量的喷出量,通过与目标喷出量106吻合而对喷出量进行调整。在步骤S15中,进行与第一实施方式同样的调整。因此,属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14在步骤S7及步骤S15等两个步骤中被进行喷出量的调整。在步骤S24中,在反复进行喷出与调整时,属于第四喷头列74、第五喷头列75、第八喷头列78、第九喷头列79的液滴喷出头14在步骤S22 中被进行一次调整,因此有时可以以少的反复次数完成调整。然后,在进行了调整后,在步骤S17中,根据规定的描绘图案,喷出液滴44并涂覆在基板7上。涂覆预定的描绘图案后结束步骤S17,结束向基板7喷出液滴并进行涂覆的制造工序。如上所述,根据本实施方式,除了第一实施方式中的效果(1)〜(5) 以外,还具有以下效果。 (1)根据本实施方式,在步骤S21的第一测量工序中,属于未被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头14在步骤S22的第一喷出量调整工序中,进行一次喷出量的调整。因此,该液滴喷出头14的喷出量被调整为接近目标喷出量,故在步骤S24的第二喷出量调整工序中, 液滴喷出头14的温度即使上升得比步骤S22的温度还要高,也可以以较少的反复次数进行调整。结果,可以成为生产率较佳的调整方法。 (第三实施方式)在本实施方式中,利用图10对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。图10是表示向基板喷出液滴并进行涂覆的制造工序的流程图。该实施方式与第一实施方式的不同之处在于,在第一喷出量调整工序与第二喷出量调整工序中分为粗调整与微调整后对喷出量进行调整。在图10中,步骤S31〜步骤S33是与图4所示的步骤Sl〜步骤S3对应的步骤,省略说明。步骤S34相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。例如,进行100次的喷出。然后计量重量测量装置的接受器皿的重量。而且,是运算每次喷出的喷出量的工序。接着移至步骤S35。步骤S35相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S34中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S36。在步骤S35 中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S37。步骤S36相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。接着移至步骤S34。由步骤S34〜步骤S36的步骤构成步骤S61的粗调整工序。步骤S37相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。在该步骤中,进行比步骤S34中的喷出次数多的喷出。例如进行1000次的喷出。因此,该步骤中的喷出量进行比步骤S34中的喷出量多的喷出。然后,计量重量测量装置的接受器皿的重量。而且,是对每次喷出的喷出量进行运算的工序。然后移至步骤S38。步骤S38相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S37中测出的喷出量与作为调整目标的目标喷出量迸行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。该规定值设定为比步骤S35中的规定值窄的范围。而且,在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S39。在步骤S38中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S40。步骤S39相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。在该工序中调整的喷出量的变化量设定为比步骤S36中的调整的变化量小的值。接着移至步骤S37。由步骤S37〜步骤S39的步骤构成步骤S62的微调整工序。步骤S40相当于判断是否为调整预定的喷头全部进行了调整的工序, 是在步骤S31中设定为进行调整的液滴喷出头中判断是否全部进行了调整的工序。在所调整的预定液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S34。在步骤S40中,在对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S41。由步骤S32〜步骤S40的步骤构成步骤S63的第一喷出量调整工序。步骤S41相当于移动工序,是使液滴喷出头从与第二冲洗单元及重量测量装置对置的场所向与第一冲洗单元对置的场所移动的工序。接着,移至步骤S42。步骤S42相当于喷出前待机工序,是对液滴喷出头进行暖机驱动的工序。接着移至步骤S43。步骤S43相当于移动工序,是将液滴喷出头移动到与重量测量装置对置的场所的工序。接下来移至步骤S44。步骤S44相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。例如进行100次的喷出。然后计量重量测量装置的接受器皿的重量。而且,是对每次喷出的喷出量进行运算的工序。接着移至步骤S45。步骤S45相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S44 中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S46。在步骤S45中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S47。步骤S46相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。接着移至步骤S44。由步骤S44〜步骤S46的步骤构成步骤S64的粗调整工序。步骤S47相当于喷出测量工序,从喷嘴向重量测量装置的接受器皿进行规定次数的喷出。在该步骤中,进行比步骤S44中的喷出次数多的喷出。例如进行1000次的喷出。因此,该步骤中的喷出量进行比步骤S44中的喷出量多的喷出。然后计量重量测量装置的接受器皿的重量。而且,是对每次喷出的喷出量进行运算的工序。然后移至步骤S48。步骤S48相当于判断喷出量是否达到了目标喷出量的工序,是对步骤S47中测出的喷出量与作为调整目标的目标喷出量进行比较,判断喷出量与目标喷出量之差是否小于规定值的工序。该规定值设定为比步骤S45中的规定值窄的范围。而且,在喷出量与目标喷出量之差大于规定值时(否的时候),移至步骤S49。在步骤S48中,在喷出量与目标喷出量之差小于规定值时(是的时候),移至步骤S50。步骤S49相当于调整工序,是对从液滴喷出头喷出的喷出量进行调整的工序。在该工序中调整的喷出量的变化量设定为比步骤S46中的调整的变化量小的值。接着移至步骤S47。由步骤S47〜步骤S49的步骤构成步骤S65的微调整工序。步骤S50相当于判断是否为调整预定的喷头全部进行了调整的工序,是在步骤S31中设定为进行调整的液滴喷出头中判断是否全部进行了调整的工序。在所调整的预定液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S44。在步骤S40中,在对所调整的预定液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S51。由步骤S42〜步骤S50的步骤构成步骤S66的第二喷出量调整工序。步骤S51相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。如上所述,结束向基板喷出功能液并进行涂覆的制造工序。如上所述,根据本实施方式,除了第一实施方式的效果(1)〜(5) 以外,还具有以下的效果。 (1) 根据本实施方式,进行步骤S61及步骤S64中的粗调整工序、 步骤S62及步骤S65中的微调整工序。此时,与反复进行微调整,每次少量调整喷出量的情况相比,组合通过粗调整使得喷出量大幅度变化的工序和微调整工序来进行的方法可以以较少的次数,调整为作为目标的喷出量。因此,可以生产率良好地进行调整。 (2) 根据本实施方式,在步骤S61及步骤S64的粗调整工序中,与步骤S62及步骤S65中的微调整工序相比,以较少的喷出量进行喷出量的测量。因此,可以减少所喷出的液状体的消耗量。结果,可以作为节省资源的调整方法。 (第四实施方式)在本实施方式中,利用图10对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。该实施方式与第三实施方式的不同之处在于,在粗调整工序与微调整工序中使单位时间内喷出的次数为不同的次数。艮P,在图10中,在步骤S34、步骤S37、步骤S44、步骤S47的各喷出测量工序中,将所喷出的喷出次数设为相同的次数,例如设为100次。而且,在步骤S51中,例如在1秒内喷出5次,涂覆功能液41时,在属于微调整工序的步骤S37及步骤S47中,l秒内喷出5次。接着,在属于粗调整工序的步骤S34及步骤S44中,例如1秒内喷出10次,进行测量。也就是说,在粗调整工序中与微调整工序相比,增多每单位时间内的喷出次数,在短时间内进行喷出。如上所述,根据本实施方式,除了第一实施方式中的效果(1)〜(5) 及第三实施方式中的效果(1)以外,具有以下的效果。 (1)根据本实施方式,在属于粗调整工序的步骤S34及步骤S44中,与微调整工序相比,增多单位时间内喷出的次数。在粗调整工序及微调整工序中,进行相同次数的喷出,在对喷出量进行测量时,粗调整工序在短时间内可以进行喷出。因此,可以生产率优良地进行调整。 (第五实施方式)在本实施方式中,利用图4及图5对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。该实施方式与第二实施方式的不同之处在于,在第一喷出量调整工序中,以使未被夹持的喷头列的喷出量小于被夹持的喷头列的喷出量的方式对喷出量进行调整。艮口,在图4所示的步骤S6中,进行喷出量与目标喷出量的比较。此时,在图5 (a)所示的第一组83中,第一喷头列71、第二喷头列72、第三喷头列73的目标喷出量设为在步骤S17中进行喷出时的目标喷出量。而且,第四喷头列74的目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少。然后,在步骤S7中以成为各目标喷出量的方式对喷出量进行调整。同样,在第二组84中,第六喷头列76及第七喷头列77的目标喷出量设为步骤S17中进行喷出时的目标喷出量。然后,第五喷头列75及第八喷头列78的目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少。在第三组85中,第十喷头列80、第十一喷头列81、第十二喷头列82 的目标喷出量设为在步骤S17中进行喷出时的目标喷出量。而且,第九喷头列79的目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少。接着,在步骤S14中进行喷出量与目标喷出量的比较。此时,在图5 (b)所示的第四组86中,第四喷头列74及第五喷头列75被第三喷头列73及第六喷头列76夹持,因此液滴喷出头14的温度上升,与步骤S4中的喷出量相比增加。但是,在步骤S6中,将目标喷出量设定为比步骤S17中进行喷出时的目标喷出量少,因此在步骤S14中,喷出量大多成为与步骤S17中进行喷出时的目标喷出量接近的喷出量。同样,即使在第五组87 中,第八喷头列78及第九喷头列79的喷出量大多为与步骤S17中进行喷出时的目标喷出量接近的喷出量。因此,可以减少反复步骤S12〜步骤S15 的次数。如上所述,根据本实施方式,除了第一实施方式中的效果(1)〜(5) 以外,具有以下的效果。 (l)根据本实施方式,在步骤S7中,以从未被液滴喷出头列夹持的液滴喷出头喷出的液状体的喷出量比步骤S17中喷出的目标喷出量少的方式进行调整。因此,在被其他液滴喷出头夹持对喷出量进行测量时,可以从使喷出量与步骤S17中喷出的喷出量的目标接近的喷出量开始进行调整。结果,因为可以以较少的调整次数进行调整,故可以生产率良好地进行调整。 (第六实施方式)在本实施方式中,利用图4及图5对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。该实施方式与第二实施方式的不同之处在于,在第一喷出量调整工序中,在第二喷出量调整工序的测量用喷出工序点进行将未被夹持的喷头列的喷出量设定为小于被夹持的喷头列的喷出量的工序。艮P,图4所示的步骤Sl〜步骤Sll与第二实施方式同样地实施。然后,在步骤S12中,相对于步骤S7中调整后的喷出量,变更喷出量。详细内容为,以比步骤S22中设定的喷出量少的喷出量进行喷出的方式对图5所示的第四组86的第四喷头列74及第五喷头列75的喷出量进行设定变更后进行喷出。第四喷头列74及第五喷头列75因为被第三喷头列73及第六喷头列76夹持,故液滴喷出头14的温度上升,比步骤S22中的喷出量增加。但是,在步骤S12中,由于将喷出量设定为小于步骤S22中进行喷出时的目标喷出量,故喷出量大多成为与步骤S17中进行喷出时的目标喷出量接近的喷出量。因此,可以减少反复步骤S12〜步骤S15的次数。同样,在第五组87中,也将第八喷头列78及第九喷头列79的喷出量在步骤S12中以比步骤S22中设定的喷出量少的喷出量进行喷出的方式变更设定后进行喷出。结果,可以减少反复步骤S12〜步骤S15的次数。如上所述,根据本实施方式,除了第一实施方式的效果(1)〜(5) 以外,具有以下的效果。 (O根据本实施方式,在步骤S22中,未被液滴喷出头列夹持的液滴喷出头14以在步骤S12中减少喷出量的方式进行调整。因此,在步骤S12中被其他液滴喷出头夹持对喷出量进行测量时,可以从使喷出量与步骤S17中进行喷出的喷出量的目标接近的喷出量开始进行调整。结果,因为可以以较少的调整次数进行调整,故可以生产率良好地进行调整。(第七实施方式)在本实施方式中,利用图11及图12对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。图11是表示液滴喷出装置的构成的概略立体图,图12是表示向基板喷出液滴并进行涂覆的制造工序的流程图。该实施方式与第二实施方式的不同之处在于:在液滴喷出头的排列中的行数比重量测量装置多时,对同一滑架内的液滴喷出头的喷出量进行测量后,测量其他滑架内的液滴喷出头的喷出量。艮卩,如图11所示,液滴喷出装置108中,重量测量装置109在X方向上4个配置为1行。而且,如图5所示,第一滑架12a〜第六滑架12f 中,在作为行的第一喷头行110、第二喷头行111、第三喷头行112的3 行配置有液滴喷出头14。也就是说,说明相对于重量测量装置109—次能测量的液滴喷出头14的行数而言滑架12搭载的液滴喷出头14的行数较多时的调整顺序。在图12的流程图中,步骤S71相当于调整顺序设定工序,是设定对液滴喷出头的喷出量进行调整的顺序的工序。接着移至步骤S72。步骤S72 相当于移动工序,是移动滑架,将要测量的液滴喷出头向与重量测量装置对置的场所移动的工序。接着,移至步骤S73。步骤S73相当于第一喷出量调整工序,是从l行液滴喷出头喷出功能液后测量喷出量,调整喷出量的工序。接着移至步骤S74。步骤S74相当于判断在同一滑架内是否对 整预定的喷头全部进行了调整的工序,是判断是否对3行所有的液滴喷出头的喷出量进行了调整的工序。在存在未进行调整的行时(否的时候),移至步骤S72。在步骤S74 中,对3行所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S75。步骤S75相当于判断是否对调整预定的喷头全部进行了调整的工序,是在步骤S71中设定为调整的液滴喷出头中判断是否全部进行了调整的工序。在调整的预定液滴喷出头中,存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S72。在步骤S75中,在对调整预定的液滴喷出头中所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S76。步骤S76相当于移动工序,是移动滑架,将要测量的液滴喷出头向与重量测量装置对置的场所移动的工序。接着,移至步骤S77。步骤S77相当于第二喷出量调整工序,是在设为与步骤S73中不同的喷头列的配置后, 从1行液滴喷出头喷出功能液,测量喷出量,对喷出量进行调整的工序。接着移至步骤S78。步骤S78相当于判断是否对同一滑架内调整预定的喷头全部进行了调整的工序,是判断是否对3行所有的液滴喷出头的喷出量进行了调整的工序。在存在未进行调整的行时(否的时候),移至步骤S76。在步骤S78中,在对3行所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S79。步骤S79是判断是否对调整预定的喷头全部进行了调整的工序,是在步骤S71中设定为调整的液滴喷出头中判断是否全部进行了调整的工序,在调整预定的液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S76。在步骤S79中,在对调整预定的液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S80。步骤S80相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。如上所述,结束向基板喷出功能液并进行涂覆的制造工序。接着,利用图5,详细说明与图12所示的步骤对应,且精度优良地对液滴喷出头喷出的喷出量进行调整,并向工件涂覆的制造方法。步骤S71 与图4所示的步骤S1同样,省略说明。在步骤S72中,将第一组83的第一喷头行110的液滴喷出头14向与重量测量装置21对置的场所移动。然后在步骤S73中,对从第一组83的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。而且,在步骤S74及步骤S72中,将第一组73的第二喷头行111向与重量测量装置21对置的场所移动。然后, 在步骤S73中,对从第一组83的第二喷头行111的液滴喷出头14喷出的功能液41的喷出量进行调整。经过同样的步骤,对从第一组83的第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。接着,在步骤S75及步骤S72中,将第二组84的第一喷头行110向与重量测量装置21对置的场所移动。然后在步骤S73中,对从第二组84 的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。而且,通过反复步骤S72〜步骤S74,从而对从第二组84的第二喷头行111及第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。接着,经过同样的步骤,对从第三组85的第一喷头行110〜第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。接下来,在步骤S76中,将第四组86的第一喷头行110向与重量测量装置21对置的场所移动。然后,在步骤S77中,对从第四组86的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。此时, 对第四喷头列74及第五喷头列75的液滴喷出头14中的喷出量进行调整。而且,通过反复步骤S76〜步骤S78,从而可以对从第四组86的第二喷头行111及第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。接着,经过同样的步骤,对从第五组87的第一喷头行110〜第三喷头行112的液滴喷出头14喷出的功能液41的喷出量进行调整。而且,在进行了调整后,在步骤S80中,根据规定的描绘图案,喷出液滴44,并涂覆在基板7上。涂覆预定的描绘图案,结束步骤S80,结束向基板7喷出液滴并进行涂覆的制造工序。如上所述,根据本实施方式,除了第一实施方式的效果(1)〜(5) 以外,具有以下的效果。 (1)根据本实施方式,对一个滑架12所搭载的液滴喷出头14中的喷出量全部进行测量后,顺次改变滑架12,对各滑架12所搭载的上述液滴喷出头14中的喷出量进行测量及调整。因此,可以减少滑架12的移动量,进行测量及调整。结果,可以成为节省资源的测量方法及调整方法。 (第八实施方式)在本实施方式中,利用图5及图13对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。图13是表示向基板喷出液滴并进行涂覆的制造工序的流程图。该实施方式与第七实施方式的不同之处在于:按照液滴喷出头组的每一行进行调整。在图13的流程图中,步骤S91相当于调整顺序设定工序,是对调整液滴喷出头的喷出量的顺序进行设定的工序。接着移至步骤S92。步骤S9 相当于移动工序,是移动滑架,将要测量的液滴喷出头移动到与重量测量装置对置的场所的工序。接下来移至步骤S93。步骤S93相当于第一喷出量调整工序,是从一行液滴喷出头喷出功能液,测量喷出量,对喷出量进行调整的工序。接着移至步骤S94。步骤S94相当于移动工序,是移动滑架,将所测量的液滴喷出头移动到与重量测量装置对置的场所。接着移至步骤S95。步骤S95相当于第二喷出量调整工序,是在成为与步骤S93不同的喷头列的配置之后,从1行液滴喷出头喷出功能液并测量喷出量,对喷出量进行调整的工序。接着移至步骤S96。步骤S96相当于判断在同一行内是否对调整预定的喷头全部进行了调整的工序,是判断是否对12列的全部液滴喷出头的喷出量进行了调整的工序。在存在未调整的列时(否的时候),移至步骤S92。在步骤S96中, 在对12列的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S97。步骤S97相当于判断是否对调整预定的喷头全部进行了调整的工序,是在步骤S91中设定为调整的全部行的液滴喷出头判断是否进行了调整的工序。在调整预定的液滴喷出头中存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S92。在步骤S97中,在对调整预定的液滴喷出头中所有的液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S98。步骤S98相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。如上所述,结束向基板喷出功能液并进行涂覆的制造工序。接着,利用图5,详细说明与图13所示的步骤对应,精度优良地对从液滴喷出头喷出的喷出量进行调整并涂覆在工件上的制造方法。步骤S91 与图4所示的步骤S1同样,省略说明。在步骤S92中,将第一组83的第一喷头行110移动到与重量测量装置21对置的场所。而且,在步骤S93中,对从第一组83的第一喷头行110的液滴喷出头14喷出的功能液41 的喷出量进行调整。然后在步骤S94中,将第四组86的第一喷头行110 移动到与重量测量装置21对置的场所。然后在步骤S95中,对从第四组86的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。此时,对第四喷头列74及第五喷头列75的液滴喷出头14的喷出量进行调整。接着,在步骤S96及步骤S92中,将第二组84的第一喷头行110移动到与重量测量装置21对置的场所。然后在步骤S93〜步骤S95中,对从第二组84及第五组87的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。接下来,在步骤S96及步骤S92中,将第三组85的第一喷头行110 移动到与重量测量装置21对置的场所。然后在步骤S92中,对从第三组85的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。然后在步骤S94及步骤S95中,由于没有需要进行调整的液滴喷出头14,故省略步骤,移至步骤S97。通过以上的步骤,对从第一喷头列71〜 第十二喷头列82的第一喷头行110中的液滴喷出头14喷出的功能液41的喷出量进行调整。接着,在步骤S97中,确认对第一喷头行110的液滴喷出头14全部进行了调整,判断是否移至第二喷头行111的液滴喷出头14的调整。然后在步骤S92中,将第一组83的第二喷头行111的液滴喷出头14移动到与重量测量装置21对置的场所。然后,反复进行步骤S92〜步骤S97,进行第二喷头行U1的液滴喷出头14的调整。此时,按照第一组83、第四组86、第二组84、第五组87、第三组85的顺序进行液滴喷出头14的调整。接着,移至第三喷头行112,按照同样的顺序进行从液滴喷出头14 喷出的功能液41的喷出量的调整。并且,调整之后在步骤S98中,根据规定的描绘图案,喷出液滴44, 并涂覆在基板7上。涂覆预定的描绘图案,结束步骤S98,结束向基板7 喷出液滴并进行涂覆的制造工序。如上所述,根据本实施方式,除了第一实施方式的效果(1)〜(5) 以外,具有以下的效果。 (1) 根据本实施方式,在调整了1个液滴喷出头14的喷出量之后, 对位于该调整后的液滴喷出头14附近的液滴喷出头的喷出量进行调整。因此,即使在周围的温度变化时,在同一行中较近位置的液滴喷出头14 也可以利用大致相同温度的影响所产生的误差来调整喷出量。

(2) 根据本实施方式,因为同一行的相邻位置的液滴喷出头14可以 (2) According to the present embodiment, since the same row position adjacent to the droplet ejection head 14 can

利用大致相同温度的影响所产生的误差来调整喷出量,故可以调整为大致 Effect of error using substantially the same temperature to adjust the discharge amount produced, it can be adjusted to substantially

相同的喷出量。 The same amount of discharge. 结果,在液滴喷出头14的扫描方向(图5的Y方向)上可以进行涂覆,而不会形成纵线。 As a result, in the liquid discharge head 14 in the scanning direction (Y direction in FIG. 5) may be coated, without forming a vertical line.

(第九实施方式) (Ninth Embodiment)

在本实施方式中,利用图5及图14对调整液滴喷出装置的喷出量的特征性调整方法的一个实施方式进行说明。 In the present embodiment, 14 pairs of adjusting the amount of discharge liquid droplet discharge apparatus of a embodiment of a method of adjusting a characteristic will be described with reference to FIG. 5 and FIG. 图14是表示向基板喷出液滴并进行涂覆的制造工序的流程图。 FIG 14 is a flowchart showing discharged droplets onto a substrate and the manufacturing process be coated. 该实施方式与第八实施方式的不同之处在于:在同一行内,在全部进行了第一喷出工序后,进行第二喷出工序, 按照液滴喷出头组的每一行进行调整。 This embodiment differs from the eighth embodiment in that: in the same row, after all of the first discharging step, second discharging step, adjusted in accordance with each line of the droplet discharge head group.

在图14的流程图中,步骤S101相当于调整顺序设定工序,是对调整 In the flowchart of FIG. 14, step S101 corresponds to the order setting adjustment step, the adjustment is

液滴喷出头的喷出量进行调整的顺序进行设定的工序。 Droplet ejection head sequentially discharge amount adjusting step of the setting. 接着移至步骤S102。 Subsequently to step S102. 步骤S102相当于移动工序,是移动滑架,将所测量的液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S102 corresponds to the step movement, the carriage is moved, the measured droplet discharge head moves to step opposed to the place of the weight measuring apparatus. 接着移至步骤S103。 Subsequently to step S103. 步骤S103 相当于第一喷出量调整工序,是从一行的液滴喷出头喷出功能液并测量喷出量,对喷出量进行调整的工序。 Step S103 corresponds to a first discharge amount adjusting step, the head is ejected from the functional liquid droplet discharge line and measuring the amount of discharge, the step of adjusting the discharge amount. 接着移至步骤S104。 Subsequently to step S104. 步骤S104相当于判断在同一行内是否对调整预定的喷头全部进行了调整的工序,是判断是否对第一组、第二组、第三组的所有液滴喷出头的喷出量进行了调整的工序。 Step S104 corresponds to the same line is determined whether all of the nozzle to adjust a predetermined adjustment step, determining whether the first group, second group, the amount of discharge liquid droplet ejection head of the third group were all adjusted process. 在存在未进行调整的液滴喷出头组时(否的时候),移至步骤S102。 In the presence of the droplet ejection head no adjustment group (when NO), the process proceeds to step S102. 在步骤S104中,对第一组、第二组、第三组的所有液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S105。 In step S104, the first group, second group, all the amount of discharge liquid droplet ejection head of the third group have been adjusted (a time), the process proceeds to step S105. 步骤S105相当于移动工序, 是移动滑架,将测量的液滴喷出头移动到与重量测量装置对置的场所的工序。 Step S105 corresponds to the step movement, the carriage is moved, the measured droplet discharge head moves to step opposed to the place of the weight measuring apparatus. 接着移至步骤S106。 Subsequently to step S106. 步骤S106相当于第二喷出量调整工序,是对第四组及第五组的所有液滴喷出头的喷出量进行调整的工序。 Step S106 corresponds to a second discharge amount adjusting step, a step of discharging the amount of liquid droplet discharge heads all of the fourth group and the fifth group of adjusting. 接着移至步骤S107。 Subsequently to step S107. 步骤S107相当于判断同一行内是否对调整预定的喷头全部进行了调整的工序,是判断是否对第四组及第五组的同一行内的液滴喷出头的喷出量全部进行了调整的工序。 Step S107 corresponds to predetermined adjustment is determined whether all of the nozzle adjusting step in the same row, determining whether the amount of discharged liquid droplet ejection heads in the same row of the fourth group and the fifth group of all of the adjustment step . 在存在未进行调整的液滴喷出头组时(否的时 In the presence of the droplet ejection head no adjustment group (NO

候),移至步骤S105。 Designate), moves to step S105. 在步骤S107中,在对第四组及第五组的同一行内的所有液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S108。 In step S107, when the discharge amount of the liquid droplet discharge head all the same row of the fourth group and the fifth group have been adjusted (a time), the process proceeds to step S108. 步骤S108相当于判断是否对调整预定的喷头全部进行了调整的工序,是判断在步骤S101中设定为调整的全部行的液滴喷出头中是否进行了调整的工序。 Step S108 corresponds to the determination of whether to adjust all of the predetermined head adjustment step is to adjust the set is determined of all the droplet ejection head row whether the adjustment process in step S101. 在调整预定的液滴喷出头中,存在未对喷出量进行调整的液滴喷出头时(否的时候),移至步骤S102。 Adjusting a predetermined droplet discharge heads, there are (when NO) the droplet is not to adjust the amount of discharge when the discharge head, the process proceeds to step S102. 在步骤S108中,在对调整预定的液滴喷出头中的全部液滴喷出头的喷出量进行了调整时(是的时候),移至步骤S109。 In step S108, when the entire amount of discharged liquid droplet discharge head is adjusted in a predetermined droplet ejection head is adjusted (a time), the process proceeds to step S109. 步骤S109相当于涂覆工序,是向基板喷出液滴并进行涂覆的工序。 Step S109 corresponds to the step of coating, a droplet is discharged toward the substrate and coating step. 如上所述,结束向基板喷出功能液并进行涂覆的制造工序。 As described above, the end of the functional liquid is discharged to the manufacturing process of the substrate and coating.

接着,利用图5详细说明以下制造方法,即与图14所示的步骤对应, 精度优良地对从液滴喷出头喷出的喷出量进行调整并在工件上进行涂覆的制造方法。 Next, FIG 5 the following detailed description of manufacturing methods, i.e., corresponding to the step shown in FIG. 14, with good accuracy the amount of discharged liquid droplet discharged from the discharge head is adjusted and a method for producing coated on the workpiece. 步骤SIOI与图4所示的步骤S1同样,故省略说明。 Step SIOI the step shown in FIG. 4 S1 Similarly, description thereof is omitted. 在步骤S102中,将第一组83的第一喷头行110移动到与重量测量装置21对置的场所。 In step S102, the first head of the first group 83 of rows 21 pairs 110 is moved to a place opposite to the weight measurement apparatus. 然后在步骤S103中,对从第一组83的第一喷头行UO的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then in step S103, the amount of the functional liquid discharged from the droplet discharge head of the first line of the first group 83 of discharge head 14 of the UO 41 can be adjusted.

然后在步骤S104中,将第二组84设定为接下来要调整的液滴喷出头组。 Then in step S104, the second group of ejection heads 84 is set to be adjusted for the next group of droplets. 接着在步骤S102中,将第二组84的第一喷头行110移动到与重量测量装置21对置的场所。 Next, in step S102, the first head 84 of the second set of rows 110 is moved to place the measurement of the weight 21 pairs of opposing apparatus. 然后在步骤S103中,对从第二组84的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S103, the first liquid droplet from the head 84 of the second set of rows 110 of the discharge head 14 discharge 41 is adjusted. 然后在步骤S104中将第三组85设定为接下来要调整的液滴喷出头组。 Then in a step S104, a third group of ejection heads 85 is set to be adjusted for the next group of droplets. 然后在步骤S102及步骤S103中,对从第三组85的第一喷头行110的液滴喷出头14 喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S102 and step S103, the first liquid droplet from the head 110 of the third group 85 of rows 14 is discharged discharge head 41 can be adjusted. 在接下来的步骤S104中,确认第一组83、第二组84、第三组85的第一喷头行110的调整已经结束。 In the next step S104, it is confirmed first group 83, a second group 84, group 85 of the first row of the third head 110 has ended adjustment.

接着在步骤S105中,将第四组86的第一喷头行110移动到与重量测量装置21对置的场所。 Next, at step S105, the first head 86 of the fourth set of line 110 is moved to place the measurement of the weight 21 pairs of opposing apparatus. 然后在步骤S106中,对从第四组86的第一喷头行110的液滴喷出头14喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S106, the first liquid droplet from the head 86 of the fourth set of rows 110 of the discharge head 14 discharge 41 is adjusted. 接着在步骤S107中,将第五组87设定为接着要调整的液滴喷出头组。 Next, at step S107, the fifth group 87 to be adjusted and then set to the droplet discharge head group. 在步骤S105中,将第五组87的第一喷头行110移动到与重量测量装置21对置的场所。 In step S105, the first head 87 of the fifth row group 110 is moved to place the measurement of the weight 21 pairs of opposing apparatus. 然后在步骤S106中,对从第五组87的第一喷头行110的液滴喷出头14 喷出的功能液41的喷出量进行调整。 Then the amount of the functional liquid discharged in step S106, the first liquid droplet from the head 87 of the fifth set of 110 rows of discharge head 14 discharge 41 is adjusted. 接着在步骤S107中确认第四组86 及第五组87的调整已经结束。 Next step S107 is confirmed in the fourth group 86 and group 87 of the fifth adjustment has ended.

接着在步骤S108中,确认第一喷头行110的液滴喷出头14的调整己经全部进行,判断是否移至第二喷头行111的液滴喷出头14的调整。 Next, at step S108, a first confirmed the droplet discharge head 110 to adjust the line head 14 has all of determining whether to move the second droplet ejection head row 111 of the adjustment head 14. 而且,反复进行步骤S102〜步骤S108,进行第二喷头行111的液滴喷出头14的调整。 Further, repeating step S102~ step S108, the head line of the second liquid droplet ejection head 111 is adjusted to 14. 此时,按照第一组83、第二组84、第三组85、第四组86、第五组87的顺序进行液滴喷出头14的调整。 At this time, according to the first group 83, a second group 84, a third group 85, the fourth group 86, a fifth sequence group is 87 to adjust the droplet discharge head 14. 接着,移至第三喷头行112, 按照同样的顺序进行从液滴喷出头14喷出的功能液41的喷出量的调整。 Next, line head 112 moved to a third, a function of adjusting the amount of discharge liquid discharged from the droplet discharge head 41 of the 14 in the same order.

而且在调整后,在步骤S109中,根据规定的描绘图案,喷出液滴44, 在基板7上进行涂覆。 And after the adjustment, in step S109, in accordance with the drawing pattern by discharging droplets of 44, is coated on the substrate 7. 涂覆预定的描绘图案,结束步骤S109,结束向基板7喷出液滴并进行涂覆的制造工序。 Drawing a predetermined pattern is applied, the end of step S109, the end of the discharge droplets onto the substrate 7 and coating the manufacturing process.

如上所述,根据本实施方式,除了第一实施方式的效果(1)〜(5) 以外,具有以下的效果。 As described above, according to the present embodiment, in addition to the effects (1) to (5) of the first embodiment has the following effects.

(1) 根据本实施方式,在属于同一行的液滴喷出头14中,在测量了位于邻近场所的液滴喷出头14的喷出量后,顺次改变行进行测量。 (1) According to the present embodiment, the droplet ejection head 14 belonging to the same row, the discharge amount was measured in places located adjacent the droplet ejection head 14, sequentially changing the measurement line. 在测量液滴喷出头14的喷出量时,在温度被管理的环境内测量液滴喷出头14。 When the discharge head 14 in measuring the amount of discharged droplets, measured in the temperature environment managed droplet discharge head 14. 此时,温度大多以大的周期变动。 At this point, most of the temperature change in a big cycle. 此时,继续对某一液滴喷出头的行内且位于附近的液滴喷出头的喷出量进行调整。 At this time, a certain row continued droplet discharge head and is located near the discharge amount of the droplet ejection head can be adjusted. 因此,同一行内邻近的液滴喷出头14可以利用大致相同温度的影响所产生的误差来调整喷出量。 Thus, in the same row adjacent to the droplet discharge head 14 can affect substantially the same temperature using an error generated by the discharge amount is adjusted.

(2) 根据本实施方式,因为同一行的相邻位置的液滴喷出头14可以利用大致相同温度的影响所产生的误差来调整喷出量,故可以调整为大致相同的喷出量。 (2) According to the present embodiment, since the same row position adjacent to the droplet ejection head 14 can affect substantially the same temperature using an error generated by the discharge amount is adjusted, it can be adjusted to substantially the same amount of discharge. 结果,在液滴喷出头14的扫描方向上可以进行涂覆,而不会形成纵线。 As a result, the scanning direction of the droplet discharge head 14 may be coated, without forming a vertical line.

(3) 根据本实施方式,在步骤S103中在对第一组83的液滴喷出头14的喷出量进行调整时,第二组84的液滴喷出头14与接下来要调整的滑架12并列配置。 (3) According to this embodiment, in step S103 in the first group 83 of the droplet discharge head 14 discharge amount is adjusted, the second set of droplet ejection heads 84 and 14 to be adjusted next The carriage 12 are arranged in parallel. 而且,接下来要测量的第五喷头列75〜第八喷头列78 以与测量时同样的顺序排列待机。 Moreover, the next head to be measured according to a fifth column 75~ eighth head row 78 are arranged to stand with the same measurement sequence. 此时,第六喷头列76及第七喷头列77 即使在待机时也被第五喷头列75及第八喷头列78夹持。 In this case, the sixth and seventh nozzle head row 76 column 77 even in the standby fifth head is also listed eighth head column 75 and holder 78. 因此,第六喷头列76及第七喷头列77可以以温度变化少的方式从待机状态移至调整工序。 Thus, the sixth and seventh nozzle head row 76 column 77 may be a small change in temperature adjustment step manner to move from the standby state. 结果,液滴喷出头14可以在温度变化少的状态下进行调整,因此可以精度优良地进行调整。 As a result, the droplet discharge head 14 can be adjusted in a low temperature state, the accuracy can be excellently adjusted.

(第十实施方式) (Tenth Embodiment)

接着,利用图15对应用上述记载的喷出方法来制造液晶显示装置的一个实施方式进行说明。 Next, FIG. 15 applying the above described method of discharging the produced liquid crystal display device according to an embodiment will be described.

首先,对作为具备滤色器的电光装置的一种的液晶显示装置进行说明。 First, the liquid crystal electro-optical device is provided as a kind of color filter of a display device will be described. 图15是表示液晶显示装置的结构的概略分解立体图。 FIG 15 is a schematic exploded perspective view showing the structure of the liquid crystal display device.

如图15所示,作为电光装置的液晶显示装置120具备透过型的液晶显示面板121、对液晶显示面板121进行照明的照明装置123。 15, the liquid crystal electro-optical device as a display apparatus 120 includes a transmission type liquid crystal display panel 121, the liquid crystal display panel 121 to illuminate the lighting device 123. 液晶显示面板121配置为以作为第一基板的元件基板124与作为第二基板的对置基板125夹持液晶122。 The liquid crystal display panel 121 is configured as an element substrate 124 as a first substrate and a second substrate 125 opposing the substrate 122 holding a liquid crystal. 而且,元件基板124中的下侧表面上配置由下偏振片126,在对置基板125中的上侧表面上配置有上偏振片127。 Further, the lower member arranged on the side surface of the substrate 124 by the lower polarizer 126, a polarizing plate 127 arranged on the upper side surface of the counter substrate 125.

元件基板124具备由具有光透过性的材料构成的基板128,基板128 的上侧形成有绝缘膜129。 Element substrate 124 includes a substrate made of a material having light transmission properties 128, 128 of the upper substrate 129 is formed with an insulating film. 在绝缘膜129上,作为电极的像素电极130形成为矩阵状,各像素电极130上形成有作为具有开关功能的半导体的TFT (Thin Film Transistor)元件131。 On the insulating film 129, the pixel electrode 130 are formed in a matrix shape, and a TFT (Thin Film Transistor) serving as a semiconductor element having a switching function 131 of each pixel electrode 130. 而且,TFT元件131的漏极端子连接有像素电极130。 Further, the drain terminal of the TFT element 131 is connected to the pixel electrode 130.

包围各像素电极130及TFT元件131且作为布线的扫描线132及作为布线的数据线133形成为格子状。 Surrounding each pixel electrode 130 and the TFT elements 131 and scanning lines 132 and the wiring line of the data lines 133 formed in a lattice shape. 而且,扫描线132与TFT元件131的栅极端子连接,数据线133与TFT元件131的源极端子连接。 Further, the scanning line 132 is connected to the gate terminal of the TFT element 131, the data line 133 connected to the source terminal of the TFT element 131.

而且,在由像素电极130、 TFT元件131、扫描线132、数据线133 等构成的元件层134的液晶122侧形成有取向膜135。 Further, an alignment film 135 is formed on the liquid crystal layer 122 side of the element by the pixel electrode 130, TFT elements 131, scan line 132, data line 133 or the like 134.

对置基板125具备由具有光透过性的材料构成的基板137。 The counter substrate 125 includes a substrate made of a material having light transmission properties 137. 在基板137 的下侧,由具有遮光性的材料构成的下层围堰138形成为格子状,下层围堰138的下侧形成有由有机化合物等构成的上层围堰139。 In the lower substrate 137, a lower layer made of a material having a light shielding property cofferdam cofferdam 138 is formed by the upper layer composed of an organic compound 139 is formed like a lattice shape under the lower side 138 of the cofferdam. 而且,由下层围堰138及下层围堰139构成隔壁部分140。 Further, the lower layer 138 and the lower cofferdam cofferdam 139 constituting the partition wall portion 140.

在被隔壁部分140划分为矩阵状的凹部中,作为着色层141,形成有红(R)、绿(G)、蓝(B)的滤色器141R、 141G、 141B。 In the partition wall portion 140 is divided into a matrix of the recess, as the coloring layer 141, formed of red (R), green (G), blue (B) color filters 141R, 141G, 141B. 而且,形成有作为覆盖隔壁部分140和滤色器141R、 141G、 141B的平坦化层的外涂层142。 Further, as the cover is formed with a partition wall portion 140 and the color filter 141R, the planarization layer 141G, 141B of the outer coating 142. 以覆盖该外涂层142的方式形成有由ITO (Indium Tin Oxide)等透明导电膜构成且作为电极的对置电极143。 To cover the overcoat layer 142 is formed with a counter electrode composed of a transparent conductive film ITO (Indium Tin Oxide) and the like as an electrode 143. 进而在对置电极143的液晶122侧形成有取向膜144。 Further alignment film 144 is formed on the counter electrode 122 side of the liquid crystal 143. 在取向膜144与取向膜135上,沟槽状的凹凸排列形成,液晶122沿凹凸排列形成。 On the alignment film 144 and the alignment film 135, arranged in groove-shaped irregularities are formed, the liquid crystal 122 are arranged along the irregularities formed.

液晶122具有以下性质,即在夹持该液晶122的像素电极130与对置电极143上施加电压,则液晶122的倾斜角度变化,通过TFT元件131 的开关动作,控制施加在液晶122上的电压,控制液晶122的倾斜角度, 按照每个像素进行使光透过或遮断光的动作。 The liquid crystal 122 has the following properties, i.e., the pixel electrode 122 sandwich the liquid crystal 130 and the voltage applied on the counter electrode 143, the inclination angle of the liquid crystal 122 changes, through the switching operation of the TFT element 131, the control voltage applied to the liquid crystal 122 controlling the inclination angle of the liquid crystal 122, the light transmitted through or operated blocking of light for each pixel. 这样,通过TFT的开关动作, 通过使液晶122作为快门动作,从而按照每个像素控制光的透过,通过使像素亮灭,从而可以显示视频。 Thus, by the switching operation of the TFT, the liquid crystal 122 by a shutter operation, thereby controlling the light transmitted through each pixel, pixel by blinking, so that the video can be displayed.

像素电极130与TFT元件131的漏极端子电连接,通过使TFT仅在一定期间内为导通状态,从而从数据线133供给的像素信号以规定的定时被提供给各像素电极130。 The pixel electrode 130 is electrically connected to the drain terminal of the TFT element 131 through the TFT to a conducting state only within a certain period, so that the pixel signals supplied from the data line 133 is supplied to each pixel electrode 130 at a predetermined timing. 这样,提供给像素电极130的规定强度的像素信号的电压电平在对置基板125的对置电极143与像素电极130之间被维持,根据像素信号的电压电平,液晶122的光透过量变化。 Thus, the voltage level supplied to the pixel signal of the predetermined intensity of the pixel electrode 130 is maintained between the counter electrode 143 pixel electrode 125 counter substrate 130, according to the light level of the pixel signal voltage, the liquid crystal 122 through the amount Variety.

照明装置123具备光源,备有可以向液晶显示面板121射出来自该光源的光的导光板或扩散板、反射板等。 The lighting device 123 includes a light source, with the liquid crystal display panel 121 can be emitted from the light guide plate or the diffusion plate, a reflection plate light from the light source and the like. 光源可以采用白色的LED、 EL、 冷阴极射线管等,在本实施方式中采用冷阴极射线管。 The light source may be used white LED, EL, cold cathode ray tube, cold cathode ray tube according to the present embodiment.

再有,下偏振片126及上偏振片127也可以组合用于改善视角依存性等的相位差薄膜等光学功能性薄膜。 Further, the polarizer 126 and the retardation film on the polarizing plate 127 and the like may also be used in combination to improve the viewing angle dependence of an optical functional film. 液晶显示面板121,作为有源元件并未限于TFT元件,也可以具有TFD (Thin Film Diode)元件,也可以是配 The liquid crystal display panel 121, elements are not limited to the TFT as an active element may have a TFD (Thin Film Diode) element, and may be equipped

置为构成像素的电极互相交叉的无源型的液晶显示装置。 It is set to a passive type liquid crystal pixel electrodes interdigitated display device.

在形成对置基板125的滤色器141R、 141G、 141B的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 In the color filter 141R is formed on the counter substrate 125, 141G, 141B in the step, using a first discharging method of the ninth embodiment to the embodiment described. 具体是,在基板137上形成下层围堰138及上层围堰139,形成隔壁部分140。 Specifically, the lower layer is formed on the substrate 138 and the upper layer banks 137 cofferdam 139, the partition wall portion 140 is formed. 隔壁部分140的形成方法是公知的,故省略说明。 The method of forming the partition wall portion 140 are well known, description thereof is omitted. 而且,通过将滤色器141R、 141G、 141B的材料溶解在溶剂中或分散在分散剂中,从而制造各种颜色的彩墨。 Further, the color filters 141R, material 141G, 141B is dissolved in a solvent or dispersed in a dispersant to produce a variety of colors of color ink. 接着,利用液晶喷出装置1或液滴喷出装置108,向被隔壁部分140包围的凹部喷出该彩墨并进行涂覆。 Next, the discharge device 1 or the liquid crystal droplet ejection apparatus 108, the color ink is ejected to a recessed portion surrounded by the partition wall portion 140 and coating. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行彩墨的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, for discharging color ink and coating. 然后,通过加热干燥所涂覆的彩墨并使之固 Then, the coated dried by heating the solid color ink and allowed to

化,从而形成滤色器141R、 141G、 141B。 , Thereby forming the color filters 141R, 141G, 141B.

进而,在对置基板125中,在外涂层142的下侧形成对置电极143的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, in the counter substrate 125, the lower side of the outer coating of the counter electrode 142 is formed in step 143 using the discharge method of the first embodiment to ninth embodiment. 具体是,通过将对置电极143的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, the counter electrode 143 by the material dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向外涂层142的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, outer surface 142 of the coating of the discharge electrode film and the liquid coating material.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成对置电极143。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the counter electrode 143.

然后,在对置基板125中,在对置电极143的下侧形成取向膜144的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Then, the counter substrate 125, the alignment film is formed on the lower side of the counter electrode 143 ejection method of the first embodiment to the ninth embodiment of the step 144 is employed. 具体是,通过将取向膜144的材料溶解在溶剂中或分散在分散剂中,从而制造取向膜的材料液体。 Specifically, the alignment film 144 by a material dissolved in a solvent or dispersed in a dispersant, to produce a liquid alignment film material. 接着,利用液滴喷出装置1或液滴喷出装置108,向对置电极143 的下侧喷出该取向膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the orientation of discharge to the lower side of the counter electrode film 143 and the liquid material is coated.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行取向膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material for the alignment films and coated. 然后,通过加热干燥所涂覆的取向膜的材料液体并使之固化,从而形成取向膜144。 Then, the liquid material is dried by heating the coated alignment film and cured, thereby forming the alignment film 144.

还有,在元件基板124的元件层134上形成扫描线132及数据线133 的布线的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, the element layer 134 is formed on the element substrate 124 of the wiring step of the scan line 132 and data line 133, a discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成布线的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, so that the wiring spaces formed a concave portion. 而且,通过将布线的材料溶解在溶剂中或分散在分散剂中,从而制造布线的材料液体。 Further, the wiring material is dissolved in a solvent or dispersed in a dispersant to produce a liquid wiring material. 接着, then,

利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该布线的材料液体并进行涂覆。 Using the droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material is ejected to the recessed portion of the wiring is formed between the coating and the cofferdam.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行布线的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, liquid wiring material discharge and coated. 然后,通过加热干燥所涂覆的布线的材料液体并使之固化,从而形成扫描线132及数据线133。 Then, by heating and drying the applied liquid material of the wiring and cured, thereby forming the scanning lines 132 and the data line 133.

进而,在元件基板124中,在元件层134上形成TFT元件131的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, the element substrate 124, is formed on the element layer 134 TFT element step 131, a discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成TFT元件131的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, TFT elements formed a concave portion 131 in place. 而且通过将硅等TFT 元件的材料溶解在溶剂中或分散在分散剂中,从而制造TFT元件的材料液体。 And passing the material such as silicon TFT element is dissolved or dispersed in a solvent in the dispersant, thereby constituting the TFT element of the liquid material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该TFT元件的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the discharge of the TFT element is formed in the concave portion between the dam material and the coating liquid.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行TFT元件的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material is coated and TFT elements. 然后,加热干燥所涂覆的TFT元件的材料液体并使之固化、结晶化。 Then, heating and drying the applied liquid material of the TFT element and cured, crystallized. 然后在离子掺杂后通过形成绝缘膜及端子,从而形成TFT元件131。 Then, after the ion doping terminal insulating film is formed, thereby forming a TFT element 131.

再有,在元件基板124中,在元件层134的表面形成像素电极130的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, in the element substrate 124, the step of forming the pixel electrode 130 in the surface of the element layer 134, using the method of discharging the first embodiment to the ninth embodiment. 具体是,通过将像素电极130的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, by the material of the pixel electrode 130 is dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向元件层134的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film is discharged to the surface of the element layer 134 and the liquid material is coated.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成像素电极130。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the pixel electrode 130.

然后,在元件基板124中,在元件层134的上侧形成取向膜135的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Then, the element substrate 124, the step of the first embodiment using the alignment films 135 ~ ejection method of the ninth embodiment is formed on the element layer 134 side. 具体是,通过将取向膜135的材料溶解在溶剂中或分散在分散剂中,从而制造取向膜的材料液体。 Specifically, the alignment film 135 by a material dissolved in a solvent or dispersed in a dispersant to produce a liquid alignment film material. 接着,利用液滴喷出装置1或液滴喷出装置108,向元件层134的上侧喷出该取向膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the discharge side of the element layer 134 onto the alignment film and the liquid coating material.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行取向膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material for the alignment films and coated. 然后,通过加热干燥所涂覆的取向膜的材料液体并使之固化,从而形成取向膜135。 Then, the liquid material is dried by heating the coated alignment film and cured, thereby forming the alignment film 135.

进而,为了使元件基板124与对置基板125夹持液晶122,在元件基板124上涂覆液晶122的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, in order to make the element substrate 124 and the counter substrate 125 sandwiching the liquid crystal 122, 124 on the element substrate in the liquid crystal coating step 122, using the discharging method of the first embodiment to ninth embodiment. 具体是,利用液滴喷出装置1或液滴喷出装置108,向取向膜135的上侧喷出该液晶的材料液体并进行涂覆。 Specifically, using a liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharged to the upper side of the liquid crystal alignment film 135 and coated.

此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 迸行液晶的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the liquid crystal into line coated.

如上所述,根据本实施方式,具有以下效果。 As described above, according to this embodiment has the following effects.

(1) 根据本实施方式,在制造滤色器141R、 141G、 141B的工序中, 通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使彩墨的喷出量精度优良的方式进行喷出、涂覆。 (1) According to the present embodiment, in the manufacture of color filters 141R, 141G, 141B of the step, the discharge method by the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be precision color ink excellent discharging way, coating. 因此,可以制造以使彩墨的涂覆量精度优良的方式被涂覆的滤色器141R、 141G、 141B。 Thus, a color filter can be manufactured so that the accuracy of color ink coating amount in an excellent manner coated 141R, 141G, 141B.

(2) 根据本实施方式,在制造取向膜I35、 144的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使取向膜的材料的喷出量精度优良的方式进行喷出、涂覆。 (2) According to the present embodiment, the alignment film manufacturing I35, step 144, by ejecting method embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be precision alignment film material excellent way discharge, coating. 因此,可以制造以使取向膜的材料的涂覆量精度优良的方式被涂覆的取向膜B5、 144。 Therefore, accuracy can be manufactured in a coating amount of the alignment film material in an excellent manner the alignment film coated B5, 144.

(3) 根据本实施方式,在涂覆液晶的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使液晶的喷出量精度优良的方式进行喷出、涂覆。 (3) According to the present embodiment, in the step of coating the liquid crystal, the method by discharging the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be excellent in the accuracy of liquid ejection manner, coating. 因此,可以制造以使液晶的涂覆量精度优良的方式被涂覆的液晶显示装置120。 Accordingly, the coated amount can be manufactured in an excellent manner the accuracy of the liquid crystal coated liquid crystal display device 120.

(4) 根据本实施方式,在制造像素电极130及对置电极143的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 (4) According to this embodiment, in the process of manufacturing the pixel electrode 130 and the counter electrode 143 by the discharge method of the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may accuracy of the electrode material excellent discharging way, coating. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的像素电极130及对置电极143。 Thus, it can be manufactured such that the coating amount of the electrode material excellent in accuracy pixel electrode 130 is coated and the counter electrode 143.

(5) 根据本实施方式,在制造扫描线132及数据线133的工序中, 通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使布线材料的喷出量精度优良的方式进行喷出、涂覆。 (5) According to the present embodiment, in the step for producing the scan line 132 and data line 133, a discharge method by the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be a wiring material excellent precision way discharge, coating. 因此,可以制造以使布线材料的涂覆量精度优良的方式被涂覆的扫描线132及数据线133。 Thus, the wiring can be manufactured with good accuracy the amount of coating material is coated manner scan lines 132 and data lines 133. (6)根据本实施方式,在制造TFT元件131的工序中,通过采用第 (6) According to the present embodiment, in the step of manufacturing the TFT element 131, through the use of

一实施方式〜第九实施方式中的喷出方法,从而可以以使半导体材料的喷出量精度优良的方式进行喷出、涂覆。 Discharging a method embodiment to the ninth embodiment, so that the discharge amount may be a semiconductor material having excellent accuracy way discharge, coating. 因此,可以制造以使半导体材料的 Thus, it is possible to manufacture the semiconductor material

涂覆量精度优良的方式被涂覆的TFT元件131。 The coating amount of precision in an excellent manner TFT element 131 is coated.

(第十一实施方式) (Eleventh Embodiment)

接着,利用图16,对应用上述记载的喷出方法制造有机EL装置的一个实施方式进行说明。 Next, FIG. 16, for applying the method of discharging according to an embodiment of manufacturing the organic EL device will be described.

首先,对作为电光装置的一种的有机EL装置进行说明。 First, an organic EL device as an electro-optical device will be described. 图16是表示有机EL装置的结构的概略分解立体图。 FIG 16 is a schematic exploded perspective view showing the structure of the organic EL device.

如图16所示,作为电光装置的有机EL装置147具备基板148。 16, the organic EL device as electro-optical device 147 includes a substrate 148. 基板148的上侧形成有绝缘膜149。 Upper substrate 148 is an insulating film 149 is formed. 在绝缘膜149上,接触电极150形成为矩阵状,在与各接触电极150邻接的场所,形成有作为具有开关功能的半导体的TFT元件151。 On the insulating film 149, the contact electrode 150 is formed in a matrix shape, with each of the contact places adjoining electrodes 150, 151 are formed with a TFT as a semiconductor element having a switching function. 而且,TFT元件151的漏极端子上连接有接触电极150。 Further, the contact electrode 150 is connected to the drain terminal of the TFT element 151.

作为布线的扫描线152及作为布线的数据线153以包围各接触电极150及TFT元件151的方式形成为格子状。 As a scanning wiring line 152 as the data lines 153 and the wiring electrode to surround the contact element 151 and TFT 150 are formed in a lattice shape. 而且,扫描线152与TFT元件151的栅极端子连接,数据线153与TFT元件151的源极端子连接。 Further, the scanning line 152 is connected to the gate terminal of the TFT element 151, the data line 153 connected to the source terminal of the TFT element 151.

并且,形成有由接触电极150、 TFT元件151、扫描线152、数据线153等构成的元件层154。 Further, there is a contact electrode element layer 150, TFT elements 151, 152 scan lines, the data lines 153 and the like 154 is formed. 元件层154的上侧形成绝缘膜155,在绝缘膜155的上侧,围堰156形成为格子状。 The upper layer member 154 is formed of an insulating film 155, the insulating film 155 on the side of the cofferdam 156 is formed in a lattice shape.

在由围堰156形成的凹状区域的各底部,形成作为电极的像素电极157,像素电极157与接触电极150电连接。 In the bottom of each recessed area 156 is formed by a cofferdam, a pixel electrode 157 as an electrode, the pixel electrode 157 is electrically connected to the contact electrode 150. 在像素电极157的上表面形成作为发光元件的空穴输送层158,在空穴输送层158的上面形成有作为发光元件的发光层159R、 159G、 159B。 Is formed on the surface of the pixel electrode 157 as a hole transporting layer, the light emitting element 158, light emitting layer 159R is formed as a light emitting element in the above hole transport layer 158, 159G, 159B. 而且,由空穴输送层158与发光层159R、 159G、 159B形成作为发光元件的功能层160。 Further, a hole transport layer 158 and the light emitting layer 159R, 159G, 159B function as a light emitting element layer 160 is formed.

发光层159R是由发出红色光的有机发光材料等构成的发光层,作为发光元件的发光层159G是由发出绿色光的有机发光材料等构成的发光层。 An organic light emitting layer 159R is a light emitting material emitting red light emitting layer composed of light emitting layer 159G as a light emitting element is an organic light emitting material emits green light emitting layer. 同样,作为发光元件的发光层159B是由发出蓝色光的有机发光材料构成的发光层。 Similarly, the light-emitting layer of the light emitting element 159B is formed of a light-emitting layer emits blue light of the organic light emitting material.

在功能层160及围堰156上侧的整个面上,形成有由具有光透过性的导电性材料等构成且作为电极的阴极161。 Cofferdam 160 and the entire surface of the upper functional layer 156 is formed is made of a conductive material having optical transparency and a cathode 161 as an electrode. 在本实施方式中,阴极161例如采用ITO。 In the present embodiment, the cathode 161 uses e.g. ITO. 在阴极161的上表面上,形成由具有光透过性的材料等构成的密封膜162,防止阴极161及功能层160被空气中的氧气氧化。 On the upper surface of the cathode 161, the sealing film 162 is formed made of a material having light transmission properties, preventing oxygen oxidation of the cathode 161 and the functional layer 160 is air. 在像素电极157与阴极161之间施加电压时,空穴输送层158仅流动空穴。 When a voltage is applied between the pixel electrode 157 and the cathode 161, a hole transport layer 158 is only the flow of holes. 而且,发光层159R、 159G、 159B具有利用从空穴输送层158供给的空穴和从阴极161供给的电子结合时的能量发光的性质。 Further, the light emitting layers 159R, 159G, 159B has a property of binding energy utilization holes supplied from the hole transport layer 158 and an electron supplied from the cathode 161 to emit light. TFT元件151 进行开关动作,控制施加在功能层160上的电压,从而控制发光层159R、 159G、 159B发出的光量。 TFT element 151 for switching operation, the control voltage applied to the functional layer 160 so as to control the light emitting layers 159R, 159G, 159B amount of light emitted. 这样,通过控制发光层159R、 159G、 159B发出的光量,从而可以按照每个像素来控制光量,通过使像素亮灭,从而可以显示视频。 Thus, by controlling the light emitting layers 159R, 159G, 159B amount of light emitted can be controlled so that the amount of light for each pixel, by blinking the pixel, the video can be displayed. 像素电极157与TFT元件151的漏极端子电连接,通过使TFT仅在一定期间为导通状态,从而从数据线153供给的像素信号以规定的定时向各像素电极157提供。 The pixel electrode 157 is electrically connected to the drain terminal of the TFT element 151, the timing of each pixel electrode through the TFT for a predetermined period of conductive state, so that the pixel signals supplied from the data line 153 to provide a predetermined 157. 这样,提供给像素电极157的规定强度的像素信号的电压电平在阴极161与像素电极157之间被维持,根据像素信号的电压电平,发光层159R、 159G、 159B发出的光量变化。 Thus, the voltage level supplied to the pixel signal of the predetermined intensity of the pixel electrode 157 is maintained between the cathode electrode 161 and the pixel 157, the pixel signal voltage levels, a light emitting layer 159R, 159G, 159B changes the amount of light emitted. 在元件层154上形成扫描线152及数据线153的布线的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 A step of wiring the scanning lines 152 and the data line 153 is formed on the element layer 154, a discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰, 使形成布线的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, so that the wiring spaces formed a concave portion. 而且通过将布线的材料溶解在溶剂中或分散在分散剂中,从而制造布线的材料液体。 But also through the wiring material is dissolved in a solvent or dispersed in a dispersant to produce a liquid wiring material. 接着,利用液滴喷出装置l或液滴喷出装置108,向形成于围堰之间的凹部喷出该布线的材料液体并进行此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行布线的材料液体的喷出并进行涂覆。 Next, the liquid droplet ejection apparatus 108 l or droplet ejection apparatus, the liquid material is ejected to the recessed portion of the wiring is formed between the dam and at this time, as in the first embodiment to the ninth embodiment a first discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, the liquid material be discharged and coated wires. 然后,通过加热干燥所涂覆的布线的材料液体并使之固化,从而形成扫描线152及数据线153。 Then, by heating and drying the applied liquid material of the wiring and cured, thereby forming the scanning lines 152 and the data line 153. 进而,在元件层154上形成TFT元件151的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, formed on the element layer 154 TFT element step 151, using the method of discharging the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰,使形成TFT元件151的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, TFT elements formed a concave portion 151 in place. 而且通过将硅等TFT元件的材料溶解在溶剂中或分散在分散剂中,从而制造TFT元件的材料液体。 And passing the material such as silicon TFT element is dissolved or dispersed in a solvent in the dispersant, thereby constituting the TFT element of the liquid material. 接着,利用液滴喷出装置1或液滴喷出装置108,向形成于围堰之间的凹部喷出该TFT元件的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the discharge of the TFT element is formed in the concave portion between the dam material and the coating liquid. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行TFT元件的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material is coated and TFT elements. 然后,加热干燥所涂覆的TFT元件的材料液体并使之固化、结晶化。 Then, heating and drying the applied liquid material of the TFT element and cured, crystallized. 然后在离子掺杂后通过形成绝缘膜及端子,从而形成TFT元件151。 Then, after the ion doping terminal insulating film is formed, thereby forming a TFT element 151. 再有,在绝缘膜155的表面形成像素电极157的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, the pixel electrode 157 is formed in the step surface of the insulating film 155, using the method of discharging the first embodiment to the ninth embodiment. 具体是,通过将像素电极157的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, the material of the pixel electrode 157 is dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着, 利用液滴喷出装置1或液滴喷出装置108,向绝缘膜155的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film is discharged to the surface of the insulating film 155 and the liquid material is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成像素电极157。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the pixel electrode 157. 然后,在像素电极157的表面形成空穴输送层158的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Then, the pixel electrode 157 is formed on the surface of the discharging method of the first embodiment to the ninth embodiment of the step 158 using the hole transport layer. 具体是,通过将作为发光元件形成材料的空穴输送层158的材料溶解在溶剂中或分散在分散剂中,从而制造空穴输送层的材料液体。 Specifically, the material of the hole transport layer material 158 is formed as a light emitting element is dissolved in a solvent or dispersed in a dispersant to produce a liquid material, the hole transport layer. 接着,利用液滴喷出装置1或液滴喷出装置108,向像素电极157的表面喷出该空穴输送层的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharge hole transport layer to the surface of the pixel electrode 157 and coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行空穴输送层的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, the liquid material is discharged, and the hole transport layer is coated. 然后,通过加热干燥所涂覆的空穴输送层的材料液体并使之固化,从而形成空穴输送层158。 Then, the liquid material is dried by heating the coated hole transport layer and cured to form a hole transport layer 158. 进而,在空穴输送层158的表面形成发光层159R、 159G、 159B的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Further, the light emitting layer 159R is formed on the surface of the hole transport layer 158, 159G, discharge method in the first embodiment to ninth embodiment employed in step 159B. 具体是,通过将作为发光元件形成材料的发光层159R、 159G、 159B的材料溶解在溶剂中或分散在分散剂中,从而制造发光层的材料液体。 Specifically, the light emitting layer 159R is formed as a light emitting material, the elements, materials, 159G, 159B is dissolved in a solvent or dispersed in a dispersant, a liquid material to produce the light emitting layer. 接着,利用液滴喷出装置1或液滴喷出装置108,向空穴输送层158的表面喷出该发光层的材料液6体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material is discharged in the light emitting layer 6 to the surface of the body 158 and the hole transport layer is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行发光层的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material is coated and the light emitting layer. 然后,通过加热干燥所涂覆的发光层的材料液体并使之固化,从而形成发光层159R、 159G、 159B。 Then, the liquid material by heating the light-emitting layer and drying the coated cured, thereby forming the light emitting layers 159R, 159G, 159B. 再有,在功能层160及围堰156的上表面形成阴极161的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, the step of forming a cathode 161 on the surface of the functional layer 160 and the cofferdam 156, the discharging method using the first embodiment to the ninth embodiment. 具体是,通过将阴极161 的材料溶解在溶剂中或分散在分散剂中,从而制造阴极的材料液体。 Specifically, the cathode 161 material was dissolved in a solvent or dispersed in a dispersant to produce a liquid cathode material. 接着, 利用液滴喷出装置1或液滴喷出装置108,向功能层160及围堰156的上表面喷出该阴极的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection device 108, is ejected onto the surface of the cathode functional layer 160 and the cofferdam 156 and the liquid material is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行阴极的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, for discharging a liquid material and a cathode coated. 然后,通过加热干燥所涂覆的阴极的材料液体并使之固化,从而形成阴极161。 Then, by heating and drying the applied liquid cathode material and cured, to form a cathode 161. 如上所述,根据本实施方式,具有以下效果。 As described above, according to this embodiment has the following effects. (1) 根据本实施方式,在制造扫描线152及数据线153的工序中, 通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使布线材料的喷出量精度优良的方式进行喷出、涂覆。 (1) According to the present embodiment, in the step for producing the scan line 152 and data line 153 by ejection method to ninth embodiment employs the first embodiment, so that the discharge amount may be a wiring material excellent precision way discharge, coating. 因此,可以制造以使布线材料的涂覆量精度优良的方式被涂覆的扫描线152及数据线153。 Thus, the wiring can be manufactured with good accuracy the amount of coating material is coated manner scan lines 152 and data lines 153. (2) 根据本实施方式,在制造TFT元件151的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使半导体材料的喷出量精度优良的方式进行喷出、涂覆。 (2) According to the present embodiment, in the step of manufacturing the TFT element 151, the discharge method by the embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be a semiconductor material having excellent precision manner spray a coating. 因此,可以制造以使半导体材料的涂覆量精度优良的方式被涂覆的TFT元件151。 Thus, it can be manufactured such that the coating amount of the semiconductor material excellent in accuracy of the TFT element 151 is coated. (3) 根据本实施方式,在制造像素电极157及阴极161的工序中, 通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 (3) According to the present embodiment, in the process of manufacturing the pixel electrode 157 and the cathode 161, by ejecting method embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be an electrode material having excellent accuracy way discharge, coating. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的像素电极157及阴极161。 Thus, it can be manufactured such that the coating amount of the electrode material excellent in accuracy pixel electrode 157 and a cathode coated 161. (4) 根据本实施方式,在制造功能层160的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使发光元件形成材料的喷出量精度优良的方式进行喷出、涂覆。 (4) According to this embodiment, in the step of producing the functional layer 160 by discharging a method to ninth embodiment employs the first embodiment, the light emitting element can be formed so that the discharge amount of the accuracy of the material excellent in a manner for discharge coating. 因此,可以制造以使发光元件形成材料的涂覆量精度优良的方式被涂覆的功能层160。 Thus, the light emitting element may be manufactured such that the functional layer 160 is formed accuracy of the amount of coating material coated in an excellent manner. (第十二实施方式) 接着,利用图17对应用上述记载的喷出方法制造表面电场显示装置的一个实施方式进行说明。 (Twelfth Embodiment) Next, application of the above described ejection method using the FIG. 17 embodiment, a surface electric field of manufacturing a display device will be described. 首先,对作为电光装置的一种的表面电场显示装置进行说明。 First, the surface electric field of the display device as one electro-optical device will be described. 图17是表示表面电场显示装置的结构的概略分解立体图。 FIG 17 is a schematic exploded perspective view showing the structure of the surface electric field display device. 如图17所示,作为电光装置的表面电场显示装置163主要由元件基板164与对置基板165构成。 As shown in FIG. 17, as the display surface electric field of the electro-optical device 163 is mainly constituted by the element substrate and the counter substrate 164 pairs 165. 而且,元件基板164具备基板166。 Further, the substrate 164 includes a substrate element 166. 基板166 之上形成有绝缘膜167。 167 is formed over the substrate 166 with an insulating film. 在绝缘膜167上,成对的大致圆形且作为电极的电子发射元件168形成为矩阵状,在一方电子发射元件168不起作用时, 另一方电子发射元件168动作。 On the insulating film 167, and a pair of substantially circular shape as an electrode when the electron emission element 168 is formed in a matrix shape, one electron emitting element 168 does not work, the other of the electron-emitting element 168 operation. 作为布线的扫描线169及作为布线的数据线170以包围各电子发射元件168的对的方式形成为格子状。 Scanning lines 169 and the wiring line of the data lines 170 so as to surround each of the electronic emission element 168 is formed in a lattice shape. 一对数据线170配置于电子发射元件168的对之间。 Pair of data lines 170 arranged between the electron-emitting element 168. 电子发射元件168被通过中心的线一分为二,电子发射元件168的一方与扫描线169连接。 Electron emitting element 168 is through the center line into two, one of the electron emitting element 168 is connected to the scanning line 169. 而且,电子发射元件168的另一方与数据线170连接。 Further, the electron-emitting element 168 and the other of the data line 170 is connected. 由该电子发射元件168、扫描线169、数据线170等构成元件层171。 Emitting element 168, the scanning lines 169, data lines 170 and the like by the electronic element layer 171. 对置基板165具备由光透过性材料构成的基板172。 Substrate, the counter substrate 165 made of a light transmissive material 172 is provided. 而且,在基板172 的下侧,形成有由光透过性材料构成且作为电极的阳极173。 Further, the lower substrate 172 is formed of a light transmissive material and configured as an anode electrode 173. 阳极173的下表面形成有作为发光元件的彩色荧光膜174,以覆盖彩色荧光膜174与阳极173的方式形成有保护膜175。 The lower surface of the anode 173 is a color fluorescent film is formed as a light emitting element 174, so as to cover the colored fluorescent film 174 and the anode 173 is formed on the protective film 175. 元件基板164与对置基板165隔着未图示的衬垫接合,元件基板164 与对置基板165之间被脱气而成为大致真空的状态。 The element substrate 164 and the counter substrate 165 via a spacer (not shown) engaging the element substrate 164 and the counter substrate is degassed 165 becomes substantially vacuum state. 在电极被一分为二的电子发射元件168中,在两个电极间施加电压时, 由于电极间的间隙变窄,故微小的电子通过两个电极间。 Is divided into two electrodes in the electron emitting element 168, a voltage is applied between the two electrodes, the gap between the electrodes is narrowed, so that electrons pass through the minute between two electrodes. 而且,通过在电子发射元件168与阳极173之间施加电压,从而在形成电场时,电磁力对通过两个电极间的电子起作用,从而电子向阳极173移动。 Further, by applying the electron emission element 168 and the voltage between the anode 173, thereby forming an electric field, an electromagnetic force between the two electrodes by an electronic function, such that movement of electrons toward the anode 173. 向阳极173移动的电子的一部分与彩色荧光膜174碰撞。 Portion 173 moves to the anode electrons collide with the fluorescent film 174 color. 彩色荧光膜174因为将电子的碰撞产生的能量转换为光而发光。 Color because the fluorescent film 174 to convert collision energy electrons generated light to emit light. 表面电场显示装置163 具备未图示的数据电压驱动电路与扫描电压驱动电路,数据电压驱动电路及扫描电压驱动电路控制施加在电子发射元件168上的电压。 The display device 163 includes a surface field (not shown) of the data voltage driver circuit and the scan voltage driving circuit, a data voltage driver circuit and the scan voltage control circuit driving voltage is applied to the electron emission element 168. 由于施加在电子发射元件168上的电压和彩色荧光膜174发出的光量存在正的相关, 故数据电压驱动电路及扫描电压驱动电路能控制彩色荧光膜174发出的光而且,数据电压驱动电路及扫描电压驱动电路通过按照每个像素控制光量,使像素亮灭,从而可以显示视频。 Since the application of the electron-emitting positively related to the amount of light voltage and the color of the fluorescent film 174 on the element 168 emits, so the data voltage driver circuit and the scan voltage drive circuit capable of controlling a light color fluorescent film 174 emitted Further, the data voltage driver circuit and the scan voltage drive circuit by controlling the amount of light for each pixel, the pixel blinking, so that the video can be displayed. 彩色荧光膜174中配置有发出红色、蓝色、绿色各种颜色光的各种颜色荧光膜,数据电压驱动电路及扫描电压驱动电路通过选择并控制所发出的光的颜色,从而可以显示彩色图像。 Colored fluorescent film 174 is arranged to emit red, blue, green fluorescent film of various colors of light of various colors, the data voltage driver circuit and the scan driving voltage and the control circuit by selecting the color of light emitted, thereby displaying a color image . 在元件层171上形成扫描线169及数椐线170的布线的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 A step of wiring lines 169 and the scanning line number noted 170 is formed on the element layer 171, a discharging method using the first embodiment to the ninth embodiment. 具体是,用绝缘膜形成围堰, 使形成布线的场所成为凹部。 Specifically, an insulating film is formed with a cofferdam, so that the wiring spaces formed a concave portion. 而且通过将布线的材料溶解在溶剂中或分散在分散剂中,从而制造布线的材料液体。 But also through the wiring material is dissolved in a solvent or dispersed in a dispersant to produce a liquid wiring material. 接着,利用液滴喷出装置l或液滴喷出装置108,向形成于围堰之间的凹部喷出该布线的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 108 l or droplet ejection apparatus, the liquid material is ejected to the recessed portion of the wiring is formed between the coating and the cofferdam. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行布线的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, liquid wiring material discharge and coated. 然后,通过加热干燥所涂覆的布线的材料液体并使之固化,从而形成扫描线169及数据线170。 Then, by heating and drying the applied liquid material of the wiring and cured, thereby forming the scanning lines 169 and the data line 170. 进而,在元件层171上形成电子发射元件168的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Further, the electron-emitting element is formed on the element layer 171 in step 168, using the discharge method of the first embodiment to ninth embodiment. 具体是,通过将电子发射元件168 中的电极的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, the electrode material of the electron emission element 168 by dissolving in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向绝缘膜167的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film is discharged to the surface of the insulating film 167 and the liquid material is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成电子发射元件168中的电极。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the electron emission electrode element 168. 然后,在基板172的表面形成阳极173的工序中采用第一实施方式〜 第九实施方式中的喷出方法。 Then, the discharge step of the method of the first embodiment, the anode 173 employed in the embodiment to ninth embodiment is formed in the surface of the substrate 172. 具体是,通过将阳极173中的电极的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Specifically, by the material of the anode electrode 173 is dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向基板172的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film 172 is discharged to the surface of the substrate material and the coating liquid. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成阳极173。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the anode 173. 进而,在阳极173的表面形成彩色荧光膜174的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Further, the surface of the anode 173 is formed of the discharging method of the first embodiment to the ninth embodiment of the process of the color fluorescent film 174 employed. 具体是,通过将作为发光元件形成材料的彩色荧光膜的材料溶解在溶剂中或分散在分散剂中,从而制造彩色荧光膜的材料液体。 Specifically, the material of the color fluorescent film is formed as a light emitting element material is dissolved in a solvent or dispersed in a dispersant, thereby producing a color fluorescent film material liquid. 接着,利用液滴喷出装置1或液滴喷出装置108,向阳极173的表面喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film 173 is discharged to the surface of the anode material and the coating liquid. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行彩色荧光膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material is a color fluorescent film, and coated. 然后,通过加热干燥所涂覆的彩色荧光膜的材料液体并使之固化,从而形成彩色荧光膜174。 Then, the liquid material is heated and dried by the applied color fluorescent film and cured, thereby forming a color fluorescent film 174. 如上所述,根据本实施方式,具有以下效果。 As described above, according to this embodiment has the following effects. (1) 根据本实施方式,在制造扫描线169及数据线170的工序中, 通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使布线材料的喷出量精度优良的方式进行喷出、涂覆。 (1) According to the present embodiment, in the step for producing the scan line 169 and data line 170, by ejecting method embodiment to ninth embodiment employs the first embodiment, so that the discharge amount may be a wiring material excellent precision way discharge, coating. 因此,可以制造以使布线材料的涂覆量精度优良的方式被涂覆的扫描线169及数据线170。 Accordingly, the coated amount can be manufactured in good precision of the wiring material coated way scanning lines 169 and the data line 170. (2) 根据本实施方式,在制造电子发射元件168及阳极173的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 (2) According to the present embodiment, in the process of manufacturing an electron-emitting element 168 and the anode 173 by ejection method to ninth embodiment employs the first embodiment, so that the discharge amount may be an excellent accuracy of the electrode material way discharge, coating. 因此,可以制造以使电极材料的涂覆量精度优良的方式被涂覆的电子发射元件168及阳极173。 Thus, the electrode can be manufactured with good accuracy the amount of coating material coated way the electron emitting element 168 and the anode 173. (3) 根据本实施方式,在制造彩色荧光膜174的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使彩色荧光膜形成材料的喷出量精度优良的方式进行喷出、涂覆。 (3) According to the present embodiment, in the step of manufacturing a color fluorescent film 174 by discharging a method to ninth embodiment employs the first embodiment, so that the discharge amount may be a fluorescent color accuracy excellent film-forming material way discharge, coating. 因此,可以制造以使彩色荧光膜形成材料的涂覆量精度优良的方式被涂覆的彩色荧光膜174。 Thus, it is possible to manufacture the color fluorescent film 174 to form a color film coating amount of the fluorescent material excellent precision coating manner. 接着,利用图18对采用上述记载的喷出方法制造等离子显示装置的一个实施方式进行说明。 Next, 18 pairs produced by the above described method for discharging using FIG plasma display apparatus according to an embodiment will be described. 首先,对作为电光装置的一种的等离子显示装置进行说明。 First, the display device as an electro-optical device of the plasma will be described. 图18是表示等离子显示装置的结构的概略分解立体图。 18 is a schematic exploded perspective view showing the structure and the like of the plasma display device. 如图18所示,作为电光装置的等离子显示装置178主要由背面板179 与前面板180构成。 18, a display device such as an ion electro-optical device 178 is mainly composed of the back plate 179 and front panel 180. 背面板179备有基板181。 Rear plate 179 with the substrate 181. 基板181的上表面形成有绝缘膜182,在绝缘膜182的上表面上,作为电极的地址电极183与绝缘膜184形成为条纹状。 Upper surface of the substrate 181 is an insulating film 182 is formed on the upper surface of the insulating film 182, the electrode 183 as the address electrode and the insulating film 184 is formed in stripes. 而且,地址电极183及绝缘膜184的上表面形成有电介质层185。 Further, address electrodes 183 and the upper surface of the insulating film 184 is formed with a dielectric layer 185 electrically. 电介质层185的上表面形成有格子状的棱186,在被棱186包围而形成的凹状区域的各底部,形成有由荧光体等形成的红色(R)、绿色(G)、蓝色(B)的作为发光元件的发光层187R、 187G、 187B。 Upper surface of the dielectric layer 185 is formed 186, the bottom of each lattice-shaped rib recessed area being surrounded by ridge 186 is formed, it is formed with red formed by the fluorescent material (R), green (G), and blue (B ) as the light emitting element emitting layers 187R, 187G, 187B. 而且,该发光层187R、 187G、 187B形成于与地址电极183对置的场所。 Further, the light emitting layers 187R, 187G, 187B and the address electrode 183 is formed on the opposite place. 前面板180具备由光透过性材料构成的基板188,基板188的下表面形成有绝缘膜189。 The front panel 180 includes a light 188, the lower surface of the substrate 188 through the substrate 189 with an insulating film of the material. 并且,绝缘膜189的下表面,在与地址电极183延伸存在的方向正交的方向上,形成有作为电极的总线电极190。 Further, the lower surface of the insulating film 189, in a direction extending perpendicular to the address electrode 183 is present, the bus electrode 190 is formed as an electrode. 在与总线电极190相邻且与发光层187R、 187G、 187B对置的场所中,形成由光透过性材料构成、矩形的作为电极的维持电极191,总线电极190与维持电极191电连接。 Adjacent to the bus electrode 190 and the light-emitting layers 187R, 187G, 187B in opposite places on the form is made of light-transmissive material, a sustain electrode, electrode 191, electrode 190 and the sustain bus electrode 191 is electrically connected to rectangular. 维持电极191的下表面形成电介质层192,总线电极190的下表面形成由非光透过性绝缘材料构成的绝缘膜193。 The lower surface of the sustain electrode 191 are formed a dielectric layer 192, the lower surface of the bus electrode 190 is formed of an insulating film 193 made of a non-light-transmissive insulating material. 而且,接合背面板179与前面板180,在背面板179与前面板180之间被脱气而成为大致真空状态后, 封入氤气等气体。 Further, the back plate 179 engages with the front panel 180, rear plate 179 between the front panel 180 is substantially the degassing vacuum state, a gas such as air enclosed emanation. 在地址电极183与维持电极191之间施加脉冲电压时,在电介质层185 与电介质层192之间产生等离子体。 When the pulse voltage is applied between the address electrode 183 and the sustain electrode 191 to generate plasma between the electrical dielectric layer 185 a dielectric layer 192. 等离子体发出紫外线,所发出的紫外线激励发光层187R、 187G、 187B所包含的荧光体,从而发出红色、绿色、 蓝色的可见光。 The plasma emits ultraviolet light, ultraviolet rays emitted from the excitation light emitting layer 187R, the phosphor 187G, 187B included, so as to emit red, green and blue visible light. 等离子显示装置178备有对施加在地址电极183与维持电极191之间的脉冲电压进行控制的驱动电路。 A plasma display device provided with a driving circuit 178 for controlling the pulse voltage is applied between the address electrode 183 and the sustain electrode 191. 该驱动电路通过控制脉冲电压的电压值与定时,从而控制每个像素发出的光量,通过使像素亮灭,从而可以显示视频。 The driving circuit and the timing control voltage value of the pulse voltage, thereby controlling the amount of light emitted from each pixel, through the pixel blinking, so that the video can be displayed. 在背面板179的绝缘膜182的表面形成地址电极183的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 Address electrodes 183 formed on a step surface of the back panel 179 of the insulating film 182, a discharging method using the first embodiment to the ninth embodiment. 具体是,在绝缘膜182上形成围堰状的绝缘膜184。 Specifically, the film-like insulating cofferdam formed in the insulating film 184 182. 接着通过将地址电极183的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Then the address electrode 183 of a material by dissolving in a solvent or dispersed in a dispersant to produce a liquid material of the electrode film. 接着,利用液滴喷出装置1或液滴喷出装置108,向由绝缘膜184形成的凹部喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film to the discharge recess formed in the insulating film 184 and the liquid material is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成地址电极183。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the address electrode 183. 在前面板180的绝缘膜189的表面形成总线电极190及维持电极191 的工序中,采用第一实施方式〜第九实施方式中的喷出方法。 The front surface of the panel 180 of the insulating film 189 to form a bus electrode 190 and the sustain electrode 191 in the step, the discharge method using the first embodiment to the ninth embodiment. 具体是,在绝缘膜189上形成围堰状的绝缘膜193。 Specifically, the film-like insulating cofferdam formed in the insulating film 193 189. 接着通过将总线电极190及维持电极191的材料溶解在溶剂中或分散在分散剂中,从而制造电极膜的材料液体。 Then the bus electrode 190 and the sustain electrode 191 by a material dissolved in a solvent or dispersed in a dispersant, thereby producing an electrode material of the liquid film. 接着,利用液滴喷出装置1或液滴喷出装置108,向由绝缘膜193 形成的凹部喷出该电极膜的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the electrode film to the discharge recess formed in the insulating film 193 and the liquid material is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后,进行电极膜的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material and the electrode coating film. 然后,通过加热干燥所涂覆的电极膜的材料液体并使之固化,从而形成总线电极190及维持电极191。 Then, the liquid material by heating the coated electrode film is dried and cured, thereby forming the bus electrodes 190 and sustain electrodes 191. 进而,在电介质层185的表面形成发光层187R、 187G、 187B的工序中采用第一实施方式〜第九实施方式中的喷出方法。 Further, the light emitting layer 187R is formed on the surface of the dielectric layer 185, 187g, discharge method in the first embodiment to ninth embodiment employed in step 187B. 具体是,通过将作为发光元件形成材料的发光层187R、 187G、 187B的材料溶解在溶剂中或分散在分散剂中,从而制造发光层的材料液体。 Specifically, the light emitting layer 187R is formed as a light emitting material, the elements, materials, 187G, 187B is dissolved in a solvent or dispersed in a dispersant, a liquid material to produce the light emitting layer. 接着,利用液滴喷出装置1 或液滴喷出装置108,向电介质层185的表面喷出该发光层的材料液体并进行涂覆。 Next, the liquid droplet ejection apparatus 1 or the droplet ejection apparatus 108, the liquid material discharged to the surface of the light emitting layer and the dielectric layer 185 is coated. 此时,以与第一实施方式〜第九实施方式中的第一喷出量调整工序及第二喷出量调整工序同样的工序,对液滴喷出头14的喷出量进行调整后, 进行发光层的材料液体的喷出并进行涂覆。 In this case, as in the first embodiment to the ninth embodiment of the first embodiment of the discharge amount adjusting step and the second step the same discharge amount adjusting step, the amount of discharge of the droplet discharge head 14 is adjusted, discharging the liquid material is coated and the light emitting layer. 然后,通过加热干燥所涂覆的发光层的材料液体并使之固化,从而形成发光层187R、 187G、 187B。 Then, the liquid material by heating the light-emitting layer and drying the coated cured, thereby forming the light emitting layers 187R, 187G, 187B. 如上所述,根据本实施方式,具有以下效果。 As described above, according to this embodiment has the following effects. (1) 根据本实施方式,在制造地址电极183、总线电极190及维持电极191的工序中,通过采用第一实施方式〜第九实施方式中的喷出方法, 从而可以以使电极材料的喷出量精度优良的方式进行喷出、涂覆。 (1) According to the present embodiment, in 183, the bus electrode 190 and the sustain electrode 191 Step address electrodes manufactured by the method for discharging to ninth embodiment employs the first embodiment, thereby to make the electrode material ejection the amount of excellent discharge precision manner, coating. 因此, 可以制造以使电极材料的涂覆量精度优良的方式被涂覆的地址电极183、 总线电极190及维持电极191。 Thus, it can be manufactured such that the coating amount of the electrode material excellent in accuracy Address coated electrode 183, the bus electrodes 190 and sustain electrodes 191. (2) 根据本实施方式,在制造发光层187R、 187G、 187B的工序中, 通过采用第一实施方式〜第九实施方式中的喷出方法,从而可以以使发光元件形成材料的喷出量精度优良的方式进行喷出、涂覆。 (2) According to this embodiment, in manufacturing the light emitting layer 187R, 187G, 187B of the step, the discharge method by the embodiment to ninth embodiment employs the first embodiment, the light emitting element can be formed so that the discharge amount of the material excellent discharge accuracy way, coating. 因此,可以制造以使发光层材料的涂覆量精度优良的方式被涂覆的发光层187R、 187G、 187B。 Thus, it can be manufactured such that the coating amount accuracy luminescent material layer excellent in light-emitting layers 187R coated, 187G, 187B. 再有,实施方式并未限于上述的实施方式,也能增加各种变更或改良。 Further, the embodiment is not limited to the above embodiments, and various modifications and improvements can be increased. 以下描述变形例。 The following description of modified embodiments. (变形例1)在上述第一实施方式中,液滴喷出装置1或液滴喷出装置108中配置有6个滑架12,各滑架12中配置有2列的6个液滴喷出头14。 (Modification 1) In the first embodiment, the droplet ejection apparatus 1 or the droplet ejection apparatus 108 is configured with six carriages 12, each carriage 12 are arranged in two droplet ejection 6 14-something. 也可以根据装置的形态来设定滑架12的个数以及各滑架12所搭载的液滴喷出头14 的个数。 May be set the number of droplets of the carriage 12 and the carriage 12 mounted on each of the ejection head 14 according to the number of the means. (变形例2)在上述第一实施方式中,对空腔40进行加压的加压机构采用压电元件43,但也可以是其他方法。 (Modification 2) In the above-described first embodiment, the cavity 40 of the pressurizing mechanism pressurizing piezoelectric element 43, but it may be other methods. 例如,也可以利用线圈与磁铁,使得振动板42变形,进行加压。 For example, the magnet coils may also be utilized, such that the vibration plate 42 deform pressurized. 另外,也可以在空腔40内配置加热布线,使功能液41所包含的气体膨胀后进行加压。 Further, the wiring may be arranged within the cavity 40 is heated, after the functional fluid 41 is pressurized gas contained in the expansion. 此外,还可利用静电的引力和排斥力使振动板42变形进行加压。 In addition, also using electrostatic attractive force and repulsive force of deformation of the vibration plate 42 is pressurized. 无论在哪种情况下,通过对属于被其他液滴喷出头列夹持的液滴喷出头列的液滴喷出头14所喷出的液滴44进行测量并进行调整,从而可以得到与上述第一实施方式同样的效果。 In either case, by the other droplet ejection heads belonging to the column clamped droplet ejection head of the droplet ejection head 14 columns of liquid droplets 44 measured and adjusted to be obtained the same effects as those of the first embodiment. (变形例3)在上述第一实施方式中,测量从喷嘴31喷出的液滴44的重量,并计算喷出量,但也可以测量喷出量的体积,从而测量喷出量。 (Modification 3) In the first embodiment, the measurement ejected from the nozzle 31 of the droplet 44 by weight, and the amount of discharge is calculated, but can also measure the volume of the discharge amount, thereby measuring the amount of discharge. 例如,也可以通过在横截面积恒定的管内存留所喷出的液滴44,通过测量管内的液体的长度,从而可以计量体积,推测喷出量。 For example, it is possible by constant cross-sectional area of ​​the tube leaving liquid droplets memory 44, through the length of the liquid in the measuring tube, it can be metered volume, estimated discharge amount. 在为挥发性高的液体的情况下, 可以在难以挥发的状态下进行计量。 In the case of highly volatile liquid can be metered at a less volatile state. (变形例4)在上述第一实施方式中,液滴喷出装置1具备12个重量测量装置21, 对从液滴喷出头14喷出的液滴44的喷出量进行测量。 (Modification 4) In the first embodiment, the droplet ejection apparatus 1 12 includes a weight measuring device 21, the amount of discharge from the droplet discharge heads 14 discharge droplets 44 are measured. 重量测量装置21 的个数并未限于12个,也可以少于12个,也可以为12个以上。 The number of the weight measuring apparatus 21 is not limited to 12, may be less than 12, it may be less than 12. 由于重量测量装置21的个数多,能够同时测量的液滴喷出头14的个数增多,故可以生产率良好地测量喷出量。 Since the number of weight measuring device 21 is large, it can measure the number of the droplet discharge head 14 is increased, it is possible to measure the discharged amount of good productivity. (变形例5)在上述第一实施方式中,在步骤S2及步骤S10的喷出前待机工序中, 将压电元件43驱动到不喷出液滴44的程度为止,从而进行暖机驱动,但也可以喷出液滴44后进行暖机驱动。 (Modification 5) In the above-described first embodiment, in the step S2 and before the step of discharging standby step S10, the piezoelectric element 43 is not driven to discharge liquid droplet 44 until the degree of warm-driven thereby, 44 may also be warmed up droplet discharge after the drive. 与不喷出液滴44时相比,喷出液滴44的方法可以在压电元件43上施加大的能量,因此可以在短时间内进行暖机驱动。 Compared to when not discharged droplet 44, the droplet discharge method 44 may be applied on a large energy in the piezoelectric element 43, can be driven in a short time to warm up. (变形例6)在上述第一实施方式中,在步骤S22的第一喷出量调整工序与步骤S24的第二喷出量调整工序这两次调整工序中,对喷出量进行了调整,但也可以以在3次以上的调整工序中进行的方式分割喷头组后进行调整。 (Modification 6) In the above-described first embodiment, the discharge amount adjusting step and the second step S24 is a step that the two adjusting step of adjusting the amount of discharge in the first discharge amount adjusting step S22, but may be performed in the above manner three times the adjustment step of adjusting the division head group. 也可以根据液滴喷出装置1所具备的重量测量装置21的个数来设计工序。 The number of weight measuring device 21 includes a device to design the step may be discharged to the drop. (变形例7)在上述第一实施方式中,1个滑架12配置6个液滴喷出头14。 (Modification 7) In the above-described first embodiment, a carriage 12 arranged six droplet discharge head 14. 不限于此,也可以在1个滑架12中搭载小于6个和6个以上的液滴喷出头14。 Not limited thereto, may be mounted on less than 12 6 or more and 6 of the droplet ejection head 14 in a carriage. 若所搭载的液滴喷出头14的个数多,则可以使一次能喷出的功能液41的量增加,因此可以生产率良好地进行涂敷。 When mounted on the number of the droplet discharge head 14 is large, the functional fluid can be discharged one can increase the amount of 41, it can be coated with high productivity. 而且,可以根据生产形态进行设定。 Further, according to the production aspect may be set. (变形例8)在上述第三实施方式中,在步骤S34及步骤S44中,将喷出次数设为100次,在步骤S37及步骤S47中将喷出次数设为1000次。 (Modification 8) In the above-described third embodiment, in step S34 and step S44, the number of discharge times is 100, the discharge step S47 and in step S37 the number of times to 1000 times. 喷出次数不限于此,也可以设定为能够精确地进行测量的次数。 The discharge times is not limited thereto, it may be set to the number of times capable of accurately measuring. 而且,由于在步骤S37 及步骤S47中进行微调整,故若次数比步骤S34及步骤S44中的喷出次数多,则能精确地进行测量,因此是优选的。 Further, since the fine adjustment in step S37 and step S47, the number of times when it is more than the number of step S34 and step S44 in the discharge, the measurement can be performed accurately, which is preferable. (变形例9)在上述第十实施方式中,液晶显示面板121内部备有滤色器141R、 141G、 141B。 (Modification 9) In the tenth embodiment, the liquid crystal inside the display panel 121 includes a color filter 141R, 141G, 141B. 滤色器141R、 141G、 141B也可以不包括在液晶显示面板121内部,而作为不同于液晶显示面板121的零件来具备。 Color filters 141R, 141G, 141B may not include the liquid crystal inside the display panel 121, and the display part 121 as different from the liquid crystal panel to have. 通过组合在检查工序中选择出的液晶显示面板121的合格品和同样在检查工序中选择出的具备滤色器的零件的合格品,从而可以提高液晶显示装置120的成品率。 By a combination selected in the inspection process of the liquid crystal display panel 121 and the same quality products selected in the inspection process includes a color filter-defective part, thereby improving the yield of the liquid crystal display device 120.

Claims (30)

1.一种喷出量测量方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、所述液滴喷出头喷出的液状体的喷出量进行测量, 该喷出量测量方法包括: 第一测量工序,排列多个所述液滴喷出头列,从所述液滴喷出头喷出所述液状体,对从所述液滴喷出头列中的、被所述液滴喷出头列夹持的所述液滴喷出头喷出的所述液状体的喷出量进行测量;和第二测量工序,在所述第一测量工序之后进行,将所述第一测量工序中未被其他的所述液滴喷出头列夹持的所述液滴喷出头用其他的所述液滴喷出头列夹持,并使其喷出所述液状体后,对从所述液滴喷出头喷出的所述液状体的喷出量进行测量。 A method of measuring the amount of discharge, and a plurality of carriages arranged in a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the liquid discharge head discharges the liquid from the was measured discharge amount, the discharge amount measuring method comprising: a first measurement step, the liquid droplet ejection heads are arranged a plurality of columns, the ejection head ejects the liquid from the droplets, from the pair said droplet ejection heads in the column, the amount of discharge of the liquid material ejection head for ejecting the droplets of the liquid droplet ejection head holding column is measured; and a second measuring step, in a step performed after the first measurement, the first measurement step is not the other droplet ejection head row holding the droplet ejection head ejecting head row with the other droplets holding, and discharging it after the liquid material, the amount of discharge of the liquid material is discharged from the liquid discharge head is measured.
2. 根据权利要求1所述的喷出量测量方法,其特征在于, 所述第一测量工序及所述第二测量工序包括:测量所述喷出量的预定的所述液滴喷出头待机的喷出前待机工序; 喷出所述液状体的测量用喷出工序;和对所喷出的所述液状体的喷出量进行测量的测量工序;在所述喷出前待机工序中,对所述液滴喷出头进行暖机驱动。 The discharge amount measuring method according to claim 1, wherein said first measuring step and said second measuring step comprises: measuring the amount of discharge of said predetermined droplet ejection head standby before discharging standby step; measured by discharging the liquid material discharge step; and a measurement step of measuring an amount of discharge of the liquid material being discharged; before the ejection step in the standby discharge head to drive the warm droplet.
3. 根据权利要求2所述的喷出量测量方法,其特征在于, 所述暖机驱动是在驱动到从所述液滴喷出头不喷出所述液状体的程度后进行暖机驱动。 3. The method of measuring the discharge amount according to claim 2, wherein said warm-driven drive is warm after the driving to such an extent from the liquid droplet discharge head discharging the liquid material is not .
4. 根据权利要求2所述的喷出量测量方法,其特征在于, 所述暖机驱动是在与所述测量用喷出工序中喷出所述液状体的场所大致相同的场所进行暖机驱动。 4 of the discharge amount measuring method according to claim 2, characterized in that the drive is warm in the warm-discharge properties measurement step of ejecting the liquid material in substantially the same place drive.
5. 根据权利要求l所述的喷出量测量方法,其特征在于, 在所述第一测量工序中,对一个滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行了测量后,对其他所述滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行测量,从而顺次对各所述滑架所搭载的预定测量的全部所述液滴喷出头的喷出量进行测量,在所述第二测量工序中,对一个滑架所搭载的所述液滴喷出头中的、 预定测量的全部所述液滴喷出头的喷出量进行了测量后,对其他所述滑架所搭载的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行测量,从而顺次对各所述滑架所搭载的预定测量的全部所述液滴喷出头的喷出量进行测量。 The discharge quantity measuring method according to claim l, wherein, in the first measurement step, the drop of a carriage mounted on all of the discharge head, a predetermined measurement after the amount of discharged liquid droplet ejection head described later were measured, the drop of the other carriage mounted on the discharge, a predetermined amount of all of the measurements of the droplet ejection head performs ejection head measurement, thereby sequentially discharging all of the liquid droplet amount of each of the predetermined measuring carriage mounted ejection head measured in the second measurement step, a carriage mounted to the after the droplet discharge, the entire amount of the liquid discharge head discharging a predetermined measuring head is measured, the other carriage mounted on the liquid discharge head, a predetermined measurement all of the discharge amount of the liquid droplet ejection head is measured, thereby sequentially discharging all of the liquid droplet amount of each of the predetermined measuring carriage mounted ejection head is measured.
6. 根据权利要求1所述的喷出量测量方法,其特征在于, 由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行,在所述第一测量工序中,对一个滑架所搭载的预定测量的所述液滴喷出头中的、 一部分所述液滴喷出头的喷出量进行了测量后,对其他所述滑架所搭载的所述液滴喷出头中的属于已经测量了喷出量的所述液滴喷出头的行的所述液滴喷出头、即位于与已经进行过测量的所述液滴喷出头接近的场所的所述液滴喷出头的喷出量进行测量,从而顺次对各所述滑架所搭载的预定测量的所述液滴喷出头的喷出量进行测量,在所述第二测量工序中,对一个滑架所搭载的预定测量的所述液滴喷出头中的、 一部分所述液滴喷出头的喷出量进行了测量后,对其他所述滑架所搭载的所述液滴喷出头中的属于已经测量了喷出量的所述液滴喷出 The discharge amount measuring method according to claim 1, wherein a plurality of said droplets of said plurality of carriages mounted on the ejection head row forming a plurality of rows of droplet ejection heads after the first measurement step, the liquid droplet of a predetermined measurement carriage mounted on the ejection head, the amount of the portion of the discharge droplet discharge head were measured, the other said carriage being mounted on the liquid discharge head have been measured belongs to the liquid discharge head of the liquid discharge amount rows ejection head, i.e. located in the measurement has been carried out the discharge amount of the discharged liquid droplet of said liquid discharge head close to the ejection head locations is measured, whereby the liquid droplet ejection head sequentially measured for each of the predetermined mounted on the carriage after measurement, the second measurement step, a carriage mounted on she said droplets predetermined measured discharge head, the discharge amount of the portion of the droplet ejection head was measured on the other carriage mounted on the liquid discharge head has been measured belongs to an amount of discharge of the droplet ejection 头的行的所述液滴喷出头、即位于与已经进行过测量的所述液滴喷出头接近的场所的所述液滴喷出头的喷出量进行测量,从而顺次对各所述滑架所搭载的预定测量的所述液滴喷出头的喷出量进行测量,反复进行所述第一测量工序与所述第二测量工序,对预定测量的全部行中的所述液滴喷出头的喷出量进行测量。 An amount of ejecting the droplets of the droplet line head ejecting heads, i.e., located in the head close to the place of the droplet has been subjected to measurement of discharge of the discharge head is measured, thereby sequentially for each measuring said predetermined amount of said discharged liquid droplet ejection heads mounted on the carriage is measured, repeating the first step and the second measuring step of measuring a predetermined measurement of all the rows in the the amount of discharge droplet ejection head is measured.
7. 根据权利要求l所述的喷出量测量方法,其特征在于, 由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行,在所述第一测量工序中,对一个滑架所搭载的预定测量的所述液滴喷出头中的、 一部分所述液滴喷出头的喷出量进行测量,在所述第二测量工序中,对位于所述第一测量工序中测量过的所述液滴喷出头附近且属于所述液滴喷出头的行的所述液滴喷出头的喷出量进行测量,反复进行所述第一测量工序与所述第二测量工序,对属于规定行的所述液滴喷出头中的、预定测量的全部所述液滴喷出头的喷出量进行测量,切换到未测量的所述液滴喷出头所属的行,反复进行所述第一测量工序与所述第二测量工序,对所述液滴喷出头的喷出量进行测量。 7. The method of claim l measured discharge amount, wherein a plurality of said plurality of droplets of the carriage mounted on columns forming ejection head according to claim droplet ejection head a plurality of rows in the first measurement step, the droplets predetermined measure of a carriage mounted on the discharge, the discharge amount of the portion of the droplet ejection head is measured header, the second measuring step of measuring the drop in the first step through the measuring head and the vicinity of the discharge part of the discharge amount of the liquid droplet discharge head discharging droplets of the head row is measured, repeating the first measurement step and second measurement step, the amount of discharge of the droplet belongs to a predetermined row discharge head, a predetermined measure of all of the droplet ejection head is measured, the switching the droplet discharge head to unmeasured belongs row, repeating the first step of measuring the second measurement step, the amount of discharge of the droplet discharge head is measured.
8. —种喷出量调整方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、所述液滴喷出头喷出的液状体的喷出量进行调整,该喷出量调整方法包括:第一测量工序,排列多个所述液滴喷出头列,从所述液滴喷出头喷出所述液状体,对从所述液滴喷出头列中的、被所述液滴喷出头列夹持的所述液滴喷出头喷出的所述液状体的喷出量进行测量;第一调整工序,对所述第一测量工序测出的所述液滴喷出头的喷出量进行调整;第二测量工序,在所述第一调整工序之后进行,将所述第一测量工序中未被其他的所述液滴喷出头列夹持的所述液滴喷出头用其他的所述液滴喷出头列夹持,并使其喷出所述液状体后,对从所述液滴喷出头喷出的所述液状体的喷出量进行测量;和第二调整工序,对在所述第二测量工序中测出的所述液滴喷出头的喷出 8. - discharge amount adjustment method kinds from the plurality of carriages are arranged, and a plurality of liquid droplet ejection heads mounted droplet ejection head of the column, the liquid discharge head discharging the liquid in the the discharge amount is adjusted, the discharge amount adjusting method comprising: a first measuring step of arranging a plurality of the liquid discharge head row discharge head discharging the liquid material from the droplets of the the the discharge amount of the liquid droplet ejection head of said column, said liquid droplet ejection head is sandwiched between the columns ejected droplet ejection head is measured; a first step of adjusting, on the the droplet discharge amount of said first measuring step of measuring the discharge head is adjusted; second measurement step, performed after said first adjusting step, the first other measurement step is not the after the drop of said liquid droplet discharge head row holding ejection head ejecting head row clamping the other of said droplets, and allowed to discharge the liquid material, for discharging from said liquid droplet and a second step of adjusting the discharge of the droplets measured in said second measurement step is ejection head; the amount of discharge of the liquid material ejection head is measured 进行调整。 To adjust.
9. 根据权利要求8所述的喷出量调整方法,其特征在于, 还包括:第一喷出量调整工序,反复进行所述第一测量工序与所述第一调整工序,以使所述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行所述第二测量工序与所述第二调整工序,以使所述喷出量接近目标喷出量。 9. The method of adjusting the discharge amount according to claim 8, characterized in that, further comprising: a first discharge amount adjusting process is repeated the first measurement step and the first adjusting step, so that the close to the target discharge amount of the discharge amount; and a second discharge amount adjusting step, the second measuring step are repeated with the second adjustment step, so that the discharge amount close to the target discharge amount.
10. 根据权利要求8所述的喷出量调整方法,其特征在于, 所述第一测量工序及所述第二测量工序包括.-测量所述喷出量的预定的所述液滴喷出头待机的喷出前待机工序;喷出所述液状体的测量用喷出工序;和对所喷出的所述液状体的喷出量进行测量的测量工序; 在所述喷出前待机工序中,对所述液滴喷出头进行暖机驱动。 10. A method of adjusting the discharge amount according to claim 8, wherein the first discharge step and the second measuring step comprises measuring the discharge amount .- measuring said predetermined droplet head standby before discharging standby step; measured by discharging the liquid material discharge step; and a measurement step of measuring an amount of discharge of the liquid material being discharged; standby in the discharge step before , the droplet ejection head of the warm-up drive.
11. 根据权利要求10所述的喷出量调整方法,其特征在于, 所述暖机驱动是在驱动到从所述液滴喷出头不喷出所述液状体的程度后进行暖机驱动。 11. The method of adjusting the discharge amount according to claim 10, wherein the warm-drive is warm to the extent of driving after the driving of the droplet discharge head from the liquid body is not discharged .
12. 根据权利要求IO所述的喷出量调整方法,其特征在于, 所述暖机驱动是在与所述测量用喷出工序中喷出所述液状体的场所大致相同的场所进行暖机驱动。 12. The method for adjusting the discharge amount of the IO of the preceding claims, characterized in that the drive is warm in the warm-discharge properties measurement step of ejecting the liquid material in substantially the same place drive.
13. 根据权利要求9所述的喷出量调整方法,其特征在于, 在所述第一喷出量调整工序中,对属于被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头、和属于未被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头所喷出的所述液状体的喷出量进行调整。 13. A method of adjusting the discharge amount according to claim 9, wherein, in said first discharge amount adjusting step, the liquid droplet ejection heads belonging to the column by the sandwiched droplet spray the said liquid droplet ejection head column head, and not belonging to the liquid discharge head of the liquid droplet ejection head column holding a column of the liquid discharge head discharged adjusting an amount of discharged body.
14. 根据权利要求8所述的喷出量调整方法,其特征在于, 在由所述第一测量工序及所述第一调整工序构成的工序、和由所述第二测量工序及所述第二调整工序构成的工序中的至少一个工序中,多次进行测量工序及调整工序,所述调整工序包括粗调整工序与微调整工序。 14. The ejection amount adjustment method according to claim 8, wherein the step constituted by the said first measuring step and a first adjusting step, and by said second step and said second measuring at least one process step is constituted of two adjustment step, measurement step and repeatedly adjusting step, the adjusting step comprises adjusting the coarse and fine adjustment step process.
15. 根据权利要求14所述的喷出量调整方法,其特征在于, 在所述粗调整工序之前进行的测量工序中喷出的所述液状体的量,比在所述微调整工序之前进行的测量工序中喷出的所述液状体的量少。 15. A method of adjusting the discharge amount according to claim 14, wherein the amount of the liquid material measuring step performed prior to said step of discharged rough adjustment than the fine adjustment is performed before the step of the small amount of liquid material is discharged in the measuring step.
16. 根据权利要求14所述的喷出量调整方法,其特征在于,在所述粗调整工序之前进行的测量工序中单位时间内从所述液滴喷出头喷出所述液状体的次数,比在所述微调整工序之前进行的测量工序中单位时间内从所述液滴喷出头喷出所述液状体的次数多。 16. A method of adjusting the discharge amount according to claim 14, wherein the number of the measuring step is performed prior to the step of rough adjustment unit time from the liquid droplet discharge head discharging the liquid material , more than the number of the measuring step is performed prior to said step of fine adjustment unit time from the liquid droplet discharge head discharging the liquid material.
17. 根据权利要求8所述的喷出量调整方法,其特征在于, 在所述第一调整工序中,对一个滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行了调整后,对其他所述滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行调整,从而顺次对各所述滑架所搭载的预定调整的全部所述液滴喷出头的喷出量进行调整,在所述第二调整工序中,对一个滑架所搭载的所述液滴喷出头中的、 预定调整的全部所述液滴喷出头的喷出量进行了调整后,对其他所述滑架所搭载的所述液滴喷出头中的、预定调整的全部所述液滴喷出头的喷出量进行调整,从而顺次对各所述滑架所搭载的预定调整的全部所述液滴喷出头的喷出量进行调整。 All of the 17 ejection amount adjustment method according to claim 8, wherein, in the first adjustment step, the drop of a carriage mounted on the ejection head, a predetermined adjustment after the amount of said discharged liquid droplet discharge head is adjusted, the other droplets of the carriage mounted on the discharge, a predetermined amount of discharge of all of the adjustment of the droplet ejection heads in the head is the adjustment to sequentially adjust the predetermined mounted on said carriage to all said discharge amount adjusting droplet discharge head, in a second adjustment step, a carriage mounted to the after the droplet discharge head, the entire amount of the liquid discharge head discharging a predetermined adjustment has been adjusted, the other carriage mounted on the liquid discharge head, a predetermined adjustment all of the discharge amount of the liquid droplet discharge head is adjusted so as to sequentially discharge a predetermined amount of adjustment of each of the carriage mounted on all of the droplet ejection head can be adjusted.
18. 根据权利要求8所述的喷出量调整方法,其特征在于, 由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行,在所述第一调整工序中,对一个滑架所搭载的预定调整的所述液滴喷出头中的、 一部分所述液滴喷出头的喷出量进行了调整后,对其他所述滑架所搭载的所述液滴喷出头中的、属于已经调整了喷出量的所述液滴喷出头的行的一部分所述液滴喷出头的喷出量进行调整,从而顺次对各所述滑架所搭载的预定调整的所述液滴喷出头的喷出量进行调整,在所述第二调整工序中,对一个滑架所搭载的预定调整的所述液滴喷出头中的、 一部分所述液滴喷出头的喷出量进行了调整后,对其他所述滑架所搭载的所述液滴喷出头中的、属于已经调整了喷出量的所述液滴喷出头的行的一部分所述液滴喷出头的喷出量进行调整,从而顺次 18. The method of adjusting the discharge amount according to claim 8, wherein a plurality of said droplets ejected by a plurality of carriages mounted on the head of the column forming a plurality of rows of the liquid droplet ejection head after the first adjustment step, the adjustment of a predetermined droplet carriage mounted on the ejection head, the ejection amount of the droplet discharge head portion has been adjusted, the other said carriage is mounted the liquid discharge head, the discharge amount has been adjusted belong to a portion of the liquid droplet ejection head of the droplet discharge amount rows ejection head be adjusted so said liquid ejection head sequentially discharge amount of each of the droplets of said predetermined adjustment carriage mounted is adjusted in the second adjustment step, for a predetermined adjustment of the carriage mounted droplet discharge after the head portion of the droplet discharge amount ejection head has been adjusted, the other droplets of the carriage mounted in the discharge head, the discharge amount has been adjusted belonging the discharge amount of the liquid discharge head part rows of the droplet discharge head is adjusted, thereby sequentially 各所述滑架所搭载的预定调整的所述液滴喷出头的喷出量进行调整,反复进行所述第一调整工序与所述第二调整工序,从而对预定调整的全部行中的所述液滴喷出头的喷出量进行调整。 The amount of liquid droplet ejection heads each ejecting a predetermined adjustment of the carriage mounted to be adjusted repeatedly adjusting said first step and said second adjustment step, so all of the rows in the predetermined adjustment the discharge amount of the droplet discharge head is adjusted.
19. 根据权利要求8所述的喷出量调整方法,其特征在于, 由多个所述滑架所搭载的多个所述液滴喷出头列形成所述液滴喷出头的多行,在所述第一调整工序中,对一个滑架所搭载的预定调整的所述液滴喷出头中的、 一部分所述液滴喷出头的喷出量进行调整,在所述第二调整工序中,对位于所述第一调整工序中调整过的所述液滴喷出头附近且属于所述液滴喷出头的行的所述液滴喷出头的喷出量进行调整,反复进行所述第一调整工序与所述第二调整工序,对属于规定行的所述液滴喷出头的喷出量进行调整,切换到未调整的所述液滴喷出头所属的行,反复进行所述第一调整工序与所述第二调整工序,对所述液滴喷出头的喷出量进行调整。 19. A method for adjusting the amount of discharge of the claim 8 characterized in that the droplets are ejected by a plurality of the plurality of carriages mounted header row forming a plurality of rows of the droplet discharge head in the first adjustment step, the adjustment of a predetermined droplet carriage mounted on the ejection head, the amount of discharge droplet ejection head portion is adjusted in the second adjusting step, the adjusted in the first adjustment step in the vicinity of the liquid discharge head and belongs to the amount of discharge of the droplet discharge head discharging droplets of the line head is adjusted, repeating the first adjusting step and said second adjustment step, the amount of discharge of the droplet ejection head row belonging to predetermined adjusted unadjusted switch to the liquid discharge line head belongs , repeating the first adjusting step and the second adjusting step, the amount of discharge of the droplet ejection head can be adjusted.
20. —种喷出量调整方法,对从在多个滑架上排列并搭载有多个液滴喷出头的液滴喷出头列的、所述液滴喷出头喷出的液状体的喷出量进行调整,该喷出量调整方法包括:第一测量工序,排列多个所述液滴喷出头列,从所述液滴喷出头喷出所述液状体,对从所述液滴喷出头列中的、被所述液滴喷出头列夹持的所述液滴喷出头喷出的所述液状体的喷出量进行测量;第一调整工序,对所述第一测量工序测出的所述液滴喷出头的喷出量进行调整;第二测量工序,在所述第一调整工序之后进行,将所述第一测量工序中未被其他的所述液滴喷出头列夹持的所述液滴喷出头用其他的所述液滴喷出头列夹持,并使其喷出所述液状体后,对从所述液滴喷出头喷出的所述液状体的喷出量进行测量;和第二调整工序,对在所述第二测量工序中测出的所述液滴喷出头的喷出 20. - discharge amount adjustment method kinds of the plurality of carriages are arranged and mounted with a plurality of droplet discharge heads droplet ejection heads column, the liquid discharge head discharging the liquid material in the discharge amount is adjusted, the discharge amount adjusting method comprising: a first measuring step of arranging a plurality of the liquid discharge head row discharge head discharging the liquid material from the droplets of the the discharge amount of the liquid material in said droplet ejection head column, is discharged head of the droplet column holding the liquid droplet discharge head discharging was measured; a first adjusting step, of their an amount of discharge of the droplet of said first measurement step of measuring an ejection head can be adjusted; second measurement step, performed after said first adjusting step, the first measuring step is not used by another the after the drop of said liquid droplet discharge head row holding ejection head ejecting head row clamping the other of said droplets, and allowed to discharge the liquid material, for discharging from said liquid droplet discharge and a second adjustment step, the droplets measured in said second measurement step is ejection head; discharge amount of the liquid material in the first discharge was measured 量进行调整; 还包括:第一喷出量调整工序,反复进行所述第一测量工序与所述第一调整工序,以使所述喷出量接近目标喷出量;和第二喷出量调整工序,反复进行所述第二测量工序与所述第二调整工序,以使所述喷出量接近目标喷出量;在所述第一喷出量调整工序中,除了属于被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头以外,还对属于未被所述液滴喷出头列夹持的所述液滴喷出头列的所述液滴喷出头所喷出的所述液状体的喷出量进行粗调整。 The amount of adjustment; further comprising: a first discharge amount adjusting step of repeating the first measurement step and the first adjusting step, so that the discharge amount close to the target discharge amount; and a second discharge amount adjusting step, repeating said second measuring step and the second adjusting step, so that the discharge amount close to the target discharge amount; the first discharge amount adjusting step, in addition to belonging to said liquid other than the droplets of the droplet droplet ejection head row holding ejection head row ejection head further ejection head row of the droplet belonging not to the liquid droplet ejection head arrays sandwiched the discharge amount of the liquid material in the liquid droplet discharge head discharging the coarse adjustment.
21. 根据权利要求20所述的喷出量调整方法,其特征在于, 在所述第一喷出量调整工序中调整为:未被所述液滴喷出头列夹持的所述液滴喷出头所喷出的所述液状体的喷出量,比被所述液滴喷出头列夹持的所述液滴喷出头所喷出的所述液状体的喷出量少。 21. The ejection amount adjustment method according to claim 20, wherein adjusting the first discharge amount adjusting step is: not to the liquid droplet ejection of the droplet head arrays sandwiched discharging a small amount of the liquid material discharge amount of the liquid material discharge head discharged than is the liquid discharge head row holding the droplet discharge head discharged.
22. 根据权利要求20所述的喷出量调整方法,其特征在于, 在所述第二测量工序中,以从被所述液滴喷出头列夹持的所述液滴喷出头喷出的所述液状体的喷出量比所述第一喷出量调整工序中设定的喷出量少的方式变更了设定后,喷出所述液状体,在所述第二调整工序中,对喷出量进行调整。 22. The ejection amount adjustment method according to claim 20, characterized in that, in the second measurement step, to the liquid discharge head row from the said droplet clamped ejection head discharge after ejection ratio of the liquid material in the first discharge amount adjustment step set discharge a small amount of mode change setting, the ejection of the liquid material, the second adjustment step , the discharge volume adjustment.
23. —种液状体的喷出方法,从液滴喷出头向工件喷出液状体,该液状体的喷出方法包括:对喷出量进行调整的喷出量调整工序;和向所述工件喷出液滴的涂敷工序;在所述喷出量调整工序中,采用权利要求8〜22中任一项所述的喷出量调整方法进行调整。 23. - kind of discharging a liquid material from the droplet discharge head discharging the liquid to the workpiece, the method of discharging the liquid material include: the amount of discharge of the discharge amount adjustment adjusting step; and to the workpiece discharging the coating step of droplets; said discharge amount adjusting step, the use as claimed in claim ejection amount adjustment method 8~22 according to any one of the adjustment.
24. —种滤色器的制造方法,包括在基板上涂敷彩墨而形成滤色器的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述彩墨。 24. The - method for producing seed color filter, comprising a step on a substrate, applying color inks to form a color filter, using the method of discharging the liquid material according to claim 23, discharged to the substrate and coating the color ink.
25. —种液晶显示装置的制造方法,包括以下工序,即在第一基板与第二基板上形成取向膜,将液晶夹持在所述第一基板与所述第二基板之间而形成所述液晶显示装置,采用权利要求23所述的液状体的喷出方法,向所述第一基板与所述第二基板中的至少一方喷出并涂敷所述取向膜的材料后,使其固化来形成所述取向膜。 25. - Method for manufacturing apparatus seed crystal display, comprising the following steps, i.e. forming an alignment film on the first and second substrates, a liquid crystal sandwiched between the first substrate and the second substrate is formed by described later, the liquid crystal display device, use claimed in claim discharging a liquid material of claim 23, discharging and coating material of the alignment film with at least one of the second substrate to the first substrate, so that cured to form the alignment film.
26. —种液晶显示装置的制造方法,包括以下工序,即在第一基板上涂敷液晶后,将所述液晶夹持在所述第一基板与第二基板之间而形成所述液晶显示装置,采用权利要求23所述的液状体的喷出方法,向所述第一基板喷出并涂敷所述液晶。 26. - Method for manufacturing apparatus seed crystal display, comprising the following steps, i.e. coating the liquid crystal on the first substrate after the liquid crystal sandwiched between the first and second substrates forming the liquid crystal display means, using the method of discharging the liquid material according to claim 23, ejected toward the first substrate and coating the liquid crystal.
27. —种电光装置的制造方法,具有在基板上涂敷发光元件形成材料后通过使其固化而形成发光元件的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述发光元件形成材料。 27. The - method of manufacturing an electro-optical device, a step of applying a light emitting element after forming the material forming the light emitting element by curing on a substrate, use as claimed in claim discharging a liquid material of claim 23 to said substrate discharging and applying the light-emitting element-forming material.
28. —种电光装置的制造方法,具有在基板上涂敷液状体的电极材料后通过使其固化而形成电极的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述液状体的所述电极材料。 28. - After step method for manufacturing an electro-optical device, an electrode material having the liquid applied on a substrate and cured to form an electrode by using a method as claimed in claim discharging the liquid material 23 to the substrate discharging and coating of the electrode material for the liquid.
29. —种电光装置的制造方法,具有在基板上涂敷液状体的布线材料后通过使其固化而形成布线的工序,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述液状体的所述布线材料。 29. The - method of manufacturing an electro-optical device, having a step after coating the wiring material is a liquid material on a substrate to form a wiring by curing using claim discharging a liquid material of claim 23 to said substrate discharging and applying the wiring material for the liquid.
30. —种电光装置的制造方法,具有以下工序,即在基板上涂敷液状体的半导体材料并使其固化后,通过进行加热来形成半导体,采用权利要求23所述的液状体的喷出方法,向所述基板喷出并涂敷所述液状体的所述半导体材料。 30. - The method for manufacturing an electro-optical apparatus, includes the steps, i.e., the coating liquid material is a semiconductor material on a substrate and after curing it, by heating the semiconductor formed using the liquid material discharged as claimed in claim 23 method, the discharge to the substrate and coated with the semiconductor material for the liquid.
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