CN101246902A - InA1N/GaN heterojunction enhancement type high electron mobility transistor structure and production method thereof - Google Patents
InA1N/GaN heterojunction enhancement type high electron mobility transistor structure and production method thereof Download PDFInfo
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Abstract
The present invention discloses an InAIN/GaN heterojunction enhanced high electron mobility transistor structure and fabricating method thereof. The steps of manufacture are: 1) epitaxial growth of 1-3 mum GaN on sapphire or SiC substrate; 2) epitaxial growth of 15-20 nm first InAlN layer on GaN, In components is 30-35%, the temperature of epitaxial growth is 800 degree C; 3) epitaxial growth of 10-15 nm second InAlN layer on first InAlN layer, In components is 10-20%, the temperature of epitaxial growth is 800 degree C; 4) active region insulation and ohm touching manufacture processed on second InAlN layer; 5) gate lithographic mask on the second InAlN layer, the second InAlN layer below the gate is removed and grooved-gate structure is formed; 6) deposition of 3-5 nm Al<SUB>2</SUB>O<SUB>3</SUB> medium layer in grating groove; 7) gate touching is produced on Al<SUB>2</SUB>O<SUB>3</SUB> medium layer and electrodes are introduced of source-drain and gate. The present invention has merits of high positive threshold, large working range of positive gate voltage and small gate leakage current, can use for enhanced high electron mobility transistor.
Description
Technical field
The invention belongs to microelectronics technology, relate to semi-conducting material, element manufacturing, a kind of structure of semiconductor device and manufacture method specifically can be used for making the High Electron Mobility Transistor of enhancement mode.
Background technology
In recent years with SiC and GaN be the 3rd bandwidth bandgap semiconductor of representative with characteristics such as its big energy gap, high breakdown electric field, high heat conductance, high saturated electrons speed and heterojunction boundary two-dimensional electron gas height, make it be subjected to extensive concern.In theory, utilize the device such as high electron mobility transistor (HEMT), LED, laser diode LD of these material to have tangible advantageous characteristic than existing device, therefore domestic and international in the last few years researcher has carried out extensive and deep research to it, and has obtained the achievement in research that attracts people's attention.
AlGaN/GaN heterojunction high electron mobility transistor (HEMT) is demonstrating advantageous advantage aspect high-temperature device and the HIGH-POWERED MICROWAVES device, and pursuit device high-frequency, high pressure, high power have attracted numerous research.In recent years, because the driving of high-voltage switch gear and high speed circuit, the GaN enhancement device becomes the another research focus of concern.Because after AlGaN/GaN heterojunction growth was finished, just there were a large amount of two-dimensional electron gas 2DEG in heterojunction boundary, after material becomes device to add minus gate voltage, 2DEG could be exhausted and make the raceway groove pinch off, promptly conventional AlGaN/GaNHEMT is a depletion device.But need enhancement device when using in fields such as digital circuit, high-voltage switch gears, guaranteeing only to add positive grid voltage just has operating current, so more and more urgent to the demand of enhancement type high electron mobility transistor.Along with gradually deeply, mainly contain the method for two kinds of making at present based on the enhancement device of AlGaN/GaN heterojunction to the research of AlGaN/GaN heterojunction.
1. adopt a part of AlGaN layer etch away the AlGaN/GaN heterojunction to make slot grid structure, utilize schottky junction that the depletion action of 2DEG is realized enhancement device.Referring to Lanford W B, Tanaka T, Otoki Y, et al, Recessed-gate enhancement-mode GaN HEMT with high threshold voltage, ElectronicsLetters, 2005,41 (7): 449～450.This method etches away a part of AlGaN layer of AlGaN/GaN heterojunction and makes slot grid structure, utilizes schottky junction that the depletion action of 2DEG is realized enhancement device, as shown in Figure 1.This method has realized that threshold voltage is the enhancement device of 0.47V.But also there is a small amount of two-dimensional electron gas in this method in the raceway groove of grid below after etching is finished the groove grid, need to exhaust these two-dimensional electron gas by the potential barrier of Schottky.Usually schottky barrier height is only about 1eV, so the device threshold voltage of producing is usually less than 0.5V, and Schottky barrier could exhaust the remaining two-dimensional electron gas in grid below fully when groove grid etching is dark, and darker groove grid are etched with and may cause damage to the carrier mobility of raceway groove.So this kind enhancement device structure is difficult to further improve the threshold voltage of forward, and the device saturation current is less, it is very big that threshold voltage is influenced by etching depth.
2. adopt the method formation AlGaN/GaN heterojunction enhancement type HEMT that grid lower zone material is injected the F ion.Referring to Wang Ruonan, Cai Yong, Tang Wilson, et al, Planar Integration of E/D-ModeAlGaN/GaN HEMTs Using Fluoride-Based Plasma Treatment, IEEE Electron DeviceLetters, 2006,27 (8): 633～635.This method is carried out the injection of F ion below the heterojunction material grid, utilize the surface negative charge that produces that two-dimensional electron gas is exhausted, and makes enhancement device, as shown in Figure 2.This kind method is made enhancement device and is caused implant damage in the process that ion injects easily, and the depletion type that this method forms is to rely on electric charge induction, and the stability problem of this depletion effect is still waiting checking.The threshold voltage that the enhancement device that the method for employing injection F ion is produced has been reported is also less than 0.5V.
The content of invention
The objective of the invention is to overcome the deficiency of above enhancement device manufacturing technology, a kind of enhancement type high electron mobility transistor device architecture and manufacture method based on the InAlN/GaN heterojunction is provided, solve the not high problem of present enhancement type high electron mobility transistor threshold voltage, to satisfy the GaN base electron device in field extensive uses such as high-voltage switch gear, digital circuits.
The object of the present invention is achieved like this:
Technical thought of the present invention is: adjust the component of In in InAlN and can adjust the energy gap of InAlN and the polarized electric field between the InAlN/GaN heterojunction, spontaneous polarization and piezoelectric polarization electric field are strengthened mutually or cancel out each other, two-dimensional electron gas that like this can the better controlled heterojunction boundary.Utilize the groove gate technique, grid below raceway groove is only opened when adding positive grid voltage, and the raceway groove of remainder remains satisfactory electrical conductivity.
Enhancement type high electron mobility transistor structure according to above-mentioned technical thought InAlN/GaN heterojunction of the present invention, comprise sapphire or SiC substrate and GaN resilient coating, wherein long respectively on the GaN resilient coating In component is arranged is that 30～35% InAlN layer and In component are 10～20% InAlN layer.
Described In component is that 10～20% InAlN layer center is provided with slot grid structure, and making the gate electrode below that the In component only be arranged is 30～35% InAlN layer, and is deposited with Al in this slot grid structure
2O
3Dielectric layer is to reduce the grid leakage current.
Described In component is that 30～35% InAlN layer thickness is 15～20nm, and the In component is that 10～20% InAlN layer thickness is 10～15nm.
Make the method for device of the present invention, comprise following process:
The first step, the GaN layer of epitaxial growth 1～3 μ m on sapphire or SiC substrate;
Second step, epitaxial growth the one InAlN layer on the GaN layer, the thickness of an InAlN layer is 15～20nm, and the In component is 30～35%, and epitaxial growth temperature is 800 ℃;
The 3rd step, epitaxial growth the 2nd InAlN layer on an InAlN layer, the thickness of the 2nd InAlN layer is 10～15nm, and the In component is 10～20%, and epitaxial growth temperature is 800 ℃;
In the 4th step, on the 2nd InAlN layer, carry out active area mesa-isolated and ohmic contact and make;
The 5th step, on the 2nd InAlN layer, carry out the grid mask, and remove the 2nd InAlN layer of grid below, form slot grid structure;
In the 6th step, deposition thickness is the Al of 3～5nm in the grid groove
2O
3Dielectric layer;
The 7th step is at Al
2O
3The grid that complete on dielectric layer contact, and to source leakage and grid extraction electrode.
The present invention has following advantage:
At first, add electric field heterojunction boundary generation two-dimensional electron gas 2DEG below grid that the forward gate voltage produces, improved the forward threshold voltage of device because this device relies on;
Secondly, because this device adopts the different InAlN structure of two-layer In component, promptly there was not two-dimensional electron gas 2DEG in the grid below after etching was removed an InAlN layer, had reduced the influence of groove grid etching depth variation to threshold voltage;
The 3rd, owing to adopt deposit Al under gate electrode
2O
3Dielectric layer has reduced the grid leakage currents, has increased the operating voltage range of positive gate voltage;
The present invention has forward threshold voltage height, forward work gate voltage height, characteristics that leakage current is little, and good application prospects is all being arranged aspect microwave power device and the High-tension Switch Devices.
Description of drawings
Fig. 1 is existing groove grid enhancement mode HEMT structural representation based on the AlGaN/GaN heterojunction;
Fig. 2 is the existing AlGaN/GaN heterojunction groove grid Enhanced Configuration schematic diagram that adopts grid lower zone F ion to inject
Fig. 3 is a structural representation of the present invention;
Fig. 4 is the energy gap comparison diagram that the present invention adopts different I n component I nAlN material and GaN material;
Fig. 5 is In of the present invention
0.1Al
0.9N/In
0.3Al
0.7N/GaN structure energy band diagram;
Fig. 6 is InAlN/GaN heterogeneous interface piezoelectric polarization electric charge σ of the present invention
PzVariation diagram with alloy compositions;
Fig. 7 is InAlN/GaN heterogeneous interface spontaneous polarization electric charge σ of the present invention
PzVariation diagram with alloy compositions;
The schematic flow sheet of Fig. 8 element manufacturing of the present invention;
Fig. 9 the present invention adopts vacuum evaporation to make the In of dielectric layer
0.1Al
0.9N/In
0.3Al
0.7N/GaN double heterojunction enhancement mode HEMT device architecture schematic diagram;
Figure 10 the present invention adopts vacuum evaporation to make the In of dielectric layer
0.15Al
0.85N/In
0.33Al
0.67N/GaN double heterojunction enhancement mode HEMT device architecture schematic diagram;
Figure 11 is that the present invention adopts atomic layer deposition to make the In of dielectric layer
0.2Al
0.8N/In
0.35Al
0.65N/GaN double heterojunction enhancement mode HEMT device architecture schematic diagram.
Embodiment
With reference to Fig. 3, device architecture of the present invention has 4 layers, and wherein, the ground floor substrate adopts sapphire or SiC substrate; The second layer is the GaN layer, and its energy gap is 3.4; The 3rd layer for the In component is an InAlN layer of 30～35%, and thickness is 15～20nm, can determine that by Fig. 4 the energy gap of this InAlN layer is approximately about 3.7～3.8eV; The 4th layer for the In component is 10～20% the 2nd InAlN layer, and thickness is 10～15nm, can be determined that by 4 figure the energy gap of an InAlN layer is approximately about 4.4～5.1eV.Energy gap between the second layer of entire device, the 3rd layer and the 4th layer increases gradually, utilize this heterojunction material structure conduction band discontinuity can form electron trap, heterojunction boundary just has highdensity two-dimensional electron gas to distribute under the polarized electric field effect like this, and this heterojunction material simulation obtains energy band diagram as shown in Figure 5.The 4th layer center is provided with slot grid structure, and making gate electrode below that the In component only be arranged is 30～35% InAlN layer, promptly the 3rd layer.As calculated when the In component is 33%, piezoelectric polarization between the second layer and the 3rd layer and spontaneous polarization field produce the opposite polarity size close, both just in time cancel out each other, analog result as shown in Figure 6 and Figure 7.Owing to do not have polarization charge between the second layer and the 3rd layer, when just having realized after the etching in the raceway groove of grid below not biasing, this does not have conduction electrons in raceway groove, but when adding positive grid voltage, there is the conduction band discontinuity between this two layers of material, under the grid electric field action, can produces electronics and form conducting channel.So this device can be realized high threshold voltage, promptly device channel could rely on the grid effect of electric field to produce two-dimensional electron gas and open raceway groove under big positive grid voltage.There is two-layer raceway groove to participate in conduction between this device grid S and the source G, also has two-layer raceway groove to participate in conduction between grid S and the leakage D.And slot grid structure makes below grid etching remove the raceway groove that the 4th layer and the 3rd bed boundary produce, and grid is only controlled the raceway groove of the second layer and the 3rd bed boundary.Before making gate electrode, be deposited with the Al of 3～5nm in the first slot grid structure
2O
3Dielectric layer is to reduce the grid leakage current.This dielectric layer can effectively prevent channel electrons and the grid intermetallic generation break-through that the 3rd layer and the 4th bed boundary produce, and reduces the grid leakage current.
With reference to Fig. 8, the process of element manufacturing of the present invention is as follows:
Example 1
One. the epitaxial growth heterojunction material
The first step, the growing GaN resilient coating.
Select for use monocrystalline sapphire to do backing material, promptly earlier at 950 ℃ of following NH at (0001) direction growing GaN resilient coating
3And H
2To sapphire substrate high temperature preliminary treatment 10min, growth 30nm low temperature nucleating layer under 520 ℃ of conditions is warmed up to 920 ℃ of thick GaN resilient coatings of growth 1 μ m more then in the mist.
Second step, epitaxial growth the one InAlN layer on the GaN layer.
After the thick GaN buffer growth of 1 μ m is finished, 800 ℃ of design temperatures, an InAlN layer of the In component 30% of growing continuously, the thickness of an InAlN layer is 20nm.
The 3rd step, epitaxial growth the 2nd InAlN layer on an InAlN layer.
After epitaxial growth is finished on the InAlN layer, 800 ℃ of design temperatures, the In component of growing continuously again on an InAlN layer is 10% the 2nd InAlN layer, the thickness of the 2nd InAlN layer is 10nm.
Two. element manufacturing
The first step, material cleans.
The heterojunction material that adopts acetone, ethanol that above-mentioned epitaxial growth is finished carries out the physics ultrasonic cleaning of the organic solvent of each 3min earlier earlier, carries out the deionized water rinsing 5min of 18.2M ohm again, uses N then
2Dry up.
Second step, the table top active area isolation
Make mask with photoresist, adopt the method for ICP dry etching, carry out the table top active area isolation.Promptly adopt the rotating speed of 2500 commentaries on classics/min earlier, the heterojunction material of above-mentioned cleaning being finished with photoresist spinner carries out whirl coating, obtains the about 2 μ m of photoresist mask thickness.Adopt Karl Suss MJB3 mask aligner to carry out the 25s exposure, form the mask graph of table top active area; Again the photoresist mask is carried out drying by the fire post bake behind the 10min at 120 ℃, guarantee that mask shelters quality; The substrate that to carry out mask then carries out the dry etching of mesa-isolated in ICP98c type inductively coupled plasma etching machine, etching depth is 200nm, and etch rate adopts lnm/s, etching bias voltage 100V, and etching gas adopts Cl
2/ Ar ratio is 3: 1, and total flow is 40sccm; Then in acetone, ethanol, respectively carry out the physics ultrasonic cleaning of the organic solvent of 3min, and, use N at last with the deionized water rinsing 5min of 18.2M ohm
2Dry up.
In the 3rd step, ohmic contact is leaked in the making source.
The heterojunction material of earlier etching being finished carries out whirl coating, adopts the rotating speed of photoresist spinner at 6000 commentaries on classics/min, obtains photoresist mask thickness 0.8 μ m; Adopt Karl Suss MJB3 mask aligner to carry out the 15s exposure again, form the source-drain area mask graph; Then the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃, and adopt vacuum evaporation apparatus that the heterojunction material of making mask is carried out the metal ohmic contact evaporation, metal is selected Ti thickness 20nm for use, Al thickness 120nm, Ni thickness 45nm, Au thickness 55nm, evaporation rate is 0.1nm/s; The evaporation of source leakage metal ohmic contact is finished laggard row and is peeled off, and obtains complete source-drain electrode; Use the RTP500 rapid thermal anneler again, at N
2Carry out the rapid thermal annealing of 30s in the atmosphere under 800 ℃, metal ohmic contact is carried out alloy.
The 4th step, groove grid etching
Adopt photoresist spinner earlier under the rotating speed of 6000 commentaries on classics/min, obtain photoresist mask thickness 0.8 μ m; Adopt KarlSuss MJB3 mask aligner to carry out the 15s exposure again, form the gate region mask graph; Then the photoresist mask is dried by the fire behind the 3min carrying out under 80 ℃ the temperature; The substrate that to make the grid mask at last carries out groove grid dry etching in ICP98c type inductively coupled plasma etching machine, etching depth 10nm, and etch rate adopts 0.1nm/s, etching bias voltage 50V, etching gas adopts Cl
2/ Ar ratio 1: 1, total flow 40sccm.
The 5th step, gate medium and grid evaporation of metal
Directly put the vacuum evaporation platform into after the substrate that etching groove grid are finished takes out from the ICP etching apparatus, carry out gate medium and grid evaporation of metals continuously, the grid mask when evaporation mask adopts groove grid etching, gate medium is selected the thick Al of 3nm for use
2O
3Medium, grid metal are selected Ni thickness 20nm for use, Au thickness 200nm, and evaporation rate is 0.1nm/s; Peel off after gate medium and grid metal continuous evaporation are finished, obtain complete medium gate electrode.
The 6th step, the making of contact conductor
Adopt photoresist spinner earlier under the rotating speed of 6000 commentaries on classics/min, obtain photoresist mask thickness 0.8 μ m; Adopt KarlSuss MJB3 mask aligner to carry out the 15s exposure again, form the contact conductor mask graph; Then the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃; Then adopt vacuum evaporation apparatus to the go between electrode metal evaporation of the substrate of making mask, metal is selected Ti thickness 20nm for use, Au thickness 200nm, and evaporation rate is 0.3nm/s; Finish laggard row in the evaporation of lead-in wire electrode metal at last and peel off, obtain complete lead-in wire electrode.
The InAlN/GaN heterojunction enhancement type high electron mobility transistor structure of making according to example 1 manufacturing process as shown in Figure 9.
Example 2
One. the epitaxial growth heterojunction material
The first step, the growing GaN resilient coating.
Select 4H SiC substrate Si face growing GaN resilient coating for use, promptly earlier at 950 ℃ of following NH
3And H
2To sapphire substrate high temperature preliminary treatment 10min, growth 30nm low temperature nucleating layer under 520 ℃ of conditions is warmed up to 920 ℃ of thick GaN resilient coatings of growth 2 μ m more then in the mist.
Second step, epitaxial growth the one InAlN layer on the GaN layer.
After the thick GaN buffer growth of 2 μ m is finished, 800 ℃ of design temperatures, an InAlN layer of the In component 33% of growing continuously, the thickness of an InAlN layer is 18nm.
The 3rd step, epitaxial growth the 2nd InAlN layer on an InAlN layer.
After epitaxial growth is finished on the InAlN layer, 800 ℃ of design temperatures, the In component of growing continuously again on an InAlN layer is 15% the 2nd InAlN layer, the thickness of the 2nd InAlN layer is 12nm.
Two. element manufacturing
The first step, material cleans.
The heterojunction material that adopts acetone, ethanol that above-mentioned epitaxial growth is finished carries out the physics ultrasonic cleaning of the organic solvent of each 3min earlier earlier, carries out the deionized water rinsing 5min of 18.2M ohm again, uses N then
2Dry up.
Second step, the table top active area isolation
Make mask with photoresist, adopt the method for ICP dry etching, carry out the table top active area isolation.Promptly adopt the rotating speed of 2500 commentaries on classics/min earlier, the heterojunction material of above-mentioned cleaning being finished with photoresist spinner carries out whirl coating, obtains the about 2 μ m of photoresist mask thickness.Adopt Karl Suss MJB3 mask aligner to carry out the 25s exposure, form the mask graph of table top active area; Again the photoresist mask is carried out drying by the fire post bake behind the 10min at 120 ℃, guarantee that mask shelters quality; The substrate that to carry out mask then carries out the dry etching of mesa-isolated in ICP98c type inductively coupled plasma etching machine, etching depth is 200nm, and etch rate adopts 1nm/s, etching bias voltage 100V, and etching gas adopts Cl
2/ Ar ratio is 3: 1, and total flow is 40sccm; Then in acetone, ethanol, respectively carry out the physics ultrasonic cleaning of the organic solvent of 3min, and, use N at last with the deionized water rinsing 5min of 18.2M ohm
2Dry up.
In the 3rd step, ohmic contact is leaked in the making source.
The heterojunction material of earlier etching being finished carries out whirl coating, adopts the rotating speed of 6000 commentaries on classics/min, obtains photoresist mask thickness 0.8 μ m with photoresist spinner; Adopt Karl Suss MJB3 mask aligner to carry out the 15s exposure again, form the source-drain area mask graph; Then the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃, and adopt vacuum evaporation apparatus that the heterojunction material of making mask is carried out the metal ohmic contact evaporation, metal is selected Ti thickness 20nm for use, Al thickness 120nm, Ni thickness 45nm, Au thickness 55nm, evaporation rate is 0.1nm/s; The evaporation of source leakage metal ohmic contact is finished laggard row and is peeled off, and obtains complete source-drain electrode; Use the RTP500 rapid thermal anneler again, at N
2Carry out the rapid thermal annealing of 30s in the atmosphere under 800 ℃, metal ohmic contact is carried out alloy.
The 4th step, groove grid etching
Adopt photoresist spinner earlier under the rotating speed of 6000 commentaries on classics/min, obtain photoresist mask thickness 0.8 μ m; Adopt KarlSuss MJB3 mask aligner to carry out the 15s exposure again, form the gate region mask graph; Then the photoresist mask is dried by the fire behind the 3min carrying out under 80 ℃ the temperature; The substrate that to make the grid mask at last carries out groove grid dry etching in ICP98c type inductively coupled plasma etching machine, etching depth 12nm, and etch rate adopts 0.1nm/s, etching bias voltage 50V, etching gas adopts Cl
2/ Ar ratio 1: 1, total flow 40sccm.
The 5th step, gate medium and grid evaporation of metal
Directly put the vacuum evaporation platform into after the substrate that etching groove grid are finished takes out from the ICP etching apparatus, carry out gate medium and grid evaporation of metals continuously, the grid mask when evaporation mask adopts groove grid etching, gate medium is selected the thick Al of 4nm for use
2O
3Medium, grid metal are selected Ni thickness 20nm for use, Au thickness 200nm, and evaporation rate is 0.1nm/s; Peel off after gate medium and grid metal continuous evaporation are finished, obtain complete medium gate electrode.
The 6th step, the making of contact conductor
Adopt photoresist spinner earlier under the rotating speed of 6000 commentaries on classics/min, obtain photoresist mask thickness 0.8 μ m; Adopt KarlSuss MJB3 mask aligner to carry out the 15s exposure again, form the contact conductor mask graph; Then the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃; Then adopt vacuum evaporation apparatus to the go between electrode metal evaporation of the substrate of making mask, metal is selected Ti thickness 20nm for use, Au thickness 200nm, and evaporation rate is 0.3nm/s; Finish laggard row in the evaporation of lead-in wire electrode metal at last and peel off, obtain complete lead-in wire electrode.
The InAlN/GaN heterojunction enhancement type high electron mobility transistor structure of making according to example 2 manufacturing process as shown in figure 10.
Example 3
One. the epitaxial growth heterojunction material
The first step, the growing GaN resilient coating.
Select 4H SiC substrate Si face growing GaN resilient coating for use, promptly earlier at 950 ℃ of following NH
3And H
2To sapphire substrate high temperature preliminary treatment 10min, growth 30nm low temperature nucleating layer under 520 ℃ of conditions is warmed up to 920 ℃ of thick GaN resilient coatings of growth 3 μ m more then in the mist.
Second step, epitaxial growth the one InAlN layer on the GaN layer.
After the thick GaN buffer growth of 3 μ m is finished, 800 ℃ of design temperatures, an InAlN layer of the In component 35% of growing continuously, the thickness of an InAlN layer is 15nm.
The 3rd step, epitaxial growth the 2nd InAlN layer on an InAlN layer.
After epitaxial growth is finished on the InAlN layer, 800 ℃ of design temperatures, the In component of growing continuously again on an InAlN layer is 20% the 2nd InAlN layer, the thickness of the 2nd InAlN layer is 15nm.
Two. element manufacturing
The first step, material cleans.
The heterojunction material that adopts acetone, ethanol that above-mentioned epitaxial growth is finished carries out the physics ultrasonic cleaning of the organic solvent of each 3min earlier earlier, carries out the deionized water rinsing 5min of 18.2M ohm again, uses N then
2Dry up.
Second step, the table top active area isolation
Make mask with photoresist, adopt the method for ICP dry etching, carry out the table top active area isolation.Promptly adopt the rotating speed of 2500 commentaries on classics/min earlier, the heterojunction material that above-mentioned cleaning is finished carries out whirl coating, obtains the about 2 μ m of photoresist mask thickness.Adopt Karl Suss MJB3 mask aligner to carry out the 25s exposure, form the mask graph of table top active area; Again the photoresist mask is carried out drying by the fire post bake behind the 10min at 120 ℃, guarantee that mask shelters quality; The substrate that to carry out mask then carries out the dry etching of mesa-isolated in ICP98c type inductively coupled plasma etching machine, etching depth is 200nm, and etch rate adopts 1nm/s, etching bias voltage 100V, and etching gas adopts Cl
2/ Ar ratio is 3: 1, and total flow is 40sccm; Then in acetone, ethanol, respectively carry out the physics ultrasonic cleaning of the organic solvent of 3min, and, use N at last with the deionized water rinsing 5min of 18.2M ohm
2Dry up.
In the 3rd step, ohmic contact is leaked in the making source.
The heterojunction material of earlier etching being finished carries out whirl coating, adopts the rotating speed of 6000 commentaries on classics/min, obtains photoresist mask thickness 0.8 μ m; Adopt Karl Suss MJB3 mask aligner to carry out the 15s exposure again, form the source-drain area mask graph; Then the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃, and adopt vacuum evaporation apparatus the heterojunction material of making mask is carried out the metal ohmic contact evaporation, metal is selected Ti thickness 20nm for use, Al thickness 120nm, Ni thickness 45nm, Au thickness 55nm, evaporation rate is 0.1nm/s; The evaporation of source leakage metal ohmic contact is finished laggard row and is peeled off, and obtains complete source-drain electrode; Use the RTP500 rapid thermal anneler again, at N
2Carry out the rapid thermal annealing of 30s in the atmosphere under 800 ℃, metal ohmic contact is carried out alloy.
The 4th step, groove grid etching
Adopt photoresist spinner earlier under the rotating speed of 6000 commentaries on classics/min, obtain photoresist mask thickness 0.8 μ m; Adopt KarlSuss MJB3 mask aligner to carry out the 15s exposure again, form the gate region mask graph; Then the photoresist mask is dried by the fire behind the 3min carrying out under 80 ℃ the temperature; The substrate that to make the grid mask at last carries out groove grid dry etching in ICP98c type inductively coupled plasma etching machine, etching depth 15nm, and etch rate adopts 0.1nm/s, etching bias voltage 50V, etching gas adopts Cl
2/ Ar ratio 1: 1, total flow 40sccm; The substrate of in acetone, ethanol groove grid etching being finished after etching is finished respectively carries out the physics ultrasonic cleaning of the organic solvent of 3min, the deionized water rinsing 5min of 18.2M ohm, last N
2Dry up.
The 5th step, the gate medium deposit
Substrate with groove grid etching is finished adopts atomic layer deposition equipment to carry out Al at whole substrate surface down at 350 ℃
2O
3Layer deposit, deposition thickness 5nm.
The 6th step, the grid evaporation of metal
Under the rotating speed of 6000 commentaries on classics/min, adopt the whirl coating platform to obtain photoresist mask thickness 0.8 μ m; Adopt Karl SussMJB3 mask aligner to carry out the 15s exposure, form the grid region mask graph, the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃; Adopt vacuum evaporation apparatus to carry out the grid evaporation of metal, the grid metal is selected Ni thickness 20nm for use, Au thickness 200nm, and evaporation rate is 0.1nm/s; Peel off after the grid evaporation of metal is finished, obtain complete gate electrode.
The 7th step, the making of contact conductor
Under the rotating speed of 6000 commentaries on classics/min, adopt the whirl coating platform to obtain m on the photoresist mask thickness 0.8; Adopt Karl SussMJB3 mask aligner to carry out the 15s exposure, form the contact conductor mask graph, and the photoresist mask is carried out drying by the fire behind the 3min at 80 ℃; Wet etching 30s leaks in the source of getting rid of Al on the metal ohmic contact in 1: 10 HF solution then
2O
3Dielectric layer; Then adopt vacuum evaporation apparatus to go between electrode metal evaporation of the substrate that erodes dielectric layer; Metal is selected Ti thickness 20nm for use, Au thickness 200nm, and evaporation rate is 0.3nm/s; The evaporation of lead-in wire electrode metal is finished laggard row and is peeled off, and obtains complete lead-in wire electrode.
The InAlN/GaN heterojunction enhancement type high electron mobility transistor structure of making according to example 3 manufacturing process as shown in figure 11.
Claims (6)
1. the enhancement type high electron mobility transistor of an InAlN/GaN heterojunction, comprise sapphire or SiC substrate and GaN resilient coating, it is characterized in that on the GaN resilient coating that long respectively the In component is arranged is that 30～35% InAlN layer and In component are 10～20% InAlN layer.
2. enhancement type high electron mobility transistor according to claim 1 is characterized in that the In component is that 10～20% InAlN layer center is provided with slot grid structure, and making the gate electrode below that the In component only be arranged is 30～35% InAlN layer.
3. enhancement type high electron mobility transistor according to claim 2 is characterized in that being deposited with in the slot grid structure Al
2O
3Dielectric layer is to reduce the grid leakage current.
4. enhancement type high electron mobility transistor according to claim 1 is characterized in that the In component is that 30～35% InAlN layer thickness is 15～20nm.
5. enhancement type high electron mobility transistor according to claim 1 is characterized in that the In component is that 10～20 InAlN layer thickness is 10～15nm.
6. method of making InAlN/GaN heterojunction enhancement type high electron mobility transistor device comprises following process:
The first step, the GaN layer of epitaxial growth 1～3 μ m on sapphire or SiC substrate;
Second step, epitaxial growth the one InAlN layer on the GaN layer, the thickness of an InAlN layer is 15～20nm, and the In component is 30～35%, and epitaxial growth temperature is 800 ℃;
The 3rd step, epitaxial growth the 2nd InAlN layer on an InAlN layer, the thickness of the 2nd InAlN layer is 10～15nm, and the In component is 10～20%, and epitaxial growth temperature is 800 ℃;
In the 4th step, on the 2nd InAlN layer, carry out active area mesa-isolated and ohmic contact and make;
The 5th step, on the 2nd InAlN layer, carry out the grid mask, and remove the 2nd InAlN layer of grid below, form slot grid structure;
In the 6th step, deposition thickness is the Al of 3～5nm in the grid groove
2O
3Dielectric layer;
The 7th step is at Al
2O
3The grid that complete on dielectric layer contact, and to source leakage and grid extraction electrode.
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